CN106272364A - A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform - Google Patents
A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform Download PDFInfo
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- CN106272364A CN106272364A CN201610929770.3A CN201610929770A CN106272364A CN 106272364 A CN106272364 A CN 106272364A CN 201610929770 A CN201610929770 A CN 201610929770A CN 106272364 A CN106272364 A CN 106272364A
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- guide rail
- exercise stress
- rail
- slide
- drive apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/003—Programme-controlled manipulators having parallel kinematics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Linear Motors (AREA)
Abstract
The invention discloses a kind of symmetric parallel and directly drive mobile decoupling high-precision servo platform, including pedestal, exercise stress, the first guide rail and the second guide rail, first guide rail and the second guide rail are each attached on pedestal, and first guide rail and the second guide rail be mutually perpendicular to, exercise stress can be along the first guide rail and the second slide；All being equipped with linear drive apparatus on described first guide rail and the second guide rail, described exercise stress sidepiece arranges slide rail, and described slide rail is slidably matched with linear drive apparatus；Linear drive apparatus on first guide rail drives exercise stress to move in X-direction, and the linear drive apparatus on the second guide rail drives exercise stress to move in the Y direction, thus realizes the mobile decoupling of two directions of motion of XY.Use two to be fixed on square crossing long guideway in space on pedestal, increase motion platform integral rigidity, reduce the torque caused because of parallel motion platform driving force bias motion flat board mass centre further, effectively inhibit exercise stress torsion in horizontal plane.
Description
Technical field
The present invention relates to a kind of motion servo platform, particularly relate to a kind of two degrees of freedom symmetric parallel and directly drive mobile decoupling height
Precision servo platform.
Background technology
Along with human sciences's technology and the development of industrial technology, improving constantly of creativity, manufacture the most gradually to
Microscopic fields development.For meeting human's demand, modern mechanical processing, nanotechnology, advanced optics and integrated circuit system
Making and the size of the field claimed apparatus such as precision optical machinery or part is more and more less, precision is more and more higher.Therefore ultraprecise servo skill
Art the most progressively becomes the core technology of the emerging industries such as information storage, accurate imaging, precision optical machinery manufacture, quasiconductor equipment, enters
One step requires that the mankind can produce at micron order, submicron order, and even carry out positioning and operate on nano-precision is
System and equipment.Therefore, set up a kind of high-accuracy motion servo platform and scientific research and industry manufacture are all had the biggest reason
Opinion meaning and realistic meaning.
The two-dimension moving platform used on Vehicles Collected from Market mostly is tandem two dimensional surface motion platform, and this transmission platform is adopted more
Adding the modes such as ball-screw to drive with electric rotating machine, concrete structure is to be passed through leading screw by convert rotational motion by bottom electric rotating machine
For moving along a straight line, thus drive upper strata rotary drive motor to move together with flat board, but this kind of electric rotating machine type of drive exists
Driving gap, the load quality of bottom electric rotating machine are more than the problems such as the load quality of upper strata motor, ignore people further
, there is inborn unsymmetry in design in raising equipment positioning precision, speed and the demand of acceleration.And parallel platform with
Its high symmetry, and completely self-contained mobile decoupling mechanism interchangeability and at a high speed high accelerate Trajectory Tracking Control in terms of have
Its unique advantage.
Voice coil motor is that in a kind of magnetic field utilizing eternal magnetic field or hot-wire coil conductor to produce, the interaction of magnetic pole will
Electric energy is converted into mechanical energy and produces regular linear type and the power set of limited pivot angle.It has the most in theory for it
Unlimited resolution, without delayed, high acceleration, high response, at high speed, the advantage such as volume is little, easy to control, mechanical property is good, can
Outside with deficiencies such as the gaps that transmission link in avoiding electric rotating machine to drive exists, it is the preferable power in field such as precision optical machinery manufacture
Device.
