CN106847707A - A kind of method that extending island bridge construction is prepared based on electrofluid Printing techniques - Google Patents
A kind of method that extending island bridge construction is prepared based on electrofluid Printing techniques Download PDFInfo
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- CN106847707A CN106847707A CN201710037993.3A CN201710037993A CN106847707A CN 106847707 A CN106847707 A CN 106847707A CN 201710037993 A CN201710037993 A CN 201710037993A CN 106847707 A CN106847707 A CN 106847707A
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- 238000010276 construction Methods 0.000 title claims abstract description 68
- 238000000034 method Methods 0.000 title claims abstract description 58
- 238000007639 printing Methods 0.000 title claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 82
- 230000033001 locomotion Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 6
- 230000006641 stabilisation Effects 0.000 claims description 6
- 238000011105 stabilization Methods 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 229920001971 elastomer Polymers 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 5
- 229920001577 copolymer Polymers 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 11
- 239000000243 solution Substances 0.000 description 33
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000004205 dimethyl polysiloxane Substances 0.000 description 8
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 8
- 229920005839 ecoflex® Polymers 0.000 description 8
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 8
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 8
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 8
- 238000005452 bending Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 229920001195 polyisoprene Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
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- 230000010287 polarization Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
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- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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Abstract
The invention discloses a kind of method that extending island bridge construction is prepared based on electrofluid Printing techniques, be pre-stretched for flexible base board first by the method, then electrofluid jet printing technique print pattern on substrate is used, electrofluid jet printing technique needs to apply High Level AC Voltage between nozzle and substrate, solution is directly deposited into island bridge construction from after nozzle pull-out on pre-stretching substrate, wherein the diameter range on island is 10um~200um, the width range of bridge is 200nm~30um, release substrate prestrain afterwards, island pattern is basically unchanged, microbridge compressive buckling, form extending island bridge construction.The features such as there is extending island bridge construction preparation method proposed by the invention process is simple, low cost, achievable large area, array to prepare, has wide application prospect in flexibility/extending electronic applications.
Description
Technical field
The present invention relates to flexible electronic manufacturing technology field, electrofluid Printing techniques system is based on more particularly, to one kind
The method of standby extending island bridge construction, it can avoid the microbridge of manufacture that warpage outside face occurs, improve the effect of preparation process
Rate and precision.
Background technology
Extending flexible electronic in addition to it can realize flexural deformation, is gone back as the flexible electronic device of most challenge
Possess larger stretching, torsional deformation ability and local big strain, while having yardstick is small, deformability is strong, ductility is big etc.
Feature.Extending flexible electronic device has wide application prospect, typical case's application bag in fields such as information, medical treatment, the energy, national defence
Include large area sensor, flexible display, printing RFID etc..
The core of extending flexible electronic be can large deformation flexible micro-nano functional structure design and manufacture, including island bridge
Structure, paper folding structure, paper-cut structure etc., wherein island bridge construction obtain extensive concern by force because of its simple structure, tensile property.Work(
Can be attached by wire (bridge) between component (island), island is bonded on the matrix by being pre-stretched by chemical method, bridge
Can be bonded between pre-stretching matrix, it is also possible to do not bond.After release substrate prestrain, there is flexing in microbridge, form tool
There is the extending island bridge construction of stretch capability, greatly improve the ductility of flexible electronic device, be capable of achieving the change more than 100%
Shape, receives the concern of many scholars, has been used for the electronic eyes camera of Prosthetic Hand, flexible LED display, stretchable crystal
Pipe, sensor etc..
At present, the main flow preparation method of extending island bridge construction is for first using techniques such as conventional lithography, plated films in silicon substrate
The very thin initial island bridge construction of upper generation, then initial island bridge construction is transferred on the elastic caoutchouc substrate of pre-stretching, and make micro-
Can partly or entirely be bonded between structure and rubber substrate, the prestrain of elastic caoutchouc substrate is discharged afterwards, (bending is firm on large scale island
Degree is big) keep prototype, small size microbridge (bending stiffness the is small) flexing that is squeezed forms ripple struction.Manufacture method principle letter
Single, flexible design, controllability is strong, can realize various buckling structures by adjusting material parameter, section, the size etc. of microbridge.But
Above-mentioned preparation process is complicated, efficiency is low, microbridge easily occurs warpage outside face.
