CN107258018A - 双向功率半导体器件 - Google Patents
双向功率半导体器件 Download PDFInfo
- Publication number
- CN107258018A CN107258018A CN201580069494.1A CN201580069494A CN107258018A CN 107258018 A CN107258018 A CN 107258018A CN 201580069494 A CN201580069494 A CN 201580069494A CN 107258018 A CN107258018 A CN 107258018A
- Authority
- CN
- China
- Prior art keywords
- layer
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- power semiconductor
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 62
- 230000002457 bidirectional effect Effects 0.000 title claims abstract description 41
- 238000000926 separation method Methods 0.000 claims abstract description 28
- 230000001413 cellular effect Effects 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 31
- 239000002019 doping agent Substances 0.000 description 9
- 210000002381 plasma Anatomy 0.000 description 8
- 230000000903 blocking effect Effects 0.000 description 7
- 230000005611 electricity Effects 0.000 description 6
- 238000005538 encapsulation Methods 0.000 description 5
- 238000002161 passivation Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
- H01L29/7404—Thyristor-type devices, e.g. having four-zone regenerative action structurally associated with at least one other device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0817—Thyristors only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
- H01L29/747—Bidirectional devices, e.g. triacs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
- H01L27/0694—Integrated circuits having a three-dimensional layout comprising components formed on opposite sides of a semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Thyristors (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14198502 | 2014-12-17 | ||
EP14198502.8 | 2014-12-17 | ||
PCT/EP2015/079949 WO2016096956A1 (en) | 2014-12-17 | 2015-12-16 | Bidirectional power semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107258018A true CN107258018A (zh) | 2017-10-17 |
CN107258018B CN107258018B (zh) | 2020-08-14 |
Family
ID=52101214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201580069494.1A Active CN107258018B (zh) | 2014-12-17 | 2015-12-16 | 双向功率半导体器件 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10026732B2 (zh) |
EP (1) | EP3235003B1 (zh) |
JP (1) | JP6602380B2 (zh) |
CN (1) | CN107258018B (zh) |
WO (1) | WO2016096956A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111742411A (zh) * | 2018-02-13 | 2020-10-02 | Abb电网瑞士股份公司 | 双向晶闸管器件 |
CN112802896A (zh) * | 2019-11-13 | 2021-05-14 | 株洲中车时代电气股份有限公司 | 一种双向晶闸管及其制造方法 |
CN116490978A (zh) * | 2020-11-25 | 2023-07-25 | 日立能源瑞士股份公司 | 双向晶闸管装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10620654B2 (en) * | 2016-08-31 | 2020-04-14 | Delta Electronics (Shanghai) Co., Ltd | Alternatingly-switched parallel circuit, integrated power module and integrated power package |
EP4107783B1 (en) * | 2020-03-31 | 2023-12-20 | Hitachi Energy Ltd | Turn-off power semiconductor device with radial gate runners |
EP4006989B1 (en) * | 2020-11-25 | 2024-05-15 | Hitachi Energy Ltd | Bidirectional thyristor device with asymmetric characteristics |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5437588A (en) * | 1977-08-29 | 1979-03-20 | Mitsubishi Electric Corp | Both-way thyristor |
EP0110777A1 (fr) * | 1982-11-25 | 1984-06-13 | Centre National De La Recherche Scientifique (Cnrs) | Structure de thyristor à allumage intrinsèque et son application à la réalisation d'un dispositif bidirectionnel |
US6049096A (en) * | 1997-04-17 | 2000-04-11 | Stmicroelectronics, S.A. | Protection component for telephone line interface |
CN1851927A (zh) * | 2006-05-29 | 2006-10-25 | 上海维安热电材料股份有限公司 | 低电容过压保护器件及其生产工艺 |
WO2012041958A2 (en) * | 2010-09-29 | 2012-04-05 | Abb Technology Ag | Reverse-conducting power semiconductor device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55124262A (en) * | 1979-03-16 | 1980-09-25 | Mitsubishi Electric Corp | Bidirectional thyristor |
JPS5749269A (en) | 1980-09-08 | 1982-03-23 | Mitsubishi Electric Corp | Bidirectional thyristor |
DE19721365A1 (de) | 1997-05-22 | 1998-11-26 | Asea Brown Boveri | Beidseitig steuerbarer Thyristor |
EP3073530B1 (en) * | 2015-03-23 | 2017-05-03 | ABB Schweiz AG | Reverse conducting power semiconductor device |
-
2015
- 2015-12-16 CN CN201580069494.1A patent/CN107258018B/zh active Active
- 2015-12-16 JP JP2017532950A patent/JP6602380B2/ja active Active
- 2015-12-16 WO PCT/EP2015/079949 patent/WO2016096956A1/en active Application Filing
- 2015-12-16 EP EP15810629.4A patent/EP3235003B1/en active Active
-
2017
- 2017-06-19 US US15/626,777 patent/US10026732B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5437588A (en) * | 1977-08-29 | 1979-03-20 | Mitsubishi Electric Corp | Both-way thyristor |
EP0110777A1 (fr) * | 1982-11-25 | 1984-06-13 | Centre National De La Recherche Scientifique (Cnrs) | Structure de thyristor à allumage intrinsèque et son application à la réalisation d'un dispositif bidirectionnel |
US6049096A (en) * | 1997-04-17 | 2000-04-11 | Stmicroelectronics, S.A. | Protection component for telephone line interface |
CN1851927A (zh) * | 2006-05-29 | 2006-10-25 | 上海维安热电材料股份有限公司 | 低电容过压保护器件及其生产工艺 |
WO2012041958A2 (en) * | 2010-09-29 | 2012-04-05 | Abb Technology Ag | Reverse-conducting power semiconductor device |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111742411A (zh) * | 2018-02-13 | 2020-10-02 | Abb电网瑞士股份公司 | 双向晶闸管器件 |
CN111742411B (zh) * | 2018-02-13 | 2024-03-08 | 日立能源有限公司 | 双向晶闸管器件 |
CN112802896A (zh) * | 2019-11-13 | 2021-05-14 | 株洲中车时代电气股份有限公司 | 一种双向晶闸管及其制造方法 |
CN112802896B (zh) * | 2019-11-13 | 2022-08-16 | 株洲中车时代电气股份有限公司 | 一种双向晶闸管及其制造方法 |
CN116490978A (zh) * | 2020-11-25 | 2023-07-25 | 日立能源瑞士股份公司 | 双向晶闸管装置 |
CN116490978B (zh) * | 2020-11-25 | 2024-04-26 | 日立能源有限公司 | 双向晶闸管装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2016096956A1 (en) | 2016-06-23 |
CN107258018B (zh) | 2020-08-14 |
EP3235003B1 (en) | 2019-03-06 |
EP3235003A1 (en) | 2017-10-25 |
US20170294435A1 (en) | 2017-10-12 |
US10026732B2 (en) | 2018-07-17 |
JP2018503978A (ja) | 2018-02-08 |
JP6602380B2 (ja) | 2019-11-06 |
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Legal Events
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PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210514 Address after: Baden, Switzerland Patentee after: ABB grid Switzerland AG Address before: Baden, Switzerland Patentee before: ABB Switzerland Co.,Ltd. |
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TR01 | Transfer of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: Swiss Baden Patentee after: Hitachi energy Switzerland AG Address before: Swiss Baden Patentee before: ABB grid Switzerland AG |
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CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240111 Address after: Zurich, SUI Patentee after: Hitachi Energy Co.,Ltd. Address before: Swiss Baden Patentee before: Hitachi energy Switzerland AG |
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TR01 | Transfer of patent right |