CN105345760A - Large-stroke two-dimensional servo platform and measuring method with optical gratings - Google Patents

Large-stroke two-dimensional servo platform and measuring method with optical gratings Download PDF

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Publication number
CN105345760A
CN105345760A CN201510819077.6A CN201510819077A CN105345760A CN 105345760 A CN105345760 A CN 105345760A CN 201510819077 A CN201510819077 A CN 201510819077A CN 105345760 A CN105345760 A CN 105345760A
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China
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flexible guide
rigid connector
flexible
decoupling zero
zero part
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CN201510819077.6A
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CN105345760B (en
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张震
王鹏
汪昌明
闫鹏
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Tsinghua University
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Tsinghua University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
    • B25H1/02—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby of table type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

The invention discloses a large-stroke two-dimensional servo platform and a measuring method with optical gratings. The large-stroke two-dimensional servo platform comprises a base, a terminal platform, an X-direction driver, a Y-direction driver, a first X-direction rigid connecting piece, a first Y-direction rigid connecting piece, a first Y-direction flexible decoupling piece, a first X-direction flexible decoupling piece, a first X-direction flexible guiding piece, a second X-direction flexible guiding piece, a first Y-direction flexible guiding piece, a second Y-direction flexible guiding piece, the X-direction optical grating and the Y-direction optical grating. The first X-direction rigid connecting piece is connected with the X-direction driver. The first Y-direction rigid connecting piece is connected with the Y-direction driver. The first X-direction flexible guiding piece and the second X-direction flexible guiding piece are arranged in the X direction in a spaced manner and connected with the base and the first X-direction rigid connecting piece. The first Y-direction flexible guiding piece and the second Y-direction flexible guiding piece are arranged in the Y direction in a spaced manner and connected with the base and the first Y-direction rigid connecting piece. According to the embodiment, the large-stroke two-dimensional servo platform has the beneficial effects that the structure is simple, the manufacturing cost is low, using is convenient, and the plane displacement of the terminal platform can be conveniently measured.

Description

The measuring method of Long Distances two-dimensional nano servo platform and employing grating
Technical field
The present invention relates to a kind of Long Distances two-dimensional nano servo platform, also relate to a kind of measuring method adopting grating.
Background technology
Existing sophisticated sensor majority realizes measuring measured piece axially-movable high-precision large-stroke in the very little situation of the non axial skew of guarantee.Thus, the plane motion of the direct measuring terminals platform of grating can be adopted for the plane motion of little stroke (being less than 200 microns).
For the measurement of Long Distances precision movement platform plane motion, owing to having exceeded the non axial geometry restriction of grating sensor, directly cannot measure terminal platform.
A kind of measuring method of professor's Awtar proposition of University of Michigan: utilize grating sensor and capacitance sensor by repeatedly compensating the measurement that can realize terminal platform in-plane displancement.But this measurement side needs 2 class sensors (capacitance sensor price is higher than grating sensor), and there is the defect of installation and debugging complexity (by the halfpace of grating sensor measurement for fixed capacity sensor in the method for this repetitive measurement, again by the displacement of capacitance sensor measuring terminals platform), uncertain factor is increased, and error more should not control.As can be seen from the experimental result of Awtar professor, this method error of measuring is very large.
In existing high-end instrument and equipment, two-frequency laser interferometer can measurement plane Long Distances, but cost is high, installs complicated.
Summary of the invention
The application makes the discovery of the following fact and problem and understanding based on inventor: the structural design of Long Distances two-dimensional nano servo platform needs with measuring the consideration that combines.And the structural design of existing Long Distances precision movement platform does not combine with measurement and considers.
The present invention is intended to solve one of technical problem in correlation technique at least to a certain extent.For this reason, the present invention propose a kind ofly have that structure is simple, the Long Distances two-dimensional nano servo platform of low cost of manufacture, easy to use, the advantage of being convenient to the in-plane displancement of measuring terminals platform.
The present invention also proposes a kind of measuring method adopting grating, and the measuring method of described employing grating is for measuring the in-plane displancement of the terminal platform of described Long Distances two-dimensional nano servo platform.
The Long Distances two-dimensional nano servo platform of embodiment comprises according to a first aspect of the present invention: pedestal; Terminal platform, described terminal platform is positioned at the inner side at the edge of described pedestal; X is to driver and Y-direction driver; One X is to rigid connector and the first Y-direction rigid connector, and a described X is to rigid connector along X to extending and being connected to driver with described X, and described first Y-direction rigid connector extends along Y-direction and is connected with described Y-direction driver; The flexible decoupling zero part of first Y-direction and an X are to flexible decoupling zero part, the flexible decoupling zero part of described first Y-direction is along X to extending and being connected to rigid connector with a described X with described terminal platform respectively, and a described X extends to flexible decoupling zero part along Y-direction and is connected with described first Y-direction rigid connector with described terminal platform respectively; One X is to flexible guide and the 2nd X to flexible guide, a described X is to flexible guide and described 2nd X to flexible guide along X to arranging at interval, and a described X extends to flexible guide and described 2nd X to each in flexible guide along Y-direction and is connected to retrain non-X from a described X to rigid connector to move with a described X to rigid connector with described pedestal respectively; First Y-direction flexible guide and the second Y-direction flexible guide, described first Y-direction flexible guide and described second Y-direction flexible guide are arranged at interval along Y-direction, and described first Y-direction flexible guide and each in described second Y-direction flexible guide are along X to extending and being connected with described first Y-direction rigid connector so that the non-Y-direction retraining described first Y-direction rigid connector is moved with described pedestal respectively; And for measure a described X to rigid connector at the X of X displacement upwards to grating and the Y-direction grating for measuring described first displacement of Y-direction rigid connector in Y-direction.
Have that structure is simple according to the Long Distances two-dimensional nano servo platform of the embodiment of the present invention, the advantage such as low cost of manufacture, easy to use, the in-plane displancement of being convenient to measuring terminals platform.
According to one embodiment of present invention, described X to grating comprise be located at a described X to the X on the upper surface of rigid connector to grating scale and for measure described X to grating scale at the X of X displacement upwards to grating sensor, described Y-direction grating comprises the Y-direction grating scale on the upper surface being located at described first Y-direction rigid connector and the Y-direction grating sensor for measuring the displacement of described Y-direction grating scale in Y-direction.
The measuring method of the employing grating of the Long Distances two-dimensional nano servo platform of embodiment comprises the following steps according to a second aspect of the present invention: A) utilize described X to an X described in grating measuring to rigid connector in X displacement upwards, utilize the first displacement of Y-direction rigid connector in Y-direction described in described Y-direction grating measuring; And B) according to a described X to rigid connector in X displacement upwards and described first displacement of Y-direction rigid connector in Y-direction, calculate the in-plane displancement of described terminal platform.
Simple according to the measuring method step of the employing grating of the embodiment of the present invention, easily, easily, accurately can measure the in-plane displancement of terminal platform, and without the need to using costliness, complicated measuring instrument, also without the need to carrying out complicated compensation to measurement structure.
According to one embodiment of present invention, the measuring method of described employing grating comprises further: utilize a described X to deduct a described X to the X of rigid connector to hunt effect to obtain described terminal platform in X displacement upwards to rigid connector in X displacement upwards, described first displacement of Y-direction rigid connector in Y-direction is utilized to deduct the Y-direction hunt effect of described first Y-direction rigid connector to obtain the displacement of described terminal platform in Y-direction, described terminal platform is utilized to obtain the in-plane displancement of described terminal platform at X to the displacement in Y-direction, a wherein said X meets polynomial relation to the X of rigid connector to the Y-direction displacement of hunt effect and described terminal platform, the described Y-direction hunt effect of the first Y-direction rigid connector and the X of described terminal platform meet polynomial relation to displacement.