In order to simplify manufacture craft, the preparation efficiency of extending island bridge construction is improved, conveniently carry out large area, extensive system
Make, the present invention needs the above-mentioned technological process of improvement and method badly, designs a kind of method for preparing extending island bridge construction, can
Avoid the microbridge of manufacture that warpage outside face occurs, the efficiency and precision of preparation process are improved, to meet extending island bridge knot
The production of structure needs.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, electrofluid Printing techniques system is based on the invention provides one kind
The method of standby extending island bridge construction, the electrofluid spray printing that the method is used is contactless micro-nano technology mode, can be with
The directly writing micro-nano structure in unlike material, the substrate of pattern, and its technical process is simple, controllability strong, can be by adjusting process
Parameter realizes different island bridge constructions layouts, so as to improve the adaptability of island bridge construction, is controlled by adjusting process parameter
The depth-width ratio of micro-bridge structure processed such that it is able to avoid the microbridge of manufacture that warpage outside face occurs, improve the efficiency of preparation process
And precision, it is especially suitable for preparing island bridge construction.
To achieve the above object, according to one aspect of the present invention, there is provided a kind of to be prepared based on electrofluid Printing techniques
The method of extending island bridge construction, it is characterised in that comprise the following steps that：
S1. prepare a flexible base board, the flexible base board is stretched to after certain degree and is fixed on a rigid substrates, will
The rigid substrates for being fixed with flexible base board are placed on the moving platform, and are fixed with fixture；
S2. well mixed EFI print solution is prepared, is injected into syringe and shower nozzle, press solution makes it from shower nozzle
Nozzle at uniformly flow out；
S3. the distance between shower nozzle and flexible base board are adjusted, High Level AC Voltage is applied between shower nozzle and flexible base board, adjusted
The biasing of whole High Level AC Voltage, amplitude, dutycycle and frequency, make to produce the cone jet of stabilization at nozzle；
S4. the translational speed of rigid substrates is adjusted, it is moved according to the movement locus of setting, in the jet stability of nozzle
Afterwards, directly deposition prints island bridge construction on the flexible base board of pre-stretching；
S5. flexible base board is taken out from rigid substrates after the completion of to be printed, discharge the prestrain of flexible base board, be deposited on
There is flexing in the microbridge in the island bridge construction on flexible base board, form extending island bridge construction.
It is further preferred that in step S1, the flexible base board is elastic rubber material, and it is shaped as plane or curved surface；
The rigid substrates are plane or complex-curved shape.More comparative test shows have using elastic rubber material more preferable
Ground pretensioning effect, can also preferably fit, with the shape of rigid substrates so as to obtain effect preferably island bridge construction.
Preferably, in step S2, the EFI print solution is that silver paste, photoresist, PEO or other high-viscosity polymers are molten
Liquid, during to EFI print solution is injected in syringe and shower nozzle, using air pressure or delicate flow pump press solution, nozzle
The adjusting range for locating the flow of solution is 1000nl/min~2000nl/min.More comparative test shows, using high viscosity
Polymer solution as EFI print solution can be formed stabilization jet, and then deposition form island bridge construction.And use air pressure
Or delicate flow pump press solution, need to avoid the generation of bubble during solution is poured into shower nozzle, to ensure in printing
During have stabilization flow.
Preferably, when adjusting the distance between shower nozzle and flexible base board in step S3, the adjusting range of the distance is 300um
~600um.More comparative test shows, the distance between shower nozzle and flexible base board within the above range when, nozzle outflow
Jet will not produce larger skew, can be accurately positioned deposition on flexible substrates, obtain preferable island bridge construction.
Preferably, High Level AC Voltage described in step S3 is square wave, and its frequency, amplitude, biasing, dutycycle are adjustable, described
When High Level AC Voltage is in trough (voltage low value) position, the jet of nozzle attenuates, and the structure deposited on the flexible base board is
Bridge；When the High Level AC Voltage is in crest (voltage high level) position, the jet of nozzle is thicker, is deposited on the flexible base board
Structure is island.
