CN106842555B - A kind of three-dimensional piezoelectric driving micro mirror regulating device - Google Patents
A kind of three-dimensional piezoelectric driving micro mirror regulating device Download PDFInfo
- Publication number
- CN106842555B CN106842555B CN201710039976.3A CN201710039976A CN106842555B CN 106842555 B CN106842555 B CN 106842555B CN 201710039976 A CN201710039976 A CN 201710039976A CN 106842555 B CN106842555 B CN 106842555B
- Authority
- CN
- China
- Prior art keywords
- platform
- displacement
- direction displacement
- piezoelectric membrane
- adjusts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention discloses a kind of three-dimensional piezoelectrics to drive micro mirror regulating device, including the displacement of coarse motion platform, X-direction adjusts platform, Y-direction displacement adjusts platform, Z-direction is displaced regulating mechanism, pulley guide rails mechanism, piezoelectric membrane, flexible hinge.Coarse motion platform, X-direction displacement adjust platform, Y-direction displacement adjusts platform and is superimposed by pulley guide rails mechanism, and Z-direction displacement regulating mechanism is located at X-direction displacement and adjusts on platform.After the positioning of coarse motion platform, to Y-direction piezoelectric membrane application voltage, piezoelectric membrane makes beam with overhanging ends generate output displacement under inverse piezoelectric activity and reconciles platform progress Y-direction displacement adjusting by displacement amplifying mechanism promotion Y-direction displacement；Similarly, X-direction piezoelectric membrane pushes X-direction displacement to adjust platform progress X-direction displacement and adjusts；Z-direction piezoelectric membrane pushes Z-direction displacement regulating mechanism to carry out Z-direction displacement and adjusts.Three-dimensional piezoelectric driving micro mirror regulating device of the invention is simple and compact for structure, it can be achieved that multiple degrees of freedom is adjusted, and fast response time is suitable for a variety of occasions.
Description
Technical field
The present invention relates to a kind of driving device, especially a kind of three-dimensional piezoelectric drives micro mirror regulating device.
Background technique
In recent years, MEMS (MEMS) is increasingly taken seriously in the application study of optical field.Its application is
Extend to the various industries such as medicine, military affairs.Since it is with lesser inertia, thus it can be realized and be precisely located.Mesh
Before, MEMS has become the emphasis of countries in the world research.
Micro mirror is one of them typical representative, has many research institution's cameras recently and proposes different types of micro mirror
And its driving mechanism.But traditional micro mirror regulating mechanism generally uses accurate lead screw secondary and rolling guide, turbine-concave wheel mechanism
Etc. machine drivings be difficult once to position successfully there are friction, gap equal error.And the drive forms such as electric heating, electromagnetism are also deposited
The defects of adaptability is insufficient.Therefore, it is badly in need of the micro mirror that a kind of structure is simple, miniaturization adapts to a variety of occasions at present and adjusts dress
It sets, but the prior art there is no associated description.
Summary of the invention
The purpose of the present invention is to provide a kind of three-dimensional piezoelectrics to drive micro mirror regulating device.