The Long Distances two-dimensional nano servo platform of embodiment comprises according to a third aspect of the present invention: pedestal; Terminal platform, described terminal platform is positioned at the inner side at the edge of described pedestal; X is to driver and Y-direction driver; One X is to rigid connector and the first Y-direction rigid connector, and a described X is to rigid connector along X to extending and being connected to driver with described X, and described first Y-direction rigid connector extends along Y-direction and is connected with described Y-direction driver; The flexible decoupling zero part of first Y-direction and an X are to flexible decoupling zero part, the flexible decoupling zero part of described first Y-direction is along X to extending and being connected to rigid connector with a described X with described terminal platform respectively, and a described X extends to flexible decoupling zero part along Y-direction and is connected with described first Y-direction rigid connector with described terminal platform respectively; One X is to flexible guide and the 2nd X to flexible guide, a described X is to flexible guide and described 2nd X to flexible guide along X to arranging at interval, and a described X extends to flexible guide and described 2nd X to each in flexible guide along Y-direction and is connected to retrain non-X from a described X to rigid connector to move with a described X to rigid connector with described pedestal respectively; And first Y-direction flexible guide and the second Y-direction flexible guide, described first Y-direction flexible guide and described second Y-direction flexible guide are arranged at interval along Y-direction, and described first Y-direction flexible guide and each in described second Y-direction flexible guide are along X to extending and being connected so that the non-Y-direction retraining described first Y-direction rigid connector is moved with described first Y-direction rigid connector with described pedestal respectively.
There is according to the Long Distances two-dimensional nano servo platform of the embodiment of the present invention advantage of the in-plane displancement that can utilize grating measuring terminal platform.
According to one embodiment of present invention, a described X is connected to the first end of rigid connector to flexible guide with a described X, described 2nd X is connected to the second end of rigid connector to flexible guide with a described X, described first Y-direction flexible guide is connected with the first end of described first Y-direction rigid connector, described second Y-direction flexible guide is connected with the second end of described first Y-direction rigid connector, preferably, it is relative to the flexible decoupling zero part of described first Y-direction in the vertical direction the below of flexible guide and described first Y-direction flexible decoupling zero part that a described X is positioned at described 2nd X to flexible guide, it is relative to flexible decoupling zero part with a described X in the vertical direction to the below of flexible decoupling zero part that described first Y-direction flexible guide is positioned at described second Y-direction flexible guide and a described X.
According to one embodiment of present invention, described Long Distances two-dimensional nano servo platform comprises further: the 2nd X is to rigid connector and the second Y-direction rigid connector, described 2nd X is to rigid connector along X to extension, and described second Y-direction rigid connector extends along Y-direction; The flexible decoupling zero part of second Y-direction, the flexible decoupling zero part of described second Y-direction is along X to extension, and the first end of the flexible decoupling zero part of described second Y-direction is connected to rigid connector with described 2nd X, and the second end of the flexible decoupling zero part of described second Y-direction is connected with described terminal platform; 2nd X is to flexible decoupling zero part, and described 2nd X extends to flexible decoupling zero part along Y-direction, and described 2nd X is connected to the first end of flexible decoupling zero part with described second Y-direction rigid connector, and described 2nd X is connected to the second end of flexible decoupling zero part with described terminal platform; 3rd X is to flexible guide and the 4th X to flexible guide, described 3rd X is to flexible guide and described 4th X to flexible guide along X to arranging at interval, and described 3rd X extends to flexible guide and described 4th X to each in flexible guide along Y-direction and is connected to retrain non-X from described two X to rigid connector to move with described 2nd X to rigid connector with described pedestal respectively; And the 3rd Y-direction flexible guide and the 4th Y-direction flexible guide, described 3rd Y-direction flexible guide and described 4th Y-direction flexible guide are arranged at interval along Y-direction, and described 3rd Y-direction flexible guide and each in described 4th Y-direction flexible guide are along X to extending and being connected so that the non-Y-direction retraining described second Y-direction rigid connector is moved with described second Y-direction rigid connector with described pedestal respectively.
According to one embodiment of present invention, described pedestal comprises base body and is located at the first installation portion on described base body, second installation portion, 3rd installation portion and the 4th installation portion, a described X is connected to first end and a described X of flexible guide to rigid connector and the second end is connected with described first installation portion, described 2nd X is connected to first end and a described X of flexible guide to rigid connector and the second end is connected with described 3rd installation portion, the first end of described first Y-direction flexible guide is connected with described first Y-direction rigid connector and the second end is connected with described second installation portion, the first end of described second Y-direction flexible guide is connected with described first Y-direction rigid connector and the second end is connected with described 4th installation portion, a wherein said X is to flexible guide, described 2nd X is to flexible guide, each in described first Y-direction flexible guide and described second Y-direction flexible guide is spaced apart with described base body in the vertical direction.
According to one embodiment of present invention, a described X to flexible guide be two and two described X to the relative X of flexible guide to symmetry, described 2nd X to flexible guide be two and two described 2nd X to the relative X of flexible guide to symmetry, described first Y-direction flexible guide is two and two relative Y-directions of described first Y-direction flexible guide are symmetrical, and described second Y-direction flexible guide is two and two relative Y-directions of described second Y-direction flexible guide are symmetrical.
According to one embodiment of present invention, described Long Distances two-dimensional nano servo platform is printing integrated shaping by 3D, and preferably, described two-dimensional nano servo platform is plastic material (as ABS), printing integrated shaping by 3D.
Accompanying drawing explanation
Fig. 1 is the top view of the Long Distances two-dimensional nano servo platform according to the embodiment of the present invention;
Fig. 2 is the structural representation of the Long Distances two-dimensional nano servo platform according to the embodiment of the present invention;
Fig. 3 is the partial structurtes schematic diagram of the Long Distances two-dimensional nano servo platform according to the embodiment of the present invention;
Fig. 4 is the partial structurtes schematic diagram of the Long Distances two-dimensional nano servo platform according to the embodiment of the present invention;
Fig. 5 is the front view of the Long Distances two-dimensional nano servo platform according to the embodiment of the present invention;
Fig. 6 is the flow chart of the measuring method of employing grating according to the embodiment of the present invention.
Detailed description of the invention
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the present invention, and can not limitation of the present invention be interpreted as.
Below with reference to the accompanying drawings Long Distances two-dimensional nano servo platform 10 according to the embodiment of the present invention is described.As Figure 1-Figure 5, Long Distances two-dimensional nano servo platform 10 according to the embodiment of the present invention comprises pedestal 101, terminal platform 102, X is to driver (not shown), Y-direction driver (not shown), one X is to rigid connector 1031, first Y-direction rigid connector 1032, the flexible decoupling zero part 1041 of first Y-direction, one X is to flexible decoupling zero part 1042, one X is to flexible guide 1051, 2nd X is to flexible guide 1052, first Y-direction flexible guide 1053, second Y-direction flexible guide 1054, for measure an X to rigid connector 1031 at the X of X displacement upwards to grating 106 and the Y-direction grating 107 for measuring the first displacement of Y-direction rigid connector 1032 in Y-direction.
