JP5018337B2 - Tuning fork vibration type sensor, mechanical quantity detection device, and mechanical quantity detection method - Google Patents

Tuning fork vibration type sensor, mechanical quantity detection device, and mechanical quantity detection method Download PDF

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JP5018337B2
JP5018337B2 JP2007216272A JP2007216272A JP5018337B2 JP 5018337 B2 JP5018337 B2 JP 5018337B2 JP 2007216272 A JP2007216272 A JP 2007216272A JP 2007216272 A JP2007216272 A JP 2007216272A JP 5018337 B2 JP5018337 B2 JP 5018337B2
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勝 長尾
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Toyota Motor Corp
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本発明は、音叉振動型センサ、力学量検出装置、及び力学量検出方法に係り、特に、所定の力学量が作用した際に互いに逆相変位する２つの錘の変位差に基づいてその所定の力学量を検出するうえで好適な音叉振動型センサ、力学量検出装置、及び力学量検出方法に関する。   The present invention relates to a tuning fork vibration type sensor, a mechanical quantity detection device, and a mechanical quantity detection method, and in particular, based on a displacement difference between two weights that are displaced in opposite phases when a predetermined mechanical quantity is applied. The present invention relates to a tuning fork vibration type sensor, a mechanical quantity detection device, and a mechanical quantity detection method suitable for detecting a mechanical quantity.

従来、基板上に変位可能に支持された錘を有する角速度センサを搭載し、所定軸周りの角速度の発生時にその錘に作用する変位量を角速度センサから出力して、その変位量に基づいて所定軸周りの角速度を検出する力学量検出装置が知られている（例えば、特許文献１参照）。この力学量検出装置において、錘は２つ対称的に設けられており、これら２つの錘は、所定の第１方向へ逆相で励起振動されつつ、角速度に応じたコリオリ力によりその第１方向と直交する所定の第２方向へ逆相で変位振動される。そして、２つの錘の第２方向における変位量の差を検出して、その変位差に基づいて第１方向及び第２方向の双方直交する所定軸周りの角速度を検出する。
特許第３５１２００４号公報 Conventionally, an angular velocity sensor having a weight supported on a substrate in a displaceable manner is mounted, and a displacement amount acting on the weight when an angular velocity around a predetermined axis is generated is output from the angular velocity sensor, and a predetermined amount is determined based on the displacement amount. A mechanical quantity detection device that detects an angular velocity around an axis is known (for example, see Patent Document 1). In this mechanical quantity detection device, two weights are provided symmetrically, and these two weights are excited and oscillated in a reverse phase in a predetermined first direction, and in the first direction by Coriolis force according to the angular velocity. Is displaced in a reverse phase in a predetermined second direction orthogonal to. Then, a difference in displacement amount between the two weights in the second direction is detected, and an angular velocity around a predetermined axis orthogonal to both the first direction and the second direction is detected based on the displacement difference.
Japanese Patent No. 351004

上述の如く、上記した力学量検出装置においては、角速度発生時に互いに逆相に変位振動する２つの錘の変位差に基づいて角速度が検出される。かかる構成においては、外乱振動等に起因して２つの錘が互いに同相に変位振動するときは、それら２つの錘の間に変位差がほとんど生じない筈であるため、角速度検出への外乱による影響が排除され、角速度の誤検出を極力抑制することが可能となる。   As described above, in the mechanical quantity detection device described above, the angular velocity is detected based on the displacement difference between the two weights that displace and vibrate in opposite phases when the angular velocity is generated. In such a configuration, when two weights are displaced in phase with each other due to disturbance vibration or the like, there should be little displacement difference between the two weights. Is eliminated, and erroneous detection of angular velocity can be suppressed as much as possible.

しかし、角速度センサのセンサ素子の加工バラツキ等に起因して、上記した２つの錘の間で質量やバネ特性，変位検出能力に差が生じることがある。かかる事態が生じていると、外乱等で２つの錘が同相に変位した際にもセンサ出力に逆相成分が現れることとなるため、その結果、上記した力学量検出装置の如き構成では、角速度の誤検出を招くおそれがある。   However, due to variations in processing of sensor elements of the angular velocity sensor, a difference in mass, spring characteristics, and displacement detection capability may occur between the two weights described above. If such a situation occurs, a negative phase component appears in the sensor output even when the two weights are displaced in phase due to a disturbance or the like. As a result, in the configuration such as the mechanical quantity detection device described above, the angular velocity There is a risk of false detection.

そこで、このような２つの錘間のバラツキ等に起因する角速度の誤検出を防止すべく、角速度センサのセンサ素子を、外部からの振動外乱などが作用し難くなるように防振ゴムなどを介して外部基板に取り付けることが考えられる。しかしながら、このように角速度誤検出の防止のために防振ゴムなどを用いる構成では、角速度検出を行うための部品点数が増大して、センサ規模の大型化や製造工程の複雑化，製造コストの上昇などの不都合が生じてしまう。   Therefore, in order to prevent erroneous detection of the angular velocity due to such variation between the two weights, the sensor element of the angular velocity sensor is provided with an anti-vibration rubber or the like so that external vibration disturbances are less likely to act. Can be attached to the external board. However, in the configuration using anti-vibration rubber or the like for preventing erroneous angular velocity detection as described above, the number of parts for performing angular velocity detection increases, the sensor scale becomes larger, the manufacturing process becomes complicated, and the manufacturing cost increases. Inconvenience such as rising will occur.

本発明は、上述の点に鑑みてなされたものであり、装置規模の大型化や製造工程の複雑化，高コスト化を招くことなく角速度の誤検出を防止する機能を確保することが可能な音叉振動型センサ、力学量検出装置、及び力学量検出方法を提供することを目的とする。   The present invention has been made in view of the above points, and can ensure a function of preventing erroneous detection of angular velocity without increasing the scale of the apparatus, complicating the manufacturing process, and increasing the cost. It is an object to provide a tuning fork vibration type sensor, a mechanical quantity detection device, and a mechanical quantity detection method.

上記の目的は、所定の力学量が作用した際に互いに逆相変位する２つの錘を備え、前記所定の力学量に応じた信号として前記２つの錘の変位差に応じた信号を出力する音叉振動型センサであって、前記２つの錘の検出方向における同相変位成分の、和の時間微分値又は各時間微分値の和を算出する算出手段と、前記算出手段による算出値に基づいて、前記２つの錘を検出方向の同相方向へフィードバック駆動するダンピング制御手段と、を備える音叉振動型センサにより達成される。   The above object is to provide a tuning fork that includes two weights that are displaced in opposite phases when a predetermined mechanical quantity acts, and that outputs a signal corresponding to the displacement difference between the two weights as a signal corresponding to the predetermined dynamic quantity. A vibration type sensor, wherein a calculating means for calculating a sum time differential value or a sum of each time differential value of in-phase displacement components in the detection direction of the two weights, and based on a calculated value by the calculating means, This is achieved by a tuning fork vibration type sensor that includes a damping control unit that feedback-drives two weights in the in-phase direction of the detection direction.

また、上記の目的は、所定の力学量が作用した際に互いに逆相変位する２つの錘と、該２つの錘の変位差に基づいて前記所定の力学量を検出する検出手段と、を備える力学量検出装置であって、前記２つの錘の検出方向における同相変位成分の、和の時間微分値又は各時間微分値の和を算出する算出手段と、前記算出手段による算出値に基づいて、前記２つの錘を検出方向の同相方向へフィードバック駆動するダンピング制御手段と、を備える力学量検出装置により達成される。   In addition, the above object includes two weights that are displaced in opposite phases when a predetermined mechanical quantity is applied, and detection means that detects the predetermined dynamic quantity based on a displacement difference between the two weights. A mechanical quantity detection device, based on a calculation means for calculating a sum time differential value or a sum of each time differential value of in-phase displacement components in the detection direction of the two weights, and a calculation value by the calculation means, This is achieved by a mechanical quantity detection device comprising damping control means for feedback-driving the two weights in the in-phase direction of the detection direction.

また、上記の目的は、所定の力学量が作用した際に互いに逆相変位する２つの錘の変位差に基づいて前記所定の力学量を検出する力学量検出方法であって、前記２つの錘の検出方向における同相変位成分の、和の時間微分値又は各時間微分値の和を算出する算出ステップと、前記算出ステップにおける算出値に基づいて、前記２つの錘を検出方向の同相方向へフィードバック駆動するダンピング制御ステップと、を備える力学量検出方法により達成される。   Further, the above object is a mechanical quantity detection method for detecting the predetermined mechanical quantity based on a displacement difference between two weights that are displaced in opposite phases when a predetermined mechanical quantity is applied. And calculating the sum of the time differential values or the sum of the time differential values of the in-phase displacement components in the detection direction, and feeding back the two weights in the in-phase direction of the detection direction based on the calculated value in the calculation step And a damping control step for driving.

これらの各態様の発明において、２つの錘は、所定の力学量が作用した際に互いに逆相に変位する。そして、その所定の力学量は、２つの錘の変位差に基づいて検出される。また、検出方向に外乱が入力されると、２つの錘は、その検出方向に同相変位する。本発明においては、２つの錘の検出方向における同相変位成分の、和の時間微分値又は各時間微分値の和が算出される。そして、その算出値に基づいて、２つの錘が検出方向の同相方向へフィードバック駆動される。このため、仮に２つの錘の間に加工公差等に起因した変位能力差が存在していても、外乱により２つの錘が検出方向に同相変位したときに、その同相変位が抑えられるので、２つの錘の変位に外乱による逆相成分が現れ難く、２つの錘間の変位差が抑えられる。従って、本発明によれば、外乱入力時における所定の力学量の誤検出を防止させることが可能となる。また、かかる構成においては、所定の力学量の誤検出を防止するうえで防振ゴム等が不要となる。このため、音叉振動型センサや力学量検出装置の規模が小型化され、製造工程が簡素化され、低コスト化が図られる。   In the inventions of these aspects, the two weights are displaced in opposite phases when a predetermined mechanical quantity is applied. The predetermined mechanical quantity is detected based on the displacement difference between the two weights. When a disturbance is input in the detection direction, the two weights are displaced in the same direction in the detection direction. In the present invention, the sum time differential value or the sum of each time differential value of the in-phase displacement component in the detection direction of the two weights is calculated. Then, based on the calculated value, the two weights are feedback-driven in the in-phase direction of the detection direction. For this reason, even if there is a displacement capability difference due to machining tolerance or the like between the two weights, when the two weights are displaced in the same direction in the detection direction due to disturbance, the common-mode displacement can be suppressed. A negative phase component due to disturbance hardly appears in the displacement of the two weights, and the displacement difference between the two weights can be suppressed. Therefore, according to the present invention, it is possible to prevent erroneous detection of a predetermined mechanical quantity at the time of disturbance input. Further, in such a configuration, a vibration-proof rubber or the like is not necessary for preventing erroneous detection of a predetermined mechanical quantity. For this reason, the scale of the tuning fork vibration type sensor and the mechanical quantity detection device is reduced, the manufacturing process is simplified, and the cost is reduced.

この場合、上記した音叉振動型センサ又は力学量検出装置において、前記ダンピング制御手段は、前記算出手段による算出値に基づいて、前記２つの錘を、検出方向での同相変位成分の振動のみダンピングが増加するように検出方向の同相方向へフィードバック駆動することとすればよい。   In this case, in the tuning fork vibration type sensor or the mechanical quantity detection device described above, the damping control unit dampens only the vibration of the in-phase displacement component in the detection direction based on the value calculated by the calculation unit. The feedback drive may be performed in the same phase direction of the detection direction so as to increase.

また、上記した音叉振動型センサ又は力学量検出装置において、前記所定の力学量が、所定軸周りに生ずる角速度であり、前記２つの錘は、所定の第１方向へ互いに逆相に励起振動された状態で、前記角速度が作用した際に該所定の第１方向と直交する所定の第２方向へ互いに逆相変位すると共に、前記算出手段は、前記２つの錘の前記所定の第２方向における同相変位成分の、和の時間微分値又は各時間微分値の和を算出し、かつ、前記ダンピング制御手段は、前記算出手段による算出値に基づいて、前記２つの錘を前記所定の第２方向の同相方向へフィードバック駆動することとすれば、装置規模の大型化や製造工程の複雑化，高コスト化を招くことなく角速度の誤検出を防止する機能を確保することができる。   In the tuning fork vibration type sensor or the mechanical quantity detection device described above, the predetermined mechanical quantity is an angular velocity generated around a predetermined axis, and the two weights are excited and oscillated in mutually opposite phases in a predetermined first direction. In this state, when the angular velocity is applied, they are displaced in opposite phases in a predetermined second direction orthogonal to the predetermined first direction, and the calculating means is configured to move the two weights in the predetermined second direction. The sum time differential value or the sum of each time differential value of the in-phase displacement component is calculated, and the damping control means is configured to move the two weights in the predetermined second direction based on the calculated value by the calculation means. If the feedback driving is performed in the in-phase direction, it is possible to ensure a function of preventing erroneous detection of angular velocity without increasing the scale of the apparatus, complicating the manufacturing process, and increasing the cost.

本発明によれば、装置規模の大型化や製造工程の複雑化，高コスト化を招くことなく所定の力学量の誤検出を防止する機能を確保することができる。   According to the present invention, it is possible to ensure a function of preventing erroneous detection of a predetermined mechanical quantity without increasing the scale of the apparatus, complicating the manufacturing process, and increasing the cost.

以下、図面を用いて、本発明の具体的な実施の形態について説明する。   Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の第１実施例である力学量検出装置１０が備える音叉振動型センサ１２の平面図を示す。図２は、本実施例の力学量検出装置１０の電気的なブロック構成図を示す。また、図３は、本実施例の音叉振動型センサ１２の原理モデルを表した図を示す。   FIG. 1 is a plan view of a tuning fork vibration type sensor 12 provided in a mechanical quantity detection device 10 according to a first embodiment of the present invention. FIG. 2 shows an electrical block diagram of the mechanical quantity detection device 10 of the present embodiment. FIG. 3 is a diagram showing a principle model of the tuning fork vibration type sensor 12 of this embodiment.

