CN103546067B - A kind of Long Distances magnetic transportation by driving moving platform of big angle rotary - Google Patents
A kind of Long Distances magnetic transportation by driving moving platform of big angle rotary Download PDFInfo
- Publication number
- CN103546067B CN103546067B CN201310452847.9A CN201310452847A CN103546067B CN 103546067 B CN103546067 B CN 103546067B CN 201310452847 A CN201310452847 A CN 201310452847A CN 103546067 B CN103546067 B CN 103546067B
- Authority
- CN
- China
- Prior art keywords
- permanent magnet
- array
- coil
- mover
- moving platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
A Long Distances magnetic transportation by driving moving platform for big angle rotary, is mainly used in semiconductor processing and manufacturing and checkout equipment.This motion platform contains mover, stator, pedestal and measuring system composition, and mover adopts two-dimentional permanent magnet array, and the coil array of stator adopts hollow cylinder type coil; Utilize three-axis gyroscope, three axis accelerometer and current vortex sensor to realize six degree of freedom bigness scale amount, utilize laser interferometer to carry out the accurate measurement amount of rotor position.Be positioned at measurement mechanism signal on mover through data processing circuit, utilize wireless launcher to be sent to controller, and receive controller instruction by radio receiver.Compared with prior art, this magnetic transportation by driving moving platform can realize the large rotation angle of mover around Z axis, also can realize the Long Distances motion in plane simultaneously; Adopt Radio Transmission Technology and without cable designs, improve system rejection to disturbance ability.
Description
Technical field
The present invention relates to a kind of magnetic and float workbench, particularly relate to the Long Distances magnetic transportation by driving moving platform of big angle rotary, be mainly used in semiconductor processing and manufacturing and checkout equipment, belong to Ultra-precision Turning and checkout equipment technical field.
Background technology
Integrated circuit (IntegratedCircuit, be called for short IC) industry is the strategic industry of the national national interests of relation one, national defense safety and international status.The height of integrated circuit technique level has become the mark of measurement modernization of the country level and overall national strength.IC equipment technology as one of integrated circuit (IC) core technology is then important foundation and the strategy key of development IC industry and even IT industry.Magnetic suspension linear motor and plane motor straight connect and use electromagnetic force to drive mover to suspend and motion, can realize large stroke and high precision motion, thus have a wide range of applications in IC manufacturing field.And the single mover of levitation planar motor Direct driver does 2D plane motion, avoid linear electric motors series connection laminated construction, sports platform quality can be reduced.Planar motor has two kinds of different forms from structure: rotating coil plan motor and moving iron type planar motor.For rotating coil plan motor, owing to needing to provide power supply and cooling system to the coil in motion, namely need cable and be connected with mover, this brings very large inconvenience to the work of structural design and motor, also can increase the motion artifacts of cable to mover simultaneously.And moving iron type planar motor can not exist such problem, kinematic accuracy can be significantly improved.
Planar motor often adopts rectangle or square coil, when coil and magnetic direction exist 45 ° of angles, can realize the decoupling zero of exerting oneself physically, be convenient to real-time control, and then drives mover to carry out plane motion.But in some specific occasion, need sports platform can realize the rotation of the wide-angle around Z axis, and extensively adopt the planar motor of square coil or square coil when mover rotates at present, angle between coil and magnetic steel array also can change thereupon, unpredictable mover, by force and moment, is thus difficult to realize moving around the wide-angle of Z axis.
Summary of the invention
The present invention aims to provide a kind of Long Distances magnetic transportation by driving moving platform of big angle rotary, can be applicable to semiconductor processing and manufacturing and detection, also can be used for Ultra-precision Turning and detection, in order to realize the large corner of six degree of freedom and Long Distances motion, and there is mover without the feature such as cable and superpower antijamming capability.
Technical scheme of the present invention is as follows:
A Long Distances magnetic transportation by driving moving platform for big angle rotary, containing pedestal, mover, stator, slide holder and measuring system, described mover contains permanent magnet array and magnet steel backboard; Described stator contains the coil array become by multiple coil arrangement; Described measuring system contains current vortex sensor and laser interferometer, it is characterized in that: in described coil array, each coil adopts hollow cylinder type coil, and is fixed on pedestal by coil rack; Described measuring system also comprises a three-axis gyroscope and a three axis accelerometer, and this three-axis gyroscope and three axis accelerometer are arranged on surface-mounted integrated circuit, and described surface-mounted integrated circuit is fixed on mover; After described three-axis gyroscope and the treated processing of circuit of the measuring-signal of three axis accelerometer, wireless launcher is utilized to send to controller, and the instruction of controller is received by radio receiver, three-axis gyroscope and three axis accelerometer are resetted or resets; Described surface-mounted integrated circuit utilizes one piece of battery as the power supply of measuring transducer.
