CN107180779A - Multifunctional integrated circuit nozzle unit - Google Patents

Multifunctional integrated circuit nozzle unit Download PDF

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Publication number
CN107180779A
CN107180779A CN201710345035.2A CN201710345035A CN107180779A CN 107180779 A CN107180779 A CN 107180779A CN 201710345035 A CN201710345035 A CN 201710345035A CN 107180779 A CN107180779 A CN 107180779A
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CN
China
Prior art keywords
lifting
integrated circuit
seat
riser
nozzle unit
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Granted
Application number
CN201710345035.2A
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Chinese (zh)
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CN107180779B (en
Inventor
翁水才
谢周阳
姜传力
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Hangzhou Changchuan Technology Co Ltd
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Hangzhou Changchuan Technology Co Ltd
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Priority to CN201710345035.2A priority Critical patent/CN107180779B/en
Publication of CN107180779A publication Critical patent/CN107180779A/en
Application granted granted Critical
Publication of CN107180779B publication Critical patent/CN107180779B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715Changing the direction of the conveying path
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718Changing orientation of the substrate, e.g. from a horizontal position to a vertical position

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)

Abstract

Field is sorted the present invention relates to integrated circuit, it is therefore an objective to provide a kind of multifunctional integrated circuit nozzle unit.A kind of multifunctional integrated circuit nozzle unit, including:Riser, at least one suction nozzle body;Described multifunctional integrated circuit nozzle unit also includes:Comb component provided with the transverse slat being connected with riser upper end;Suction nozzle body includes:Vacuum slot, the vertical curve guide rail being connected with riser, fixation ear provided with engaging lug and above engaging lug and the lifting seat being connected with the sliding block of vertical curve guide rail, extension spring, lift drive mechanism, the vertical vacuum tube that lower end is connected with vacuum slot and is pivotally connected with contiguous block, rotary drive mechanism;Transverse slat is provided with the pull bar being connected with extension spring one end;The other end of extension spring is connected with lifting seat.The multifunctional integrated circuit nozzle unit function is more, and suction nozzle will not be preferable with other assemblies crashworthiness on board during motor dead electricity;Comb component makes pipeline arrangement neat compact not easily damaged.