本実施例の力学量検出装置１０は、例えば車両や航空機等の対象物に搭載されており、その重心近傍を通る軸（具体的には鉛直軸；以下適宜、Ｚ軸と称す）回りに生ずる角速度Ωを、半導体で構成した音叉振動型センサ１２を用いて検出する角速度検出装置である。角速度センサである音叉振動型センサ１２は、Ｚ軸回りの角速度Ωに応じた信号を出力すべく、そのＺ軸にそれぞれ直交するＸ軸及びＹ軸を含む平面Ｘ−Ｙ内に配置されている。尚、Ｘ軸とＹ軸とは互いに直交する。   The mechanical quantity detection device 10 of this embodiment is mounted on an object such as a vehicle or an aircraft, for example, and is generated around an axis passing through the vicinity of the center of gravity (specifically, a vertical axis; hereinafter referred to as Z axis as appropriate). This is an angular velocity detection device that detects an angular velocity Ω using a tuning fork vibration type sensor 12 made of a semiconductor. The tuning fork vibration type sensor 12 that is an angular velocity sensor is arranged in a plane XY including an X axis and a Y axis that are respectively orthogonal to the Z axis in order to output a signal corresponding to the angular velocity Ω around the Z axis. . The X axis and the Y axis are orthogonal to each other.

音叉振動型センサ１２は、例えばシリコン結晶基板の表面に微細加工によるエッチングを施すことにより形成される。尚、具体的な製造方法としては、まず、単結晶シリコン層の上面上にシリコン酸化膜（例えば膜厚４．５μｍ）を介して単結晶シリコン層（例えば膜厚４０μｍ）を設けたＳＯＩ（Silicon-On-Insulator）基板を用意し、単結晶シリコン層にリン，ボロン等の不純物をドーピングして単結晶シリコン層の上表面部を低抵抗化して導電帯層とする。そして、最下層の単結晶シリコン層を基板１４とし、反応性エッチングなどにより中間層であるシリコン酸化膜（絶縁層）及び最上層である導電帯層を除去すると共に、フッ酸水溶液などを用いたエッチングにより最上層である導電帯層を残して絶縁層のみを除去することにより、同基板１４上に各種機能部品を形成する。   The tuning fork vibration type sensor 12 is formed, for example, by etching the surface of a silicon crystal substrate by fine processing. As a specific manufacturing method, first, an SOI (Silicon having a single crystal silicon layer (for example, 40 μm thickness) provided on a top surface of the single crystal silicon layer via a silicon oxide film (for example, a film thickness of 4.5 μm). -On-Insulator) A substrate is prepared, and the single crystal silicon layer is doped with impurities such as phosphorus and boron to reduce the resistance of the upper surface portion of the single crystal silicon layer to form a conductive band layer. Then, the lowermost single crystal silicon layer was used as the substrate 14, and the silicon oxide film (insulating layer) as the intermediate layer and the conductive band layer as the uppermost layer were removed by reactive etching or the like, and a hydrofluoric acid aqueous solution or the like was used. Various functional components are formed on the substrate 14 by removing only the insulating layer while leaving the uppermost conductive band layer by etching.

尚、図２においては、音叉振動型センサ１２の構成部分のうち、絶縁層（中間層）及び導電帯層（最上層）の両方を除去した部分を白色で、絶縁層（中間層）のみを除去した部分を点模様で、また、絶縁層（中間層）及び導電帯層（最上層）の両方を基板１４上に残した部分を網模様で、それぞれ示す。また、以下の説明では、点模様の部分を基板１４から浮いた部分とし、また、網模様の部分を基板１４に固着した部分とする。   In FIG. 2, of the components of the tuning fork vibration type sensor 12, the portion from which both the insulating layer (intermediate layer) and the conductive band layer (uppermost layer) are removed is white, and only the insulating layer (intermediate layer) is provided. The removed portion is indicated by a dot pattern, and the portion where both the insulating layer (intermediate layer) and the conductive band layer (uppermost layer) are left on the substrate 14 is indicated by a mesh pattern. Further, in the following description, a dot pattern portion is a portion floating from the substrate 14, and a mesh pattern portion is a portion fixed to the substrate 14.

音叉振動型センサ１２は、上記の如く形成される基板１４を備えている。基板１４は、Ｘ軸方向に平行に延設された２辺及びＹ軸方向に平行に延設された２辺を有する方形状に形成されている。基板１４上には、一対の振動子１６Ｌ，１６Ｒが同基板１４から浮いた状態で設けられている。振動子１６Ｌ，１６Ｒは、互いに略等しい質量を有し、基板１４上でＸ軸方向対称位置に配置されている。一方の振動子１６ＬのＹ軸方向両外側には、長尺かつ幅広のメインフレーム１８Ｌ１，１８Ｌ２が基板１４から浮いた状態でＸ軸方向に延設して配置されている。また、他方の振動子１６ＲのＹ軸方向両外側にも、長尺かつ幅広のメインフレーム１８Ｒ１，１８Ｒ２が基板１４から浮いた状態でＸ軸方向に延設して配置されている。   The tuning fork vibration type sensor 12 includes the substrate 14 formed as described above. The substrate 14 is formed in a square shape having two sides extending parallel to the X-axis direction and two sides extending parallel to the Y-axis direction. On the substrate 14, a pair of vibrators 16 </ b> L and 16 </ b> R is provided in a state of floating from the substrate 14. The vibrators 16 </ b> L and 16 </ b> R have substantially the same mass, and are disposed on the substrate 14 at symmetrical positions in the X-axis direction. Long and wide main frames 18L1 and 18L2 are arranged to extend in the X-axis direction while floating from the substrate 14 on both outer sides in the Y-axis direction of one vibrator 16L. In addition, long and wide main frames 18R1 and 18R2 are arranged to extend in the X-axis direction while floating from the substrate 14 on both outer sides of the other vibrator 16R in the Y-axis direction.

振動子１６Ｌは、そのＹ軸方向両端にてＸ軸方向外側にそれぞれ一体的に延設された長尺かつ幅広のアーム部２０Ｌ１，２０Ｌ２を有している。アーム部２０Ｌ１，２０Ｌ２は、そのＸ軸方向両端にて、それぞれ一対の長尺かつ幅狭の検出用梁２２Ｌ１，２２Ｌ２を介してメインフレーム１８Ｌ１，１８Ｌ２のＸ軸方向両端に接続されている。検出用梁２２Ｌ１，２２Ｌ２は、アーム部２０Ｌ１，２０Ｌ２及びメインフレーム１８Ｌ１，１８Ｌ２と一体的に基板１４から浮いた状態に形成されており、Ｘ軸方向に延設されている。検出用梁２２Ｌ１，２２Ｌ２は、振動子１６Ｌをメインフレーム１８Ｌ１，１８Ｌ２に対してＸ軸方向に変位し難くかつＹ軸方向に変位し易く支持している。   The vibrator 16L has long and wide arm portions 20L1 and 20L2 that are integrally extended to the outside in the X-axis direction at both ends in the Y-axis direction. The arm portions 20L1 and 20L2 are connected to both ends in the X-axis direction of the main frames 18L1 and 18L2 via a pair of long and narrow detection beams 22L1 and 22L2, respectively, at both ends in the X-axis direction. The detection beams 22L1 and 22L2 are formed so as to be lifted from the substrate 14 integrally with the arm portions 20L1 and 20L2 and the main frames 18L1 and 18L2, and extend in the X-axis direction. The detection beams 22L1 and 22L2 support the vibrator 16L with respect to the main frames 18L1 and 18L2, which are difficult to displace in the X-axis direction and easy to displace in the Y-axis direction.

同様に、振動子１６Ｒは、アーム部２０Ｌ１，２０Ｌ２と同様のアーム部２０Ｒ１，２０Ｒ２を有している。アーム部２０Ｒ１，２０Ｒ２は、そのＸ軸方向両端にて検出用梁２２Ｒ１，２２Ｒ２を介してメインフレーム１８Ｒ１，１８Ｒ２のＸ軸方向両端に接続されている。検出用梁２２Ｒ１，２２Ｒ２は、アーム部２０Ｒ１，２０Ｒ２及びメインフレーム１８Ｒ１，１８Ｒ２と一体的に基板１４から浮いた状態に形成されており、Ｘ軸方向に延設されている。検出用梁２２Ｒ１，２２Ｒ２は、振動子１６Ｒをメインフレーム１８Ｒ１，１８Ｒ２に対してＸ軸方向に変位し難くかつＹ軸方向に変位し易く支持している。   Similarly, the vibrator 16R includes arm portions 20R1 and 20R2 similar to the arm portions 20L1 and 20L2. The arm portions 20R1 and 20R2 are connected to both ends of the main frames 18R1 and 18R2 in the X-axis direction via detection beams 22R1 and 22R2 at both ends in the X-axis direction. The detection beams 22R1 and 22R2 are formed so as to be floating from the substrate 14 integrally with the arm portions 20R1 and 20R2 and the main frames 18R1 and 18R2, and extend in the X-axis direction. The detection beams 22R1 and 22R2 support the vibrator 16R with respect to the main frames 18R1 and 18R2, which are difficult to displace in the X-axis direction and easy to displace in the Y-axis direction.

メインフレーム１８Ｌ１のＹ軸方向外側には、長尺かつ幅広のサブフレーム２４Ｌ１が基板１４から浮いた状態でＸ軸方向に延設されている。サブフレーム２４Ｌ１は、複数の長尺かつ幅狭の駆動梁２６Ｌ１を介してメインフレーム１８Ｌ１に接続されると共に、複数の長尺かつ幅狭の駆動梁２８Ｌ１を介して基板１４に固着された複数のアンカ３０Ｌ１に接続されている。駆動梁２６Ｌ１，２８Ｌ１は、メインフレーム１８Ｌ１及びサブフレーム２４Ｌ１と一体的に基板１４から浮いた状態に形成されてＹ軸方向に延設されている。また、メインフレーム１８Ｌ１を基板１４に対してＸ軸方向に変位し易くかつＹ軸方向に変位し難く支持している。すなわち、メインフレーム１８Ｌ１は、駆動梁２６Ｌ１、サブフレーム２４Ｌ１、及び駆動梁２８Ｌ１を介して基板１４にＸ軸方向に変位し易くかつＹ軸方向に変位し難く支持されている。   A long and wide sub-frame 24L1 extends in the X-axis direction in a state of floating from the substrate 14 on the outer side in the Y-axis direction of the main frame 18L1. The subframe 24L1 is connected to the main frame 18L1 via a plurality of long and narrow driving beams 26L1, and a plurality of subframes 24L1 are fixed to the substrate 14 via a plurality of long and narrow driving beams 28L1. It is connected to the anchor 30L1. The drive beams 26L1 and 28L1 are formed integrally with the main frame 18L1 and the subframe 24L1 so as to float from the substrate 14 and extend in the Y-axis direction. Further, the main frame 18L1 is supported with respect to the substrate 14 so as to be easily displaced in the X-axis direction and difficult to be displaced in the Y-axis direction. That is, the main frame 18L1 is supported by the substrate 14 via the driving beam 26L1, the subframe 24L1, and the driving beam 28L1 so that the main frame 18L1 is easily displaced in the X-axis direction and hardly displaced in the Y-axis direction.

同様に、メインフレーム１８Ｌ２，１８Ｒ１，１８Ｒ２のＹ軸方向外側には、サブフレーム２４Ｌ１と同様のサブフレーム２４Ｌ２，２４Ｒ１，２４Ｒ２が設けられている。各メインフレーム１８Ｌ２，１８Ｒ１，１８Ｒ２は、駆動梁２６Ｌ２，２６Ｒ１，２６Ｒ２、サブフレーム２４Ｌ２，２４Ｒ１，２４Ｒ２、及び駆動梁２８Ｌ２，２８Ｒ１，２８Ｒ２を介して基板１４にＸ軸方向に変位し易くかつＹ軸方向に変位し難く支持されている。   Similarly, subframes 24L2, 24R1, and 24R2 similar to the subframe 24L1 are provided outside the main frames 18L2, 18R1, and 18R2 in the Y-axis direction. The main frames 18L2, 18R1, and 18R2 are easily displaced in the X-axis direction on the substrate 14 via the driving beams 26L2, 26R1, and 26R2, the subframes 24L2, 24R1, and 24R2, and the driving beams 28L2, 28R1, and 28R2, and the Y-axis. It is supported with little displacement in the direction.

上記した２つの振動子１６Ｌ，１６Ｒは、基板１４から浮いたリンク部３２を介して互いに連結されている。リンク部３２は、振動子１６Ｌ側のメインフレーム１８Ｌ１と振動子１６Ｒ側のメインフレーム１８Ｒ１とを連結する第１リンク部３２−１と、振動子１６Ｌ側のメインフレーム１８Ｌ２と振動子１６Ｒ側のメインフレーム１８Ｒ２とを連結する第２リンク部３２−２と、を有している。   The two vibrators 16L and 16R described above are connected to each other via a link portion 32 that is lifted from the substrate 14. The link section 32 includes a first link section 32-1 that connects the main frame 18L1 on the vibrator 16L side and the main frame 18R1 on the vibrator 16R side, a main frame 18L2 on the vibrator 16L side, and a main on the vibrator 16R side. And a second link portion 32-2 that connects the frame 18R2.

第１リンク部３２−１は、複数の長尺かつ幅狭の第１リンク梁３４Ｌ１，３４Ｒ１と、長尺かつ幅広の第１リンク３６−１と、を有している。第１リンク梁３４Ｌ１，３４Ｒ１は、メインフレーム１８Ｌ１，１８Ｒ１と一体的に基板１４から浮いた状態に形成されており、一端にてメインフレーム１８Ｌ１，１８Ｒ１に接続されていると共に、Ｙ軸方向に延設され、他端にて第１リンク３６−１に接続されている。第１リンク３６−１は、メインフレーム１８Ｌ１，１８Ｒ１と一体的に基板１４から浮いた状態に形成されており、Ｘ軸方向に延設されている。同様に、第２リンク部３２−２は、複数の長尺かつ幅狭の第２リンク梁３４Ｌ２，３４Ｒ２と、長尺かつ幅広の第２リンク３６−２と、を有している。   The first link portion 32-1 has a plurality of long and narrow first link beams 34L1 and 34R1, and a long and wide first link 36-1. The first link beams 34L1 and 34R1 are formed in a state of floating integrally with the main frames 18L1 and 18R1, and are connected to the main frames 18L1 and 18R1 at one end and extend in the Y-axis direction. The other end is connected to the first link 36-1. The first link 36-1 is formed in a state of floating from the substrate 14 integrally with the main frames 18L1, 18R1, and extends in the X-axis direction. Similarly, the second link portion 32-2 includes a plurality of long and narrow second link beams 34L2 and 34R2, and a long and wide second link 36-2.