Another technical scheme of the present invention is: described coil array coil has three kinds of arrangement modes: the first by hollow cylinder type coil respectively along X and Y-direction linear array squarely or rectangular array; The second arrangement mode by hollow cylinder type coil respectively along X and the linear alternate staggered arrangement squarely of Y-direction or rectangular array; The third arrangement mode is arranged in circular array by hollow cylinder type coil along the circumferential of different radii.
Permanent magnet array of the present invention is Halbach permanent array or compact NS permanent magnet array; Described Halbach permanent array is made up of the first main permanent magnet, the second main permanent magnet and secondary permanent magnet, main permanent magnet and secondary permanent magnet are fixed on the surface of magnet steel backboard with two-dimentional Halbach permanent array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of secondary permanent magnet, between each permanent magnet, form closed magnetic path; Compact NS permanent magnet array is made up of the first main permanent magnet and the second main permanent magnet, close-packed arrays between the first main permanent magnet and the second main permanent magnet.
Measuring system of the present invention comprises at least three current vortex sensors, in the gap of current vortex sensor composition arranged in arrays between the hollow cylinder type coil of stator, and the gauge head of current vortex sensor is placed straight up; Or at least three current vortex sensors are arranged on mover, move with mover, and the gauge head of current vortex sensor is placed straight down.
The Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary of the present invention, it is characterized in that: described measuring system comprises at least 3 current vortex sensors, current vortex sensor is arranged on mover, moves with mover, and the gauge head of current vortex sensor is placed straight down.
Measuring system of the present invention is also containing an X-axis laser interferometer and a Y-axis laser interferometer, and two laser interferometer are arranged on any one angle of pedestal, realizes the position measurement of magnetic transportation by driving moving platform in X-direction and Y-direction.
The present invention compared with prior art, have the following advantages and high-lighting effect: the Long Distances magnetic transportation by driving moving platform of big angle rotary of the present invention adopts hollow cylinder type coil, because circular coil exists countless multiple symmetry axis, therefore there is not the situation having angle with magnetic steel array, the large rotation angle of mover around Z axis can be realized, also can realize the Long Distances motion in plane simultaneously; The position of subpart adopts three-axis gyroscope, three axis accelerometer and current vortex sensor to carry out bigness scale amount, utilizes laser interferometer to carry out accurate measurement amount; The measurement mechanism be positioned on mover utilizes Radio Transmission Technology and controller communication, eliminates cable interference.
Accompanying drawing explanation
Fig. 1 is for inventing the tomograph of the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary provided.
Fig. 2 indicates integrated circuit board structure schematic diagram.
Fig. 3 (a) Fig. 3 (b), Fig. 3 (c) indicate the arrangement mode of three kinds of coil arrays of the present invention respectively.
Fig. 4 (a), Fig. 4 (b), Fig. 4 (c), Fig. 4 (d) indicate two kinds of permanent magnet array structure charts of the present invention.
Fig. 5 indicates the another kind of mounting means of current vortex sensor of the present invention.
In figure: 1-pedestal; 2-coils array components; 3-X is to laser interferometer; 4-Y is to laser interferometer; 5-permanent magnet array; 6-current vortex sensor; 7-surface-mounted integrated circuit; 8-slide holder; 9-three-axis gyroscope; 10-three axis accelerometer; 11-wireless launcher; 12-radio receiver; 13-battery; 14-hollow cylinder type coil; 15-coil rack; 16-magnet steel backboard; The main permanent magnet of 17-first; The secondary permanent magnet of 18-; The main permanent magnet of 19-second;
Embodiment
Below in conjunction with accompanying drawing, principle of the present invention, structure and embodiment are described further.