The technical solution for realizing the aim of the invention is as follows: a kind of three-dimensional piezoelectric driving micro mirror regulating device, including coarse motion
Platform, Y-direction driving structure, Y-direction guide rail mechanism, Y-direction displacement adjust platform, Y-direction flexible hinge guiding mechanism, X-direction
Driving mechanism, X-direction guide rail mechanism, X-direction displacement adjust platform and X-direction flexible hinge guiding mechanism；
The Y-direction guide rail mechanism includes two guide rails, which is symmetricly set on coarse motion platform Y-direction central axes
Two sides；Y-direction flexible hinge guiding mechanism includes four flexure hinge mechanisms and is symmetrical with coarse motion platform Y-direction central axes two-by-two；Y
Direction position transposition section platform is located at the top of two guide rails and moves along the rail under the driving of driving mechanism in the Y direction, the Y-direction
Driving mechanism includes two about the symmetrically arranged actuating mechanism in coarse motion platform Y-direction central axes, and each actuating mechanism includes hanging
Arm beam and two are fitted in the Y-direction piezoelectric membrane driver of cantilever beam upper and lower ends, wherein cantilever beam and corresponding Y-direction position
It moves enlarger to be connected by hinge, the other end of Y-direction displacement amplifying mechanism is displaced adjusting platform with Y-direction and is connected；
Y-direction displacement, which is adjusted, is arranged X-direction guide rail mechanism on platform, the X-direction guide rail mechanism includes two guide rails, should
Two guide rails are symmetrical arranged the two sides that displacement in the Y direction adjusts platform X-direction central axes, and X-direction displacement adjusts platform and is located at two
The top of root guide rail simultaneously moves along the rail under the driving of X-direction driving mechanism, which includes two about Y
The symmetrically arranged actuating mechanism in direction position transposition section platform X-direction central axes, each actuating mechanism includes cantilever beam and two
It is fitted in the X-direction piezoelectric membrane driver of cantilever beam upper and lower ends, wherein cantilever beam and corresponding X-direction displacement amplifying mechanism
It is connected by hinge, the other end of X-direction displacement amplifying mechanism is displaced adjusting platform with X-direction and is connected；
In the case where applying voltage effect, Y-direction displacement adjusts the X-direction piezoelectric membrane driver on platform since inverse piezoelectricity is imitated
Power output, which should be generated, makes cantilever beam generate output displacement, and the displacement tune of X-direction is then realized by X-direction displacement amplifying mechanism
Section；Y-direction piezoelectric membrane driver on coarse motion platform, which generates power output, makes cantilever beam generate output displacement, then passes through Y-direction
Displacement amplifying mechanism come realize Y-direction displacement adjust.
X-direction displacement adjusts setting Z-direction on platform and is displaced regulating mechanism, and wherein Z-direction displacement regulating mechanism includes branch
Frame and Z-direction driving mechanism, the Z-direction driving mechanism include two symmetrical about X-direction displacement adjusting platform Y-direction central axes
The actuating mechanism of setting, each actuating mechanism includes cantilever beam and two are fitted in cantilever beam upper and lower ends and about coarse motion platform
Symmetrical Z-direction piezoelectric membrane driver, Z-direction are displaced regulating mechanism top and micro mirror are arranged two-by-two for Y-direction central axes；Z-direction
Displacement regulating mechanism realizes that the displacement on vertical direction is adjusted by Z-direction piezoelectric membrane driver.
Compared with prior art, the present invention its remarkable advantage are as follows: three-dimensional piezoelectric driving micro mirror regulating device benefit of the invention
The driving force for using the inverse piezoelectric effect of piezoelectric membrane to generate is as driving source, it can be achieved that big displacement is adjusted.And mechanism is simply tight
It gathers.Meanwhile the device can realize multiple degrees of freedom adjust, fast response time, it can be achieved that a variety of occasions application.
Present invention is further described in detail with reference to the accompanying drawing.
Detailed description of the invention
Fig. 1 is that three-dimensional piezoelectric drives micro mirror regulating device figure.
Fig. 2 is that three-dimensional piezoelectric drives micro mirror regulating device floor map.
Fig. 3 is pulley guide rails mechanism.
Fig. 4 is Z-direction driving mechanism side view.
Fig. 5 is Z-direction driving mechanism front view.
Meaning representated by figure label are as follows: 1. coarse motion platforms, 2.Y traversing guide mechanism, 3.Y direction position transposition section platform,
4.X traversing guide mechanism, the direction 5.Y flexible hinge guiding mechanism, the direction 6.Y displacement amplifying mechanism, the direction 7.X flexible hinge are led
To mechanism, the direction 8.Y piezoelectric membrane driver, the direction 9.X piezoelectric membrane driver, the direction 10.X displacement amplifying mechanism, 11.X
Direction position transposition section platform, 12. micro mirrors, 13.Z direction position transposition section platform, the direction 14.Z piezoelectric membrane driver, 15. brackets.