第１リンク３６−１と第２リンク３６−２とは、一端にて、複数の長尺かつ幅狭のサブリンク梁３８Ｌ１，３８Ｌ２及び長尺かつ幅広のサブリンク４０Ｌを介して連結されていると共に、他端にて、複数の長尺かつ幅狭のサブリンク梁３８Ｒ１，３８Ｒ２及び長尺かつ幅広のサブリンク４０Ｒを介して連結されている。サブリンク梁３８Ｌ１，３８Ｌ２，３８Ｒ１，３８Ｒ２はそれぞれ、第１又は第２リンク３６−１，３６−２と一体的に基板から浮いた状態に形成されており、一端にて第１又は第２リンク３６−１，３６−２に接続されていると共に、Ｘ軸方向に延設され、他端にてサブリンク４０Ｌ，４０Ｒに接続されている。サブリンク４０Ｌ，４０Ｒは、第１又は第２リンク３６−１，３６−２と一体的に基板から浮いた状態に形成されており、Ｙ軸方向に延設されている。   The first link 36-1 and the second link 36-2 are connected at one end via a plurality of long and narrow sublink beams 38L1 and 38L2 and a long and wide sublink 40L. At the other end, they are connected via a plurality of long and narrow sub-link beams 38R1 and 38R2 and a long and wide sub-link 40R. The sub link beams 38L1, 38L2, 38R1, and 38R2 are formed integrally with the first or second links 36-1 and 36-2 so as to float from the substrate, and the first or second link is formed at one end. It is connected to 36-1 and 36-2, is extended in the X-axis direction, and is connected to the sub links 40L and 40R at the other end. The sub links 40L and 40R are formed integrally with the first or second links 36-1 and 36-2 so as to float from the substrate, and extend in the Y-axis direction.

第１及び第２リンク梁３４Ｌ１，３４Ｌ２，３４Ｒ１，３４Ｒ２は、振動子１６Ｌ，１６Ｒを第１及び第２リンク３６−１，３６−２に対してＸ軸方向に変位し易くかつＹ軸方向に変位し難く支持しており、リンク３６−１，３６−２に対する振動子１６Ｌ，１６ＲのＸ軸方向への変位を許容する梁である。また、サブリンク梁３８Ｌ１，３８Ｌ２，３８Ｒ１，３８Ｒ２は、第１リンク３６−１と第２リンク３６−２とをＸ軸方向に相対変位し難くかつＹ軸方向に相対変位し易く支持しており、第１リンク３６−１と第２リンク３６−２とのＹ軸方向への相対変位を許容する梁である。   The first and second link beams 34L1, 34L2, 34R1, and 34R2 are easy to displace the vibrators 16L and 16R in the X-axis direction with respect to the first and second links 36-1 and 36-2 and in the Y-axis direction. It is a beam that is supported so as not to be displaced, and allows displacement of the vibrators 16L and 16R in the X-axis direction with respect to the links 36-1 and 36-2. The sub-link beams 38L1, 38L2, 38R1, and 38R2 support the first link 36-1 and the second link 36-2 that are not easily displaced relatively in the X-axis direction and are easily displaced relatively in the Y-axis direction. The beam permits the relative displacement in the Y-axis direction between the first link 36-1 and the second link 36-2.

また、基板１４上には、メインフレーム１８Ｌ１，１８Ｌ２，１８Ｒ１，１８Ｒ２を基板１４に対してＸ軸方向に駆動させるための駆動電極部４２Ｌ１，４２Ｌ２，４２Ｒ１，４２Ｒ２と、メインフレーム１８Ｌ１，１８Ｌ２，１８Ｒ１，１８Ｒ２の基板１４に対するＸ軸方向の振動をモニタするための駆動モニタ電極部４４Ｌ１，４４Ｌ２，４４Ｒ１，４４Ｒ２と、振動子１６Ｌ，１６Ｒの基板１４に対するＹ軸方向の振動を検出するための検出電極部４６Ｌ１，４６Ｌ２，４６Ｒ１，４６Ｒ２と、振動子１６Ｌ，１６Ｒの基板１４に対するＹ軸方向の同相変位成分（すなわち、同一方向の変位成分）をダンピングさせるためのダンピング電極部４８Ｌ１，４８Ｌ２，４８Ｒ１，４８Ｒ２と、が設けられている。   Further, on the substrate 14, drive electrode portions 42L1, 42L2, 42R1, and 42R2 for driving the main frames 18L1, 18L2, 18R1, and 18R2 in the X-axis direction with respect to the substrate 14 and main frames 18L1, 18L2, and 18R1 are provided. , 18R2 drive monitor electrode portions 44L1, 44L2, 44R1, 44R2 for monitoring vibration in the X-axis direction with respect to the substrate 14, and detection electrodes for detecting vibrations in the Y-axis direction with respect to the substrate 14 of the transducers 16L, 16R. Damping electrode portions 48L1, 48L2, 48R1, and 48R2 for damping the in-phase displacement components in the Y-axis direction (ie, the displacement components in the same direction) with respect to the substrate 14 of the vibrators 16L and 16R2 and the portions 46L1, 46L2, 46R1, and 46R2. And are provided.

駆動電極部４２Ｌ１，４２Ｌ２は、メインフレーム１８Ｌ１，１８Ｌ２のＸ軸方向外側端部にて一体的にＹ軸方向外側へ向けて基板１４から浮かせて延設した突出部５０Ｌ１，５０Ｌ２のＸ軸方向外側に設けられている。駆動電極部４２Ｌ１，４２Ｌ２は、Ｘ軸方向に延設された櫛歯状の可動電極指６０Ｌ１，６０Ｌ２と、Ｘ軸方向に延設された櫛歯状の固定電極指６２Ｌ１，６２Ｌ２と、を有している。   The drive electrode portions 42L1 and 42L2 are formed at the outer ends in the X-axis direction of the main frames 18L1 and 18L2 so that the projecting portions 50L1 and 50L2 are integrally extended at the outer end portions in the X-axis direction. Is provided. The drive electrode portions 42L1 and 42L2 include comb-like movable electrode fingers 60L1 and 60L2 extending in the X-axis direction and comb-like fixed electrode fingers 62L1 and 62L2 extending in the X-axis direction. is doing.

各固定電極指６２Ｌ１，６２Ｌ２は、基板１４上に一体的に固着した配線部６４Ｌ１，６４Ｌ２を介して基板１４上に一体的に固着したパッド部６６Ｌ１，６６Ｌ２に接続されている。パッド部６６Ｌ１，６６Ｌ２の上面には、導電金属（例えばアルミニウム）で形成された電極パッド６８Ｌ１，６８Ｌ２が設けられている。各可動電極指６０Ｌ１，６０Ｌ２は、基板１４から浮かせて突出部５０Ｌ１，５０Ｌ２からＸ軸方向外側に一体的に延設して形成されており、固定電極指６２Ｌ１間又は６２Ｌ２間のＹ軸方向中央位置においてＸ軸方向へ進入しており、固定電極指６２Ｌ１，６２Ｌ２にＹ軸方向で隣接して対向している。   The fixed electrode fingers 62L1 and 62L2 are connected to pad portions 66L1 and 66L2 that are integrally fixed on the substrate 14 via wiring portions 64L1 and 64L2 that are integrally fixed on the substrate 14, respectively. Electrode pads 68L1 and 68L2 made of a conductive metal (for example, aluminum) are provided on the upper surfaces of the pad portions 66L1 and 66L2. Each of the movable electrode fingers 60L1 and 60L2 is formed so as to float from the substrate 14 and integrally extend outward from the protrusions 50L1 and 50L2 in the X-axis direction, and is centered between the fixed electrode fingers 62L1 or 62L2 in the Y-axis direction. It has entered in the X-axis direction at the position, and faces the fixed electrode fingers 62L1 and 62L2 adjacently in the Y-axis direction.

駆動電極部４２Ｒ１，４２Ｒ２は、メインフレーム１８Ｒ１，１８Ｒ２のＸ軸方向外側端部にて一体的にＹ軸方向外側へ向けて基板１４から浮かせて延設した突出部５０Ｒ１，５０Ｒ２のＸ軸方向内側に設けられている。駆動電極部４２Ｒ１，４２Ｒ２は、Ｘ軸方向に延設された櫛歯状の可動電極指６０Ｒ１，６０Ｒ２と、Ｘ軸方向に延設された櫛歯状の固定電極指６２Ｒ１，６２Ｒ２と、を有している。   The drive electrode portions 42R1 and 42R2 are inward in the X-axis direction of the projecting portions 50R1 and 50R2 that are floated and extended from the substrate 14 toward the outer side in the Y-axis direction at the outer ends of the main frames 18R1 and 18R2 Is provided. The drive electrode portions 42R1 and 42R2 include comb-like movable electrode fingers 60R1 and 60R2 extending in the X-axis direction and comb-like fixed electrode fingers 62R1 and 62R2 extending in the X-axis direction. is doing.

各固定電極指６２Ｒ１，６２Ｒ２は、基板１４上に一体的に固着した配線部６４Ｒ１，６４Ｒ２を介して基板１４上に一体的に固着したパッド部６６Ｒ１，６６Ｒ２に接続されている。パッド部６６Ｒ１，６６Ｒ２の上面には、導電金属（例えばアルミニウム）で形成された電極パッド６８Ｒ１，６８Ｒ２が設けられている。各可動電極指６０Ｒ１，６０Ｒ２は、基板１４から浮かせて突出部５０Ｒ１，５０Ｒ２からＸ軸方向内側に一体的に延設して形成されており、固定電極指６２Ｒ１間又は６２Ｒ２間のＹ軸方向中央位置においてＸ軸方向へ進入しており、固定電極指６２Ｒ１，６２Ｒ２にＹ軸方向で隣接して対向している。   The fixed electrode fingers 62R1 and 62R2 are connected to pad portions 66R1 and 66R2 integrally fixed on the substrate 14 through wiring portions 64R1 and 64R2 integrally fixed on the substrate 14, respectively. Electrode pads 68R1 and 68R2 made of a conductive metal (for example, aluminum) are provided on the upper surfaces of the pad portions 66R1 and 66R2. Each movable electrode finger 60R1, 60R2 is formed so as to float from the substrate 14 and integrally extend from the protrusions 50R1, 50R2 to the inside in the X-axis direction, and is centered between the fixed electrode fingers 62R1 or 62R2 in the Y-axis direction. It enters in the X-axis direction at the position and faces the fixed electrode fingers 62R1 and 62R2 adjacently in the Y-axis direction.

駆動モニタ電極部４４Ｌ１，４４Ｌ２は、突出部５０Ｌ１，５０Ｌ２のＸ軸方向内側（駆動電極部４２Ｌ１，４２Ｌ２とはＸ軸方向反対側）に設けられている。駆動モニタ電極部４４Ｌ１，４４Ｌ２は、Ｘ軸方向に延設された櫛歯状の可動電極指７０Ｌ１，７０Ｌ２と、Ｘ軸方向に延設された櫛歯状の固定電極指７２Ｌ１，７２Ｌ２と、を有している。   The drive monitor electrode portions 44L1 and 44L2 are provided on the inner side in the X-axis direction of the projecting portions 50L1 and 50L2 (on the opposite side to the drive electrode portions 42L1 and 42L2). The drive monitor electrode portions 44L1 and 44L2 include comb-shaped movable electrode fingers 70L1 and 70L2 extending in the X-axis direction and comb-shaped fixed electrode fingers 72L1 and 72L2 extending in the X-axis direction. Have.

各固定電極指７２Ｌ１，７２Ｌ２は、基板１４上に一体的に固着した配線部７４Ｌ１，７４Ｌ２を介して基板１４上に一体的に固着したパッド部７６Ｌ１，７６Ｌ２に接続されている。パッド部７６Ｌ１，７６Ｌ２の上面には、導電金属（例えばアルミニウム）で形成された電極パッド７８Ｌ１，７８Ｌ２が設けられている。各可動電極指７０Ｌ１，７０Ｌ２は、基板１４から浮かせて突出部５０Ｌ１，５０Ｌ２からＸ軸方向内側に一体的に延設して形成されており、固定電極指７２Ｌ１間又は７２Ｌ２間のＹ軸方向中央位置においてＸ軸方向へ進入しており、固定電極指７２Ｌ１，７２Ｌ２にＹ軸方向で隣接して対向している。   The fixed electrode fingers 72L1 and 72L2 are connected to pad portions 76L1 and 76L2 integrally fixed on the substrate 14 through wiring portions 74L1 and 74L2 integrally fixed on the substrate 14, respectively. Electrode pads 78L1 and 78L2 formed of a conductive metal (for example, aluminum) are provided on the upper surfaces of the pad portions 76L1 and 76L2. Each of the movable electrode fingers 70L1 and 70L2 is formed so as to float from the substrate 14 and integrally extend from the protrusions 50L1 and 50L2 to the inside in the X-axis direction, and is centered between the fixed electrode fingers 72L1 or 72L2 in the Y-axis direction. It enters in the X-axis direction at the position and faces the fixed electrode fingers 72L1 and 72L2 adjacently in the Y-axis direction.

駆動モニタ電極部４４Ｒ１，４４Ｒ２は、突出部５０Ｒ１，５０Ｒ２のＸ軸方向外側（駆動電極部４２Ｒ１，４２Ｒ２とはＸ軸方向反対側）に設けられている。駆動モニタ電極部４４Ｒ１，４４Ｒ２は、Ｘ軸方向に延設された櫛歯状の可動電極指７０Ｒ１，７０Ｒ２と、Ｘ軸方向に延設された櫛歯状の固定電極指７２Ｒ１，７２Ｒ２と、を有している。   The drive monitor electrode portions 44R1 and 44R2 are provided on the outer side in the X axis direction of the projecting portions 50R1 and 50R2 (on the opposite side to the drive electrode portions 42R1 and 42R2 in the X axis direction). The drive monitor electrode portions 44R1 and 44R2 include comb-shaped movable electrode fingers 70R1 and 70R2 extending in the X-axis direction, and comb-shaped fixed electrode fingers 72R1 and 72R2 extending in the X-axis direction. Have.

各固定電極指７２Ｒ１，７２Ｒ２は、基板１４上に一体的に固着した配線部７４Ｒ１，７４Ｒ２を介して基板１４上に一体的に固着したパッド部７６Ｒ１，７６Ｒ２に接続されている。パッド部７６Ｒ１，７６Ｒ２の上面には、導電金属（例えばアルミニウム）で形成された電極パッド７８Ｒ１，７８Ｒ２が設けられている。各可動電極指７０Ｒ１，７０Ｒ２は、基板１４から浮かせて突出部５０Ｒ１，５０Ｒ２からＸ軸方向外側に一体的に延設して形成されており、固定電極指７２Ｒ１間又は７２Ｒ２間のＹ軸方向中央位置においてＸ軸方向へ進入しており、固定電極指７２Ｒ１，７２Ｒ２にＹ軸方向で隣接して対向している。   The fixed electrode fingers 72R1 and 72R2 are connected to pad portions 76R1 and 76R2 that are integrally fixed on the substrate 14 via wiring portions 74R1 and 74R2 that are integrally fixed on the substrate 14, respectively. Electrode pads 78R1 and 78R2 formed of a conductive metal (for example, aluminum) are provided on the upper surfaces of the pad portions 76R1 and 76R2. Each of the movable electrode fingers 70R1 and 70R2 is formed so as to float from the substrate 14 and integrally extend outward from the protrusions 50R1 and 50R2 in the X-axis direction, and is centered between the fixed electrode fingers 72R1 or 72R2 in the Y-axis direction. It enters in the X-axis direction at the position and faces the fixed electrode fingers 72R1 and 72R2 adjacently in the Y-axis direction.

