CN106847707B - A method of extending island bridge structure is prepared based on electrofluid Printing techniques - Google Patents
A method of extending island bridge structure is prepared based on electrofluid Printing techniques Download PDFInfo
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- CN106847707B CN106847707B CN201710037993.3A CN201710037993A CN106847707B CN 106847707 B CN106847707 B CN 106847707B CN 201710037993 A CN201710037993 A CN 201710037993A CN 106847707 B CN106847707 B CN 106847707B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
Abstract
The invention discloses a kind of methods for preparing extending island bridge structure based on electrofluid Printing techniques, flexible base board is pre-stretched by this method first, then electrofluid jet printing technique print pattern on substrate is used, electrofluid jet printing technique needs apply High Level AC Voltage between nozzle and substrate, solution is directly deposited into island bridge structure on pre-stretching substrate after nozzle pull-out, wherein the diameter range on island is 10um~200um, the width range of bridge is 200nm~30um, release substrate prestrain later, island pattern is basically unchanged, microbridge compressive buckling, form extending island bridge structure.Extending island bridge structure preparation method proposed by the invention have the characteristics that simple process, it is at low cost, large area, array preparation can be achieved, there is wide application prospect in flexible/extending electronic field.
Description
Technical field
The present invention relates to flexible electronic manufacturing technology fields, are based on electrofluid Printing techniques system more particularly, to one kind
The method of standby extending island bridge structure can be avoided the outer warpage of microbridge generating surface of manufacture, improve the effect of preparation process
Rate and precision.
Background technique
Extending flexible electronic is as most challenging flexible electronic device, other than it can be realized bending deformation, also
Have biggish stretching, the big strain of torsional deformation ability and part, while there is scale is small, deformability is strong, ductility is big etc.
Feature.Extending flexible electronic device has wide application prospect, typical case packet in fields such as information, medical treatment, the energy, national defence
Include large area sensor, flexible display, printing RFID etc..
The core of extending flexible electronic be can large deformation flexible micro-nano functional structure design and manufacture, including island bridge
Structure, origami structure, paper-cut structure etc., wherein bridge structure in island obtains extensive concern because its structure is simple, tensile property is strong.Function
It can be attached between component (island) by conducting wire (bridge), island is bonded on the matrix by pre-stretching by chemical method, bridge
It can bond, can not also bond between pre-stretching matrix.After release substrate prestrain, buckling occurs for microbridge, forms tool
There is the extending island bridge structure of stretch capability, greatly improves the ductility of flexible electronic device, it can be achieved that being more than 100% change
Shape receives the concern of many scholars, has been used for the electronic eyes camera of Prosthetic Hand, flexible LED display, stretchable crystal
Pipe, sensor etc..
Currently, the mainstream production method of extending island bridge structure is first using techniques such as conventional lithography, plated films in silicon substrate
It is upper to generate very thin initial island bridge structure, then initial island bridge structure is transferred on the elastic rubber substrate of pre-stretching, and is made micro-
It can partly or entirely be bonded between structure and rubber substrate, discharge the prestrain of elastic rubber substrate later, (bending is rigid on large scale island
Degree is big) keep prototype, small size microbridge (bending stiffness the is small) buckling that is squeezed forms ripple struction.The manufacturing method principle letter
Single, flexible design, controllability is strong, can realize a variety of buckling structures by adjusting the material parameter of microbridge, section, size etc..But
The outer warpage of above-mentioned preparation process complexity, low efficiency, the easy generating surface of microbridge.
In order to simplify manufacture craft, the preparation efficiency of extending island bridge structure is improved, carry out large area is facilitated, is made on a large scale
Make, the present invention needs to improve above-mentioned process flow and method, designs a kind of method for preparing extending island bridge structure, can
The outer warpage of the microbridge generating surface of manufacture is avoided, the efficiency and precision of preparation process are improved, to meet extending island bridge knot
The production of structure needs.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides one kind to be based on electrofluid Printing techniques system
The method of standby extending island bridge structure, electrofluid spray printing used by this method is contactless micro-nano technology mode, can be with
Unlike material, pattern substrate on directly writing micro-nano structure, and its technical process is simple, controllability is strong, can be by adjusting technique
Parameter realizes different island bridge topology layouts, to improve the adaptability of island bridge structure, controls by adjusting technological parameter
The depth-width ratio of micro-bridge structure processed improves the efficiency of preparation process so as to avoid warpage outside the microbridge generating surface manufactured
And precision, it is especially suitable for preparing island bridge structure.
