CN106443879A - Low crosstalk array waveguide grating - Google Patents
Low crosstalk array waveguide grating Download PDFInfo
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- CN106443879A CN106443879A CN201610918021.0A CN201610918021A CN106443879A CN 106443879 A CN106443879 A CN 106443879A CN 201610918021 A CN201610918021 A CN 201610918021A CN 106443879 A CN106443879 A CN 106443879A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12016—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the input or output waveguides, e.g. tapered waveguide ends, coupled together pairs of output waveguides
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
A low crosstalk array waveguide grating comprises an input waveguide area, an input flat waveguide area, an array waveguide area, an output flat waveguide area and an output waveguide area. Each input waveguide tail end of the input waveguide area is located on an input Rowland circle and points to an input surface center of the array waveguide area. Each array waveguide input end of the array waveguide area is located on an input grating circle and points to an output surface center of the input waveguide area. Simultaneously the input Rowland circle and the input grating circle is tangent to a boundary line center of the input flat waveguide area and the array waveguide area. A length difference between each adjacent array waveguides in the array waveguide area is delta L. A position point of an input end center point of each array waveguide on the input grating circle is projected to a tangent line, distances between adjacent projection points are equal and each distance is a fixed value da. Structures of the output flat waveguide area and the output waveguide area are the same with these of the input waveguide area and the input flat waveguide area. By using the grating, a crosstalk level is effectively reduced and a demand of an on-chip optical interconnection application is satisfied.
Description
Technical field
The present invention relates to optic communication device, especially a kind of low array waveguide grating harassed.
Background technology
Array waveguide grating (arrayed waveguide grating, AWG), as a kind of wavelength-division multiplex
(wavelength division multiplexing, WDM) device, plays very heavy in optic communication and piece glazing spectrometer
The role wanting.Its performance of AWG based on low-refraction difference platform (Silica-on-Silicon, the silicon dioxide platform on silicon)
Very outstanding, and broad commercial applications, but due to the size of such AWG larger it is difficult to realize highdensity integrated, limit
Make its application in the on-chip optical interconnection system of miniaturization.In order to enable highdensity integreted phontonics, obtain miniaturization
AWG will become extremely important, this allows for people and sight has been turned to high index-contrast (such as, silicon-on-
Insulator, SOI) platform AWG research, but due to the waveguiding structure on its submicron-scale, technique makes imperfect tape
Come waveguide sidewalls are coarse and change in size etc. will produce significant impact to the performance of AWG, seriously hinder its application.Based on height
The linguistic term of the AWG performance of refractivity SOI platform becomes for a study hotspot in recent years, W.Bogaerts et al.
(W.Bogaerts,et al,“Silicon-on-insulator spectral filters fabricated with CMOS
technology”,IEEE JSTQE,16(1),pp.33-44,2010；I.e. W.Bogaerts etc., SOI platform utilizes CMOS skill
The spectral filter that art makes, IEEE JSTQE, 2010,16 (1)：33-44) adopt the AWG layout of saddle-shaped configuration, exist simultaneously
Introduce wide straight wave guide in Waveguide array to produce the optical path difference in adjacent optical path footpath and to draw in Waveguide array and planar waveguide junction
Enter light engraving erosion waveguide reducing the mismatch between planar waveguide pattern and Waveguide array pattern, thus reduce AWG harass and
Loss.S.Pathak et al. (S.Pathak, et al, " effect of mask discretization on
performance of silicon arrayed waveguide gratings”,IEEE PTL,26(7),pp.718-721,
2014；I.e. S.Pathak etc., the discrete impact to silicon array waveguide optical grating performance of mask, photon technology bulletin, 2014,26 (7)：
718-721) have studied the impact that mask fabrication technique harasses to AWG it is proposed that will come using high-precision mask discrete way
Reduce and harass level.J.Park et al. (J.Park, et al, " performance improvement in silicon
arrayed waveguide grating by suppression of scattering near the boundary of a
star coupler”,Appl.Opt.,54(17),pp.5597-5602,2015；I.e. J.Park etc., by suppressing star-like coupling
Device boundary scatters and to improve the performance of silicon array waveguide optical grating, Application Optics, and 2015,54 (17)：5597-5602) pass through suppression
The many mode excitations causing during patten transformation at Waveguide array processed and planar waveguide interface and scattering loss, reduce altering of AWG
Disturb and be lost.
