CN106443879B - Low-crosstalk arrayed waveguide grating - Google Patents
Low-crosstalk arrayed waveguide grating Download PDFInfo
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- CN106443879B CN106443879B CN201610918021.0A CN201610918021A CN106443879B CN 106443879 B CN106443879 B CN 106443879B CN 201610918021 A CN201610918021 A CN 201610918021A CN 106443879 B CN106443879 B CN 106443879B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12016—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the input or output waveguides, e.g. tapered waveguide ends, coupled together pairs of output waveguides
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Abstract
A low-crosstalk arrayed waveguide grating comprises an input waveguide area, an input slab waveguide area, an arrayed waveguide area, an output slab waveguide area and an output waveguide area, wherein the tail end of each input waveguide of the input waveguide area is positioned on an input Rowland circle and points to the center of an input surface of the arrayed waveguide area; the length difference between every two adjacent arrayed waveguides in the arrayed waveguide region is delta L; the position points of the input end center points of the arrayed waveguides on the input grating circle are projected onto the tangent line, the distances between the adjacent projection points are equal, and the distance is a fixed value d a (ii) a The structures of the output slab waveguide region and the output waveguide region are the same as those of the input slab waveguide region and the input slab waveguide region. The invention effectively reduces the level of crosstalk and meets the requirements of on-chip optical interconnection application.
Description
Technical Field
The invention relates to an optical communication device, in particular to an array waveguide grating with low crosstalk.
Background
An Arrayed Waveguide Grating (AWG), which is a Wavelength Division Multiplexing (WDM) device, plays a very important role in optical communication and on-chip spectrometers. AWGs based on low-index-difference platforms (Silica-on-Silica platforms) have been very excellent in performance and widely used commercially, but due to their large size, it is difficult to achieve high-density integration, limiting their application in miniaturized on-chip optical interconnect systems. In order to realize high-density photonic integration, it is very important to obtain a miniaturized AWG, which turns people into research on AWG with a high refractive index difference (e.g., silicon-on-insulator (SOI)) platform, but due to the waveguide structure on the submicron scale, the roughness of the waveguide sidewall and the size change caused by the process defects will have a great influence on the performance of the AWG, and thus the application thereof is seriously hindered. The improved research of AWG performance based on SOI platform with high refractive index difference becomes a research hotspot in recent years, W.Bogaerts et al (W.Bogaerts, et al, "Silicon-on-insulator spectral filters manufactured with CMOS technology", IEEE JSTQE,16(1), pp.33-44,2010; W.Bogaerts et al, spectral filter manufactured by CMOS technology on SOI platform, IEEE JSTQE,2010, 16 (1): 33-44) adopts AWG layout with saddle structure, and introduces wide straight waveguide in array waveguide to generate optical path difference of adjacent optical path and introduces shallow etching waveguide at the connection of array waveguide and array waveguide to reduce mismatch between the planar waveguide mode and the array waveguide mode, thereby reducing the crosstalk and loss of AWG. S.Pathak et al (S.Pathak, et al, "effect of mask dispersion on performance of silicon arrayed waveguide gratings", IEEE PTL,26(7), pp.718-721,2014; namely S.Pathak et al, influence of mask dispersion on performance of silicon arrayed waveguide gratings, and Rapid report on photon technology, 2014, 26 (7): 718-721) have studied the influence of mask manufacturing technology on the interference of AWG, and propose to adopt a high-precision mask dispersion mode to reduce the interference level. J.park et al (J.park, et al, "performance improvement in silicon arrayed waveguide grating by applying scattering of scattering near the boundary of star coupler", application, Opt.,54(17), pp.5597-5602,2015; i.e., J.park et al, improve the performance of silicon arrayed waveguide gratings by suppressing the scattering at the boundary of star coupler, and use optics, 2015, 54 (17): 5597-5602) reduce the crosstalk and loss of AWG by suppressing the multimode excitation and scattering loss induced at the interface of array waveguide and slab waveguide during mode transition.
While these above methods have improved the performance of high index contrast AWGs, they have not been sufficient to meet the practical application requirements, especially their level of crosstalk, and still need to be further improved. The invention further reduces the interference of the AWG by further improving the layout structure of the AWG on the basis of the existing optimized design.
Disclosure of Invention
In order to overcome the defects that the prior arrayed waveguide grating has higher crosstalk level and can not meet the requirements of on-chip optical interconnection application, the invention provides the arrayed waveguide grating with low crosstalk, which can effectively reduce the crosstalk level of the AWG on a platform with high refractive index difference and meet the requirements of on-chip optical interconnection application.
