CN106405449A - Vertical-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer - Google Patents
Vertical-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer Download PDFInfo
- Publication number
- CN106405449A CN106405449A CN201611099387.6A CN201611099387A CN106405449A CN 106405449 A CN106405449 A CN 106405449A CN 201611099387 A CN201611099387 A CN 201611099387A CN 106405449 A CN106405449 A CN 106405449A
- Authority
- CN
- China
- Prior art keywords
- chip
- vertical
- magnetometer
- vertical coupled
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Lasers (AREA)
Abstract
The invention discloses a vertical-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer. The magnetometer comprises a laser. Light beams emitted by the laser are coupled into a Y waveguide splitter through a vertical coupling grating I, wherein one light beam is output after passing through a phase modulation unit, and the other light beam is output after adjustment and compensation. The two light beams are then output through a vertical coupling grating II and a vertical coupling grating III respectively, pass through a polarizer, an attenuation plate and a wave plate in sequence, are collimated and focused, and then go into an air chamber. After emergence, the two light beams are converted into electrical signals through a detection unit and then input to an integrated circuit chip through a subtracter. The integrated circuit chip controls the laser and the phase modulation unit. Compared with a single-optical-path chip-level magnetometer, through dual-optical-path common-mode rejection, the influence of optical power fluctuation and frequency fluctuation noise can be reduced greatly, the signal-to-noise ratio of the CPT magnetometer can be improved effectively, and thus, the sensitivity of the chip-level magnetometer is improved greatly.
Description
Technical field
The present invention relates to optical field and micro-nano system regions, the specially vertical coupled nanometer optical wave based on CPT effect
Lead double light path chip-scale gaussmeter.
Background technology
The progress of MEMS technology, has driven the development of micro manufacturing industry, and the chip gaussmeter based on CPT effect is due to being not required to
Want the local oscillator of Gigahertz magnitude, compared to conventional atom gaussmeter, several orders of magnitude, power consumption are reduced on volume
And performance is also improved to a great extent, and extend its range of application.Such as, air reconnaissance, space application, just
Suitable magnetometer array can be used for down-hole exploration, remote sensing and biomagnetic application.Can be seen that mesh from external achievement in research
The development performance parameter of front chip gaussmeter substantially meets certain applications demand, has been developed that commercial chip gaussmeter product, and
Achieve greater advance, but the design concept based on new departure, it is expected to so that its precision improves further.
In the experimental provision of chip gaussmeter, because various effect of noise, lead to signal amplitude very little, be extremely difficult to
The photon Johnson noise limit.The principal element wherein limiting sensitivity is amplitude noise and the frequency noise of VCSEL laser instrument.Swash
Light frequency noise is converted to amplitude noise by atomic resonance signal.Although by the jump that VCSEL laser instrument is locked onto atom
Move on line, the impact of light frequency noise bounce can be greatly reduced, but light frequency fluctuation noise is still very big.Secondly some
In VCSEL, mode competition noise between different polarization pattern, larger amplitude noise can be caused on the detector.All this
A little noises all reduce the sensitivity of chip-scale gaussmeter.
Frequency drift and the linear asymmetric decline also resulting in sensitivity of CPT, cause the factor of frequency displacement to have：Magnetic field,
The drift of buffer gas, temperature, optical frequency shift, acceleration or radio-frequency power.It is thus desirable to strictly controlling these parameters, or look for
To reduce the frequency sensitivity to these parameters for the chip gaussmeter to a kind of detection mechanism.
Content of the invention
Chip-scale gaussmeter is based on CPT（Coherent Population Trapping imprisons effect）Effect work, by measuring work atom base
The hyperfine splitting of the sensitive Zeeman sublevel of the magnetic between state F=1 and F=2, then deducts nominally hyperfine energy level and obtains Larmor
Frequency, and finally give magnetic field intensity.Monochromatic light road CPT gaussmeter operationally, due to the presence of common-mode noise, largely
Limit the raising of frequency stability.
In order to improve chip-scale gaussmeter magnetic field sensitivity further, strengthen and interconnect between light, effective control light passes in space
Defeated, the present invention seeks to proposing vertical coupled nano optical wave guide double light path chip-scale gaussmeter scheme.
The present invention adopts the following technical scheme that realization：
A kind of vertical coupled nano optical wave guide double light path chip-scale gaussmeter, including laser instrument, the light beam of described laser emitting
By vertical coupled gratingIt is coupled into Y waveguide beam splitter, wherein light beam exports after phase modulation unit, in addition one
Export after the adjusted compensation of bundle light, two-way light beam is again respectively through vertical coupled grating With vertical coupled grating Output, point
Do not sequentially pass through polaroid, attenuator, wave plate, collimation, enter air inlet chamber after focusing, after outgoing, two-beam is through probe unit
It is converted into after the signal of telecommunication through subtractor input ic chip, described IC chip is to laser instrument and phase-modulation list
Unit is regulated and controled.