Specific embodiment
In conjunction with attached drawing, a kind of three-dimensional piezoelectric of the invention drives micro mirror regulating device, including coarse motion platform 1, Y-direction driving knot
Structure, Y-direction guide rail mechanism 2, Y-direction displacement adjust platform 3, Y-direction flexible hinge guiding mechanism 5, X-direction driving mechanism, the side X
Guide rail mechanism 4, X-direction displacement adjust platform 11 and X-direction flexible hinge guiding mechanism 7；
The Y-direction guide rail mechanism 2 includes two guide rails, which is symmetricly set on the coarse motion direction platform 1Y central axes
Two sides；Y-direction flexible hinge guiding mechanism 5 includes four flexure hinge mechanisms and is symmetrical with the direction coarse motion platform 1Y axis two-by-two
Line；Y-direction displacement adjusts platform 3 and is located at the top of two guide rails and moves along the rail under the driving of driving mechanism in the Y direction, should
Y-direction driving mechanism includes two about the symmetrically arranged actuating mechanism in the coarse motion direction platform 1Y central axes, and each actuating mechanism is equal
The Y-direction piezoelectric membrane driver 8 of cantilever beam upper and lower ends is fitted in including cantilever beam and two, wherein cantilever beam with it is corresponding
Y-direction displacement amplifying mechanism 6 is connected by hinge, and the other end and the Y-direction displacement of Y-direction displacement amplifying mechanism 6 adjust platform 3
It is connected；
Y-direction displacement, which is adjusted, is arranged X-direction guide rail mechanism 4 on platform 3, the X-direction guide rail mechanism 4, which includes two, leads
Rail, two guide rails are symmetrical arranged the two sides that displacement in the Y direction adjusts the direction platform 3X central axes, and X-direction displacement adjusts platform
11 are located at the top of two guide rails and move along the rail under the driving of X-direction driving mechanism, which includes two
A be displaced about Y-direction adjusts the symmetrically arranged actuating mechanism in the direction platform 3X central axes, and each actuating mechanism includes cantilever
Beam and two are fitted in the X-direction piezoelectric membrane driver 9 of cantilever beam upper and lower ends, wherein cantilever beam and corresponding X-direction position
It moves enlarger 10 to be connected by hinge, the other end of X-direction displacement amplifying mechanism 10 is displaced with X-direction adjusts 11 phase of platform
Even；
In the case where applying voltage effect, Y-direction displacement adjusts the X-direction piezoelectric membrane driver 9 on platform 3 due to inverse piezoelectricity
Effect, which generates power output, makes cantilever beam generate output displacement, and the position of X-direction is then realized by X-direction displacement amplifying mechanism 10
Transposition section；Y-direction piezoelectric membrane driver 8 on coarse motion platform 1, which generates power output, makes cantilever beam generate output displacement, then passes through
Y-direction displacement amplifying mechanism 6 come realize Y-direction displacement adjust.
The X-direction displacement adjusts setting Z-direction on platform 11 and is displaced regulating mechanism 13, and wherein Z-direction is displaced adjusting machine
Structure 13 includes bracket 15 and Z-direction driving mechanism, which includes two and be displaced adjusting platform 11Y about X-direction
The symmetrically arranged actuating mechanism in direction central axes, each actuating mechanism include that cantilever beam and two are fitted in cantilever beam or more two
It holds and symmetrical Z-direction piezoelectric membrane driver 14, Z-direction is displaced regulating mechanism 13 two-by-two about the coarse motion direction platform 1Y central axes
Micro mirror 12 is arranged in top；Z-direction displacement regulating mechanism 13 is realized on vertical direction by Z-direction piezoelectric membrane driver 14
Displacement is adjusted.
The X-direction piezoelectric membrane driver 9, Y-direction piezoelectric membrane driver 8, Z-direction piezoelectric membrane driver 14 are equal
Apply voltage using the laminated cantilever beam of piezoelectric membrane and generates driving force.
Fixed frame, Y-direction flexible hinge guiding mechanism 5, Y-direction displacement amplifying mechanism 6 and Y are set on the coarse motion platform 1
The actuating mechanism of direction driving mechanism is hinged on the fixed frame.
The Y-direction displacement, which is adjusted, is arranged fixed frame on platform 3, X-direction flexible hinge guiding mechanism 7, X-direction displacement are put
Great institutions 10 and the actuating mechanism of X-direction driving mechanism are hinged on the fixed frame.
The driving force that three-dimensional piezoelectric driving micro mirror regulating device of the invention is generated using the inverse piezoelectric effect of piezoelectric membrane
As driving source, it can be achieved that big displacement is adjusted.