Terminal platform 102 is positioned at the inner side at the edge of pedestal 101.One X is to rigid connector 1031 along X to extension, and an X is connected to driver to rigid connector 1031 with X, and the first Y-direction rigid connector 1032 extends along Y-direction, and the first Y-direction rigid connector 1032 is connected with Y-direction driver.The flexible decoupling zero part 1041 of first Y-direction is along X to extension, the flexible decoupling zero part 1041 of first Y-direction is connected to rigid connector 1031 with an X with terminal platform 102 respectively, one X extends to flexible decoupling zero part 1042 along Y-direction, and an X is connected with the first Y-direction rigid connector 1032 with terminal platform 102 respectively to flexible decoupling zero part 1042.
One X is to flexible guide 1051 and the 2nd X to flexible guide 1052 along X to arranging at interval, and an X extends to flexible guide 1051 and the 2nd X to each in flexible guide 1052 along Y-direction and is connected to retrain the non-X of an X to rigid connector 1031 to moving to rigid connector 1031 with an X with pedestal 101 respectively.First Y-direction flexible guide 1053 and the second Y-direction flexible guide 1054 are arranged at interval along Y-direction, and the first Y-direction flexible guide 1053 and each in the second Y-direction flexible guide 1054 are along X to extending and being connected so that the non-Y-direction retraining the first Y-direction rigid connector 1032 is moved with the first Y-direction rigid connector 1032 with pedestal 101 respectively.
Just because of present inventor the structural design of Long Distances two-dimensional nano servo platform 10 combined with measurement and consider, therefore according to the Long Distances two-dimensional nano servo platform 10 of the embodiment of the present invention by arranging the X that is connected with pedestal 101 to rigid connector 1031 with an X to flexible guide 1051 and the 2nd X to flexible guide 1052 and the first Y-direction flexible guide 1053 and the second Y-direction flexible guide 1054 of being connected with pedestal 101 with the first Y-direction rigid connector 1032, thus an X can be utilized to retrain the non-X of an X to rigid connector 1031 to motion to flexible guide 1051 and the 2nd X to flexible guide 1052, and utilize the first Y-direction flexible guide 1053 and the second Y-direction flexible guide 1054 to retrain the non-Y-direction motion of the first Y-direction rigid connector 1032.
In other words, an X is less than preset value to the non-X of rigid connector 1031 to motion, and the non-Y-direction motion of the first Y-direction rigid connector 1032 is less than preset value.That is, an X is to rigid connector 1031 substantially only along X to moving, and the first Y-direction rigid connector 1032 only moves along Y-direction substantially.
One X limits the rotation of an X in the Y-direction translation and plane of rigid connector 1031 to flexible guide 1051 and the 2nd X to flexible guide 1052.First Y-direction flexible guide 1053 and the second Y-direction flexible guide 1054 limit the X of the first Y-direction rigid connector 1032 to the rotation in translation and plane.Therefore, an X can meet the condition of grating Long Distances accurate measurement to rigid connector 1031 and the first Y-direction rigid connector 1032.That is, one X is limited within the scope of the non axial permissible error of grating to the non axial motion of rigid connector 1031 and the first Y-direction rigid connector 1032, and namely an X is limited in the geometry limit of grating to the non axial motion of rigid connector 1031 and the first Y-direction rigid connector 1032.
X can be utilized thus to measure an X to rigid connector 1031 in X displacement upwards and utilize Y-direction grating 107 to measure the first displacement of Y-direction rigid connector 1032 in Y-direction to grating 106, again according to an X to rigid connector 1031 in X displacement upwards and the first displacement of Y-direction rigid connector 1032 in Y-direction, calculate the in-plane displancement of terminal platform 102.
Therefore, have that structure is simple according to the Long Distances two-dimensional nano servo platform 10 of the embodiment of the present invention, the advantage such as the in-plane displancement of low cost of manufacture (without the need to using expensive measurement mechanism), easy to use, the measuring terminals platform 102 that is easy to carry, is convenient to.
In addition, meet decoupling zero according to the Long Distances two-dimensional nano servo platform 10 of the embodiment of the present invention and be separated with guiding, guide leads separately, the independent decoupling zero of decoupling zero part.Wherein, term " Long Distances " refers to that Long Distances two-dimensional nano servo platform 10 has the stroke of Centimeter Level, and term " nanometer " refers to that Long Distances two-dimensional nano servo platform 10 has nano level kinematic accuracy.
Describe the measuring method according to the employing grating of the Long Distances two-dimensional nano servo platform 10 of the embodiment of the present invention below with reference to Fig. 6, the measuring method of described employing grating comprises the following steps:
A) utilize X to measure an X to rigid connector 1031 in X displacement upwards to grating 106, utilize Y-direction grating 107 to measure the first displacement of Y-direction rigid connector 1032 in Y-direction; With
B) according to an X to rigid connector 1031 in X displacement upwards and the first displacement of Y-direction rigid connector 1032 in Y-direction, calculate the in-plane displancement of terminal platform 102.
That is, the in-plane displancement of the terminal platform 102 measuring Long Distances two-dimensional nano servo platform 10 is may be used for according to the measuring method of the employing grating of the embodiment of the present invention.Wherein, an X is regarded as terminal platform 102 in X displacement upwards to rigid connector 1031 in X displacement upwards, and the first displacement of Y-direction rigid connector 1032 in Y-direction is regarded as the displacement of terminal platform 102 in Y-direction.
Simple according to the measuring method step of the employing grating of the embodiment of the present invention, easily, easily, accurately can measure the in-plane displancement of terminal platform 102, and without the need to using costliness, complicated measuring instrument, also without the need to carrying out complicated compensation to measurement structure.
Advantageously, measuring method according to the employing grating of the embodiment of the present invention comprises further: utilize an X to deduct an X to the X of rigid connector 1031 to hunt effect to obtain terminal platform 102 in X displacement upwards to rigid connector 1031 in X displacement upwards (this displacement is obtained to grating 106 measurement by X), the first displacement of Y-direction rigid connector 1032 in Y-direction (this displacement is measured by Y-direction grating 107 and obtained) is utilized to deduct the Y-direction hunt effect of the first Y-direction rigid connector 1032 to obtain the displacement of terminal platform 102 in Y-direction, terminal platform 102 is utilized to obtain the in-plane displancement of terminal platform 102 at X to the displacement in Y-direction.Thus can the in-plane displancement of more accurately measuring terminals platform 102.
Wherein, an X meets polynomial relation to the X of rigid connector 1031 to the Y-direction displacement of hunt effect and terminal platform 102, and the Y-direction hunt effect of the first Y-direction rigid connector 1032 and the X of terminal platform 102 meet polynomial relation to displacement.
As Figure 1-Figure 5, in some embodiments of the invention, Long Distances two-dimensional nano servo platform 10 comprises pedestal 101, terminal platform 102, X is to driver, Y-direction driver, one X is to rigid connector 1031, first Y-direction rigid connector 1032, 2nd X is to rigid connector 1033, second Y-direction rigid connector 1034, the flexible decoupling zero part 1041 of first Y-direction, one X is to flexible decoupling zero part 1042, the flexible decoupling zero part 1043 of second Y-direction, 2nd X is to flexible decoupling zero part 1044, one X is to flexible guide 1051, 2nd X is to flexible guide 1052, first Y-direction flexible guide 1053, second Y-direction flexible guide 1054, 3rd X is to flexible guide 1055, 4th X is to flexible guide 1056, 3rd Y-direction flexible guide 1057, 4th Y-direction flexible guide 1058, X is to grating 106 and Y-direction grating 107.