Description

Multifunctional integrated circuit nozzle unit
Technical field
Field, especially a kind of multifunctional integrated circuit nozzle unit are sorted the present invention relates to integrated circuit.
Background technology
In integrated circuit testing procedure, integrated circuit is frequently necessary to carry out indexing;Chinese Patent Application No.: 201320555579.9 utility model discloses a kind of integrated circuit fetching device, including above provided with the perpendicular of guiding groove Plate, at least one be fixedly connected before riser horizontal straight line guide rail, be fixedly connected with the sliding block of horizontal straight line guide rail it is vertical Line guide rail, the suction nozzle being fixedly connected with the sliding block of vertical curve guide rail seat, one end and suction nozzle seat are fixedly connected and the other end is provided with position In the axis of guide and guiding axial brake device that are oriented to the rear roller that in groove and external diameter is matched with the width of guiding groove;It is oriented to recessed Groove includes the half-arc groove that two vertical slots and two openends are respectively connected with the upper end of a vertical slot.Traditional integrated circuit is picked and placeed Device has that indexing function is single, and suction nozzle is easily poor with other assemblies crashworthiness on board during motor dead electricity, pipeline arrangement The easily damaged deficiency of inadequate neat compact;Therefore, design a kind of function more, during motor dead electricity suction nozzle will not with board other Component crashworthiness is preferable, the not easily damaged multifunctional integrated circuit nozzle unit of pipeline arrangement neat compact, as urgently The problem of solution.
The content of the invention
The invention aims to single, the motor dead electricity that overcomes current integrated circuit fetching device to there is indexing function When suction nozzle it is easily poor with other assemblies crashworthiness on board, pipeline arrange inadequate neat compact it is easily damaged it is not enough there is provided A kind of function is more, and suction nozzle will not be with other assemblies crashworthiness on board preferably during motor dead electricity, and pipeline arrangement is neat tight Gather not easily damaged multifunctional integrated circuit nozzle unit.
The present invention concrete technical scheme be:
A kind of multifunctional integrated circuit nozzle unit, including:Riser, at least one suction nozzle body;Described multifunctional unit electricity Road nozzle unit also includes:Comb component provided with the transverse slat being connected with riser upper end;Suction nozzle body includes:Vacuum slot, with The vertical curve guide rail of riser connection, fixation ear provided with engaging lug and above engaging lug and connects with the sliding block of vertical curve guide rail The lifting seat connect, extension spring, lift drive mechanism, the vertical vacuum tube that lower end is connected with vacuum slot and is pivotally connected with contiguous block, rotation Turn drive mechanism;Transverse slat is provided with the pull bar being connected with extension spring one end;The other end of extension spring is connected with lifting seat.Described is multi-functional Integrated circuit nozzle unit with two-dimentional electronic slide unit in use, be connected;Lift drive mechanism drives vacuum slot liter through lifting seat Drop is realized to be adsorbed to integrated circuit;Rotary drive mechanism drives vertical vacuum tube to rotate, and drives vacuum slot rotation to realize Connect the rotation commutation of integrated circuit;During motor dead electricity, extension spring holds lifting seat and moves reset upwards;The multifunctional integrated circuit Nozzle unit function is more, and suction nozzle will not be preferable with other assemblies crashworthiness on board during motor dead electricity;Comb component makes Pipeline arrangement neat compact is not easily damaged.
Preferably, described lift drive mechanism includes:The accommodating counterbore that riser front lower portion is provided with, houses counterbore bottom Several locking screw holes that face is provided with, number and locking screw holes number identical lock-screw, rear end be located in accommodating counterbore and Driven wheel seat of the lower end provided with tensioning screw, provided with the backstand for being tensioned through hole and being connected with riser lower end, tensioning screw, with erecting The lifting active synchronization wheel of front edge of board pivot joint, the driven synchronizing wheel of lifting being pivotally connected with driven wheel seat, respectively with lifting active synchronization The lifting timing belt of driven synchronizing wheel drive connection is taken turns and lifts, the lifting driving servomotor being connected with riser rear end, with consolidating Determine