The purpose of the invention is realized by the following technical scheme:
a low-crosstalk arrayed waveguide grating comprises an input waveguide area, an input slab waveguide area, an arrayed waveguide area, an output slab waveguide area and an output waveguide area, wherein the tail end of each input waveguide of the input waveguide area is positioned on an input Rowland circle and points to the center of an input surface of the arrayed waveguide area; each input end of the output waveguide area is positioned on an output rowland circle and points to the center of the output surface of the array waveguide area, each array waveguide output end of the array waveguide area is positioned on an output grating circle and points to the center of the input surface of the output waveguide area, and the output rowland circle and the output grating circle are tangent to the center of the boundary line of the output slab waveguide area and the array waveguide area;
the length difference between every two adjacent arrayed waveguides in the arrayed waveguide region is delta L; the position point of the input end center point of each array waveguide on the input grating circle is projected on the tangent line of the intersection point of the input Rowland circle and the input grating circle, the distances between the adjacent projection points are equal, and the distance is a fixed value d a (ii) a The position point of the output end central point of each array waveguide on the output grating circle is projected to the tangent line of the intersection point of the output Rowland circle and the output grating circle, the distances between the adjacent projection points are equal, and the distance is a fixed value d a 。
The invention has the following beneficial effects: 1.the array waveguide grating noise suppression method has the advantages that the array waveguide grating noise suppression method reduces the array waveguide grating noise level, improves the spectral response shape of each output channel of the array waveguide grating, and reduces the frequency deviation of each channel response wavelength; 2. the manufacturing process is completely compatible with the traditional array waveguide grating, no additional process step and no additional component are needed, and other performances of the array waveguide grating are not influenced; 3. it can be implemented in different material platforms, especially for high index-difference platforms, such as silicon nitride (Si) 3 N 4 ) And silicon (Si) platforms.
Drawings
Fig. 1 is a structural layout of an arrayed waveguide grating as disclosed herein.
Fig. 2 is a layout diagram of the position of each arrayed waveguide in the arrayed waveguide grating on the grating circle according to the present invention.
Fig. 3 is a layout diagram of the positions of the arrayed waveguides of the arrayed waveguide grating on the grating circle in the conventional design.
FIG. 4 is based on the conventional design (the adjacent center positions of each arrayed waveguide on the grating circle are spaced by a distance d) a ) Next, on a SOI (silicon on insulator) platform, when the center channel is input (i.e., from the 8 th input waveguide), a 15-channel AWG output spectrum is obtained.
FIG. 5 shows the design proposed by the present invention (the central point of each arrayed waveguide on the grating circle is projected onto the tangent line at the central point of the boundary between the input/output slab waveguide region and the arrayed waveguide region, and the distance between the adjacent projected points is d a ) The output spectrum of an AWG with 15 channels is obtained when the central channel is input on the SOI platform.
Fig. 6 is a graph of the output spectrum of the 15-channel AWG when the edge channel is input (i.e., from the 1 st input waveguide) on the SOI platform based on the conventional design.
Fig. 7 is a graph of the output spectrum of the 15-channel AWG on the SOI platform when the edge channel is input (i.e., from the 1 st input waveguide) based on the proposed design of the present invention.
Fig. 8 is a graph of the output spectrum of the 15-channel AWG obtained when the edge channel is input (i.e., from the 15 th input waveguide) on the SOI platform based on the conventional design.
Fig. 9 is a graph of the output spectrum of the 15-channel AWG on the SOI platform when the edge channel is input (i.e., from the 15 th input waveguide) based on the proposed design of the present invention.
Fig. 10 shows the response spectra of the edge channel and the center channel of the SOI AWG obtained at the input of the center channel under the conventional design and the design proposed by the present invention.
Fig. 11 shows the central response wavelength of the 15 output channels of the SOI AWG obtained when the central channel is input, deviating from the designed central wavelength, under the conventional design and the design proposed by the present invention.
