CN112428701B - Printing device and manufacturing method of high-precision large-stretching OLED array based on island bridge structure - Google Patents
Printing device and manufacturing method of high-precision large-stretching OLED array based on island bridge structure Download PDFInfo
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- CN112428701B CN112428701B CN202011258790.5A CN202011258790A CN112428701B CN 112428701 B CN112428701 B CN 112428701B CN 202011258790 A CN202011258790 A CN 202011258790A CN 112428701 B CN112428701 B CN 112428701B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/06—Ink jet characterised by the jet generation process generating single droplets or particles on demand by electric or magnetic field
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
- B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
- H10K71/611—Forming conductive regions or layers, e.g. electrodes using printing deposition, e.g. ink jet printing
Abstract
A printing device and a manufacturing method of a high-precision large-stretching OLED array based on an island bridge structure are disclosed, wherein the printing device is electrically driven to print, the positive pole of a high-voltage power supply is connected with a nozzle through a lead, the negative pole of the high-voltage power supply is connected with a conductive support through a lead, the nozzle is provided with high-voltage positive charges, liquid drops at the nozzle are polarized by high voltage and generate polarized positive charges, and meanwhile, the nozzle and the nozzle generate induced negative charges on the surface of a substrate through electrostatic induction to form a vertically downward electric field; under the action of a space electric field, the charged liquid drops are stretched and deformed by the electric field force until cone jet flow is formed. The method comprises the steps of applying a pulse high-voltage power supply, controlling the action time of single pulse voltage to control the spraying frequency of single liquid drops, adjusting technological parameters, realizing accurate printing, combining the control of a printing platform, realizing accurate deposition of the liquid drops on a substrate and point-by-point forming to realize 3D printing, obtaining a high-precision and large-stretching island bridge structure, and finally obtaining the high-precision and large-stretching OLED array based on the island bridge structure through thermal evaporation.
Description
Technical Field
The invention belongs to the technical field of electrohydrodynamic jet printing, and particularly relates to a printing device of a high-precision large-stretching OLED array based on an island bridge structure and a manufacturing method thereof.
Background
In the past, microelectronics technologies mainly drive to reduce the feature size of functional devices and improve the integration level, so as to achieve the purposes of increasing the running speed and computing power and reducing the operating voltage. The traditional microelectronics adopts a hard silicon substrate or plane glass, the shape of the product is fixed and hard, and although the product is favorable for protecting electronic components and cannot be easily damaged in use, the ductility and the flexibility of the product as well as the flexibility and the application range of the product development are inevitably restricted.
To overcome the above-mentioned disadvantages of rigid circuit boards, flexible electronic technologies have been developed to enable electronic devices to be used in a wide variety of scientific and industrial fields. According to the method, a micro-nano observation technology and a preparation technology are adopted, and a micro-nano high-performance circuit and a flexible substrate are integrated, so that the flexibility and the extensibility of an electronic device are realized. The island bridge structure in the island bridge structure OLED array design can achieve the purpose of large stretching and no deformation of electronic devices. In contrast to conventional rigid devices, stretchable inorganic electronics not only allows large deformations in electronic performance without degradation, but also forms conformal integration with complex surfaces of human tissue. Due to the unique advantages, the scalable inorganic electronic technology remarkably widens the application field of traditional electronic products, realizes new applications in health monitoring, advanced human-computer interfaces, Internet of things (such as epidermal electronic products) and the like, and has important research significance.
Disclosure of Invention
The invention aims to provide a method for manufacturing a high-precision large-stretching OLED array based on an island bridge structure.