Further detailed description is done to the present invention below with reference to embodiment.
Embodiment
In conjunction with Fig. 1, a kind of three-dimensional piezoelectric of the invention drives micro mirror regulating device, including X-direction displacement to adjust platform, Y
Direction position transposition section platform, Z-direction are displaced regulating mechanism, X-direction piezoelectric membrane driver, Y-direction piezoelectric membrane driver, Z
Direction piezoelectric membrane driver, micro mirror etc..It includes X-direction displacement amplifying mechanism 10, X-direction flexible hinge that X-direction displacement, which is adjusted,
Guiding mechanism 7, X-direction displacement adjust platform 11, are displaced the adjusting symmetrically arranged side X in the direction platform 3X central axes about Y-direction
To piezoelectric membrane driver 9.Y-direction displacement adjust include Y-direction displacement amplifying mechanism 6, Y-direction flexible hinge guiding mechanism 5,
Y-direction displacement adjusts platform 3, about the symmetrically arranged Y-direction piezoelectric membrane driver 8 in the coarse motion direction platform 1Y central axes.Z-direction
Displacement adjust include Z-direction displacement regulating mechanism 13 and four be fitted in cantilever beam upper and lower ends and about the coarse motion platform side Y
To central axes symmetrical Z-direction piezoelectric membrane driver 14 two-by-two.
Coarse motion platform, X-direction displacement adjust platform and Y-direction displacement adjusts platform and mutually folded by linear pulley guide rails two-by-two
It is added together, for pulley guide rails as guiding mechanism, pulley guide rails guiding mechanism is as shown in Figure 3.X, Y driving mechanism is put by displacement
Great institutions connect displacement platform.Micro mirror is placed in above Z-direction piezoelectric membrane driver in Z-direction displacement regulating mechanism, by the side Z
The driving force generated to piezoelectric membrane driver is adjusted to control micro mirror in the displacement of Z-direction.
X-direction piezoelectric membrane driver 9 is applied to cantilever beam since inverse piezoelectric effect generates driving force under voltage effect
Upper generation drive displacement is simultaneously applied to X-direction displacement amplifying mechanism 10, and X-direction displacement amplifying mechanism 10 is mobile in X direction to push X
Direction position transposition section platform 11, X-direction displacement adjust platform 11 and move in X direction in pulley guide rails.
Y-direction piezoelectric membrane driver 8 is applied to cantilever beam since inverse piezoelectric effect generates driving force under voltage effect
Upper generation drive displacement simultaneously applies displacement amplifying mechanism 6 in the Y direction, and Y-direction displacement amplifying mechanism 6 moves along Y-direction and pushes the side Y
Platform 3 is adjusted to displacement, Y-direction displacement adjusts platform 3 and moves in pulley guide rails along Y-direction.
In conjunction with Fig. 4, Fig. 5, Z-direction is displaced in regulating mechanism 13, and micro mirror 12 is fixed on the upper of Z-direction piezoelectric membrane driver
Side, Z-direction displacement 13 bottom end of regulating mechanism are fixed on X-direction displacement platform 3 by bracket 15.
After the displacement in two direction X, Y is adjusted, Z-direction piezoelectric membrane driver 14 is under voltage effect since inverse piezoelectricity is imitated
Driving force should be generated to adjust with this to control the displacement of micro mirror in the vertical direction.
In short, X, Y, Z-direction piezoelectric membrane driver are under voltage effect since inverse piezoelectric effect generates drive displacement, warp
The adjusting of the lower Three Degree Of Freedom for realizing micro mirror of enlarger effect.
