CN102723296A - XY motion platform driven by double-layer linear motor - Google Patents
XY motion platform driven by double-layer linear motor Download PDFInfo
- Publication number
- CN102723296A CN102723296A CN2012101454055A CN201210145405A CN102723296A CN 102723296 A CN102723296 A CN 102723296A CN 2012101454055 A CN2012101454055 A CN 2012101454055A CN 201210145405 A CN201210145405 A CN 201210145405A CN 102723296 A CN102723296 A CN 102723296A
- Authority
- CN
- China
- Prior art keywords
- axle
- linear motor
- motion
- axle linear
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Linear Motors (AREA)
Abstract
The invention provides an XY motion platform driven by a double-layer linear motor. The XY motion platform comprises a bottom plate component (1), an X-axis linear motor component (2), a motion platform component (3), a Y-axis linear motor component (4), a bottom plate (5), an X-axis grating scale reading head (6), an X-axis precision motion guide rail (8), a Y-axis linear motor rotor (9), a Y-axis grating scale reading head (12), a Y-axis precision motion guide rail (18), an X-axis linear motor rotor (19) and the like. The XY motion platform driven by the double-layer linear motor has high driving capacity, high motion speed, reasonable linear motor decoupling mode and small structure size, and is suitable for high-speed packaging operation of a semiconductor integrated chip performed on a production line and in other narrow spaces.
Description
Technical field
The present invention relates to semiconductor die package equipment; Relating in particular to a kind of with traditional XY motion platform compares; Have bigger driving force, movement velocity, the more rational XY motion platform of linear electric motors decoupling zero mode, littler physical dimension faster, be useful in the high speed packaging operation of the semiconductor integrated chip that small space such as production line carries out.
Background technology
In the semiconductor die package field, the Drive Structure that traditional XY motion platform is general is the generic linear motor, promptly in the cover linear electric motors, has only a cover stator and a mover mechanism, and driving force is less; Connected mode is mechanism's manifold type, and promptly the whole driving mechanism of a direction is carried on the driving of another direction together with clamping mechanism and load fully, becomes the load that another direction drives.Therefore, traditional XY motion platform major defect has four: one, and the driving force of platform is less; The 2nd, owing to use mechanism's coupled modes, heavy moving parts and volume are bigger; The 3rd, because of physical dimension is bigger, use in incompatible narrower space; Four are to use parts more, and the assembling adjustment is comparatively complicated, and manufacturing cost is higher.
Summary of the invention
The object of the present invention is to provide a kind of rational in infrastructurely, have bigger driving force, movement velocity, the more rational XY motion platform of linear electric motors decoupling zero mode, littler physical dimension faster.
Goal of the invention of the present invention is achieved in that a kind of XY motion platform of double-deck linear motor driving; It is characterized in that, comprise bottom deck assembly, X axle linear motor assembly, motion platform assembly, Y axle linear motor assembly, base plate, X axle grating ruler reading head, X axle grating ruler reading head corner bracket, X axle precise motion guide rail, Y axle linear motor rotor, Y axle linear motor stator electric and housing, Y axle linear electric motors mount pad, Y axle grating ruler reading head, Y axle grating ruler reading head corner bracket, X axle grating chi frame, X axle motion link, Y axle grating chi frame, Y axle motion link, Y axle precise motion guide rail, X axle linear motor rotor X axle linear electric motors mount pad, X axle linear motor stator electric and housing;
Wherein, Bottom deck assembly comprises base plate; At base plate 5 X axle linear motor assembly, motion platform assembly, Y axle linear motor assembly are installed; X axle linear motor assembly is crossed on the X axle mounting plane that mounting screw is installed in base plate, and Y axle linear motor assembly is installed on the Y axle mounting plane of base plate through mounting screw;
X axle grating ruler reading head corner bracket is installed in the lateral surface of mounting plane of the X axis rail of base plate through mounting screw; X axle grating ruler reading head is installed in the relevant position of X axle grating ruler reading head corner bracket through mounting screw; X axle precise motion guide rail and Y axle precise motion guide rail are formed by fixed rail and slip rail, and the fixed rail in the X axle precise motion guide rail is installed in through mounting screw on the mounting plane of X axis rail of base plate;