The technical scheme of the invention is as follows:
a printing device of a high-precision large-stretching OLED array based on an island bridge structure comprises a liquid supply device 4, a flow pump 3, a substrate 5, a grounding conductive support 6, a heating plate 7, a five-axis displacement platform 8, a computer control system 2 and a high-voltage power supply 1;
the anode of the high-voltage power supply 1 is connected with the nozzle 10 through a lead, and the cathode of the high-voltage power supply is connected with the grounding conductive support 6 through a lead; the substrate 5 is uniformly distributed on the grounding conductive support 6 by adopting PDMS solution through spin coating; the grounding conductive support 6 is positioned on the heating plate 7, and the heating plate 7 is positioned on the displacement platform 8; the high-voltage power supply 1, the computer control system 2 and the five-axis displacement platform 8 are sequentially connected; the five-axis displacement platform 8 can realize the movement in the directions of an X axis, a Y axis and a Z axis and the inclined movement in the direction of an X-Y axis;
the liquid supply device 4 comprises a nozzle 10 and an infusion guide pipe 9, one end of the infusion guide pipe 9 is arranged on an installation groove 11 of the nozzle 10, and the other end of the infusion guide pipe is connected with the flow pump 3;
the nozzle 10 mainly comprises a mounting groove 11, a conveying pipeline protective sleeve 12, a conveying pipeline 13, a connecting body 14, a heating block 15 and a temperature measuring element 16; the material conveying pipeline 13 is Y-shaped, and the inlet end of the material conveying pipeline is communicated with the mounting groove 11; the connecting body 14 and the heating block 15 are fixed into a whole, and the material conveying pipeline 13 is positioned in the connecting body; a delivery pipeline protective sleeve 12 is sleeved outside the delivery pipeline 13 in the connecting body 14; the side of the heating block 15 is provided with a temperature measuring element 16.
The nozzle 10 is 200-250 μm in specification, is externally connected with a CCD camera and is positioned above the nozzle 10; the CCD camera monitors the real-time position of the nozzle relative to the preprinting structure and the position of the drop falling, so that the nozzle can be accurately positioned at a more appropriate position, and the height of the nozzle 10 is adjusted to maintain the distance between the height of the nozzle 10 and the substrate 5 to be 500-600 μm.
The printing material of the island-bridge structure adopts graphene modified conductive silver colloid solution. The preparation method comprises the steps of taking 10g of epoxy resin, putting a beaker filled with the epoxy resin into an ultrasonic water bath kettle preheated to 60 ℃, heating for 5-10min, then sequentially and respectively adding 0.007g of graphene, 4.2g of diluent (absolute ethyl alcohol), 7.5g of conductive filler (flaky micron copper-coated silver) and 2g of plasticizer (dioctyl phthalate) into the preheated epoxy resin, starting an ultrasonic function, and uniformly stirring for 60-90min by using a stirrer. And then taking the mixed conductive silver colloid out of an ultrasonic water bath kettle at the temperature of 60 ℃, putting the mixed conductive silver colloid into cold water for water bath stirring, and fully cooling the conductive silver colloid solution to the room temperature.
When the device works, the flow pump conveys the graphene modified conductive silver colloid solution to the tip of the nozzle from the mounting groove of the liquid supply device at a given speed, and a drooping ink meniscus is formed. By applying a voltage (voltage of 2.2kv-3kv, frequency of 50HZ-60HZ) between the nozzle and the substrate, mobile charges inside the graphene modified conductive silver colloid solution accumulate near the meniscus surface, forming a tapered meniscus shape, called taylor cone. At a sufficiently high electric field, a fine droplet is ejected from the tip of the conical meniscus towards the substrate when the electrostatic force overcomes the pressure of the feed tube. While the temperature of the plate is 150 c, promoting instantaneous drying of the droplets to prevent their spreading on the substrate. And controlling a five-axis displacement platform to translate to the next position at a relatively slow speed (5-15 mm/s) on an X-Y plane along a preset route by a computer control system, observing the real-time position of a nozzle relative to a preprinting position by an externally connected CCD (charge coupled device) camera, adjusting the position of the nozzle, dropping a droplet, keeping the temperature of a heating plate at 150 ℃, and promoting the solvent in the droplet to evaporate. Therefore, the inclination angle of the bridge in the island-bridge structure can be controlled by controlling the position of the spray head and the translation speed of the substrate on the X-Y plane, and the required island-bridge structure can be printed.
