CN106842555A - A kind of three-dimensional piezoelectric drives micro mirror adjusting means - Google Patents
A kind of three-dimensional piezoelectric drives micro mirror adjusting means Download PDFInfo
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- CN106842555A CN106842555A CN201710039976.3A CN201710039976A CN106842555A CN 106842555 A CN106842555 A CN 106842555A CN 201710039976 A CN201710039976 A CN 201710039976A CN 106842555 A CN106842555 A CN 106842555A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Micro mirror adjusting means, including coarse motion platform, X-direction displacement regulation platform, Y-direction displacement regulation platform, Z-direction displacement governor motion, pulley guide rails mechanism, piezoelectric membrane, flexible hinge are driven the invention discloses a kind of three-dimensional piezoelectric.Coarse motion platform, X-direction displacement regulation platform, Y-direction displacement regulation platform are superimposed by pulley guide rails mechanism, and Z-direction displacement governor motion is located on X-direction displacement regulation platform.After coarse motion platform positioning, to Y-direction piezoelectric membrane applied voltage, piezoelectric membrane makes beam with overhanging ends produce output displacement and reconcile platform by displacement amplifying mechanism promotion Y-direction displacement under inverse piezoelectric activity carries out Y-direction displacement regulation；Similarly, X-direction piezoelectric membrane promotes X-direction displacement to adjust platform and carries out X-direction displacement regulation；Z-direction piezoelectric membrane promotion Z-direction displacement governor motion carries out Z-direction displacement regulation.Three-dimensional piezoelectric of the invention drives micro mirror adjusting means simple and compact for structure, is capable of achieving multiple degrees of freedom regulation, fast response time, it is adaptable to various occasions.
Description
Technical field
The present invention relates to a kind of drive device, particularly a kind of three-dimensional piezoelectric drives micro mirror adjusting means.
Background technology
In recent years, MEMS (MEMS) is increasingly taken seriously in the application study of optical field.Its application is
Extend to the industry-by-industries such as medical science, military affairs.Because it has less inertia, thus it can be realized to be precisely located.Mesh
Before, MEMS has become the emphasis of countries in the world research.
Micro mirror is one of them typical representative, and existing many research institution's cameras propose different types of micro mirror recently
And its drive mechanism.But traditional micro mirror governor motion is typically using accurate lead screw pair and rolling guide, turbine-concave wheel mechanism
Etc. machine driving, there is friction, gap equal error, it is difficult to one-time positioning success.And also deposited for drive forms such as electric heating, electromagnetism
In defects such as adaptability deficiencies.Therefore, the micro mirror regulation dress that a kind of simple structure, miniaturization adapt to various occasions is badly in need of at present
Put, but prior art there is no associated description.
The content of the invention
Micro mirror adjusting means is driven it is an object of the invention to provide a kind of three-dimensional piezoelectric.
The technical solution for realizing the object of the invention is：A kind of three-dimensional piezoelectric drives micro mirror adjusting means, including coarse motion
Platform, Y-direction driving structure, Y-direction guide rail mechanism, Y-direction displacement regulation platform, Y-direction flexible hinge guiding mechanism, X-direction
Drive mechanism, X-direction guide rail mechanism, X-direction displacement regulation platform and X-direction flexible hinge guiding mechanism；
The Y-direction guide rail mechanism includes two guide rails, and two guide rails are symmetricly set on coarse motion platform Y-direction axis
Both sides；Y-direction flexible hinge guiding mechanism includes four flexure hinge mechanisms and is symmetrical in coarse motion platform Y-direction axis two-by-two；Y
Displacement regulation platform in direction is moved along the rail positioned at two tops of guide rail and in the Y direction under the driving of drive mechanism, the Y-direction
Drive mechanism includes two on the symmetrically arranged actuating mechanism in coarse motion platform Y-direction axis, and each actuating mechanism includes outstanding
Arm beam and two Y-direction piezoelectric membrane drivers for being fitted in cantilever beam upper and lower ends, wherein cantilever beam and corresponding Y-direction position
Move enlarger to be connected by hinge, the other end of Y-direction displacement amplifying mechanism is connected with Y-direction displacement regulation platform；
X-direction guide rail mechanism is set on Y-direction displacement regulation platform, the X-direction guide rail mechanism includes two guide rails, should
Two guide rails are symmetrical arranged the both sides of the regulation platform X-direction of displacement in the Y direction axis, and X-direction displacement regulation platform is located at two
The top of root guide rail simultaneously moves along the rail under the driving of X-direction drive mechanism, and the X-direction drive mechanism includes two on Y
The direction displacement regulation symmetrically arranged actuating mechanism in platform X-direction axis, each actuating mechanism includes cantilever beam and two
It is fitted in the X-direction piezoelectric membrane driver of cantilever beam upper and lower ends, wherein cantilever beam and corresponding X-direction displacement amplifying mechanism
It is connected by hinge, the other end of X-direction displacement amplifying mechanism is connected with X-direction displacement regulation platform；
Under applied voltage effect, the X-direction piezoelectric membrane driver on Y-direction displacement regulation platform is imitated due to inverse piezoelectricity
Power output should be produced makes cantilever beam produce output displacement, then realizes that the displacement of X-direction is adjusted by X-direction displacement amplifying mechanism
Section；Y-direction piezoelectric membrane driver generation power output on coarse motion platform makes cantilever beam produce output displacement, then by Y-direction
Displacement of the displacement amplifying mechanism to realize Y-direction is adjusted.
