CN106367716A - 掩模板及显示面板的制作方法 - Google Patents
掩模板及显示面板的制作方法 Download PDFInfo
- Publication number
- CN106367716A CN106367716A CN201510439851.0A CN201510439851A CN106367716A CN 106367716 A CN106367716 A CN 106367716A CN 201510439851 A CN201510439851 A CN 201510439851A CN 106367716 A CN106367716 A CN 106367716A
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- CN
- China
- Prior art keywords
- mask plate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 125000006850 spacer group Chemical group 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 description 12
- 238000001704 evaporation Methods 0.000 description 12
- 239000010408 film Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
- B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (11)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510439851.0A CN106367716B (zh) | 2015-07-24 | 2015-07-24 | 掩模板及显示面板的制作方法 |
US15/137,178 US20170025611A1 (en) | 2015-07-24 | 2016-04-25 | Mask and method for manufacturing display panel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510439851.0A CN106367716B (zh) | 2015-07-24 | 2015-07-24 | 掩模板及显示面板的制作方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106367716A true CN106367716A (zh) | 2017-02-01 |
CN106367716B CN106367716B (zh) | 2020-01-07 |
Family
ID=57836211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510439851.0A Active CN106367716B (zh) | 2015-07-24 | 2015-07-24 | 掩模板及显示面板的制作方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20170025611A1 (zh) |
CN (1) | CN106367716B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106816554A (zh) * | 2017-01-24 | 2017-06-09 | 京东方科技集团股份有限公司 | 蒸镀掩膜版及制作方法、oled显示基板及蒸镀方法 |
CN107385392A (zh) * | 2017-08-17 | 2017-11-24 | 京东方科技集团股份有限公司 | 一种掩膜版、oled显示基板、显示装置及制作方法 |
CN110767674A (zh) * | 2018-08-06 | 2020-02-07 | 昆山维信诺科技有限公司 | 显示面板、显示屏及显示终端 |
CN116162893A (zh) * | 2023-02-17 | 2023-05-26 | 京东方科技集团股份有限公司 | 一种掩模板及蒸镀装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10354468B2 (en) * | 2016-08-29 | 2019-07-16 | Aminata Paye | Lockable receptacle having plural security features |
CN108866476B (zh) * | 2018-06-29 | 2020-03-10 | 京东方科技集团股份有限公司 | 掩膜版及其制作方法、蒸镀方法、显示屏 |
US11610948B2 (en) * | 2020-07-07 | 2023-03-21 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | OLED with butterfly-shaped spacer |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040135498A1 (en) * | 2003-01-09 | 2004-07-15 | Keiji Takanosu | Organic electroluminescence panel and method for manufacturing the same |
KR20090065825A (ko) * | 2007-12-18 | 2009-06-23 | 엘지디스플레이 주식회사 | 쉐도우 마스크 및 그 제조방법 |
JP2013245392A (ja) * | 2012-05-29 | 2013-12-09 | V Technology Co Ltd | 蒸着マスク及び蒸着マスクの製造方法 |
CN203569178U (zh) * | 2013-10-30 | 2014-04-30 | 昆山允升吉光电科技有限公司 | 一种掩模板 |
CN103797149A (zh) * | 2011-09-16 | 2014-05-14 | 株式会社V技术 | 蒸镀掩膜、蒸镀掩膜的制造方法及薄膜图案形成方法 |
CN103938154A (zh) * | 2013-06-21 | 2014-07-23 | 厦门天马微电子有限公司 | 一种掩膜板及其制造方法 |
US20140220715A1 (en) * | 2013-02-01 | 2014-08-07 | Tae-Wook Kang | Thin-film deposition mask, method of fabricating the same, and method of fabricating an organic light emitting display apparatus using the same |
CN104062842A (zh) * | 2014-06-30 | 2014-09-24 | 上海天马有机发光显示技术有限公司 | 一种掩模板及其制造方法、工艺装置 |
