CN107328366B - Two-dimensional nano flexible motion platform and grating measurement method thereof - Google Patents
Two-dimensional nano flexible motion platform and grating measurement method thereof Download PDFInfo
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- CN107328366B CN107328366B CN201710455030.5A CN201710455030A CN107328366B CN 107328366 B CN107328366 B CN 107328366B CN 201710455030 A CN201710455030 A CN 201710455030A CN 107328366 B CN107328366 B CN 107328366B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention discloses a two-dimensional nanometer flexible motion platform and a grating measurement method thereof, wherein the two-dimensional nanometer flexible motion platform comprises: a base; a terminal platform; an X-direction connecting rod and a Y-direction connecting rod; two X-direction flexible guides; two Y-direction flexible guides; two X-direction flexible decoupling elements; two Y-direction flexible decoupling members; an X-direction driver and a Y-direction driver; an X-direction grating sensor; and a Y-direction grating sensor. The two-dimensional nanometer flexible motion platform provided by the embodiment of the invention has the advantages of high precision, low cost, convenience in installation and use and the like.
Description
Technical Field
The invention relates to the field of directly measuring a large-stroke two-dimensional nanometer flexible motion platform by utilizing a grating sensor, in particular to a two-dimensional nanometer flexible motion platform and a grating measuring method thereof.
Background
In the two-dimensional nanometer flexible motion platform in the related technology, for the displacement measurement with the micro-nano precision requirement, the allowed deviation in the non-motion direction is within 200 micrometers, and the grating sensor cannot be directly applied to simultaneously realize the large-stroke measurement in two directions. In addition, the two-stage measurement method has many factors influencing the measurement accuracy, the sensor is inconvenient to install, and the laser interferometer method has high cost and complex installation.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides a two-dimensional nanometer flexible motion platform which has the advantages of high precision, low cost, convenience in installation and use and the like.
The invention also provides a grating measurement method of the two-dimensional nanometer flexible motion platform.
To achieve the above object, an embodiment according to a first aspect of the present invention provides a two-dimensional nano flexible motion platform, including: a base; the terminal platform is positioned on the inner side of the outer edge of the base; an X-direction connecting rod and a Y-direction connecting rod, the X-direction connecting rod oriented in the X-direction and the Y-direction connecting rod oriented in the Y-direction; the two X-direction flexible guide pieces are respectively connected with two ends of the X-direction connecting rod so as to enable the two X-direction flexible guide pieces to move synchronously, and each X-direction flexible guide piece is connected with the base; the two Y-direction flexible guide pieces are respectively connected with two ends of the Y-direction connecting rod so as to enable the two Y-direction flexible guide pieces to synchronously move, and each Y-direction flexible guide piece is connected with the base; the two X-direction flexible decoupling parts are respectively connected with two ends of the X-direction connecting rod so as to enable the two X-direction flexible decoupling parts to move synchronously, the two X-direction flexible decoupling parts are respectively connected with the two X-direction flexible guide parts, and the two X-direction flexible decoupling parts are respectively connected with two opposite side walls of the terminal platform; the two Y-direction flexible decoupling parts are respectively connected with two ends of the Y-direction connecting rod so as to enable the two Y-direction flexible decoupling parts to move synchronously, the two Y-direction flexible decoupling parts are respectively connected with the two Y-direction flexible guide parts, and the two Y-direction flexible decoupling parts are respectively connected with two opposite side walls of the terminal platform; the X-direction driver is connected with one of the two X-direction flexible guide pieces, and the Y-direction driver is connected with one of the two Y-direction flexible guide pieces; the X-direction grating sensor is detachably connected with the terminal platform and the X-direction flexible guide piece respectively, and at least one part of the X-direction grating sensor moves along with the X-direction flexible guide piece; and the Y-direction grating sensor is detachably connected with the terminal platform and the Y-direction flexible guide piece respectively, and at least one part of the Y-direction grating sensor moves along with the Y-direction flexible guide piece.
The two-dimensional nanometer flexible motion platform provided by the embodiment of the invention has the advantages of high precision, low cost, convenience in installation and use and the like.
In addition, the two-dimensional nanometer flexible motion platform according to the above embodiment of the present invention may further have the following additional technical features:
according to one embodiment of the invention, the X-direction grating sensor comprises an X-direction glass ruler and an X-direction reading head, wherein the X-direction glass ruler is arranged on one side edge of the terminal platform close to the X-direction flexible guide part, and the X-direction reading head is arranged on one end of the X-direction flexible guide part close to the terminal platform; the Y-direction grating sensor comprises a Y-direction glass ruler and a Y-direction reading head, the Y-direction glass ruler is installed on the terminal platform and close to one side edge of the Y-direction flexible guide piece, and the Y-direction reading head is installed on the Y-direction flexible guide piece and close to one end of the terminal platform. This facilitates the arrangement of the X-direction grating sensor and the Y-direction grating sensor.