Vertical coupled nano optical wave guide double light path chip-scale gaussmeter scheme proposed by the present invention, principle is as shown in figure 1, receive
Rice fiber waveguide double light path chip-scale gaussmeter is by VCSEL light source, the vertical coupled grating of nanometer, Y type nano optical wave guide, modulation, inclined
Shake control, MEMS air chamber, photodetection, multifunctional integrated circuit chip composition.
Using nano Y-shaped fiber waveguide, obtain the identical two-beam of performance, can be effectively improved by suppression common mode noise
Gaussmeter sensitivity is that its core is located, and adopts micro fabrication to nano optical wave guide functional unit, to ensure two-way light
Maximum identical.Opticator innovatively employs double light path scheme, and beam of laser is used for the CPT signal of Measurement atom, and in addition one
Shu Zuowei reference light, detectable signal subtracts each other the transition signal obtaining atom.Compared to the chip-scale gaussmeter scheme on monochromatic light road, should
Scheme can greatly reduce luminous power by double light path common mode inhibition and rise and fall and frequency fluctuation effect of noise, effectively improve CPT
The signal to noise ratio of gaussmeter, such that it is able to greatly improve the sensitivity of chip-scale gaussmeter；For by magnetic field, buffer gas, temperature,
The frequency displacement that optical frequency shift etc. causes, also has certain inhibitory action, thus improving the medium-term and long-term degree of stability of chip-scale gaussmeter.Fig. 1
In illustrate circuit part, subtractor will eliminate the clock signal input IC chip of common-mode noise, ic core
Piece completes laser instrument and phase modulation unit are regulated and controled.
Double light path chip-scale gaussmeter common mode noise rejection mechanism and double light path are as follows to equivalent magnetic field intensity Influencing Mechanism：
For research contents with the key issue that solves, in theory, with the three-lever system of atom as model it is considered to atomic system
Actual optical length, using rotating-wave approximation, apply Liouville-Bloch equation, draw the density that descriptive system develops
Matrix division.Numerical solution more clearly can reflect physics law, and is conducive to practical problem is made a concrete analysis of, therefore right
Said process carries out numerical computations.Scrutiny double light path and the interaction of rubidium atom, make a concrete analysis of two-way laser each simultaneously
The impact to output signal for the parameter, and then the quantitative relation obtaining each parameter of laser and CPT Signal-to-Noise, to double light path chip
The common mode noise rejection characteristic of level gaussmeter carries out theoretical validation, for guiding experiment.
As shown in Fig. 2 the light beam coupling of laser emitting enters Y waveguide beam splitter, wherein one tunnel is through phase-modulation list
Unit produces the coherent light of constant phase difference, and in addition a branch of regulation via Ohmic electrode compensates, two-way consistent with modulation light path with this
Light beam is then passed through vertical coupled grating output, through polaroid, attenuator, wave plate, enters rubidium after collimation and focusing
Atomic air chamber, the light beam through ovennodulation can produce CPT effect with atomic interaction, and non-modulated light then carries background noise
Signal, two-beam is converted into after the signal of telecommunication through probe unit and can eliminate background noise through subtractor, reaches raising frequency
The purpose of degree of stability.
According to the physical mechanism of CPT gaussmeter, as shown in figure 3, chip-scale gaussmeter physical piece mainly includes VCSEL swashing
Light device, nanometer Y waveguide beam splitter, optical glass combination, the micro- air chamber of MEMS, probe unit, RF coil.Couple output from Y waveguide
Light beam, enter air chamber in a subtle way by after polaroid, attenuator and λ/4 wave plate.Two-beam through air chamber reach simultaneously two as
Position detection chip, signal subtraction as eliminates common mode noise signal.
Brief description
Fig. 1 represents nano optical wave guide double light path chip-scale gaussmeter solution principle figure.
The integrated schematic diagram of Fig. 2 double light path nano optical wave guide functional unit.
Fig. 3 represents physical piece decomposing schematic representation in gaussmeter.
In figure, 1- laser instrument, 2-Y waveguide beam splitter, 31- polaroid, 32- attenuator, 33- λ/4 wave plate, 4-ITO heats
Piece, 5-RF coil, the micro- air chamber of 6-MEMS, 7- probe unit, 8- modulator electrode, 9- Ohmic electrode, the vertical coupled grating of 10- nanometer, the vertical coupled grating of 11- nanometer , the vertical coupled grating of 12- nanometer .