Preferably, in step S4, the translational speed scope of the rigid substrates is 20mm/s~100mm/s, is being printed
To island bridge construction in, the diameter range on island is 10um~200um, and the width range of bridge is 200nm~30um.More comparing
Experiment shows, when rigid substrates translational speed within the above range when, ensure that jet stability, uninterrupted and do not occur partially
Move so that preferable island bridge construction is deposited on substrate.
Preferably, in step S4, described island bridge construction, the distance between adjacent two island l is with nozzle relative to substrate
There is following relation between movement velocity v and High Level AC Voltage frequency f：
L=v/f
Preferably, in step S5, the distance between adjacent two island l' can approximate calculation be：
L'=d/ ε
Wherein, ε is the prestrain of flexible substrates in formula.
Preferably, in step S5, after release flexible base board prestrain, microbridge compressive buckling forms the malleable ripple of tool
Structure, the stretch capability of the ripple struction is similar to the prestrain size of flexible base board.
Specifically, a kind of method that extending island bridge construction is prepared based on electrofluid Printing techniques that the present invention is provided, institute
The solution stated is silver paste, photoresist or other ratios of viscosities functional solution higher；Described solution power source can be gas
Pressure or delicate flow pump, and the size of flow can be adjusted；Described shower nozzle is general or homemade shower nozzle, can be given
Solution be powered or can at nozzle holding electrode；Described alternating voltage can be the alternating voltage of square, one end
Shower nozzle is connect, a termination substrate can control the parameters such as frequency, amplitude, biasing, the dutycycle of alternating voltage by PC ends；Use
High-voltage amplifier exports high-tension electricity, waveform is produced as the input signal of high-voltage amplifier using function generator, by regulation and control
The waveform parameter that function generator is produced controls the relevant parameter of alternating current.Described substrate motion speed can be by PC ends
Control；
Specifically, the diameter/line width of the island bridge construction for being deposited on substrate can be by adjusting supply flow rate, alternating current
Press with substrate motion speed to realize.The spacing on adjacent two island of the island bridge construction deposited on substrate can by printing when
The frequency of the high voltage power supply for using is adjusted with the translational speed of substrate when printing.
In general, by the contemplated above technical scheme of the present invention compared with prior art, with advantages below and
Beneficial effect：
(1) method for preparing extending island bridge construction of the invention, the convenient succinct, efficiency high of manufacture craft, can be once
Property prepares the island bridge construction of the micro-nano size of large area on substrate.The electrofluid spray printing of use is that contactless micro-nano adds
Work mode, can in unlike material, the substrate of pattern (plane/curved surface) directly writing micro-nano structure, and its technical process it is simple, can
Control property is strong, and different island bridge construction layouts can be realized by adjusting process parameter, so that the adaptability of island bridge construction is improved,
Can avoid the microbridge of manufacture that warpage outside face occurs, improve the efficiency and precision of preparation process, be adapted to prepare extending island
Bridge construction.
(2) size of island bridge construction is controllable, and the i.e. achievable different size island bridge construction of technological parameter is printed by changing EFI
Deposition；The convenient succinct, efficiency high of manufacture craft, can disposably prepare the island of micro-nano size on large area flexible substrate
Bridge architecture.
(3) during island bridge construction makes, the technique for being used is contactless technique, therefore the method is not only
The substrate of common plane shape can be applied to, it is also possible to for the substrate of complex-curved shape.
(4) method of the present invention technical process is simple, controllability is strong, can adapt to different types of island bridge construction type
Need, be adapted to extensive manufacture.
Brief description of the drawings
Fig. 1 is the equipment and principle schematic that island bridge construction is prepared based on electrofluid Printing techniques.
Fig. 2 is the equipment and principle schematic that island bridge construction is prepared based on electrofluid Printing techniques.
Fig. 3 (a) and (b) are the process schematic that extending island bridge construction is prepared based on electrofluid Printing techniques.
Fig. 4 is the schematic diagram of the driving voltage waveform that island bridge construction is prepared based on electrofluid spray printing.
