CN103487934A - Micro-mirror fine adjusting device driven by photoelectric ceramic - Google Patents
Micro-mirror fine adjusting device driven by photoelectric ceramic Download PDFInfo
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- CN103487934A CN103487934A CN201310442565.0A CN201310442565A CN103487934A CN 103487934 A CN103487934 A CN 103487934A CN 201310442565 A CN201310442565 A CN 201310442565A CN 103487934 A CN103487934 A CN 103487934A
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Abstract
The invention discloses a micro-mirror fine adjusting device driven by photoelectric ceramic. The micro-mirror fine adjusting device comprises a coarse moving table, an X-direction displacement fine adjusting mechanism, a Y-direction displacement fine adjusting mechanism, a pitching adjusting mechanism and a reflector. The coarse moving table, an X-direction displacement fine adjusting platform and a Y-direction displacement fine adjusting platform are overlapped together, the reflector pitching adjusting mechanism is located on the X-direction displacement fine adjusting platform, a Y-direction photoelectric ceramic actuator is irradiated by an ultraviolet source to produce driving force, and the Y-direction displacement fine adjusting platform is pushed by a displacement amplification mechanism to conduct fine adjustment in the Y direction; in the same way, the X-direction displacement fine adjusting platform is pushed by an X-direction photoelectric ceramic actuator to conduct fine adjustment in the X direction, wherein a rolling guide rail is used as a guide mechanism. A Photoelectric ceramic pitch actuator is irradiated by the ultraviolet source to produce driving force, and the reflector is pushed by a triangular amplifying mechanism to rotate in a pitching mode. The micro-mirror fine adjusting device driven by the photoelectric ceramic is simple and compact in structure, and capable of achieving light-operated non-contact control and avoiding electromagnetic interference.
Description
Technical field
The present invention relates to a kind of micro mirror fine adjustment drive unit, the micro mirror fine regulating device that particularly a kind of photoelectric ceramics drives.
Background technology
Micro mirror is widely used in national defence and the civil areas such as optical system, micro-mechanical-optical switch, precision measurement, imaging of medical, biotechnology and Aero-Space.In recent years, by micro mirror being equipped with to the drive unit of difference in functionality, can realize the modulation of incident intensity and phase place and the gating of light path, make micro mirror there is the functions such as photoswitch, adaptive optics correction.Traditional micro mirror worktable employing accurate lead screw pair and rolling guide, accurate spiral cotter mechanism, turbine-recessed wheel mechanism, gear-mechanical transmission-types such as lever mechanism drive, due to mechanical friction, gap, the reason such as creep, be difficult to the success of disposable location, often need to carry out fine adjustment.For Piezoelectric Driving, Electromagnetic Drive, electrothermal drive and quiet electrically driven (operated) micro mirror fine adjustment mechanism, need wire to connect, be vulnerable to electromagnetic noise interference.Under vacuum or specific operation environment, we can't control by direct control, need a kind of Contactless controlling device, but there is no associated description in prior art.
Summary of the invention
The micro mirror fine regulating device that the object of the present invention is to provide a kind of photoelectric ceramics to drive.
The technical solution that realizes the object of the invention is: the micro mirror fine regulating device that a kind of photoelectric ceramics drives comprises directions X displacement fine adjustment platform, pitching adjusting mechanism, Y-direction displacement fine adjustment platform, coarse motion platform, directions X photoelectric ceramics actuator, directions X displacement amplifying mechanism, Y-direction displacement amplifying mechanism, Y-direction photoelectric ceramics actuator, rolling guide, triangle enlarger, photoelectric ceramics pitch actuators, pitch actuators baffle plate, Y-direction actuator baffle plate and directions X actuator baffle plate;
Y-direction displacement fine adjustment platform wherein, Y-direction displacement amplifying mechanism and Y-direction photoelectric ceramics actuator all are arranged on the coarse motion platform, between Y-direction displacement fine adjustment platform and coarse motion platform, rolling guide is set, Y-direction displacement fine adjustment platform is connected by flexible hinge with the Y-direction displacement amplifying mechanism, the Y-direction displacement amplifying mechanism promotes Y-direction displacement fine adjustment platform by flexible hinge and moves on rolling guide, the Y-direction displacement amplifying mechanism is connected with Y-direction photoelectric ceramics actuator, the Y-direction displacement amplifying mechanism is amplified the drive displacement of Y-direction photoelectric ceramics actuator,
Y-direction displacement fine adjustment platform top arranges directions X displacement fine adjustment platform, directions X photoelectric ceramics actuator and directions X displacement amplifying mechanism, between Y-direction displacement fine adjustment platform and directions X displacement fine adjustment platform, rolling guide is set, the directions X displacement amplifying mechanism is connected by flexible hinge with directions X displacement fine adjustment platform, the directions X displacement amplifying mechanism promotes directions X displacement fine adjustment platform by flexible hinge and moves on rolling guide, the directions X displacement amplifying mechanism is connected with directions X photoelectric ceramics actuator, the directions X displacement amplifying mechanism is amplified the drive displacement of directions X photoelectric ceramics actuator, on directions X displacement fine adjustment platform, pitching adjusting mechanism is set.
