CN106940182B - Four-mass-block coupling micro-electromechanical gyroscope - Google Patents
Four-mass-block coupling micro-electromechanical gyroscope Download PDFInfo
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- CN106940182B CN106940182B CN201710306761.3A CN201710306761A CN106940182B CN 106940182 B CN106940182 B CN 106940182B CN 201710306761 A CN201710306761 A CN 201710306761A CN 106940182 B CN106940182 B CN 106940182B
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
The invention discloses a four-mass-block coupling micro-electromechanical gyroscope, and relates to the field of micro-electromechanical gyroscopes. A four-mass coupled micro-electromechanical gyroscope comprises four masses, wherein each mass is divided into four units which are completely symmetrical; each mass block mainly comprises driving frames (19) and detecting frames (20), four driving frames (19) are interconnected through driving coupling springs (21), two adjacent detecting frames (20) are interconnected through detecting coupling springs (3), and each pair of driving frames (19) and detecting frames (20) are interconnected through driving springs (7). The invention provides a four-mass block coupling micro-electromechanical gyroscope, which realizes a structure of simultaneously coupling driving and detecting masses so as to overcome the defect of higher driving voltage, thereby improving the performance requirement of a sensor on a circuit part.
Description
Technical Field
The invention relates to the field of microcomputer gyroscopes, in particular to a four-mass-block coupling microcomputer electromechanical gyroscope.
Background
With the development of micro-mechanical technology, more and more MEMS devices have been implemented in commercial use or even military use in recent years. Among them, MEMS inertial sensors have achieved great success in automotive electronics, inertial navigation and portable devices.
MEMS gyroscopes are essentially angular velocity sensors implemented by the coriolis effect. The method is characterized in that the stress (namely the Coriolis force) of a mass block is connected with the external angular velocity, the stress is converted into displacement through Hooke's law and a second-order dynamic system, and a certain displacement detection mechanism is used for detecting the angular velocity.
MEMS gyroscopes typically comprise a linearly vibrating or angularly vibrating mass, a proof mass and corresponding driving and detecting means. To achieve suppression of various external common mode disturbances (such as vibration, acceleration and mechanical shock), MEMS gyroscopes typically have an even number of drive and sense masses and are typically of symmetrical construction. The motion directions of the adjacent mass blocks are opposite, so that a differential effect is realized, and the four-mass block structure has a better inhibiting effect on various common-mode mechanical interferences.
Another way to suppress common mode interference is to couple the proof masses together by springs, which can greatly reduce the mismatch of their detection displacements in case of mismatch of parameters (mainly elastic coefficients) of different proof masses.
However, since the common MEMS process flow can only form a planar structure, if the detection mass blocks are coupled together, the driving mass blocks cannot be coupled, and the equivalent driving quality factor is reduced, so that a larger driving voltage is required to realize the same driving amplitude.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a four-mass-block coupled micro-electromechanical gyroscope, which is a structure with simultaneously coupled driving and detecting masses so as to overcome the defect of higher driving voltage, thereby improving the performance requirement of a sensor on a circuit part.
The aim of the invention is realized by the following technical scheme: a four-mass coupled micro-electromechanical gyroscope comprises four masses, wherein each mass is divided into four units which are completely symmetrical; each mass is mainly composed of a driving frame and a detecting frame, the four driving frames are interconnected through driving coupling springs, the connection relation of the two detection frames of the upper row and the lower row is the same as that of the upper row through the detection coupling springs, and each pair of driving frames and the detection frames are connected through the driving springs.
Preferably, the driving coupling spring also deforms in the detection mode.