In all of the figs, identical reference be used for represent identical element or structure, wherein：
1- delicate flows pump, 2- syringes, 3- running bases, 4- high-voltage amplifiers, 5- printing substrates, 6- shower nozzles.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as additionally, technical characteristic involved in invention described below each implementation method
Not constituting conflict each other can just be mutually combined.
The invention provides a kind of method that extending island bridge construction is prepared based on electrofluid Printing techniques, its feature exists
In comprising the following steps that：
S1. a flexible base board (flexible base board can be elastic rubber material, and it is shaped as plane or curved surface) is prepared, will
The flexible base board is stretched to after certain degree and is fixed on a rigid substrates (rigid substrates can be plane or complex-curved shape
Shape) on, the rigid substrates that will be fixed with flexible base board are placed on the moving platform, and are fixed with fixture；
S2. prepare well mixed EFI print solution (EFI print solution can be silver paste, photoresist, PEO or other
High viscosity copolymer solution), it is injected into syringe and shower nozzle, press solution makes uniformly to be flowed out at its nozzle from shower nozzle,
The adjusting range of the flow of solution is 1000nl/min~2000nl/min at nozzle.And use air pressure or delicate flow pump to extrude
Solution, needs to avoid the generation of bubble during solution is poured into shower nozzle, to ensure to have stabilization during printing
Flow.
S3. the distance between shower nozzle and flexible base board are adjusted, the adjusting range of the distance is 300um~1000um, in spray
Apply High Level AC Voltage between head and flexible base board, adjust biasing, amplitude, dutycycle and the frequency of High Level AC Voltage, make nozzle
Place produces the cone jet of stabilization；
S4. the translational speed of rigid substrates is adjusted, it is moved according to the movement locus of setting, in the jet stability of nozzle
Afterwards, directly deposition prints island bridge construction on the flexible base board of pre-stretching；
S5. flexible base board is taken out from rigid substrates after the completion of to be printed, discharge the prestrain of flexible base board, be deposited on
There is flexing in the microbridge in the island bridge construction on flexible base board, form extending island bridge construction.
In a preferred embodiment of the invention, High Level AC Voltage described in step S3 be square wave, its frequency, amplitude,
Bias, dutycycle is adjustable, when the High Level AC Voltage is in trough (voltage low value) position, the jet of nozzle attenuates, described soft
Property substrate on deposit structure be bridge；When the High Level AC Voltage is in crest (voltage high level) position, the jet of nozzle is thicker,
The structure deposited on the flexible base board is island.
In a preferred embodiment of the invention, in step S4, the translational speed scope of the rigid substrates is 20mm/
S~100mm/s, in the island bridge construction that printing is obtained, the diameter range on island is 10um~200um, and the width range of bridge is
200nm~30um.
In another preferred embodiment of the invention, in step S4, described island bridge construction, between adjacent two island away from
There is following relation between movement velocity v and High Level AC Voltage frequency f from l and nozzle relative to substrate：
L=v/f
In another preferred embodiment of the invention, in step S5, the distance between adjacent two island l' can approximate calculation
For：
L'=d/ ε
Wherein, ε is the prestrain of flexible substrates in formula.
In a preferred embodiment of the invention, in step S5, after release flexible base board prestrain, microbridge compressive buckling
The malleable ripple struction of tool is formed, the stretch capability of the ripple struction is approximately equal to the prestrain size of flexible base board.
Preferably to explain the present invention, two specific embodiments given below：
Fig. 1 is the agent structure schematic diagram for being used to prepare extending island bridge construction device according to the present invention.Such as institute in Fig. 1
Show, mainly include that delicate flow pump 1, syringe 2, running bases 3, height are pressed according to the device of preparation island of the invention bridge construction
Big device 4, printing substrate 5, wherein filled with high viscosity solutions such as example silver paste, photoresist, PEO in syringe 2, and are equipped with flow pump
1, solution micro-precision is promoted in the presence of flow pump thus, and be delivered to the shower nozzle 6 being connected with syringe one end.
Printing substrate 5 is located at the injection lower section of shower nozzle 6, and printing substrate is adsorbed in motion platform 3, and motion platform 3 controls to press by PC
Moved according to predetermined track.The positive pole of high pressure generator 4 is connected with the shower nozzle 6 or syringe 2 of metal material, its negative pole with
The motion platform 3 of metal material is connected, and solution is sprayed from shower nozzle 6 to the surface of substrate 5 under electric field action, finally exists
Island bridge construction is deposited on substrate.
