CN108217207B - 磁悬浮式基板传送装置 - Google Patents
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Abstract
本发明公开了磁悬浮式基板传送装置,以非接触方式运输转向架,从而最小化由于转向架和基板间的重力摩擦而产生颗粒。包括:具有在其一侧以形状开口的内部空间的截面形状且下侧安装有多个磁体的转向架;具有固定在地面的固定板以及与固定板垂直的垂直板的固定框架;一侧安装在固定框架的垂直板用以运输转向架的辊单元;一侧与设置在固定框架的垂直板上部的辊单元间隔设置,上部设置磁体,用于在转向架移动时浮动转向架的浮动单元;和设置在转向架下部且包含外周面有多个磁体的辊的驱动装置,辊单元和浮动单元以固定间隔相隔开且顺序设置在固定框架垂直板上部,辊单元和浮动单元的另一端通过转向架开口部分位于内部空间中以浮起和运送转向架。
Description
技术领域
本发明涉及磁悬浮式基板传送装置技术领域,尤其涉及一种通过转向架的非接触式传送而使得转向架与基板之间的摩擦导致的颗粒产生最小化的磁悬浮式基板传送装置。
背景技术
通常,作为传送诸如LCD(液晶显示器)基板、PDP(等离子体显示面板)基板、OLED(有机发光二极管)基板、半导体晶片、转印托盘、盒式磁带或载体等传送物体的传送***主要采用磁悬浮式传送***。
磁悬浮式传送***可以解决由于颗粒产生,摩擦、磨损导致的零部件磨损问题和噪音诱发问题,同时能够高速传送被传送物体。
磁悬浮式传送***是通过磁力悬挂和运送载有被传送物体的传送体的***,由于传送体和轨道之间没有机械接触或摩擦,因而可以实现没有能量损失和噪音,低振动,超洁净传送***。这种磁悬浮传送***可以在真空中操作,并且在对人体有危害的气体或液体中也可以操作,因此可以在许多领域中使用。
在磁悬浮传送***的情况下,存在需要诸如磁悬浮力和导向力、驱动力,通常由悬浮电磁铁提供磁悬浮力和导向力,由线性感应电动机或线性同步电动机提供驱动力。
然而,在传统的磁悬浮式传送***中,在安装诸如LCD或LED等显示产品的传送体侧设置有浮动电磁体(包括电磁铁芯和驱动线圈),因此传送体的电磁铁芯产生的热量会传递到显示产品,从而存在损坏对热敏感的显示产品的问题。
此外,随着诸如LCD、LED和OLED等显示面板的尺寸逐渐增加,用于传送这些的磁悬浮传送***的承重也逐渐增加。例如,在第八代OLED制造工序中,玻璃基板(Glass)和转印托盘的重量预计超过一吨,并且各工序的传送距离也预期会达到几十米。
基于此,电磁体的尺寸也会变大,由电磁铁产生的热量也会变得更大。然而,应用于现有磁悬浮传送***的电磁体在实现该目的方面存在限制。
发明内容
技术问题
为了改善现有技术中存在的上述问题,本发明提供了一种新型磁悬浮式基板传送装置,通过允许非接触地输送转向架而最小化由于转向架与基板之间的重力摩擦导致的颗粒产生。
用于解决问题的方案
为了实现所述目的,根据本发明的一个方面,其特征在于包括转向架20,其具有在其一侧以“ㄈ”形状开口的内部空间21的截面形状,且所述内部空间21的上表面一侧安装有第一磁体22;固定框架30,其具有固定在地面的固定板31,且从所述固定板31垂直形成的垂直板32;辊单元40,其一侧安装在固定框架30的垂直板32,两侧有第二磁体44,且贯穿所述转向架20的内部空间21;浮动单元50,其一侧与设置在所述固定框架30的垂直板32上部的所述辊单元40间隔设置,上部设置有第三磁体51,用于在所述转向架20移动时浮动所述转向架20;和驱动装置60,用于传送所述转向架20,所述辊单元40在进入由所述驱动装置60传送的所述转向架20的内部空间21时凭借与所述转向架20的第一磁体22的磁力稳定进入。
根据本发明的磁悬浮式基板传送装置,其特征在于,所述辊单元40包括:第一固定装置41;位于所述第一固定装置41的一侧,且将所述第一固定装置41可旋转地联接到所述固定框架30的垂直板32上部的接合件42;位于所述第一固定装置41另一侧,并设置在所述接合件42两侧的第一辊43;以及设置在所述第一固定装置41两侧上部的第二磁体44。