Summary of the invention
It is an object of the invention to as overcoming above-mentioned the deficiencies in the prior art, it is provided that a kind of exercise stress quality is little, load energy
Power is big, high interchangeability and high-precision symmetric parallel directly drive mobile decoupling high-precision servo platform.
For achieving the above object, the present invention uses following technical proposals:
A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform, including pedestal, exercise stress, the first guide rail and the
Two guide rails, described first guide rail and the second guide rail are each attached on pedestal, and the first guide rail and the second guide rail are mutually perpendicular to, motion
Flat board can be along the first guide rail and the second slide；Linear drives dress all it is equipped with on described first guide rail and the second guide rail
Putting, described exercise stress sidepiece arranges slide rail, and described slide rail is slidably matched with linear drive apparatus；
Linear drive apparatus on first guide rail drives exercise stress to move in X-direction, the linear drives on the second guide rail
Device drives exercise stress to move in the Y direction, thus realizes the mobile decoupling of two directions of motion of XY.
By orthogonal first guide rail and the laying of the second guide rail, and two guide rails are respectively provided with linear drives dress
Putting, two linear drive apparatus work respectively, and exercise stress can be made at the mobile decoupling of two dimensional motion plane；Two straight lines drive
Dynamic device works simultaneously, and exercise stress can be made to do plane motion in two dimensional motion plane.
Described linear drive apparatus is fixed on base, is provided with thrust and is connected between described linear drive apparatus and slide rail
Frame.Linear drive apparatus directly acts on thrust link, and the thrust of linear drive apparatus is passed to motion by thrust link
Flat board, and then drive exercise stress motion.
Described thrust link one end is connected with linear drive apparatus, and the thrust link other end is affixed with slide block, slide block
Match with slide rail.Thrust link end arranges slide block, and slide block coordinates with the slide rail being arranged on exercise stress, can be one
Thrust is passed to exercise stress when working and drives it to move in the direction by the linear drive apparatus in direction, also can be at other direction
During linear drive apparatus work, do not affect the motion of exercise stress.
With the first guide rail or the second guide rail is relative is slidably matched bottom described thrust link.Thrust link is led along first
Rail or the second slide, promote the motion of thrust link, and then this motion pass to motion during linear drive apparatus work
Flat board.
It is fixed with displacement transducer on described exercise stress and slide block.Displacement transducer is used for measuring exercise stress in X side
To or Y-direction on motion displacement.
Institute's displacement sensors is linear grating chi, and including scale grating and read head, scale grating is fixed on slide block,
Read head is fixed on exercise stress, and the output signal line of described linear grating chi picks out from read head.Use linear grating
Chi detection displacement, has detection range big, and accuracy of detection is high, and the feature of fast response time can measure fortune more quickly and accurately
The moving displacement of dynamic flat board.
Described slide rail is laid in four side horizontal symmetry of exercise stress.It is flat that " symmetric parallel " in the present invention is embodied in motion
The symmetrical of platform four side guide is laid, and guide rail is laid, by being arranged symmetrically in motion in four side horizontal symmetry of exercise stress
Four orbit of guide rail of platform four side and the slide block common supporting movement platform matched, increase motion platform and support just
Degree, is simultaneously achieved the decoupling of motion platform two dimensional motion.
On described first guide rail and the second guide rail, support connecting frame is set in the side opposed with linear drive apparatus, supports
Link is relative with the slide rail of exercise stress sidepiece to be slidably matched.Support connecting frame can give exercise stress to support, and is transporting simultaneously
During dynamic treadmill exercise, support connecting frame is set exercise stress motion can be made more steadily reliable, it is ensured that the precision of exercise stress motion.
With the first guide rail or the second guide rail is relative is slidably matched bottom described support connecting frame.Support connecting frame is flat with motion
Plate moves, at the first guide rail or the second slide on rails.