the lifting anti-dazzling screen of ear connection, connected with riser front end and the lifting optoelectronic switch relative with lifting anti-dazzling screen;Lifting driving The output shaft of servomotor is connected with lifting active synchronization wheel;The screw rod of tensioning screw is through tensioning through hole with being tensioned screw screw thread Connection;Driven wheel seat is provided with two vertical elongated holes;The screw rod of two lock-screws passes through vertical an elongated hole and two locking screws Hole corresponds threaded connection;The screw rod of another two lock-screw passes through another vertical elongated hole and another two locking screw holes one by one Correspondence threaded connection;Fixed ear is connected with lifting a side of timing belt.Lift drive mechanism is simple and practical;Pass through rotation Tensioning screw can adjust the position of backstand and be locked with lock-screw, can adjust the tensile force of lifting timing belt, lift photoelectricity Switch coordinates with lifting anti-dazzling screen can accurately determine the lifting zero-bit of lifting seat, so as to improve the lifting precision of lifting seat.
Preferably, described rotary drive mechanism includes:The motor cabinet being connected with lifting seat, the rotation being connected with motor cabinet Turn driving servomotor, the rotation active synchronization wheel being connected with the output shaft of rotation driving servomotor is enclosed on vertical vacuum tube Rotary drive synchronizing wheel that is outer and being connected with vertical vacuum tube, is driven with rotation active synchronization wheel and rotary drive synchronizing wheel respectively The rotation synchronization belt of connection, the Rotary gobos being connected on the downside of engaging lug and with vertical vacuum tube connect with lifting seat front end Connect and the rotary photoelectric switch relative with Rotary gobos.The simple and practical precision of rotary drive mechanism is high;Rotary photoelectric is opened Close to coordinate with Rotary gobos and can accurately determine the rotation zero-bit of vertical vacuum tube and vacuum slot, so as to improve running accuracy.
Preferably, described multifunctional integrated circuit nozzle unit also includes:Upper end is provided with pipe joint and with fixing ear The swivel joint of connection;The lower end of swivel joint is connected with vertical vacuum tube upper end.The lower end of swivel joint and vertical vacuum tube Upper end connection makes vertical vacuum tube spin stabilization;Pipe joint is beneficial to be connected with vacuum line.
Preferably, described comb component includes:The extra heavy pipe seat being connected provided with extra heavy pipe through hole and with transverse slat upper end, is provided with Fine rule through hole and fine rule seat be connected with extra heavy pipe seat upper end, the upper guide plate that one end and fine rule one end upside are connected, positioned above leading Plate downside and the bottom guide relative with upper guide plate, push down upper guide plate upper end and two side ends are respectively provided with the press strip of a leg, two Fixing screws;Two legs are each positioned at upper guide plate side and push down bottom guide one end respectively;The screw rod 1 of fixing screws is worn for a pair Cross press strip and be connected through bottom guide one end and with extra heavy pipe seat threaded upper ends;The upper guide plate other end is provided with guide card on arc;Under lead The plate other end is provided with guide card under arc.The extra heavy pipe seat of comb component is beneficial to the hard extra heavy pipe such as vacuum tube and installed;Fine rule seat is beneficial to electric wire Installed etc. soft fine rule;Upper guide plate, bottom guide, guide card is beneficial to the soft fine rules such as electric wire and passes through fine rule through hole under guide card and arc on arc Install and be not damaged the soft fine rule such as electric wire.
Compared with prior art, the beneficial effects of the invention are as follows:The multifunctional integrated circuit nozzle unit function is more, electricity Suction nozzle will not be preferable with other assemblies crashworthiness on board during machine dead electricity;Comb component is difficult pipeline arrangement neat compact It is impaired.Lift drive mechanism is simple and practical;The position of backstand can be adjusted by rotating tensioning screw and lock-screw is used Locking, can adjust the tensile force of lifting timing belt, lifting optoelectronic switch coordinates with lifting anti-dazzling screen can accurately determine lifting seat Zero-bit is lifted, so as to improve the lifting precision of lifting seat.The simple and practical precision of rotary drive mechanism is high;Rotary photoelectric is switched The rotation zero-bit of vertical vacuum tube and vacuum slot can accurately be determined by coordinating with Rotary gobos, so as to improve running accuracy.Rotation The lower end of adapter is connected with vertical vacuum tube upper end makes vertical vacuum tube spin stabilization;Pipe joint is beneficial to connect with vacuum line Connect.The extra heavy pipe seat of comb component is beneficial to the hard extra heavy pipe such as vacuum tube and installed;Fine rule seat is beneficial to the soft fine rule such as electric wire and installed;Upper guide plate, Guide card is beneficial to the soft fine rules such as electric wire and is installed through fine rule through hole and make the soft fine rule such as electric wire under guide card and arc on bottom guide, arc It is not damaged.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the present invention;