Specific embodiment
Below the specific embodiment of the present invention is described in detail.
A kind of vertical coupled nano optical wave guide double light path chip-scale gaussmeter, as shown in Figure 1,3, including VCSEL laser instrument
1, the light beam of described VCSEL laser instrument 1 outgoing passes through vertical coupled grating10 are coupled into Y waveguide beam splitter 2, and nanometer is vertical
Coupling grating 1 realizes VCSEL laser instrument is collimated with the coupling input of isolation laser light source（Coupling efficiency is better than 80%）, by coupling
Close technique of alignment and carry out Dock With Precision Position with nano Y-shaped waveguide；Wherein light beam exports after phase modulation unit, in addition a branch of
Export after the adjusted compensation of light, for example, 3.4GHz modulation can be carried out thus producing by modulator electrode 8 to a road guided wave light beam
Difference on the frequency is the sideband of 6.8GHz, and another road guided wave light beam is finely adjusted compensating with modulation light path by Ohmic electrode 9
Cause sex differernce；Two-way light beam is again respectively through vertical coupled grating 11 and vertical coupled grating 12 outputs, respectively successively
Through polaroid 31, attenuator 32, λ/4 wave plate 33, enter air inlet chamber by after collimation, focusing, described air chamber is rubidium atom gas
Room（The micro- air chamber of MEMS）, described rubidium atomic air chamber be respectively arranged with RF coil 5 and ITO heating plate 4 up and down.After beam exit,
Two-beam is after probe unit 7 is converted into the signal of telecommunication through subtractor input ic chip, described IC chip
Laser instrument and phase modulation unit are regulated and controled.
Wherein, as shown in Fig. 2 vertical coupled grating With vertical coupled grating It is gradual change grating, gradual change grating will
The light carrying sideband modulated signal through modulator electrode 8 passes through the vertical coupled grating of nanometer 11 are input to the micro- air chamber of MEMS,
Light after Ohmic electrode 9 compensates is passed through the vertical coupled grating of nanometer by gradual change grating 12 are input to the micro- air chamber of MEMS,
Two-beam reaches two as position detection chip through air chamber simultaneously, and signal subtraction as eliminates common mode noise signal.
When being embodied as, using MEMS technology realize waveguide, lenticule, micro- air chamber integrated.Will using extraordinary vacuum glue
Above-mentioned all parts become one.Compared with traditional monochromatic light road chip-scale gaussmeter, nano optical wave guide double light path chip magnetic
Strong meter employs nanometer Y waveguide in physical system part and has carried out light splitting to the light of laser emitting, and physical piece is being encapsulated
During need closely to be connected it with each light path part, reach reduction volume, the purpose of power consumption.
It should be noted last that, above example only in order to technical scheme to be described and unrestricted, although ginseng
It has been described in detail according to the embodiment of the present invention, it will be understood by those within the art that, to technical scheme
Modify or equivalent, without departure from the spirit and scope of technical scheme, it all should cover claim
In protection domain.
Claims (4)
1. a kind of vertical coupled nano optical wave guide double light path chip-scale gaussmeter, including laser instrument it is characterised in that：Described laser
The light beam of device outgoing passes through vertical coupled grating It is coupled into Y waveguide beam splitter, wherein light beam is after phase modulation unit
Output, in addition exports after the adjusted compensation of light beam, two-way light beam is again respectively through vertical coupled grating And vertical coupling optical
Grid Output, sequentially passes through polaroid, attenuator, wave plate, collimation respectively, enters air inlet chamber after focusing, after outgoing, two-beam
It is converted into through subtractor input ic chip after the signal of telecommunication through probe unit, described IC chip is to laser instrument
Regulated and controled with phase modulation unit.
2. vertical coupled nano optical wave guide double light path chip-scale gaussmeter according to claim 1 it is characterised in that：Described
Air chamber be rubidium atomic air chamber, described rubidium atomic air chamber be respectively arranged with RF coil and ITO heating plate up and down.
3. vertical coupled nano optical wave guide double light path chip-scale atomic clock according to claim 1 it is characterised in that：Described
In Y waveguide beam splitter, wherein export after the coherent light of light beam modulated electrode generation constant phase difference, in addition light beam is by Europe
Nurse electrode regulating compensate with this with modulate light path consistent after export.