検出電極部３４Ｌ１，３４Ｌ２，３４Ｒ１，３４Ｒ２は、アーム部２０Ｌ１，２０Ｌ２，２０Ｒ１，２０Ｒ２のＹ軸方向内側に設けられている。検出電極部３４Ｌ１，３４Ｌ２，３４Ｒ１，３４Ｒ２は、Ｘ軸方向に延設された櫛歯状の可動電極指８０Ｌ１，８０Ｌ２，８０Ｒ１，８０Ｒ２と、Ｘ軸方向に延設された櫛歯状の固定電極指８２Ｌ１，８２Ｌ２，８２Ｒ１，８２Ｒ２と、を有している。   The detection electrode portions 34L1, 34L2, 34R1, and 34R2 are provided on the inner side in the Y-axis direction of the arm portions 20L1, 20L2, 20R1, and 20R2. The detection electrode portions 34L1, 34L2, 34R1, and 34R2 are comb-shaped movable electrode fingers 80L1, 80L2, 80R1, and 80R2 that extend in the X-axis direction, and a comb-shaped fixed electrode that extends in the X-axis direction. And fingers 82L1, 82L2, 82R1, and 82R2.

各固定電極指８２Ｌ１，８２Ｌ２，８２Ｒ１，８２Ｒ２は、基板１４上に一体的に固着した配線部８４Ｌ１，８４Ｌ２，８４Ｒ１，８４Ｒ２を介して基板１４上に一体的に固着したパッド部８６Ｌ１，８６Ｌ２，８６Ｒ１，８６Ｒ２に接続されている。パッド部８６Ｌ１，８６Ｌ２，８６Ｒ１，８６Ｒ２の上面には、導電金属（例えばアルミニウム）で形成された電極パッド８８Ｌ１，８８Ｌ２，８８Ｒ１，８８Ｒ２が設けられている。各可動電極指８０Ｌ１，８０Ｌ２，８０Ｒ１，８０Ｒ２は、アーム部２０Ｌ１，２０Ｌ２，２０Ｒ１，２０Ｒ２のＹ軸方向内側に一体的に基板１４から浮かせて延設された複数の突出部及び振動子１６Ｌ，１６Ｒから、基板１４に対して浮かせてＸ軸方向に一体的に延設して形成されている。各可動電極指８０Ｌ１，８０Ｌ２，８０Ｒ１，８０Ｒ２は、固定電極指８２Ｌ１間、８２Ｌ２間、８２Ｒ１間、又は８２Ｒ２間のＸ軸方向へ進入しており、その固定電極指８２Ｌ１，８２Ｌ２，８２Ｒ１，８２Ｒ２にＹ軸方向で隣接して対向しているが、各間のＹ軸方向中央位置よりもＹ軸方向内側にオフセットして設けられている。   The fixed electrode fingers 82L1, 82L2, 82R1, and 82R2 are pad portions 86L1, 86L2, and 86R1 that are integrally fixed to the substrate 14 via wiring portions 84L1, 84L2, 84R1, and 84R2 that are integrally fixed to the substrate 14, respectively. , 86R2. Electrode pads 88L1, 88L2, 88R1, and 88R2 made of conductive metal (for example, aluminum) are provided on the upper surfaces of the pad portions 86L1, 86L2, 86R1, and 86R2. Each of the movable electrode fingers 80L1, 80L2, 80R1, and 80R2 includes a plurality of protrusions and vibrators 16L and 16R that are integrally suspended and extended from the substrate 14 on the inner side in the Y-axis direction of the arm portions 20L1, 20L2, 20R1, and 20R2. Therefore, it is formed so as to float with respect to the substrate 14 and extend integrally in the X-axis direction. The movable electrode fingers 80L1, 80L2, 80R1, and 80R2 enter the X-axis direction between the fixed electrode fingers 82L1, 82L2, 82R1, or 82R2, and enter the fixed electrode fingers 82L1, 82L2, 82R1, and 82R2. Although they are adjacent to each other in the Y-axis direction, they are provided offset inward in the Y-axis direction from the center position in the Y-axis direction between them.

ダンピング電極部４８Ｌ１，４８Ｌ２，４８Ｒ１，４８Ｒ２は、振動子１６Ｌ，１６Ｒから一体的にＸ軸方向外側に基板１４から浮かせて延設した長尺かつ幅広のアーム部５４Ｌ１，５４Ｌ２，５４Ｒ１，５４Ｒ２のＹ軸方向外側に設けられている。ダンピング電極部４８Ｌ１，４８Ｌ２，４８Ｒ１，４８Ｒ２は、Ｘ軸方向に延設された櫛歯状の可動電極指９０Ｌ１，９０Ｌ２，９０Ｒ１，９０Ｒ２と、Ｘ軸方向に延設された櫛歯状の固定電極指９２Ｌ１，９２Ｌ２，９２Ｒ１，９２Ｒ２と、を有している。   The damping electrode portions 48L1, 48L2, 48R1, and 48R2 are Y of the long and wide arm portions 54L1, 54L2, 54R1, and 54R2 that are floated and extended from the substrate 14 integrally with the transducers 16L and 16R outward in the X-axis direction. It is provided outside in the axial direction. The damping electrode portions 48L1, 48L2, 48R1, and 48R2 are comb-shaped movable electrode fingers 90L1, 90L2, 90R1, and 90R2 that extend in the X-axis direction, and a comb-shaped fixed electrode that extends in the X-axis direction. Fingers 92L1, 92L2, 92R1, and 92R2.

各固定電極指９２Ｌ１，９２Ｌ２，９２Ｒ１，９２Ｒ２は、基板１４上に一体的に固着した配線部９４Ｌ１，９４Ｌ２，９４Ｒ１，９４Ｒ２を介して基板１４上に一体的に固着したパッド部９６Ｌ１，９６Ｌ２，９６Ｒ１，９６Ｒ２に接続されている。パッド部９６Ｌ１，９６Ｌ２，９６Ｒ１，９６Ｒ２の上面には、導電金属（例えばアルミニウム）で形成された電極パッド９８Ｌ１，９８Ｌ２，９８Ｒ１，９８Ｒ２が設けられている。各可動電極指９０Ｌ１，９０Ｌ２，９０Ｒ１，９０Ｒ２は、アーム部５４Ｌ１，５４Ｌ２，５４Ｒ１，５４Ｒ２のＹ軸方向外側に一体的に基板１４から浮かせて延設された複数の突出部及び振動子１６Ｌ，１６Ｒから、基板１４に対して浮かせてＸ軸方向に一体的に延設して形成されている。各可動電極指９０Ｌ１，９０Ｌ２，９０Ｒ１，９０Ｒ２は、固定電極指９２Ｌ１間、９２Ｌ２間、９２Ｒ１間、又は９２Ｒ２間のＸ軸方向へ進入しており、その固定電極指９２Ｌ１，９２Ｌ２，９２Ｒ１，９２Ｒ２にＹ軸方向で隣接して対向しているが、各間のＹ軸方向中央位置よりもＹ軸方向内側にオフセットして設けられている。   The fixed electrode fingers 92L1, 92L2, 92R1, and 92R2 are pad portions 96L1, 96L2, and 96R1 that are integrally fixed to the substrate 14 via wiring portions 94L1, 94L2, 94R1, and 94R2 that are integrally fixed to the substrate 14, respectively. , 96R2. Electrode pads 98L1, 98L2, 98R1, and 98R2 made of a conductive metal (for example, aluminum) are provided on the upper surfaces of the pad portions 96L1, 96L2, 96R1, and 96R2. Each of the movable electrode fingers 90L1, 90L2, 90R1, 90R2 includes a plurality of protrusions and vibrators 16L, 16R that are floated and integrally extended from the substrate 14 on the outer side in the Y-axis direction of the arm portions 54L1, 54L2, 54R1, 54R2. Therefore, it is formed so as to float with respect to the substrate 14 and extend integrally in the X-axis direction. Each movable electrode finger 90L1, 90L2, 90R1, 90R2 enters in the X-axis direction between the fixed electrode fingers 92L1, 92L2, 92R1, or 92R2, and enters the fixed electrode fingers 92L1, 92L2, 92R1, 92R2. Although they are adjacent to each other in the Y-axis direction, they are provided offset inward in the Y-axis direction from the center position in the Y-axis direction between them.

次に、本実施例の力学量検出装置１０におけるＺ軸回りの角速度Ωを検出するための電気回路について説明する。   Next, an electric circuit for detecting the angular velocity Ω around the Z axis in the mechanical quantity detection device 10 of the present embodiment will be described.

本実施例の力学量検出装置１０において、上記した各電極パッド６８，７８，８８，９８にはそれぞれ、各配線を介して制御回路１００が接続されている。この制御回路１００は、駆動電極部４２の電極パッド６８及び駆動モニタ電極部４４の電極パッド７８の双方に接続するセンサ励振駆動部１０２と、検出電極部４６の電極パッド８８に接続する変位検出部１０４と、ダンピング電極部４８の電極パッド９８に接続するダンピング制御部１０６と、を有していると共に、角速度信号処理部１０８を有している。上記した変位検出部１０４は、ダンピング制御部１０６に接続していると共に、角速度信号処理部１０８に接続している。   In the mechanical quantity detection device 10 of the present embodiment, the control circuit 100 is connected to each of the electrode pads 68, 78, 88, 98 through the wirings. The control circuit 100 includes a sensor excitation drive unit 102 connected to both the electrode pad 68 of the drive electrode unit 42 and the electrode pad 78 of the drive monitor electrode unit 44, and a displacement detection unit connected to the electrode pad 88 of the detection electrode unit 46. 104 and a damping control unit 106 connected to the electrode pad 98 of the damping electrode unit 48, and an angular velocity signal processing unit 108. The displacement detection unit 104 described above is connected to the damping control unit 106 and is also connected to the angular velocity signal processing unit 108.

センサ励振駆動部１０２は、振動子１６Ｌ，１６ＲのＸ軸方向への駆動振動を励起させるための励起駆動信号を電極パッド６８を介して駆動電極部４２へ供給すると共に、電極パッド７８を介して駆動モニタ電極部４４から供給される、振動子１６Ｌ，１６ＲのＸ軸方向への駆動振動の状態を示す励起駆動モニタ信号を受信する。変位検出部１０４は、電極パッド８８を介して検出電極部４６から供給される、振動子１６Ｌ，１６ＲのＹ軸方向の各変位に応じた変位信号をそれぞれ受信すると共に、検出した振動子１６Ｌ，１６ＲのＹ軸方向の各変位を示す錘変位信号をそれぞれ角速度信号処理部１０８及びダンピング制御部１０６の双方へ供給する。   The sensor excitation drive unit 102 supplies an excitation drive signal for exciting drive vibration in the X-axis direction of the vibrators 16L and 16R to the drive electrode unit 42 via the electrode pad 68 and also via the electrode pad 78. An excitation drive monitor signal indicating the state of drive vibration in the X-axis direction of the vibrators 16L and 16R supplied from the drive monitor electrode unit 44 is received. The displacement detection unit 104 receives displacement signals corresponding to respective displacements in the Y-axis direction of the transducers 16L and 16R supplied from the detection electrode unit 46 via the electrode pads 88, and also detects the detected transducers 16L and 16L. A weight displacement signal indicating each displacement of 16R in the Y-axis direction is supplied to both the angular velocity signal processing unit 108 and the damping control unit 106, respectively.

角速度信号処理部１０８は、変位検出部１０４から供給される各振動子１６Ｌ，１６Ｒについての錘変位信号をそれぞれ受信する。また、ダンピング制御部１０６は、変位検出部１０４から供給される各振動子１６Ｌ，１６Ｒの錘変位信号をそれぞれ受信すると共に、振動子１６Ｌ，１６ＲのＹ軸方向への検出振動の同相変位成分をダンピングさせるためのダンピング制御駆動信号を電極パッド９８を介してダンピング電極部４８へ供給する。   The angular velocity signal processing unit 108 receives weight displacement signals for the transducers 16L and 16R supplied from the displacement detection unit 104, respectively. In addition, the damping control unit 106 receives the weight displacement signals of the transducers 16L and 16R supplied from the displacement detection unit 104, and outputs the in-phase displacement component of the detected vibration in the Y-axis direction of the transducers 16L and 16R. A damping control drive signal for damping is supplied to the damping electrode unit 48 via the electrode pad 98.

変位検出部１０４は、検出電極部４６側からの変位信号に基づいて振動子１６Ｌ，１６ＲのＹ軸方向の各変位をそれぞれ検出する。また、角速度信号処理部１０８は、振動子１６Ｌと振動子１６ＲとのＹ軸方向の逆相変位成分を取り出す機能、具体的には、変位検出部１０４からの各振動子１６Ｌ，１６Ｒについての錘変位信号が入力される減算器１０８ａを有している。減算器１０８ａは、振動子１６ＬのＹ軸方向変位と振動子１６ＲのＹ軸方向変位との変位差（すなわち変位量の差）を算出してＺ軸回りの角速度Ωの成分を示す角速度成分変位信号を生成する。角速度信号処理部１０８は、角速度成分変位信号に基づいてＺ軸回りの角速度Ωを検出する。   The displacement detection unit 104 detects each displacement of the vibrators 16L and 16R in the Y-axis direction based on a displacement signal from the detection electrode unit 46 side. In addition, the angular velocity signal processing unit 108 has a function of extracting a negative phase displacement component in the Y-axis direction between the transducer 16L and the transducer 16R, specifically, a weight for each transducer 16L, 16R from the displacement detection unit 104. A subtractor 108a to which a displacement signal is input is provided. The subtractor 108a calculates a displacement difference (that is, a difference in displacement amount) between the Y-axis direction displacement of the vibrator 16L and the Y-axis direction displacement of the vibrator 16R, and shows an angular velocity component displacement indicating an angular velocity Ω component around the Z axis. Generate a signal. The angular velocity signal processing unit 108 detects an angular velocity Ω about the Z axis based on the angular velocity component displacement signal.