Its specific working mechanism is：Solution after polarization forms jet under electric field action, and the form of jet is applied
Plus voltage influence, pulse voltage be in low value when, jet is thinner, be deposited on substrate be line form, pulse electricity
Press when at a high value, jet is thicker, is deposited on the form on substrate Shang Shi islands.
Additionally, according to preparation process of the invention, above-mentioned device is also equipped with cleaning unit and drawing mechanism etc., the cleaning
Unit is used to perform the elastic substrate of for example PDMS cleaning treatment, and the drawing mechanism is used for the elastic substrate after cleaning along it
Multiple different directions perform stretching, then the elastic substrate in extended state are close in rigid basement, if using plane
The rigid basement of shape, the substrate can be silicon chip or glass plate, if using the substrate of complex-curved shape, the substrate can be gold
Category curved surface or other feature curved surfaces.After completion is printed, elastic substrate and rigid basement are separated, you can obtaining can
The island bridge construction of extension, the island bridge construction has certain deformation and stretch capability.
Specifically described below with reference to Fig. 3 is used to prepare the method flow of extending island bridge construction according to the present invention：
Embodiment 1：Silver-colored island bridge construction is prepared based on electrofluid Printing techniques, shown in such as Fig. 3 (a).
A:Clean, the fresh elastic PDMS substrates of 40mm × 40mm are chosen, it is fixed by PDMS substrates biaxial tension 30%
In stainless steel substrate surface.
B:High-viscosity silver-colored solution is equipped with, is injected into syringe, the specification of syringe is 1ml, is using internal diameter
The dispensing needle head of 60um is extruded a little the solution in syringe, during solution is squeezed as printing head from syringe needle
The air of needle wall is discharged simultaneously, it is to avoid produce bubble.By syringe clamping after the completion of above-mentioned steps.
C:By above-mentioned stainless steel base absorption on the moving platform.Adjustment shower nozzle and substrate between spacing to 300um~
600um, adjustment flow is 1000nl/min~2000nl/min, starts voltage, and the voltage used in preparation process is biased to
1000V~2000V, amplitude is 400V~800V, and frequency is 400HZ~800HZ, and dutycycle is 10%~20%.
D:Substrate is allowed to be moved according to predetermined track, the movement velocity of platform is set to 50mm/s~100mm/s, in fortune
Island bridge construction can be deposited on PDMS substrates in dynamic process.A diameter of 10um~200um on island, the width of bridge is 200nm
~30um.
E:Printing complete after PDMS is removed from rigid substrates, PDMS can be contracted to original shape, the island on PDMS because
The shape that holds its shape for size larger (bending stiffness is big), the microbridge between Dao Yu islands is pressurized because of size small (bending stiffness is small)
Flexing.The stretching and extension of PDMS are two-way, therefore the island bridge construction produced has double-deformation and the performance for extending.
Embodiment 2：Curved surface island bridge construction is prepared based on electrofluid Printing techniques, shown in such as Fig. 3 (b).
A:ECOFLEX solution is poured into a curve mold, then ECOFLEX solution is heating and curing, afterwards by its from
Removed in curve mold, obtain curved spring ECOFLEX substrates.
B:One piece of clean, fresh curved spring ECOFLEX substrate is chosen, from surrounding stretching, curved substrate is stretched to
Plane, is fixed on stainless steel substrate surface.
C:High-viscosity silver-colored solution is equipped with, is injected into syringe, the specification of syringe is 1ml, is using internal diameter
The dispensing needle head of 60um is extruded a little the solution in syringe, during solution is squeezed as printing head from syringe needle
The air of needle wall is discharged simultaneously, it is to avoid produce bubble.By syringe clamping after the completion of above-mentioned steps.
D:By above-mentioned stainless steel base absorption on the moving platform.Adjustment shower nozzle and substrate between spacing to 300um~
600um, adjustment flow is 1000nl/min~2000nl/min, starts voltage, and the voltage used in preparation process is biased to
1000V~2000V, amplitude is 400V~800V, and frequency is 400HZ~800HZ, and dutycycle is 10%~20%.