Z-direction displacement governor motion is set on X-direction displacement regulation platform, and wherein Z-direction displacement governor motion includes branch
Frame and Z-direction drive mechanism, the Z-direction drive mechanism are symmetrical on X-direction displacement regulation platform Y-direction axis including two
The actuating mechanism of setting, each actuating mechanism is fitted in cantilever beam upper and lower ends and on coarse motion platform including cantilever beam and two
Y-direction axis Z-direction piezoelectric membrane driver symmetrical two-by-two, Z-direction displacement governor motion top sets micro mirror；Z-direction
Displacement governor motion realizes the displacement regulation on vertical direction by Z-direction piezoelectric membrane driver.
Compared with prior art, its remarkable advantage is the present invention：Three-dimensional piezoelectric of the invention drives micro mirror adjusting means profit
The driving force produced with the inverse piezoelectric effect of piezoelectric membrane is capable of achieving big displacement regulation as driving source.And mechanism is simply tight
Gather.Meanwhile, the device can realize that multiple degrees of freedom is adjusted, and fast response time is capable of achieving the application of various occasions.
The present invention is described in further detail below in conjunction with the accompanying drawings.
Brief description of the drawings
Fig. 1 is that three-dimensional piezoelectric drives micro mirror adjusting means figure.
Fig. 2 is that three-dimensional piezoelectric drives micro mirror adjusting means floor map.
Fig. 3 is pulley guide rails mechanism.
Fig. 4 is Z-direction drive mechanism side view.
Fig. 5 is Z-direction drive mechanism front view.
Implication in figure representated by label is：1. coarse motion platform, 2.Y traversing guides mechanism, 3.Y directions displacement regulation platform,
4.X traversing guides mechanism, 5.Y directions flexible hinge guiding mechanism, 6.Y directions displacement amplifying mechanism, 7.X directions flexible hinge is led
To mechanism, 8.Y directions piezoelectric membrane driver, 9.X directions piezoelectric membrane driver, 10.X directions displacement amplifying mechanism, 11.X
Direction displacement regulation platform, 12. micro mirrors, 13.Z directions displacement regulation platform, 14.Z directions piezoelectric membrane driver, 15. supports.
Specific embodiment
With reference to accompanying drawing, a kind of three-dimensional piezoelectric of the invention drives micro mirror adjusting means, including coarse motion platform 1, Y-direction to drive knot
Structure, Y-direction guide rail mechanism 2, Y-direction displacement regulation platform 3, Y-direction flexible hinge guiding mechanism 5, X-direction drive mechanism, X side
Guide rail mechanism 4, X-direction displacement regulation platform 11 and X-direction flexible hinge guiding mechanism 7；
The Y-direction guide rail mechanism 2 includes two guide rails, and two guide rails are symmetricly set on coarse motion platform 1Y directions axis
Both sides；Y-direction flexible hinge guiding mechanism 5 includes four flexure hinge mechanisms and is symmetrical in coarse motion platform 1Y directions axis two-by-two
Line；Y-direction displacement regulation platform 3 is moved along the rail positioned at two tops of guide rail and in the Y direction under the driving of drive mechanism, should
Y-direction drive mechanism includes two on the symmetrically arranged actuating mechanism in coarse motion platform 1Y directions axis, and each actuating mechanism is equal
Be fitted in the Y-direction piezoelectric membrane driver 8 of cantilever beam upper and lower ends including cantilever beam and two, wherein cantilever beam with it is corresponding
Y-direction displacement amplifying mechanism 6 is connected by hinge, and the other end and the Y-direction displacement of Y-direction displacement amplifying mechanism 6 adjust platform 3
It is connected；
X-direction guide rail mechanism 4 is set on Y-direction displacement regulation platform 3, the X-direction guide rail mechanism 4 is led including two
Rail, two guide rails are symmetrical arranged the both sides that displacement in the Y direction adjusts platform 3X directions axis, X-direction displacement regulation platform
11 are located at two tops of guide rail and are moved along the rail under the driving of X-direction drive mechanism, and the X-direction drive mechanism includes two
