CN107957198A - A kind of snake type graphite heater of vacuum resistance furnace - Google Patents
A kind of snake type graphite heater of vacuum resistance furnace Download PDFInfo
- Publication number
- CN107957198A CN107957198A CN201610904282.7A CN201610904282A CN107957198A CN 107957198 A CN107957198 A CN 107957198A CN 201610904282 A CN201610904282 A CN 201610904282A CN 107957198 A CN107957198 A CN 107957198A
- Authority
- CN
- China
- Prior art keywords
- heater
- resistance furnace
- carbon
- graphite
- vacuum resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
Abstract
The purpose of the present invention is improve the uniformity of vacuum resistance furnace heating-up temperature, take into account stability and reliability at the same time, propose a kind of snake type graphite heater of vacuum resistance furnace, it includes inner ring heater, outer shroud heater, graphite electrode, carbon carbon lifting screw, the component such as supporting plate, boron nitride insulating part forms.It tentatively ensures the uniform of warming temperature from the symmetry of geometric shape.Secondly, the present invention is distributed by the rational power of inner ring and outer rings heater, and by the independent temperature control of temperature element, is eliminated from system due to non-uniform temperature caused by installation or fault in material.Finally, the present invention lifts screw by carbon carbon and boron nitride insulating part ensures the job stability of heater.
Description
Technical field
The invention belongs to vacuum resistance furnace technical field, is related to the heater designing technique of vacuum resistance furnace, is particularly snake
The graphite heater design production of type.
Background technology
Vacuum resistance furnace can realize that the almost all such as quenching, tempering, annealing, carburizing, nitridation, metallic cementation are heat-treated work
Skill.Can also carry out air quenching, oil quenching, salt made from earth containing a comparatively high percentage of sodium chloride quench, the burning of water quenching and high melting point metal materials, super hard tool and powdered metallurgical material
Knot, stainless steel, the soldering of high temperature alloy, the kinds of processes such as crimping, polycrystalline silicon smelting.
In work, resistance heater produces heat after by electric current.Under vacuum conditions, heater mainly passes through hot spoke
The mode penetrated transfers heat to heated object.The speed of heating object heating depends primarily upon the power of heater,
The conditions such as the distance and heat-insulating property of heater and heating object.The uniformity of heating object surface temperature depends primarily upon
The shape of heater and arrangement etc..
Graphite is easily worked, density is low, the advantages such as cost is low, market due to not declining with high temperature resistant, high temperature strength
Upper more than 80% high temperature（More than 2000 DEG C）Resistance-type vacuum drying oven all selects graphite material being processed into heater, and composition adds
Hot device.Graphite heater in vacuum resistance furnace mainly has rod（Pipe）Shape and plate（Piece）Two kinds of shape, can also will in the small-sized type of furnace
The heater that monoblock graphitized mesophase hollow out is made of one.In but into Large Furnace, it is subject to the reasons such as graphite raw material size and cost
Limitation, be generally also machined to graphite rod or graphite cake, a set of heater be spliced into using graphite screws and graphite connecting plate.
The quality of graphite heater design or not directly determine the performance of vacuum resistance furnace apparatus.
The content of the invention
The purpose of the present invention is improving the uniformity of vacuum resistance furnace heating-up temperature, while stability and reliability are taken into account,
Propose a kind of snake type graphite heater of vacuum resistance furnace.
The snake type graphite heater of the vacuum resistance furnace of the present invention uses following technical proposals, it is heated including inner ring
The component compositions such as device, outer shroud heater, graphite electrode, carbon carbon lifting screw, supporting plate, boron nitride insulating part.
The design procedure of the present invention is as follows：
Step 1, calculate resistance
Heat release formula, insulating layer pyroconductivity, heat radiation formula or empirical equation, which are inhaled, using heating object sets vacuum resistance furnace
General power WAlways, and utilize formula
RPhase=WPhase/IPhase 2, and RPhase=WPhase×UPhase 2To determine graphite resistance rate.
Wherein, U is generally required in vacuum drying ovenPhase75 volts of ＜, IPhase3000 amperes of ＜.To reduce dirt of the heating power supply to power grid
Dye, it is desirable to which heater is evenly distributed with for three-phase, i.e. WPhase=WAlways/3。
Step 2, determine graphite heater width and thickness
Consider the size of heating object and furnace body, and utilize formula：
R=ρL/(a×b),
Wherein, ρ is graphite resistance rate, and L is length, and a, b are respectively the length and width of graphite cross section.
The size and cost of graphite raw material are considered at the same time, determine the cross sectional dimensions and total length of heater.
Step 3, the arrangement of heater and connection
It can tentatively ensure the uniform of heating from the symmetry of geometric shape, so heater circumferencial direction is uniform from inside to outside
Distribution, and it is divided into three-phase, per the sector region for mutually occupying 120 degree.Further, since heating chamber periphery, there are cold-zone, heat loss is big,
Easily there is the problem of poor temperature uniformity, so will separately be divided into two parts, i.e. inner ring heater and outer shroud again per heat phase device
Heater, respectively by temperature element thermometric, and independent temperature control.The power designs of outer shroud heater are 1.2 times of inner ring heater.
Every heater is processed into " snakelike " from inside to outside, and both ends are guided on stove external heat power supply by graphite electrode.If heater is in stove
Above body, then some hanging apparatus are set in the middle part of snakelike heater, are made of carbon carbon material screw and boron nitride insulating part；If
Heater then sets some support devices below furnace body in the middle part of snakelike heater, exhausted by carbon carbon material screw and boron nitride
Edge part forms.
Brief description of the drawings
Fig. 1 is a kind of top view of the snake type graphite heater of vacuum resistance furnace, and 3rd area are symmetrical, the heating of 1- inner ring
Device, 2- outer shroud heaters, one inner ring of 3- electrode interfaces, two inner ring of 4- electrode interfaces, one outer shroud of 5- electrode interfaces, 6- electrode interfaces
Two outer shrouds, 7- hanging apparatus, 8- connection sheets.
Fig. 2 be the present invention side view, 9- graphite electrodes, 10- carbon carbon lifting screw, the snakelike heaters of 11-, 12- nitridation
Boron insulating part, 13- graphite supporting plates, 14- graphite screws.
Embodiment
A kind of snake type graphite heater of vacuum resistance furnace includes inner ring heater 1, outer shroud heater 2, electrode interface
One inner ring 3, two inner ring 4 of electrode interface, one outer shroud 5 of electrode interface, two outer shroud 6 of electrode interface, hanging apparatus 7, connection sheet 8, stone
Electrode ink 9, carbon carbon lifting screw 10, snakelike heater 11, boron nitride insulating part 12, graphite supporting plate 13, graphite screws 14 form.
Heater is circumferentially divided into three parts, respectively accounts for the sector of 120 degree of circumferencial direction, and each area is symmetrical with respect to the center of circle.Inner ring heats
Device 1 is connected by one inner ring 3 of electrode interface, two inner ring 4 of electrode interface with graphite electrode 9, and through heating chamber insulating layer with drawing
Electrode connects, and is ultimately attached to the both ends of one phase of low-voltage alternating current power supply.Outer shroud heater 2 passes through one outer shroud 5 of electrode interface, electricity
Interface two outer shroud 6 in pole is connected with another graphite electrode 9, and is connected through heating chamber insulating layer with drawing electrode, is finally connected
It is connected to the both ends of one phase of low-voltage alternating current power supply.Restricted be subject to graphite raw material size, heater can be divided into multistage, in Fig. 1
Connection sheet 8, is that outer shroud heater 2 is divided to for the junction after two sections of manufacture processing.Hanging apparatus 7, in the visible Fig. 2 of concrete composition
Carbon carbon lifts screw 10, boron nitride insulating part 12, graphite supporting plate 13, graphite screws 14.Carbon carbon lifting screw 10 has higher
Tension and compression strength, its one end are connected on the shell outside heating chamber insulating layer, and the other end is used to lift or support to add
Hot device.Carbon carbon lifting screw 10 be to be pierced by by the gap in inner ring heater 1 or outer shroud heater 2, above with graphite screws
14 are threadedly coupled, and lift graphite supporting plate 13.Wherein, be the insulating properties that ensures snakelike heater 11, snakelike heater 11 with
Boron nitride insulating part 12 has been used between graphite supporting plate 13.
A kind of one example of the snake type graphite heater of vacuum resistance furnace of the present invention for VF2900-2000 vacuum
Stove, its heated crucible size are 2700 × 1400mm of Φ, and maximum operating temperature is 2000 DEG C.The equipment heats for top,
It is computed, heater circle diameter is 2900mm, width 120mm, thickness 20mm, and inner ring heater power is 120KW, and outer shroud adds
Hot device single-phase power is 144KW.Heat it is throughout the room be put into 24 ceramic firing rings, be warming up to 1650 DEG C, when insulation 1.5 is small,
Detect uniform temperature and be not more than ± 5 DEG C.20 stove of product is produced through user producer, is worked well.
A kind of snake type graphite heater of vacuum resistance furnace of the present invention is tentatively protected from the symmetry of geometric shape first
Demonstrate,prove the uniform of warming temperature.Secondly, the present invention is distributed by the rational power of inner ring and outer rings heater, and passes through temperature element
Independent temperature control, eliminates non-uniform temperature caused by due to the reason or fault in material such as processing, installing from system.Finally, this hair
The bright job stability that screw and boron nitride insulating part guarantee heater are lifted by carbon carbon.
Claims (3)
- A kind of 1. snake type graphite heater of vacuum resistance furnace, it is characterised in that including inner ring heater, outer shroud heater, The component compositions such as graphite electrode, carbon carbon lifting screw, supporting plate, boron nitride insulating part.
- 2. the snake type graphite heater of a kind of vacuum resistance furnace according to claim 1, it is characterised in that inner ring heats Device, outer shroud heater are respectively divided into three parts, account for the sector of 120 degree of circumferencial direction respectively, and each area is symmetrical with respect to the center of circle.
- 3. the snake type graphite heater of a kind of vacuum resistance furnace according to claim 1, it is characterised in that if heater Above furnace body, then some hanging apparatus are set in the middle part of snakelike heater, by carbon carbon material screw and boron nitride insulating part group Into；If heater below furnace body, sets some support devices in the middle part of snakelike heater, by carbon carbon material screw and nitridation Boron insulating part forms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610904282.7A CN107957198A (en) | 2016-10-18 | 2016-10-18 | A kind of snake type graphite heater of vacuum resistance furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610904282.7A CN107957198A (en) | 2016-10-18 | 2016-10-18 | A kind of snake type graphite heater of vacuum resistance furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107957198A true CN107957198A (en) | 2018-04-24 |
Family
ID=61954175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610904282.7A Pending CN107957198A (en) | 2016-10-18 | 2016-10-18 | A kind of snake type graphite heater of vacuum resistance furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107957198A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109732091A (en) * | 2019-03-01 | 2019-05-10 | 宁波恒普真空技术有限公司 | A kind of pressure sintering furnace and its divided section heater |
| CN111043842A (en) * | 2020-01-08 | 2020-04-21 | 温州医科大学 | Small traditional Chinese medicine dryer with self-suspending rotating table and drying method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851895A (en) * | 2005-12-07 | 2006-10-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Static chuck system capable of controlling temperature partitionedly |
| CN202799197U (en) * | 2012-06-27 | 2013-03-13 | 洛阳晶奥电子材料有限公司 | Novel graphite heater |
| CN203457362U (en) * | 2013-09-18 | 2014-02-26 | 阮保清 | Grouping type induction cooker coil disc |
| CN203482429U (en) * | 2013-10-23 | 2014-03-12 | 东海耀碳素（大连）有限公司 | Split type graphite heating element set |
| CN204752899U (en) * | 2015-06-26 | 2015-11-11 | 湖南南方搏云新材料有限责任公司 | Single crystal growing furnace base heating ware |
-
2016
- 2016-10-18 CN CN201610904282.7A patent/CN107957198A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851895A (en) * | 2005-12-07 | 2006-10-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Static chuck system capable of controlling temperature partitionedly |
| CN202799197U (en) * | 2012-06-27 | 2013-03-13 | 洛阳晶奥电子材料有限公司 | Novel graphite heater |
| CN203457362U (en) * | 2013-09-18 | 2014-02-26 | 阮保清 | Grouping type induction cooker coil disc |
| CN203482429U (en) * | 2013-10-23 | 2014-03-12 | 东海耀碳素（大连）有限公司 | Split type graphite heating element set |
| CN204752899U (en) * | 2015-06-26 | 2015-11-11 | 湖南南方搏云新材料有限责任公司 | Single crystal growing furnace base heating ware |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109732091A (en) * | 2019-03-01 | 2019-05-10 | 宁波恒普真空技术有限公司 | A kind of pressure sintering furnace and its divided section heater |
| CN109732091B (en) * | 2019-03-01 | 2023-09-08 | 宁波恒普技术股份有限公司 | Pressure sintering furnace and partition heating device thereof |
| CN111043842A (en) * | 2020-01-08 | 2020-04-21 | 温州医科大学 | Small traditional Chinese medicine dryer with self-suspending rotating table and drying method thereof |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180424 |
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| RJ01 | Rejection of invention patent application after publication |