Described first guide rail is laid in the groove of pedestal at lower position, and described second guide rail is laid on pedestal higher
Position；Or described first guide rail is laid on pedestal at higher position, described second guide rail is laid in the groove of pedestal relatively
At lower position.First guide rail and the second guide rail are laid in height various location, make the first guide rail and the second guide rail mutually it
Between do not interfere with work each other, it is ensured that exercise stress is along the first guide rail and the accurate motion of the second guide rail.
Preferably, described linear drive apparatus is voice coil motor.Voice coil motor has high accuracy, the feature of high frequency sound, can
With the problem in avoiding electric rotating machine to drive, it is the preferable power set in a kind of precision optical machinery field.
Described voice coil motor uses outside permanent magnetism, the structure of internal electromagnetism, and permanent magnet is as stator, electromagnet portion
As mover, between described stator and mover, there is gap.
Described slide block is ball straight-line guide rail slide block, and described first guide rail, the second guide rail and slide rail are ball straight line and lead
Rail.It is arranged to ball line slideway can be stressed and laterally (left and right) power simultaneously.
The operation principle of the present invention is:
It is slidably matched with the relative of slide block by slide rail, makes thrust link, support connecting frame and exercise stress connect shape
Integral, the linear drive apparatus on the first guide rail promote exercise stress to move in X-direction, the linear drives on the second guide rail
Device promotes exercise stress to move in the Y direction, thus realizes the mobile decoupling of two directions of motion of XY.
Linear drive apparatus on first guide rail and the second guide rail works simultaneously, and exercise stress does plane fortune in X/Y plane
Dynamic.
The invention have the benefit that
1, using outside permanent magnetism, the voice coil motor of internal electromagnetism, its power output and input current have good linear pass
System, it is easy to control.
2, the mode using voice coil motor directly to drive, decreases the error that intermediate link transmission brings, platform positioning accurate
Degree height, and driving force is big, it is possible to obtain bigger acceleration of motion and speed.
3, two thrust links and two support connecting frames are used to be arranged symmetrically with, by exercise stress and two skies on pedestal
Between square crossing long guideway be connected and be integrally formed, it is achieved the similar simply supported beam symmetric support of exercise stress, effectively inhibit fortune
The trueness error of dynamic flat board vertical direction；In using two same levels, axially vertical voice coil motor drives, it is achieved that motion
Platform mobile decoupling in two dimensional motion plane.
4, use two to be fixed on square crossing long guideway in space on pedestal, increase motion platform integral rigidity, further
Reduce the torque caused because of parallel motion platform driving force bias motion flat board mass centre, effectively inhibit exercise stress to exist
Torsion in horizontal plane.
5, use ball line slideway and guide rail slide block as mobile decoupling element, make platform structure compact, and permissible
Select the shaped article of well-known producer, reduce and process the cumulative errors brought voluntarily.
6, platform symmetric parallel structure, easily processing, low cost of manufacture, interchangeability height.
Accompanying drawing explanation
Fig. 1 directly drives the axonometric drawing of mobile decoupling high-precision servo platform for the symmetric parallel that the present invention provides；
Fig. 2 directly drives the front view of mobile decoupling high-precision servo platform for the symmetric parallel that the present invention provides；
Fig. 3 directly drives the left view of mobile decoupling high-precision servo platform for the symmetric parallel that the present invention provides；
Fig. 4 directly drives the top view of mobile decoupling high-precision servo platform for the symmetric parallel that the present invention provides；
In figure, 1 pedestal, 2 first support connecting frames, 3 first long guideways, 4 first long guideway slide blocks, 5 short slide rails, 6 motions
Flat board, 7 second thrust links, 8 second voice coil motors, 9 second voice coil motor fixed mounts, 10 first displacement transducers, 11 is short
Sliding-rail sliding, 12 first thrust links, 13 first voice coil motors, 14 first voice coil motor fixed mounts, 15 second displacement sensings
Device, 16 second long guideways, 17 second support connecting frames, 18 second long guideway slide blocks.