The utility model provides a preparation method of the big tensile OLED array of high accuracy based on island bridge structure, through applying pulse high voltage power supply 1, through the jet frequency of single pulse voltage action time control single liquid drop of control, adjust printing frequency, voltage, print high process parameter, realize accurate printing as required, combine print platform's control simultaneously, realize that the liquid drop is at 5 accurate deposits of base plate and form the realization 3D printing point by point, thereby obtain high accuracy, big tensile island bridge structure, obtain the big tensile OLED array of high accuracy based on island bridge structure through thermal evaporation at last, concrete step is as follows:
(1) firstly, injecting a polyvinyl alcohol supporting material into the liquid supply device 4, and printing the supporting material of the base layer 23 of the OLED on the substrate 5;
(2) the nozzle 10 is selected to be 200-250 mu m in specification, the height of the nozzle 10 is adjusted to keep the distance between the height of the nozzle 10 and the substrate 5 to be 500-600 mu m, graphene modified conductive silver colloid solution is injected into the liquid supply device 4, wherein the content of graphene is 0.07 percent of the graphene modified conductive silver colloid solution, and the flow pump 3 is started to supply liquid at a given speed; simultaneously, starting a high-voltage power supply 1 to output pulse voltage, wherein the modulation voltage is 2.2-3 kv, the frequency is 50-60 HZ, and the speed of a five-axis displacement platform 8 is 5-15 mm/s; the temperature of the heating plate 7 is kept at 150 ℃; controlling a five-axis displacement platform 8 to translate to a preset position on an X-Y plane along a preset route through a computer control system 2, enabling liquid drops at a nozzle to drop on a supporting material of a substrate 5 under the action of an electric field, enabling a solvent in the liquid drops to volatilize and be solidified under the action of a heating plate 7, observing a real-time position nozzle of the nozzle relative to a next preprinting position through a CCD (charge coupled device) camera, adjusting the position of the nozzle, and printing a base layer 23 of all arrayed OLEDs according to preset setting;
(3) setting the same parameters, controlling a five-axis displacement platform 8 to move to a preset position along an X-Y axis inclination direction on a base layer 23 of an OLED (organic light emitting diode) through a computer control system 2, forming a drooping ink meniscus formed at the tip of a nozzle, accumulating mobile charges in a graphene modified conductive silver colloid solution near the surface of the meniscus under the action of voltage applied between the nozzle and a substrate 5 to form a conical meniscus shape, ejecting a fine liquid drop from the top of the conical meniscus to the substrate 5 under the action of a heating plate 7 to solidify solvent volatilization in the liquid drop when electrostatic force overcomes the pressure of a delivery pipe under the action of an electric field, observing a nozzle at a real-time position relative to the next preprinting position through a CCD (charge coupled device) camera, dropping a liquid drop again, observing the dropping position of the liquid drop through the CCD camera to adjust the dropping position of the next liquid drop, the island bridge structure 17 connected with the anode is printed by repeating the operation;
(4) taking down the substrate 5, and using a mask plate 24 to sequentially evaporate an HIT cave injection layer 22, an organic emitter layer 21, an ET electron transport layer 20 and a cathode layer 19 on the base layer 23 through thermal evaporation;
(5) after the evaporation is finished, the substrate 5 is placed back on the grounding conductive support 6, the five-axis displacement platform 8 is controlled to move to a preset position along the X-Y axis inclined direction through the computer control system 2 according to the same parameter setting, a drooping ink meniscus formed at the tip of the nozzle is formed, under the action of voltage applied between the nozzle and the substrate 5, moving charges in the graphene modified conductive silver colloid solution are accumulated near the surface of the meniscus to form a conical meniscus shape, under the action of an electric field, when electrostatic force overcomes the pressure of a material conveying pipe, a fine liquid drop is sprayed from the top end of the conical meniscus to the substrate 5, a solvent in the liquid drop is volatilized and solidified under the action of a heating plate 7, then a real-time position nozzle of the nozzle relative to the next preprinting position is observed through a CCD camera, the next liquid drop is dripped again, the dripping position of the liquid drop is observed through the CCD camera, the landing position of the next drop is adjusted, and the operation is repeated, so that the island bridge structure 18 connected with the OLED cathode layer 19 in the vertical direction is printed;
(6) and finally, taking down the printed island bridge type structure OLED array, and putting the island bridge type structure OLED array into water to fully dissolve the supporting material. And obtaining the high-precision large-stretching OLED array based on the island bridge structure.