Further, the X-direction glass ruler is installed on the upper surface of the terminal platform, and the X-direction reading head is installed on the upper surface of the X-direction flexible guide piece; the Y-direction glass ruler is installed on the upper surface of the terminal platform, and the Y-direction reading head is installed on the upper surface of the Y-direction flexible guide piece. This facilitates the user to read the data of the X-direction grating sensor and the Y-direction grating sensor.
Optionally, one of the X-direction flexible guide and the X-direction grating sensor is provided with an X-direction positioning rib, and the other is provided with an X-direction positioning groove, wherein the X-direction positioning rib is detachably fitted in the X-direction positioning groove; y is to flexible guide with Y is equipped with Y on to one of grating sensor to the protruding muscle of location and be equipped with Y on another to the constant head tank, Y is in to the cooperation of protruding muscle detachably of location Y to the constant head tank. Therefore, the grating sensor can be positioned by utilizing the positioning convex ribs and the positioning grooves.
According to still another embodiment of the present invention, two of the X-direction flexible guides are symmetrically arranged in the X direction, two of the Y-direction flexible guides are symmetrically arranged in the Y direction, two of the X-direction flexible decoupling members are symmetrically arranged in the X direction, and two of the Y-direction flexible decoupling members are symmetrically arranged in the Y direction. Therefore, the consistency of each part of the two-dimensional nanometer flexible motion platform can be further improved.
According to a further embodiment of the present invention, each of the X-direction flexible guides includes an X-direction inward leaf spring, an X-direction outward leaf spring, and an X-direction rigid connecting member, the two X-direction inward leaf springs are respectively connected to both ends of the X-direction connecting rod, the X outward side plate spring is positioned on the outer side of the X inward side plate spring and is connected with the base, the X-direction inner side plate spring and the X-direction outer side plate spring are connected through the X-direction rigid connecting piece, each Y-direction flexible guiding piece comprises a Y-direction inner side plate spring, a Y-direction outer side plate spring and a Y-direction rigid connecting piece, the two Y-direction inner side plate springs are respectively connected with two ends of the Y-direction connecting rod, the Y outward side plate spring is positioned at the outer side of the Y inward side plate spring and is connected with the base, the Y-shaped inward side plate spring and the Y-shaped outward side plate spring are connected through the Y-shaped rigid connecting piece. This makes it possible to achieve flexible connection of the X-direction flexible guide, the Y-direction flexible guide, the base, the X-direction flexible decoupling member, and the Y-direction flexible decoupling member.
Further, the height of the X and Y inner side leaf springs in the vertical direction is lower than the X and Y outer side leaf springs. This facilitates the inner leaf spring to escape from the X-directional flexible decoupling member and the Y-directional flexible decoupling member.
Optionally, the base comprises: a substrate; the four inner connecting bosses are arranged on the upper surface of the base plate at intervals, two ends of each X inward side plate spring are respectively connected with two adjacent inner connecting bosses, and two ends of each Y inward side plate spring are respectively connected with two adjacent inner connecting bosses; four outer joint boss, four the outer joint boss is in the upper surface interval of base plate sets up and is located four the outside of in-connection boss, every X is respectively with adjacent two to the both ends of outside leaf spring the outer joint boss links to each other, every Y is respectively with adjacent two to the both ends of outside leaf spring the outer joint boss links to each other. This facilitates the attachment of the leaf spring to the base.
According to another embodiment of the present invention, each of the X-direction flexible decoupling members includes two X-direction outward parallel plate springs, two X-direction inward parallel plate springs, and two X-direction rigid connecting plates, the two X-direction outward parallel plate springs are connected to the same side edge of the terminal platform, the two X-direction inward parallel plate springs are located inside the two X-direction outward parallel plate springs and are arranged in parallel with the two X-direction outward parallel plate springs, the two X-direction inward parallel plate springs are connected to the corresponding X-direction flexible guide members, the two X-direction outward parallel plate springs are connected to the two X-direction inward parallel plate springs through the two X-direction rigid connecting plates, respectively, each of the Y-direction flexible decoupling members includes two Y-direction outward parallel plate springs, two Y-direction inward parallel plate springs, and two Y-direction rigid connecting plates, the two Y-direction outward parallel plate springs are connected to the same side edge of the terminal platform, two the inside parallel leaf spring of Y is located two the inboard of the outside parallel leaf spring of Y and with two the outside parallel leaf spring parallel arrangement of Y, two the inside parallel leaf spring of Y all with correspond Y to flexible guide links to each other, two the outside parallel leaf spring of Y is respectively through two the Y is to rigid connection board with two the inside parallel leaf spring of Y links to each other. This ensures that the X-direction flexible decoupling member and the Y-direction flexible decoupling member have good structural strength and flexibility.