Although the above method all improves the performance of high index-contrast AWG, they are also insufficient for reality
Application demand, particularly it harasses level it is still necessary to be lifted further.The present invention by existing optimization design basis it
On, reduce harassing of AWG further by improving the layout structure of AWG further.
Content of the invention
In order to overcome harassing that level is higher, the need of on-chip optical interconnection application cannot being met of existing array waveguide grating
Ask, the present invention provides a kind of harassing level, meeting on-chip optical interconnection application need of the AWG on effective reduction high index-contrast platform
The low array waveguide grating harassed asked.
The purpose of the present invention is achieved by the following technical solution：
A kind of low array waveguide grating harassed, including input waveguide area, input waveguide zone, Waveguide array area, defeated
Go out waveguide zone and output waveguide area, each input waveguide end in described input waveguide area is located on an input Rowland circle
And pointing to the input face center in Waveguide array area, each Waveguide array input in Waveguide array area is located on an input grating circle
And point to the output face center in input waveguide area, be simultaneously entered Rowland circle and input grating circle be tangential on input waveguide zone and
The center of Waveguide array area boundary line；Each input in described output waveguide area is located on an output Rowland circle and points to battle array
The output face center of row waveguide section, each Waveguide array outfan in Waveguide array area is located at an output grating circle and above and points to defeated
Go out the input face center of waveguide section, and export Rowland circle and be tangential on output waveguide zone and Waveguide array area with output grating circle
The center of boundary line；
The length difference between each adjacent array waveguide in described Waveguide array area is Δ L；The input of each Waveguide array
End central point projects on input Rowland circle and the tangent line of input grating circle point of intersection in the location point on input grating circle, and phase
The distance of adjacent subpoint is all equal, and distance is fixed value da；The outfan central point of each Waveguide array is on output grating circle
Location point projects on output Rowland circle and the tangent line of output grating circle point of intersection, and the distance of adjacent projections point is all equal, away from
From for fixed value da.
Beneficial effects of the present invention are mainly manifested in：That the 1st, reduces array waveguide grating harasses level, improves Waveguide array
The spectral response shape of each output channel of grating, reduces the frequency shift (FS) of each channel response wavelength；2nd, processing technology and traditional battle array
Train wave guide grating is completely compatible, without additional technical steps and introduce extra components and parts, do not affect array waveguide grating other
Performance；3rd, it can be realized in different material platforms, is particularly well-suited to the platform of high index-contrast, such as silicon nitride
(Si3N4) and the platform such as silicon (Si).
Brief description
Fig. 1 is a kind of topology layout figure of the array waveguide grating that this civilization is given.
Fig. 2 is each Waveguide array in array waveguide grating proposed by the present invention location layout's figure on grating circle.
Fig. 3 be array waveguide grating in traditional design each Waveguide array grating circle on location layout figure.
Fig. 4 is that (adjacent center position dot spacing on grating circle for each Waveguide array is d based on traditional designa) under,
On SOI (silicon on insulator) platform, (input from the 8th input waveguide) when central passage inputs, obtaining 15
The output light spectrogram of the AWG of passage.
Fig. 5 is that (center spot projection on grating circle for each Waveguide array is to defeated based on after design proposed by the present invention
Enter/export on waveguide zone and the tangent line of boundary line central spot in Waveguide array area, and the distance of adjacent projections point is
da), when central passage input is taken in by SOI platform, the output light spectrogram of the AWG of obtaining 15 passage.