The invention has the following remarkable effects: the method comprises the steps of applying a pulse high-voltage power supply, controlling the spraying frequency of single liquid drops by controlling the action time of single pulse voltage, adjusting the printing frequency, voltage, printing height and other process parameters, realizing accurate printing according to requirements, simultaneously combining the control of a printing platform, realizing accurate deposition of the liquid drops on a substrate and realizing 3D printing by point-by-point forming, thereby obtaining a high-precision and large-stretching island bridge structure, and finally obtaining the high-precision and large-stretching OLED array based on the island bridge structure through thermal evaporation.
Drawings
FIG. 1 is a schematic diagram of a method for manufacturing a high-precision large-stretching OLED array based on an island bridge structure.
Fig. 2 is a schematic view of the structure of the nozzle.
Fig. 3 is an overall schematic diagram of an array of island bridge structures.
Figure 4 is a detailed view of an island bridge structure.
FIG. 5 is a schematic diagram of thermal evaporation of an island bridge OLED array.
In the figure: 1, a high-voltage power supply; 2, a computer control system; 3 a flow pump; 4 liquid supply device; 5 a substrate; 6, grounding the conductive support; 7 heating the plate; 8, a five-axis displacement platform; 9 an infusion tube; 10 a nozzle; 11, mounting a groove; 12 protective sleeve of conveying pipeline; 13 a delivery pipeline; 14 a linker; 15 heating block; 16 a temperature measuring element; 17 an island bridge structure connecting the anodes; 18 an island bridge structure connecting the cathodes; 19 a cathode layer; 20ET electron transport layer; 21 an organic emitter layer; 22HIT cavern injection layer; 23 a base layer; 24 mask plate.
Detailed Description
The following further describes a specific embodiment of the present invention with reference to the drawings and technical solutions.
The invention relates to a method for manufacturing a high-precision large-stretching OLED array based on an island bridge structure, which is shown in a schematic diagram of a device 1 and comprises a liquid supply device 4, a flow pump 3, a substrate 5, a grounding conductive support 6, a heating plate 7, a five-axis displacement platform 8, a computer control system 2 and a high-voltage power supply 1. The anode of the high-voltage power supply 1 is connected with the nozzle 10 through a wire, the cathode of the high-voltage power supply is connected with the grounding conductive support 6 through a wire, and the substrate 5 is uniformly distributed on the grounding conductive support 6 through spin coating by adopting PDMS solution. The liquid supply device 4 is operated by the flow pump 3 at a certain speed and provides printing solution.
The method comprises the following specific steps:
example 1:
(1) first, a polyvinyl alcohol support material is injected into the liquid supply device 4 through the device of fig. 1, and the support material of the base layer 23 of the OLED shown in fig. 4 is printed on the substrate 5.
(2) Then, a 200-micron specification is selected for a nozzle, the height of the spray head is adjusted to keep the distance between the height of the spray head and the substrate 5 to be 500 microns, graphene modified conductive silver colloid solution is injected into the liquid supply device 4, wherein the content of graphene is 0.07%, and a flow pump is started to supply liquid at a given speed. And simultaneously starting the high-voltage power supply 1 to output pulse voltage, wherein the modulation voltage is 2.2kv, the frequency is 50HZ, and the speed of the displacement platform 8 is 5 mm/s. The temperature of the heating plate 7 is maintained at 150 ℃. Controlling a five-axis displacement platform to translate to a preset position on an X-Y plane along a preset route through a computer control system, enabling liquid drops at a nozzle to drop on a supporting material of the substrate 5 under the action of an electric field, enabling a solvent in the liquid drops to volatilize and be solidified under the action of a heating plate, observing a nozzle at a real-time position relative to a next preprinting position through a CCD camera, adjusting the position of the nozzle, and printing the base layer 23 of all the arrayed OLEDs according to preset setting;
(3) setting the same parameters on the OLED base layer 23 obtained in the step (2), controlling the five-axis displacement platform to move to a preset position along the X-Y axis inclination direction through the computer control system 2, enabling the drooping ink meniscus formed at the tip of the nozzle to accumulate moving charges in the graphene modified conductive silver colloid solution near the surface of the meniscus under the action of voltage applied between the nozzle and the substrate to form a conical meniscus shape, enabling an electrostatic force to overcome the pressure of a material conveying pipe under the action of an electric field, spraying a fine liquid drop from the top end of the conical meniscus to the substrate, enabling the solvent in the liquid drop to volatilize and solidify under the action of a heating plate, observing a real-time position nozzle of the nozzle relative to the next preprinting position through a CCD camera, dropping the liquid drop again, and observing the dropping position of the liquid drop through the CCD camera, so as to adjust the dropping position of the next drop, and repeatedly printing the island bridge structure 17 connected with the anode;
(4) the substrate 5 obtained in step (3) was removed, and the HIT hole injection layer 22, the organic emitter layer 21, the ET electron transport layer 20, and the cathode layer 19 shown in fig. 4 were sequentially deposited on the base layer 23 by thermal deposition using a mask 24 shown in fig. 5.