Preferably, each mass is divided into four units that are perfectly symmetrical, wherein each unit pair comprises: the device comprises a driving electrode, a self-checking electrode, a detection coupling spring, a driving detection electrode, an orthogonal error compensation electrode, a cross structure, a driving spring, a detection electrode, a frame, a detection spring, a common spring and a driving coupling spring;
preferably, the driving electrode and the self-checking electrode are arranged in a differential mode; one end of the detection spring is connected with the detection frame of the frame, and the other end of the detection spring is connected with an anchor point; one end of the detection coupling spring is connected with the detection coupling spring of the adjacent detection frame in series, and the other end of the detection coupling spring is connected with the detection frame; one end of the drive coupling spring is connected with the drive coupling spring of the adjacent drive frame in series, and the other end of the drive coupling spring is connected with the drive frame; one end of the common spring is connected with the driving frame, and the other end of the common spring is connected with the anchor point; the driving spring is connected with the driving frame and the detecting frame; the quadrature error compensation electrode and the drive mass form a stepped structure.
Preferably, the larger frame width portion is provided with a stress relief hole; the stress relief holes may reduce the quality of the structure to some extent and assist in releasing the sacrificial layer.
Preferably, the driving electrode and the driving detection electrode adopt comb tooth capacitors, so that the movement direction is ensured to be the same as the length direction of the comb teeth.
Preferably, the detection electrode and the self-detection electrode adopt plate capacitors, so that the movement direction and the length direction of the comb teeth are mutually perpendicular.
Preferably, when the mass block moves, the detection electrode and the change of the detection electrode in the opposite direction between the positive end and the negative end and the mass block are driven, and the movement of the mass block can be detected through the differential circuit.
Preferably, the upper, lower, left and right middle points of the mass block are provided with a common spring and a driving coupling spring; each common spring or driving coupling spring is composed of a first folding spring, a second folding spring, a first connecting rod, a second connecting rod, a hinge point and an anchor point.
Preferably, the hinge point is an imaginary point, the center point or anchor point of the first folding spring, which has the effect of allowing a certain angle between the first and second links and between the first folding spring and the anchor point.
Preferably, the distance between the connecting point of the second folding spring and the anchor point and the top end of the anchor point is as small as possible, so that the symmetry of boundary conditions after structural symmetry is improved.
Preferably, the mass is forced to the right when moving downwards; the direction of the compensation electrostatic force received by the adjacent mass blocks is opposite, and the compensation force and the driving displacement are in phase and in phase with the quadrature error, so that the effect of quadrature error compensation is realized.
The beneficial effects of the invention are as follows: the four-mass block coupling micro-electromechanical gyroscope has the advantages that the driving and detecting mass simultaneous coupling structure is provided to overcome the defect of higher driving voltage, so that the performance requirement of the sensor on a circuit part is improved, the frame and the internal mass block are coupled together, and accordingly, a higher driving Q value is obtained, the driving voltage can be reduced, or the signal-to-noise ratio and the higher common mode rejection capability can be improved.
Drawings
FIG. 1 is a block diagram of a quarter of a mass according to the present invention;
FIG. 2 is a diagram of driving and sensing operation;
FIG. 3 is a schematic diagram of a gyroscope sharing/coupling spring structure;
FIG. 4 is a schematic cross-sectional view of a cross-structure;
description of the main elements of the drawings: the driving electrode 1, the self-checking electrode 2, the detecting coupling spring 3, the driving detecting electrode 4, the orthogonal error compensating electrode 5, the crossing structure 6, the driving spring 7, the stress releasing hole 8, the first connecting rod 9, the second connecting rod 10, the first folding spring 11, the anchor point 12, the second folding spring 13, the detecting electrode 14, the frame 15, the hinge point 16, the detecting spring 17, the common spring 18, the driving frame 19, the detecting frame 20, the driving coupling spring 21, the distance 1L1 and the distance 2L2.
Detailed Description
The technical solution of the present invention will be described in further detail with reference to the accompanying drawings, but the scope of the present invention is not limited to the following description.
As shown in fig. 1, a four-mass coupled mems gyroscope includes four masses, in which the motion directions of adjacent masses are opposite, so as to achieve a differential effect; each mass is divided into four parts that are perfectly symmetrical, a quarter of a single mass, comprising: a driving electrode 1, a driving detection electrode 4, a self-checking electrode 2, an orthogonal error compensation electrode 5, a detection electrode 14, a driving spring 7, a detection spring 17, a detection coupling spring 3 and a frame 15;
the driving electrode 1 and the self-checking electrode 2 are arranged in a differential mode, when voltage is applied, the mass block moves, the driving detecting electrode 4, the positive end and the negative end of the detecting electrode 14 and the mass block change in opposite directions, and the movement of the mass block can be detected through a differential circuit.