WO2014157068A1 (ja) * | 2013-03-26 | 2014-10-02 | 大日本印刷株式会社 | 蒸着マスク、蒸着マスク準備体、蒸着マスクの製造方法、及び有機半導体素子の製造方法 |
JP2015052162A (ja) * | 2013-09-09 | 2015-03-19 | 株式会社ブイ・テクノロジー | 成膜マスク、成膜装置及び成膜方法並びにタッチパネル基板 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013021165A (ja) * | 2011-07-12 | 2013-01-31 | Sony Corp | 蒸着用マスク、蒸着用マスクの製造方法、電子素子および電子素子の製造方法 |
CN103713466B (zh) * | 2013-12-30 | 2016-05-11 | 京东方科技集团股份有限公司 | 掩膜板及其制作方法 |
-
2015
- 2015-07-24 CN CN201510439851.0A patent/CN106367716B/zh active Active
-
2016
- 2016-04-25 US US15/137,178 patent/US20170025611A1/en not_active Abandoned
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040135498A1 (en) * | 2003-01-09 | 2004-07-15 | Keiji Takanosu | Organic electroluminescence panel and method for manufacturing the same |
KR20090065825A (ko) * | 2007-12-18 | 2009-06-23 | 엘지디스플레이 주식회사 | 쉐도우 마스크 및 그 제조방법 |
CN103797149A (zh) * | 2011-09-16 | 2014-05-14 | 株式会社V技术 | 蒸镀掩膜、蒸镀掩膜的制造方法及薄膜图案形成方法 |
JP2013245392A (ja) * | 2012-05-29 | 2013-12-09 | V Technology Co Ltd | 蒸着マスク及び蒸着マスクの製造方法 |
US20140220715A1 (en) * | 2013-02-01 | 2014-08-07 | Tae-Wook Kang | Thin-film deposition mask, method of fabricating the same, and method of fabricating an organic light emitting display apparatus using the same |
WO2014157068A1 (ja) * | 2013-03-26 | 2014-10-02 | 大日本印刷株式会社 | 蒸着マスク、蒸着マスク準備体、蒸着マスクの製造方法、及び有機半導体素子の製造方法 |
CN103938154A (zh) * | 2013-06-21 | 2014-07-23 | 厦门天马微电子有限公司 | 一种掩膜板及其制造方法 |
JP2015052162A (ja) * | 2013-09-09 | 2015-03-19 | 株式会社ブイ・テクノロジー | 成膜マスク、成膜装置及び成膜方法並びにタッチパネル基板 |
CN203569178U (zh) * | 2013-10-30 | 2014-04-30 | 昆山允升吉光电科技有限公司 | 一种掩模板 |
CN104062842A (zh) * | 2014-06-30 | 2014-09-24 | 上海天马有机发光显示技术有限公司 | 一种掩模板及其制造方法、工艺装置 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106816554A (zh) * | 2017-01-24 | 2017-06-09 | 京东方科技集团股份有限公司 | 蒸镀掩膜版及制作方法、oled显示基板及蒸镀方法 |
WO2018137328A1 (zh) * | 2017-01-24 | 2018-08-02 | 京东方科技集团股份有限公司 | 蒸镀掩膜版及制作方法及蒸镀方法 |
US11155913B2 (en) | 2017-01-24 | 2021-10-26 | Boe Technology Group Co., Ltd. | Evaporation mask plate, manufacturing method thereof and evaporation method |
CN107385392A (zh) * | 2017-08-17 | 2017-11-24 | 京东方科技集团股份有限公司 | 一种掩膜版、oled显示基板、显示装置及制作方法 |
CN110767674A (zh) * | 2018-08-06 | 2020-02-07 | 昆山维信诺科技有限公司 | 显示面板、显示屏及显示终端 |
US11296184B2 (en) | 2018-08-06 | 2022-04-05 | Suzhou Qingyue Optoelectronics Technology Co. Ltd. | Display panels, display screens, and display terminals |
CN110767674B (zh) * | 2018-08-06 | 2022-05-17 | 苏州清越光电科技股份有限公司 | 显示面板、显示屏及显示终端 |
CN116162893A (zh) * | 2023-02-17 | 2023-05-26 | 京东方科技集团股份有限公司 | 一种掩模板及蒸镀装置 |
Also Published As
Publication number | Publication date |
---|---|
US20170025611A1 (en) | 2017-01-26 |
CN106367716B (zh) | 2020-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee after: Shanghai Hehui optoelectronic Co., Ltd Address before: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee before: EverDisplay Optronics (Shanghai) Ltd. |
|
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 201506, No. nine, No. 1568, Jinshan Industrial Zone, Shanghai, Jinshan District Patentee after: Shanghai Hehui optoelectronic Co., Ltd Address before: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee before: Shanghai Hehui optoelectronic Co., Ltd |