Detailed description of the invention
The present invention is further described with embodiment below in conjunction with the accompanying drawings.
For making the purpose of the embodiment of the present invention, technical scheme and advantage clearer, below in conjunction with the embodiment of the present invention
Accompanying drawing, and on the basis of taking into account the consideration factor such as platform structure optimization, manufacturing process, to the technology in the embodiment of the present invention
Scheme carries out clear, complete description.Certainly the embodiment being described with reference to the drawings is exemplary, and purpose is being used for explaining this
Invention, and it is not intended that the too much of the present invention is limited.
In the present invention, term as " on ", D score, "left", "right", "front", "rear", " vertically ", " level ", " side ",
Orientation or the position relationship of the instruction such as " end " are based on orientation shown in the drawings or position relationship, only to facilitate describe this
Bright each parts or component structure relation and the relational word that determines, not refer in particular to either component or element in the present invention, it is impossible to understand
For limitation of the present invention.
In the present invention, term " first ", " second " are only used for distinguishing different directions upper-part or element, and it is not intended that
Indicate or imply the quantity of certain technical characteristic.
In the present invention, term such as " affixed ", " being connected ", " connection ", " patch " etc. should be interpreted broadly, and expression can be fixing
Connect, it is also possible to be to be integrally connected or removably connect；Can be to be joined directly together, it is also possible to by the indirect phase of intermediary
Even.For related scientific research or the technical staff of this area, above-mentioned term tool in the present invention can be determined as the case may be
Body implication, it is impossible to be interpreted as limitation of the present invention.
Mobile decoupling high-precision servo platform axle mapping is directly driven as it is shown in figure 1, Fig. 1 is symmetric parallel of the present invention.The present invention
Employing is arranged symmetrically with simply supported beam supporting construction, exercise stress 6 by respectively with short sliding-rail sliding the 11, first long guideway slide block 4 phase
Connect first thrust link the 12, first support connecting frame 2 and respectively with short sliding-rail sliding the 11, second long guideway slide block 18 phase
Second thrust link the 7, second support connecting frame 17 connected is integrally connected formation, and is fixed by being fixed on the first voice coil motor
The first voice coil motor 13 on frame 14 promotes the first thrust link 12, and then promotes exercise stress 6 to move in the X direction of motion,
Separately promoted the second thrust link 7 by the second voice coil motor 8 being fixed on the second voice coil motor fixed mount 9, and then promote fortune
Dynamic flat board 6 moves in Y motion direction, it is achieved the mobile decoupling of two XY directions of motion.
Two voice coil motors all use outside permanent magnetism, the structure of internal electromagnetism, and permanent magnet is solid respectively as stator
Being scheduled on the first voice coil motor fixed mount 14 and the second voice coil motor fixed mount 9, electromagnet portion is separately fixed at first as mover
Thrust link 12 and the second thrust link 7, and the holding wire of voice coil motor directly picks out from voice coil motor mover, and right
Holding wire is fixed.
Short slide rail 5 includes that four are bolted on exercise stress 6 side the short slide rail 5 arranged by horizontal symmetry；
Exercise stress 6 is connected with four short slide rails of lateral symmetry layout 5.Long guideway includes being fixed in pedestal 1 groove the first of lower position
Long guideway 3 and the second long guideway 16 with the first long guideway 3 spatial vertical arranged crosswise high position；Guide rail slide block and guide rail phase
Joining, the i.e. first long guideway slide block 4 matches with the first long guideway 3, and the second long guideway slide block 18 matches with the second long guideway 16,
Realize guide rail direction slidably.
First thrust link 12 and the first voice coil motor 13, it is arranged on the short sliding-rail sliding 11 on the left of exercise stress and
One long guideway slide block 4 is connected integral.
Second thrust link 7 and the second voice coil motor 8, it is arranged on the short sliding-rail sliding 11 and second on front side of exercise stress
Long guideway slide block 18 is connected integral.
