CN103264385A - Automatic microoperation device - Google Patents
Automatic microoperation device Download PDFInfo
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- CN103264385A CN103264385A CN2013101664310A CN201310166431A CN103264385A CN 103264385 A CN103264385 A CN 103264385A CN 2013101664310 A CN2013101664310 A CN 2013101664310A CN 201310166431 A CN201310166431 A CN 201310166431A CN 103264385 A CN103264385 A CN 103264385A
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Abstract
An automatic microoperation device is characterized by comprising a manipulator portion with multi-degree of freedom, a micro positioning platform portion, an automatic zoom and microscopy visual portion and a microcomputer control portion which are arranged on a base. Compared with the prior art, the automatic microoperation device has the advantages that the device is adaptable to the needs on precise operations in the fields of bioengineering, micromachining, micro-assembling, medical engineering and the like, combines with related technologies such as machinery, electron, optical measurement and intelligent control, and is low in cost, high in accuracy, convenient to operate, and user-friendly in operation interface.
Description
Technical field
The present invention relates to a kind of microoperation device.
Background technology
Microoperation refers in micron, sub-micron even nano-precision scope minute sized object be stablized, grasps reliably, assembled or operates.To be that collection machinery, material, electronics, control and computer etc. are multidisciplinary be the comprehensive application technology of one for it.At present in many applications, constantly developed to microminiaturization by operand, for example: biological cell (10-150um), MEMS part (10-100um), optical fiber (620-125um), nano-grain (1-100nm) etc., the traditional approach that the operator directly operates at microscopically, need the operator to have abundant operating experience and higher mental quality, and labour intensity is higher.Along with development of technologies such as microtechnic, accurate measurement and Based Intelligent Control, people can design and develop a kind of microoperation device that possesses high-acruracy survey and high-intelligentization as required.
At present, the most dependence on import of the employed microoperation device of China manufacturing enterprise and scientific research institutions, price is very expensive, maintenance and inconvenient debugging, and the microoperation device ubiquity production cost height that domestic design is produced, shortcoming such as range of application is narrow, precision is limited, therefore occupation rate of market is not high, is difficult to a large amount of the input and uses.
Summary of the invention
Goal of the invention of the present invention is to provide a kind of needs that adapt to field accurate operations such as bioengineering, little processing, little assembling and engineering in medicine, in conjunction with correlation techniques such as machinery, electronics, optical measurement, Based Intelligent Control, design a kind of low cost, degree of precision, easy to operate, microoperation device that operation interface is friendly.
The present invention is achieved in that and comprises the multi freedom degree mechanical hand portion that is arranged on the pedestal, the mini positioning platform part, autozoom micro-vision part, the microcomputerized control part, the multi freedom degree mechanical hand portion comprises the five degree of freedom manipulator that has joint sensors that is arranged on the pedestal, micro-clamp by the drive of five degree of freedom manipulator, mini positioning platform partly comprises the grand moving platform that is arranged on the pedestal, be arranged on the micropositioner on the grand moving platform, be arranged on the objective table on the micropositioner, be arranged on the micrometric displacement detector on the micropositioner, the autozoom micro-vision partly comprises the vertical lifting platform that is arranged on the pedestal, the microscope that has lighting source by the vertical lifting platform drive, be arranged on the ccd video camera on the microscope, the other pedestal of grand moving platform is provided with big apart from displacement detector, the signal of telecommunication output of joint sensors, export apart from the signal of telecommunication of displacement detector greatly, the signal of telecommunication output of micrometric displacement detector links to each other with the signal of telecommunication input of microcomputerized control part respectively, and micro computer is partly controlled the five degree of freedom manipulator, micro-clamp, grand moving platform, micropositioner, the action of vertical lifting platform.
Here, grand moving platform is the power travelling carriage of X-axis, Y-axis two-freedom, has two apart from displacement detector greatly, lays respectively at X-axis, the Y direction of grand moving platform.What adopt apart from displacement detector greatly is the linear grating displacement detector.Micropositioner by the X-axis of Piezoelectric Ceramic, Y-axis two-freedom based on flexible hinge difference formula leverage, the micrometric displacement detector has two, lays respectively at X-axis, the Y direction of micropositioner.What the micrometric displacement detector adopted is DVD laser probe displacement detector.