Fig. 6 is based under traditional design, on SOI platform, (defeated from the 1st input waveguide when edge gateway inputs
Enter), the output light spectrogram of the AWG of this 15 passage obtaining.
Fig. 7 be based on proposed by the present invention design after, on SOI platform, (defeated from the 1st when edge gateway inputs
Enter waveguide input), the output light spectrogram of the AWG of this 15 passage obtaining.
Fig. 8 is based under traditional design, on SOI platform, (defeated from the 15th input waveguide when edge gateway inputs
Enter), the output light spectrogram of the AWG of this 15 passage obtaining.
Fig. 9 be based on proposed by the present invention design after, on SOI platform, (defeated from the 15th when edge gateway inputs
Enter waveguide input), the output light spectrogram of the AWG of this 15 passage obtaining.
Figure 10 is under traditional design structure and design structure proposed by the present invention, and obtain during central passage input should
The edge gateway of SOI AWG and central passage response spectrum.
Figure 11 is under traditional design structure and design structure proposed by the present invention, and during central passage input, obtain should
The situation of the centre wavelength designed by the response wave length deviation of center of 15 output channels of SOI AWG.
In figure：1st, input waveguide area, each input waveguide end in 2, the output face in input waveguide area or input waveguide area, 3,
The output face center in input waveguide area, 4, input waveguide zone, 5, input Rowland circle, 6, input grating circle, 7, Waveguide array
The input face in area or each Waveguide array input in Waveguide array area, 8, input Rowland circle and input grating justify cutting of point of intersection
Line, the center of 9, the input face center in Waveguide array area or input waveguide zone and Waveguide array area boundary line, 10, array ripple
Lead area, the tangent line of 11, output Rowland circle and output grating circle point of intersection, 12, the output face center in Waveguide array area or output are flat
Board waveguide area and the center of Waveguide array area boundary line, each array ripple in 13, the output face in Waveguide array area or Waveguide array area
Lead outfan, 14, output grating circle, 15, output Rowland circle, 16, output waveguide zone, 17, the input face in output waveguide area
Center, each input in 18, the input face in output waveguide area or output waveguide area, 19, output waveguide area, 20, the half of Rowland circle
Footpath R, 21, grating circle radius 2R, the company at the input face center in 22, the output face center in input waveguide area and Waveguide array area
Line, 23, the central point of each Waveguide array end location point on grating circle, 24,23 in Rowland circle and grating circle point of intersection
Subpoint on tangent line, 25, the distal center point of the adjacent two Waveguide arrays location point on grating circle is in Rowland circle and light
Projection dot spacing d on the tangent line of grid circle point of intersectiona, 26, the distal center point of adjacent two Waveguide arrays is on grating circle
Position dot spacing da.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
With reference to Fig. 1～Figure 11, a kind of low array waveguide grating harassed, including input waveguide area 1, input waveguide zone
4th, Waveguide array area 10, output waveguide zone 16 and output waveguide area 19, each input waveguide in described input waveguide area is last
End 2 is located on an input Rowland circle 5 and points to the input face center 9 in Waveguide array area, each Waveguide array in Waveguide array area
Input 7 is located on an input grating circle 6 and points to the output face center 3 in input waveguide area, is simultaneously entered Rowland circle 5 and defeated
Enter the center 9 that grating circle 6 is tangential on input waveguide zone and Waveguide array area boundary line；Described output waveguide area each defeated
Enter the output face center 12 that end 18 is located on an output Rowland circle 15 and points to Waveguide array area, each array in Waveguide array area
Waveguide output end 13 is located on an output grating circle 14 and points to the input face center 17 in output waveguide area, and exports Rowland circle
15 are tangential on the center 12 of output waveguide zone and Waveguide array area boundary line with output grating circle 14；
The length difference between each adjacent array waveguide in described Waveguide array area is Δ L；The input of each Waveguide array
End central point projects on input Rowland circle and the tangent line 8 of input grating circle point of intersection in the location point 23 on input grating circle,
And the distance of adjacent projections point is all equal, distance is da25；The outfan central point of each Waveguide array is on output grating circle
Location point 23 projects on output Rowland circle and the tangent line 11 of output grating circle point of intersection, and the distance of adjacent projections point is homogeneous
Deng distance is da25.