Fig. 1 is for inventing the tomograph of the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary provided.The Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary of the present invention, containing pedestal 1, mover, stator, slide holder 8 and measuring system, described mover contains permanent magnet array 5 and magnet steel backboard 16; Described stator contains the coil array 2 become by multiple coil arrangement; Described measuring system contains a three-axis gyroscope 9, three axis accelerometer 10, current vortex sensor 6, X-axis laser interferometer 3 and a Y-axis laser interferometer 4; Described coil array 2 is containing hollow cylinder type coil 14 and coil rack 15, and coil and magnet steel are interacted by Lorentz force.For making full use of space, improve coil and go out force density, and then improve sports platform operating efficiency, described coil array coil has three kinds of arrangement modes: the first by hollow cylinder type coil respectively along X and Y-direction linear array squarely or rectangular array, as shown in Fig. 3 (a); The second arrangement mode by hollow cylinder type coil respectively along X and the linear alternate staggered arrangement squarely of Y-direction or rectangular array, as shown in Fig. 3 (b); The third arrangement mode is arranged in circular array, by hollow cylinder type coil as shown in Fig. 3 (c) along the circumferential of different radii; Hollow cylinder type coil is fixed on pedestal 1 by coil rack 15.Measuring system adopts bigness scale amount to add the measurement scheme of accurate measurement amount, utilizes three-axis gyroscope 9, three axis accelerometer 10 and current vortex sensor 6 to realize six degree of freedom bigness scale amount, utilizes laser interferometer to carry out the accurate measurement amount of rotor position; Described three-axis gyroscope 9 and three axis accelerometer 10 are integrated on surface-mounted integrated circuit 7, and described surface-mounted integrated circuit 7 is fixed on mover; After the treated processing of circuit of measuring-signal of described three-axis gyroscope 9 and three axis accelerometer 10, utilize wireless launcher 11 to send to controller, and receive the instruction of controller by radio receiver 12.Described surface-mounted integrated circuit 7 utilizes one piece of battery 13 as the power supply of measuring transducer, as shown in Figure 2.
Described measuring system also comprises at least three current vortex sensors 6, and current vortex sensor 6 forms in the gap of arranged in arrays between the hollow cylinder type coil of stator, and the gauge head of current vortex sensor 6 is placed straight up, as shown in Figure 1.
Fig. 4 indicates two kinds of permanent magnet array structures of the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary of the present invention.Described permanent magnet array is Halbach permanent array or compact NS permanent magnet array; Described Halbach permanent array is made up of the first main permanent magnet 19 of main permanent magnet 17, second and secondary permanent magnet 18, main permanent magnet and secondary permanent magnet are fixed on the surface of magnet steel backboard, as shown in Fig. 4 (a) with two-dimentional Halbach permanent array format; Adjacent main permanent magnet is mutually vertical with the magnetic direction of secondary permanent magnet, between each permanent magnet, form closed magnetic path, main permanent magnet is parallel with X-axis or Y-axis with the contact-making surface of secondary permanent magnet, as shown in Fig. 4 (b), or angle at 45 ° with X-axis, as shown in Fig. 4 (c); Compact NS permanent magnet array is made up of the first main permanent magnet 17 and the second main permanent magnet 19, and close-packed arrays between first, second main permanent magnet, as shown in Fig. 4 (d).
Fig. 5 indicates another current vortex sensor mounting means of the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary of the present invention.Be arranged on by current vortex sensor in stator coil array when carrying out long distance measuring, the number of sensors of needs is more, and cost is higher, and it is larger to control difficulty; Another measurement scheme that the present invention proposes, current vortex sensor 6 is arranged on mover, moves with mover, and the gauge head of current vortex sensor 6 is placed straight down, significantly can reduce the quantity of current vortex sensor like this; Electric eddy current measurement signal, after process, is transferred to controller through wireless launcher 11, thus realizes sports platform Position Control.
In the present embodiment, three-axis gyroscope 9, three axis accelerometer 10 and current vortex sensor 6 is adopted to carry out the position bigness scale amount of mover, wherein three-axis gyroscope 9 measures the corner of mover around x, y and z axes, the linear displacement in mover three directions measured by three axis accelerometer 10, current vortex sensor 6 for measure mover z to displacement and corner around x-axis, y-axis, above-mentioned three kinds of transducer actings in conjunction complete the bigness scale amount to mover six-freedom degree.
Described measuring system is also arranged on any one angle of pedestal containing an X-axis laser interferometer 3 and a Y-axis laser interferometer 4, two laser interferometer, realizes the position measurement of magnetic transportation by driving moving platform in X-direction and Y-direction.When mover move to X in the measured zone of laser interferometer 3 and Y-direction laser interferometer 4 after, by bigness scale quantity sensor, mover pose is adjusted, make laser interferometer can light echo, and then utilize laser interferometer to carry out the accurate measurement of position to mover.