In the figure: 1. an input waveguide area, 2, an output surface of the input waveguide area or each input waveguide end of the input waveguide area, 3, an output surface center of the input waveguide area, 4, an input slab waveguide area, 5, an input rowland circle, 6, an input grating circle, 7, an input surface of the array waveguide area or each array waveguide input end of the array waveguide area, 8, a tangent line at an intersection point of the input rowland circle and the input grating circle, 9, an input surface center of the array waveguide area or a center of an intersection line of the input slab waveguide area and the array waveguide area, 10, the array waveguide area, 11, a tangent line at an intersection point of the output rowland circle and the output grating circle, 12, an output surface center of the array waveguide area or a center of an intersection line of the output slab waveguide area and the array waveguide area, 13, an output surface of the array waveguide area or each array waveguide output end of the array waveguide area, 14, an output grating circle, 15, an output rowland circle, 16. an output slab waveguide area 17, an input surface center of the output waveguide area 18, each input end of the input surface of the output waveguide area or the output waveguide area 19, an output waveguide area 20, a radius R, 21 of a Rowland circle, a radius 2R, 22 of a grating circle, a connecting line of the output surface center of the input waveguide area and the input surface center of the array waveguide area 23, a position point of a center point of each array waveguide end on the grating circle, projection points of 24, 23 on a tangent line of the Rowland circle and the grating circle, 25, position points of end center points of two adjacent array waveguides on a circle of the grating tangent line, wherein the position points of the end center points of the two adjacent array waveguides are on the circle of the Rowland the grating circleProjected dot spacing d a And 26, the distance d between the position points of the tail end central points of two adjacent array waveguides on the grating circle a 。
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1 to 11, a low-crosstalk arrayed waveguide grating includes an input waveguide region 1, an input slab waveguide region 4, an arrayed waveguide region 10, an output slab waveguide region 16, and an output waveguide region 19, where each input waveguide end 2 of the input waveguide region is located on an input rowland circle 5 and points to an input surface center 9 of the arrayed waveguide region, each array waveguide input end 7 of the arrayed waveguide region is located on an input grating circle 6 and points to an output surface center 3 of the input waveguide region, and the input rowland circle 5 and the input grating circle 6 are tangent to the center 9 of an intersection line between the input slab waveguide region and the arrayed waveguide region; each input end 18 of the output waveguide area is positioned on an output Rowland circle 15 and points to the output surface center 12 of the array waveguide area, each array waveguide output end 13 of the array waveguide area is positioned on an output grating circle 14 and points to the input surface center 17 of the output waveguide area, and the output Rowland circle 15 and the output grating circle 14 are tangent to the center 12 of the boundary line of the output slab waveguide area and the array waveguide area;
the length difference between every two adjacent arrayed waveguides in the arrayed waveguide region is delta L; the position point 23 of the central point of the input end of each array waveguide on the input grating circle is projected on the tangent line 8 at the intersection point of the input Rowland circle and the input grating circle, the distances between the adjacent projection points are equal, and the distance is d a 25; the position point 23 of the output end central point of each array waveguide on the output grating circle is projected on the tangent line 11 at the intersection point of the output Rowland circle and the output grating circle, the distances between the adjacent projection points are equal, and the distance is d a 25。
Example (c): a15 x 15 arrayed waveguide grating with low crosstalk and good spectral shape was designed on a 220nm thick SOI platform. Because the SOI material with high refractive index difference is adopted, a universal saddle-shaped structure is selected to arrange the arrayed waveguides, namely, the phase difference in the adjacent arrayed waveguides is introduced from a wide straight waveguide, meanwhile, the bent waveguide in each arrayed waveguide adopts a single-mode narrow waveguide, the narrow waveguide and the wide waveguide are connected through a linear adiabatic taper, the width of the wide waveguide for introducing the phase difference in the arrayed waveguides is 1 mu m, and the width of the single-mode narrow waveguide is 450 nm. Here we assume no process error, i.e. the waveguide is made perfect, and only the theoretical loss of the AWG is considered, and then compare the shape of the response spectrum of the AWG and the change in the crosstalk with the conventional design (array waveguide has a fixed spacing on the grating circle) with the design proposed by the present invention (array waveguide has a fixed spacing on the tangent at the intersection of the grating circle and the rowland circle). Table 1 gives the basic design parameters of a 15 x 15 AWG based on 220nm thick SOI material:
TABLE 1
The design adopted by the invention is shown in the attached figure 2, namely when the central position point of each array waveguide on the grating circle is projected on the tangent line at the intersection point of the Rowland circle and the grating circle, the distance between the adjacent projection points is constant da; similarly, fig. 3 shows the design structure of the conventional arrayed waveguide grating, i.e. the distance between the central points of the adjacent arrayed waveguides on the grating circle is constant da, so in the design proposed by the present invention (fig. 2), the distance between the central points of the adjacent arrayed waveguides on the grating circle varies.
Without considering the loss and phase error generated in the AWG manufacturing process, fig. 4 shows the output spectrogram of the AWG with 15 channels obtained when the central input waveguide (8 th input waveguide) is input under the conventional layout design of the arrayed waveguide (as shown in fig. 3), from which we can see that the response spectrum of the edge channel far away from the central output channel gradually appears a side lobe, and the amplitude of the side lobe gradually becomes larger, increasing the crosstalk, while the response spectra of the central output channels are perfect and do not appear a side lobe. Similarly, fig. 5 shows the output spectral response of the AWG when the central channel is input (as shown in fig. 2) after the arrayed waveguide layout proposed by the present invention is adopted, and the response spectra of all 15 channels obtained from fig. 5 are perfect, like the central output channels in fig. 4, and the side lobe phenomenon similar to that in fig. 4 does not appear. The effectiveness of the arrayed waveguide layout design proposed by the present invention in improving the output spectral shape of the AWG is demonstrated.
