CN106542494B - A kind of method for preparing the not contour micro-nano structure of multilayer - Google Patents
A kind of method for preparing the not contour micro-nano structure of multilayer Download PDFInfo
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- CN106542494B CN106542494B CN201610850447.7A CN201610850447A CN106542494B CN 106542494 B CN106542494 B CN 106542494B CN 201610850447 A CN201610850447 A CN 201610850447A CN 106542494 B CN106542494 B CN 106542494B
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- pdms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/0038—Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
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- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Micromachines (AREA)
Abstract
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Priority Applications (1)
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CN201610850447.7A CN106542494B (en) | 2016-09-26 | 2016-09-26 | A kind of method for preparing the not contour micro-nano structure of multilayer |
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CN201610850447.7A CN106542494B (en) | 2016-09-26 | 2016-09-26 | A kind of method for preparing the not contour micro-nano structure of multilayer |
Publications (2)
Publication Number | Publication Date |
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CN106542494A CN106542494A (en) | 2017-03-29 |
CN106542494B true CN106542494B (en) | 2017-12-26 |
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CN201610850447.7A Active CN106542494B (en) | 2016-09-26 | 2016-09-26 | A kind of method for preparing the not contour micro-nano structure of multilayer |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107221578B (en) * | 2017-06-01 | 2018-08-21 | 西南交通大学 | A kind of manufacturing method of " I " type structure PDMS matrixes |
CN107275439B (en) * | 2017-06-01 | 2018-10-30 | 西南交通大学 | A kind of manufacturing method of " I " type structure PDMS matrixes based on reverse |
CN112275334B (en) * | 2020-10-14 | 2021-07-20 | 武汉大学 | 2.5D pore structure microfluid chip and manufacturing and using method thereof |
Citations (10)
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---|---|---|---|---|
US5512131A (en) * | 1993-10-04 | 1996-04-30 | President And Fellows Of Harvard College | Formation of microstamped patterns on surfaces and derivative articles |
CN101061058A (en) * | 2004-05-24 | 2007-10-24 | 新加坡科技研究局 | Imprinting of supported and free-standing 3-D micro-or nano-structures |
CN101421826A (en) * | 2006-03-17 | 2009-04-29 | 微量化学公司 | Packaging of mems devices |
CN102012632A (en) * | 2010-09-10 | 2011-04-13 | 中国科学院合肥物质科学研究院 | Method for preparing bionic adhesion arrays with different top end structures |
CN102431962A (en) * | 2011-12-07 | 2012-05-02 | 北京航空航天大学 | Preparation method and application of nanoimprint template |
CN102718181A (en) * | 2012-05-28 | 2012-10-10 | 华中科技大学 | Process for manufacturing bionic gecko structure material |
CN102854741A (en) * | 2012-09-29 | 2013-01-02 | 青岛理工大学 | Compound soft die for wafer-grade nano imprinting of uneven substrate and manufacturing method |
CN103991837A (en) * | 2014-03-07 | 2014-08-20 | 中山大学 | Micro-nano orderly through-hole array metal film sensor based on piezoelectric substrate sheet and manufacturing method thereof |
CN104823107A (en) * | 2012-12-10 | 2015-08-05 | Ev集团E·索尔纳有限责任公司 | Method for microcontact printing |
CN105431376A (en) * | 2013-07-26 | 2016-03-23 | 3M创新有限公司 | Method of making a nanostructure and nanostructured articles |
Family Cites Families (4)
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US6334960B1 (en) * | 1999-03-11 | 2002-01-01 | Board Of Regents, The University Of Texas System | Step and flash imprint lithography |
KR100797007B1 (en) * | 2006-08-04 | 2008-01-22 | 연세대학교 산학협력단 | Ordered micro/nano sized patterns of polymer films with microimprinting and controlled dewetting |
US20100252177A1 (en) * | 2007-10-26 | 2010-10-07 | Bae Systems Plc | Adhesive microstructures |
CA2830103C (en) * | 2011-03-15 | 2020-03-24 | National Research Council Of Canada | Microfluidic system having monolithic nanoplasmonic structures |
-
2016
- 2016-09-26 CN CN201610850447.7A patent/CN106542494B/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5512131A (en) * | 1993-10-04 | 1996-04-30 | President And Fellows Of Harvard College | Formation of microstamped patterns on surfaces and derivative articles |
CN101061058A (en) * | 2004-05-24 | 2007-10-24 | 新加坡科技研究局 | Imprinting of supported and free-standing 3-D micro-or nano-structures |
CN101421826A (en) * | 2006-03-17 | 2009-04-29 | 微量化学公司 | Packaging of mems devices |
CN102012632A (en) * | 2010-09-10 | 2011-04-13 | 中国科学院合肥物质科学研究院 | Method for preparing bionic adhesion arrays with different top end structures |
CN102431962A (en) * | 2011-12-07 | 2012-05-02 | 北京航空航天大学 | Preparation method and application of nanoimprint template |
CN102718181A (en) * | 2012-05-28 | 2012-10-10 | 华中科技大学 | Process for manufacturing bionic gecko structure material |
CN102854741A (en) * | 2012-09-29 | 2013-01-02 | 青岛理工大学 | Compound soft die for wafer-grade nano imprinting of uneven substrate and manufacturing method |
CN104823107A (en) * | 2012-12-10 | 2015-08-05 | Ev集团E·索尔纳有限责任公司 | Method for microcontact printing |
CN105431376A (en) * | 2013-07-26 | 2016-03-23 | 3M创新有限公司 | Method of making a nanostructure and nanostructured articles |
CN103991837A (en) * | 2014-03-07 | 2014-08-20 | 中山大学 | Micro-nano orderly through-hole array metal film sensor based on piezoelectric substrate sheet and manufacturing method thereof |
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CN106542494A (en) | 2017-03-29 |
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Inventor after: He Yang Inventor after: Li Xiaoting Inventor after: Wang Ying Inventor after: Lv Xianglian Inventor after: Yuan Weizheng Inventor after: Liu Shaowei Inventor after: Yang Ruyuan Inventor after: Zhou Qingqing Inventor after: Zeng Xingchang Inventor after: Zhu Bao Inventor after: Xu Yukun Inventor after: Liu Qian Inventor before: He Yang Inventor before: Wang Ying Inventor before: Yuan Weizheng Inventor before: Lv Xianglian Inventor before: Liu Shaowei Inventor before: Yang Ruyuan Inventor before: Zhou Qingqing Inventor before: Zeng Xingchang Inventor before: Zhu Bao Inventor before: Xu Yukun Inventor before: Liu Qian Inventor before: Li Xiaoting |
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