The ccd video camera of at first monocular vision being measured during work is demarcated, then micro parts is fixed on the objective table, microcomputerized control part (computer) is sent instruction and is driven the five degree of freedom manipulator, micro-clamp is delivered to the appropriate location, detection by joint sensors, the microcomputerized control part can calculate the posture information of manipulator, and can adjust the manipulator attitude in real time.Start the servomotor of vertical lifting platform, vertical lifting platform is moved up and down, so that microscope automatic focusing, the micro parts of micro-clamp clamping can be in the visual field of micro-vision system, and the clear demonstration of energy, deliver to the microcomputerized control part by the picture signal that the image pick-up card of ccd video camera collects, as the feedback signal of automatic focusing system.Microcomputerized control is partly sent instruction and is driven grand moving platform motion, realizes that micro parts at the large scale rectilinear motion of X and Y-direction, feeds back its actual displacement apart from displacement detector greatly, forms closed-loop control.Micro parts is finished by micropositioner to the micromotion that micro-clamp becomes into, micropositioner is driven by piezoelectric ceramic actuator, employing is based on flexible hinge difference formula leverage, by design displacement scaling device, ratio is carried out in the macroscopic view input displacement of driver dwindles, thereby the microcosmic of implementation platform is exported, and has reduced the cost of manufacture of micropositioner.X and Y-direction at micropositioner respectively are equipped with a micrometric displacement detector, and piezoelectric ceramic actuator is carried out closed-loop control, improve the microposition precision.When mini positioning platform is delivered to apart from micro-clamp micro parts after the suitable distance in two dimensional surface, follow the image according to the picked-up of microimaging machine to adopt the Depth-From-Focus method, micro-clamp is controlled at depth direction, in three dimensions, realize accurately location at last, utilize micro-clamp to realize microoperations such as gripping or assembling.Micro-clamp is finger with the flexure type piezoelectric bimorph, adopts symmetrical two assignments to put.Point an end and be fixed on the pedestal, the other end is unsettled, constitutes cantilever beam structures, changes polarity and the voltage swing of the output electric field of piezoelectric ceramic actuator, and what can change micro-clamp opens or close state and size.
The present invention compared with the prior art, needs with field accurate operations such as adapting to bioengineering, little processing, little assembling and engineering in medicine, in conjunction with correlation techniques such as machinery, electronics, optical measurement, Based Intelligent Control, has advantage low cost, degree of precision, operating aspect, operation interface friendliness.
Description of drawings:
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of micropositioner of the present invention;
Fig. 3 is controlling party block diagram of the present invention.
The specific embodiment:
Now in conjunction with the accompanying drawings and embodiments the present invention is done and describes in further detail:
As shown in the figure, the present invention includes the multi freedom degree mechanical hand portion that is arranged on the pedestal 16, the mini positioning platform part, autozoom micro-vision part, microcomputerized control part (computer system) 1, free degree manipulator partly comprises the five degree of freedom manipulator 5 that has joint sensors that is arranged on the pedestal 16, micro-clamp 12 by 5 drives of five degree of freedom manipulator, mini positioning platform partly comprises the grand moving platform 7 that is arranged on the pedestal 16, be arranged on the micropositioner 13 on the grand moving platform 7, be arranged on the objective table 19 on the micropositioner 13, be arranged on the micrometric displacement detector 15 on the micropositioner 13, be arranged on the vibration isolation table 17 of 7 of pedestal 16 and grand moving platforms, the autozoom micro-vision partly comprises the vertical lifting platform 18 that is arranged on the pedestal 16, the microscope 9-1 that has lighting source by vertical lifting platform 18 drives, be arranged on the ccd video camera 9-2 on the microscope 9-1, grand moving platform 7 other pedestals 16 are provided with big apart from displacement detector 10, the signal of telecommunication output of the joint sensors 8 of five degree of freedom manipulator 5, export apart from the signal of telecommunication of displacement detector 10 greatly, the signal of telecommunication output of micrometric displacement detector 15, the signal of telecommunication output of ccd video camera 9-2 links to each other with the signal of telecommunication input of microcomputerized control part 1 respectively, and the control signal of telecommunication output of microcomputerized control part 1 is respectively by the power drive control signal of telecommunication input of multi-axis motion controller 2 with the motor driver 3 of five degree of freedom manipulator 5, the power drive control signal of telecommunication input of the motor driver 4 of vertical lifting platform 6 and grand moving platform 7, the driving control signal of telecommunication input of the piezoelectric ceramic actuator 14 of micro-clamp 12 and micropositioner 13 links to each other.
Here, grand moving platform 7 is power travelling carriages of X-axis, Y-axis two-freedom, grand moving platform 7 comprises the X-axis pedestal that moves along the X-axis guide rail and the Y-axis pedestal that moves along the Y-axis guide rail on the X-axis seat, the X-axis pedestal is driven by the X-axis driving mechanism, the Y-axis pedestal is driven by the Y-axis driving mechanism, there are two apart from displacement detector 10 greatly, lay respectively at X-axis, the Y direction of grand moving platform 7.What adopt apart from displacement detector 10 greatly is the linear grating displacement detector.Micropositioner 13 by the X-axis of Piezoelectric Ceramic, Y-axis two-freedom based on flexible hinge difference formula leverage (as the technology of the patent applied for of inventor's invention), micrometric displacement detector 15 has two, lays respectively at X-axis, the Y direction of micropositioner 13.What micrometric displacement detector 15 adopted is DVD laser probe displacement detector.