First support connecting frame 2 is joined with the short sliding-rail sliding 11 being arranged on the right side of exercise stress and the first long guideway slide block 4
Conjunction links into an integrated entity.
Second support connecting frame 17 and the short sliding-rail sliding 11 being arranged on rear side of exercise stress and the second long guideway slide block 18
It is connected integral.
For linear grating chi, first displacement transducer 10 includes that scale grating and read head, scale grating scale are fixed on and the
Two thrust links 7 are connected the side of short sliding-rail sliding 11, and read head is fixed on exercise stress 6 side；Second displacement sensor
15 are all linear grating chi includes that scale grating and read head, scale grating scale are fixed on and is connected short with the first thrust link 12
The side of sliding-rail sliding 11, read head is fixed on exercise stress 6 side.
First long guideway slide block the 4, second long guideway slide block 18, short sliding-rail sliding 11 are ball straight-line guide rail slide block.
First long guideway the 3, second long guideway 16, short slide rail 5 are ball line slideway.
Mobile decoupling high-precision servo platform front view is directly driven, from figure as in figure 2 it is shown, Fig. 2 is symmetric parallel of the present invention
It should be apparent that the motion of platform X-direction.First voice coil motor fixed mount 14 is bolted on pedestal 1, and first
Voice coil motor 13 is bolted with the first thrust link 12, when voice coil motor 13 works, and the first thrust link 12
Exercise stress 6 is driven to move in the X-axis direction by short sliding-rail sliding 11.Second displacement sensor 15 includes linear grating chi and reading
Several heads, linear grating chi is fixed on the side of the short sliding-rail sliding 11 that is connected with the first thrust link 12, and read head is fixed on fortune
Dynamic flat board 6 side, the output signal of sensor is exported by the holding wire being connected with read head.
Mobile decoupling high-precision servo platform left view is directly driven, from figure as it is shown on figure 3, Fig. 3 is symmetric parallel of the present invention
It should be apparent that the motion of platform Y-direction.Second voice coil motor fixed mount 9 is bolted on pedestal 1, the second sound
Circle motor 8 is bolted with the second thrust link 7, and when the second voice coil motor 8 works, the second thrust link 7 leads to
Too short sliding-rail sliding 11 drives exercise stress 6 to move along Y direction.First displacement transducer 10 includes linear grating chi and reading
Head, linear grating chi is fixed on the side of the short sliding-rail sliding 11 that is connected with the second thrust link 12, and read head is fixed on motion
Flat board 6 side, the output signal of sensor is exported by the holding wire being connected with read head.
As shown in Figure 4, Fig. 4 is that symmetric parallel of the present invention directly drives mobile decoupling high-precision servo platform top view, from figure
It should be apparent that the decoupling motion in platform X/Y plane.First voice coil motor 13 and the second voice coil motor 8 are divided by bolt
Do not fix be connected with the first thrust link 12 and the second thrust link 7.In the Y direction, the second voice coil motor 8 drives second to push away
Power connects support 7 and realizes sliding between the second long guideway 16 and the second long guideway slide block 18, and then exercise stress 6 Y the most together
Move in direction；Drive the second thrust to connect support 7 at X to the first voice coil motor 13 and realize the first long guideway 3 and the first long guideway
Slide between slide block 4, and then the motion of exercise stress 6 X-direction the most together, it is achieved that the decoupling of the motion in both direction；When
When two voice coil motors work simultaneously, exercise stress 6 does plane motion in X/Y plane.