To achieve the above object, according to one aspect of the present invention, it provides a kind of based on the preparation of electrofluid Printing techniques
The method of extending island bridge structure, which is characterized in that specific step is as follows:
S1. prepare a flexible base board, be fixed on a rigid substrates after which to be stretched to certain degree, it will
The rigid substrates for being fixed with flexible base board are placed on the moving platform, and are fixed with fixture；
S2. uniformly mixed EFI print solution is prepared, is injected into syringe and spray head, press solution makes it from spray head
Nozzle at uniformly flow out；
S3. the distance between spray head and flexible base board are adjusted, applies High Level AC Voltage between spray head and flexible base board, is adjusted
Biasing, amplitude, duty ratio and the frequency of whole High Level AC Voltage make to generate stable cone jet stream at nozzle；
S4. the movement speed for adjusting rigid substrates keeps it mobile according to the motion profile of setting, in the jet stability of nozzle
Afterwards, deposition prints island bridge structure directly on the flexible base board of pre-stretching；
S5. to be printed after the completion to take out flexible base board from rigid substrates, the prestrain of flexible base board is discharged, is deposited on
Buckling occurs for the microbridge in the island bridge structure on flexible base board, forms extending island bridge structure.
It is further preferred that the flexible base board is elastic rubber material in step S1, shape is plane or curved surface；
The rigid substrates are plane or complex-curved shape.More comparative test shows to have using elastic rubber material more preferable
Ground pretensioning effect can also be preferably bonded with the shape of rigid substrates, to obtain effect preferably island bridge structure.
Preferably, in step S2, the EFI print solution is that silver paste, photoresist, PEO or other high-viscosity polymers are molten
Liquid pumps press solution, nozzle using air pressure or delicate flow during injecting EFI print solution into syringe and spray head
The adjusting range for locating the flow of solution is 1000nl/min~2000nl/min.More comparative test shows using high viscosity
Polymer solution be capable of forming stable jet stream as EFI print solution, and then deposit and form island bridge structure.And use air pressure
Or delicate flow pumps press solution, needs to avoid the generation of bubble during pouring into solution to spray head, to guarantee printing
During have stable flow.
Preferably, when adjusting the distance between spray head and flexible base board in step S3, the adjusting range of the distance is 300um
~600um.When more comparative test shows the distance between spray head and flexible base board within the above range, nozzle outflow
Jet stream will not generate biggish offset, can be accurately positioned deposition on flexible substrates, obtain ideal island bridge structure.
Preferably, High Level AC Voltage described in step S3 is square wave, and frequency, amplitude, biasing, duty ratio are adjustable, described
When High Level AC Voltage is in trough (voltage low value) position, the jet stream of nozzle attenuates, and the structure deposited on the flexible base board is
Bridge；When the High Level AC Voltage is in wave crest (voltage high level) position, the jet stream of nozzle is thicker, deposits on the flexible base board
Structure is island.
Preferably, in step S4, the movement speed range of the rigid substrates is 20mm/s~100mm/s, is being printed
To island bridge structure in, the diameter range on island is 10um~200um, and the width range of bridge is 200nm~30um.More comparison
Experiments have shown that when the movement speed of rigid substrates within the above range when, can guarantee jet stability, uninterrupted and do not occur partially
It moves, so that depositing ideal island bridge structure on substrate.
Preferably, in step S4, the island bridge structure, the distance between adjacent two island l and nozzle are relative to substrate
There is following relationship between movement velocity v and high-voltage alternating electric frequency f:
L=v/f
Preferably, in step S5, the distance between adjacent two island l' can approximate calculation are as follows:
L'=d/ ε
Wherein, in formula ε be flexible substrates prestrain.
Preferably, in step S5, after discharging flexible base board prestrain, microbridge compressive buckling, which is formed, has malleable ripple
Structure, the stretch capability of the ripple struction are similar to the prestrain size of flexible base board.