An embodiment according to a second aspect of the present invention provides a grating measurement method for a two-dimensional nano flexible motion platform, which includes the following steps:
measuring the displacement of the terminal platform in the X direction by using the X-direction grating sensor, and measuring the displacement of the terminal platform in the Y direction by using the Y-direction grating sensor;
and calculating to obtain the plane displacement of the terminal platform according to the detection values of the X-direction grating sensor and the Y-direction grating sensor.
The grating measurement method of the two-dimensional nanometer flexible motion platform provided by the embodiment of the invention has the advantages of high precision, low cost, convenience in use and the like.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural diagram of a two-dimensional nano flexible motion platform according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a two-dimensional nano flexible motion platform according to an embodiment of the invention.
Fig. 3 is a schematic structural diagram of a two-dimensional nano flexible motion platform according to an embodiment of the invention.
Fig. 4 is a schematic structural diagram of a two-dimensional nano flexible motion platform according to an embodiment of the invention.
Fig. 5 is a schematic partial structure diagram of a two-dimensional nano flexible motion platform according to an embodiment of the invention.
Fig. 6 is a schematic partial structure diagram of a two-dimensional nano flexible motion platform according to an embodiment of the invention.
Fig. 7 is a partial structural schematic diagram of a two-dimensional nano flexible motion platform according to an embodiment of the invention.
Reference numerals: two-dimensional nanometer flexible motion platform 1, base 100, base plate 110, inner connection boss 120, outer connection boss 130, terminal platform 200, X-direction connection rod 310, Y-direction connection rod 320, X-direction flexible guide 410, X-direction inner plate spring 411, X-direction outer plate spring 412, X-direction rigid connection 413, X-direction positioning slot 414, Y-direction flexible guide 420, Y-direction inner plate spring 421, Y-direction outer plate spring 422, Y-direction rigid connection 423, Y-direction positioning slot 424, X-direction flexible decoupling part 510, X-direction outer parallel plate spring 511, X-direction inner parallel plate spring 512, X-direction rigid connection plate 513, Y-direction flexible decoupling part 520, Y-direction outer parallel plate spring 521, Y-direction inner parallel plate spring 522, Y-direction rigid connection plate 523, X-direction driver 610, Y-direction driver 620, X-direction grating sensor 710, X-direction glass ruler 711, X-direction reading head 712, X-direction positioning convex rib 713, Y-direction grating sensor 720, Y-direction grating sensor, A Y-direction glass ruler 721, a Y-direction reading head 722 and a Y-direction positioning convex rib 723.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
A two-dimensional nano flexible moving platform 1 according to an embodiment of the present invention is described below with reference to the accompanying drawings.
As shown in fig. 1 to 7, a two-dimensional nano-flexible motion platform 1 according to an embodiment of the present invention includes a base 100, a terminal platform 200, an X-direction connecting rod 310, a Y-direction connecting rod 320, an X-direction flexible guide 410, a Y-direction flexible guide 420, an X-direction flexible decoupling member 510, a Y-direction flexible decoupling member 520, an X-direction driver 610, a Y-direction driver 620, an X-direction grating sensor 710, and a Y-direction grating sensor 720 (the X-direction and the Y-direction are indicated by arrows in fig. 1 to 4 and 7). It should be understood here that the directions X and Y are only for convenience of description and are not limited to the actual arrangement direction of the two-dimensional nano flexible motion platform 1.
The terminal platform 200 is located inside the outer edge of the base 100. The X-direction connecting bar 310 is oriented in the X-direction and the Y-direction connecting bar 320 is oriented in the Y-direction. Two X-direction flexible guides 410 are respectively connected to both ends of the X-direction connecting rod 310 to move the two X-direction flexible guides 410 in synchronization, and each X-direction flexible guide 410 is connected to the base 100. Two Y-direction flexible guides 420 are respectively connected to both ends of the Y-direction connecting rod 320 so that the two Y-direction flexible guides 420 move in synchronization, and each Y-direction flexible guide 420 is connected to the base 100. Two X-directional flexible decouplers 510 are respectively connected to both ends of the X-directional connecting rod 310 to synchronize the movement of the two X-directional flexible decouplers 510, the two X-directional flexible decouplers 510 are respectively connected to the two X-directional flexible guides 410, and the two X-directional flexible decouplers 510 are respectively connected to both opposite sidewalls of the terminal platform 200. Two Y-directional flexible decouplers 520 are respectively connected to both ends of the Y-directional connecting rod 320 to synchronize the movement of the two Y-directional flexible decouplers 520, the two Y-directional flexible decouplers 520 are respectively connected to the two Y-directional flexible guides 420, and the two Y-directional flexible decouplers 520 are respectively connected to both opposite sidewalls of the terminal platform 200. The X-direction driver 610 is connected to one of the two X-direction flexible guides 410, and the Y-direction driver 620 is connected to one of the two Y-direction flexible guides 420. The X-direction grating sensor 710 is detachably connected to the terminal platform 200 and the X-direction flexible guide 410, respectively, and at least a portion thereof moves together with the X-direction flexible guide 410. The Y-direction grating sensor 720 is detachably connected to the terminal platform 200 and the Y-direction flexible guide 420, respectively, and at least a portion thereof moves together with the Y-direction flexible guide 420.