根据本发明的磁悬浮式基板传送装置,其特征在于,所述浮动单元50包括:固定在所述固定框架30的垂直板32上部的第二固定装置52;耦合到所述第二固定装置52,且在其中具有容纳空间531的框架53;以及容纳在所述框架53的所述容纳空间531中的第三磁体51。
根据本发明的磁悬浮式基板传送装置,其特征在于,所述浮动单元50的第三磁体51是从永磁体和永久磁铁中选择的任意一个。
根据本发明的磁悬浮式基板传送装置,其特征在于,所述浮动单元50还包含在所述第三磁体51为永久磁铁时用于调整第三磁体51的磁力的磁力调节单元54。
发明效果
根据本发明的磁悬浮式基板传送装置获得的有益效果是:以非接触方式运输转向架,从而最小化由于转向架和基板之间的重力摩擦而产生的颗粒。
附图说明
图1是本发明一个优选实施例的磁悬浮式基板传送装置透视图;
图2是本发明一个优选实施例的磁悬浮式基板传送装置侧视图;
图3是本发明一个优选实施例的磁悬浮式基板传送装置平面图;
图4是图2中的A-A'和B-B'的截面图;
图5是本发明一个优选实施例的磁悬浮式基板传送装置中辊单元进入转向架内部空间的过程示意图。
(符号说明)
10:磁悬浮式基板传送装置;20:转向架;21:内部空间;22:第一磁体;44:第二磁体;51:第三磁体;61:第四磁体;30:固定框架;31:固定板;32:垂直板;40:辊单元;41:第一固定装置;42:接合件;43:第一辊;50:浮动单元;52:第二固定装置;53:框架;54:磁力调节单元;60:驱动装置;62:第二辊。
具体实施方式
在下文中,将参照附图详细描述本发明的优选实施例,在图1至图5中,相同的附图标记被分配给执行相同功能的部件。另一方面,在附图和详细描述中,省略了与本发明的技术特征没有直接关联的元件的技术结构和操作的详细描述和图示,仅简要地示出或说明本发明的技术构成。
如图1至图5所示,根据本发明一个优选实施例的磁悬浮式基板传送装置10包括:转向架20,固定框架30,辊单元40,浮动单元50及驱动装置60。
转向架20与基板结合,其具有在其一侧以“ㄈ”形状开口的内部空间21的截面形状,内部空间21的上表面一侧安装有第一磁体22。此时,第一磁体22设置在固定空间21的端部,且顺序地形成S极磁体(22b)和N极磁体(22a)。
具有这种构造的转向架20形成为使得一侧朝向外侧隔开,并且基板与其内部连接。
固定框架30,包含固定在地面的固定板31,且从固定板31垂直形成的垂直板32。
辊单元40,用于使转向架20在运输过程中稳定地进入转向架20的内部空间21,其一侧安装在固定框架30的垂直板32上部。
辊单元40被定位在第一固定装置41和第一固定装置41的一侧,包含用于将第一固定装置41可旋转地连接到固定框架30的垂直板32上部的接合件42,定位在第一固定装置41的另一侧,包含以接合件42为中心分布在两侧的第一辊43及形成在第一固定装置41两侧的第二磁体44。此时,在辊单元40的接合件42和第一辊43上设置有轴承,以便旋转。
另一方面,设置在辊单元40第一固定装置41上部的第二磁体44由从N极或S极中选择的某一个形成,当S极磁体(22b)首先布置在转向架20的内部空间21时,辊单元40的第二磁体44优先形成为N极,当N极磁体(22a)首先布置在转向架20的内部空间21时,辊单元40的第二磁体44优先形成为S极。这是因为当辊单元40进入转向架20的内部空间21时,转向架20第一磁体22和辊单元40第二磁体44的牵引力使得辊单元40以接合件42为中央前侧向上倾斜的状态进入,然后通过推力恢复到初始状态以便稳定地进入。
浮动单元50,其一侧与设置在固定框架30的垂直板32上部的辊单元40间隔设置,上部设置有第三磁体51,用于在转向架20移动时浮动转向架20,包括固定在固定框架30的垂直板32上部的第二固定装置52,耦合到第二固定装置52,且在其中具有容纳空间531的框架53,以及容纳在框架53的容纳空间531中的第三磁体51。此时,浮动单元50的第三磁体51是从永磁体和永久磁铁中选择的任意一个。
而且,浮动单元50还包含在上述第三磁体51为永久磁铁时用于调整第三磁体51的磁力的磁力调节单元54。
另一方面,辊单元40和浮动单元50以固定的间隔彼此隔开并且顺序地设置在固定框架30的垂直板32上部。辊单元40和浮动单元50的另一端通过转向架20的开口部分位于内部空间21中,以浮起和运送转向架20。