更に、ダンピング制御部１０６は、変位検出部１０４からの各振動子１６Ｌ，１６Ｒの錘変位信号が入力される加算器１０６ａと、加算器１０６ａの出力が入力される微分回路１０６ｂと、微分回路１０６ｂの出力が入力される駆動回路１０６ｃと、を有している。加算器１０６ａは、振動子１６Ｌと振動子１６ＲとのＹ軸方向の同相変位成分を取り出す機能を発揮するものであり、振動子１６ＬのＹ軸方向変位と振動子１６ＲのＹ軸方向変位との和（すなわち、変位量の加算値）を算出して両振動子１６Ｌ，１６Ｒの双方に加わる慣性力による加速度の成分を示す加速度成分変位信号を生成する。微分回路１０６ｂは、加算器１０６ａの出力である加速度成分変位信号を時間微分して、振動子１６ＬのＹ軸方向変位と振動子１６ＲのＹ軸方向変位との和の時間微分値を算出する。また、駆動回路１０６ｃは、微分回路１０６ｂの出力である上記した和の時間微分値に基づいて、後に詳述する如く、２つの振動子１６Ｌ，１６ＲをＹ軸方向の同相方向へ駆動する上記のダンピング制御駆動信号を生成して、ダンピング電極部４８へ供給する。   Further, the damping control unit 106 includes an adder 106a to which the weight displacement signal of each transducer 16L, 16R from the displacement detection unit 104 is input, a differentiation circuit 106b to which the output of the adder 106a is input, and a differentiation circuit 106b. And a drive circuit 106c to which the output is input. The adder 106a exhibits a function of extracting the in-phase displacement component in the Y-axis direction between the vibrator 16L and the vibrator 16R, and the Y-axis direction displacement of the vibrator 16L and the Y-axis direction displacement of the vibrator 16R. A sum (that is, an addition value of the displacement amount) is calculated to generate an acceleration component displacement signal indicating an acceleration component due to inertial force applied to both the vibrators 16L and 16R. The differentiating circuit 106b time-differentiates the acceleration component displacement signal that is the output of the adder 106a, and calculates the time differential value of the sum of the Y-axis direction displacement of the vibrator 16L and the Y-axis direction displacement of the vibrator 16R. Further, the drive circuit 106c drives the two vibrators 16L and 16R in the in-phase direction of the Y-axis direction, as will be described in detail later, based on the above-described sum time differential value that is the output of the differentiation circuit 106b. A damping control drive signal is generated and supplied to the damping electrode unit 48.

次に、本実施例の力学量検出装置１０の動作について説明する。   Next, operation | movement of the mechanical quantity detection apparatus 10 of a present Example is demonstrated.

本実施例の力学量検出装置１０を搭載する車両などがイグニションオン等により起動されると、以後、制御回路１００のセンサ励振駆動部１０２は、電極パッド６８を介して駆動電極部４２に正弦波や矩形波などの周期的な駆動信号を振動子１６Ｌ，１６ＲのＸ軸方向の共振周波数にて印加する。かかる駆動信号が駆動電極部４２に印加されると、その駆動電極部４２の可動電極指６０と固定電極指６２との間にメインフレーム１８側をＸ軸方向に駆動させる静電気力が発生する。この静電気力は、上記した駆動信号の印加周期に従ってＸ軸方向の一方と他方とに交互に作用する。   When a vehicle or the like equipped with the mechanical quantity detection device 10 of this embodiment is activated by ignition on or the like, thereafter, the sensor excitation drive unit 102 of the control circuit 100 applies a sine wave to the drive electrode unit 42 via the electrode pad 68. A periodic drive signal such as a rectangular wave or the like is applied at the resonance frequency in the X-axis direction of the vibrators 16L and 16R. When such a drive signal is applied to the drive electrode portion 42, an electrostatic force that drives the main frame 18 side in the X-axis direction is generated between the movable electrode finger 60 and the fixed electrode finger 62 of the drive electrode portion 42. This electrostatic force acts alternately on one side and the other side in the X-axis direction according to the drive signal application cycle described above.

かかる静電気力が発生すると、可動電極指６０に連なるメインフレーム１８Ｌ１，１８Ｌ２，１８Ｒ１，１８Ｒ２がその静電気力に応じてＸ軸方向に変位し、その変位が駆動梁２６，２８を介して振動子１６Ｌ，１６Ｒ側に伝達されることで、駆動梁２６，２８の弾性により振動子１６Ｌ，１６Ｒを含む可動部全体がＸ軸方向に駆動振動する。この場合、両振動子１６Ｌ，１６ＲのＸ軸方向の駆動振動は互いに逆相となる。すなわち、振動子１６ＬがＸ軸方向左方に変位するときは、振動子１６Ｒはその振動子１６Ｌとは逆にＸ軸方向右方に変位し、一方、振動子１６ＬがＸ軸方向右方に変位するときは、振動子１６Ｒはその振動子１６Ｌとは逆にＸ軸方向左方に変位する。   When such electrostatic force is generated, the main frames 18L1, 18L2, 18R1, and 18R2 connected to the movable electrode finger 60 are displaced in the X-axis direction according to the electrostatic force, and the displacement is transmitted through the driving beams 26 and 28 to the vibrator 16L. , 16R is transmitted to the entire movable portion including the vibrators 16L, 16R in the X-axis direction due to the elasticity of the drive beams 26, 28. In this case, the drive vibrations in the X-axis direction of both vibrators 16L and 16R are in opposite phases to each other. That is, when the transducer 16L is displaced to the left in the X-axis direction, the transducer 16R is displaced to the right in the X-axis direction opposite to the transducer 16L, while the transducer 16L is displaced to the right in the X-axis direction. When displaced, the vibrator 16R is displaced to the left in the X-axis direction, contrary to the vibrator 16L.

また、この際、センサ励振駆動部１０２は、電極パッド７８を介して駆動モニタ電極部４４から供給される、振動子１６Ｌ，１６ＲのＸ軸方向への駆動振動の状態を示す励起駆動モニタ信号に基づいて、その駆動モニタ電極部４４の櫛歯間の容量変化を検知して、振動子１６Ｌ，１６Ｒの駆動振動の周波数や振幅等をモニタする。そして、そのモニタ結果を、駆動電極部４２に印加する駆動信号にフィードバックする。これにより、駆動電極部４２に印加される駆動信号は調整されることで、振動子１６Ｌ，１６ＲのＸ軸方向の駆動振動は両者間で等しく常に一定振幅となるように行われる。   At this time, the sensor excitation drive unit 102 generates an excitation drive monitor signal indicating the state of drive vibration in the X-axis direction of the transducers 16L and 16R supplied from the drive monitor electrode unit 44 via the electrode pad 78. Based on this, the capacitance change between the comb teeth of the drive monitor electrode unit 44 is detected, and the frequency and amplitude of the drive vibration of the vibrators 16L and 16R are monitored. The monitoring result is fed back to the drive signal applied to the drive electrode unit 42. As a result, the drive signal applied to the drive electrode unit 42 is adjusted, so that the drive vibrations in the X-axis direction of the vibrators 16L and 16R are equal to each other and always have a constant amplitude.

振動子１６Ｌ，１６Ｒが励起されて駆動振動している状態で、Ｚ軸回りに角速度が加わると、その振動子１６Ｌ，１６Ｒに、その質量ｍ、Ｘ軸方向の振動速度Ｖｘ、及び角速度Ωｚに応じたＹ軸方向（検出方向）へのコリオリ力Ｆｃ＝２ｍ・Ｖｘ・Ωｚが作用する。かかるコリオリ力が作用すると、振動子１６Ｌ，１６ＲがＹ軸方向へ変位し、角速度Ωｚの大きさに比例した振幅でかつＸ軸方向への励起駆動振動の周波数に応じた周期で振動する。この場合、コリオリ力による振動子１６Ｌ，１６ＲのＹ軸方向への検出振動は互いに逆相となる。すなわち、振動子１６ＬがＹ軸方向上方に変位するときは、振動子１６Ｒはその振動子１６Ｌとは逆にＹ軸方向下方に変位し、一方、振動子１６ＬがＹ軸方向下方に変位するときは、振動子１６Ｒはその振動子１６Ｌとは逆にＹ軸方向上方に変位する。   When an angular velocity is applied around the Z axis while the vibrators 16L and 16R are excited to vibrate, the mass m, the vibration speed Vx in the X-axis direction, and the angular speed Ωz are applied to the vibrators 16L and 16R. The corresponding Coriolis force Fc = 2m · Vx · Ωz in the Y-axis direction (detection direction) acts. When such a Coriolis force is applied, the vibrators 16L and 16R are displaced in the Y-axis direction, and vibrate with an amplitude proportional to the magnitude of the angular velocity Ωz and with a period corresponding to the frequency of the excitation drive vibration in the X-axis direction. In this case, the detected vibrations in the Y-axis direction of the vibrators 16L and 16R due to the Coriolis force are in opposite phases. That is, when the vibrator 16L is displaced upward in the Y-axis direction, the vibrator 16R is displaced downward in the Y-axis direction, contrary to the vibrator 16L, and on the other hand, when the vibrator 16L is displaced downward in the Y-axis direction. The transducer 16R is displaced upward in the Y-axis direction, contrary to the transducer 16L.

また、上記の如く振動子１６Ｌ，１６ＲがＹ軸方向へ変位すると、その変位に応じて検出用梁２２が弾性変形して、検出電極部４６の可動電極指８０と固定電極指８２との隙間が変化して、両者間の静電容量が変化する。   Further, when the vibrators 16L and 16R are displaced in the Y-axis direction as described above, the detection beam 22 is elastically deformed in accordance with the displacement, and the gap between the movable electrode finger 80 and the fixed electrode finger 82 of the detection electrode portion 46. Changes, and the capacitance between the two changes.

変位検出部１０４は、振動子１６Ｌの検出電極部４６Ｌから供給される、上記の静電容量に応じたすなわち振動子１６ＬのＹ軸方向の変位に応じた変位信号をそれぞれ受信して、その変位信号に基づいて振動子１６ＬのＹ軸方向の変位量を検出すると共に、振動子１６Ｒの検出電極部４６Ｒから供給される、上記の静電容量に応じたすなわち振動子１６ＲのＹ軸方向の変位に応じた変位信号をそれぞれ受信して、その変位信号に基づいて振動子１６ＲのＹ軸方向の変位量を検出する。そして、検出した振動子１６Ｌ，１６ＲのＹ軸方向の各変位量を示す錘変位信号をそれぞれ角速度信号処理部１０８及びダンピング制御部１０６の双方へ供給する。   The displacement detection unit 104 receives a displacement signal supplied from the detection electrode unit 46L of the vibrator 16L according to the capacitance, that is, the displacement signal according to the displacement of the vibrator 16L in the Y-axis direction. Based on the signal, the displacement amount of the vibrator 16L in the Y-axis direction is detected, and the displacement in the Y-axis direction of the vibrator 16R is supplied from the detection electrode portion 46R of the vibrator 16R according to the above-described capacitance. The displacement signal corresponding to each is received, and the displacement amount of the vibrator 16R in the Y-axis direction is detected based on the displacement signal. Then, a weight displacement signal indicating each displacement amount of the detected transducers 16L and 16R in the Y-axis direction is supplied to both the angular velocity signal processing unit 108 and the damping control unit 106, respectively.

角速度信号処理部１０８は、変位検出部１０４から供給される２つの振動子１６Ｌ，１６Ｒについての各錘変位信号に基づいて、減算器１０８ａにて振動子１６ＬのＹ軸方向変位と振動子１６ＲのＹ軸方向変位との変位差を算出して、Ｚ軸回りの角速度Ωの成分を示す角速度成分変位信号を生成し、Ｚ軸回りに生ずる角速度Ωを検出する。   Based on the respective weight displacement signals for the two vibrators 16L and 16R supplied from the displacement detector 104, the angular velocity signal processing unit 108 uses the subtractor 108a to change the Y-axis direction displacement of the vibrator 16L and the vibrator 16R. A displacement difference from the displacement in the Y-axis direction is calculated, an angular velocity component displacement signal indicating a component of the angular velocity Ω around the Z axis is generated, and the angular velocity Ω generated around the Z axis is detected.

このように、本実施例の力学量検出装置１０において、対象物に実際にＺ軸回りに角速度が作用するときは、振動子１６Ｌ，１６Ｒがコリオリ力に伴ってＹ軸方向に互いに逆相（変位方向が逆）で検出振動するので、それらの変位差に基づいてＺ軸回りの角速度を検出することができる。   As described above, in the mechanical quantity detection device 10 of the present embodiment, when the angular velocity actually acts on the object around the Z axis, the vibrators 16L and 16R are opposite in phase to each other in the Y axis direction due to the Coriolis force ( Since the detection vibration occurs when the displacement direction is reversed, the angular velocity around the Z axis can be detected based on the displacement difference between them.

尚、本実施例の力学量検出装置１０は車両や航空機等の対象物に搭載されるため、コリオリ力とは別に例えば加減速に起因する加速度を伴う慣性力（振動外乱）が対象に作用することがある。この慣性力に起因して振動子１６Ｌ，１６ＲがＹ軸方向に検出振動するときは、その振動子１６Ｌ，１６ＲのＹ軸方向への検出振動の成分は互いに同相（変位方向が同じ）となる。また、慣性力に起因して振動子１６Ｌ，１６ＲがＸ軸方向に変位振動するときは、その振動子１６Ｌ，１６ＲのＸ軸方向への駆動振動の成分は互いに同相（変位方向が同じ）となるため、そのＸ軸方向の駆動振動に伴うコリオリ力によって振動子１６Ｌ，１６ＲがＹ軸方向へ検出振動しても、その振動子１６Ｌ，１６ＲのＹ軸方向への検出振動の成分は互いに同相（変位方向が同じ）となる。   In addition, since the mechanical quantity detection device 10 of this embodiment is mounted on an object such as a vehicle or an aircraft, an inertial force (vibration disturbance) accompanied by acceleration caused by acceleration / deceleration, for example, acts on the object separately from the Coriolis force. Sometimes. When the vibrators 16L and 16R vibrate in the Y-axis direction due to this inertial force, the vibration components detected in the Y-axis direction of the vibrators 16L and 16R are in phase with each other (the displacement direction is the same). . Further, when the vibrators 16L and 16R are displaced and vibrated in the X-axis direction due to the inertial force, the components of the drive vibration in the X-axis direction of the vibrators 16L and 16R are in phase with each other (the displacement direction is the same). Therefore, even if the vibrators 16L and 16R detect and vibrate in the Y-axis direction due to the Coriolis force accompanying the drive vibration in the X-axis direction, the components of the detected vibrations in the Y-axis direction of the vibrators 16L and 16R are in phase with each other. (The displacement direction is the same).