The drive spring 7 is mainly responsible for controlling the drive frequency and also for conducting the coriolis force generated by the drive mass to the detection frame 20. One end of the detection spring 17 is connected with the detection frame 20, the other end is connected with an anchor point, and the other end of the detection coupling spring 3 is connected with the detection coupling spring 3 of the adjacent mass block in series.
The larger width of the frame 15 provides stress relief holes 8 to some extent reducing the mass of the structure and assisting in releasing the sacrificial layer.
The quadrature error compensation electrode 5 and the driving mass block form a stepped structure, and since the overlapping area on the right side of the fixed electrode is larger, the mass block receives a leftward force when moving upward under the condition that the upper electrode is electrified, and receives a rightward force when moving downward. The adjacent masses are subjected to compensating electrostatic forces in opposite directions and the compensating forces and drive displacements are in phase and thus also in phase with the quadrature error, so that the effect of quadrature error compensation can be achieved.
The driving electrode 1 and the driving detection electrode 4 adopt comb tooth capacitors, so that the same movement direction as the length direction of the comb teeth is ensured, and the problem of nonlinearity of the capacitors is solved.
The detection electrode 14 and the self-detection electrode 2 adopt a flat capacitor, so that the motion direction and the length direction of the comb teeth are mutually perpendicular, the capacitance variation is improved, the required driving voltage and the comb tooth area are reduced, and the nonlinear problem of the flat capacitor is not greatly influenced because the displacement of the detection direction is smaller. The same distance between two sides of the detection fixed electrode can enable the input capacitance of the circuit end after the difference to be zero.
When the mass block moves, the detection electrode 4, the detection electrode 14, the positive end and the negative end of the detection electrode and the mass block are driven to change in opposite directions, and the movement of the mass block can be detected through a differential circuit.
The upper, lower, left and right midpoints of the mass block are provided with a common spring 18 and a drive coupling spring 21; each common spring 18 or drive coupling spring 21 is composed of a first folding spring 11, a second folding spring 13, a first link 9, a second link 10, a hinge point and an anchor point 12.
The distance between the connecting point of the second folding spring 13 and the anchor point 12 and the top end of the anchor point 12 should be as small as possible, so that the symmetry of boundary conditions after structural symmetry is improved.
The mass block is applied with rightward force when moving downwards; the direction of the compensation electrostatic force received by the adjacent mass blocks is opposite, and the compensation force and the driving displacement are in phase and in phase with the quadrature error, so that the effect of quadrature error compensation is realized.
As shown in fig. 2, the driving and detecting operation states are respectively indicated as a and b. The gyroscope adopts a frame structure and the working principle is that opposite driving voltages are applied to two adjacent driving mass blocks to enable the two driving mass blocks to generate differential motion. The springs in the driving direction comprise a common spring 18, a driving coupling spring 21 and a driving spring 7, and the four driving mass blocks are mutually coupled through the driving coupling spring 21 so that the driving mass blocks can still have similar and higher displacement when the springs are in mismatch, thus the required driving voltage can be effectively reduced.
Since the displacement of the drive frame is in phase opposition in pairs, the drive frame is subjected to the coriolis force in the x-direction in the presence of the input z-axis angular velocity, and this force is conducted to the sense frame by the drive spring. The springs connected to the detection frame 19 comprise a detection spring 17, a detection coupling spring 3 and common springs 1, 2 acting indirectly through a drive spring 7. Thus, the effect of driving and detecting the simultaneous coupling of the four mass blocks is realized.