According to the two-dimensional nano flexible motion platform 1 provided by the embodiment of the invention, by arranging the X-direction flexible decoupling member 510 and the Y-direction flexible decoupling member 520 on the two-dimensional nano flexible motion platform 1 provided by the embodiment of the invention, the two-direction motion of the terminal platform 200 can be decoupled through the elastic deformation of the X-direction flexible decoupling member 510 and the Y-direction flexible decoupling member 520, so that the high-precision motion of the terminal platform 200 can be realized.
In addition, compared with a two-dimensional nanometer flexible motion platform in the related art, when the terminal platform moves, the guide and decoupling mechanisms opposite to each other on two sides are prone to causing inconsistent motion, and axial force borne by the decoupling piece is prone to causing inconsistent motion, so that parasitic motion occurs to the terminal platform 200, and large errors are generated in displacement of the terminal platform 200. By providing the X-direction connecting rod 310 and the Y-direction connecting rod 320, when the terminal platform 200 moves in the X direction, since the two X-direction flexible guides 410 are connected together by the X-direction connecting rod 310, the rotation of the X-direction flexible guides 410 can be suppressed, and the accuracy of the movement of the terminal platform 200 in the X direction is greatly improved. When the terminal platform 200 moves in the Y direction, since the Y-direction connecting rod 320 connects the two Y-direction flexible guides 420 together, the rotation of the Y-direction flexible guides 420 can be suppressed, and the precision of the movement of the terminal platform 200 in the Y direction is greatly improved.
In addition, through setting up X to grating sensor 710 and Y to grating sensor 720, can utilize X to grating sensor 710 and Y to grating sensor 720 directly to carry out the large stroke two-dimentional measurement to terminal platform 200, compare the flexible motion platform of two-dimentional nanometer among the correlation technique, need not adopt other sensors to carry out the intermediate compensation, be convenient for improve the measurement accuracy of the flexible motion platform 1 of two-dimentional nanometer, be convenient for improve platform 1's operational reliability.
Meanwhile, the X-direction grating sensor 710 and the Y-direction grating sensor 720 are used for directly carrying out large-stroke two-dimensional measurement on the terminal platform 200, and compared with a two-dimensional nanometer flexible motion platform in the related technology, the cost of the two-dimensional nanometer flexible motion platform 1 is convenient to reduce, the installation and the use of the platform 1 are convenient to improve, and the use comfort of a user is convenient to improve.
Further, since at least a portion of the X-directional grating sensor 710 moves with the X-directional flexible guide 410, at least a portion of the Y-directional grating sensor 720 moves with the Y-directional flexible guide 420. This ensures that the components of the sensor do not separate or collide, facilitating direct motion measurement of the terminal platform 200.
Therefore, the two-dimensional nanometer flexible motion platform 1 has the advantages of high precision, low cost, convenience in installation and use and the like.
A two-dimensional nano flexible motion platform 1 according to an embodiment of the present invention is described below with reference to the accompanying drawings.
In some embodiments of the present invention, as shown in fig. 1-7, a two-dimensional nano-flexible motion platform 1 according to an embodiment of the present invention includes a base 100, a terminal platform 200, an X-directional connecting rod 310, a Y-directional connecting rod 320, an X-directional flexible guide 410, a Y-directional flexible guide 420, an X-directional flexible decoupling 510, a Y-directional flexible decoupling 520, an X-directional driver 610, a Y-directional driver 620, an X-directional grating sensor 710, and a Y-directional grating sensor 720.
Specifically, as shown in fig. 1 and 7, the X-direction grating sensor 710 includes an X-direction glass ruler 711 and an X-direction reading head 712, the X-direction glass ruler 711 is mounted on one side edge of the terminal platform 200 near the X-direction flexible guide 410, and the X-direction reading head 712 is mounted on one end of the X-direction flexible guide 410 near the terminal platform 200. The Y-direction grating sensor 720 includes a Y-direction glass 721 and a Y-direction reading head 722, the Y-direction glass 721 is mounted on the terminal platform 200 near one side edge of the Y-direction flexible guide 420, and the Y-direction reading head 722 is mounted on the Y-direction flexible guide 420 near one end of the terminal platform 200. This facilitates the placement of the X-direction grating sensor 710 and the Y-direction grating sensor 720 for large-stroke two-dimensional measurement of the terminal platform 200.
More specifically, as shown in fig. 1 and 7, an X-direction glass rule 711 is installed on the upper surface of the terminal platform 200, and an X-direction reading head 712 is installed on the upper surface of the X-direction flexible guide 410. A Y-glass 721 is mounted on the upper surface of the terminal platform 200 and a Y-reading head 722 is mounted on the upper surface of the Y-flexible guide 420. This facilitates the user to read the data of the X-direction grating sensor 710 and the Y-direction grating sensor 720, which facilitates the user's use.