Claims (5)
1. a kind of three-dimensional piezoelectric drives micro mirror regulating device, which is characterized in that including coarse motion platform [1], Y-direction driving structure, the side Y
Guide rail mechanism [2], Y-direction displacement adjust platform [3], Y-direction flexible hinge guiding mechanism [5], X-direction driving mechanism, the side X
Guide rail mechanism [4], X-direction displacement adjust platform [11] and X-direction flexible hinge guiding mechanism [7]；
The Y-direction guide rail mechanism [2] includes two guide rails, which is symmetricly set on coarse motion platform [1] Y-direction central axes
Two sides；Y-direction flexible hinge guiding mechanism [5] includes four flexure hinge mechanisms and is symmetrical with coarse motion platform [1] Y-direction two-by-two
Central axes；Y-direction displacement adjusts platform [3] and is located at the top of two guide rails and in the Y direction under the driving of driving mechanism along guide rail
Movement, the Y-direction driving mechanism include two about the symmetrically arranged actuating mechanism in coarse motion platform [1] Y-direction central axes, Mei Gezhi
Motivation structure includes the Y-direction piezoelectric membrane driver [8] that cantilever beam and two are fitted in cantilever beam upper and lower ends, wherein cantilever
Beam is connected with corresponding Y-direction displacement amplifying mechanism [6] by hinge, the other end of Y-direction displacement amplifying mechanism [6] and the side Y
Platform [3] are adjusted to displacement to be connected；
Y-direction displacement, which is adjusted, is arranged X-direction guide rail mechanism [4] on platform [3], and the X-direction guide rail mechanism [4] includes two and leads
Rail, two guide rails are symmetrical arranged the two sides that displacement in the Y direction adjusts platform [3] X-direction central axes, and X-direction displacement adjusts flat
Platform [11] is located at the top of two guide rails and moves along the rail under the driving of X-direction driving mechanism, the X-direction driving mechanism packet
It includes two and is displaced the adjusting symmetrically arranged actuating mechanism in platform [3] X-direction central axes about Y-direction, each actuating mechanism wraps
Include cantilever beam and two X-direction piezoelectric membrane drivers [9] for being fitted in cantilever beam upper and lower ends, wherein cantilever beam with it is corresponding
X-direction displacement amplifying mechanism [10] is connected by hinge, and the other end and the X-direction displacement of X-direction displacement amplifying mechanism [10] are adjusted
Platform [11] are saved to be connected；
In the case where applying voltage effect, Y-direction displacement adjusts the X-direction piezoelectric membrane driver [9] on platform [3] due to inverse piezoelectricity
Effect, which generates power output, makes cantilever beam generate output displacement, then by X-direction displacement amplifying mechanism [10] Lai Shixian X-direction
Displacement is adjusted；Y-direction piezoelectric membrane driver [8] on coarse motion platform [1], which generates power output, makes cantilever beam generate output displacement, so
The displacement by Y-direction displacement amplifying mechanism [6] Lai Shixian Y-direction is adjusted afterwards.
2. three-dimensional piezoelectric according to claim 1 drives micro mirror regulating device, which is characterized in that X-direction displacement adjusts flat
Z-direction is set on platform [11] and is displaced regulating mechanism [13], wherein Z-direction displacement regulating mechanism [13] includes bracket [15] and the side Z
To driving mechanism, which includes two and symmetrically sets about X-direction displacement adjusting platform [11] Y-direction central axes
The actuating mechanism set, each actuating mechanism includes cantilever beam and two are fitted in cantilever beam upper and lower ends and about coarse motion platform
[1] symmetrical Z-direction piezoelectric membrane driver [14], Z-direction are displaced the setting of regulating mechanism [13] top two-by-two for Y-direction central axes
Micro mirror [12]；Z-direction is displaced regulating mechanism [13] by the position on Z-direction piezoelectric membrane driver [14] Lai Shixian vertical direction
Transposition section.
3. three-dimensional piezoelectric according to claim 1 drives micro mirror regulating device, which is characterized in that X-direction piezoelectric membrane drives
Dynamic device [9], Y-direction piezoelectric membrane driver [8], Z-direction piezoelectric membrane driver [14] are all made of the laminated cantilever of piezoelectric membrane
Beam generates driving force to apply voltage.
4. three-dimensional piezoelectric according to claim 1 drives micro mirror regulating device, which is characterized in that coarse motion platform is arranged on [1]
Fixed frame, Y-direction flexible hinge guiding mechanism [5], Y-direction displacement amplifying mechanism [6] and Y-direction driving mechanism actuating mechanism
It is hinged on the fixed frame.