Example：On the thick SOI platform of 220nm, design one 15 × 15 has the low battle array harassed with good spectral shape
Train wave guide grating.Due to being the SOI material of high index-contrast, we select general " shape of a saddle " structure to carry out layout array ripple
Lead, that is, in adjacent array waveguide, phase contrast is introduced by wide straight wave guide, and the curved waveguide in each Waveguide array adopts single mode simultaneously
Narrow waveguide, is connected by linear adiabatic taper between narrow waveguide and wide waveguide, introduces phase contrast in Waveguide array
Wide duct width be 1 μm, the narrow duct width of single mode be 450nm.Here it will be assumed that there is no fabrication error, i.e. waveguide system
Make perfect, only consider the theoretical loss of AWG, then compare using traditional design (Waveguide array have on grating circle fixing between
Away from) and design proposed by the present invention (Waveguide array grating circle and Rowland circle point of intersection tangent line on there is constant spacing) after,
The shape of AWG response spectrum and harass change.Table 1 gives the basic of one 15 × 15 AWG based on 220nm thickness SOI material
Design parameter：
Table 1
Illustrate design of the present invention in our accompanying drawing 2, i.e. center on grating circle for each Waveguide array
When location point projects on Rowland circle and the tangent line of grating circle point of intersection, the constant distance between adjacent projections point is da；Similarly,
Accompanying drawing 3 gives the design structure of traditional array waveguide optical grating, that is, adjacent array waveguide grating circle on center point it
Between constant distance be da, so in design proposed by the present invention (accompanying drawing 2), centre bit on grating circle for the adjacent array waveguide
Between putting a little, distance is change.
The loss producing in not considering AWG manufacturing process and phase error, accompanying drawing 4 gives Waveguide array in traditional cloth
Under office's design (as shown in Figure 3), the AWG of this 15 passage obtaining when center input waveguide (the 8th input waveguide) inputs
Output light spectrogram, from this figure it will be seen that the response spectrum away from the edge gateway of center output channel engenders
Secondary lobe, and the amplitude of this secondary lobe becomes larger, and increases and harasses, and the response spectrum of the several output channel in center is very complete
, secondary lobe in U.S..Similarly, accompanying drawing 5 give using after Waveguide array layout designs proposed by the present invention (as accompanying drawing 2
Shown), when central passage inputs, the output spectrum response diagram of this AWG, as the several output channel in the center in accompanying drawing 4,
The response spectrum of all 15 passages obtaining from Fig. 5 is all very perfect, does not occur similar to the secondary lobe phenomenon in Fig. 4.Explanation
Waveguide array layout designs proposed by the present invention are improving the output spectrum of AWG effectiveness in shape.
Further, when we compare and are respectively adopted the two input channel inputs in edge, under traditional design and originally
The response light spectrogram of 15 output channels obtaining under the design that invention proposes.Accompanying drawing 6 gives under traditional design, when first
The output spectrum of 15 passages obtaining during input channel (uppermost edge) input is it can be seen that the amplitude that secondary lobe occurs becomes more
Greatly, and the asymmetrically shaped of spectrum becomes more serious.After accompanying drawing 7 gives using the design of the present invention, when first defeated
Enter the output spectrum of 15 passages obtaining during passage (uppermost edge) input it can be seen that the shape of 15 output spectrums obtaining
Shape is very symmetrical, the secondary lobe phenomenon in accompanying drawing 6.