Alternatively, as shown in fig. 1, one of the X-directional flexible guide 410 and the X-directional grating sensor 710 is provided with an X-directional positioning rib 713 and the other is provided with an X-directional positioning groove 414, and the X-directional positioning rib 713 is detachably fitted in the X-directional positioning groove 414. One of the Y-direction flexible guide member 420 and the Y-direction grating sensor 720 is provided with a Y-direction positioning rib 723, the other one is provided with a Y-direction positioning groove 424, and the Y-direction positioning rib 723 is detachably matched in the Y-direction positioning groove 424. Therefore, the positioning convex ribs and the positioning grooves can be utilized to position the grating sensor, and the switching of the position of the grating sensor is facilitated.
Specifically, the measurement scheme proposed by the present invention is as follows: and two sets of grating sensors are adopted to directly realize the motion measurement of the terminal platform 200. First, the X-direction glass rule 711 and the Y-direction glass rule 721 of the X-direction grating sensor 710 and the Y-direction grating sensor 720 are respectively mounted and fixed on the terminal platform 200 near the X-direction flexible guide 410 and the Y-direction flexible guide 420, and then the X-direction reading head 712 and the Y-direction reading head 722 of the X-direction grating sensor 710 and the Y-direction grating sensor 720 are respectively mounted and fixed on the X-direction flexible guide 410 and the Y-direction flexible guide 420, and the two are adjusted to be close to each other. By adopting the sensor mounting method, when the terminal platform 200 moves in a large stroke, the X-direction reading head 712 and the Y-direction reading head 722 of the X-direction grating sensor 710 and the Y-direction grating sensor 720 move along with the X-direction flexible guide 410 and the Y-direction flexible guide 420 respectively, so that the X-direction glass scale 711 and the Y-direction glass scale 721 of the X-direction grating sensor 710 and the Y-direction grating sensor 720 can be ensured not to be separated or collided with each other in a non-moving direction, and the direct movement measurement of the terminal platform 200 can be realized.
Compared with the two-dimensional nanometer flexible motion platform in the related art, the two-dimensional nanometer flexible motion platform 1 does not need a capacitance sensor to compensate the motion error between the flexible guide piece and the terminal platform 200, and converts the motion error into the offset in the measurement direction of the vertical grating sensor. Through calculation, when the terminal platform 200 moves to reach the maximum stroke, the movement displacement error between the flexible guide piece and the terminal platform 200 does not exceed 10 micrometers, and is far smaller than the maximum offset (200 micrometers) of the maximum non-movement direction allowed by the grating sensor when in use. Therefore, the scheme for directly measuring the terminal motion platform provided by the invention can ensure that the grating sensor can also carry out real-time measurement under the condition of large-stroke motion, and solves the problem that the large-stroke motion of the terminal platform cannot be measured in the related technology.
By theoretical analysis, the measurement error of the grating measurement scheme provided by the invention only comes from the deviation of the flexible guide piece in the direction perpendicular to the movement direction. Through calculation, the displacement of the flexible guide in the two-dimensional nanometer flexible motion platform 1 in the direction perpendicular to the motion direction is less than 0.04% of the motion displacement of the terminal platform 200 in the same direction, and is far less than the motion error of the flexible guide in the motion direction and the terminal platform 200. By changing some structural dimension parameters of the platform, such as the length and thickness of the short leaf spring, a better measuring effect can be obtained, and meanwhile, the rigidity of the platform can be improved.
Fig. 1-7 show a two-dimensional nano-flexible motion platform 1 according to a specific embodiment of the present invention. As shown in fig. 1 to 4, two X-direction flexible guides 410 are symmetrically arranged in the X direction, two Y-direction flexible guides 420 are symmetrically arranged in the Y direction, two X-direction flexible decouplers 510 are symmetrically arranged in the X direction, and two Y-direction flexible decouplers 520 are symmetrically arranged in the Y direction. Therefore, the consistency of each part of the two-dimensional nanometer flexible motion platform 1 can be further improved, and the motion precision of the platform 1 can be further improved conveniently.
Specifically, as shown in fig. 4, each of the X-direction compliant guides 410 includes an X-direction inner plate spring 411, an X-direction outer plate spring 412, and an X-direction rigid link 413, the two X-direction inner plate springs 411 are respectively connected to both ends of the X-direction link 310, the X-direction outer plate spring 412 is located outside the X-direction inner plate spring 411 and is connected to the base 100, the X-direction inner plate spring 411 and the X-direction outer plate spring 412 are connected to each other by the X-direction rigid link 413, each of the Y-direction compliant guides 420 includes a Y-direction inner plate spring 421, a Y-direction outer plate spring 422, and a Y-direction rigid link 423, the two Y-direction inner plate springs 421 are respectively connected to both ends of the Y-direction link 320, the Y-direction outer plate spring 422 is located outside the Y-direction inner plate spring 421 and is connected to. This allows for flexible coupling of the X-directional flexible guide 410, the Y-directional flexible guide 420, the base 100, the X-directional flexible decoupling member 510 and the Y-directional flexible decoupling member 520, which facilitates precise movement of the driving terminal platform 200.