Specifically, a kind of method preparing extending island bridge structure based on electrofluid Printing techniques provided by the invention, institute
The solution stated is silver paste, photoresist or the relatively high functional solution of other viscosity；The solution power source can be gas
Pressure or delicate flow pump, and the size of flow can be adjusted；The spray head is general or homemade spray head, can be given
Solution be powered or can at nozzle holding electrode；The alternating voltage can be the alternating voltage of square, one end
Spray head is connect, a termination substrate can control the parameters such as frequency, amplitude, biasing, the duty ratio of alternating voltage by the end PC；It uses
High-voltage amplifier exports high-voltage electricity, uses function generator to generate waveform as the input signal of high-voltage amplifier, passes through regulation
The waveform parameter that function generator generates controls the relevant parameter of alternating current.The substrate motion speed can pass through the end PC
Control；
Specifically, diameter/line width of the island bridge structure deposited on substrate can be by adjusting supply flow rate, alternating current
It presses with substrate motion speed and realizes.When spacing on adjacent two island of the island bridge structure deposited on substrate can pass through printing
The movement speed of substrate is adjusted when the frequency and printing of the high voltage power supply used.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, have the following advantages that and
The utility model has the advantages that
(1) method for preparing extending island bridge structure of the invention, manufacture craft facilitate it is succinct, high-efficient, can be primary
Property prepares the island bridge structure of the micro-nano size of large area on substrate.The electrofluid spray printing of use is that contactless micro-nano adds
Work mode, can unlike material, pattern (plane/curved surface) substrate on directly writing micro-nano structure, and its technical process it is simple, can
Control property is strong, can realize different island bridge topology layouts by adjusting technological parameter, thus improve the adaptability of island bridge structure,
The outer warpage of microbridge generating surface that can be avoided manufacture, improves the efficiency and precision of preparation process, is suitble to prepare extending island
Bridge structure.
(2) size of island bridge structure is controllable, and different size island bridge structures can be realized by changing EFI print technological parameter
Deposition；Manufacture craft facilitates succinct, high-efficient, and the island of micro-nano size can be disposably prepared on large area flexible substrate
Bridge architecture.
(3) during island bridge structure fabrication, used technique is contactless technique, therefore this method is not only
The substrate that can be applied to common plane shape can be used for the substrate of complex-curved shape.
(4) method and process process of the invention is simple, controllability is strong, can adapt to different types of island bridge structure type
It needs, is suitble to extensive manufacture.
Detailed description of the invention
Fig. 1 is equipment and schematic illustration based on electrofluid Printing techniques preparation island bridge structure.
Fig. 2 is equipment and schematic illustration based on electrofluid Printing techniques preparation island bridge structure.
Fig. 3 (a) and (b) are the process schematic that extending island bridge structure is prepared based on electrofluid Printing techniques.
Fig. 4 is the schematic diagram that the driving voltage waveform of island bridge structure is prepared based on electrofluid spray printing.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1- delicate flow pump, 2- syringe, 3- running bases, 4- high-voltage amplifier, 5- printing substrate, 6- spray head.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
The present invention provides a kind of method for preparing extending island bridge structure based on electrofluid Printing techniques, feature exists
In, the specific steps are as follows:
S1. prepare a flexible base board (flexible base board can be elastic rubber material, and shape is plane or curved surface), it will
The flexible base board, which is stretched to after certain degree, to be fixed on a rigid substrates (rigid substrates can be plane or complex-curved shape
Shape) on, the rigid substrates for being fixed with flexible base board are placed on the moving platform, and is fixed with fixture；
S2. prepare uniformly mixed EFI print solution (EFI print solution can be silver paste, photoresist, PEO or other
High viscosity copolymer solution), it is injected into syringe and spray head, press solution makes uniformly to flow out from its nozzle from spray head,
The adjusting range of the flow of solution is 1000nl/min~2000nl/min at nozzle.And air pressure or delicate flow pump is used to squeeze
Solution needs to avoid the generation of bubble during pouring into solution to spray head, is stablized with guaranteeing to have during printing
Flow.