Pitching adjusting mechanism comprises triangle enlarger, catoptron, photoelectric ceramics pitch actuators and pitch actuators baffle plate, mirror support is fixed on directions X displacement fine adjustment platform, turning axle is set on mirror support, catoptron can rotate on turning axle, described turning axle is parallel with directions X displacement fine adjustment platform, triangle enlarger one end is connected with directions X displacement fine adjustment platform by flexible hinge, the other end of triangle enlarger is connected with catoptron by flexible hinge, photoelectric ceramics pitch actuators one end is connected with the triangle enlarger, the other end of photoelectric ceramics pitch actuators is connected mutually with the pitch actuators baffle plate, described pitch actuators baffle plate is fixed on directions X displacement fine adjustment platform.
Also comprise Y-direction actuator baffle plate and directions X actuator baffle plate, wherein Y-direction actuator baffle plate is fixed on the coarse motion platform and with Y-direction photoelectric ceramics actuator and is connected, and directions X actuator baffle plate is fixed on Y-direction displacement fine adjustment platform and with directions X photoelectric ceramics actuator and is connected.
The material of described directions X photoelectric ceramics actuator, Y-direction photoelectric ceramics actuator and photoelectric ceramics pitch actuators is lanthanum modification lead zirconate titanate.
The present invention compared with prior art, its remarkable advantage is: the micro mirror fine regulating device that photoelectric ceramics of the present invention drives utilizes the photo-deformable effect of photoelectric ceramics, make luminous energy be converted into mechanical energy, cancelled the intermediate mechanical transmission link, make simple and compact for structure.Simultaneously, the drive source of this device is ultraviolet light, can realize light-operated contactless operation, has avoided electromagnetic noise interference, is applicable to various media environment work.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
The accompanying drawing explanation
Fig. 1 is the micro mirror fine regulating device schematic diagram that photoelectric ceramics drives.
Fig. 2 is the rolling guide side schematic view.
Fig. 3 is the pitching adjusting mechanism schematic diagram.
The implication of number in the figure representative is: 1.X direction displacement fine adjustment platform, 2. pitching adjusting mechanism, 3.Y direction displacement fine adjustment platform, 4. coarse motion platform, 5.X direction photoelectric ceramics actuator, 6.X direction displacement amplifying mechanism, 7.Y the direction displacement amplifying mechanism, 8.Y direction photoelectric ceramics actuator, 9. rolling guide, 10. triangle enlarger, 11. catoptron, 12. pitching photoelectric ceramics actuators, 13. pitch actuators baffle plates, 14. Y-direction actuator baffle plate, 15. directions X actuator baffle plates.