Fig. 2 is the structural representation of lift drive mechanism;
Fig. 3 is the structural representation of rotary drive mechanism.
In figure:Riser 1, vacuum slot 2, lift drive mechanism 3, accommodating counterbore 31, lock-screw 32, tensioning screw 33, Driven wheel seat 34, backstand 35, tensioning screw 36, lifting active synchronization wheel 37, the driven synchronizing wheel 38 of lifting, lifting timing belt 39th, lifting driving servomotor 310, lifting anti-dazzling screen 311, lifting optoelectronic switch 312, vertical elongated hole 313, rotary drive mechanism 4th, motor cabinet 41, rotation driving servomotor 42, rotation active synchronization wheel 43, rotary drive synchronizing wheel 44, rotation synchronization belt 45, Rotary gobos 46, rotary photoelectric switch 47, comb component 5, transverse slat 51, pull bar 52, extra heavy pipe through hole 53, extra heavy pipe seat 54, fine rule Through hole 55, fine rule seat 56, upper guide plate 57, bottom guide 58, leg 59, press strip 510, fixing screws 511, guide card 512, arc on arc Guide card 513, vertical curve guide rail 6, engaging lug 7, fixed ear 8, lifting seat 9, extension spring 10, lift drive mechanism 3, vertical vacuum under shape Pipe 11, pipe joint 12, swivel joint 13.
Embodiment
It is shown below in conjunction with the accompanying drawings that the present invention is described further.
As shown in accompanying drawing 1, accompanying drawing 2, accompanying drawing 3:A kind of multifunctional integrated circuit nozzle unit, including:Riser 1, two simultaneously The suction nozzle body put is erected, the comb component 5 provided with the transverse slat 51 being spirally connected with the upper end of riser 1;Suction nozzle body includes:Vacuum slot 2, the vertical curve guide rail 6 being spirally connected with riser 1, fixation ear 8 provided with engaging lug 7 and above engaging lug and with vertical curve guide rail The lifting seat 9 that 6 sliding block is spirally connected, extension spring 10, lift drive mechanism 3, lower end is spirally connected with vacuum slot 2 and passes through axle with contiguous block Hold the vertical vacuum tube 11 of pivot joint, rotary drive mechanism 4;Transverse slat 51 is provided with the pull bar 52 being connected with the one end of extension spring 10;Extension spring 10 The other end be connected with lifting seat 9.
Described lift drive mechanism 3 includes:The accommodating counterbore 31 that the front lower portion of riser 1 is provided with, houses the bottom surface of counterbore 31 Two locking screw holes being provided with(It is not drawn into accompanying drawing), number and locking screw holes number identical lock-screw 32, rear end is located at In accommodating counterbore 31 and lower end is provided with the driven wheel seat 34 for being tensioned screw 33, provided with tensioning through hole(It is not drawn into accompanying drawing)And with erecting The backstand 35 that the lower end of plate 1 is spirally connected, tensioning screw 36, and lifting active synchronization wheel 37 of the front end of riser 1 by bearing hinge joint, with Driven wheel seat 34 is driven synchronous with lifting active synchronization wheel 37 and lifting respectively by the driven synchronizing wheel 38 of lifting of bearing hinge joint The lifting timing belt 39 of the drive connection of wheel 38, servomotor 310 is driven with the lifting that the rear end of riser 1 is spirally connected, and is spirally connected with fixed ear 8 Lifting anti-dazzling screen 311, be spirally connected with the front end of riser 1 and with the relative lifting optoelectronic switch 312 of lifting anti-dazzling screen 311;Lifting is driven The output shaft of dynamic servomotor 310 is connected with the lifting key of active synchronization wheel 37;The screw rod of tensioning screw 36 through tensioning through hole with Tensioning screw 33 is threadedly coupled;Driven wheel seat 34 is provided with two vertical elongated holes 313;The screw rod of two lock-screws 32 passes through one Vertical elongated hole 313 is corresponded with two locking screw holes to be threadedly coupled;The screw rod of another two lock-screw 32 is perpendicular through another Correspond and be threadedly coupled with another two locking screw holes to elongated hole 313;Fixed ear 8 is spirally connected with lifting a side of timing belt 39; House counterbore 31 is shaped as rectangle.