More specifically, as shown in fig. 3 and 4, the X inner side plate spring 411 and the Y inner side plate spring 421 are lower in height in the vertical direction than the X outer side plate spring 412 and the Y outer side plate spring 422. Therefore, the inner-side plate spring can avoid the X-direction flexible decoupling part 510 and the Y-direction flexible decoupling part 520, the two-dimensional nanometer flexible motion platform 1 can be conveniently arranged, and the whole thickness of the two-dimensional nanometer flexible motion platform 1 can be conveniently reduced.
Alternatively, as shown in fig. 3 and 4, the susceptor 100 includes a base plate 110, four inner connection bosses 120, and four outer connection bosses 130. The four inner connecting bosses 120 are spaced apart from each other on the upper surface of the base plate 110, both ends of each X inner side plate spring 411 are connected to two adjacent inner connecting bosses 120, and both ends of each Y inner side plate spring 421 are connected to two adjacent inner connecting bosses 120. The four outer connecting bosses 130 are spaced apart from the upper surface of the base plate 110 and are located outside the four inner connecting bosses 120, two ends of each X outer side plate spring 412 are connected to two adjacent outer connecting bosses 130, and two ends of each Y outer side plate spring 422 are connected to two adjacent outer connecting bosses 130. This may facilitate attachment of the leaf spring to the base 100.
Specifically, as shown in fig. 3, each of the X-direction flexible decoupling members 510 includes two X-direction outward parallel plate springs 511, two X-direction inward parallel plate springs 512, and two X-direction rigid coupling plates 513, the two X-direction outward parallel plate springs 511 are connected to the same side edge of the terminal platform 200, the two X-direction inward parallel plate springs 512 are located inside the two X-direction outward parallel plate springs 511 and are arranged in parallel with the two X-direction outward parallel plate springs 511, the two X-direction inward parallel plate springs 512 are connected to the corresponding X-direction flexible guide 410, the two X-direction outward parallel plate springs 511 are connected to the two X-direction inward parallel plate springs 512 through the two X-direction rigid coupling plates 513, each of the Y-direction flexible decoupling members 520 includes two Y-direction outward parallel plate springs 521, two Y-direction inward parallel plate springs 522, and two Y-direction rigid coupling plates 523, the two Y-direction outward parallel plate springs 521 are connected to the same side edge of the terminal platform, the two Y-in parallel plate springs 522 are located inside the two Y-out parallel plate springs 521 and are arranged in parallel with the two Y-out parallel plate springs 521, the two Y-in parallel plate springs 522 are both connected with the corresponding Y-direction flexible guide 420, and the two Y-out parallel plate springs 521 are respectively connected with the two Y-in parallel plate springs 522 through two Y-direction rigid connecting plates 523. Therefore, the X-direction flexible decoupling piece 510 and the Y-direction flexible decoupling piece 520 have good structural strength and flexibility, and the motion decoupling effect of the X-direction flexible decoupling piece 510 and the Y-direction flexible decoupling piece 520 on the two-dimensional nanometer flexible motion platform 1 is guaranteed.
Alternatively, the X-direction driver 610 and the Y-direction driver 620 are voice coil motors or piezoelectric ceramics. This may facilitate driving the terminal platform 200 to move accurately.
Specifically, as shown in fig. 1 to 4, the X-direction flexure decoupling member 510, the Y-direction flexure decoupling member 520, the X-direction outward side plate spring 412, and the Y-direction outward side plate spring 422 are the same in height in the vertical direction. This may further facilitate driving the terminal platform 200 to move accurately.
More specifically, as shown in fig. 4, the terminal platform 200, the X-directional compliant decoupling member 510, the Y-directional compliant decoupling member 520, the X-outward side leaf spring 412, and the Y-outward side leaf spring 422 are the same in height in the vertical direction. This may further facilitate accurate movement of the drive terminal platform 200.
Alternatively, as shown in fig. 4, the X-direction connecting rod 310, the Y-direction connecting rod 320, the X-inner side plate spring 411, and the Y-inner side plate spring 421 have the same height in the vertical direction. This facilitates the avoidance of the terminal platform 200 by the X-direction connecting rod 310 and the Y-direction connecting rod 320, thereby facilitating the arrangement of the two-dimensional nano flexible motion platform 1.
The grating measurement method of the two-dimensional nano flexible motion platform 1 according to the embodiment of the present invention is described below. The grating measurement method of the two-dimensional nanometer flexible motion platform 1 comprises the following steps:
measuring the displacement of the terminal platform 200 in the X direction by using the X-direction grating sensor 710, and measuring the displacement of the terminal platform 200 in the Y direction by using the Y-direction grating sensor 720;
according to the detection values of the X-direction grating sensor 710 and the Y-direction grating sensor 720, the plane displacement of the terminal platform 200 is calculated.