Embodiment
In conjunction with Fig. 1, the micro mirror fine regulating device that a kind of photoelectric ceramics of the present invention drives, comprise directions X displacement fine adjustment platform 1, pitching adjusting mechanism 2, Y-direction displacement fine adjustment platform 3, coarse motion platform 4, directions X photoelectric ceramics actuator 5, directions X displacement amplifying mechanism 6, Y-direction displacement amplifying mechanism 7, Y-direction photoelectric ceramics actuator 8 and rolling guide;
Wherein Y-direction displacement fine adjustment platform 3, Y-direction displacement amplifying mechanism 7 and Y-direction photoelectric ceramics actuator 8 all are arranged on coarse motion platform 4, between Y-direction displacement fine adjustment platform 3 and coarse motion platform 4, rolling guide is set, Y-direction displacement fine adjustment platform 3 is connected by flexible hinge with Y-direction displacement amplifying mechanism 7, Y-direction displacement amplifying mechanism 7 promotes Y-direction displacement fine adjustment platform 3 by flexible hinge and moves on rolling guide, Y-direction displacement amplifying mechanism 7 is connected with Y-direction photoelectric ceramics actuator 8, the drive displacement of 7 pairs of Y-direction photoelectric ceramics actuators 8 of Y-direction displacement amplifying mechanism is amplified,
Y-direction displacement fine adjustment platform 3 tops arrange directions X displacement fine adjustment platform 1, directions X photoelectric ceramics actuator 5 and directions X displacement amplifying mechanism 6, between Y-direction displacement fine adjustment platform 3 and directions X displacement fine adjustment platform 1, rolling guide is set, directions X displacement amplifying mechanism 6 is connected by flexible hinge with directions X displacement fine adjustment platform 1, directions X displacement amplifying mechanism 6 promotes directions X displacement fine adjustment platform 1 by flexible hinge and moves on rolling guide, directions X displacement amplifying mechanism 6 is connected with directions X photoelectric ceramics actuator 5, the drive displacement of 6 pairs of directions X photoelectric ceramics actuators 5 of directions X displacement amplifying mechanism is amplified, on directions X displacement fine adjustment platform 1, pitching adjusting mechanism 2 is set.
Described pitching adjusting mechanism 2 comprises triangle enlarger 10, catoptron 11, photoelectric ceramics pitch actuators 12 and pitch actuators baffle plate 13, mirror support is fixed on directions X displacement fine adjustment platform 1, turning axle is set on mirror support, catoptron 11 can rotate on turning axle, described turning axle is parallel with directions X displacement fine adjustment platform 1, triangle enlarger 10 1 ends are connected with directions X displacement fine adjustment platform 1 by flexible hinge, the other end of triangle enlarger 10 is connected with catoptron 11 by flexible hinge, photoelectric ceramics pitch actuators 12 1 ends are connected with triangle enlarger 10, the other end of photoelectric ceramics pitch actuators 12 is connected mutually with pitch actuators baffle plate 13, described pitch actuators baffle plate 13 is fixed on directions X displacement fine adjustment platform 1.
The micro mirror fine regulating device that photoelectric ceramics of the present invention drives also comprises Y-direction actuator baffle plate 14 and directions X actuator baffle plate 15, wherein Y-direction actuator baffle plate 14 is fixed on coarse motion platform 4 and with Y-direction photoelectric ceramics actuator 8 and is connected, and directions X actuator baffle plate 15 is fixed on Y-direction displacement fine adjustment platform 3 and with directions X photoelectric ceramics actuator 5 and is connected.
The material of described directions X photoelectric ceramics actuator 5, Y-direction photoelectric ceramics actuator 8 and photoelectric ceramics pitch actuators 12 is lanthanum modification lead zirconate titanate.
The micro mirror fine regulating device that photoelectric ceramics of the present invention drives is applicable to micro mirror wireless connections and contactless long-range light-operated field, is particularly useful for being subject to the micro mirror fine adjustment mechanism of electromagnetic interference (EMI).
Below be specifically described:
The micro mirror fine regulating device that a kind of photoelectric ceramics of the present invention drives, comprise coarse motion platform, directions X displacement fine adjustment mechanism, Y-direction displacement fine adjustment mechanism, pitching adjusting mechanism, catoptron, rolling guide, photoelectric ceramics actuator, coarse motion platform, directions X displacement fine adjustment platform and Y-direction displacement fine adjustment platform are superimposed mutually, rolling guide is arranged as guiding mechanism between platform, pitching adjusting mechanism is positioned on directions X displacement fine adjustment platform.After the coarse motion platform carries out just locating to micro mirror, directions X photoelectric ceramics actuator and Y-direction photoelectric ceramics actuator output drive strength under the irradiation of ultraviolet source, amplify by flexible hinge and displacement amplifying mechanism, realizes the displacement fine adjustment of micro mirror X, Y two directions.Pitching adjusting mechanism, under pitching photoelectric ceramics actuator drives, by flexible hinge and triangle enlarger, promotes catoptron and rotates, and realizes the angle fine adjustment of micro mirror.