Individual to adjust the symmetrically arranged actuating mechanism in platform 3X directions axis on Y-direction displacement, each actuating mechanism includes cantilever
Beam and two X-direction piezoelectric membrane drivers 9 for being fitted in cantilever beam upper and lower ends, wherein cantilever beam and corresponding X-direction position
Move enlarger 10 to be connected by hinge, the other end and the X-direction displacement of X-direction displacement amplifying mechanism 10 adjust the phase of platform 11
Even；
Under applied voltage effect, the X-direction piezoelectric membrane driver 9 on Y-direction displacement regulation platform 3 is due to inverse piezoelectricity
Effect generation power output makes cantilever beam produce output displacement, and the position of X-direction is then realized by X-direction displacement amplifying mechanism 10
Transposition section；The generation of Y-direction piezoelectric membrane driver 8 power output on coarse motion platform 1 makes cantilever beam produce output displacement, then passes through
Displacement of the Y-direction displacement amplifying mechanism 6 to realize Y-direction is adjusted.
Z-direction displacement governor motion 13, wherein Z-direction displacement regulation machine are set on the X-direction displacement regulation platform 11
Structure 13 includes support 15 and Z-direction drive mechanism, and the Z-direction drive mechanism includes two on X-direction displacement regulation platform 11Y
The symmetrically arranged actuating mechanism in direction axis, each actuating mechanism is fitted in cantilever beam upper and lower two including cantilever beam and two
Hold and on coarse motion platform 1Y directions axis Z-direction piezoelectric membrane driver 14 symmetrical two-by-two, Z-direction displacement governor motion 13
Top sets micro mirror 12；Z-direction displacement governor motion 13 is realized on vertical direction by Z-direction piezoelectric membrane driver 14
Displacement is adjusted.
The X-direction piezoelectric membrane driver 9, Y-direction piezoelectric membrane driver 8, Z-direction piezoelectric membrane driver 14 are equal
Using the laminated cantilever beam of piezoelectric membrane come applied voltage produces driving force.
Fixed frame, Y-direction flexible hinge guiding mechanism 5, Y-direction displacement amplifying mechanism 6 and Y are set on the coarse motion platform 1
The actuating mechanism of direction drive mechanism is hinged on the fixed frame.
Fixed frame is set on the Y-direction displacement regulation platform 3, X-direction flexible hinge guiding mechanism 7, X-direction displacement is put
The actuating mechanism of great institutions 10 and X-direction drive mechanism is hinged on the fixed frame.
Three-dimensional piezoelectric of the invention drives the driving force that micro mirror adjusting means is produced using the inverse piezoelectric effect of piezoelectric membrane
As driving source, big displacement regulation is capable of achieving.
Further detailed description is done to the present invention with reference to embodiment.
Embodiment
With reference to Fig. 1, a kind of three-dimensional piezoelectric of the invention drives micro mirror adjusting means, including X-direction displacement regulation platform, Y
Direction displacement regulation platform, Z-direction displacement governor motion, X-direction piezoelectric membrane driver, Y-direction piezoelectric membrane driver, Z
Direction piezoelectric membrane driver, micro mirror etc..X-direction displacement regulation includes X-direction displacement amplifying mechanism 10, X-direction flexible hinge
Guiding mechanism 7, X-direction displacement adjust platform 11, adjust the symmetrically arranged X side in platform 3X directions axis on Y-direction displacement
To piezoelectric membrane driver 9.Y-direction displacement regulation include Y-direction displacement amplifying mechanism 6, Y-direction flexible hinge guiding mechanism 5,
Y-direction displacement regulation platform 3, on the symmetrically arranged Y-direction piezoelectric membrane driver 8 in coarse motion platform 1Y directions axis.Z-direction
Displacement regulation include Z-direction displacement governor motion 13 and four are fitted in cantilever beam upper and lower ends and on coarse motion platform Y side
To axis Z-direction piezoelectric membrane driver 14 symmetrical two-by-two.