この慣性力に起因して振動子１６Ｌ，１６ＲのＹ軸方向への検出振動の成分が互いに同相になるときは、両振動子１６Ｌ，１６Ｒ間に変位位置の差は生じない。このため、上記の如く制御回路１００の処理によれば、振動子１６Ｌ，１６ＲのＹ軸方向の同相変位成分は打ち消されて、その同相変位成分による角速度成分はゼロとなる。従って、本実施例の力学量検出装置１０によれば、Ｚ軸回りの角速度検出への慣性力による影響を排除してその角速度の誤検出を極力防止し、これにより、その角速度を精度よく検出することが可能となっている。   When the detected vibration components in the Y-axis direction of the vibrators 16L and 16R are in phase with each other due to this inertial force, there is no difference in displacement position between the vibrators 16L and 16R. Therefore, according to the processing of the control circuit 100 as described above, the in-phase displacement component in the Y-axis direction of the vibrators 16L and 16R is canceled, and the angular velocity component due to the in-phase displacement component becomes zero. Therefore, according to the mechanical quantity detection device 10 of the present embodiment, the influence of the inertial force on the angular velocity detection around the Z axis is eliminated, and erroneous detection of the angular velocity is prevented as much as possible, thereby accurately detecting the angular velocity. It is possible to do.

図４は、一対の振動子１６Ｌ，１６Ｒの加工公差等に起因する音叉振動型センサ１２の誤出力を説明するための図を示す。ところで、角速度が作用する際は、一方の振動子１６Ｌについての錘変位成分Ａ１と、同タイミングにおける他方の振動子１６Ｒの錘変位成分Ａ２とが逆相となる（図４（Ａ））。一方、音叉振動型センサ１２の有する素子の加工バラツキ等に起因して、２つの振動子１６Ｌ，１６Ｒの間で質量やバネ特性，変位検出能力に差が生じることがある。かかる事態が生じていると、外乱振動等の慣性力が作用することによって２つの振動子１６Ｌ，１６ＲがＹ軸方向に同相変位した際に、それらの振動子１６Ｌ，１６ＲのＹ軸方向への検出振動成分（センサ出力）に逆相成分が現れる（図４（Ｂ））。このため、上記の如きＺ軸回りの角速度の検出を単に各振動子１６Ｌ，１６ＲのＹ軸方向の変位の差に基づいて行うこととすると、角速度が作用することなく慣性力のみが作用しただけであるときにも、角速度が生じたものと判断されることが起こり得、角速度の誤検出を招くこととなってしまう。   FIG. 4 is a diagram for explaining an erroneous output of the tuning fork vibration type sensor 12 due to a processing tolerance or the like of the pair of vibrators 16L and 16R. By the way, when the angular velocity acts, the weight displacement component A1 of one vibrator 16L and the weight displacement component A2 of the other vibrator 16R at the same timing are in opposite phases (FIG. 4A). On the other hand, due to processing variations of elements included in the tuning fork vibration type sensor 12, there may be a difference in mass, spring characteristics, and displacement detection capability between the two vibrators 16L and 16R. When such a situation occurs, when two vibrators 16L and 16R are displaced in the same direction in the Y-axis direction due to the action of an inertial force such as disturbance vibration, the vibrators 16L and 16R move in the Y-axis direction. A reverse phase component appears in the detected vibration component (sensor output) (FIG. 4B). For this reason, if the angular velocity around the Z-axis as described above is detected simply based on the difference in displacement in the Y-axis direction of the vibrators 16L and 16R, only the inertial force is applied without the angular velocity acting. Even in such a case, it may be determined that an angular velocity has occurred, resulting in erroneous detection of the angular velocity.

そこで、このような一対の振動子１６Ｌ，１６Ｒ間のバラツキ等に起因する角速度の誤検出を防止すべく、外部からの慣性力を吸収して音叉振動型センサ１２をその慣性力が作用し難くなるように防振ゴムなどを介して車体や機体の外部基板に取り付けることが考えられる。しかしながら、このような構成では、角速度検出を行うための部品点数が増大して、センサ規模の大型化や製造工程の複雑化，製造コストの上昇などの不都合が生じてしまう。   Therefore, in order to prevent erroneous detection of the angular velocity due to such a variation between the pair of vibrators 16L and 16R, the inertial force from the outside is absorbed and the inertial force hardly acts on the tuning fork vibration type sensor 12. It can be considered to be attached to the external substrate of the vehicle body or the aircraft body via a vibration-proof rubber or the like. However, in such a configuration, the number of parts for detecting the angular velocity increases, resulting in inconveniences such as an increase in sensor scale, a complicated manufacturing process, and an increase in manufacturing cost.

これに対して、本実施例においては、上記の如く、音叉振動型センサ１２が、基板１４上に、振動子１６Ｌ，１６Ｒの基板１４に対するＹ軸方向の同相変位をダンピングさせるためのダンピング電極部４８を有し、力学量検出装置１０が、そのダンピング電極部４８に接続するダンピング制御部１０６を有している。   In contrast, in the present embodiment, as described above, the tuning fork vibration type sensor 12 causes the damping electrode portion for damping the in-phase displacement in the Y-axis direction of the vibrators 16L and 16R with respect to the substrate 14 on the substrate 14. The mechanical quantity detection device 10 includes a damping control unit 106 connected to the damping electrode unit 48.

ダンピング制御部１０６は、まず、加算器１０６ａにて、変位検出部１０４から供給される２つの振動子１６Ｌ，１６Ｒについての各錘変位信号に基づいて、振動子１６ＬのＹ軸方向変位と振動子１６ＲのＹ軸方向変位との和を算出する。次に、微分回路１０６ｂにて、その算出した和に基づいてその和を時間微分することによりその時間微分値を算出し、そして、駆動回路１０６ｃにて、その算出した時間微分値に基づいて、２つの振動子１６Ｌ，１６ＲをＹ軸方向の同相方向へ駆動してその同相変位成分をダンピングさせるためのダンピング制御駆動信号を生成して、振動子１６Ｌ，１６Ｒ側それぞれのダンピング電極部４８へ供給する。   First, the damping control unit 106 uses the adder 106a to determine the displacement in the Y-axis direction of the transducer 16L and the transducer based on the weight displacement signals for the two transducers 16L and 16R supplied from the displacement detection unit 104. The sum of the displacement of 16R in the Y-axis direction is calculated. Next, the differential circuit 106b calculates the time differential value by time-differentiating the sum based on the calculated sum, and the drive circuit 106c calculates the time differential value based on the calculated time differential value. The two vibrators 16L and 16R are driven in the in-phase direction in the Y-axis direction to generate a damping control drive signal for damping the in-phase displacement component, and supplied to the damping electrode portions 48 on the vibrators 16L and 16R sides. To do.

ダインピング電極部４８にかかるダンピング制御駆動信号が印加されると、そのダンピング電極部４８の可動電極指９０と固定電極指９２との間に振動子１６Ｌ，１６ＲをＹ軸方向に駆動させる静電気力が発生する。かかる静電気力が発生すると、可動電極指９０に連なる振動子１６Ｌ，１６Ｒがその静電気力に応じてＹ軸方向に変位する。この際、その静電気力による両振動子１６Ｌ，１６ＲのＹ軸方向の変位は、同相変位成分がキャンセルされるように行われる。   When the damping control drive signal applied to the dyneping electrode portion 48 is applied, an electrostatic force that drives the vibrators 16L and 16R in the Y-axis direction between the movable electrode finger 90 and the fixed electrode finger 92 of the damping electrode portion 48 is generated. appear. When such an electrostatic force is generated, the vibrators 16L and 16R connected to the movable electrode finger 90 are displaced in the Y-axis direction according to the electrostatic force. At this time, the displacement in the Y-axis direction of both vibrators 16L and 16R due to the electrostatic force is performed so that the in-phase displacement component is canceled.

すなわち、本実施例において、両振動子１６Ｌ，１６ＲのＹ軸方向の運動方程式は、次式（１）及び（２）により表される。尚、ｍは振動子１６の質量を、Ｄはダンピング定数を、ｋは検出用梁２２のバネ定数を、Ｆｃはコリオリ力を、ｙは振動子１６の変位を、それぞれ示すと共に、ＤＥは２つの振動子１６の変位の和の微分値を各振動子１６をＹ軸方向に駆動する力へ変換するための変換係数としてのダンピング定数（以下、電気ダンピング定数と称す）である。また、添字１，２は、２つの振動子１６Ｌ，１６Ｒを表す。 That is, in this embodiment, the equations of motion in the Y-axis direction of both the vibrators 16L and 16R are expressed by the following expressions (1) and (2). Here, m represents the mass of the transducer 16, D represents the damping constant, k represents the spring constant of the detection beam 22, Fc represents the Coriolis force, y represents the displacement of the transducer 16, and DE represents This is a damping constant (hereinafter referred to as an electrical damping constant) as a conversion coefficient for converting the differential value of the sum of the displacements of the two vibrators 16 into a force for driving each vibrator 16 in the Y-axis direction. Subscripts 1 and 2 represent the two vibrators 16L and 16R.

Figure 0005018337
Figure 0005018337

図５（Ａ）は振動子１６Ｌ，１６ＲがＹ軸方向に互いに逆相で検出振動する逆相振動モード時における周波数とゲインとの関係を表す振動特性を、また、図５（Ｂ）は振動子１６Ｌ，１６ＲがＹ軸方向に互いに同相で変位振動する同相振動モード時における振動特性を、それぞれ示す。また、図６は、本実施例の力学量検出装置１０による効果を説明するための図を示す。尚、図６には、逆相振動モード時における振動特性と同相振動モード時における振動特性とを比較した図を示す。   FIG. 5A shows vibration characteristics representing the relationship between frequency and gain in the negative phase vibration mode in which the vibrators 16L and 16R detect and vibrate in mutually opposite phases in the Y-axis direction, and FIG. The vibration characteristics in the in-phase vibration mode in which the sub-elements 16L and 16R are displaced in the same phase in the Y-axis direction are shown. Moreover, FIG. 6 shows the figure for demonstrating the effect by the mechanical quantity detection apparatus 10 of a present Example. FIG. 6 shows a diagram comparing the vibration characteristics in the anti-phase vibration mode and the vibration characteristics in the in-phase vibration mode.

本実施例の構成において、対象物のＺ軸回りに角速度が生じているときすなわち振動子１６Ｌ，１６ＲがＹ軸方向に互いに逆相で検出振動しているときは、それら２つの振動子１６Ｌ，１６ＲのＹ軸方向変位の和が略ゼロとなり、その微分値も略ゼロとなるので、上記（１）式及び（２）式における電気ダンピング定数ＤＥの項は共に略ゼロとなる。この場合には、ダンピング制御部１０６からダンピング電極部４８へ印加するダンピング制御駆動信号が、振動子１６Ｌ，１６ＲをＹ軸方向へ駆動させるものでなくなるので、ダンピング電極部４８において振動子１６Ｌ，１６ＲをＹ軸方向へ変位駆動させる静電気力はほとんど発生せず、その結果として、２つの振動子１６Ｌ，１６ＲのＹ軸方向の変位はそれぞれ角速度の大きさに応じた振幅となる。 In the configuration of the present embodiment, when an angular velocity is generated around the Z axis of the object, that is, when the vibrators 16L and 16R are detecting and vibrating in opposite phases to each other in the Y axis direction, the two vibrators 16L and 16L, Since the sum of the displacements in the Y-axis direction of 16R is substantially zero and the differential value thereof is also substantially zero, the terms of the electric damping constant DE in the above equations (1) and (2) are both substantially zero. In this case, the damping control drive signal applied from the damping control unit 106 to the damping electrode unit 48 does not drive the transducers 16L and 16R in the Y-axis direction. As a result, the displacement of the two vibrators 16L and 16R in the Y-axis direction has an amplitude corresponding to the magnitude of the angular velocity.

従って、本実施例の力学量検出装置１０においては、振動子１６Ｌ，１６ＲがＹ軸方向に互いに逆相で検出振動する逆相振動モード時、振動子１６Ｌ，１６Ｒの逆相検出振動に対するダンピング作用がほとんどなく、２つの振動子１６Ｌ，１６Ｒの振動特性が、ダンピング電極部４８やダンピング制御部１０６が全く存在しない力学量検出装置（すなわち電気ダンピング無し）におけるものと略同じになる（図５（Ａ））。   Therefore, in the mechanical quantity detection device 10 of the present embodiment, when the vibrators 16L and 16R are in the anti-phase vibration mode in which the vibrators 16L and 16R are detected and vibrated in opposite phases to each other, the damping action for the anti-phase vibrations of the vibrators 16L and 16R is performed. The vibration characteristics of the two vibrators 16L and 16R are substantially the same as those in a mechanical quantity detection device (that is, no electrical damping) in which the damping electrode section 48 and the damping control section 106 are not present (FIG. 5 ( A)).

一方、対象物にＹ軸方向への慣性力による加速が生じているときすなわち振動子１６Ｌ，１６ＲがＹ軸方向に互いに同相で変位しているときは、それら２つの振動子１６Ｌ，１６ＲのＹ軸方向変位の和（の絶対値）がゼロを基準にして大きな値になり、その微分値（の絶対値）もゼロを基準にして大きくなる。この場合には、ダンピング制御部１０６からダンピング電極部４８へ印加するダンピング制御駆動信号が、振動子１６Ｌ，１６ＲをＹ軸方向のその変位を妨げる方向へ駆動させるものとなるので、各ダンピング電極部４８において振動子１６Ｌ，１６ＲをＹ軸方向のその変位を妨げる方向へ変位駆動させる静電気力が発生し、その結果として、２つの振動子１６Ｌ，１６ＲのＹ軸方向の変位は共に抑えられる。   On the other hand, when acceleration due to an inertial force in the Y-axis direction occurs in the object, that is, when the vibrators 16L and 16R are displaced in phase with each other in the Y-axis direction, the Y of the two vibrators 16L and 16R The sum of the axial displacements (the absolute value thereof) becomes a large value with reference to zero, and the differential value (the absolute value thereof) also becomes large with reference to zero. In this case, the damping control drive signal applied from the damping control unit 106 to the damping electrode unit 48 drives the vibrators 16L and 16R in a direction that prevents the displacement in the Y-axis direction. An electrostatic force is generated in 48 to drive the vibrators 16L and 16R in a direction that prevents the displacement in the Y-axis direction. As a result, the displacement of the two vibrators 16L and 16R in the Y-axis direction is suppressed.