X can be voice coil motor or piezoelectric ceramics to each in driver and Y-direction driver.The flexible decoupling zero part 1041 of first Y-direction, one X is to flexible decoupling zero part 1042, the flexible decoupling zero part 1043 of second Y-direction, 2nd X is to flexible decoupling zero part 1044, one X is to flexible guide 1051, 2nd X is to flexible guide 1052, first Y-direction flexible guide 1053, second Y-direction flexible guide 1054, 3rd X is to flexible guide 1055, 4th X is to flexible guide 1056, each in 3rd Y-direction flexible guide 1057 and the 4th Y-direction flexible guide 1058 can be flexible leaf spring.
Pedestal 101 can comprise base body 1011 and the first installation portion 1012 of being located on base body 1011 to the 8th installation portion 1019, base body 1011 can be three-back-shaped.Terminal platform 102 can comprise terminal platform body 1021 and the first connecting portion 1022 of being located on terminal platform body 1021 to the 8th connecting portion 1029, terminal platform body 1021 can be three-back-shaped.Specifically, the inside edge of base body 1011 and outer edge can be squares, and the inside edge of terminal platform body 1021 and outer edge also can be squares.First connecting portion 1022 is L shape to each in the 8th connecting portion 1029, and namely the first connecting portion 1022 to each in the 8th connecting portion 1029 includes X to portion and Y-direction portion.
First connecting portion 1022, second connecting portion 1023, the 5th connecting portion 1026 are connected with terminal platform body 1021 to portion 10222,10232,10262,10272 with the X of each in the 6th connecting portion 1027, the 3rd connecting portion 1024, the 4th connecting portion 1025, the 7th connecting portion 1028 is connected with terminal platform body 1021 with the Y-direction portion 10242,10252,10282,10292 of each in the 8th connecting portion 1029.
As Figure 1-Figure 4, the 2nd X is to rigid connector 1033 along X to extension, and the second Y-direction rigid connector 1034 extends along Y-direction.3rd X is to flexible guide 1055 and the 4th X to flexible guide 1056 along X to arranging at interval, and the 3rd X extends to flexible guide 1055 and the 4th X to each in flexible guide 1056 along Y-direction and is connected to retrain the non-X of the 2nd X to rigid connector 1033 to moving to rigid connector 1033 with the 2nd X with pedestal 101 respectively.3rd Y-direction flexible guide 1057 and the 4th Y-direction flexible guide 1058 are arranged at interval along Y-direction, and the 3rd Y-direction flexible guide 1057 and each in the 4th Y-direction flexible guide 1058 are along X to extending and being connected so that the non-Y-direction retraining the second Y-direction rigid connector 1034 is moved with the second Y-direction rigid connector 1034 with pedestal 101 respectively.
That is, 3rd X is identical to the effect of rigid connector 1031 to an X to flexible guide 1051 with an X to the effect of rigid connector 1033 to the 2nd X to flexible guide 1055, and the 4th X is identical to the effect of rigid connector 1031 to an X to flexible guide 1052 with the 2nd X to the effect of rigid connector 1033 to the 2nd X to flexible guide 1056.3rd Y-direction flexible guide 1057 is identical with the effect of the first Y-direction flexible guide 105 to the first Y-direction rigid connector 1032 to the effect of the second Y-direction rigid connector 1034, and the 4th Y-direction flexible guide 1058 is identical with the effect of the second Y-direction flexible guide 1054 to the first Y-direction rigid connector 1032 to the effect of the second Y-direction rigid connector 1034.
Advantageously, an X is symmetrical to the relative Y-direction of rigid connector 1033 with the 2nd X to rigid connector 1031, and the first Y-direction rigid connector 1032 and the relative X of the second Y-direction rigid connector 1034 are to symmetry.One X is symmetrical to the relative Y-direction of flexible guide 1055 with the 3rd X to flexible guide 1051, and the 2nd X is symmetrical to the relative Y-direction of flexible guide 1056 with the 4th X to flexible guide 1052.First Y-direction flexible guide 1053 and the relative X of the 3rd Y-direction flexible guide 1057 are to symmetry, and the second Y-direction flexible guide 1054 and the relative X of the 4th Y-direction flexible guide 1058 are to symmetry.The symmetry of height improves the kinematic accuracy of Long Distances two-dimensional nano servo platform 10.
In one embodiment of the invention, as Figure 1-Figure 4, one X is connected to the first end (such as an X is to the end of the adjacent terminals platform body 1021 of rigid connector 1031) of rigid connector 1031 to flexible guide 1051 with an X, and the 2nd X is connected to second end (such as an X is to the end away from terminal platform body 1021 of rigid connector 1031) of rigid connector 1031 to flexible guide 1052 with an X.3rd X is connected to the first end (such as the 2nd X is to the end of the adjacent terminals platform body 1021 of rigid connector 1033) of rigid connector 1033 to flexible guide 1055 with the 2nd X, and the 4th X is connected to second end (such as the 2nd X is to the end away from terminal platform body 1021 of rigid connector 1033) of rigid connector 1033 to flexible guide 1056 with the 2nd X.
First Y-direction flexible guide 1053 is connected with the first end (such as the end of the adjacent terminals platform body 1021 of the first Y-direction rigid connector 1032) of the first Y-direction rigid connector 1032, and the second Y-direction flexible guide 1054 is connected with second end (such as the end away from terminal platform body 1021 of the first Y-direction rigid connector 1032) of the first Y-direction rigid connector 1032.3rd Y-direction flexible guide 1057 is connected with the first end (such as the end of the adjacent terminals platform body 1021 of the second Y-direction rigid connector 1034) of the second Y-direction rigid connector 1034, and the 4th Y-direction flexible guide 1058 is connected with second end (such as the end away from terminal platform body 1021 of the second Y-direction rigid connector 1034) of the second Y-direction rigid connector 1034.
In other words, one X is positioned at the inner side of the 2nd X to flexible guide 1052 to flexible guide 1051,3rd X is positioned at the inner side of the 4th X to flexible guide 1056 to flexible guide 1055, first Y-direction flexible guide 1053 is positioned at the inner side of the second Y-direction flexible guide 1054, and the 3rd Y-direction flexible guide 1057 is positioned at the inner side of the 4th Y-direction flexible guide 1058.Wherein, the direction of adjacent terminals platform body 1021 is introversive, and the direction away from terminal platform body 1021 is export-oriented.
By increasing an X to flexible guide 1051 and the 2nd X to the distance between flexible guide 1052, 3rd X is to flexible guide 1055 and the 4th X to the distance between flexible guide 1056, distance between first Y-direction flexible guide 1053 and the second Y-direction flexible guide 1054 and the distance between the 3rd Y-direction flexible guide 1057 and the 4th Y-direction flexible guide 1058, thus increase and act on an X to rigid connector 1031, 2nd X is to rigid connector 1033, the support arm of force on first Y-direction rigid connector 1032 and the second Y-direction rigid connector 1034, make platform better effects if, simultaneously, above-mentioned flexible guide greatly inhibits an X to rigid connector 1031, 2nd X is to rigid connector 1033, the rotation of the first Y-direction rigid connector 1032 and the second Y-direction rigid connector 1034, greatly reduce the twin shaft degree of coupling, the kinematic accuracy of terminal platform 102 is made to have had qualitative leap.
And, due to an X non-Y-direction motion to motion and the first Y-direction rigid connector 1032 and the second Y-direction rigid connector 1034 to rigid connector 1031 and the 2nd X to the non-X of rigid connector 1033 can be retrained further, therefore can the in-plane displancement of more accurately measuring terminals platform 102.