Claims (4)
1. automatic microoperation device, it is characterized in that comprising the multi freedom degree mechanical hand portion that is arranged on the pedestal, the mini positioning platform part, autozoom micro-vision part, the microcomputerized control part, the multi freedom degree mechanical hand portion comprises the five degree of freedom manipulator that has joint sensors that is arranged on the pedestal, micro-clamp by the drive of five degree of freedom manipulator, mini positioning platform partly comprises the grand moving platform that is arranged on the pedestal, be arranged on the micropositioner on the grand moving platform, be arranged on the objective table on the micropositioner, be arranged on the micrometric displacement detector on the micropositioner, the autozoom micro-vision partly comprises the vertical lifting platform that is arranged on the pedestal, the microscope that has lighting source by the vertical lifting platform drive, be arranged on the video camera on the microscope, the other pedestal of grand moving platform is provided with big apart from displacement detector, the signal of telecommunication output of joint sensors, export apart from the signal of telecommunication of displacement detector greatly, the signal of telecommunication output of micrometric displacement detector links to each other with the signal of telecommunication input of microcomputerized control part respectively, and micro computer is partly controlled the five degree of freedom manipulator, micro-clamp, grand moving platform, micropositioner, the action of vertical lifting platform.
2. automatic microoperation device according to claim 1 is characterized in that being provided with vibration isolation table at pedestal and grand moving interstation.
3. automatic microoperation device according to claim 1 and 2, it is characterized in that grand moving platform is the power travelling carriage of X-axis, Y-axis two-freedom, there are two apart from displacement detector greatly, lay respectively at X-axis, the Y direction of grand moving platform, micropositioner by the X-axis of Piezoelectric Ceramic, Y-axis two-freedom based on flexible hinge difference formula leverage, the micrometric displacement detector has two, lays respectively at X-axis, the Y direction of micropositioner.
4. automatic microoperation device according to claim 3, what it is characterized in that greatly adopting apart from displacement detector is the linear grating displacement detector, what the micrometric displacement detector adopted is DVD laser probe displacement detector.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310166431.0A CN103264385B (en) | 2013-05-08 | 2013-05-08 | Automatic microoperation device |
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| CN201310166431.0A CN103264385B (en) | 2013-05-08 | 2013-05-08 | Automatic microoperation device |
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| CN103264385A true CN103264385A (en) | 2013-08-28 |
| CN103264385B CN103264385B (en) | 2015-07-15 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105058367A (en) * | 2015-08-20 | 2015-11-18 | 宁波大学 | Manufacturing process for four-degree-of-freedom piezoelectric micro-gripper |
| CN105869977A (en) * | 2016-05-31 | 2016-08-17 | 襄阳宏伟航空器有限责任公司 | Multi-freedom-degree micro-motion adjusting device |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN107015525A (en) * | 2017-03-16 | 2017-08-04 | 南通大学 | A kind of micro-displacement control platform and application method observed suitable for micro-fluidic chip |
| CN109240219A (en) * | 2018-10-16 | 2019-01-18 | 湖南戈人自动化科技有限公司 | A kind of multi-axis motion controller |
| CN109239068A (en) * | 2018-09-13 | 2019-01-18 | 山东大学 | A kind of vision inspection apparatus and method for macro/micromotion platform |
| CN110896018A (en) * | 2019-12-20 | 2020-03-20 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | Scanning electron microscope sample stage with double manipulators |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104959971B (en) * | 2015-07-17 | 2017-01-04 | 北京理工大学 | A kind of assembly system towards micron order flexible pipe Yu microsphere assembly |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105058367A (en) * | 2015-08-20 | 2015-11-18 | 宁波大学 | Manufacturing process for four-degree-of-freedom piezoelectric micro-gripper |
| CN105058367B (en) * | 2015-08-20 | 2017-03-01 | 宁波大学 | A kind of processing technology of four-degree-of-freedom piezoelectric microgripper |
| CN105869977A (en) * | 2016-05-31 | 2016-08-17 | 襄阳宏伟航空器有限责任公司 | Multi-freedom-degree micro-motion adjusting device |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN106767406B (en) * | 2016-12-20 | 2022-08-16 | 华南理工大学 | Micro-nano positioning system and full closed-loop online control method for compliant mechanism platform by micro-nano positioning system |
| CN107015525A (en) * | 2017-03-16 | 2017-08-04 | 南通大学 | A kind of micro-displacement control platform and application method observed suitable for micro-fluidic chip |
| CN109239068A (en) * | 2018-09-13 | 2019-01-18 | 山东大学 | A kind of vision inspection apparatus and method for macro/micromotion platform |
| CN109239068B (en) * | 2018-09-13 | 2021-04-16 | 山东大学 | Visual detection device and method for macro-micro motion platform |
| CN109240219A (en) * | 2018-10-16 | 2019-01-18 | 湖南戈人自动化科技有限公司 | A kind of multi-axis motion controller |
| CN110896018A (en) * | 2019-12-20 | 2020-03-20 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | Scanning electron microscope sample stage with double manipulators |
| WO2021120547A1 (en) * | 2019-12-20 | 2021-06-24 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | Scanning electron microscope sample table equipped with dual manipulators |
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