(5) Placing the substrate 5 after the evaporation in the step (4) back on the grounding conductive support 6 shown in the figure 1, controlling the five-axis displacement platform to move to a preset position along the X-Y axis inclination direction through the computer control system 2 according to the same parameter setting, forming a drooping ink meniscus formed at the tip of the nozzle, under the action of voltage applied between the nozzle and the substrate, accumulating mobile charges in the graphene modified conductive silver colloid solution near the surface of the meniscus to form a conical meniscus shape, ejecting a fine liquid drop from the top end of the conical meniscus to the substrate when electrostatic force overcomes the pressure of a material conveying pipe under the action of an electric field, solidifying the solvent in the liquid drop by volatilization under the action of a heating plate, observing the real-time position nozzle of the nozzle relative to the next preprinting position through a CCD camera, and dropping the next liquid drop again, observing the dropping position of the liquid drop through a CCD camera to adjust the dropping position of the next liquid drop, and repeatedly printing an island bridge type structure 18 which is connected with an OLED cathode layer 19 and is positioned in the vertical direction;
(6) and (5) finally taking down the printed island bridge type structure OLED array, and putting the island bridge type structure OLED array into water to fully dissolve the supporting material. And obtaining the high-precision large-stretching OLED array based on the island bridge structure.
Example 2:
(1) first, a polyvinyl alcohol support material is injected into the liquid supply device 4 through the device of fig. 1, and the support material of the base layer 23 of the OLED shown in fig. 4 is printed on the substrate 5.
(2) Then a 225 μm specification is selected for a nozzle, the height of the nozzle is adjusted to keep the distance between the height of the spray head and the substrate 5 to be 550 μm, graphene modified conductive silver colloid solution is injected into the liquid supply device 4, wherein the content of graphene is 0.07%, and a flow pump is started to supply liquid at a given speed. And simultaneously starting the high-voltage power supply 1 to output pulse voltage, wherein the modulation voltage is 2.6kv, the frequency is 55HZ, and the speed of the displacement platform 8 is 10 mm/s. The temperature of the heating plate 7 is maintained at 150 ℃. Controlling a five-axis displacement platform to translate to a preset position on an X-Y plane along a preset route through a computer control system, enabling liquid drops at a nozzle to drop on a supporting material of the substrate 5 under the action of an electric field, enabling a solvent in the liquid drops to volatilize and be solidified under the action of a heating plate, observing a nozzle at a real-time position relative to a next preprinting position through a CCD camera, adjusting the position of the nozzle, and printing the base layer 23 of all the arrayed OLEDs according to preset setting;
(3) setting the same parameters on the OLED base layer 23 obtained in the step (2), controlling the five-axis displacement platform to move to a preset position along the X-Y axis inclination direction through the computer control system 2, enabling the drooping ink meniscus formed at the tip of the nozzle to accumulate moving charges in the graphene modified conductive silver colloid solution near the surface of the meniscus under the action of voltage applied between the nozzle and the substrate to form a conical meniscus shape, enabling an electrostatic force to overcome the pressure of a material conveying pipe under the action of an electric field, spraying a fine liquid drop from the top end of the conical meniscus to the substrate, enabling the solvent in the liquid drop to volatilize and solidify under the action of a heating plate, observing a real-time position nozzle of the nozzle relative to the next preprinting position through a CCD camera, dropping the liquid drop again, and observing the dropping position of the liquid drop through the CCD camera, so as to adjust the dropping position of the next drop, and repeatedly printing the island bridge structure 17 connected with the anode;
(4) the substrate 5 obtained in step (3) was removed, and the HIT hole injection layer 22, the organic emitter layer 21, the ET electron transport layer 20, and the cathode layer 19 shown in fig. 4 were sequentially deposited on the base layer 23 by thermal deposition using a mask 24 shown in fig. 5.