Described rotary drive mechanism 4 includes:The motor cabinet 41 being spirally connected with lifting seat 9, the rotation being spirally connected with motor cabinet 41 Servomotor 42 is driven, the rotation active synchronization wheel 43 being connected with the output axle key of rotation driving servomotor 42 is enclosed on vertical The rotary drive synchronizing wheel 44 being connected outside vacuum tube 11 and with the vertical key of vacuum tube 11, respectively with rotation active synchronization wheel 43 and rotation Turn the rotation synchronization belt 45 that driven synchronizing wheel 44 is connected, be connected positioned at the downside of engaging lug 7 and with the vertical key of vacuum tube 11 Rotary gobos 46, are spirally connected and the rotary photoelectric switch 47 relative with Rotary gobos 46 with the front end of lifting seat 9.
Described multifunctional integrated circuit nozzle unit also includes:What upper end was spirally connected provided with pipe joint 12 and with fixed ear 8 Swivel joint 13;The lower end of swivel joint 13 is spirally connected with the vertical upper end of vacuum tube 11.
Described comb component 5 includes:The extra heavy pipe seat 54 being spirally connected provided with extra heavy pipe through hole 53 and with the upper end of transverse slat 51, provided with thin Line three-way hole 55 and the fine rule seat 56 being spirally connected with 54 upper ends of extra heavy pipe seat, it is upper that one end is connected with being integrally formed on the upside of 56 one end of fine rule seat Guide plate 57, positioned at the downside of upper guide plate 57 and the bottom guide 58 relative with upper guide plate 57, pushes down the upper end of upper guide plate 57 and two side ends is each Press strip 510 provided with a leg 59, two fixing screws 511;Two legs 59 are each positioned at the side of upper guide plate 57 and pressed respectively Stay the one end of guide plate 58;A pair of the screw rod 1 of fixing screws 511 through press strip 510 and through the one end of bottom guide 58 and with extra heavy pipe seat 54 threaded upper ends are connected;The other end of upper guide plate 57 is provided with guide card 512 on arc;The other end of bottom guide 58 is provided with guide card under arc 513。
Described multifunctional integrated circuit nozzle unit with two-dimentional electronic slide unit in use, be connected;Lift drive mechanism 3 Lifting driving servomotor 310 drives lifting active synchronization wheel 37 to rotate, and the driving vacuum of lifting seat 9 is driven through lifting timing belt 39 The lifting of suction nozzle 2 is realized to be adsorbed to integrated circuit;The rotation driving servomotor 42 of rotary drive mechanism 4 drives rotation actively Synchronizing wheel 43 is rotated, and rotated timing belt 45, rotary drive synchronizing wheel 44, vertical vacuum tube 11 drive vacuum slot 2 to rotate reality The now rotation commutation of connection integrated circuit.
The beneficial effects of the invention are as follows:The multifunctional integrated circuit nozzle unit function is more, and suction nozzle is not during motor dead electricity Can be preferable with other assemblies crashworthiness on board;Comb component makes pipeline arrangement neat compact not easily damaged.Lifting driving Mechanism structure is simple and practical;The position of backstand can be adjusted by rotating tensioning screw and locked with lock-screw, can adjust and rise The tensile force of timing belt drops, and lifting optoelectronic switch coordinates with lifting anti-dazzling screen can accurately determine the lifting zero-bit of lifting seat, so that Improve the lifting precision of lifting seat.The simple and practical precision of rotary drive mechanism is high;Rotary photoelectric is switched and Rotary gobos Cooperation can accurately determine the rotation zero-bit of vertical vacuum tube and vacuum slot, so as to improve running accuracy.The lower end of swivel joint Being connected with vertical vacuum tube upper end makes vertical vacuum tube spin stabilization;Pipe joint is beneficial to be connected with vacuum line.Comb component Extra heavy pipe seat is beneficial to the hard extra heavy pipe such as vacuum tube and installed;Fine rule seat is beneficial to the soft fine rule such as electric wire and installed;Upper guide plate, bottom guide, on arc Guide card is beneficial to the soft fine rules such as electric wire through the installation of fine rule through hole and is not damaged the soft fine rule such as electric wire under guide card and arc.
The present invention can change into that various ways are apparent to one skilled in the art, and such change is not considered as Depart from the scope of the present invention.All such technical staff to the field obviously change, and are included within this right It is required that within the scope of.