X axle linear electric motors mount pad is installed in through mounting screw on the mounting plane of X axle linear electric motors of base plate; X axle linear motor stator electric and housing are installed on the mounting plane of X axle linear electric motors mount pad through mounting screw; X axle linear motor rotor is installed in X axle linear motor stator electric and the housing; Have the connecting hole that connects X axle motion link on the exposed junction of X axle linear motor rotor;
X axle motion link is connected with X axle linear motor rotor through attachment screw; X axle motion link is connected with slip rail in the X axle precise motion guide rail through attachment screw, and X axle motion link is moved along directions X through the driving of X axle linear motor rotor; Be installed on the corresponding plane of orientation of X axle motion link through the fixed rail of mounting screw Y axle precise motion guide rail; Y axle motion link is connected through the slip rail of mounting screw with Y axle precise motion guide rail; The link of Y axle motion link is connected with Y axle linear motor rotor through mounting screw, and Y axle motion link is moved along the Y direction through the driving of Y axle linear motor rotor;
Y axle linear electric motors mount pad is installed on the Y axle linear electric motors mounting plane of base plate through mounting screw; Y axle linear motor stator electric and housing are installed on the mounting plane of Y axle linear electric motors mount pad through mounting screw; Y axle linear motor rotor is installed in Y axle linear motor stator electric and the housing; Have the connecting hole that connects Y axle motion link on the exposed junction of Y axle linear motor rotor.
Preferably, the fixed rail of motion platform assembly through X axle precise motion guide rail is installed on the mounting plane of X axis rail of base plate.
Preferably, X axle precise motion guide rail and Y axle precise motion guide rail have two groups respectively.
Preferably, said fixed rail is provided with the installing hole that mounting screw passes.
Preferably, two groups of X axle linear motor rotors symmetry up and down are installed in X axle linear motor stator electric and the housing, and two groups of Y axle linear motor rotors up and down symmetry be installed in Y axle linear motor stator electric and the housing.
Preferably, X axle linear motor assembly is the generic linear motor, and its mover can only carry out rectilinear motion within the specific limits along X-direction.
Preferably, Y axle linear motor assembly is adaptive decoupling formula linear electric motors, and its mover is except that carrying out the rectilinear motion along Y direction within the specific limits, can also be passive carry out within the specific limits moving arbitrarily in X-direction.
Preferably, the kinematic accuracy of this platform is to carry out accurate measurement and feedback according to the grating chi that is installed in X axle and Y direction, is accomplished by computer control.
The XY motion platform of a kind of double-deck linear motor driving of the present invention is compared traditional motion platform, has following advantage:
Since adopt two mover structures the X axle/Y axle linear electric motors drive, thereby actuating force is bigger, can obtain higher acceleration of motion and movement velocity;
2. owing to adopt the decoupling zero of adaptive decoupling formula linear electric motors, so the said platform and integrally of patent is simple in structure, and physical dimension is little, and the motion parts quality of platform has obvious decline;
3. because the physical dimension of complete machine is more small and exquisite, is beneficial on the narrow and small production line in space and uses;
4. structure is simple relatively, and production cost is lower.
Description of drawings
Fig. 1 is the schematic three dimensional views of the XY motion platform of a kind of double-deck linear motor driving of the present invention.
Fig. 2 is the three-dimensional, exploded view of the XY motion platform of a kind of double-deck linear motor driving of the present invention.
In Fig. 1, concrete Reference numeral is represented: the 1-bottom deck assembly; 2-X axle linear motor assembly; 3-motion platform assembly, 4-Y axle linear motor assembly;
In Fig. 2, concrete Reference numeral is represented: 5-base plate, 6-X axle grating ruler reading head, 7-X axle grating ruler reading head corner bracket, 8-X axle precise motion guide rail, 9-Y axle linear motor rotor, 10-Y axle linear motor stator electric and housing, 11-Y axle linear electric motors mount pad, 12-Y axle grating ruler reading head, 13-Y axle grating ruler reading head corner bracket, 14-X axle grating chi frame, 15-X axle motion link, 16-Y axle grating chi frame, 17-Y axle motion link, 18-Y axle precise motion guide rail, 19-X axle linear motor rotor, 20-X axle linear electric motors mount pad, 21-X axle linear motor stator electric and housing.
Embodiment
In conjunction with accompanying drawing the present invention is described further:
With reference to Fig. 1, shown in Figure 2, a kind of XY motion platform of double-deck linear motor driving comprises: bottom deck assembly 1, X axle linear motor assembly 2, motion platform assembly 3, Y axle linear motor assembly 4, base plate 5, X axle grating ruler reading head 6, X axle grating ruler reading head corner bracket 7, X axle precise motion guide rail 8, Y axle linear motor rotor 9, Y axle linear motor stator electric and housing 10, Y axle linear electric motors mount pad 11, Y axle grating ruler reading head 12, Y axle grating ruler reading head corner bracket 13, X axle grating chi frame 14, X axle motion link 15, Y axle grating chi frame 16, Y axle motion link 17, Y axle precise motion guide rail 18, X axle linear motor rotor 19, X axle linear electric motors mount pad 20, X axle linear motor stator electric and housing 21.
The XY motion platform parts connected mode of the double-deck linear motor driving of the present invention is following.
Wherein, Bottom deck assembly 1 comprises base plate 5; X axle linear motor assembly 2, motion platform assembly 3, Y axle linear motor assembly 4 are installed on base plate 5; X axle linear motor assembly 2 is installed in through mounting screw on the X axle mounting plane of base plate 5, and Y axle linear motor assembly 4 is installed on the Y axle mounting plane of base plate 5 through mounting screw; X axle precise motion guide rail 8 is formed by fixed rail and slip rail with Y axle precise motion guide rail 18; Fixed rail is provided with the installing hole that mounting screw passes, and the fixed rail of motion platform assembly 3 through X axle precise motion guide rail 8 is installed on the mounting plane of X axis rail of base plate 5.X axle precise motion guide rail 8 can have two groups.
X axle grating ruler reading head corner bracket 7 is installed in the lateral surface of mounting plane of the X axis rail of base plate 5 through mounting screw; X axle grating ruler reading head 6 is installed in the relevant position of X axle grating ruler reading head corner bracket 7 through mounting screw; Fixed rail in the X axle precise motion guide rail 8 is installed in through mounting screw on the mounting plane of X axis rail of base plate 5.
In X axle linear motor assembly 2, X axle linear electric motors mount pad 20 is installed in through mounting screw on the mounting plane of X axle linear electric motors of base plate 5; X axle linear motor stator electric and housing 21 are installed on the mounting plane of X axle linear electric motors mount pad 20 through mounting screw; Two groups of X axle linear motor rotors about in the of 19 symmetry be installed in X axle linear motor stator electric and the housing 21; Have the connecting hole that connects X axle motion link 15 on the exposed junction of X axle linear motor rotor 19.X axle linear motor assembly 2 is common linear electric motors, and its mover can only carry out rectilinear motion within the specific limits along X-direction.
In motion platform assembly 3, X axle motion link 15 is connected with X axle linear motor rotor 19 through attachment screw; X axle motion link 15 is connected with slip rail in the X axle precise motion guide rail 8 through attachment screw, can make 15 drivings through X axle linear motor rotor 19 of X axle motion link, moves along directions X; Also be installed on the corresponding plane of orientation of X axle motion link 15 through the fixed rail of mounting screw with Y axle precise motion guide rail 18, Y axle precise motion guide rail 18 also can have two groups; Y axle motion link 17 is connected through the slip rail of mounting screw with Y axle precise motion guide rail 18; The link of Y axle motion link 17 is connected with two groups of laterally zygomorphic Y axle linear motor rotors 9 through mounting screw, can make 17 drivings through Y axle linear motor rotor 9 of Y axle motion link, moves along the Y direction; Because the peculiar decoupling zero characteristic of Y axle linear electric motors; Can drive X axle motion link 15 when directions X moves at X axle linear motor rotor 19; Y axle motion link 17 can be moved along the Y direction, and carried out the decoupling zero campaign along directions X by the driving of Y axle linear motor rotor 9.
In Y axle linear motor assembly 4, Y axle linear electric motors mount pad 11 is installed on the Y axle linear electric motors mounting plane of base plate 5 through mounting screw; Y axle linear motor stator electric and housing 10 are installed on the mounting plane of Y axle linear electric motors mount pad 11 through mounting screw; Two groups of Y axle linear motor rotors are symmetrical about in the of 9, are installed in Y axle linear motor stator electric and the housing 10; Have the connecting hole that connects Y axle motion link 17 on the exposed junction of Y axle linear motor rotor 9; Y axle linear motor assembly 4 is linear electric motors of adaptive decoupling formula; Its mover is except that carrying out the rectilinear motion within the specific limits along Y direction; Can also be with adaptive mode; Passive carry out within the specific limits moving arbitrarily in X-direction, and with this kind mode as decoupling zero mode of the present invention.
The operation principle of the XY motion platform of double-deck linear motor driving of the present invention is:
Be installed in the X axle linear motor assembly 2 on the bottom deck assembly 1, bigger actuating force be provided, drive X axle motion link 15, move along directions X by its pair mover structure; The Y axle linear motor assembly 4 that is installed on the bottom deck assembly 1 is self-adapting type decoupling zero linear electric motors; When bigger actuating force being provided by its pair mover structure; Also adapted to relevant decoupling zero campaign; Drive Y axle motion link 17, carry out drive movement along the Y direction, and carry out the decoupling zero campaign along directions X; Y axle motion link 17 is mounted on the X axle motion link 15, and can slide along Y direction, because the motion assembly of above-mentioned X axle and Y axle, thereby make motion platform assembly 3 can reach any point on the XY plane in the range of movement; The kinematic accuracy of platform is to carry out accurate measurement and feedback according to the grating chi that is installed in X axle and Y direction, is accomplished by computer control.
Claims (8)
1. the XY motion platform of a double-deck linear motor driving; It is characterized in that, comprise bottom deck assembly (1), X axle linear motor assembly (2), motion platform assembly (3), Y axle linear motor assembly (4), base plate (5), X axle grating ruler reading head (6), X axle grating ruler reading head corner bracket (7), X axle precise motion guide rail (8), Y axle linear motor rotor (9), Y axle linear motor stator electric and housing (10), Y axle linear electric motors mount pads (11), Y axle grating ruler reading head (12), Y axle grating ruler reading head corner bracket (13), X axle grating chi frame (14), X axle motion link (15), Y axle grating chi frame (16), Y axle motion link (17), Y axle precise motion guide rail (18), X axle linear motor rotor (19), X axle linear electric motors mount pads (20), X axle linear motor stator electric and housing (21);
Wherein, Bottom deck assembly (1) comprises base plate (5); Base plate 5 (on) X axle linear motor assembly (2), motion platform assembly (3), Y axle linear motor assembly (4) be installed; X axle linear motor assembly (2) is installed in through mounting screw on the X axle mounting plane of base plate (5), and Y axle linear motor assembly (4) is installed on the Y axle mounting plane of base plate (5) through mounting screw;
X axle grating ruler reading head corner bracket (7) is installed in the lateral surface of mounting plane of the X axis rail of base plate (5) through mounting screw; X axle grating ruler reading head (6) is installed in the relevant position of X axle grating ruler reading head corner bracket (7) through mounting screw; X axle precise motion guide rail (8) and Y axle precise motion guide rail (18) are formed by fixed rail and slip rail, and the fixed rail in the X axle precise motion guide rail (8) is installed in through mounting screw on the mounting plane of X axis rail of base plate (5);
X axle linear electric motors mount pads (20) are installed in through mounting screw on the mounting plane of X axle linear electric motors of base plate (5); X axle linear motor stator electric and housing (21) are installed on the mounting plane of X axle linear electric motors mount pads (20) through mounting screw; X axle linear motor rotor (19) is installed in X axle linear motor stator electric and the housing (21); Have the connecting hole that connects X axle motion link (15) on the exposed junction of X axle linear motor rotor (19);
X axle motion link (15) is connected with X axle linear motor rotor (19) through attachment screw; X axle motion link (15) is connected with slip rail in the X axle precise motion guide rail (8) through attachment screw, and X axle motion link (15) is moved along directions X through the driving of X axle linear motor rotor (19); Be installed on the corresponding plane of orientation of X axle motion link (15) through the fixed rail of mounting screw Y axle precise motion guide rail (18); Y axle motion link (17) is connected through the slip rail of mounting screw with Y axle precise motion guide rail (18); The link of Y axle motion link (17) is connected with Y axle linear motor rotor (9) through mounting screw, and Y axle motion link (17) is moved along the Y direction through the driving of Y axle linear motor rotor (9);
Y axle linear electric motors mount pads (11) are installed on the Y axle linear electric motors mounting plane of base plate (5) through mounting screw; Y axle linear motor stator electric and housing (10) are installed on the mounting plane of Y axle linear electric motors mount pads (11) through mounting screw; Y axle linear motor rotor (9) is installed in Y axle linear motor stator electric and the housing (10); Have the connecting hole that connects Y axle motion link (17) on the exposed junction of Y axle linear motor rotor (9).
2. XY motion platform as claimed in claim 1 is characterized in that, the fixed rail of motion platform assembly (3) through X axle precise motion guide rail (8) is installed on the mounting plane of X axis rail of base plate (5).
3. like any described XY motion platform among the claim 1-2, it is characterized in that X axle precise motion guide rail (8) and Y axle precise motion guide rail (18) have two groups respectively.
4. like any described XY motion platform among the claim 1-3, it is characterized in that said fixed rail is provided with the installing hole that mounting screw passes.
5. like any described XY motion platform among the claim 1-4; It is characterized in that; Two groups of X axle linear motor rotors (19) symmetry up and down are installed in X axle linear motor stator electric and the housing (21), and two groups of Y axle linear motor rotors (9) up and down symmetry be installed in Y axle linear motor stator electric and the housing (10).
6. like any described XY motion platform among the claim 1-5, it is characterized in that X axle linear motor assembly (2) is the generic linear motor, its mover can only carry out rectilinear motion within the specific limits along X-direction.
7. like any described XY motion platform among the claim 1-6; It is characterized in that; Y axle linear motor assembly (4) is adaptive decoupling formula linear electric motors; Its mover is except that carrying out the rectilinear motion along Y direction within the specific limits, can also be passive carry out within the specific limits moving arbitrarily in X-direction.
8. like any described XY motion platform among the claim 1-7, it is characterized in that the kinematic accuracy of this platform is to carry out accurate measurement and feedback according to the grating chi that is installed in X axle and Y direction, is accomplished by computer control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101454055A CN102723296A (en) | 2012-05-11 | 2012-05-11 | XY motion platform driven by double-layer linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101454055A CN102723296A (en) | 2012-05-11 | 2012-05-11 | XY motion platform driven by double-layer linear motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102723296A true CN102723296A (en) | 2012-10-10 |
Family
ID=46949019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012101454055A Pending CN102723296A (en) | 2012-05-11 | 2012-05-11 | XY motion platform driven by double-layer linear motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102723296A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103078568A (en) * | 2012-12-26 | 2013-05-01 | 清华大学 | Parallel motion decoupling servo control platform |
| CN104655491A (en) * | 2015-02-13 | 2015-05-27 | 郑州大学 | Three-directional mechanical test platform |
| WO2016065559A1 (en) * | 2014-10-29 | 2016-05-06 | 雅科贝思精密机电(上海)有限公司 | High-precision planar positioning system |
| CN111085971A (en) * | 2019-12-31 | 2020-05-01 | 上海三佑科技发展有限公司 | Gantry double-drive detection equipment based on linear motor control |
| CN113172180A (en) * | 2021-04-14 | 2021-07-27 | 深圳市泰达智能装备有限公司 | Coarse aluminum wire bonding machine |
| WO2022007817A1 (en) * | 2020-07-06 | 2022-01-13 | 深圳市鑫君特智能医疗器械有限公司 | Orthopedic surgery device and orthopedic surgery robot system |
| CN116995884A (en) * | 2023-09-27 | 2023-11-03 | 无锡星微科技有限公司杭州分公司 | Direct-drive high-dynamic-performance movement device and control method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030029032A1 (en) * | 2001-08-08 | 2003-02-13 | Matsushita Electric Industrial Co., Ltd. | Apparatus and method for mounting electronic parts |
| CN2562363Y (en) * | 2002-04-19 | 2003-07-23 | 何忠亮 | Extra-thin IC package device |
| US20060091555A1 (en) * | 2004-10-29 | 2006-05-04 | Fujitsu Limited | Method of and apparatus for mounting an electronic part to a substrate |
| CN1822340A (en) * | 2005-01-08 | 2006-08-23 | 三星电子株式会社 | Semiconductor chip packaging apparatus and method of manufacturing semiconductor chip package |
| CN202159695U (en) * | 2011-06-30 | 2012-03-07 | 合肥中南光电有限公司 | Packaging device for photovoltaic assembly |
-
2012
- 2012-05-11 CN CN2012101454055A patent/CN102723296A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030029032A1 (en) * | 2001-08-08 | 2003-02-13 | Matsushita Electric Industrial Co., Ltd. | Apparatus and method for mounting electronic parts |
| CN2562363Y (en) * | 2002-04-19 | 2003-07-23 | 何忠亮 | Extra-thin IC package device |
| US20060091555A1 (en) * | 2004-10-29 | 2006-05-04 | Fujitsu Limited | Method of and apparatus for mounting an electronic part to a substrate |
| CN1822340A (en) * | 2005-01-08 | 2006-08-23 | 三星电子株式会社 | Semiconductor chip packaging apparatus and method of manufacturing semiconductor chip package |
| CN202159695U (en) * | 2011-06-30 | 2012-03-07 | 合肥中南光电有限公司 | Packaging device for photovoltaic assembly |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103078568A (en) * | 2012-12-26 | 2013-05-01 | 清华大学 | Parallel motion decoupling servo control platform |
| CN103078568B (en) * | 2012-12-26 | 2015-12-02 | 清华大学 | Parallel kinematic decoupling zero servo control platform |
| WO2016065559A1 (en) * | 2014-10-29 | 2016-05-06 | 雅科贝思精密机电(上海)有限公司 | High-precision planar positioning system |
| CN104655491A (en) * | 2015-02-13 | 2015-05-27 | 郑州大学 | Three-directional mechanical test platform |
| CN111085971A (en) * | 2019-12-31 | 2020-05-01 | 上海三佑科技发展有限公司 | Gantry double-drive detection equipment based on linear motor control |
| WO2022007817A1 (en) * | 2020-07-06 | 2022-01-13 | 深圳市鑫君特智能医疗器械有限公司 | Orthopedic surgery device and orthopedic surgery robot system |
| CN113172180A (en) * | 2021-04-14 | 2021-07-27 | 深圳市泰达智能装备有限公司 | Coarse aluminum wire bonding machine |
| CN116995884A (en) * | 2023-09-27 | 2023-11-03 | 无锡星微科技有限公司杭州分公司 | Direct-drive high-dynamic-performance movement device and control method |
| CN116995884B (en) * | 2023-09-27 | 2023-12-29 | 无锡星微科技有限公司杭州分公司 | Direct-drive high-dynamic-performance movement device and control method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102723296A (en) | XY motion platform driven by double-layer linear motor | |
| CN1326670C (en) | H type air floating workbench with synchronization driving of bilateral linear motor | |
| CN103225728B (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN103021473B (en) | Direct drive type motion decoupling high-accuracy servo platform | |
| EP3231549B1 (en) | Linear flexible positioning device | |
| CN104440345B (en) | Grand micro- integration high speed precise motion two-dimensional stage being driven the common stator of isomery motor more | |
| CN201134045Y (en) | Double-shaft moving platform | |
| CN107387959B (en) | Integrated high-speed ultra-precise positioning two-dimensional platform | |
| CN106272364A (en) | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform | |
| CN108206155A (en) | A kind of XY high-speed motion platforms of tier rack type decoupling | |
| CN214771874U (en) | Motion platform based on T type air supporting guide rail | |
| CN104765382A (en) | Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform | |
| CN106826781A (en) | Coordinates robot | |
| CN101567223A (en) | Pneumatic semi-suspension two-freedom co-baseplane motion workbench with high speed and large stroke | |
| CN101409112B (en) | Triaxial movement platform | |
| CN1306248C (en) | Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system | |
| CN204248537U (en) | Isomery motor is the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether | |
| CN107979223B (en) | Portable high-acceleration macro-micro motion platform | |
| CN103350351B (en) | Desktop three axle planer-type microfabrication lathe | |
| CN102723297A (en) | XY precision motion platform provided with terminal load support and symmetrical structure | |
| CN1887686A (en) | Two-freedom air-floated precisely locating platform for IC packaging | |
| CN102723303B (en) | Air flotation locating platform with X coordinate and Y coordinate | |
| CN102723298A (en) | Electromagnetic preload XY precision motion platform | |
| CN201111957Y (en) | Three-axis movement platform | |
| CN1294638C (en) | Air floation XY coordinates plane movoment platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20151111 |
|
| C20 | Patent right or utility model deemed to be abandoned or is abandoned |