(5) Placing the substrate 5 after the evaporation in the step (4) back on the grounding conductive support 6 shown in the figure 1, controlling the five-axis displacement platform to move to a preset position along the X-Y axis inclination direction through the computer control system 2 according to the same parameter setting, forming a drooping ink meniscus formed at the tip of the nozzle, under the action of voltage applied between the nozzle and the substrate, accumulating mobile charges in the graphene modified conductive silver colloid solution near the surface of the meniscus to form a conical meniscus shape, ejecting a fine liquid drop from the top end of the conical meniscus to the substrate when electrostatic force overcomes the pressure of a material conveying pipe under the action of an electric field, solidifying the solvent in the liquid drop by volatilization under the action of a heating plate, observing the real-time position nozzle of the nozzle relative to the next preprinting position through a CCD camera, and dropping the next liquid drop again, observing the dropping position of the liquid drop through a CCD camera to adjust the dropping position of the next liquid drop, and repeatedly printing an island bridge type structure 18 which is connected with an OLED cathode layer 19 and is positioned in the vertical direction;
(6) and (5) finally taking down the printed island bridge type structure OLED array, and putting the island bridge type structure OLED array into water to fully dissolve the supporting material. And obtaining the high-precision large-stretching OLED array based on the island bridge structure.
Example 3:
(1) first, a polyvinyl alcohol support material is injected into the liquid supply device 4 through the device of fig. 1, and the support material of the base layer 23 of the OLED shown in fig. 4 is printed on the substrate 5.
(2) Then a nozzle with the specification of 250 microns is selected, the height of the spray head is adjusted to keep the distance between the height of the spray head and the substrate 5 to be 600 microns, graphene modified conductive silver colloid solution is injected into the liquid supply device 4, wherein the content of graphene is 0.07%, and a flow pump is started to supply liquid at a given speed. And simultaneously starting the high-voltage power supply 1 to output pulse voltage, wherein the modulation voltage is 2.6kv, the frequency is 60HZ, and the speed of the displacement platform 8 is 15 mm/s. The temperature of the heating plate 7 is maintained at 150 ℃. Controlling a five-axis displacement platform to translate to a preset position on an X-Y plane along a preset route through a computer control system, enabling liquid drops at a nozzle to drop on a supporting material of the substrate 5 under the action of an electric field, enabling a solvent in the liquid drops to volatilize and be solidified under the action of a heating plate, observing a nozzle at a real-time position relative to a next preprinting position through a CCD camera, adjusting the position of the nozzle, and printing the base layer 23 of all the arrayed OLEDs according to preset setting;
(3) setting the same parameters on the OLED base layer 23 obtained in the step (2), controlling the five-axis displacement platform to move to a preset position along the X-Y axis inclination direction through the computer control system 2, enabling the drooping ink meniscus formed at the tip of the nozzle to accumulate moving charges in the graphene modified conductive silver colloid solution near the surface of the meniscus under the action of voltage applied between the nozzle and the substrate to form a conical meniscus shape, enabling an electrostatic force to overcome the pressure of a material conveying pipe under the action of an electric field, spraying a fine liquid drop from the top end of the conical meniscus to the substrate, enabling the solvent in the liquid drop to volatilize and solidify under the action of a heating plate, observing a real-time position nozzle of the nozzle relative to the next preprinting position through a CCD camera, dropping the liquid drop again, and observing the dropping position of the liquid drop through the CCD camera, so as to adjust the dropping position of the next drop, and repeatedly printing the island bridge structure 17 connected with the anode;
(4) the substrate 5 obtained in step (3) was removed, and the HIT hole injection layer 22, the organic emitter layer 21, the ET electron transport layer 20, and the cathode layer 19 shown in fig. 4 were sequentially deposited on the base layer 23 by thermal deposition using a mask 24 shown in fig. 5.