The grating measuring method of the two-dimensional nanometer flexible motion platform 1 has the advantages of high precision, low cost, convenience in use and the like.
Other configurations and operations of the two-dimensional nano-flexible motion platform 1 according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (7)
1. A two-dimensional nano flexible motion platform, comprising:
a base;
the terminal platform is positioned on the inner side of the outer edge of the base;
an X-direction connecting rod and a Y-direction connecting rod, the X-direction connecting rod oriented in the X-direction and the Y-direction connecting rod oriented in the Y-direction;
the two X-direction flexible guide pieces are respectively connected with two ends of the X-direction connecting rod so as to enable the two X-direction flexible guide pieces to move synchronously, and each X-direction flexible guide piece is connected with the base;
the two Y-direction flexible guide pieces are respectively connected with two ends of the Y-direction connecting rod so as to enable the two Y-direction flexible guide pieces to synchronously move, and each Y-direction flexible guide piece is connected with the base;
the two X-direction flexible decoupling parts are respectively connected with two ends of the X-direction connecting rod so as to enable the two X-direction flexible decoupling parts to move synchronously, the two X-direction flexible decoupling parts are respectively connected with the two X-direction flexible guide parts, and the two X-direction flexible decoupling parts are respectively connected with two opposite side walls of the terminal platform;
the two Y-direction flexible decoupling parts are respectively connected with two ends of the Y-direction connecting rod so as to enable the two Y-direction flexible decoupling parts to move synchronously, the two Y-direction flexible decoupling parts are respectively connected with the two Y-direction flexible guide parts, and the two Y-direction flexible decoupling parts are respectively connected with two opposite side walls of the terminal platform;
the X-direction driver is connected with one of the two X-direction flexible guide pieces, and the Y-direction driver is connected with one of the two Y-direction flexible guide pieces;
the X-direction grating sensor is detachably connected with the terminal platform and the X-direction flexible guide piece respectively, and at least one part of the X-direction grating sensor moves along with the X-direction flexible guide piece;
a Y-direction grating sensor detachably connected with the terminal platform and the Y-direction flexible guide respectively and at least a part of which moves together with the Y-direction flexible guide,
the X-direction grating sensor comprises an X-direction glass ruler and an X-direction reading head, the X-direction glass ruler is installed on one side edge, close to the X-direction flexible guide, of the terminal platform, and the X-direction reading head is installed on one end, close to the terminal platform, of the X-direction flexible guide; the Y-direction grating sensor comprises a Y-direction glass ruler and a Y-direction reading head, the Y-direction glass ruler is arranged on one side edge of the terminal platform, which is close to the Y-direction flexible guide piece, the Y-direction reading head is arranged on one end of the Y-direction flexible guide piece, which is close to the terminal platform,
the X-direction glass ruler is installed on the upper surface of the terminal platform, and the X-direction reading head is installed on the upper surface of the X-direction flexible guide piece; the Y-direction glass ruler is arranged on the upper surface of the terminal platform, the Y-direction reading head is arranged on the upper surface of the Y-direction flexible guide piece,
the X-direction grating sensor is provided with an X-direction positioning convex rib, the X-direction flexible guide piece is provided with an X-direction positioning groove, and the X-direction positioning convex rib is detachably matched in the X-direction positioning groove; the Y-direction grating sensor is provided with a Y-direction positioning convex rib, the Y-direction flexible guide piece is provided with a Y-direction positioning groove, the Y-direction positioning convex rib is detachably matched in the Y-direction positioning groove,
a part of the X-direction flexible guide part is arranged at one side of the X-direction positioning convex rib close to the terminal platform to limit the X-direction positioning convex rib, a part of the Y-direction flexible guide part is arranged at one side of the Y-direction positioning convex rib close to the terminal platform to limit the Y-direction positioning convex rib,
be equipped with first spacing groove on the terminal platform, first spacing groove is located the terminal platform is close to X is to the one end of flexible guide, X is in to the cooperation of some of glass chi first spacing inslot, be equipped with the second spacing groove on the terminal platform, the second spacing groove is located the terminal platform is close to Y is in to the one end of flexible guide, Y is in to the cooperation of some of glass chi the second spacing inslot.
2. The two-dimensional nanometer flexible motion platform according to claim 1, wherein the two X-directional flexible guides are symmetrically arranged in an X direction, the two Y-directional flexible guides are symmetrically arranged in a Y direction, the two X-directional flexible decoupling members are symmetrically arranged in the X direction, and the two Y-directional flexible decoupling members are symmetrically arranged in the Y direction.