In conjunction with Fig. 1, the micro mirror fine regulating device that a kind of photoelectric ceramics of the present invention drives, comprise directions X displacement fine adjustment mechanism, Y-direction displacement fine adjustment mechanism, pitching adjusting mechanism, coarse motion platform etc.Directions X displacement fine adjustment mechanism comprises directions X photoelectric ceramics actuator 5, directions X displacement amplifying mechanism 6, directions X displacement fine adjustment platform 1 and directions X actuator baffle plate 15; Y-direction displacement fine adjustment mechanism comprises Y-direction photoelectric ceramics actuator 8, Y-direction displacement amplifying mechanism 7, Y-direction displacement fine adjustment platform 3 and Y-direction actuator baffle plate 14; Pitching adjusting mechanism 2 comprises pitching photoelectric ceramics actuator 12, triangle enlarger 10, catoptron 11 and pitch actuators baffle plate 13.
Y-direction photoelectric ceramics actuator 8 issues the third contact of a total solar or lunar eclipse in the irradiation of ultraviolet source and causes deformation, produce driving force, and act on Y-direction displacement amplifying mechanism 7, Y-direction displacement amplifying mechanism 7 is made by flexible hinge, promote Y-direction displacement fine adjustment platform 3 under the driving effect of Y-direction photoelectric ceramics actuator 8, Y-direction displacement fine adjustment platform 3 moves along Y-direction on rolling guide.
Directions X photoelectric ceramics actuator 5 issues the third contact of a total solar or lunar eclipse at ultraviolet source irradiation and causes deformation, produce driving force, and act on directions X displacement amplifying mechanism 6, driving force promotes directions X displacement platform 1 after directions X displacement amplifying mechanism 6 amplifies, and directions X displacement fine adjustment platform 1 moves along directions X on rolling guide.
Directions X displacement amplifying mechanism 6 and Y-direction displacement amplifying mechanism 7 all carry out the displacement amplification with lever amplifying mechanism, and lever amplifying mechanism adopts the two-stage displacement to amplify, and output terminal is connected and is flexible hinge with input end.
In conjunction with Fig. 3, in pitching adjusting mechanism 2, an end of triangle enlarger 10 is connected with catoptron 11 by flexible hinge, and the other end is fixed on directions X displacement platform 1 by flexible hinge, and intermediate ends is connected with pitching photoelectric ceramics actuator 12.Catoptron is fixed by the bracing frame on directions X displacement platform 1.
After the displacement fine setting of X, Y two directions, pitching photoelectric ceramics actuator 12 produces driving force under ultraviolet source irradiation, after the triangle enlarger amplifies, acts on catoptron, promotes the catoptron rotation, realizes the pitch regulation of catoptron.Photoelectric ceramics pitch actuators 12 is controlled catoptron 11 by triangle enlarger 10 and is rotated.
As from the foregoing, the photoelectric ceramics actuator of X, Y-direction and pitching produces driving force under light source irradiation, promotes the fine adjustment that micro mirror is realized Three Degree Of Freedom under the effect of displacement amplifying mechanism.Wherein, directions X photoelectric ceramics actuator 5, Y-direction photoelectric ceramics actuator 8 and photoelectric ceramics pitch actuators 12 all drive with ultraviolet source irradiation, realize connecting without wire.And the photoelectric ceramics actuator of being made by photo-deformable material lanthanum modification lead zirconate titanate (PLZT) pottery directly changes into mechanical energy to luminous energy, the mechanical drive link in the middle of having cancelled, eliminated the mechanical drive error.
Claims (4)
1. the micro mirror fine regulating device that a photoelectric ceramics drives, it is characterized in that, comprise directions X displacement fine adjustment platform [1], pitching adjusting mechanism [2], Y-direction displacement fine adjustment platform [3], coarse motion platform [4], directions X photoelectric ceramics actuator [5], directions X displacement amplifying mechanism [6], Y-direction displacement amplifying mechanism [7], Y-direction photoelectric ceramics actuator [8] and rolling guide;
Y-direction displacement fine adjustment platform [3] wherein, Y-direction displacement amplifying mechanism [7] and Y-direction photoelectric ceramics actuator [8] all are arranged on coarse motion platform [4], between Y-direction displacement fine adjustment platform [3] and coarse motion platform [4], rolling guide is set, Y-direction displacement fine adjustment platform [3] is connected by flexible hinge with Y-direction displacement amplifying mechanism [7], Y-direction displacement amplifying mechanism [7] promotes Y-direction displacement fine adjustment platform [3] by flexible hinge and moves on rolling guide, Y-direction displacement amplifying mechanism [7] is connected with Y-direction photoelectric ceramics actuator [8], Y-direction displacement amplifying mechanism [7] is amplified the drive displacement of Y-direction photoelectric ceramics actuator [8],
Y-direction displacement fine adjustment platform [3] top arranges directions X displacement fine adjustment platform [1], directions X photoelectric ceramics actuator [5] and directions X displacement amplifying mechanism [6], between Y-direction displacement fine adjustment platform [3] and directions X displacement fine adjustment platform [1], rolling guide is set, directions X displacement amplifying mechanism [6] is connected by flexible hinge with directions X displacement fine adjustment platform [1], directions X displacement amplifying mechanism [6] promotes directions X displacement fine adjustment platform [1] by flexible hinge and moves on rolling guide, directions X displacement amplifying mechanism [6] is connected with directions X photoelectric ceramics actuator [5], directions X displacement amplifying mechanism [6] is amplified the drive displacement of directions X photoelectric ceramics actuator [5], pitching adjusting mechanism [2] is set on directions X displacement fine adjustment platform [1].