(5) Placing the substrate 5 after the evaporation in the step (4) back on the grounding conductive support 6 shown in the figure 1, controlling the five-axis displacement platform to move to a preset position along the X-Y axis inclination direction through the computer control system 2 according to the same parameter setting, forming a drooping ink meniscus formed at the tip of the nozzle, under the action of voltage applied between the nozzle and the substrate, accumulating mobile charges in the graphene modified conductive silver colloid solution near the surface of the meniscus to form a conical meniscus shape, ejecting a fine liquid drop from the top end of the conical meniscus to the substrate when electrostatic force overcomes the pressure of a material conveying pipe under the action of an electric field, solidifying the solvent in the liquid drop by volatilization under the action of a heating plate, observing the real-time position nozzle of the nozzle relative to the next preprinting position through a CCD camera, and dropping the next liquid drop again, observing the dropping position of the liquid drop through a CCD camera to adjust the dropping position of the next liquid drop, and repeatedly printing an island bridge type structure 18 which is connected with an OLED cathode layer 19 and is positioned in the vertical direction;
(6) and (5) finally taking down the printed island bridge type structure OLED array, and putting the island bridge type structure OLED array into water to fully dissolve the supporting material. And obtaining the high-precision large-stretching OLED array based on the island bridge structure.
According to the technical scheme, the manufacturing method of the high-precision large-stretching OLED array based on the island bridge structure can achieve the purpose that an electronic device is not deformed due to large stretching, can improve the processing precision, and can be widely applied to aspects of advanced human-computer interfaces, Internet of things (such as electronic products on skins) and the like.
Claims (2)
1. A manufacturing method of a high-precision large-stretching OLED array based on an island bridge structure is characterized in that the method is manufactured through a printing device of the high-precision large-stretching OLED array based on the island bridge structure, and the printing device comprises a liquid supply device (4), a flow pump (3), a substrate (5), a grounding conductive support (6), a heating plate (7), a five-axis displacement platform (8), a computer control system (2) and a high-voltage power supply (1);
the anode of the high-voltage power supply (1) is connected with the nozzle (10) through a lead, and the cathode of the high-voltage power supply is connected with the grounding conductive support (6) through a lead; the substrate (5) is uniformly distributed on the grounding conductive support (6) by adopting PDMS solution through spin coating; the grounding conductive support (6) is positioned on the heating plate (7), and the heating plate (7) is positioned on the five-axis displacement platform (8); the high-voltage power supply (1), the computer control system (2) and the five-axis displacement platform (8) are sequentially connected; the five-axis displacement platform (8) can realize the movement in the directions of an X axis, a Y axis and a Z axis and the inclined movement in the direction of the X-Y axis;
the liquid supply device (4) comprises a nozzle (10) and an infusion guide pipe (9), one end of the infusion guide pipe (9) is arranged on an installation groove (11) of the nozzle (10), and the other end of the infusion guide pipe is connected with the flow pump (3);
the nozzle (10) is characterized by mainly comprising a mounting groove (11), a conveying pipeline protective sleeve (12), a conveying pipeline (13), a connecting body (14), a heating block (15) and a temperature measuring element (16); the material conveying pipeline (13) is Y-shaped, and the inlet end of the material conveying pipeline is communicated with the mounting groove (11); the connecting body (14) and the heating block (15) are fixed into a whole, and the material conveying pipeline (13) is positioned in the connecting body (14) and the heating block (15); a material conveying pipeline protective sleeve (12) is sleeved outside the material conveying pipeline (13) in the connecting body (14); a temperature measuring element (16) is arranged on the side surface of the heating block (15);
the manufacturing method comprises the following specific steps:
(1) firstly, injecting a polyvinyl alcohol supporting material into a liquid supply device (4), and printing the supporting material of a base layer (23) of the OLED on a substrate (5);