Furthermore, we compare the response spectra of the 15 output channels obtained under the conventional design and the proposed design when the two input channels at the edge are used as input respectively. Fig. 6 shows the output spectra of 15 channels obtained when the first input channel (uppermost edge) is input in the conventional design, and it can be seen that the amplitude of the occurrence of side lobes becomes larger and the asymmetric shape of the spectrum becomes more severe. Fig. 7 shows the output spectra of 15 channels obtained when the first input channel (the uppermost edge) is input after the design of the present invention is adopted, and it can be seen that the 15 obtained output spectra have symmetrical shapes, and the side lobe phenomenon in fig. 6 does not occur.
Similarly, fig. 8 shows the response spectrum of 15 output channels obtained when the input channel at the lowest edge (the 15 th input waveguide) is input under the conventional arrayed waveguide layout design, and it can be seen that the side lobe phenomenon is very serious and the spectrum shape is deformed as in fig. 6. Fig. 9 shows that when the input channels at the lowest edge are input by using the arrayed waveguide layout design proposed by the present invention, the spectral responses of the 15 output channels do not have any side lobe, and the spectra are quite symmetrical. It is again demonstrated that the design structure proposed by the present invention plays an important role in improving the output spectral response shape of AWG and reducing the level of crosstalk.
To clearly compare the difference between the conventional design and the inventive design, we chose a graph of the spectral response obtained for the two designs at the central input channel (8 th input waveguide), as shown in fig. 10. It can be seen that for the central output channel, the two design structures have the same output spectrum, however, for the two most edge output channels, the spectrum under the conventional design has obvious side lobes and the crosstalk level is increased, while the edge channel spectrum obtained under the design of the invention is the same as the response spectrum of the central channel and has no side lobe. Furthermore, we can also see that for the two most marginal channels under conventional design, the central response wavelength of their spectra has shifted from the actual design central wavelength, resulting in the spectra exhibiting asymmetry. Fig. 11 shows the difference between the maximum energy response wavelength of each channel and the designed central response wavelength of the channel obtained under two designs, and it can be seen that, under the conventional design, as the ordinal number of the output channel gradually gets away from the central output channel, the actually obtained central response wavelength gradually deviates from the designed central response wavelength, and the wavelength deviation value gets larger toward the edge-most channel; after the design structure of the invention is utilized, the central response wavelength of the channel is completely consistent with the designed central response wavelength for all output channels, and no difference occurs. The position layout of the array waveguide provided by the invention is utilized to effectively reduce the crosstalk level of the AWG output channel and reduce the asymmetric characteristic of the output frequency spectrum.
Claims (1)
1. A low-crosstalk arrayed waveguide grating comprises an input waveguide area, an input slab waveguide area, an arrayed waveguide area, an output slab waveguide area and an output waveguide area, wherein the tail end of each input waveguide of the input waveguide area is positioned on an input Rowland circle and points to the center of an input surface of the arrayed waveguide area; each input end of the output waveguide area is positioned on an output rowland circle and points to the center of the output surface of the array waveguide area, each array waveguide output end of the array waveguide area is positioned on an output grating circle and points to the center of the input surface of the output waveguide area, and the output rowland circle and the output grating circle are tangent to the center of the boundary line of the output slab waveguide area and the array waveguide area, and the optical fiber array waveguide optical fiber array is characterized in that:
the length difference between every two adjacent arrayed waveguides in the arrayed waveguide region is delta L; the position point of the input end center point of each array waveguide on the input grating circle is projected on the tangent line of the intersection point of the input Rowland circle and the input grating circle, the distances between the adjacent projection points are equal, and the distance is a fixed value d a (ii) a The position point of the output end central point of each array waveguide on the output grating circle is projected on the tangent line of the intersection point of the output Rowland circle and the output grating circle, the distances between the adjacent projection points are equal, and the distance is a fixed value d a ；
The array waveguides are arranged by adopting a saddle-shaped structure, namely phase difference in adjacent array waveguides is introduced by wide straight waveguides, meanwhile, the bent waveguides in each array waveguide adopt single-mode narrow waveguides, and the narrow waveguides and the wide waveguides are connected by linear adiabatic tapered waveguides.
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