根据本发明一个优选实施例的磁悬浮式基板传送装置10中,转向架20入口处设置有第一倾斜部23,用于使得转向架20在运输过程中稳定地朝向固定在固定框架30上部的辊单元40和浮动单元50移动。相应地,辊单元40的第一固定装置41两侧设置有第二倾斜部432。
驱动装置60,用于传送转向架20,如图2所示,设置在转向架20下部,且外周面包含设置有多个第四磁体61的第二辊62。此时,设置在第二辊62外周面的第四磁体61依次形成为N极和S极。
另一方面,驱动装置60不限于本发明的优选实施例,可以以各种方式传送转向架20。
如上所述,根据本发明一个优选实施例的磁悬浮式基板传送装置10,可以以非接触方式传送转向架20,从而达到最小化由于转向架20和基板之间的重力摩擦而导致的颗粒产生的的效果。
虽然根据上述说明和附图示出了根据如上所述的本发明的优选实施例的磁悬浮式基板传送装置,本领域技术人员要理解的是,凡在本发明的精神和原则之内所作的任何修改、改进等,均包含在本发明的保护范围内。
Claims (6)
1.一种磁悬浮式基板传送装置,其特征在于,所述装置包括:具有在其一侧以形状开口的内部空间(21)的截面形状,且所述内部空间(21)的上表面一侧安装有第一磁体(22)的转向架(20);
固定框架(30),具有固定在地面的固定板(31),和从所述固定板(31)垂直形成的垂直板(32);
辊单元(40),其一侧安装在固定框架(30)的垂直板(32)上部,两侧有第二磁体(44),且贯穿所述转向架(20)的内部空间(21);
浮动单元(50),其一侧与设置在所述固定框架(30)的垂直板(32)上部的所述辊单元(40)间隔设置,上部设置有第三磁体(51),用于在所述转向架(20)移动时浮动所述转向架(20);以及
驱动装置(60),用于传送所述转向架(20),
所述辊单元(40)在进入由所述驱动装置(60)传送的所述转向架(20)的内部空间(21)时凭借与所述转向架(20)的第一磁体(22)的磁力稳定进入。
2.如权利要求1所述的磁悬浮式基板传送装置,其特征在于,所述辊单元(40)包括:第一固定装置(41);
位于所述第一固定装置(41)的一侧,且将所述第一固定装置(41)可旋转地联接到所述固定框架(30)的垂直板(32)上部的接合件(42);
位于所述第一固定装置(41)另一侧,并设置在所述接合件(42)两侧的第一辊(43);以及
设置在所述第一固定装置(41)两侧上部的第二磁体(44)。
3.如权利要求1所述的磁悬浮式基板传送装置,其特征在于,所述浮动单元(50)包括:固定在所述固定框架(30)的垂直板(32)上部的第二固定装置(52);
耦合到所述第二固定装置(52),且在其中具有容纳空间(531)的框架(53);以及
容纳在所述框架(53)的所述容纳空间(531)中的第三磁体(51)。
4.如权利要求3所述的磁悬浮式基板传送装置,其特征在于,所述浮动单元(50)的第三磁体(51)是永磁体。
5.如权利要求3或4所述的磁悬浮式基板传送装置,其特征在于,所述浮动单元(50)的第三磁体(51)是永久磁铁。
6.如权利要求5所述的磁悬浮式基板传送装置,其特征在于,所述浮动单元(50)还包括:在所述第三磁体(51)为永久磁铁时用于调整第三磁体(51)的磁力的磁力调节单元(54)。
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JPS606523A (ja) * | 1983-06-25 | 1985-01-14 | Hitachi Kiden Kogyo Ltd | 無塵搬送装置 |
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JPH0762252B2 (ja) * | 1988-06-13 | 1995-07-05 | 旭硝子株式会社 | 真空処理装置 |
JPH02214463A (ja) * | 1989-02-10 | 1990-08-27 | Hitachi Kiden Kogyo Ltd | リニアモータを用いた空気浮上搬送装置における搬送路 |
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