2. the micro mirror fine regulating device that photoelectric ceramics according to claim 1 drives, it is characterized in that, described pitching adjusting mechanism [2] comprises triangle enlarger [10], catoptron [11], photoelectric ceramics pitch actuators [12] and pitch actuators baffle plate [13], mirror support is fixed on directions X displacement fine adjustment platform [1], turning axle is set on mirror support, catoptron [11] can rotate on turning axle, described turning axle is parallel with directions X displacement fine adjustment platform [1], triangle enlarger [10] one ends are connected with directions X displacement fine adjustment platform [1] by flexible hinge, the other end of triangle enlarger [10] is connected with catoptron [11] by flexible hinge, photoelectric ceramics pitch actuators [12] one ends are connected with triangle enlarger [10], the other end of photoelectric ceramics pitch actuators [12] is connected mutually with pitch actuators baffle plate [13], described pitch actuators baffle plate [13] is fixed on directions X displacement fine adjustment platform [1].
3. the micro mirror fine regulating device that photoelectric ceramics according to claim 1 and 2 drives, it is characterized in that, also comprise Y-direction actuator baffle plate [14] and directions X actuator baffle plate [15], wherein Y-direction actuator baffle plate [14] is fixed on coarse motion platform [4] above and is connected with Y-direction photoelectric ceramics actuator [8], and directions X actuator baffle plate [15] is fixed on Y-direction displacement fine adjustment platform [3] above and is connected with directions X photoelectric ceramics actuator [5].
4. the micro mirror fine regulating device that photoelectric ceramics according to claim 1 and 2 drives, it is characterized in that, the material of directions X photoelectric ceramics actuator [5], Y-direction photoelectric ceramics actuator [8] and photoelectric ceramics pitch actuators [12] is lanthanum modification lead zirconate titanate.
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| CN201310442565.0A CN103487934B (en) | 2013-09-25 | 2013-09-25 | Micro-mirror fine adjusting device driven by photoelectric ceramic |
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Cited By (7)
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| CN103823302A (en) * | 2014-03-03 | 2014-05-28 | 重庆大学 | One-dimensional rapid control reflector |
| CN105563465A (en) * | 2016-01-28 | 2016-05-11 | 南京理工大学 | Photoelectric-static compound driving micro platform device |
| CN106066536A (en) * | 2016-06-28 | 2016-11-02 | 南京理工大学 | A kind of micro mirror fine regulating device of photoelectricity piezoelectricity electrostatic drive |
| CN106154974A (en) * | 2016-08-13 | 2016-11-23 | 南京理工大学 | A kind of photoelectric ceramics displacement Close loop servo control experimental provision and control method |
| CN106226899A (en) * | 2016-09-12 | 2016-12-14 | 苏州迈客荣自动化技术有限公司 | A kind of micro-vibration platen of deflecting mirror |
| CN106571873A (en) * | 2016-10-25 | 2017-04-19 | 南京理工大学 | Chirp fiber bragg grating tuning method based on PLZT |
| CN112578553A (en) * | 2020-12-15 | 2021-03-30 | 南通速图科技有限公司 | Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106571873A (en) * | 2016-10-25 | 2017-04-19 | 南京理工大学 | Chirp fiber bragg grating tuning method based on PLZT |
| CN106571873B (en) * | 2016-10-25 | 2019-01-15 | 南京理工大学 | A method of chirped fiber grating is tuned based on PLZT |
| CN112578553A (en) * | 2020-12-15 | 2021-03-30 | 南通速图科技有限公司 | Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror |
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