S3. the distance between spray head and flexible base board are adjusted, the adjusting range of the distance is 300um~1000um, is being sprayed
Apply High Level AC Voltage between head and flexible base board, adjusts biasing, amplitude, duty ratio and the frequency of High Level AC Voltage, make nozzle
Place generates stable cone jet stream；
S4. the movement speed for adjusting rigid substrates keeps it mobile according to the motion profile of setting, in the jet stability of nozzle
Afterwards, deposition prints island bridge structure directly on the flexible base board of pre-stretching；
S5. to be printed after the completion to take out flexible base board from rigid substrates, the prestrain of flexible base board is discharged, is deposited on
Buckling occurs for the microbridge in the island bridge structure on flexible base board, forms extending island bridge structure.
In a preferred embodiment of the invention, High Level AC Voltage described in step S3 be square wave, frequency, amplitude,
Biasing, duty ratio is adjustable, and when the High Level AC Voltage is in trough (voltage low value) position, the jet stream of nozzle attenuates, described soft
Property substrate on the structure that deposits be bridge；When the High Level AC Voltage is in wave crest (voltage high level) position, the jet stream of nozzle is thicker,
The structure deposited on the flexible base board is island.
In a preferred embodiment of the invention, in step S4, the movement speed range of the rigid substrates is 20mm/
S~100mm/s, in the island bridge structure that printing obtains, the diameter range on island is 10um~200um, and the width range of bridge is
200nm~30um.
In another preferred embodiment of the invention, in step S4, the island bridge structure, between adjacent two island away from
There is following relationship relative between the movement velocity v and high-voltage alternating electric frequency f of substrate from l and nozzle:
L=v/f
In another preferred embodiment of the invention, in step S5, the distance between adjacent two island l' can approximate calculation
Are as follows:
L'=d/ ε
Wherein, in formula ε be flexible substrates prestrain.
In a preferred embodiment of the invention, in step S5, after discharging flexible base board prestrain, microbridge compressive buckling
It is formed and has malleable ripple struction, the stretch capability of the ripple struction is approximately equal to the prestrain size of flexible base board.
Preferably to explain the present invention, two specific embodiments given below:
Fig. 1 is the agent structure schematic diagram that extending island bridge constructional device is used to prepare according to the present invention.Institute as shown in figure 1
Show, the device of preparation island bridge structure according to the invention mainly includes that delicate flow pump 1, syringe 2, running bases 3, height press
Big device 4, printing substrate 5, wherein filled with high viscosity solutions such as example silver paste, photoresist, PEO in syringe 2, and are equipped with flow pump
1, thus solution micro-precision is pushed under the action of flow pump, and be delivered to the spray head 6 being connected with syringe one end.
Printing substrate 5 is located at below the injection of spray head 6, and printing substrate is adsorbed in motion platform 3, and motion platform 3 is pressed by PC machine control
It is moved according to scheduled track.High pressure generator 4 anode be connected with the spray head 6 of metal material or syringe 2, cathode and
The motion platform 3 of metal material is connected, and sprays solution under electric field action from spray head 6 to the surface of substrate 5, finally exists
Island bridge structure is deposited on substrate.
Its specific working mechanism are as follows: the solution after polarization forms jet stream under electric field action, and the form of jet stream is applied
The influence of the voltage added, when pulse voltage is in low value, jet stream is thinner, be deposited on substrate be line form, pulse electricity
When pressing at a high value, jet stream is thicker, is deposited on the form on the island substrate Shang Shi.
In addition, preparation process according to the invention, above-mentioned device is also equipped with cleaning unit and drawing mechanism etc., the cleaning
Unit is used to execute cleaning treatment to the elastic substrate of for example PDMS, and the drawing mechanism is for the elastic substrate after cleaning along it
Multiple and different directions execute stretching, then the elastic substrate in tensional state are tightly attached in rigid basement, if using plane
The rigid basement of shape, the substrate can be silicon wafer or glass plate, if the substrate can be gold using the substrate of complex-curved shape
Belong to curved surface or other functional curved surfaces.After printing is completed, elastic substrate and rigid basement are separated, can be obtained can
The island bridge structure of extension, the island bridge structure have certain deformation and stretch capability.