Wherein, the junction of the one X flexible decoupling zero part 1041 to the more contiguous X of flexible guide 1051 to rigid connector 1031 and the first Y-direction, the effect that one X suppresses an X to rotate to rigid connector 1031 to flexible guide 1051 is more obvious, the junction of the 3rd X flexible decoupling zero part 1043 to more contiguous 2nd X of flexible guide 105 to rigid connector 1033 and the second Y-direction, the effect that the 3rd X suppresses the 2nd X to rotate to rigid connector 1033 to flexible guide 105 is more obvious.The more contiguous first Y-direction rigid connector 1032 of first Y-direction flexible guide 1053 and an X are to the junction of flexible decoupling zero part 1042, the effect that first Y-direction flexible guide 1053 suppresses the first Y-direction rigid connector 1032 to rotate is more obvious, the more contiguous second Y-direction rigid connector 1034 of 3rd Y-direction flexible guide 1057 and the 2nd X are to the junction of flexible decoupling zero part 1044, and the effect that the 3rd Y-direction flexible guide 1057 suppresses the second Y-direction rigid connector 1034 to rotate is more obvious.
As Figure 1-Figure 5, one X is positioned at the below of the 2nd X to the flexible decoupling zero part 1041 of flexible guide 1052 and the first Y-direction to flexible guide 1051, decoupling zero part 1041 flexible with the first Y-direction is relative in the vertical direction to flexible guide 1051 for one X, 3rd X is positioned at the below of the 4th X to the flexible decoupling zero part 1043 of flexible guide 1056 and the second Y-direction to flexible guide 1055, and decoupling zero part 1043 flexible with the second Y-direction is relative in the vertical direction to flexible guide 1055 for the 3rd X.First Y-direction flexible guide 1053 is positioned at the second Y-direction flexible guide 1054 and the X below to flexible decoupling zero part 1042, first Y-direction flexible guide 1053 is relative to flexible decoupling zero part 1042 with an X in the vertical direction, 3rd Y-direction flexible guide 1057 is positioned at the 4th Y-direction flexible guide 1058 and the 2nd X below to flexible decoupling zero part 1044, and the 3rd Y-direction flexible guide 1057 is relative to flexible decoupling zero part 1044 with the 2nd X in the vertical direction.Above-below direction is as shown in the arrow A in Fig. 5.
The structure of Long Distances two-dimensional nano servo platform 10 can be made thus compacter, and terminal platform 102 and an X are not in contact with each other to flexible guide 1051, the 3rd X to flexible guide 1055, first Y-direction flexible guide 1053 and the 3rd Y-direction flexible guide 1057, thus ensure there is not any friction in the process of motion, improve the kinematic accuracy of terminal platform 102.
Specifically, in existing Long Distances multi-layer nano servo platform, X is upwards arranged side by side to flexible guide and the flexible decoupling zero part of Y-direction at X, cause existing Long Distances multi-layer nano servo platform very large in X size upwards, and Y-direction flexible guide and X are arranged side by side in Y-direction to flexible decoupling zero part, cause the size of existing Long Distances multi-layer nano servo platform in Y-direction very large.
Wherein, one X refers to flexible guide 1051 is relative with the first Y-direction flexible decoupling zero part 1041 in the vertical direction: the flexible decoupling zero part 1041 of the first Y-direction upwards has first end and the second end at X, an X to flexible guide 1051 at X upwards between this first end and this second end of the flexible decoupling zero part 1041 of the first Y-direction.First Y-direction flexible guide 1053 refers to flexible decoupling zero part 1042 is relative with an X in the vertical direction: an X has first end and the second end to flexible decoupling zero part 1042 in Y-direction, the first Y-direction flexible guide 1053 in Y-direction at the first X between this first end of flexible decoupling zero part 1042 and this second end.
3rd X refers to flexible guide 1055 is relative with the second Y-direction flexible decoupling zero part 1043 in the vertical direction: the flexible decoupling zero part 1043 of the second Y-direction upwards has first end and the second end at X, the 3rd X to flexible guide 1055 at X upwards between this first end and this second end of the flexible decoupling zero part 1043 of the second Y-direction.3rd Y-direction flexible guide 1057 refers to flexible decoupling zero part 1044 is relative with the 2nd X in the vertical direction: the 2nd X has first end and the second end to flexible decoupling zero part 1044 in Y-direction, the 3rd Y-direction flexible guide 1057 in Y-direction at the second X between this first end of flexible decoupling zero part 1044 and this second end.
When an X to flexible guide 1051 be positioned at the 2nd X to the below of flexible guide 1052 and the first Y-direction flexible decoupling zero part 1041 and in the vertical direction relative and the 3rd X of decoupling zero part 1041 flexible with the first Y-direction to flexible guide 1055 be positioned at the 4th X to the below of flexible guide 1056 and the flexible decoupling zero part 1043 of the second Y-direction and flexible decoupling zero part 1043 is relative with the second Y-direction in the vertical direction time, Long Distances two-dimensional nano servo platform 10 can be reduced in X size upwards.When the first Y-direction flexible guide 1053 be positioned at the second Y-direction flexible guide 1054 and an X to the below of flexible decoupling zero part 1042 and in the vertical direction with an X to flexible decoupling zero part 1042 relative and the 3rd Y-direction flexible guide 1057 be positioned at the 4th Y-direction flexible guide 1058 and the 2nd X to the below of flexible decoupling zero part 1044 and in the vertical direction with the 2nd X to flexible decoupling zero part 1044 relatively time, the size of Long Distances two-dimensional nano servo platform 10 in Y-direction can be reduced.Long Distances two-dimensional nano servo platform 10 can be made thus to have, and compact conformation, size are little, the advantage such as be easy to carry.
Due to an X, to flexible guide 1051, decoupling zero part 1041 flexible with the first Y-direction is relative in the vertical direction, therefore to flexible guide 1051 and an X to the junction of rigid connector 1031, the flexible decoupling zero part 1041 of contiguous first Y-direction and an X, to the junction of rigid connector 1031, thus can suppress an X to the rotation of rigid connector 1031 to an X better.In like manner, 3rd X can suppress the 2nd X to the rotation of rigid connector 1033 to flexible guide 1055 better, first Y-direction flexible guide 1053 can suppress the rotation of the first Y-direction rigid connector 1032 better, and the 3rd Y-direction flexible guide 1057 can suppress the rotation of the second Y-direction rigid connector 1034 better.The support effect to terminal platform 102 can be improved thus.
Advantageously, as shown in Figure 1, one X to flexible guide 1051 be two and two X to flexible guide 1051 relatively X to symmetry, 2nd X to flexible guide 1052 be two and two the 2nd X to flexible guide 1052 relatively X to symmetry, 3rd X to flexible guide 1055 be two and two the 3rd X to flexible guide 1055 relatively X to symmetry, the 4th X to flexible guide 1056 be two and two the 4th X to flexible guide 1056 relatively X to symmetry.
First Y-direction flexible guide 1053 is two and two the first Y-direction flexible guides 1053 Y-direction symmetry relatively, and the second Y-direction flexible guide 1054 is two and two the second Y-direction flexible guides 1054 Y-directions symmetry relatively.3rd Y-direction flexible guide 1057 is two and two the 3rd Y-direction flexible guides 1057 Y-direction symmetry relatively, and the 4th Y-direction flexible guide 1058 is two and two the 4th Y-direction flexible guides 1058 Y-directions symmetry relatively.The symmetry of height improves the kinematic accuracy of Long Distances two-dimensional nano servo platform 10.
