CN108394903A - 一种纳米级碳化硅微粉的制备方法 - Google Patents
一种纳米级碳化硅微粉的制备方法 Download PDFInfo
- Publication number
- CN108394903A CN108394903A CN201810366094.2A CN201810366094A CN108394903A CN 108394903 A CN108394903 A CN 108394903A CN 201810366094 A CN201810366094 A CN 201810366094A CN 108394903 A CN108394903 A CN 108394903A
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- China
- Prior art keywords
- silicon carbide
- micro mist
- carbide micro
- nanometer
- preparation
- Prior art date
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- Granted
Links
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 53
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 50
- 239000003595 mist Substances 0.000 title claims abstract description 27
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000002270 dispersing agent Substances 0.000 claims abstract description 11
- 238000005554 pickling Methods 0.000 claims abstract description 10
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000000908 ammonium hydroxide Substances 0.000 claims abstract description 5
- 239000002253 acid Substances 0.000 claims abstract description 3
- 239000002245 particle Substances 0.000 claims description 17
- 239000000843 powder Substances 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 9
- 239000007921 spray Substances 0.000 claims description 9
- 235000008331 Pinus X rigitaeda Nutrition 0.000 claims description 6
- 235000011613 Pinus brutia Nutrition 0.000 claims description 6
- 241000018646 Pinus brutia Species 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000002002 slurry Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000004115 Sodium Silicate Substances 0.000 claims description 4
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 238000011049 filling Methods 0.000 claims description 3
- 235000019580 granularity Nutrition 0.000 claims description 3
- 238000000227 grinding Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 239000004576 sand Substances 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000000375 suspending agent Substances 0.000 claims description 3
- 229910003978 SiClx Inorganic materials 0.000 claims description 2
- 235000019795 sodium metasilicate Nutrition 0.000 claims description 2
- 239000006210 lotion Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 238000010409 ironing Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000000746 purification Methods 0.000 abstract description 2
- 239000002994 raw material Substances 0.000 abstract description 2
- 238000004064 recycling Methods 0.000 abstract description 2
- 238000001694 spray drying Methods 0.000 abstract 1
- 238000011109 contamination Methods 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 210000003296 saliva Anatomy 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009967 tasteless effect Effects 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
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CN201810366094.2A CN108394903B (zh) | 2018-04-23 | 2018-04-23 | 一种纳米级碳化硅微粉的制备方法 |
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CN201810366094.2A CN108394903B (zh) | 2018-04-23 | 2018-04-23 | 一种纳米级碳化硅微粉的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN108394903A true CN108394903A (zh) | 2018-08-14 |
CN108394903B CN108394903B (zh) | 2021-04-09 |
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Family Applications (1)
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CN201810366094.2A Active CN108394903B (zh) | 2018-04-23 | 2018-04-23 | 一种纳米级碳化硅微粉的制备方法 |
Country Status (1)
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CN (1) | CN108394903B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110983446A (zh) * | 2019-12-25 | 2020-04-10 | 北京北方华创微电子装备有限公司 | 碳化硅原料加工方法 |
CN113277515A (zh) * | 2020-09-30 | 2021-08-20 | 连云港市沃鑫高新材料有限公司 | 硅晶圆切割用高纯碳化硅微粉及其制备装置、方法 |