(2) adjusting the height of the nozzle (10), keeping the distance between the height of the nozzle (10) and the substrate (5) to be 500-600 mu m, injecting a graphene modified conductive silver colloid solution into the liquid supply device (4), wherein the content of graphene is 0.07% of the graphene modified conductive silver colloid solution, and starting the flow pump (3) to supply liquid at a given speed; simultaneously starting a high-voltage power supply (1) to output pulse voltage, wherein the modulation voltage is 2.2-3 kv, the frequency is 50-60 HZ, and the speed of a five-axis displacement platform (8) is 5-15 mm/s; the temperature of the heating plate (7) is kept at 150 ℃; controlling a five-axis displacement platform (8) to translate to a preset position on an X-Y plane along a preset route through a computer control system (2), dropping liquid drops at a nozzle on a supporting material of a substrate (5) under the action of an electric field, volatilizing a solvent in the liquid drops to be solidified under the action of a heating plate (7), observing the real-time nozzle position of the nozzle relative to the next preprinting position through a CCD (charge coupled device) camera, adjusting the nozzle position, and printing all base layers (23) of the OLED array according to preset settings;
(3) setting the same parameters, controlling a five-axis displacement platform (8) to move to a preset position along the X-Y axis inclination direction on a base layer (23) of the OLED array obtained in the step (2) through a computer control system (2), forming a drooping ink meniscus at the tip of a nozzle, accumulating moving charges in the graphene modified conductive silver colloid solution near the surface of the meniscus under the action of voltage applied between the nozzle and a substrate (5) to form a conical meniscus shape, ejecting a small liquid drop from the top of the conical meniscus to the substrate (5) when electrostatic force overcomes the pressure of a material conveying pipeline (13) under the action of an electric field, solidifying the solvent in the liquid drop under the action of a heating plate (7), observing the real-time nozzle position of the nozzle relative to the next preprinting position through a CCD camera, and dropping the liquid drop again, observing the dropping position of the liquid drop through a CCD camera to adjust the dropping position of the next liquid drop, and repeatedly printing an island bridge structure (17) connected with the anode layer of the OLED array;
(4) taking down the substrate (5), and using a mask plate (24) to sequentially evaporate an HIT cave injection layer (22), an organic emitter layer (21), an ET electron transfer layer (20) and a cathode layer (19) on the base layer (23) through thermal evaporation;
(5) after the evaporation is finished, the substrate (5) is placed back on the grounding conductive support (6) and is set by the same parameters, a five-axis displacement platform (8) is controlled to move to a preset position along the X-Y axis inclined direction through a computer control system (2), a drooping ink meniscus is formed at the tip of a nozzle, under the action of voltage applied between the nozzle and the substrate (5), moving charges in the graphene modified conductive silver colloid solution are accumulated near the surface of the meniscus to form a conical meniscus shape, under the action of an electric field, when electrostatic force overcomes the pressure of a material conveying pipeline (13), a small liquid drop is sprayed from the top end of the conical meniscus to the substrate (5), the solvent in the liquid drop is volatilized to be solidified under the action of a heating plate (7), then a real-time nozzle position of the nozzle relative to the next preprinting position is observed through a CCD camera, and a next liquid drop is dripped again, observing the position of the drop by a CCD camera to adjust the drop position of the next drop, and repeatedly printing an island bridge structure (18) which is connected with a cathode layer (19) of the OLED array and is positioned in the vertical direction;
(6) finally, taking down the printed island bridge type structure OLED array, and putting the island bridge type structure OLED array into water to fully dissolve the supporting material; and obtaining the high-precision large-stretching OLED array based on the island bridge structure.
2. The method for manufacturing the high-precision large-stretching OLED array based on the island bridge structure is characterized in that the nozzle (10) is 200-250 μm in specification, and is externally connected with a CCD camera and positioned above the nozzle (10); the CCD camera monitors the real-time position of the nozzle relative to the preprinting position and the position of the drop landing, so that the nozzle can be accurately positioned at a more proper position, and the height of the nozzle (10) is adjusted to keep the distance between the height of the nozzle (10) and the substrate (5) to be 500-600 mu m.
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