3. The two-dimensional nano flexible motion platform according to claim 1, wherein each of the X-directional flexible guides comprises an X-directional inward leaf spring, an X-directional outward leaf spring, and an X-directional rigid connection member, the two X-directional inward leaf springs are respectively connected to both ends of the X-directional connection rod, the X outward side plate spring is positioned on the outer side of the X inward side plate spring and is connected with the base, the X-direction inner side plate spring and the X-direction outer side plate spring are connected through the X-direction rigid connecting piece, each Y-direction flexible guiding piece comprises a Y-direction inner side plate spring, a Y-direction outer side plate spring and a Y-direction rigid connecting piece, the two Y-direction inner side plate springs are respectively connected with two ends of the Y-direction connecting rod, the Y outward side plate spring is positioned at the outer side of the Y inward side plate spring and is connected with the base, the Y-shaped inward side plate spring and the Y-shaped outward side plate spring are connected through the Y-shaped rigid connecting piece.
4. The two-dimensional nano-flexible motion platform of claim 3, wherein the X and Y inner side leaf springs are lower in height in a vertical direction than the X and Y outer side leaf springs.
5. The two-dimensional nano-flexible motion platform of claim 3, wherein the base comprises:
a substrate;
the four inner connecting bosses are arranged on the upper surface of the base plate at intervals, two ends of each X inward side plate spring are respectively connected with two adjacent inner connecting bosses, and two ends of each Y inward side plate spring are respectively connected with two adjacent inner connecting bosses;
four outer joint boss, four the outer joint boss is in the upper surface interval of base plate sets up and is located four the outside of in-connection boss, every X is respectively with adjacent two to the both ends of outside leaf spring the outer joint boss links to each other, every Y is respectively with adjacent two to the both ends of outside leaf spring the outer joint boss links to each other.
6. The two-dimensional nano-flexible motion platform of claim 1, wherein each of the X-direction flexible decouplers comprises two X-direction outward parallel leaf springs, two X-direction inward parallel leaf springs and two X-direction rigid connection plates, the two X-direction outward parallel leaf springs are connected to the same side edge of the terminal platform, the two X-direction inward parallel leaf springs are located inside the two X-direction outward parallel leaf springs and are arranged in parallel with the two X-direction outward parallel leaf springs, the two X-direction inward parallel leaf springs are connected to the corresponding X-direction flexible guide members, the two X-direction outward parallel leaf springs are connected to the two X-direction inward parallel leaf springs through the two X-direction rigid connection plates, respectively, each of the Y-direction flexible decouplers comprises two Y-direction outward parallel leaf springs, two Y-direction inward parallel leaf springs and two Y-direction rigid connection plates, two the outside parallel leaf spring of Y all with same one side border of terminal platform links to each other two the inside parallel leaf spring of Y is located two the inboard of the outside parallel leaf spring of Y and with two the outside parallel leaf spring parallel arrangement of Y, two the inside parallel leaf spring of Y all with correspond Y links to each other to flexible guide, two the outside parallel leaf spring of Y is respectively through two the Y is to rigid connection board and two the inside parallel leaf spring of Y links to each other.
7. A grating measurement method of a two-dimensional nanometer flexible motion platform according to any one of claims 1 to 6, characterized by comprising the following steps:
measuring the displacement of the terminal platform in the X direction by using the X-direction grating sensor, and measuring the displacement of the terminal platform in the Y direction by using the Y-direction grating sensor;
and calculating to obtain the plane displacement of the terminal platform according to the detection values of the X-direction grating sensor and the Y-direction grating sensor.
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| CN109129412B (en) * | 2018-10-22 | 2023-07-18 | 广东工业大学 | Two-dimensional decoupling macro-micro motion platform and compensation method thereof |
| CN111623710A (en) * | 2020-04-21 | 2020-09-04 | 广州市信诺光栅数显有限公司 | Grating ruler reading head pulley based on high-strength high-modulus fiber material |
| CN112349344B (en) * | 2020-11-03 | 2021-07-06 | 清华大学 | Fully-decoupled two-dimensional nano flexible motion platform |
| CN112965343A (en) * | 2021-02-08 | 2021-06-15 | 上海度宁科技有限公司 | Workpiece table structure, photoetching system comprising same and exposure method thereof |
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| DE2521618B1 (en) * | 1975-05-15 | 1976-03-11 | Zeiss Carl Fa | Device for measuring or setting two-dimensional position coordinates |
| CN201044322Y (en) * | 2007-05-24 | 2008-04-02 | 赵阿义 | Module needle inserting machine plastic rubber member feeding guide rails |
| CN103225728B (en) * | 2013-04-24 | 2014-12-24 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN105500301B (en) * | 2015-11-23 | 2017-08-11 | 清华大学 | Two-dimensional nano servo platform and the measuring method using grating |
| CN106272364A (en) * | 2016-10-31 | 2017-01-04 | 山东大学 | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform |
| CN106601307B (en) * | 2016-12-09 | 2019-04-23 | 清华大学 | Two-dimensional nano flexible motion platform |
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