CN106380198B - 碲锌镉靶材、其制备方法及应用 - Google Patents
碲锌镉靶材、其制备方法及应用 Download PDFInfo
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- CN106380198B CN106380198B CN201610836897.0A CN201610836897A CN106380198B CN 106380198 B CN106380198 B CN 106380198B CN 201610836897 A CN201610836897 A CN 201610836897A CN 106380198 B CN106380198 B CN 106380198B
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/547—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on sulfides or selenides or tellurides
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
- C04B2235/446—Sulfides, tellurides or selenides
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- C—CHEMISTRY; METALLURGY
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610836897.0A CN106380198B (zh) | 2016-09-20 | 2016-09-20 | 碲锌镉靶材、其制备方法及应用 |
Applications Claiming Priority (1)
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CN201610836897.0A CN106380198B (zh) | 2016-09-20 | 2016-09-20 | 碲锌镉靶材、其制备方法及应用 |
Publications (2)
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CN106380198A CN106380198A (zh) | 2017-02-08 |
CN106380198B true CN106380198B (zh) | 2019-01-29 |
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CN201610836897.0A Active CN106380198B (zh) | 2016-09-20 | 2016-09-20 | 碲锌镉靶材、其制备方法及应用 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108179387A (zh) * | 2017-12-28 | 2018-06-19 | 清远先导材料有限公司 | 一种铜铟镓硒基系列靶材的制备方法 |
CN109704766A (zh) * | 2019-01-21 | 2019-05-03 | 江西科泰新材料有限公司 | 碲化锌掺碲化亚铜靶材的生产工艺 |
CN111647857A (zh) * | 2020-05-27 | 2020-09-11 | 先导薄膜材料(广东)有限公司 | 碲化镉薄膜电池残靶重复利用的方法 |
CN113121232A (zh) * | 2021-04-23 | 2021-07-16 | 先导薄膜材料(广东)有限公司 | 一种导电性碲化锌靶材的制备方法 |
CN113233870B (zh) * | 2021-04-25 | 2023-01-13 | 先导薄膜材料(广东)有限公司 | 一种掺杂氧化镉靶材及其制备方法与应用 |
CN113372117B (zh) * | 2021-06-11 | 2023-03-10 | 先导薄膜材料有限公司 | 一种碲化锌掺铜靶材的制备方法 |
CN113336549B (zh) * | 2021-06-15 | 2023-10-10 | 先导薄膜材料(广东)有限公司 | 一种碲硒镉靶材及其制备方法 |
CN113526955A (zh) * | 2021-07-30 | 2021-10-22 | 广东先导稀材股份有限公司 | 一种碲锌镉靶材的制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201780976U (zh) * | 2010-07-29 | 2011-03-30 | 比亚迪股份有限公司 | 一种CdTe太阳能电池 |
CN102492927A (zh) * | 2011-12-08 | 2012-06-13 | 上海太阳能电池研究与发展中心 | 一种禁带宽度可调的碲锌镉薄膜材料的制备方法 |
CN103911666A (zh) * | 2013-01-08 | 2014-07-09 | 广东先导稀材股份有限公司 | 碲锌镉多晶合成用具及其合成方法 |
CN104357902A (zh) * | 2014-10-16 | 2015-02-18 | 中国科学院上海技术物理研究所 | 一种利用温度梯度合成碲锌镉多晶的合成装置和方法 |
CN104694889A (zh) * | 2013-12-10 | 2015-06-10 | 北京有色金属研究总院 | 一种CdTe溅射靶材的制备方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090053453A1 (en) * | 2005-12-21 | 2009-02-26 | Durham Scientific Crystals Limited | Semiconductor device and method of manufacture thereof |
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2016
- 2016-09-20 CN CN201610836897.0A patent/CN106380198B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201780976U (zh) * | 2010-07-29 | 2011-03-30 | 比亚迪股份有限公司 | 一种CdTe太阳能电池 |
CN102492927A (zh) * | 2011-12-08 | 2012-06-13 | 上海太阳能电池研究与发展中心 | 一种禁带宽度可调的碲锌镉薄膜材料的制备方法 |
CN103911666A (zh) * | 2013-01-08 | 2014-07-09 | 广东先导稀材股份有限公司 | 碲锌镉多晶合成用具及其合成方法 |
CN104694889A (zh) * | 2013-12-10 | 2015-06-10 | 北京有色金属研究总院 | 一种CdTe溅射靶材的制备方法 |
CN104357902A (zh) * | 2014-10-16 | 2015-02-18 | 中国科学院上海技术物理研究所 | 一种利用温度梯度合成碲锌镉多晶的合成装置和方法 |
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Inventor after: Wen Chongbin Inventor after: Zhu Liu Inventor after: Hu Zhixiang Inventor after: Zeng Chengliang Inventor after: Yu Ming Inventor before: Wen Chongbin Inventor before: Zhu Liu Inventor before: Hu Zhixiang Inventor before: Zeng Chengliang Inventor before: Yu Ming Inventor before: Li Qinxiang |
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Effective date of registration: 20181122 Address after: 511500 Tellurium Chemical Workshop of Guangdong Pioneer Rare Materials Co., Ltd., Heyun Town, Qingxin District, Qingyuan City, Guangdong Province Applicant after: Guangdong Pioneer Precious Metals Material Co., Ltd. Address before: 511500 Industrial Zone, wo Yun town, Qingxin County, Qingyuan, Guangdong (beside the fish dam road) Applicant before: Guangdong Vital Rare Material Co., Ltd. |
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Effective date of registration: 20210610 Address after: 511500 area a, no.27-9 Baijia Industrial Park, high tech Zone, Qingyuan City, Guangdong Province Patentee after: Leading film materials (Guangdong) Co.,Ltd. Address before: 511500 Tellurium Chemical Workshop of Guangdong Pioneer Rare Materials Co., Ltd., Heyun Town, Qingxin District, Qingyuan City, Guangdong Province Patentee before: Guangdong Pioneer Precious Metals Material Co.,Ltd. |
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