E:Substrate is allowed to be moved according to predetermined track, the movement velocity of platform is set to 50mm/s~100mm/s, in fortune
Island bridge construction can be deposited on ECOFLEX substrates in dynamic process.A diameter of 10um~200um on island, the width of bridge is
200nm~30um.
F:Printing removes ECOFLEX after completing from rigid substrates, and ECOFLEX can be contracted to former curve form,
Island on ECOFLEX is because size larger (bending stiffness is big) and the shape that holds its shape, and microbridge between Dao Yu islands is small (curved because of size
Stiffness is small) and compressive buckling.So as to realize the preparation of the extending island bridge construction of curved surface.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, it is not used to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc., all should include
Within protection scope of the present invention.
Claims (9)
1. a kind of method that extending island bridge construction is prepared based on electrofluid Printing techniques, it is characterised in that comprise the following steps that：
S1. prepare a flexible base board, the flexible base board is stretched to after certain degree and is fixed on a rigid substrates, by fixation
The rigid substrates of flexible substrate are placed on the moving platform, and are fixed with fixture；
S2. well mixed EFI print solution is prepared, is injected into syringe and shower nozzle, press solution makes its spray from shower nozzle
Uniformly flowed out at mouth；
S3. the distance between shower nozzle and flexible base board are adjusted, High Level AC Voltage is applied between shower nozzle and flexible base board, adjustment is high
Biasing, amplitude, dutycycle and the frequency of alternating current are pressed, makes to produce the cone jet of stabilization at nozzle；
S4. the translational speed of rigid substrates is adjusted, it is moved according to the movement locus of setting, the jet stability at nozzle
Afterwards, directly deposition prints island bridge construction on the flexible base board of pre-stretching；
S5. flexible base board is taken out from rigid substrates after the completion of to be printed, discharge the prestrain of flexible base board, be deposited on flexibility
There is flexing in the microbridge in the island bridge construction on substrate, form extending island bridge construction.
2. the method for claim 1, it is characterised in that in step S1, the flexible base board is elastic rubber material, its
It is shaped as plane or curved surface；The rigid substrates are plane or complex-curved shape.
3. the method for claim 1, it is characterised in that in step S2, the EFI print solution be silver paste, photoresist,
PEO or other high viscosity copolymer solutions, during to EFI print solution is injected in syringe and shower nozzle, using air pressure
Or delicate flow pump press solution, the adjusting range of the flow of solution is 1000nl/min~2000nl/min at nozzle.
4. the method for claim 1, it is characterised in that the distance between shower nozzle and flexible base board are adjusted in step S3
When, the adjusting range of the distance is 300um~600um.
5. the method for claim 1, it is characterised in that High Level AC Voltage described in step S3 is square wave, its frequency, width
It is worth, biases, dutycycle is adjustable, when the High Level AC Voltage is in trough (voltage low value) position, the jet of nozzle attenuates, described
The structure deposited on flexible base board is bridge；When the High Level AC Voltage is in crest (voltage high level) position, the jet of nozzle becomes
Slightly, the structure for being deposited on the flexible base board is island.
6. the method for claim 1, it is characterised in that in step S4, the translational speed scope of the rigid substrates is
20mm/s~100mm/s, in the island bridge construction that printing is obtained, the diameter range on island is 10um~200um, the width range of bridge
It is 200nm~30um.
7. the method for claim 1, it is characterised in that in step S4, described island bridge construction, between adjacent two island
There is following relation between movement velocity v and High Level AC Voltage frequency f apart from l and nozzle relative to substrate：
L=v/f
8. the method for claim 1, it is characterised in that in step S5, the distance between adjacent two island l' can be counted approximately
It is：
L'=l/ ε
Wherein, ε is the prestrain of flexible substrates in formula.
9. the method for claim 1, it is characterised in that in step S5, after release flexible base board prestrain, microbridge is pressurized
Flexing forms the malleable ripple struction of tool, and the prestrain that the stretch capability of the ripple struction is approximately equal to flexible base board is big
It is small.
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