The present invention can be solved bottom electric rotating machine in conventional two-dimensional motion platform and be brought by transmissions such as ball-screws
Backlass, frictional force, load quality be big and the problem such as insufficient rigidity, and solve conventional voice coil motor and drive air supporting in platform
Or magnetic suspension supports the problems such as vertical direction error and the torsional error that causes because of driving force bias motion flat board mass centre,
Can reach to reduce double drive in parallel with the similar cantilever beam of solution and transport vertical direction trueness error and exercise stress level in merit platform
Torsion problem in face.This platform is arranged vertically voice coil motor by two and directly drives, and uses two spaces being fixed on pedestal
On square crossing long guideway and exercise stress side, four are arranged symmetrically with the common supporting form of guide rail, have compact conformation, load
Little, interchangeability is high, stroke is big, precision is high and the feature such as mobile decoupling.Whole platform uses and is arranged symmetrically with support, this kind of similar letter
Strutbeam supporting form effectively inhibits the vibration impact on vertical direction precision that platform motion causes, and improves motion platform firm
Degree and load capacity, it is suppressed that reverse in the vibration of exercise stress vertical direction and horizontal plane, enhance motion platform element and exchange
Property, reduce manufacturing cost.
By above to the detailed description of embodiments of the invention it can be understood as, above-described embodiment is the most exemplary
, it is mainly used to explain describing the present invention, and cannot function as limitation of the present invention, in spirit and claims of the present invention
In protection domain, any modifications and changes that the present invention is made, both fall within protection scope of the present invention.The common section of this area
Grind with technical staff in the case of without departing from spirit of the invention and principle, within the scope of the invention, can be to above-mentioned reality
Execute example to carry out part amendment, deform and replacement etc..
Claims (10)
1. symmetric parallel directly drives a mobile decoupling high-precision servo platform, it is characterized in that, including pedestal, exercise stress, first
Guide rail and the second guide rail, described first guide rail and the second guide rail be each attached on pedestal, and the first guide rail and the second guide rail mutual
Vertically, exercise stress can be along the first guide rail and the second slide；All it is equipped with straight on described first guide rail and the second guide rail
Line driving means, described exercise stress sidepiece arranges slide rail, and described slide rail is slidably matched with linear drive apparatus；Described slide rail exists
Four side horizontal symmetry of exercise stress are laid；
Linear drive apparatus on first guide rail drives exercise stress to move in X-direction, the linear drive apparatus on the second guide rail
Drive exercise stress to move in the Y direction, thus realize the mobile decoupling of two directions of motion of XY.
2. servo platform as claimed in claim 1, is characterized in that, described linear drive apparatus is fixed on base, described directly
Thrust link it is provided with between line driving means and slide rail.
3. servo platform as claimed in claim 2, is characterized in that, described thrust link one end is with linear drive apparatus even
Connecing, the thrust link other end is affixed with slide block, and slide block matches with slide rail.
4. servo platform as claimed in claim 2, is characterized in that, lead with the first guide rail or second bottom described thrust link
Rail is slidably matched relatively.
5. servo platform as claimed in claim 3, is characterized in that, described exercise stress and slide block are fixed with displacement sensing
Device.
6. servo platform as claimed in claim 5, is characterized in that, institute's displacement sensors is linear grating chi, including scale
Grating and read head, scale grating is fixed on slide block, and read head is fixed on exercise stress, the output of described linear grating chi
Holding wire picks out from read head.
7. servo platform as claimed in claim 1, is characterized in that, on described first guide rail and the second guide rail with linear drives
The side of device opposition arranges support connecting frame, and support connecting frame is relative with the slide rail of exercise stress sidepiece to be slidably matched.
8. servo platform as claimed in claim 7, is characterized in that, lead with the first guide rail or second bottom described support connecting frame
Rail is slidably matched relatively.
9. servo platform as claimed in claim 1, is characterized in that, described linear drive apparatus is voice coil motor；Described slide block
For ball straight-line guide rail slide block, described first guide rail, the second guide rail and slide rail are ball line slideway.
10. servo platform as claimed in claim 1, is characterized in that, described first guide rail is relatively low in being laid in the groove of pedestal
Position, described second guide rail is laid on pedestal at higher position；Or, described first guide rail is laid in high bit on pedestal
Putting place, described second guide rail is laid in the groove of pedestal at lower position.
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