As Figure 1-Figure 4, one X is connected to first end and an X of flexible guide 1051 to rigid connector 1031 and the second end is connected with the first installation portion 1012, and another X is connected to first end and an X of flexible guide 1051 to rigid connector 1031 and the second end is connected with the second installation portion 1013.2nd X is connected to first end and an X of flexible guide 1052 to rigid connector 1031 and the second end is connected with the 3rd installation portion 1014, and another the 2nd X is connected to first end and an X of flexible guide 1052 to rigid connector 1031 and the second end is connected with the 4th installation portion 1015.3rd X is connected to first end and the 2nd X of flexible guide 1055 to rigid connector 1033 and the second end is connected with the 5th installation portion 1016, and another the 3rd X is connected to first end and the 2nd X of flexible guide 1055 to rigid connector 1033 and the second end is connected with the 7th installation portion 1018.4th X is connected to first end and the 2nd X of flexible guide 1056 to rigid connector 1033 and the second end is connected with the 6th installation portion 1017, and another the 4th X is connected to first end and the 2nd X of flexible guide 1056 to rigid connector 1033 and the second end is connected with the 8th installation portion 1019.
The first end of a first Y-direction flexible guide 1053 is connected with the first Y-direction rigid connector 1032 and the second end is connected with the second installation portion 1013, and the first end of another the first Y-direction flexible guide 1053 is connected with the first Y-direction rigid connector 1032 and the second end is connected with the 5th installation portion 1016.The first end of a second Y-direction flexible guide 1054 is connected with the first Y-direction rigid connector 1032 and the second end is connected with the 4th installation portion 1015, and the first end of another the second Y-direction flexible guide 1054 is connected with the first Y-direction rigid connector 1032 and the second end is connected with the 6th installation portion 1017.The first end of a 3rd Y-direction flexible guide 1057 is connected with the second Y-direction rigid connector 1034 and the second end is connected with the 7th installation portion 1018, and the first end of another the 3rd Y-direction flexible guide 1057 is connected with the second Y-direction rigid connector 1034 and the second end is connected with the first installation portion 1012.The first end of a 4th Y-direction flexible guide 1058 is connected with the second Y-direction rigid connector 1034 and the second end is connected with the 8th installation portion 1019, and the first end of another the 4th Y-direction flexible guide 1058 is connected with the second Y-direction rigid connector 1034 and the second end is connected with the 3rd installation portion 1014.
Wherein, an X is spaced apart with base body 1011 in the vertical direction to each in flexible guide 1056, first Y-direction flexible guide 1053, second Y-direction flexible guide 1054, the 3rd Y-direction flexible guide 1057 and the 4th Y-direction flexible guide 1058 to flexible guide 1055, the 4th X to flexible guide 1052, the 3rd X to flexible guide 1051, the 2nd X.
As Figure 1-Figure 4, in examples more of the present invention, the flexible decoupling zero part 1043 of second Y-direction is along X to extending and being connected to rigid connector 1033 with the 2nd X with terminal platform 102 respectively, and the 2nd X extends to flexible decoupling zero part 1044 along Y-direction and is connected with the second Y-direction rigid connector 1034 with terminal platform 102 respectively.Wherein, second Y-direction flexible decoupling zero part 1043 is identical to the effect of rigid connector 1031 to an X with the flexible decoupling zero part 1041 of the first Y-direction to the effect of rigid connector 1033 to the 2nd X, and the 2nd X is identical to the effect of flexible decoupling zero part 1042 to the first Y-direction rigid connector 1032 to the effect of the second Y-direction rigid connector 1034 and an X to flexible decoupling zero part 1044.
As Figure 1-Figure 4, the first Y-direction flexible decoupling zero part 1041, second Y-direction flexible decoupling zero part the 1043, the one X can be two to flexible decoupling zero part 1042 and the 2nd X to each in flexible decoupling zero part 1044.Wherein, two relative X of the flexible decoupling zero part 1041 of the first Y-direction are to symmetry, and two relative X of the flexible decoupling zero part 1043 of the second Y-direction are to symmetry, and Y-direction is symmetrical relatively to flexible decoupling zero part 1042 for two X, and Y-direction is symmetrical relatively to flexible decoupling zero part 1044 for two the 2nd X.Symmetrical structure design can improve the kinematic accuracy of Long Distances two-dimensional nano servo platform 10.
First Y-direction flexible decoupling zero part 1041 Y-direction symmetry relative to the flexible decoupling zero part 1043 of the second Y-direction, an X to flexible decoupling zero part 1042 with the 2nd X to the relative X of flexible decoupling zero part 1044 to symmetry.The kinematic accuracy of Long Distances two-dimensional nano servo platform 10 can be improved thus further.
As Figure 1-Figure 4, an X is T-shaped to rigid connector 1031, first Y-direction rigid connector 1032, the 2nd X to each in rigid connector 1033 and the second Y-direction rigid connector 1034 and comprises X to portion and Y-direction portion.
Specifically, the first end of a flexible decoupling zero part 1041 of the first Y-direction and an X are connected to the Y-direction portion 10311 of rigid connector 1031 and the second end is connected with the Y-direction portion 10221 of the first connecting portion 1022, and the first end of another first Y-direction flexibility decoupling zero part 1041 and an X are connected to the Y-direction portion 10311 of rigid connector 1031 and the second end is connected with the Y-direction portion 10231 of the second connecting portion 1023.One X to the X of rigid connector 1031 to portion 10312 in Y-direction between two flexible decoupling zero parts 1041 of the first Y-direction.
One X is connected to the first end of flexible decoupling zero part 1042 and the X of the first Y-direction rigid connector 1032 to portion 10321 and the second end is connected to portion 10241 with the X of the 3rd connecting portion 1024, and another X is connected to the first end of flexible decoupling zero part 1042 and the X of the first Y-direction rigid connector 1032 to portion 10321 and the second end is connected to portion 10251 with the X of the 4th connecting portion 1025.The Y-direction portion 10322 of the first Y-direction rigid connector 1032 at X upwards at two X between flexible decoupling zero part 1042.
The first end of a flexible decoupling zero part 1043 of the second Y-direction and the 2nd X are connected to the Y-direction portion 10331 of rigid connector 1033 and the second end is connected with the Y-direction portion 10261 of the 5th connecting portion 1026, and the first end of another second Y-direction flexibility decoupling zero part 1043 and the 2nd X are connected to the Y-direction portion 10331 of rigid connector 1033 and the second end is connected with the Y-direction portion 10271 of the 6th connecting portion 1027.2nd X to the X of rigid connector 1033 to portion 10332 in Y-direction between two flexible decoupling zero parts 1043 of the second Y-direction.
2nd X is connected to the first end of flexible decoupling zero part 1044 and the X of the second Y-direction rigid connector 1034 to portion 10341 and the second end is connected to portion 10281 with the X of the 7th connecting portion 1028, and another the 2nd X is connected to the first end of flexible decoupling zero part 1044 and the X of the second Y-direction rigid connector 1034 to portion 10341 and the second end is connected to portion 10291 with the X of the 8th connecting portion 1029.The Y-direction portion 10342 of the second Y-direction rigid connector 1034 at X upwards at two the 2nd X between flexible decoupling zero part 1044.The structure of Long Distances two-dimensional nano servo platform 10 can be made thus more reasonable.
In a concrete example of the present invention, Long Distances two-dimensional nano servo platform 10 is printing integrated shaping by 3D.Not only can improve the kinematic accuracy of terminal platform 102 thus further, and can further by an X to rigid connector 1031, first Y-direction rigid connector 1032, the 2nd X to the non axial movement limit of rigid connector 1033 and the second Y-direction rigid connector 1034 within the scope of the non axial permissible error of grating.
Advantageously, two-dimensional nano servo platform 10 is plastic material (as ABS), printing integrated shaping by 3D.The stroke of Long Distances two-dimensional nano servo platform 10 can be improved thus further.