4. vertical coupled nano optical wave guide double light path chip-scale atomic clock according to claim 1 it is characterised in that：Described
Vertical coupled grating With vertical coupled grating It is gradual change grating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611099387.6A CN106405449A (en) | 2016-12-05 | 2016-12-05 | Vertical-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611099387.6A CN106405449A (en) | 2016-12-05 | 2016-12-05 | Vertical-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106405449A true CN106405449A (en) | 2017-02-15 |
Family
ID=58083502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611099387.6A Pending CN106405449A (en) | 2016-12-05 | 2016-12-05 | Vertical-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106405449A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108519566A (en) * | 2018-04-11 | 2018-09-11 | 北京航空航天大学 | A kind of SERF atom magnetometer device and methods based on optical frequency shift modulation |
| CN108628152A (en) * | 2018-05-31 | 2018-10-09 | 中北大学 | The chip atomic clock microsystem of nanometer Y waveguide |
| CN111538072A (en) * | 2020-05-28 | 2020-08-14 | 吉林大学 | Total field magnetic measurement device suitable for underground and temperature drift suppression method |
| CN112234354A (en) * | 2020-09-29 | 2021-01-15 | 中国人民解放军国防科技大学 | Improved atom receiving antenna |
| CN113835165A (en) * | 2020-06-24 | 2021-12-24 | 华为技术有限公司 | Light emitting component, chip, optical module and optical communication equipment |
| CN116027233A (en) * | 2022-11-23 | 2023-04-28 | 北京自动化控制设备研究所 | Optical integration method of chip magnetometer and chip magnetometer |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101183769A (en) * | 2007-11-08 | 2008-05-21 | 北京交通大学 | Device for single polarization dual-wavelength fiber grating laser to generate microwave, millimeter wave |
| CN101598772A (en) * | 2009-06-26 | 2009-12-09 | 中北大学 | Micro atom steam bubble making method |
| CN101847994A (en) * | 2010-05-05 | 2010-09-29 | 中国科学院武汉物理与数学研究所 | Method and device for implementing Ramsey-CPT atomic frequency standard by microwave periodic On-Off modulation VCSEL |
| CN101916957A (en) * | 2010-08-05 | 2010-12-15 | 哈尔滨工业大学 | Acousto-optic modulation-based 2mu m polarized orthogonal laser emitting system applied to laser heterodyne interferometer |
| CN101990742A (en) * | 2008-02-07 | 2011-03-23 | L·甘 | Device, system, and method of frequency generation using an atomic resonator |
| CN102075187A (en) * | 2011-02-22 | 2011-05-25 | 合肥威师智能电子电器厂 | Cpt atomic clock servo circuit |
| CN103454902A (en) * | 2013-06-24 | 2013-12-18 | 苏州大学 | Atomic clock |
| CN103684450A (en) * | 2013-12-24 | 2014-03-26 | 北京大学 | Method for outputting standard frequency of coherent population beat-frequency atomic clock |
| CN103856215A (en) * | 2014-03-03 | 2014-06-11 | 苏州大学 | Low-power-consumption chip level atomic clock physical packaging device |
| CN206960632U (en) * | 2016-12-05 | 2018-02-02 | 中北大学 | Vertical coupled nano optical wave guide double light path chip-scale magnetometer |
-
2016
- 2016-12-05 CN CN201611099387.6A patent/CN106405449A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101183769A (en) * | 2007-11-08 | 2008-05-21 | 北京交通大学 | Device for single polarization dual-wavelength fiber grating laser to generate microwave, millimeter wave |
| CN101990742A (en) * | 2008-02-07 | 2011-03-23 | L·甘 | Device, system, and method of frequency generation using an atomic resonator |
| CN101598772A (en) * | 2009-06-26 | 2009-12-09 | 中北大学 | Micro atom steam bubble making method |
| CN101847994A (en) * | 2010-05-05 | 2010-09-29 | 中国科学院武汉物理与数学研究所 | Method and device for implementing Ramsey-CPT atomic frequency standard by microwave periodic On-Off modulation VCSEL |
| CN101916957A (en) * | 2010-08-05 | 2010-12-15 | 哈尔滨工业大学 | Acousto-optic modulation-based 2mu m polarized orthogonal laser emitting system applied to laser heterodyne interferometer |
| CN102075187A (en) * | 2011-02-22 | 2011-05-25 | 合肥威师智能电子电器厂 | Cpt atomic clock servo circuit |
| CN103454902A (en) * | 2013-06-24 | 2013-12-18 | 苏州大学 | Atomic clock |
| CN103684450A (en) * | 2013-12-24 | 2014-03-26 | 北京大学 | Method for outputting standard frequency of coherent population beat-frequency atomic clock |
| CN103856215A (en) * | 2014-03-03 | 2014-06-11 | 苏州大学 | Low-power-consumption chip level atomic clock physical packaging device |