Similarly, accompanying drawing 8 gives under traditional array waveguide layout design, when lowermost edge input channel inputs the (the 15th
Root input waveguide) when, it can be seen that the same with accompanying drawing 6, secondary lobe phenomenon is very tight for 15 obtaining output channel response light spectrogram
Weight, and spectral shape deformity change.After accompanying drawing 9 gives using Waveguide array layout designs proposed by the present invention, under
During edge input channel input, any secondary lobe in the spectral response of 15 output channels, and spectrum is very symmetrical.Again
Once illustrate, design structure proposed by the present invention harasses tool in level in the output spectrum response shape and reduction improving AWG
Play an important role.
For the difference between the contrast traditional design that becomes apparent from and present invention design, we pick in center input
Under passage (the 8th input waveguide), the relativity figure of the spectral response that two kinds of design structures obtain, as shown in Figure 10.Can
To find out, for center output channel, under two kinds of design structures, there is identical output spectrum, however defeated for two edges
Go out the frequency spectrum under passage, traditional design and occur in that obvious secondary lobe, increase and harass level, and the side obtaining under present invention design
, as the response spectrum of central passage, any secondary lobe in edge channel frequency spectrum.Additionally, we it can also be seen that for
Two edge gateways under traditional design, the center response wave length of its spectrum has deviated from the designed central wavelength of reality, leads
Frequency spectrum is caused to show asymmetry.Accompanying drawing 11 give under two kinds of designs the Energy maximum value response wave lengths of each passage that obtain and
Difference between the center response wave length of this designed passage it can be seen that under traditional design, with output channel ordinal number by
Gradually away from center output channel, the center response wave length actually obtaining is gradually deviated from designed center response wave length, and more
Arrive edge gateway, wavelength departure value is bigger；And after utilizing the design structure of the present invention, for all of output channel, this leads to
The center response wave length in road and designed center response wave length are completely the same, any difference.Show again
After Waveguide array location layout proposed by the present invention, can effectively reduce harassing level and reducing output of AWG output channel
The asymmetric property of frequency spectrum.
Claims (1)
1. a kind of low array waveguide grating harassed, including input waveguide area, input waveguide zone, Waveguide array area, output
Waveguide zone and output waveguide area, each input waveguide end in described input waveguide area is located on an input Rowland circle simultaneously
Point to the input face center in Waveguide array area, each Waveguide array input in Waveguide array area is located on an input grating circle simultaneously
Point to the output face center in input waveguide area, be simultaneously entered Rowland circle and input grating circle is tangential on input waveguide zone and battle array
The center of row waveguide section boundary line；Each input in described output waveguide area is located on an output Rowland circle and points to array
The output face center of waveguide section, each Waveguide array outfan in Waveguide array area is located at an output grating circle and above and points to output
The input face center of waveguide section, and round output waveguide zone and the Waveguide array area of being tangential on hands over exporting grating to export Rowland circle
The center in boundary line it is characterised in that：
The length difference between each adjacent array waveguide in described Waveguide array area is Δ L；In the input of each Waveguide array
Heart point projects on input Rowland circle and the tangent line of input grating circle point of intersection in the location point on input grating circle, and adjacent throwing
The distance of shadow point is all equal, and distance is fixed value da；Position on output grating circle for the outfan central point of each Waveguide array
Spot projection is on the tangent line of output Rowland circle and output grating circle point of intersection, and the distance of adjacent projections point is all equal, and distance is
Fixed value da.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115144964A (en) * | 2022-07-20 | 2022-10-04 | 浙江大学 | Silicon-based array waveguide grating based on Euler bending wide waveguide |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115144964A (en) * | 2022-07-20 | 2022-10-04 | 浙江大学 | Silicon-based array waveguide grating based on Euler bending wide waveguide |
| CN115144964B (en) * | 2022-07-20 | 2024-02-02 | 浙江大学 | Silicon-based array waveguide grating based on Euler bending wide waveguide |
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| Publication number | Publication date |
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| CN106443879B (en) | 2022-09-23 |
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