X to grating 106 comprise be located at an X to the X on the upper surface of rigid connector 1031 to grating scale 1061 and for measure X to grating scale 1061 at the X of X displacement upwards to grating sensor 1062, Y-direction grating 107 comprises the Y-direction grating scale 1071 on the upper surface being located at the first Y-direction rigid connector 1032 and the Y-direction grating sensor 1072 for measuring the displacement of Y-direction grating scale 1071 in Y-direction.In addition, X can install in known manner to grating 106 and Y-direction grating 107.That is, it is known for how being installed on unit under test by grating (X is to grating 106 and Y-direction grating 107).
In some embodiments of the invention, X is to grating 106 for measuring the 2nd X to rigid connector 1033 in X displacement upwards, and Y-direction grating 107 is for measuring the second displacement of Y-direction rigid connector 1034 in Y-direction.According to the 2nd X to rigid connector 1033 in X displacement upwards and the second displacement of Y-direction rigid connector 1034 in Y-direction, calculate the in-plane displancement of terminal platform 102.
Specifically, X is located at the 2nd X on the upper surface of rigid connector 1033 to grating scale 1061, and Y-direction grating scale 1071 is located on the upper surface of the second Y-direction rigid connector 1034.
Referring to Fig. 1-Fig. 5, the course of work according to the Long Distances two-dimensional nano servo platform 10 of the embodiment of the present invention is described.When this X is to driver drives terminal platform 102, driving force acts on an X to rigid connector 1031, drive terminal platform 102 along X to moving by the flexible decoupling zero part 1041 of the first Y-direction, terminal platform 102 drives the 2nd X to move to rigid connector 1033 by the flexible decoupling zero part 1043 of the second Y-direction.When X is pulling force to driving force, the flexible decoupling zero part 1041 of the first Y-direction and the flexible decoupling zero part 1043 of the second Y-direction are all in pressured state, but pressure within the specific limits time, the flexible decoupling zero part 1041 of the first Y-direction and the flexible decoupling zero part 1043 of the second Y-direction all can not buckle in compression.
When terminal platform 102 moves in X direction, make an X scratch distortion to flexible decoupling zero part 1042 and the 2nd X to flexible decoupling zero part 1044 generation, thus pulling force (moment of flexure) is created to the first Y-direction rigid connector 1032 and the second Y-direction rigid connector 1034.First Y-direction flexible guide 1053 and the second Y-direction flexible guide 1054 react on the first Y-direction rigid connector 1032, suppressed sufficiently the rotation of the first Y-direction rigid connector 1032,3rd Y-direction flexible guide 1057 and the 4th Y-direction flexible guide 1058 react on the second Y-direction rigid connector 1034, suppressed sufficiently the rotation of the second Y-direction rigid connector 1034, greatly increase the precision that Y-direction is measured.
When this Y-direction driver drives terminal platform 102, driving force acts on the first Y-direction rigid connector 1032, drive terminal platform 102 to move along Y-direction by an X to flexible decoupling zero part 1042, terminal platform 102 drives the second Y-direction rigid connector 1034 to move by the 2nd X to flexible decoupling zero part 1044.When Y-direction driving force is pulling force, an X is all in tension state to flexible decoupling zero part 1042 and the 2nd X to flexible decoupling zero part 1044, but pressure within the specific limits time, an X all can not buckle in compression to flexible decoupling zero part 1044 to flexible decoupling zero part 1042 and the 2nd X.
When terminal platform 102 moves along Y-direction, the flexible decoupling zero part 1041 of first Y-direction and the flexible decoupling zero part 1043 of the second Y-direction are produced and scratches distortion, thus to rigid connector 1033, pulling force (moment of flexure) is created to rigid connector 1031 and the 2nd X to an X.One X reacts on an X to rigid connector 1031 to flexible guide 1051 and the 2nd X to flexible guide 1052, suppressed sufficiently the rotation of an X to rigid connector 1031,3rd X reacts on the 2nd X to rigid connector 1033 to flexible guide 1055 and the 4th X to flexible guide 1056, suppressed sufficiently the rotation of the 2nd X to rigid connector 1033, substantially increase the precision that X-direction is measured.
When this X works to driver and this Y-direction driver simultaneously, X to Y-direction on produce above-mentioned motion respectively, thus realize the freely-movable of terminal platform 102 in plane (XOY plane).First Y-direction flexible decoupling zero part the 1041, the one X is to the flexible decoupling zero part 1043 of flexible decoupling zero part 1042, second Y-direction and the 2nd X to the existence of flexible decoupling zero part 1044, ensure that the high-precision motion of terminal platform 102, namely the decoupling of Long Distances two-dimensional nano servo platform 10 height ensure that the high-precision motion of terminal platform 102.
3rd X to the effect of flexible guide 1055 and an X same or similar to the effect of flexible guide 1051,4th X to the effect of flexible guide 1056 and the 2nd X same or similar to the effect of flexible guide 1052, the effect of the 3rd Y-direction flexible guide 1057 and the effect of the first Y-direction flexible guide 1053 same or similar, the effect of the 4th Y-direction flexible guide 1058 and the effect of the second Y-direction flexible guide 1054 same or similar, no longer describe at this.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", " counterclockwise ", " axis ", " radial direction ", orientation or the position relationship of the instruction such as " circumference " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise at least one this feature.In describing the invention, the implication of " multiple " is at least two, such as two, three etc., unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or integral; Can be mechanical connection, also can be electrical connection or each other can communication; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements, unless otherwise clear and definite restriction.For the ordinary skill in the art, above-mentioned term concrete meaning in the present invention can be understood as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be that the first and second features directly contact, or the first and second features are by intermediary mediate contact.And, fisrt feature second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " can be fisrt feature immediately below second feature or tiltedly below, or only represent that fisrt feature level height is less than second feature.
In the description of this description, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, to the schematic representation of above-mentioned term not must for be identical embodiment or example.And the specific features of description, structure, material or feature can combine in one or more embodiment in office or example in an appropriate manner.In addition, when not conflicting, the feature of the different embodiment described in this description or example and different embodiment or example can carry out combining and combining by those skilled in the art.
Although illustrate and describe embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, and those of ordinary skill in the art can change above-described embodiment within the scope of the invention, revises, replace and modification.

Claims (10)

1. a Long Distances two-dimensional nano servo platform, is characterized in that, comprising:
Pedestal;
Terminal platform, described terminal platform is positioned at the inner side at the edge of described pedestal;
X is to driver and Y-direction driver;
One X is to rigid connector and the first Y-direction rigid connector, and a described X is to rigid connector along X to extending and being connected to driver with described X, and described first Y-direction rigid connector extends along Y-direction and is connected with described Y-direction driver;
The flexible decoupling zero part of first Y-direction and an X are to flexible decoupling zero part, the flexible decoupling zero part of described first Y-direction is along X to extending and being connected to rigid connector with a described X with described terminal platform respectively, and a described X extends to flexible decoupling zero part along Y-direction and is connected with described first Y-direction rigid connector with described terminal platform respectively;
One X is to flexible guide and the 2nd X to flexible guide, a described X is to flexible guide and described 2nd X to flexible guide along X to arranging at interval, and a described X extends to flexible guide and described 2nd X to each in flexible guide along Y-direction and is connected to retrain non-X from a described X to rigid connector to move with a described X to rigid connector with described pedestal respectively;
First Y-direction flexible guide and the second Y-direction flexible guide, described first Y-direction flexible guide and described second Y-direction flexible guide are arranged at interval along Y-direction, and described first Y-direction flexible guide and each in described second Y-direction flexible guide are along X to extending and being connected with described first Y-direction rigid connector so that the non-Y-direction retraining described first Y-direction rigid connector is moved with described pedestal respectively; And
For measure a described X to rigid connector at the X of X displacement upwards to grating and the Y-direction grating for measuring described first displacement of Y-direction rigid connector in Y-direction.