The method flow that extending island bridge structure is used to prepare according to the present invention is specifically described below with reference to Fig. 3:
Embodiment 1: silver-colored island bridge structure is prepared based on electrofluid Printing techniques, as shown in Fig. 3 (a).
A: choosing clean, the fresh elastic PDMS substrate of 40mm × 40mm, fixed by PDMS substrate biaxial tension 30%
In stainless steel substrate surface.
B: with highly viscous silver-colored solution, be injected into syringe, and the specification of syringe is 1ml, is using internal diameter
The dispensing needle head of 60um is squeezed out from syringe needle a little as printing head, by the solution in syringe, during squeezing solution
The air of needle wall is discharged simultaneously, avoids generating bubble.By syringe clamping after the completion of above-mentioned steps.
C: above-mentioned stainless steel base is adsorbed on motion platform.Adjust spacing between spray head and substrate to 300um~
600um, adjustment flow are 1000nl/min~2000nl/min, start voltage, and voltage used in preparation process is biased to
1000V~2000V, amplitude are 400V~800V, and frequency is 400HZ~800HZ, and duty ratio is 10%~20%.
D: allowing substrate to move according to scheduled track, and the movement velocity of platform is set to 50mm/s~100mm/s, is transporting
Island bridge structure can be deposited on PDMS substrate in dynamic process.The diameter on island is 10um~200um, and the width of bridge is 200nm
~30um.
E: printing complete after PDMS is removed from rigid substrates, PDMS can be contracted to original shape, the island on PDMS because
The shape that holds its shape for size larger (bending stiffness is big), the microbridge between the island Dao Yu are pressurized because of size small (bending stiffness is small)
Buckling.The stretching and extension of PDMS is two-way, therefore the island bridge structure produced has the performance of double-deformation and extension.
Embodiment 2: curved surface island bridge structure is prepared based on electrofluid Printing techniques, as shown in Fig. 3 (b).
A: ECOFLEX solution is poured into a curve mold, and then ECOFLEX solution is heating and curing, later by its from
It is removed in curve mold, obtains curved spring ECOFLEX substrate.
B: choosing one piece of clean, fresh curved spring ECOFLEX substrate, stretches from surrounding, curved substrate is stretched to
Plane is fixed on stainless steel substrate surface.
C: with highly viscous silver-colored solution, be injected into syringe, and the specification of syringe is 1ml, is using internal diameter
The dispensing needle head of 60um is squeezed out from syringe needle a little as printing head, by the solution in syringe, during squeezing solution
The air of needle wall is discharged simultaneously, avoids generating bubble.By syringe clamping after the completion of above-mentioned steps.
D: above-mentioned stainless steel base is adsorbed on motion platform.Adjust spacing between spray head and substrate to 300um~
600um, adjustment flow are 1000nl/min~2000nl/min, start voltage, and voltage used in preparation process is biased to
1000V~2000V, amplitude are 400V~800V, and frequency is 400HZ~800HZ, and duty ratio is 10%~20%.
E: allowing substrate to move according to scheduled track, and the movement velocity of platform is set to 50mm/s~100mm/s, is transporting
Island bridge structure can be deposited on ECOFLEX substrate in dynamic process.The diameter on island is 10um~200um, and the width of bridge is
200nm~30um.
F: printing removes ECOFLEX after completing from rigid substrates, and ECOFLEX can be contracted to former curve form,
Because of size larger (bending stiffness is big) and the shape that holds its shape, microbridge between the island Dao Yu is small (curved because of size for island on ECOFLEX
Stiffness is small) and compressive buckling.To realize the preparation of the extending island bridge structure of curved surface.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (9)
1. a kind of method for preparing extending island bridge structure based on electrofluid Printing techniques, which is characterized in that specific step is as follows:
S1. prepare a flexible base board, be fixed on a rigid substrates, will fix after which to be stretched to certain degree
The rigid substrates of flexible substrate are placed on the moving platform, and are fixed with fixture；
S2. uniformly mixed EFI print solution is prepared, is injected into syringe and spray head, press solution makes its spray from spray head
It is uniformly flowed out at mouth；
S3. the distance between spray head and flexible base board are adjusted, applies High Level AC Voltage between spray head and flexible base board, adjustment is high
Biasing, amplitude, duty ratio and the frequency for pressing alternating current, make to generate stable cone jet stream at nozzle；Wherein, the High Level AC Voltage
Pulse voltage when being in wave trough position, the jet stream of ejection attenuates, and the structure deposited on the flexible base board is bridge, the height
When the pulse voltage of pressure alternating current is in crest location, the jet stream of ejection is thicker, and the structure deposited on the flexible base board is
Island；
S4. the movement speed for adjusting rigid substrates keeps it mobile according to the motion profile of setting, the jet stability at nozzle
Afterwards, deposition prints island bridge structure directly on the flexible base board of pre-stretching；
S5. to be printed after the completion to take out flexible base board from rigid substrates, the prestrain of flexible base board is discharged, the island is kept
Original shape, the microbridge in the island bridge structure occur buckling, extendable island bridge structure are consequently formed.