As shown in fig. 3, a common spring 18 and a coupling spring 21 are provided at the midpoints of the upper, lower, left and right of each mass. Each of the common spring 18 and the driving coupling spring 21 is composed of a first folding spring 11, a second folding spring 13, a first link 9, a second link 10, a hinge point and an anchor point 12, and when the y-direction movement occurs, the common spring is realized by y-direction deformation of the first folding spring 11 and the second folding spring 13, and the coupling spring can be realized only by y-direction deformation of the first folding spring 11. This reduces the symmetry of the structure, but the coupling in the y-direction can still be fully achieved. This folding structure is similar to the springs used in a typical top.
When the X-direction moves, the connecting rod 1 is hardly bent due to the large width, the first connecting rod 9 and the second connecting rod 10 form a hinged relation through the first folding spring 11, and at the moment, the first folding spring 11 is not parallel to the X-axis any more, but a certain included angle is formed.
The deflected second connecting rod 10 forms a displacement amplifying mechanism with the anchor point 12 and the second folding spring 13, and the elastic coefficient of the spring in the x direction can be reduced by increasing the length of the second connecting rod 10. At the same time, the presence of the hinge point 16 formed by the second folding spring 13 and the second link 10 bar allows the structure to obtain a completely symmetrical boundary condition. This is because the top end of the asymmetric end second link 10 will become a clamped edge if the hinge point 16 is not present.
As shown in fig. 4, the cross-sectional structure of the cross-structure 6, wherein the distance 1L1 should be set slightly larger than the maximum displacement of the driving mass in the driving or detection direction; the distance 2L2 is set in relation to the machining process and its dimensions should be slightly greater than the deformation of the structure in the z-axis direction so as to avoid contact between the first link 9 and the driving mass.
The foregoing is merely a preferred embodiment of the invention, and it is to be understood that the invention is not limited to the form disclosed herein but is not to be construed as excluding other embodiments, but is capable of numerous other combinations, modifications and environments and is capable of modifications within the scope of the inventive concept, either as taught or as a matter of routine skill or knowledge in the relevant art. And that modifications and variations which do not depart from the spirit and scope of the invention are intended to be within the scope of the appended claims.
Claims (8)
1. A four-mass coupled microelectromechanical gyroscope comprising four masses, characterized in that: each mass is divided into four units that are perfectly symmetrical; each mass block mainly comprises a driving frame (19) and a detecting frame (20), four driving frames (19) are interconnected through driving coupling springs (21), two adjacent detecting frames (20) of an upper row are interconnected through detecting coupling springs (3), the connection relation between two adjacent detecting frames of a lower row is the same as that of the upper row, and each pair of driving frames (19) and detecting frames (20) are interconnected through driving springs (7);
each mass is divided into four units that are perfectly symmetrical, wherein each unit comprises: the device comprises a driving electrode (1), a self-checking electrode (2), a detection coupling spring (3), a driving detection electrode (4), an orthogonal error compensation electrode (5), a crossing structure (6), a driving spring (7), a detection electrode (14), a frame (15), a detection spring (17), a common spring (18) and a driving coupling spring (21);
the driving electrode (1) and the self-checking electrode (2) are arranged in a differential mode; one end of the detection spring (17) is connected with a detection frame (20) of the frame (15), and the other end of the detection spring is connected with an anchor point (12); one end of the detection coupling spring (3) is connected with the detection coupling spring of the adjacent detection frame in series, and the other end of the detection coupling spring is connected with the detection frame (20); one end of the driving coupling spring (21) is connected with the driving coupling spring of the adjacent driving frame in series, and the other end of the driving coupling spring is connected with the driving frame (19); one end of the common spring (18) is connected with the driving frame (19), and the other end is connected with the anchor point (12); the driving spring (7) is connected with the driving frame (19) and the detecting frame (20); the quadrature error compensation electrode (5) and the driving mass form a stepped structure.
2. The four-mass coupled microelectromechanical gyroscope of claim 1, characterized in that: the larger width part of the frame (15) is provided with a stress release hole (8); the stress relief holes (8) can reduce the mass of the structure to some extent and assist in releasing the sacrificial layer.