Claims (5)

1. a kind of multifunctional integrated circuit nozzle unit, including:Riser, at least one suction nozzle body;It is characterized in that, described is more Functional integrated circuit nozzle unit also includes:Comb component provided with the transverse slat being connected with riser upper end;Suction nozzle body includes:Very Suction mouth, the vertical curve guide rail being connected with riser and is led at fixation ear provided with engaging lug and above engaging lug with vertical curve The lifting seat of the sliding block connection of rail, extension spring, lift drive mechanism, lower end is connected and vertical with contiguous block pivot joint with vacuum slot Vacuum tube, rotary drive mechanism;Transverse slat is provided with the pull bar being connected with extension spring one end;The other end of extension spring is connected with lifting seat.
2. multifunctional integrated circuit nozzle unit according to claim 1, it is characterized in that:Described lift drive mechanism bag Include:The accommodating counterbore that riser front lower portion is provided with, several locking screw holes that accommodating counterbore bottom surface is provided with, number and locking screw holes Number identical lock-screw, rear end is located in accommodating counterbore and driven wheel seat of the lower end provided with tensioning screw, logical provided with tensioning Hole and the backstand being connected with riser lower end, tensioning screw, the lifting active synchronization wheel being pivotally connected with riser front end, with driven wheel seat The driven synchronizing wheel of lifting of pivot joint, it is synchronous with the lifting of lifting active synchronization wheel and the driven synchronizing wheel drive connection of lifting respectively Band, the lifting driving servomotor being connected with riser rear end, the lifting anti-dazzling screen being connected with fixed ear, be connected with riser front end and The lifting optoelectronic switch relative with lifting anti-dazzling screen;The output shaft of lifting driving servomotor is connected with lifting active synchronization wheel; The screw rod of tensioning screw is threadedly coupled through tensioning through hole with tensioning screw;Driven wheel seat is provided with two vertical elongated holes;Two locks The screw rod of tight screw is corresponded through a vertical elongated hole with two locking screw holes to be threadedly coupled;The spiral shell of another two lock-screw Bar is corresponded with another two locking screw holes through another vertical elongated hole and is threadedly coupled;The side of fixed ear and lifting timing belt Side is connected.
3. multifunctional integrated circuit nozzle unit according to claim 1, it is characterized in that:Described rotary drive mechanism bag Include:The motor cabinet being connected with lifting seat, the rotation driving servomotor being connected with motor cabinet is defeated with rotation driving servomotor The rotation active synchronization wheel of shaft connection, is enclosed on the rotary drive synchronizing wheel that vertical vacuum tube is outer and is connected with vertical vacuum tube, Respectively with rotation active synchronization wheel and the rotation synchronization belt of rotary drive synchronizing wheel drive connection, on the downside of engaging lug and with erecting The Rotary gobos connected to vacuum tube, are connected with lifting seat front end and the rotary photoelectric relative with Rotary gobos is switched.
4. the multifunctional integrated circuit nozzle unit according to claim 1 or 2 or 3, it is characterized in that:Also include:Upper end is set There are pipe joint and the swivel joint being connected with fixed ear;The lower end of swivel joint is connected with vertical vacuum tube upper end.
5. the multifunctional integrated circuit nozzle unit according to claim 1 or 2 or 3, it is characterized in that:Described comb component Including:The extra heavy pipe seat being connected provided with extra heavy pipe through hole and with transverse slat upper end, what is be connected provided with fine rule through hole and with extra heavy pipe seat upper end is thin The upper guide plate being connected on the upside of line seat, one end and fine rule seat one end, positioned at upper guide plate downside and the bottom guide relative with upper guide plate, pressure Live in guide plate upper end and two side ends are respectively provided with the press strip of a leg, two fixing screws;Two legs are each positioned at upper guide plate one Side and bottom guide one end is pushed down respectively;A pair of the screw rod 1 of fixing screws through press strip and through bottom guide one end and with extra heavy pipe seat Threaded upper ends are connected;The upper guide plate other end is provided with guide card on arc;The bottom guide other end is provided with guide card under arc.
CN201710345035.2A 2017-05-16 2017-05-16 Multifunctional integrated circuit suction nozzle device Active CN107180779B (en)

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CN107180779B CN107180779B (en) 2021-01-08

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Publication number Priority date Publication date Assignee Title
CN108163263A (en) * 2017-12-10 2018-06-15 杭州长川科技股份有限公司 Integrated circuit braid fetching device and pick and place method
CN109573609A (en) * 2019-01-14 2019-04-05 东莞市臻精智能科技有限公司 A kind of vacuum absorption device and the automatic attaching equipment using it
CN111564394A (en) * 2020-05-21 2020-08-21 中山市新益昌自动化设备有限公司 Bonding head mechanism and die bonding equipment
CN111584698A (en) * 2020-05-21 2020-08-25 中山市新益昌自动化设备有限公司 Die bonder
WO2020192072A1 (en) * 2019-03-25 2020-10-01 苏州富强科技有限公司 Rapid suction and release mechanism

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