2. Long Distances two-dimensional nano servo platform according to claim 1, it is characterized in that, described X to grating comprise be located at a described X to the X on the upper surface of rigid connector to grating scale and for measure described X to grating scale at the X of X displacement upwards to grating sensor, described Y-direction grating comprises the Y-direction grating scale on the upper surface being located at described first Y-direction rigid connector and the Y-direction grating sensor for measuring the displacement of described Y-direction grating scale in Y-direction.
3. a measuring method for the employing grating of Long Distances two-dimensional nano servo platform according to claim 1 and 2, is characterized in that, comprise the following steps:
A) utilize described X to an X described in grating measuring to rigid connector in X displacement upwards, utilize the first displacement of Y-direction rigid connector in Y-direction described in described Y-direction grating measuring; With
B) according to a described X to rigid connector in X displacement upwards and described first displacement of Y-direction rigid connector in Y-direction, calculate the in-plane displancement of described terminal platform.
4. the measuring method of employing grating according to claim 3, it is characterized in that, comprise further: utilize a described X to deduct a described X to the X of rigid connector to hunt effect to obtain described terminal platform in X displacement upwards to rigid connector in X displacement upwards, described first displacement of Y-direction rigid connector in Y-direction is utilized to deduct the Y-direction hunt effect of described first Y-direction rigid connector to obtain the displacement of described terminal platform in Y-direction, described terminal platform is utilized to obtain the in-plane displancement of described terminal platform at X to the displacement in Y-direction, a wherein said X meets polynomial relation to the X of rigid connector to the Y-direction displacement of hunt effect and described terminal platform, the described Y-direction hunt effect of the first Y-direction rigid connector and the X of described terminal platform meet polynomial relation to displacement.
5. a Long Distances two-dimensional nano servo platform, is characterized in that, comprising:
Pedestal;
Terminal platform, described terminal platform is positioned at the inner side at the edge of described pedestal;
X is to driver and Y-direction driver;
One X is to rigid connector and the first Y-direction rigid connector, and a described X is to rigid connector along X to extending and being connected to driver with described X, and described first Y-direction rigid connector extends along Y-direction and is connected with described Y-direction driver;
The flexible decoupling zero part of first Y-direction and an X are to flexible decoupling zero part, the flexible decoupling zero part of described first Y-direction is along X to extending and being connected to rigid connector with a described X with described terminal platform respectively, and a described X extends to flexible decoupling zero part along Y-direction and is connected with described first Y-direction rigid connector with described terminal platform respectively;
One X is to flexible guide and the 2nd X to flexible guide, a described X is to flexible guide and described 2nd X to flexible guide along X to arranging at interval, and a described X extends to flexible guide and described 2nd X to each in flexible guide along Y-direction and is connected to retrain non-X from a described X to rigid connector to move with a described X to rigid connector with described pedestal respectively; And
First Y-direction flexible guide and the second Y-direction flexible guide, described first Y-direction flexible guide and described second Y-direction flexible guide are arranged at interval along Y-direction, and described first Y-direction flexible guide and each in described second Y-direction flexible guide are along X to extending and being connected so that the non-Y-direction retraining described first Y-direction rigid connector is moved with described first Y-direction rigid connector with described pedestal respectively.
6. Long Distances two-dimensional nano servo platform according to claim 5, it is characterized in that, a described X is connected to the first end of rigid connector to flexible guide with a described X, described 2nd X is connected to the second end of rigid connector to flexible guide with a described X, described first Y-direction flexible guide is connected with the first end of described first Y-direction rigid connector, described second Y-direction flexible guide is connected with the second end of described first Y-direction rigid connector, preferably, it is relative to the flexible decoupling zero part of described first Y-direction in the vertical direction the below of flexible guide and described first Y-direction flexible decoupling zero part that a described X is positioned at described 2nd X to flexible guide, it is relative to flexible decoupling zero part with a described X in the vertical direction to the below of flexible decoupling zero part that described first Y-direction flexible guide is positioned at described second Y-direction flexible guide and a described X.
7. Long Distances two-dimensional nano servo platform according to claim 5, is characterized in that, comprise further:
2nd X is to rigid connector and the second Y-direction rigid connector, and described 2nd X is to rigid connector along X to extension, and described second Y-direction rigid connector extends along Y-direction;
The flexible decoupling zero part of second Y-direction, the flexible decoupling zero part of described second Y-direction is along X to extension, and the first end of the flexible decoupling zero part of described second Y-direction is connected to rigid connector with described 2nd X, and the second end of the flexible decoupling zero part of described second Y-direction is connected with described terminal platform;
2nd X is to flexible decoupling zero part, and described 2nd X extends to flexible decoupling zero part along Y-direction, and described 2nd X is connected to the first end of flexible decoupling zero part with described second Y-direction rigid connector, and described 2nd X is connected to the second end of flexible decoupling zero part with described terminal platform;
3rd X is to flexible guide and the 4th X to flexible guide, described 3rd X is to flexible guide and described 4th X to flexible guide along X to arranging at interval, and described 3rd X extends to flexible guide and described 4th X to each in flexible guide along Y-direction and is connected to retrain non-X from described two X to rigid connector to move with described 2nd X to rigid connector with described pedestal respectively; And
3rd Y-direction flexible guide and the 4th Y-direction flexible guide, described 3rd Y-direction flexible guide and described 4th Y-direction flexible guide are arranged at interval along Y-direction, and described 3rd Y-direction flexible guide and each in described 4th Y-direction flexible guide are along X to extending and being connected so that the non-Y-direction retraining described second Y-direction rigid connector is moved with described second Y-direction rigid connector with described pedestal respectively.
8. Long Distances two-dimensional nano servo platform according to claim 5, is characterized in that, described pedestal comprises base body and is located at the first installation portion, the second installation portion, the 3rd installation portion and the 4th installation portion on described base body,
A described X is connected to first end and a described X of flexible guide to rigid connector and the second end is connected with described first installation portion, described 2nd X is connected to first end and a described X of flexible guide to rigid connector and the second end is connected with described 3rd installation portion
The first end of described first Y-direction flexible guide is connected with described first Y-direction rigid connector and the second end is connected with described second installation portion, the first end of described second Y-direction flexible guide is connected with described first Y-direction rigid connector and the second end is connected with described 4th installation portion
A wherein said X is spaced apart with described base body in the vertical direction to each in flexible guide, described first Y-direction flexible guide and described second Y-direction flexible guide to flexible guide, described 2nd X.
9. Long Distances two-dimensional nano servo platform according to claim 5, is characterized in that,
A described X to flexible guide be two and two described X to the relative X of flexible guide to symmetry, described 2nd X to flexible guide be two and two described 2nd X to the relative X of flexible guide to symmetry,
Described first Y-direction flexible guide is two and two relative Y-directions of described first Y-direction flexible guide are symmetrical, and described second Y-direction flexible guide is two and two relative Y-directions of described second Y-direction flexible guide are symmetrical.
10. the Long Distances two-dimensional nano servo platform according to any one of claim 1-9, it is characterized in that, described Long Distances two-dimensional nano servo platform is printing integrated shaping by 3D, preferably, described two-dimensional nano servo platform is plastic material (as ABS), printing integrated shaping by 3D.
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