Coarse motion platform, X-direction displacement regulation platform and Y-direction displacement regulation platform are mutually folded by linear pulley guide rails two-by-two
It is added together, pulley guide rails are used as guiding mechanism, and pulley guide rails guiding mechanism is as shown in Figure 3.X, Y drive mechanism are put by displacement
Great institutions connect displacement platform.Micro mirror is placed in Z-direction piezoelectric membrane driver top in Z-direction displacement governor motion, by Z side
Micro mirror is controlled to be adjusted in the displacement of Z-direction to the driving force of piezoelectric membrane driver generation.
X-direction piezoelectric membrane driver 9 is under voltage effect because inverse piezoelectric effect produces driving force is applied to cantilever beam
Upper generation drive displacement is simultaneously applied to X-direction displacement amplifying mechanism 10, and X-direction displacement amplifying mechanism 10 is mobile in X direction to promote X
Direction displacement regulation platform 11, X-direction displacement regulation platform 11 is moved in X direction in pulley guide rails.
Y-direction piezoelectric membrane driver 8 is under voltage effect because inverse piezoelectric effect produces driving force is applied to cantilever beam
Upper generation drive displacement simultaneously applies displacement amplifying mechanism 6 in the Y direction, and Y-direction displacement amplifying mechanism 6 promotes Y side along Y-direction movement
Platform 3 is adjusted to displacement, Y-direction displacement adjusts platform 3 and moved along Y-direction in pulley guide rails.
With reference to Fig. 4, Fig. 5, in Z-direction displacement governor motion 13, micro mirror 12 is fixed on the upper of Z-direction piezoelectric membrane driver
Side, the bottom of Z-direction displacement governor motion 13 is fixed on X-direction displacement platform 3 by support 15.
After the displacement regulation in the direction of X, Y two, Z-direction piezoelectric membrane driver 14 is under voltage effect due to inverse piezoelectricity effect
Answer produces driving force and control the displacement of micro mirror in the vertical direction to adjust with this.
In a word, X, Y, Z-direction piezoelectric membrane driver are passed through because inverse piezoelectric effect produces drive displacement under voltage effect
The regulation of the Three Degree Of Freedom of micro mirror is realized under enlarger effect.
Claims (5)
1. a kind of three-dimensional piezoelectric drives micro mirror adjusting means, it is characterised in that including coarse motion platform [1], Y-direction driving structure, Y side
Guide rail mechanism [2], Y-direction displacement adjust platform [3], Y-direction flexible hinge guiding mechanism [5], X-direction drive mechanism, X side
Guide rail mechanism [4], X-direction displacement adjust platform [11] and X-direction flexible hinge guiding mechanism [7]；
The Y-direction guide rail mechanism [2] includes two guide rails, and two guide rails are symmetricly set on coarse motion platform [1] Y-direction axis
Both sides；Y-direction flexible hinge guiding mechanism [5] is including four flexure hinge mechanisms and is symmetrical in coarse motion platform [1] Y-direction two-by-two
Axis；Y-direction displacement adjusts platform [3] under two tops of guide rail and the in the Y direction driving of drive mechanism along guide rail
Motion, the Y-direction drive mechanism includes two on the symmetrically arranged actuating mechanism in coarse motion platform [1] Y-direction axis, each cause
Motivation structure includes cantilever beam and two Y-direction piezoelectric membranes driver [8] for being fitted in cantilever beam upper and lower ends, wherein cantilever
Beam is connected with corresponding Y-direction displacement amplifying mechanism [6] by hinge, the other end and the Y side of Y-direction displacement amplifying mechanism [6]
Platform [3] is adjusted to displacement to be connected；
Y-direction displacement is adjusted and X-direction guide rail mechanism [4] is set on platform [3], and the X-direction guide rail mechanism [4] is led including two
Rail, two guide rails are symmetrical arranged the both sides that displacement in the Y direction adjusts platform [3] X-direction axis, and X-direction displacement regulation is flat
Platform [11] is moved along the rail positioned at two tops of guide rail and under the driving of X-direction drive mechanism, the X-direction drive mechanism bag
Include two and adjust the symmetrically arranged actuating mechanism in platform [3] X-direction axis on Y-direction displacement, each actuating mechanism is wrapped
Include cantilever beam and two X-direction piezoelectric membranes driver [9] for being fitted in cantilever beam upper and lower ends, wherein cantilever beam with it is corresponding
X-direction displacement amplifying mechanism [10] is connected by hinge, and the other end and the X-direction displacement of X-direction displacement amplifying mechanism [10] are adjusted
Section platform [11] is connected；
Under applied voltage effect, X-direction piezoelectric membrane driver [9] in Y-direction displacement regulation platform [3] is due to inverse piezoelectricity
Effect generation power output makes cantilever beam produce output displacement, then realizes X-direction by X-direction displacement amplifying mechanism [10]
Displacement is adjusted；Y-direction piezoelectric membrane driver [8] generation power output on coarse motion platform [1] makes cantilever beam produce output displacement, so
The displacement regulation of Y-direction is realized by Y-direction displacement amplifying mechanism [6] afterwards.
2. three-dimensional piezoelectric according to claim 1 drives micro mirror adjusting means, it is characterised in that X-direction displacement regulation is flat
Z-direction displacement governor motion [13] is set on platform [11], and wherein Z-direction displacement governor motion [13] includes support [15] and Z side
To drive mechanism, the Z-direction drive mechanism includes that two symmetrically set on X-direction displacement regulation platform [11] Y-direction axis
The actuating mechanism put, each actuating mechanism is fitted in cantilever beam upper and lower ends and on coarse motion platform including cantilever beam and two
[1] Y-direction axis Z-direction piezoelectric membrane driver [14] symmetrical two-by-two, Z-direction displacement governor motion [13] top is set
Micro mirror [12]；Z-direction displacement governor motion [13] realizes the position on vertical direction by Z-direction piezoelectric membrane driver [14]
Transposition section.
3. the three-dimensional piezoelectric according to right 1 drives micro mirror adjusting means, it is characterised in that X-direction piezoelectric membrane driver
[9], Y-direction piezoelectric membrane driver [8], Z-direction piezoelectric membrane driver [14] using the laminated cantilever beam of piezoelectric membrane come
Applied voltage produces driving force.
4. the three-dimensional piezoelectric according to right 1 drives micro mirror adjusting means, it is characterised in that is set on coarse motion platform [1] and fixed
Frame, the actuating mechanism of Y-direction flexible hinge guiding mechanism [5], Y-direction displacement amplifying mechanism [6] and Y-direction drive mechanism cuts with scissors
It is connected on the fixed frame.
5. the three-dimensional piezoelectric according to right 1 drives micro mirror adjusting means, it is characterised in that Y-direction displacement adjusts platform [3]
Upper setting fixed frame, X-direction flexible hinge guiding mechanism [7], X-direction displacement amplifying mechanism [10] and X-direction drive mechanism
Actuating mechanism is hinged on the fixed frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710039976.3A CN106842555B (en) | 2017-01-18 | 2017-01-18 | A kind of three-dimensional piezoelectric driving micro mirror regulating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710039976.3A CN106842555B (en) | 2017-01-18 | 2017-01-18 | A kind of three-dimensional piezoelectric driving micro mirror regulating device |
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| Publication Number | Publication Date |
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| CN106842555A true CN106842555A (en) | 2017-06-13 |
| CN106842555B CN106842555B (en) | 2019-06-25 |
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| CN201710039976.3A Active CN106842555B (en) | 2017-01-18 | 2017-01-18 | A kind of three-dimensional piezoelectric driving micro mirror regulating device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112578553A (en) * | 2020-12-15 | 2021-03-30 | 南通速图科技有限公司 | Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403997A (en) * | 2015-11-19 | 2016-03-16 | 苏州工业园区纳米产业技术研究院有限公司 | Piezoelectric driving two-dimensional scanning micro-mirror |
| CN105563465A (en) * | 2016-01-28 | 2016-05-11 | 南京理工大学 | Photoelectric-static compound driving micro platform device |
| CN106066536A (en) * | 2016-06-28 | 2016-11-02 | 南京理工大学 | A kind of micro mirror fine regulating device of photoelectricity piezoelectricity electrostatic drive |
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2017
- 2017-01-18 CN CN201710039976.3A patent/CN106842555B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403997A (en) * | 2015-11-19 | 2016-03-16 | 苏州工业园区纳米产业技术研究院有限公司 | Piezoelectric driving two-dimensional scanning micro-mirror |
| CN105563465A (en) * | 2016-01-28 | 2016-05-11 | 南京理工大学 | Photoelectric-static compound driving micro platform device |
| CN106066536A (en) * | 2016-06-28 | 2016-11-02 | 南京理工大学 | A kind of micro mirror fine regulating device of photoelectricity piezoelectricity electrostatic drive |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112578553A (en) * | 2020-12-15 | 2021-03-30 | 南通速图科技有限公司 | Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror |
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