| CN206960632U (en) * | 2016-12-05 | 2018-02-02 | 中北大学 | Vertical coupled nano optical wave guide double light path chip-scale magnetometer |
Non-Patent Citations (2)
| Title |
|---|
| 张樊: "相干布居囚禁原子钟和磁强计的差分探测研究", 《中国优秀硕士学位论文全文数据库工程科技Ⅱ辑》 * |
| 张维叙: "《光纤陀螺及其应用》", 31 December 2008 * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108519566A (en) * | 2018-04-11 | 2018-09-11 | 北京航空航天大学 | A kind of SERF atom magnetometer device and methods based on optical frequency shift modulation |
| CN108519566B (en) * | 2018-04-11 | 2020-04-17 | 北京航空航天大学 | SERF atomic magnetometer device and method based on optical frequency shift modulation |
| CN108628152A (en) * | 2018-05-31 | 2018-10-09 | 中北大学 | The chip atomic clock microsystem of nanometer Y waveguide |
| CN111538072A (en) * | 2020-05-28 | 2020-08-14 | 吉林大学 | Total field magnetic measurement device suitable for underground and temperature drift suppression method |
| CN111538072B (en) * | 2020-05-28 | 2021-05-28 | 吉林大学 | Total field magnetic measurement device suitable for underground and temperature drift suppression method |
| CN113835165A (en) * | 2020-06-24 | 2021-12-24 | 华为技术有限公司 | Light emitting component, chip, optical module and optical communication equipment |
| CN112234354A (en) * | 2020-09-29 | 2021-01-15 | 中国人民解放军国防科技大学 | Improved atom receiving antenna |
| CN112234354B (en) * | 2020-09-29 | 2022-07-19 | 中国人民解放军国防科技大学 | Improved atom receiving antenna |
| CN116027233A (en) * | 2022-11-23 | 2023-04-28 | 北京自动化控制设备研究所 | Optical integration method of chip magnetometer and chip magnetometer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106405449A (en) | Vertical-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer | |
| CN106405450A (en) | End-coupling nanometer optical waveguide dual-optical-path chip-level magnetometer | |
| US11360135B2 (en) | Atom-based electromagnetic field sensing element and measurement system | |
| Shah et al. | Spin-exchange relaxation-free magnetometry using elliptically polarized light | |
| CN105910797B (en) | Optical device measurement of spectral response method and measuring device based on double sideband modulation Yu stimulated Brillouin scattering effect | |
| CN105158709A (en) | Embedded NV-center diamond based magnetic field metering device | |
| CN103605086B (en) | A kind of based on fiber electro-optic modulator can spread magnetic measurement system | |
| CN106443126B (en) | A kind of method and apparatus measuring electro-optic crystal half-wave voltage | |
| CN206178356U (en) | Perpendicular coupling nanometer fiber waveguide double -light -path chip level atomic clock | |
| CN110426652A (en) | A kind of SERF magnetometer optical frequency shift fictitious magnetic field Inhibition test device and method | |
| Qiu et al. | Floquet dynamics in the quantum measurement of mechanical motion | |
| Lucivero et al. | Laser-written vapor cells for chip-scale atomic sensing and spectroscopy | |
| Dong et al. | Review of atomic MEMS: driving technologies and challenges | |
| CN206193442U (en) | Face -to -face coupling nanometer fiber waveguide double -light -path chip level atomic clock | |
| CN206657097U (en) | End coupling nano optical wave guide double light path chip-scale magnetometer | |
| CN206960632U (en) | Vertical coupled nano optical wave guide double light path chip-scale magnetometer | |
| Liu | Precision measurement of magnetic field based on second-order sideband generation in a hybrid electromagnetic-optomechanical system | |
| CN106406074A (en) | Perpendicular coupling nanometer optical waveguide dual-optical-path chip atomic clock | |
| CN105811972B (en) | A kind of pulsed coherent layout Trapping of Atoms clock magnetic field servo-system | |
| CN106325049A (en) | End-coupling nano optical waveguide type dual-optical-path chip-scale atomic clock | |
| Qiu et al. | Motional sideband asymmetry in quantum optomechanics in the presence of Kerr-type nonlinearities | |
| Sun et al. | Photothermally Induced Transparency in Mode‐Cascaded Microcavity | |
| Marat et al. | Mathematical modeling of the fiber-optic converter on the magneto-optical faraday effect | |
| CN209356822U (en) | A kind of optical frequency com generation system | |
| Müller et al. | Parametric dispersion in electromagnetically induced transparency |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170215 |