従って、本実施例の力学量検出装置１０においては、振動子１６Ｌ，１６ＲがＹ軸方向に互いに同相で変位振動する同相振動モード時、振動子１６Ｌ，１６Ｒの同相変位振動に対するダンピング作用が発揮されるものとなり、振動子１６Ｌ，１６ＲのＹ軸方向の振動検出のための共振のＱ値が下がり、２つの振動子１６Ｌ，１６Ｒの振動特性が、ダンピング電極部４８やダンピング制御部１０６が全く存在しない力学量検出装置（すなわち電気ダンピング無し）におけるものと異なるものになる（図５（Ｂ））。   Therefore, in the mechanical quantity detection device 10 of the present embodiment, the damping action for the in-phase displacement vibration of the vibrators 16L and 16R is exhibited in the common-mode vibration mode in which the vibrators 16L and 16R are displaced in the Y-phase in the same phase. The resonance Q value for detecting vibrations in the Y-axis direction of the vibrators 16L and 16R is lowered, and the vibration characteristics of the two vibrators 16L and 16R are completely present in the damping electrode part 48 and the damping control part 106. This is different from that in the mechanical quantity detection device that does not perform (that is, there is no electrical damping) (FIG. 5B).

このように、本実施例の力学量検出装置１０によれば、コリオリ力により振動子１６Ｌ，１６ＲをＹ軸方向に互い逆相で変位させるための振動特性と、外乱振動などの慣性力により振動子１６Ｌ，１６ＲをＹ軸方向に互い同相で変位させるための振動特性と、を異ならせること（図６参照）ができるので、Ｚ軸回りの角速度を検出する検出特性を変えることなくすなわちコリオリ力による２つの振動子１６Ｌ，１６ＲのＹ軸方向への逆相変位を抑えることなく（すなわちセンサ感度を損なうことなく）、振動外乱などの慣性力による２つの振動子１６Ｌ，１６ＲのＹ軸方向への同相変位を抑えることが可能となる。   As described above, according to the mechanical quantity detection device 10 of the present embodiment, the vibration characteristics for displacing the vibrators 16L and 16R in the Y-axis direction in mutually opposite phases by the Coriolis force and the vibration by the inertial force such as disturbance vibration are used. Since the vibration characteristics for displacing the elements 16L and 16R in the Y-axis direction in phase with each other can be made different (see FIG. 6), the Coriolis force can be obtained without changing the detection characteristics for detecting the angular velocity around the Z-axis. Without suppressing the negative phase displacement of the two vibrators 16L and 16R in the Y-axis direction (ie, without impairing the sensor sensitivity), the two vibrators 16L and 16R in the Y-axis direction due to inertial forces such as vibration disturbances. It is possible to suppress the in-phase displacement of.

この点、本実施例においては、音叉振動型センサ１２のセンサ素子を構成する振動子１６Ｌ，１６Ｒの質量や検出用梁２２のバネ特性，各種電極部の寸法等に、振動子１６Ｌ側と振動子１６Ｒ側との間で製造工程等での加工バラツキ差が存在する状況でも、慣性力入力時に、２つの振動子１６Ｌ，１６ＲのＹ軸方向変位に上記の加工バラツキ差に起因したその慣性力による逆相変位成分（コリオリ力による変位と等価な誤差変位成分）が現れ難く、慣性力による２つの振動子１６Ｌ，１６Ｒ間のＹ軸方向における変位差が抑えられる。従って、本実施例の力学量検出装置１０によれば、Ｚ軸回りの角速度の検出に際し外乱等の慣性力による影響を排除することができるので、音叉振動型センサ１２の誤出力及びＺ軸回りの角速度の誤検出を防止することができ、振動子１６Ｌ，１６ＲのＹ軸方向の変位差に基づくＺ軸回りの角速度の検出を精度よく実現することが可能となっている。   In this respect, in the present embodiment, the vibration of the vibrator 16L side and the vibration of the vibrator 16L, 16R constituting the sensor element of the tuning fork vibration type sensor 12, the spring characteristics of the detection beam 22, the dimensions of various electrode portions, and the like. Even in a situation where there is a machining variation difference in the manufacturing process or the like with respect to the child 16R side, when the inertial force is input, the inertial force due to the machining variation difference in the Y-axis direction displacement of the two vibrators 16L and 16R. The negative phase displacement component due to (an error displacement component equivalent to the displacement due to the Coriolis force) hardly appears, and the displacement difference in the Y-axis direction between the two vibrators 16L and 16R due to the inertial force is suppressed. Therefore, according to the mechanical quantity detection device 10 of the present embodiment, it is possible to eliminate the influence of the inertia force such as disturbance when detecting the angular velocity around the Z axis. The angular velocity around the Z-axis can be accurately detected based on the displacement difference in the Y-axis direction between the vibrators 16L and 16R.

このため、本実施例の構成によれば、音叉振動型センサ１２と車体や機体の外部基板との間に、それらの振動子１６Ｌ，１６Ｒ間のバラツキを吸収して角速度の誤検出を防止するための防振ゴム等を介在させることは不要となるので、従って、角速度の誤検出を防止する機能を確保しつつ、その角速度を精度よく検出するために必要なゴム部材を削減して、センサ規模や装置規模の小型化や製造工程の簡素化，製造コストの低減などを図ることが可能となっている。   For this reason, according to the configuration of the present embodiment, the variation between the vibrators 16L and 16R is absorbed between the tuning fork vibration type sensor 12 and the external substrate of the vehicle body or the airframe to prevent erroneous detection of angular velocity. Therefore, it is not necessary to intervene an anti-vibration rubber or the like for this purpose. Therefore, while securing a function to prevent erroneous detection of angular velocity, the number of rubber members necessary for accurately detecting the angular velocity is reduced, and the sensor It is possible to reduce the scale and equipment size, simplify the manufacturing process, and reduce manufacturing costs.

尚、上記の第１実施例においては、Ｚ軸回りの角速度が特許請求の範囲に記載した「所定の力学量」に、振動子１６Ｌ，１６Ｒが特許請求の範囲に記載した「錘」に、Ｘ軸方向（駆動方向）が特許請求の範囲に記載した「所定の第１方向」に、Ｙ軸方向（検出方向）が特許請求の範囲に記載した「検出方向」及び「所定の第２方向」に、Ｚ軸が特許請求の範囲に記載した「所定軸」に、それぞれ相当している。   In the first embodiment, the angular velocity around the Z axis is the “predetermined mechanical quantity” described in the claims, and the vibrators 16L and 16R are the “weight” described in the claims. The X-axis direction (driving direction) is “predetermined first direction” described in the claims, and the Y-axis direction (detection direction) is “detection direction” and “predetermined second direction” described in the claims. The Z axis corresponds to the “predetermined axis” recited in the claims.

また、上記の第１実施例においては、角速度信号処理部１０８がＺ軸回りの角速度Ωを検出することにより特許請求の範囲に記載した「検出手段」が、ダンピング制御部１０６の加算器１０６ａが２つの振動子１６Ｌ，１６ＲのＹ軸方向における同相変位成分の和を算出しかつ微分回路１０６ｂがその和の時間微分値を算出することにより特許請求の範囲に記載した「算出手段」及び「算出ステップ」が、駆動回路１０６ｃが微分回路１０６ｂの算出した値に基づいて２つの振動子１６Ｌ，１６ＲのＹ軸方向の同相方向へ駆動させるダンピング制御駆動信号をダンピング電極部４８に印加することにより特許請求の範囲に記載した「ダンピング制御手段」及び「ダンピング制御ステップ」が、それぞれ実現されている。   In the first embodiment described above, the angular velocity signal processing unit 108 detects the angular velocity Ω about the Z axis, and the “detection means” described in the scope of claims is added to the adder 106 a of the damping control unit 106. The sum of the in-phase displacement components in the Y-axis direction of the two vibrators 16L and 16R is calculated, and the differentiating circuit 106b calculates the time differential value of the sum, thereby calculating “calculation means” and “calculation” "Step" is applied by applying a damping control drive signal to the damping electrode unit 48 that causes the drive circuit 106c to drive the two vibrators 16L and 16R in the same phase direction in the Y-axis direction based on the value calculated by the differentiation circuit 106b. The “damping control means” and the “damping control step” described in the claims are each realized.

上記した第１実施例では、変位検出部１０４から供給される各振動子１６Ｌ，１６Ｒの錘変位信号をそれぞれ受信しかつダンピング電極部４８の電極パッド９８に接続するダンピング制御部１０６を設け、そのダンピング制御部１０６に、まず、加算器１０６ａにて変位検出部１０４からの錘変位信号である２つの振動子１６Ｌ，１６ＲのＹ軸方向変位を加算させて、その後に、微分回路１０６ｂにてその加算値を時間微分させることとしている。   In the first embodiment described above, the damping control unit 106 that receives the weight displacement signals of the transducers 16L and 16R supplied from the displacement detection unit 104 and connects to the electrode pad 98 of the damping electrode unit 48 is provided. First, the damping control unit 106 adds the displacements in the Y-axis direction of the two vibrators 16L and 16R, which are weight displacement signals from the displacement detection unit 104, by the adder 106a. The addition value is time-differentiated.

これに対して、本発明の第２実施例においては、変位検出部１０４からの錘変位信号である２つの振動子１６Ｌ，１６Ｒの各Ｙ軸方向変位をそれぞれ時間微分し、その後に、両時間微分値を加算することとしている。   On the other hand, in the second embodiment of the present invention, each Y-axis direction displacement of the two vibrators 16L and 16R, which is a weight displacement signal from the displacement detection unit 104, is time-differentiated, and thereafter both times The differential value is added.

図７は、本実施例の力学量検出装置２００の電気的なブロック構成図を示す。尚、図７において、上記図２に示す部分と同一の構成部分については、同一の符号を付してその説明を省略又は簡略する。   FIG. 7 shows an electrical block configuration diagram of the mechanical quantity detection device 200 of the present embodiment. In FIG. 7, the same components as those shown in FIG. 2 are designated by the same reference numerals, and the description thereof is omitted or simplified.

すなわち、本実施例の力学量検出装置２００において、各電極パッド６８，７８，８８，９８にはそれぞれ、各配線を介して制御回路２０２が接続されている。制御回路２０２は、センサ励振駆動部１０２と、変位検出部１０４と、角速度信号処理部１０８と、ダンピング電極部４８の電極パッド９８に接続するダンピング制御部２０４と、を有している。変位検出部１０４は、角速度信号処理部１０８に接続していると共に、ダンピング制御部２０４に接続している。変位検出部１０４の出力（各錘変位信号）は、角速度信号処理部１０８と共にダンピング制御部２０４へ供給される。   That is, in the mechanical quantity detection device 200 of the present embodiment, the control circuit 202 is connected to each electrode pad 68, 78, 88, 98 via each wiring. The control circuit 202 includes a sensor excitation drive unit 102, a displacement detection unit 104, an angular velocity signal processing unit 108, and a damping control unit 204 connected to the electrode pad 98 of the damping electrode unit 48. The displacement detection unit 104 is connected to the angular velocity signal processing unit 108 and to the damping control unit 204. The output (each weight displacement signal) of the displacement detection unit 104 is supplied to the damping control unit 204 together with the angular velocity signal processing unit 108.

ダンピング制御部２０４は、変位検出部１０４から供給される各振動子１６Ｌ，１６Ｒの錘変位信号をそれぞれ受信すると共に、振動子１６Ｌ，１６ＲのＹ軸方向への検出振動の同相変位成分をダンピングさせるためのダンピング制御駆動信号を電極パッド９８を介してダンピング電極部４８へ供給する。   The damping control unit 204 receives the weight displacement signals of the vibrators 16L and 16R supplied from the displacement detection unit 104, and damps the in-phase displacement component of the detected vibration in the Y-axis direction of the vibrators 16L and 16R. A damping control drive signal is supplied to the damping electrode unit 48 through the electrode pad 98.

ダンピング制御部２０４は、変位検出部１０４からの一方の振動子１６Ｌの錘変位信号が入力される微分回路２０４ａと、変位検出部１０４からの他方の振動子１６Ｒの錘変位信号が入力される微分回路２０４ｂと、微分回路２０４ａの出力及び微分回路２０４ｂの出力が共に入力される加算器２０４ｃと、加算器２０４ｃの出力が入力される駆動回路２０４ｄと、を有している。   The damping control unit 204 receives the weight displacement signal of one transducer 16L from the displacement detection unit 104 and the differentiation circuit 204a receives the weight displacement signal of the other transducer 16R from the displacement detection unit 104. The circuit 204b includes an adder 204c to which both the output of the differentiation circuit 204a and the output of the differentiation circuit 204b are input, and a drive circuit 204d to which the output of the adder 204c is input.

微分回路２０４ａは、振動子１６ＬのＹ軸方向変位を時間微分して、その時間微分値を算出する。微分回路２０４ｂは、振動子１６ＲのＹ軸方向変位を時間微分して、その時間微分値を算出する。加算器２０４ｃは、微分回路２０４ａの出力と微分回路２０４ｂの出力との和を算出して両振動子１６Ｌ，１６Ｒの双方に加わる慣性力による加速度の成分を示す加速度成分信号を生成する。また、駆動回路２０４ｄは、加算器２０４ｃの出力である上記した２つの振動子１６Ｌ，１６Ｒの各Ｙ軸方向変位の時間微分値の和に基づいて、後に詳述する如く、２つの振動子１６Ｌ，１６ＲをＹ軸方向の同相方向へ駆動する上記のダンピング制御駆動信号を生成して、ダンピング電極部４８へ供給する。   The differentiating circuit 204a time-differentiates the displacement in the Y-axis direction of the vibrator 16L and calculates the time differential value. The differentiating circuit 204b time-differentiates the displacement in the Y-axis direction of the vibrator 16R and calculates the time differential value. The adder 204c calculates the sum of the output of the differentiating circuit 204a and the output of the differentiating circuit 204b, and generates an acceleration component signal indicating an acceleration component due to the inertial force applied to both the vibrators 16L and 16R. Further, the drive circuit 204d, based on the sum of the time differential values of the displacements in the Y-axis direction of the two vibrators 16L and 16R described above, which is the output of the adder 204c, as described in detail later, , 16R is generated in the in-phase direction of the Y-axis direction, and the above-described damping control drive signal is generated and supplied to the damping electrode unit 48.