2. the method as described in claim 1, which is characterized in that in step S1, the flexible base board is elastic rubber material,
Shape is plane or curved surface；The rigid substrates are plane or complex-curved shape.
3. the method as described in claim 1, which is characterized in that in step S2, EFI print solution be silver paste, photoresist,
PEO or other high viscosity copolymer solutions, during injecting EFI print solution into syringe and spray head, using air pressure
Or delicate flow pumps press solution, the adjusting range of the flow of solution is 1000nl/min~2000nl/min at nozzle.
4. the method as described in claim 1, which is characterized in that adjust the distance between spray head and flexible base board in step S3
When, the adjusting range of the distance is 300um~600um.
5. the method as described in claim 1, which is characterized in that High Level AC Voltage described in step S3 is square wave, frequency, width
Value, biasing, duty ratio is adjustable, and when the High Level AC Voltage is in trough (voltage low value) position, the jet stream of nozzle attenuates, described
The structure deposited on flexible base board is bridge；When the High Level AC Voltage is in wave crest (voltage high level) position, the jet stream of nozzle becomes
Slightly, the structure deposited on the flexible base board is island.
6. the method as described in claim 1, which is characterized in that in step S4, the movement speed range of the rigid substrates is
20mm/s~100mm/s, in the island bridge structure that printing obtains, the diameter range on island is 10um~200um, the width range of bridge
For 200nm~30um.
7. the method as described in claim 1, which is characterized in that in step S4, the island bridge structure, between adjacent two island
Distance l and nozzle have following relationship relative between the movement velocity v and high-voltage alternating electric frequency f of substrate:
L=v/f.
8. the method as described in claim 1, which is characterized in that in step S5, the distance between adjacent two island l' approximate can be counted
It calculates are as follows:
L'=l/ ε
Wherein, in formula ε be flexible substrates prestrain.
9. the method as described in claim 1, which is characterized in that in step S5, after discharging flexible base board prestrain, microbridge is pressurized
Buckling, which is formed, has malleable ripple struction, and the prestrain that the stretch capability of the ripple struction is approximately equal to flexible base board is big
It is small.
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| CN113169072A (en) * | 2018-12-24 | 2021-07-23 | 深圳市柔宇科技股份有限公司 | Electronic device and method of manufacturing the same |
| CN111389472B (en) * | 2020-03-23 | 2021-08-17 | 南京工业职业技术学院 | Device and method for preparing electrospinning direct-writing multilayer microfluidic chip |
| CN113522378B (en) * | 2020-04-13 | 2023-03-17 | 中国科学院青岛生物能源与过程研究所 | Microfluidic chip based on electrohydrodynamics, micro sample application device and method |
| CN112428699B (en) * | 2020-11-11 | 2022-04-15 | 大连理工大学 | Integrated printing device of flexible microwave shield and circuit design method of microwave shield |
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| CN104358029A (en) * | 2014-10-17 | 2015-02-18 | 华中科技大学 | Method and device for preparing micro-nano corrugated structure by electrostatic spinning |
| CN104723677A (en) * | 2015-02-14 | 2015-06-24 | 广东工业大学 | Flexible circuit printing method and device based on electro-hydraulic coupling power |
| CN204526424U (en) * | 2015-02-14 | 2015-08-05 | 广东工业大学 | Based on the flexible circuit printing equipment of electric liquid coupling power |
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