CN113860310A (zh) * | 2021-09-27 | 2021-12-31 | 连云港市沃鑫高新材料有限公司 | 一种超细碳化硅尾料中纳米级碳化硅的提取方法 |
Citations (6)
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---|---|---|---|---|
CN1915809A (zh) * | 2006-09-07 | 2007-02-21 | 郑州华硕精密陶瓷有限公司 | 喷雾造粒制备亚微米级碳化硅微粉的方法 |
CN101659393A (zh) * | 2009-08-21 | 2010-03-03 | 江苏大学 | 一种制备纳米硅微粉的方法 |
CN103553625A (zh) * | 2013-11-16 | 2014-02-05 | 连云港龙塔研磨材料有限公司 | 碳化硅精细陶瓷用碳化硅微粉的制备方法 |
CN105269654A (zh) * | 2015-10-15 | 2016-01-27 | 宁波伏尔肯机械密封件制造有限公司 | 碳化硅反射镜的3d打印制备方法 |
CN107162000A (zh) * | 2017-07-04 | 2017-09-15 | 烟台华锐微粉有限公司 | 一种碳化硅刃料的再生方法 |
WO2017180083A1 (ru) * | 2016-04-15 | 2017-10-19 | Андрей ЦЫБА | Способ промышленного производства нанопорошков sic и нанокомпозита sio-c высокого качества и комплекс для его реализации |
-
2018
- 2018-04-23 CN CN201810366094.2A patent/CN108394903B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1915809A (zh) * | 2006-09-07 | 2007-02-21 | 郑州华硕精密陶瓷有限公司 | 喷雾造粒制备亚微米级碳化硅微粉的方法 |
CN101659393A (zh) * | 2009-08-21 | 2010-03-03 | 江苏大学 | 一种制备纳米硅微粉的方法 |
CN103553625A (zh) * | 2013-11-16 | 2014-02-05 | 连云港龙塔研磨材料有限公司 | 碳化硅精细陶瓷用碳化硅微粉的制备方法 |
CN105269654A (zh) * | 2015-10-15 | 2016-01-27 | 宁波伏尔肯机械密封件制造有限公司 | 碳化硅反射镜的3d打印制备方法 |
WO2017180083A1 (ru) * | 2016-04-15 | 2017-10-19 | Андрей ЦЫБА | Способ промышленного производства нанопорошков sic и нанокомпозита sio-c высокого качества и комплекс для его реализации |
CN107162000A (zh) * | 2017-07-04 | 2017-09-15 | 烟台华锐微粉有限公司 | 一种碳化硅刃料的再生方法 |
Non-Patent Citations (2)
Title |
---|
吴宏富 等: "《中国粉体工业通鉴》", 30 September 2008 * |
谢斌 等: ""β-SiC微粉溢流过滤分级实验研究"", 《陕西科技大学学报》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110983446A (zh) * | 2019-12-25 | 2020-04-10 | 北京北方华创微电子装备有限公司 | 碳化硅原料加工方法 |
CN113277515A (zh) * | 2020-09-30 | 2021-08-20 | 连云港市沃鑫高新材料有限公司 | 硅晶圆切割用高纯碳化硅微粉及其制备装置、方法 |
CN113277515B (zh) * | 2020-09-30 | 2024-05-28 | 连云港市沃鑫高新材料有限公司 | 硅晶圆切割用高纯碳化硅微粉及其制备装置、方法 |
CN113860310A (zh) * | 2021-09-27 | 2021-12-31 | 连云港市沃鑫高新材料有限公司 | 一种超细碳化硅尾料中纳米级碳化硅的提取方法 |
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CN108394903B (zh) | 2021-04-09 |
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Effective date of registration: 20200323 Address after: No.1 Workshop, Shandong Hongda new energy industrial park, No.1, Qingdao Road, Taocun Town, Qixia City, Yantai City, Shandong Province Applicant after: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. Address before: 264003 2nd floor west of No.18 Wentao Villa, Laishan District, Yantai City, Shandong Province Applicant before: Liu Huanxin |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20200728 Address after: 264030 West, 2nd floor, building 18, Wentao villa, Laishan District, Yantai City, Shandong Province Applicant after: Liu Huanxin Address before: No.1 Workshop, Shandong Hongda new energy industrial park, No.1, Qingdao Road, Taocun Town, Qixia City, Yantai City, Shandong Province Applicant before: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20211216 Address after: 264030 plant 1 in Shandong Hongda new energy industrial park, No. 1, Qingdao Road, Taocun Town, Qixia City, Yantai City, Shandong Province Patentee after: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. Address before: 264030 West, 2nd floor, building 18, Wentao villa, Laishan District, Yantai City, Shandong Province Patentee before: Liu Huanxin |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A preparation method of nanoscale silicon carbide micro powder Granted publication date: 20210409 Pledgee: Shandong Qixia Rural Commercial Bank Co.,Ltd. Pledgor: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. Registration number: Y2024980001722 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20210409 Pledgee: Shandong Qixia Rural Commercial Bank Co.,Ltd. Pledgor: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. Registration number: Y2024980001722 |