すなわち、本実施例において、ダンピング制御部２０４は、まず、微分回路２０４ａ，２０４ｂにて、変位検出部１０４から供給される２つの振動子１６Ｌ，１６Ｒについての各錘変位信号に基づいて、振動子１６ＬのＹ軸方向変位及び振動子１６ＲのＹ軸方向変位をそれぞれ時間微分することにより各時間微分値を算出する。次に、加算器２０４ｃにて、その算出した各時間微分値に基づいてその和を算出し、そして、駆動回路２０４ｄにて、その算出した和に基づいて、２つの振動子１６Ｌ，１６ＲをＹ軸方向の同相方向へ駆動してその同相変位成分をダンピングさせるためのダンピング制御駆動信号を生成して、振動子１６Ｌ，１６Ｒ側それぞれのダンピング電極部４８へ供給する。   That is, in the present embodiment, the damping control unit 204 first determines the transducers based on the respective weight displacement signals for the two transducers 16L and 16R supplied from the displacement detection unit 104 by the differentiating circuits 204a and 204b. Each time differential value is calculated by differentiating the 16L displacement in the Y-axis direction and the displacement in the Y-axis direction of the vibrator 16R with respect to time. Next, the adder 204c calculates the sum based on the calculated time differential values, and the drive circuit 204d converts the two vibrators 16L and 16R to Y based on the calculated sum. A damping control drive signal for driving in the axial in-phase direction to damp the in-phase displacement component is generated and supplied to the damping electrode portions 48 on the vibrators 16L and 16R sides.

ダインピング電極部４８にかかるダンピング制御駆動信号が印加されると、上記した第１実施例と同様に、そのダンピング電極部４８の可動電極指９０と固定電極指９２との間に振動子１６Ｌ，１６ＲをＹ軸方向に駆動させる静電気力が発生する。かかる静電気力が発生すると、可動電極指９０に連なる振動子１６Ｌ，１６Ｒがその静電気力に応じてＹ軸方向に変位する。この際、その静電気力による両振動子１６Ｌ，１６ＲのＹ軸方向の変位は、同相変位成分がキャンセルされるように行われる。   When the damping control drive signal applied to the dyneping electrode portion 48 is applied, the vibrators 16L and 16R are interposed between the movable electrode finger 90 and the fixed electrode finger 92 of the damping electrode portion 48, as in the first embodiment. An electrostatic force that drives the Y in the Y-axis direction is generated. When such an electrostatic force is generated, the vibrators 16L and 16R connected to the movable electrode finger 90 are displaced in the Y-axis direction according to the electrostatic force. At this time, the displacement in the Y-axis direction of both vibrators 16L and 16R due to the electrostatic force is performed so that the in-phase displacement component is canceled.

従って、本実施例の力学量検出装置２００においては、上記した第１実施例の力学量検出装置１０と同様に、振動子１６Ｌ，１６ＲがＹ軸方向に互いに逆相で検出振動する逆相振動モード時、振動子１６Ｌ，１６Ｒの逆相検出振動に対するダンピング作用がほとんどなく、２つの振動子１６Ｌ，１６Ｒの振動特性が、ダンピング電極部４８やダンピング制御部２０４が全く存在しない力学量検出装置（すなわち電気ダンピング無し）におけるものと略同じになると共に、振動子１６Ｌ，１６ＲがＹ軸方向に互いに同相で変位振動する同相振動モード時、振動子１６Ｌ，１６Ｒの同相変位振動に対するダンピング作用が発揮されるものとなり、振動子１６Ｌ，１６ＲのＹ軸方向の振動検出のための共振のＱ値が下がり、２つの振動子１６Ｌ，１６Ｒの振動特性が、ダンピング電極部４８やダンピング制御部２０４が全く存在しない力学量検出装置（すなわち電気ダンピング無し）におけるものと異なるものになる。   Accordingly, in the mechanical quantity detection device 200 of the present embodiment, as in the mechanical quantity detection device 10 of the first embodiment described above, the anti-vibration in which the vibrators 16L and 16R detect and vibrate in the opposite phases in the Y-axis direction. In the mode, there is almost no damping action for the anti-phase detection vibration of the vibrators 16L and 16R, and the vibration characteristic of the two vibrators 16L and 16R is a mechanical quantity detection device in which the damping electrode section 48 and the damping control section 204 do not exist at all ( In other words, in the same-phase vibration mode in which the vibrators 16L and 16R are displaced in the same phase in the Y-axis direction, the damping action for the common-mode displacement vibrations of the vibrators 16L and 16R is exhibited. The resonance Q value for detecting vibrations in the Y-axis direction of the vibrators 16L and 16R decreases, and the two vibrators 16L and 1 Vibration characteristics of R becomes what different from the physical quantity detection device damping the electrode portion 48 and the damping control unit 204 does not exist at all (i.e. no electrical damping).

このように、本実施例の力学量検出装置２００によれば、コリオリ力により振動子１６Ｌ，１６ＲをＹ軸方向に互い逆相で変位させるための振動特性と、外乱振動などの慣性力により振動子１６Ｌ，１６ＲをＹ軸方向に互い同相で変位させるための振動特性と、を異ならせること（図６参照）ができるので、Ｚ軸回りの角速度を検出する検出特性を変えることなくすなわちコリオリ力による２つの振動子１６Ｌ，１６ＲのＹ軸方向への逆相変位を抑えることなく（すなわちセンサ感度を損なうことなく）、振動外乱などの慣性力による２つの振動子１６Ｌ，１６ＲのＹ軸方向への同相変位を抑えることが可能となる。従って、本実施例の力学量検出装置２００によれば、上記した第１実施例と同様の効果を得ることが可能となっている。   As described above, according to the mechanical quantity detection device 200 of the present embodiment, the vibration characteristics for displacing the vibrators 16L and 16R in the Y-axis direction in mutually opposite phases by the Coriolis force, and the vibration by the inertial force such as disturbance vibration. Since the vibration characteristics for displacing the elements 16L and 16R in the Y-axis direction in phase with each other can be made different (see FIG. 6), the Coriolis force can be obtained without changing the detection characteristics for detecting the angular velocity around the Z-axis. Without suppressing the negative phase displacement of the two vibrators 16L and 16R in the Y-axis direction (ie, without impairing the sensor sensitivity), the two vibrators 16L and 16R in the Y-axis direction due to inertial forces such as vibration disturbances. It is possible to suppress the in-phase displacement of. Therefore, according to the mechanical quantity detection device 200 of the present embodiment, it is possible to obtain the same effect as that of the first embodiment described above.

尚、上記の第２実施例においては、ダンピング制御部２０４の微分回路２０４ａ，２０４ｂが２つの振動子１６Ｌ，１６ＲのＹ軸方向における同相変位成分の各時間微分値を算出しかつ加算器２０４ｃがその時間微分値の和を算出することにより特許請求の範囲に記載した「算出手段」及び「算出ステップ」が、駆動回路２０４ｄが加算器２０４ｃの算出した値に基づいて２つの振動子１６Ｌ，１６ＲのＹ軸方向の同相方向へ駆動させるダンピング制御駆動信号をダンピング電極部４８に印加することにより特許請求の範囲に記載した「ダンピング制御手段」及び「ダンピング制御ステップ」が、それぞれ実現されている。   In the second embodiment, the differentiating circuits 204a and 204b of the damping control unit 204 calculate the time differential values of the in-phase displacement components in the Y-axis direction of the two vibrators 16L and 16R, and the adder 204c By calculating the sum of the time differential values, the “calculation means” and “calculation step” described in the claims can be performed by the drive circuit 204d based on the values calculated by the adder 204c. By applying a damping control drive signal for driving in the Y-axis direction in-phase direction to the damping electrode unit 48, the “damping control means” and the “damping control step” described in the claims are realized.

ところで、上記の第１及び第２実施例においては、音叉振動型センサ１２を図１に示す如き構成としたが、本発明はこれに限定されるものではなく、他の構成としてもよい。   In the first and second embodiments described above, the tuning fork vibration type sensor 12 is configured as shown in FIG. 1, but the present invention is not limited to this and may have other configurations.

本発明の第１実施例である力学量検出装置が備える音叉振動型センサの平面図である。It is a top view of the tuning fork vibration type sensor with which the mechanical quantity detection apparatus which is 1st Example of this invention is provided. 本実施例の力学量検出装置の電気的なブロック構成図である。It is an electrical block block diagram of the mechanical quantity detection apparatus of a present Example. 本実施例の音叉振動型センサの原理モデルを表した図である。It is a figure showing the principle model of the tuning fork vibration type sensor of a present Example. 一対の振動子の加工公差等に起因する音叉振動型センサの誤出力を説明するための図である。It is a figure for demonstrating the erroneous output of a tuning fork vibration type sensor resulting from the processing tolerance etc. of a pair of vibrator | oscillator. （Ａ）は振動子がＹ軸方向に互いに逆相で検出振動する逆相振動モード時における周波数とゲインとの関係を表す振動特性を示す図であり、また、（Ｂ）は振動子がＹ軸方向に互いに同相で変位振動する同相振動モード時における振動特性を示す図である。(A) is a figure which shows the vibration characteristic showing the relationship between a frequency and a gain in the anti-phase vibration mode in which a vibrator | oscillator detects and vibrates in a mutually opposite phase in the Y-axis direction, and (B) is a figure where the vibrator is Y It is a figure which shows the vibration characteristic at the time of the common mode vibration mode which carries out a displacement vibration in an axial direction mutually in the same phase. 本実施例の力学量検出装置による効果を説明するための図である。It is a figure for demonstrating the effect by the mechanical quantity detection apparatus of a present Example. 本発明の第２実施例の力学量検出装置の電気的なブロック構成図である。It is an electrical block block diagram of the mechanical quantity detection apparatus of 2nd Example of this invention.

符号の説明Explanation of symbols

１０，２００ 力学量検出装置
１２ 音叉振動型センサ
１４ 基板
１６ 振動子
４２ 駆動電極部
４６ 検出電極部
４８ ダンピング電極部
１００，２０２ 制御回路
１０２ センサ励振駆動部
１０４ 変位検出部
１０６，２０４ ダンピング制御部
１０８ 角速度信号処理部
DESCRIPTION OF SYMBOLS 10,200 Mechanical quantity detection apparatus 12 Tuning fork vibration type sensor 14 Board | substrate 16 Vibrator 42 Drive electrode part 46 Detection electrode part 48 Damping electrode part 100,202 Control circuit 102 Sensor excitation drive part 104 Displacement detection part 106,204 Damping control part 108 Angular velocity signal processor

Claims (5)

所定の力学量が作用した際に互いに逆相変位する２つの錘を備え、前記所定の力学量に応じた信号として前記２つの錘の変位差に応じた信号を出力する音叉振動型センサであって、
前記２つの錘の検出方向における同相変位成分の、和の時間微分値又は各時間微分値の和を算出する算出手段と、
前記算出手段による算出値に基づいて、前記２つの錘を検出方向の同相方向へフィードバック駆動するダンピング制御手段と、
を備えることを特徴とする音叉振動型センサ。 A tuning fork vibration type sensor that includes two weights that are displaced in opposite phases when a predetermined mechanical quantity acts, and that outputs a signal corresponding to a displacement difference between the two weights as a signal corresponding to the predetermined mechanical quantity. And
A calculating means for calculating a sum time differential value or a sum of each time differential value of in-phase displacement components in the detection direction of the two weights;
Based on a value calculated by the calculation means, a damping control means for feedback driving the two weights in the same phase direction of the detection direction;
A tuning fork vibration type sensor comprising: 前記ダンピング制御手段は、前記算出手段による算出値に基づいて、前記２つの錘を、検出方向での同相変位成分の振動のみダンピングが増加するように検出方向の同相方向へフィードバック駆動することを特徴とする請求項１記載の音叉振動型センサ。   The damping control means feedback-drives the two weights in the in-phase direction of the detection direction so that the damping increases only for the vibration of the in-phase displacement component in the detection direction based on the value calculated by the calculation means. The tuning fork vibration type sensor according to claim 1. 前記所定の力学量が、所定軸周りに生ずる角速度であり、
前記２つの錘は、所定の第１方向へ互いに逆相に励起振動された状態で、前記角速度が作用した際に該所定の第１方向と直交する所定の第２方向へ互いに逆相変位すると共に、
前記算出手段は、前記２つの錘の前記所定の第２方向における同相変位成分の、和の時間微分値又は各時間微分値の和を算出し、かつ、
前記ダンピング制御手段は、前記算出手段による算出値に基づいて、前記２つの錘を前記所定の第２方向の同相方向へフィードバック駆動することを特徴とする請求項１又は２記載の音叉振動型センサ。 The predetermined mechanical quantity is an angular velocity generated around a predetermined axis;
The two weights are displaced in opposite phases to each other in a predetermined second direction orthogonal to the predetermined first direction when the angular velocity is applied while being excited and oscillated in opposite phases to each other in a predetermined first direction. With
The calculating means calculates a sum time differential value or a sum of time differential values of in-phase displacement components of the two weights in the predetermined second direction; and
3. The tuning fork vibration type sensor according to claim 1, wherein the damping control unit feedback-drives the two weights in the in-phase direction of the predetermined second direction based on a value calculated by the calculation unit. . 所定の力学量が作用した際に互いに逆相変位する２つの錘と、該２つの錘の変位差に基づいて前記所定の力学量を検出する検出手段と、を備える力学量検出装置であって、
前記２つの錘の検出方向における同相変位成分の、和の時間微分値又は各時間微分値の和を算出する算出手段と、
前記算出手段による算出値に基づいて、前記２つの錘を検出方向の同相方向へフィードバック駆動するダンピング制御手段と、
を備えることを特徴とする力学量検出装置。 A mechanical quantity detection device comprising: two weights that are displaced in opposite phases when a predetermined mechanical quantity acts; and a detection means that detects the predetermined mechanical quantity based on a displacement difference between the two weights. ,
A calculating means for calculating a sum time differential value or a sum of each time differential value of in-phase displacement components in the detection direction of the two weights;
Based on a value calculated by the calculation means, a damping control means for feedback driving the two weights in the same phase direction of the detection direction;
A mechanical quantity detection device comprising: 所定の力学量が作用した際に互いに逆相変位する２つの錘の変位差に基づいて前記所定の力学量を検出する力学量検出方法であって、
前記２つの錘の検出方向における同相変位成分の、和の時間微分値又は各時間微分値の和を算出する算出ステップと、
前記算出ステップにおける算出値に基づいて、前記２つの錘を検出方向の同相方向へフィードバック駆動するダンピング制御ステップと、
を備えることを特徴とする力学量検出方法。
A mechanical quantity detection method for detecting the predetermined mechanical quantity based on a displacement difference between two weights that are displaced in opposite phases when a predetermined mechanical quantity is applied,
A calculation step of calculating a sum time differential value or a sum of each time differential value of in-phase displacement components in the detection direction of the two weights;
Based on the calculated value in the calculating step, a damping control step for feedback driving the two weights in the in-phase direction of the detection direction;
A mechanical quantity detection method comprising:
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