Claims (6)
1. the Long Distances magnetic transportation by driving moving platform of a big angle rotary, containing pedestal (1), mover, stator, slide holder (8) and measuring system, described mover contains permanent magnet array (5) and magnet steel backboard (16); Described stator contains the coil array (2) become by multiple coil arrangement; Described measuring system contains current vortex sensor (6) and laser interferometer, it is characterized in that: in described coil array (2), each coil adopts hollow cylinder type coil (14), and be fixed on pedestal (1) by coil rack (15); Described measuring system also comprises a three-axis gyroscope (9) and a three axis accelerometer (10), this three-axis gyroscope (9) and three axis accelerometer (10) are arranged on surface-mounted integrated circuit (7), and described surface-mounted integrated circuit (7) is fixed on mover; After described three-axis gyroscope (9) and the treated processing of circuit of measuring-signal of three axis accelerometer (10), wireless launcher (11) is utilized to send to controller, and the instruction of controller is received by radio receiver (12), three-axis gyroscope (9) and three axis accelerometer (10) are resetted or reset; Described surface-mounted integrated circuit (7) utilizes one piece of battery (13) as the power supply of measuring transducer.
2. the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary as claimed in claim 1, is characterized in that: described coil array coil has three kinds of arrangement modes: the first by hollow cylinder type coil respectively along X and Y-direction linear array squarely or rectangular array; The second arrangement mode by hollow cylinder type coil respectively along X and the linear alternate staggered arrangement squarely of Y-direction or rectangular array; The third arrangement mode is arranged in circular array by hollow cylinder type coil along the circumferential of different radii.
3. the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary as claimed in claim 1 or 2, is characterized in that: described permanent magnet array is Halbach permanent array or compact NS permanent magnet array; Described Halbach permanent array is made up of the first main permanent magnet (17), the second main permanent magnet (19) and secondary permanent magnet (18), main permanent magnet and secondary permanent magnet are fixed on the surface of magnet steel backboard (16) with two-dimentional Halbach permanent array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of secondary permanent magnet, between each permanent magnet, form closed magnetic path; Compact NS permanent magnet array is made up of the first main permanent magnet (17) and the second main permanent magnet (19), close-packed arrays between the first main permanent magnet and the second main permanent magnet.
4. the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary as claimed in claim 1 or 2, it is characterized in that: described measuring system comprises at least three current vortex sensors (6), in the gap of current vortex sensor (6) composition arranged in arrays between the hollow cylinder type coil of stator, and the gauge head of current vortex sensor (6) is placed straight up.
5. the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary as claimed in claim 1 or 2, it is characterized in that: described measuring system comprises at least three current vortex sensors (6), current vortex sensor (6) is arranged on mover, move with mover, and the gauge head of current vortex sensor (6) is placed straight down.
6. the Long Distances magnetic transportation by driving moving platform of a kind of big angle rotary as claimed in claim 1 or 2, it is characterized in that: described measuring system is also containing an X-axis laser interferometer (3) and a Y-axis laser interferometer (4), two laser interferometer are arranged on any one angle of pedestal, realize the position measurement of magnetic transportation by driving moving platform in X-direction and Y-direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310452847.9A CN103546067B (en) | 2013-09-25 | 2013-09-25 | A kind of Long Distances magnetic transportation by driving moving platform of big angle rotary |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310452847.9A CN103546067B (en) | 2013-09-25 | 2013-09-25 | A kind of Long Distances magnetic transportation by driving moving platform of big angle rotary |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103546067A CN103546067A (en) | 2014-01-29 |
| CN103546067B true CN103546067B (en) | 2016-01-13 |
Family
ID=49969213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310452847.9A Active CN103546067B (en) | 2013-09-25 | 2013-09-25 | A kind of Long Distances magnetic transportation by driving moving platform of big angle rotary |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103546067B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105278255A (en) * | 2015-03-05 | 2016-01-27 | 杭州汇萃智能科技有限公司 | Noncontact six-degree-of-freedom positioning device and method for magnetic levitation planar motor |
| JP2017046561A (en) * | 2015-08-24 | 2017-03-02 | 広瀬 洋一 | Magnetic levitation travel device |
| CN105141106B (en) * | 2015-09-15 | 2018-01-16 | 清华大学 | A kind of motion workbench of Three Degree Of Freedom |