5. three-dimensional piezoelectric according to claim 1 drives micro mirror regulating device, which is characterized in that Y-direction displacement adjusts flat
Fixed frame, X-direction flexible hinge guiding mechanism [7], X-direction displacement amplifying mechanism [10] and X-direction driving machine are set on platform [3]
The actuating mechanism of structure is hinged on the fixed frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710039976.3A CN106842555B (en) | 2017-01-18 | 2017-01-18 | A kind of three-dimensional piezoelectric driving micro mirror regulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710039976.3A CN106842555B (en) | 2017-01-18 | 2017-01-18 | A kind of three-dimensional piezoelectric driving micro mirror regulating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106842555A CN106842555A (en) | 2017-06-13 |
| CN106842555B true CN106842555B (en) | 2019-06-25 |
Family
ID=59123391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710039976.3A Active CN106842555B (en) | 2017-01-18 | 2017-01-18 | A kind of three-dimensional piezoelectric driving micro mirror regulating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106842555B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112578553A (en) * | 2020-12-15 | 2021-03-30 | 南通速图科技有限公司 | Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403997A (en) * | 2015-11-19 | 2016-03-16 | 苏州工业园区纳米产业技术研究院有限公司 | Piezoelectric driving two-dimensional scanning micro-mirror |
| CN105563465A (en) * | 2016-01-28 | 2016-05-11 | 南京理工大学 | Photoelectric-static compound driving micro platform device |
| CN106066536A (en) * | 2016-06-28 | 2016-11-02 | 南京理工大学 | A kind of micro mirror fine regulating device of photoelectricity piezoelectricity electrostatic drive |
-
2017
- 2017-01-18 CN CN201710039976.3A patent/CN106842555B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403997A (en) * | 2015-11-19 | 2016-03-16 | 苏州工业园区纳米产业技术研究院有限公司 | Piezoelectric driving two-dimensional scanning micro-mirror |
| CN105563465A (en) * | 2016-01-28 | 2016-05-11 | 南京理工大学 | Photoelectric-static compound driving micro platform device |
| CN106066536A (en) * | 2016-06-28 | 2016-11-02 | 南京理工大学 | A kind of micro mirror fine regulating device of photoelectricity piezoelectricity electrostatic drive |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106842555A (en) | 2017-06-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101925836B (en) | Optical lens image stabilization systems | |
| EP2336082B1 (en) | Translating and rotation micro mechanism | |
| US7180650B2 (en) | Electromechanical drives adapted to provide three degrees of mobility | |
| CN106842555B (en) | A kind of three-dimensional piezoelectric driving micro mirror regulating device | |
| US9371823B2 (en) | Polymeric actuator, actuator device, method of manufacturing polymeric actuator, and method of manufacturing actuator device | |
| CN113287053A (en) | Pupil manipulation: combiner actuation system | |
| CN103329015A (en) | Method for removing coating of coated optical fibre and device for removing coating of coated optical fibre | |
| CN106712569A (en) | Inertial nanometer stepping motor based on piezoelectric stacks | |
| US20050219675A1 (en) | Tip-tilt-piston actuator | |
| CN103487934A (en) | Micro-mirror fine adjusting device driven by photoelectric ceramic | |
| CN108413206B (en) | Six degree of freedom based on stroke amplifying mechanism driving decouples submissive parallel connection platform | |
| CN209086531U (en) | Continuous focus control | |
| CN106066536B (en) | A kind of micro mirror fine regulating device of photoelectricity piezoelectricity electrostatic drive | |
| CN104977710A (en) | Optical system image quality compensating apparatus | |
| CN105563465B (en) | A kind of photoelectrical electrostatic composite flooding microfluidic platform device | |
| US20220339855A1 (en) | Folding device and folding method | |
| CN102879903B (en) | A kind of device of the controllable MEMS micromirror in integrated inclination angle | |
| CN1749901A (en) | Movable operating device and method of controlling the movable operating device | |
| JP2012029495A (en) | Driving device | |
| JP2004280355A (en) | Moving device and positioning device using the same | |
| WO2010109825A1 (en) | Actuator, drive device, lens unit, image-capturing device | |
| CN106060366A (en) | Image focusing system, shooting device and electronic equipment | |
| CN103576464A (en) | Ejection mechanism and photoetching device with ejection mechanism | |
| CN205883392U (en) | Image focusing system , shooting device and electronic equipment | |
| US20060110108A1 (en) | Tunable light transceiver module |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |