CN107534712A - 摄像装置 - Google Patents

摄像装置 Download PDF

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CN107534712A
CN107534712A CN201580078789.5A CN201580078789A CN107534712A CN 107534712 A CN107534712 A CN 107534712A CN 201580078789 A CN201580078789 A CN 201580078789A CN 107534712 A CN107534712 A CN 107534712A
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smooth surface
bonding electrodes
camera device
photographing element
extended
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中山高志
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Olympus Corp
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Olympus Corp
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    • H—ELECTRICITY
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    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
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Abstract

摄像装置(1)具有：摄像元件(10)，其具有受光面(10SA)、对置面(10SB)、相对于受光面(10SA)以锐角的第1角度(θ1)倾斜的倾斜面(10SS)，在受光面(10SA)上形成有多个受光面电极(12)；玻璃罩(30)，其以覆盖受光面(10SA)的方式被粘接；以及布线板(40)，其在第2主面(40SB)具有多个第2接合电极(44)，多个受光面电极(12)的背面露出到对置面侧，摄像元件(10)具有多个延伸设置布线图案(13)，该多个延伸设置布线图案(13)从多个受光面电极(12)各自的背面经由倾斜面(10SS)延伸设置到对置面(10SB)，分别在对置面(10SB)上具有第1接合电极(14)，布线板(40)的主面(40SA)和摄像元件(10)的对置面(10SB)平行配置，第1接合电极(14)和第2接合电极(44)经由凸块(15)被接合。

Description

摄像装置
技术领域
本发明涉及具有并列设置有与受光部电连接的多个电极的摄像元件、以及并列设置有与所述摄像元件的所述多个电极分别接合的多个布线的布线板的摄像装置。
背景技术
通过晶片级CSP技术制作的摄像装置是小型的，所以，非常有助于内窥镜的细径化。
在晶片级CSP型的摄像装置的制造方法中，最初，在半导体晶片的受光面上形成多个受光部和与各个受光部电连接的多个受光面电极。受光部是由CMOS(ComplementaryMetal Oxide Semiconductor)图像传感器或CCD(Charge Coupled Device)等构成的像素区域。在半导体晶片的受光面上粘接有玻璃晶片，制作接合晶片。然后，形成从接合晶片的受光面到对置的对置面的多个贯通布线。
通过接合晶片的切断而得到的摄像元件的受光面由玻璃罩覆盖。但是，受光部经由贯通布线而与对置面的电极连接，所以，能够发送接收电信号。
在日本特开2014-75764号公报中公开了图1所示的摄像装置101。摄像装置101代替多个贯通布线而在一个贯通沟槽110T中配置多个连接布线。
摄像装置101具有通过粘接层120粘接有玻璃罩130的摄像元件110、布线板140、信号缆线150。在摄像元件110上形成有壁面倾斜的贯通沟槽110T。玻璃罩130和粘接层120延伸设置到所述倾斜面的端边的外侧、即贯通沟槽110T的底面。受光面110SA的受光面电极112延伸设置到贯通沟槽110T的底面，所以，受光面电极112的背面露出到贯通沟槽110T的底面。在贯通沟槽110T的倾斜的壁面(倾斜面)110SS上并列设置有分别从贯通沟槽110T的底面(受光面电极112的正上方)延伸设置的多个接合电极114。在接合电极114上配设有凸块115。另外，倾斜面110SS相对于摄像元件110的受光面10SA以锐角的第1倾斜角度θ1倾斜。
多个接合电极114分别经由凸块115而与并列设置在布线板140的主面140SA的端部上的多个第1接合电极141接合。即，布线板140的主面140SA相对于摄像元件110的对置面110SB以第1倾斜角度θ1倾斜。而且，在布线板140的另一个端部的第2接合电极(未图示)上接合有信号缆线150。
另外，具有挠性的布线板140和信号缆线150配置在摄像元件110的投影面内，所以，摄像装置101的外形尺寸(平面观察尺寸)与摄像元件110的外形尺寸相同。
但是，在摄像装置101中，摄像元件110和布线板140仅利用接合电极114与接合电极141的接合部进行固定。因此，摄像装置101的机械强度不充分，在进行处理时容易破损，成品率可能不高。
现有技术文献
专利文献
专利文献1：日本特开2014-075764号公报
发明内容
发明要解决的课题
本发明的目的在于，提供成品率较高的摄像装置。
用于解决课题的手段
本发明的实施方式的摄像装置具有：摄像元件，其具有形成有受光部的受光面、与所述受光面对置的对置面、相对于所述受光面以锐角的第1角度倾斜的倾斜面，在所述受光面上形成有与所述受光部电连接的多个受光面电极；透明部件，其以覆盖所述受光面的方式被粘接；以及布线板，其在主面具有多个第2接合电极，所述透明部件和所述多个受光面电极延伸设置到所述倾斜面的端边的外侧，所述多个受光面电极的背面露出到所述对置面侧，其中，所述摄像元件具有多个延伸设置布线图案，该多个延伸设置布线图案从所述多个受光面电极各自的背面经由所述倾斜面延伸设置到所述对置面，分别在所述对置面上具有第1接合电极，所述布线板的所述主面和所述摄像元件的所述对置面平行配置，所述第1接合电极和所述第2接合电极经由凸块被接合。
发明效果
根据本发明，能够提供成品率较高的摄像装置。
附图说明
图1是现有的摄像装置的立体图。
图2是第1实施方式的摄像装置的分解图。
图3是第1实施方式的摄像装置的立体图。
图4是第1实施方式的摄像装置的沿着图3的IV-IV线的剖视图。
图5是第2实施方式的摄像装置的局部立体图。
图6是第3实施方式的摄像装置的分解图。
具体实施方式
<第1实施方式>
下面，参照附图对本发明的第1实施方式的摄像装置1进行说明。另外，附图是示意性的，各部件的厚度与宽度的关系、各个部件的厚度的比率、接合电极的数量、排列间距等与现实不同。并且，在附图的相互之间也包含彼此的尺寸关系和比率不同的部分。进而，一部分结构、例如硅基板表面的氧化硅层和布线等省略图示，并且，有时省略电子部件等的图示。
如图2～图4所示，摄像装置1具有由硅基板构成的摄像元件10、透明部件即玻璃罩30、布线板40、信号缆线50。摄像元件10的受光面10SA隔着粘接层20而由玻璃罩30覆盖。
摄像元件10是与已经说明的现有的摄像装置101的摄像元件110相似的结构。即，由硅构成的摄像元件10具有形成有受光部11的受光面10SA、与受光面10SA对置的对置面10SB、以及相对于受光面10SA以锐角的第1角度θ1倾斜的倾斜面10SS。在受光面10SA上并列设置有与受光部11电连接的多个受光面电极12。
在摄像元件10上形成有壁面为倾斜面10SS的贯通沟槽10T。在形成具有倾斜面10SS的贯通沟槽时，能够优选使用各向异性蚀刻。作为各向异性蚀刻，使用四甲基氢氧化铵(TMAH)水溶液、氢氧化钾(KOH)水溶液等的湿式蚀刻法是优选的，但是，也可以使用反应离子蚀刻(RIE)、化学干式蚀刻(CDE)等干式蚀刻法。
例如，在使用受光面10SA为(100)面的硅基板作为摄像元件10的情况下，成为(111)面的蚀刻速度比(100)面慢的各向异性蚀刻，所以，贯通沟槽10T的壁面成为(111)面，成为与受光面10SA即(100)面之间的角度θ1为54.74度的倾斜面。
摄像元件10的玻璃罩30、粘接层20和受光面电极12延伸设置到贯通沟槽10T的倾斜面10SS的端边的外侧。在制造时，在成为摄像元件10的硅晶片的受光面上配设有受光面电极12，在受光面电极12上借助粘接层20粘接有作为玻璃罩30的玻璃晶片。粘接层20例如由透明的紫外线固化型树脂构成。另外，也可以在受光部11上配设微透镜阵列，通过粘接层对受光部11的周围进行粘接。
接合了玻璃晶片的硅晶片从对置面10SB侧进行蚀刻而被去除。因此，受光面电极12的背面露出到切口10TT的底面、换言之为倾斜面10SS的端边的外侧。
而且，摄像元件10具有与背面露出到对置面侧的受光面电极12电连接的延伸设置布线图案13。延伸设置布线图案13从贯通沟槽10T的底面经由倾斜面10SS配设到对置面10SB。延伸设置布线图案13由金、铜或铝等低电阻材料构成。而且，在对置面10SB的延伸设置布线图案13的规定位置配设有第1接合电极14。第1接合电极14可以由与延伸设置布线图案13相同的材料构成，也可以在延伸设置布线图案13上形成镍层/金层等阻挡层。在第1接合电极14上配设有凸块15。凸块15例如是通过框架电镀法或浆料印刷法形成的焊料凸块或金凸块等。
布线板40例如是将聚酰亚胺作为绝缘层的、具有多个布线41的柔性布线板。而且，在布线板40的第2主面40SB上配设有分别与布线41电连接的多个第2接合电极44。在第1主面40SA上安装有芯片电容器等电子部件(未图示)。另外，在第2主面40SB上也可以安装有电子部件。
在布线板40的第2主面40SB的后端部侧并列设置的缆线接合电极42上接合有信号缆线50的导线51。信号缆线50也收容在摄像元件10的投影面内。另外，多个缆线接合电极42可以配设在布线板40的第2主面40SB上，也可以配设在第1主面40SA和第2主面40SB上。
多个第1接合电极14和多个第2接合电极44以分别对置的方式呈格子状配置。而且，第1接合电极14和第2接合电极44经由凸块15进行接合。摄像元件10和布线板40经由呈格子状配置的多个凸块15，将对置面10SB和第2主面40SB固定。进而，第1接合电极14与第2接合电极44的接合部通过密封树脂18进行密封。
在摄像装置1中，关于布线板40的第2主面40SB的前端部和摄像元件10的对置面10SB，平行配置的布线板40的第2主面40SB和摄像元件10的对置面10SB通过多个凸块15进行固定。因此，摄像装置1在制造时进行处理时破损的可能性减小，制造容易，并且成品率较高，因此是低成本的。
另外，在摄像装置1中，摄像元件10是5个受光面电极12的五端子元件。延伸设置布线图案13为5个。与此相对，均呈格子状配置的第1接合电极14和第2接合电极44分别为9个。即，4个第1接合电极14和4个第2接合电极44被设置为在电气方式上不必要或无意义的所谓的虚设电极。
如图2所示，与1个延伸设置布线图案13连接的第1接合电极14A这样的5个第1接合电极14是通常电极。
与此相对，不与1个延伸设置布线图案13连接的第1接合电极14B这样的4个第1接合电极14是虚设电极。
摄像元件10在对置面10SB上具有不与受光面电极12电连接的4个虚设电极14B等，分别与4个第2接合电极44B等接合。进而，与延伸设置布线图案13连接的5个第1接合电极14A等分别与5个第2接合电极44A等电连接。另外，虚设电极可以与1个延伸设置布线图案13连接，但是，与这种虚设电极接合的第2接合电极44不需要与信号缆线50等电连接。
配设第1接合电极14的虚设电极，以使得更加牢固地固定布线板40和摄像元件10。
特别地，在具有呈格子状配置的第1接合电极14、第2接合电极44(44C)的摄像装置1中，更加牢固地固定了布线板40和摄像元件10，所以，在制造时进行处理时不会破损，所以，成品率较高。
并且，布线板40的未与摄像元件10粘接的后端部折曲。因此，关于布线板40，从摄像元件10的厚度方向平面观察时，整体配置在摄像元件10的内侧的区域、即摄像元件10的投影面内。布线板40可以是由玻璃环氧树脂等构成的非挠性基板，但是，在长度较长的情况下，为了收容在摄像元件10的投影面内，至少仅折曲区域必须具有挠性。
在摄像装置1中，布线板40和信号缆线50不会露出到摄像元件10的外形的外侧，所以是细径的。
另外，在布线板40的长度较短的情况下，即使是非挠性布线板，当然也能够收容在摄像元件10的投影面内。
并且，布线板40的前端部可以与摄像元件10的对置面10SB的大致整面粘接，只要能够收容在摄像元件10的投影面内即可，折曲角度可以是钝角。进而，在布线板40中，不仅与摄像元件10接合的接合端部折曲，后端部也可以进一步折曲。
<第2实施方式>
接着，对第2实施方式的变形例的摄像装置1A进行说明。摄像装置1A与摄像装置1相似，所以，对相同功能的结构要素标注相同标号并省略说明。并且，在图5中省略布线板等的图示。
如图5所示，摄像装置1A的摄像元件10A与摄像元件10不同，将相对于受光面10SA以第1角度θ1倾斜的倾斜面10SS作为壁面的不是贯通沟槽(10T)，而是切口10TT。即，在切断接合晶片时的切断线位于贯通沟槽的底面的情况下，通过切断而使贯通沟槽成为切口10TT。
并且，在摄像元件10A中，在相邻的2个延伸设置布线图案13中，在它们的长度方向上，第1接合电极14交替配置。与第1接合电极14对应的第2接合电极也交替配置。
而且，第1接合电极14是延伸设置布线图案13的宽度变宽的延伸设置布线图案13的一部分。即，第1接合电极14由与延伸设置布线图案13相同的材料构成。
摄像装置1A具有摄像装置1的效果。并且，在对第1接合电极14和未图示的布线板的第2接合电极进行接合时，相邻的延伸设置布线图案13不可能短路，与摄像装置1相比，摄像装置1A的成品率较高。
<第3实施方式>
接着，对第3实施方式的变形例的摄像装置1B进行说明。摄像装置1B与摄像装置1、1A相似，所以，对相同功能的结构要素标注相同标号并省略说明。
如图6所示，在摄像装置1B中，摄像元件10B的延伸设置布线图案13的端部构成第1接合电极14。并且，在摄像装置1B中，除了第1接合电极14以外，还配设有作为虚设电极的第1接合电极14C。而且，布线板40B的多个第2接合电极44中的与第1接合电极14C对置的第2電接合极44C与第1接合电极14C接合。
除了与延伸设置布线图案13接合的第1接合电极14以外，摄像装置1B还具有作为虚设电极的第1接合电极14C。并且，第1接合电极14、14C和第2接合电极44(44C)呈格子状配置。进而，在相邻的2个延伸设置布线图案13中，在它们的长度方向上，第1接合电极14交替配置。
在摄像装置1B中，牢固地固定了布线板40B和摄像元件10B，所以，在制造时进行处理时不会破损，所以，成品率较高。
本发明不限于上述实施方式或变形例等，能够在不改变本发明主旨的范围内进行各种变更、改变、组合等。
标号说明
1、1A、1B：摄像装置；10：摄像元件；10SA：受光面；10SB：对置面；10SS：倾斜面；10T：贯通沟槽；11：受光部；12：受光面电极；13：延伸设置布线图案；14：第1接合电极；15：凸块；15：接合电极；18：密封树脂；20：粘接层；30：玻璃罩；40：布线板；40SA：第1主面；42：缆线接合电极；44：第2接合电极；50：信号缆线。

Claims (7)

1.一种摄像装置，其具有：
摄像元件，其具有形成有受光部的受光面、与所述受光面对置的对置面、相对于所述受光面以锐角的第1角度倾斜的倾斜面，在所述受光面上形成有与所述受光部电连接的多个受光面电极；
透明部件，其以覆盖所述受光面的方式被粘接；以及
布线板，其在主面具有多个第2接合电极，
所述透明部件和所述多个受光面电极延伸设置到所述倾斜面的端边的外侧，所述多个受光面电极的背面露出到所述对置面侧，
所述摄像装置的特征在于，
所述摄像元件具有多个延伸设置布线图案，该多个延伸设置布线图案从所述多个受光面电极各自的背面经由所述倾斜面延伸设置到所述对置面，分别在所述对置面上具有第1接合电极，
所述布线板的所述主面和所述摄像元件的所述对置面平行配置，所述第1接合电极和所述第2接合电极经由凸块被接合。
2.根据权利要求1所述的摄像装置，其特征在于，
所述凸块是焊料凸块。
3.根据权利要求2所述的摄像装置，其特征在于，
所述摄像元件在所述对置面上具有未与所述受光面电极电连接的虚设电极，
所述多个第2接合电极中的任意者与所述虚设电极接合。
4.根据权利要求2或3所述的摄像装置，其特征在于，
所述多个第1接合电极中的任意一个第1接合电极经由所述延伸设置布线图案而与其他第1接合电极电连接。
5.根据权利要求1～4中的任意一项所述的摄像装置，其特征在于，
所述多个第2接合电极被配置成格子状。
6.根据权利要求1～4中的任意一项所述的摄像装置，其特征在于，
在相邻的2个所述延伸设置布线图案中，在它们的长度方向上，第1接合电极被交替地配置。
7.根据权利要求1～6中的任意一项所述的摄像装置，其特征在于，
所述布线板是挠性布线板，
比配设有所述多个第2接合电极的区域靠后的后端部折曲。
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