3. The four-mass coupled microelectromechanical gyroscope of claim 1, characterized in that: the driving electrode (1) and the driving detection electrode (4) adopt comb tooth capacitors, so that the movement direction is ensured to be the same as the length direction of the comb teeth.
4. The four-mass coupled microelectromechanical gyroscope of claim 1, characterized in that: the detection electrode (14) and the self-detection electrode (2) adopt plate capacitors, so that the movement direction and the length direction of the comb teeth are mutually perpendicular.
5. The four-mass coupled microelectromechanical gyroscope of claim 1, characterized in that: when the mass block moves, the detection electrode (4) and the detection electrode (14) are driven to change in opposite directions between the positive end and the negative end of the detection electrode and the mass block, and the movement of the mass block can be detected through a differential circuit.
6. The four-mass coupled microelectromechanical gyroscope of claim 1, characterized in that: the upper, lower, left and right middle points of the mass block are provided with a common spring (18) and a driving coupling spring (21); each common spring (18) or each driving coupling spring (21) is composed of a first folding spring (11), a second folding spring (13), a first connecting rod (9), a second connecting rod (10), a hinge point and an anchor point (12).
7. The four-mass coupled microelectromechanical gyroscope of claim 6, characterized in that: the distance between the connecting point of the second folding spring (13) and the anchor point (12) and the top end of the anchor point (12) is as small as possible, so that the symmetry of boundary conditions after structural symmetry is improved.
8. The four-mass coupled microelectromechanical gyroscope of claim 1, characterized in that: the mass block is applied with rightward force when moving downwards; the direction of the compensation electrostatic force received by the adjacent mass blocks is opposite, and the compensation force and the driving displacement are in phase and in phase with the quadrature error, so that the effect of quadrature error compensation is realized.
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| CN107167123B (en) * | 2017-06-09 | 2022-04-05 | 深迪半导体(绍兴)有限公司 | Micro-electro-mechanical two-axis gyroscope |
| CN112129278B (en) * | 2020-09-15 | 2022-08-19 | 浙江大学 | Gate structure capable of reducing nonlinearity between capacitance and displacement caused by capacitance edge effect |
| CN116147599B (en) * | 2023-04-18 | 2023-06-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
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| CN101876547A (en) * | 2009-12-08 | 2010-11-03 | 北京大学 | Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver |
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| IT1392741B1 (en) * | 2008-12-23 | 2012-03-16 | St Microelectronics Rousset | MICROELETTROMECHANICAL GYROSCOPE WITH IMPROVED REJECTION OF ACCELERATION DISORDERS |
| US8322213B2 (en) * | 2009-06-12 | 2012-12-04 | The Regents Of The University Of California | Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection |
| CN102062604A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Capacitive micromachined tuning fork gyroscope |
| CN102109327B (en) * | 2010-11-29 | 2012-08-01 | 重庆大学 | Six-degree-of-freedom parallel decoupling mechanism |
| CN103575263B (en) * | 2012-07-19 | 2017-03-29 | 水木智芯科技（北京）有限公司 | Four mass full decoupling condenser type single shaft micro-mechanical gyroscopes |
| FI126071B (en) * | 2014-01-28 | 2016-06-15 | Murata Manufacturing Co | Improved gyroscope design and gyroscope |
| FI126557B (en) * | 2014-05-07 | 2017-02-15 | Murata Manufacturing Co | Improved gyroscope structure and gyroscope |
| FI20155095A (en) * | 2015-02-11 | 2016-08-12 | Murata Manufacturing Co | Micromechanical angle sensor |
| FI20155094A (en) * | 2015-02-11 | 2016-08-12 | Murata Manufacturing Co | Micromechanical angular velocity sensor |
| CN106525017B (en) * | 2016-11-09 | 2020-07-03 | 沈丹 | Micromechanical gyroscope resistant to environmental vibrations |
| CN206683650U (en) * | 2017-05-04 | 2017-11-28 | 成都振芯科技股份有限公司 | A kind of four masses coupling micro-electro-mechanical gyroscope |
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| CN101876547A (en) * | 2009-12-08 | 2010-11-03 | 北京大学 | Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver |
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