| CN107247821B (en) * | 2017-05-06 | 2020-10-02 | 安徽工程大学 | Method for stably floating and descending position-sensorless of moving-coil permanent magnet planar motor |
| CN107482955B (en) * | 2017-08-28 | 2019-05-10 | 清华大学 | A kind of the planar motor structure and its thrust calculation method of tandem drive |
| FR3079298B1 (en) * | 2018-03-23 | 2020-11-27 | Safran Landing Systems | DEVICE FOR MEASURING A POSITION OF A MOBILE BODY IN RELATION TO A FIXED BODY |
| CN109962646B (en) * | 2019-03-28 | 2020-06-23 | 武汉大学 | Six-degree-of-freedom magnetic suspension planar motor |
| CN112947007A (en) * | 2021-01-19 | 2021-06-11 | 上海集成电路装备材料产业创新中心有限公司 | Rotary device of rotary platform of photoetching machine |
| CN117937986B (en) * | 2024-03-14 | 2024-05-28 | 天津工业大学 | Fixed air gap six-degree-of-freedom magnetic suspension huge transfer equipment |
| CN118074435A (en) * | 2024-04-18 | 2024-05-24 | 佛山市增广智能科技有限公司 | Mover pose detection device and method for planar motor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD244414A1 (en) * | 1985-12-10 | 1987-04-01 | Medizin Labortechnik Veb K | MEASURING DEVICE FOR THREE-AXLE CHANGES IN MACHINE OR DEVICE PARTS |
| US7639004B2 (en) * | 2007-07-23 | 2009-12-29 | Gm Global Technology Operations, Inc. | Apparatus for sensing angular displacement between first and second rotating shafts including flux collectors |
| CN201881156U (en) * | 2010-11-19 | 2011-06-29 | 沈阳工业大学 | Precise heavy machine tool magnetic levitation motion platform driven by bilinear synchronous motor |
| CN103066894A (en) * | 2012-12-12 | 2013-04-24 | 清华大学 | Six degrees of freedom magnetic levitation workpiece table |
-
2013
- 2013-09-25 CN CN201310452847.9A patent/CN103546067B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD244414A1 (en) * | 1985-12-10 | 1987-04-01 | Medizin Labortechnik Veb K | MEASURING DEVICE FOR THREE-AXLE CHANGES IN MACHINE OR DEVICE PARTS |
| US7639004B2 (en) * | 2007-07-23 | 2009-12-29 | Gm Global Technology Operations, Inc. | Apparatus for sensing angular displacement between first and second rotating shafts including flux collectors |
| CN201881156U (en) * | 2010-11-19 | 2011-06-29 | 沈阳工业大学 | Precise heavy machine tool magnetic levitation motion platform driven by bilinear synchronous motor |
| CN103066894A (en) * | 2012-12-12 | 2013-04-24 | 清华大学 | Six degrees of freedom magnetic levitation workpiece table |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103546067A (en) | 2014-01-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103546067B (en) | A kind of Long Distances magnetic transportation by driving moving platform of big angle rotary | |
| US20150326150A1 (en) | Maglev workpiece table with six degrees of freedom | |
| CN106393070B (en) | A kind of antisymmetry straight drive mobile decoupling high-precision servo platform in parallel | |
| CN101610054B (en) | Planar motor adopting three-dimensional permanent magnet array | |
| CN103226296B (en) | Rough-fine-movement laminated workbench with laser interferometer measurement | |
| CN102880013B (en) | Reticle stage worktable | |
| CN102723842B (en) | Multi-freedom and long travel magnetic suspension working bench | |
| CN103543613B (en) | A kind of moving-iron type is without the six-freedom-degree maglev motion platform of cable | |
| CN102097982A (en) | Permanent-magnet synchronous magnetic suspension planar motor | |
| CN103277409B (en) | Five-freedom degree magnetic levitation guide rail with electromagnet distribution | |
| CN102722089A (en) | Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device | |
| CN103383526B (en) | The dynamic stacking workbench of a kind of thick essence | |
| CN101769981A (en) | Phase searching detection method for permanent-magnet planar motor by adopting linear Hall array | |
| CN103543612B (en) | A kind of moving-iron type with vacuum (-tight) housing is without cable six-freedom-degree maglev motion platform | |
| CN103292706A (en) | Method for measuring three-freedom-degree displacement of movable coil type plane motor active cell | |
| CN103019046A (en) | Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control | |
| CN111506118B (en) | Three-degree-of-freedom photoelectric pod driven by orthogonal decoupling torque | |
| CN102944979A (en) | Microchecker having permanent magnet gravity compensation structure | |
| CN114152197A (en) | Six-degree-of-freedom Lorentz platform for detecting and repairing LED display screen | |
| CN103822576A (en) | Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase | |
| CN101750548B (en) | Phase hunting detection method for permanent magnet planar motor adopting switch Hall array | |
| US20220052585A1 (en) | Displacement device based on hall-effect sensors and planar motors | |
| CN101610022B (en) | Planar motor adopting groove-type coil | |
| CN103048891A (en) | Six-degree-of-freedom magnetic levitation micropositioner | |
| CN203798360U (en) | Magnetoelectric coriolis force detection sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20151103 Address after: 100084 Haidian District, Beijing,,, Tsinghua University, the 100084 letter box office Applicant after: Tsinghua University Applicant after: U-PRECISION TECH CO., LTD. Address before: 100084 Haidian District, Beijing,,, Tsinghua University, the 100084 letter box office Applicant before: Tsinghua University |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |