CN106191817A - Solar silicon wafers plated film graphite boat piece and graphite boat - Google Patents
Solar silicon wafers plated film graphite boat piece and graphite boat Download PDFInfo
- Publication number
- CN106191817A CN106191817A CN201610846771.1A CN201610846771A CN106191817A CN 106191817 A CN106191817 A CN 106191817A CN 201610846771 A CN201610846771 A CN 201610846771A CN 106191817 A CN106191817 A CN 106191817A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- boat piece
- silicon wafers
- solar silicon
- plated film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 123
- 239000010439 graphite Substances 0.000 title claims abstract description 123
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 121
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 94
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 94
- 239000010703 silicon Substances 0.000 title claims abstract description 94
- 235000012431 wafers Nutrition 0.000 title claims abstract description 77
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims 1
- 230000004075 alteration Effects 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 238000001771 vacuum deposition Methods 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000005299 abrasion Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a kind of solar silicon wafers plated film graphite boat piece and graphite boat, by being formed with some holes running through graphite boat piece in graphite boat piece, thus may be implemented in solar silicon wafers and formed by described hole during carrying out vacuum coating four angles of the solar silicon wafers being fixed on back-to-back in graphite boat piece are adsorbed, so that four angles of the solar silicon wafers in graphite boat piece are firmly adsorbed in graphite boat piece, the out-of-flatness even part that efficiently avoid the solar silicon wafers surface fixed thereon that solar silicon wafers exists part wears due to graphite boat piece surface and stuck point and causes in coating process tilts, and then the corner aberration that causes and diffraction phenomenon, for the guarantee that the film layer offer of silicon chip formation uniformity is good.
Description
Technical field
The present invention relates to manufacture of solar cells technical field of tools, particularly relate to a kind of solar silicon wafers plated film graphite
Boat sheet and graphite boat.
Background technology
Solar energy is a kind of cleaning, efficiently and the new forms of energy of never exhaustion, is one of important regenerative resource.Along with too
The development of sun energy industry, more client and solar battery sheet manufacturer increasingly pay attention to the appearance chromatic difference problem of cell piece.
In recent years, both at home and abroad the appearance chromatic difference problem of photovoltaic cell has been carried out numerous studies, had result to show: silicon chip film-coated carrier
For graphite material, graphite boat piece repeatedly uses, and problem of appearance is easy under graphite boat piece link inducement continue to expand, its
In on the impact of appearance chromatic difference problem maximum be the graphite boat piece card dotted state etc. of fixing solar silicon wafers.Actual at photovoltaic cell
Production process in, graphite boat piece frequently uses, the stuck point of fixing solar silicon wafers and with four angular contact of solar silicon wafers
Position is most susceptible to abrasion etc., and under the conditions of using the most frequently, existing graphite boat piece and stuck point surface abrasion can expand
Greatly, it is continuing with rear appearance chromatic difference problem and may proceed to extend, ultimately form that silicon chip appearance chromatic difference is defective and diffraction phenomenon, cause
The silicon chip produced can not normally introduce use to the market.
Further, since existing solar silicon wafers plated film frock tool uses common graphite boat piece and stuck point,
During the use of solar energy graphite boat piece, graphite boat piece and stuck point need periodically to use acid solution to be carried out, thus lead
Qualified graphite boat piece that graphite boat manufacturer dispatches from the factory and stuck point graphite boat piece in actual use and the table of stuck point are caused
Face pattern is the most impaired, the situation frequently used especially for graphite boat piece and stuck point, causes graphite boat piece and stuck point to locate for a long time
In abrasion, pickling state, the continuous fretting corrosion of graphite boat piece and stuck point surface, battery is caused to produce a large amount of appearance chromatic differences bad
Sheet, the later stage appearance chromatic difference silicon chip in various degree mixing be placed on same assembly, cause battery appearance chromatic difference to seem tighter
Weight, causes cell piece, component facade bad, and to production, company brings about great losses.
Therefore, it is necessary to the plated film fitting device of solaode is improved.
Summary of the invention
It is an object of the invention to provide a kind of solar silicon wafers plated film graphite boat piece and graphite boat, to reduce solar energy
Silicon chip produces in coating process that appearance chromatic difference is bad and diffraction phenomenon.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of solar silicon wafers plated film graphite boat piece, including:
Graphite boat piece, described graphite boat piece is provided with stuck point, and solar silicon wafers is positioned in described graphite boat piece, and leads to
Cross described stuck point to be fixed；
Being provided with some holes in described graphite boat piece, described some holes run through described graphite boat piece, and described some
Hole is evenly distributed on around the position that described graphite boat piece is overlapping with inside the four of described solar silicon wafers angles, in plating
Under film vacuum action, to carry out absorption fixing four angles to the solar silicon wafers being positioned in described graphite boat piece.
It is preferred that described some holes are evenly distributed on inside four angles of described graphite boat piece and described solar silicon wafers
Overlapping position.
If it is preferred that the position of the graphite boat piece overlapping with inside each angle of described solar silicon wafers is provided with dry hole
Hole, and some holes are uniformly distributed in corresponding position.
It is preferred that the number of the hole of the position setting of the graphite boat piece overlapping with inside each angle of described solar silicon wafers
Amount is 2-5, and preferably 3.
It is preferred that described some holes are the circular opening of rule.
It is preferred that the radius size of each hole is 0.4-1mm, and preferably greater than 0.4mm.
A kind of graphite boat, including the solar silicon wafers plated film graphite boat piece that multi-disc is above-mentioned.
Alternatively, the quantity of described solar silicon wafers plated film graphite boat piece is 10-20 sheet.
Due to the fact that the above technical scheme of employing, be allowed to compared with prior art, have the following advantages that and actively imitate
Really:
1) the solar silicon wafers plated film graphite boat piece that the present invention provides, owing to being formed with some running through in graphite boat piece
Graphite boat piece hole, thus may be implemented in solar silicon wafers formed by described hole during carrying out vacuum coating right
Four angles of the solar silicon wafers being fixed on back-to-back in graphite boat piece are adsorbed, so that the solar silicon wafers in graphite boat piece
Four angles firmly adsorb in graphite boat piece, efficiently avoid solar silicon wafers in coating process due to graphite boat piece
The out-of-flatness on the solar silicon wafers surface fixed thereon that surface and stuck point exist part wears and cause even part tilts,
And then the corner aberration that causes and diffraction phenomenon, form, for silicon chip, the guarantee that the film layer of uniformity provides good.
2) by hole is set to run through the regular circle shapes shape of graphite boat piece, so that four angles of solar silicon wafers
What surface was subject to is uniformly distributed from the absorption affinity within hole.
3) hole is evenly distributed on the position overlapping with inside four angles of solar silicon wafers at the punch position of graphite boat piece
Place, thus decrease the abrasion that graphite boat piece is caused by solar silicon wafers.
Accompanying drawing explanation
The structural representation of the solar silicon wafers plated film graphite boat piece that Fig. 1 provides for the embodiment of the present invention；
The partial enlarged drawing of the solar silicon wafers plated film graphite boat piece that Fig. 2 provides for the embodiment of the present invention；
Fig. 3 places the structure after solar silicon wafers for the solar silicon wafers plated film graphite boat piece that the embodiment of the present invention provides
Schematic diagram；
The structural representation of the graphite boat that Fig. 4 provides for the embodiment of the present invention.
Label declaration:
The overlapping region of 1-graphite boat piece, 2-solar silicon wafers, 3-stuck point, 4-graphite boat piece and solar silicon wafers interior angle,
5-hole
Detailed description of the invention
The solar silicon wafers plated film graphite boat piece present invention proposed below in conjunction with the drawings and specific embodiments and graphite
Boat is described in further detail.According to following explanation and claims, advantages and features of the invention will be apparent from.Need explanation
, accompanying drawing all uses the form simplified very much and all uses non-ratio accurately, is only used for conveniently, aids in illustrating this lucidly
The purpose of inventive embodiments.
Refer to Fig. 1 to Fig. 3, as shown in Figure 1 to Figure 3, the solar silicon wafers plated film graphite boat piece bag that the present invention provides
Including graphite boat piece 1, graphite boat piece 1 is provided with stuck point 3, solar silicon wafers 2 is positioned in graphite boat piece 1, and is entered by stuck point 3
Row is fixing；Meanwhile, graphite boat piece 1 being provided with some holes 5, some holes 5 run through graphite boat piece 1, and some holes 5 are uniform
It is distributed in around the position that graphite boat piece 1 is overlapping with inside the four of solar silicon wafers 2 angles, under plated film vacuum action
Four angles of the solar silicon wafers 2 being positioned in graphite boat piece 1 are carried out absorption fixing.Wherein, graphite boat piece 1 and solar power silicon
The overlapping region of the interior angle of sheet 2 is as shown in the label 4 in Fig. 3.
The solar silicon wafers plated film graphite boat piece that the present invention provides, some runs through stone owing to being formed with in graphite boat piece
Ink boat sheet hole, thus may be implemented in solar silicon wafers and formed the back of the body by described hole during carrying out vacuum coating
Four angles of the solar silicon wafers that backrest is fixed in graphite boat piece are adsorbed, so that the solar silicon wafers in graphite boat piece
Four angles are firmly adsorbed in graphite boat piece, efficiently avoid solar silicon wafers in coating process due to graphite boat piece table
The out-of-flatness on the solar silicon wafers surface fixed thereon that face and stuck point exist part wears and cause even part tilts, and enters
And the corner aberration caused and diffraction phenomenon, for the guarantee that the film layer offer of silicon chip formation uniformity is good.
In order to decrease the abrasion that graphite boat piece is caused by solar silicon wafers, some holes 5 are preferably evenly distributed on
The position that graphite boat piece 1 is overlapping with inside the four of solar silicon wafers 2 angles.And as further preferred embodiment, and too
The position of graphite boat piece 1 overlapping inside each angle of sun energy silicon chip 2 is provided with some holes, and some holes are in corresponding position
The place of putting is uniformly distributed.
As optional embodiment, the position of the graphite boat piece 1 overlapping with inside each angle of solar silicon wafers 2 is arranged
The quantity of hole is 2-5, and preferably 3, and the fixed position of 3 holes lays respectively at the middle part of position of lap
And both sides.
In a preferred embodiment, hole 5 uses laser boring to be formed, thus does not produce any to the surface of graphite boat piece 1
The impact of irregularities.Certainly, the present invention is not limited thereto, and other instruments punch and to graphite boat piece profile pattern without bright
Any hole knockout that development rings is all within protection scope of the present invention.
As preferred embodiments, in order to make that the surface at four angles of solar silicon wafers is subject to from adsorbing within hole
Power is uniformly distributed, and some holes 5 are the circular opening of the rule running through graphite boat piece.
As optional embodiment, the radius size of each hole 5 is 0.4-1mm, and preferably greater than 0.4mm, thus can
Easily solar silicon wafers 2 is adsorbed during vacuum coating.
Please continue to refer to Fig. 4, as shown in Figure 4, the graphite boat that the present invention provides, including the solar silicon wafers plating that multi-disc is above-mentioned
Film graphite boat piece 1.
As optional embodiment, the quantity of solar silicon wafers plated film graphite boat piece 1 is 10-20 sheet.Certainly, the present invention
It is not limited thereto, including the graphite boat of solar silicon wafers plated film graphite boat piece of other quantity also at the protection model of the present invention
Within enclosing.
The using method of the solar silicon wafers plated film graphite boat piece that the present invention provides comprises the steps:
S1: location graphite boat piece and the four of solar silicon wafers positions that interior angle is overlapping, the graphite boat to overlapping position
Sheet carries out laser boring, and wherein, hole location lays respectively at middle part and the both sides of lap position, and the radius of each hole is more than
0.4mm；
S2: solar silicon wafers is fixed in graphite boat piece by stuck point；
S3: graphite boat piece is put into vacuum technology quartz ampoule plated film；
S4: when solar silicon wafers carries out plated film, the air in hole is evacuated, the solar energy of the position of lap
Four angles of silicon chip are tightly adsorbed in graphite boat piece, and four angles of solar silicon wafers deposit nitrogen equably at same flat surface
SiClx film；
The hole side with low cost, simple to operate that the solar silicon wafers plated film graphite boat piece that the present invention provides is used
Just, it is adaptable to industrialization graphite boat piece uses, four angles weights of graphite boat piece and silicon chip are made owing to stamping hole in graphite boat piece
The position of folded part forms the hole running through graphite boat piece, even if at graphite boat piece and stuck point by situations such as the friction of silicon chip are serious
Under, the position graphite boat piece overlapping with angles, four, inside of silicon chip does not affect the planarization of silicon chip, outward appearance after four angle plated films of silicon chip
Aberration ratio and diffraction phenomenon probability of occurrence are substantially reduced.
Obviously, those skilled in the art can carry out various change and the modification spirit without deviating from the present invention to invention
And scope.So, if the present invention these amendment and modification belong to the claims in the present invention and equivalent technologies thereof scope it
In, then the present invention is also intended to comprise these change and modification.
Claims (9)
1. a solar silicon wafers plated film graphite boat piece, it is characterised in that including:
Graphite boat piece, described graphite boat piece is provided with stuck point, and solar silicon wafers is positioned in described graphite boat piece, and passes through institute
State stuck point to be fixed；
Being provided with some holes in described graphite boat piece, described some holes run through described graphite boat piece, and described some holes
It is evenly distributed on around the position that described graphite boat piece is overlapping with inside the four of described solar silicon wafers angles, for taking out at plated film
Under vacuum action, to carry out absorption fixing four angles to the solar silicon wafers being positioned in described graphite boat piece.
2. solar silicon wafers plated film graphite boat piece as claimed in claim 1, it is characterised in that described some holes uniformly divide
Cloth is in the described graphite boat piece position overlapping with inside the four of described solar silicon wafers angles.
3. solar silicon wafers plated film graphite boat piece as claimed in claim 1 or 2, it is characterised in that with described solar power silicon
The position of graphite boat piece overlapping inside each angle of sheet is provided with some holes, and some holes are uniform in corresponding position
Distribution.
4. solar silicon wafers plated film graphite boat piece as claimed in claim 3, it is characterised in that with described solar silicon wafers
The quantity of the hole that the position of graphite boat piece overlapping inside each angle is arranged is 2-5.
5. solar silicon wafers plated film graphite boat piece as claimed in claim 3, it is characterised in that described some holes are rule
Circular opening then.
6. solar silicon wafers plated film graphite boat piece as claimed in claim 5, it is characterised in that the radius size of each hole
For 0.4-1mm.
7. solar silicon wafers plated film graphite boat piece as claimed in claim 6, it is characterised in that the radius of each hole is more than
0.4mm。
8. a graphite boat, it is characterised in that include multi-disc solar silicon wafers plated film as described in any one of claim 1 to 7
Use graphite boat piece.
9. graphite boat as claimed in claim 8, it is characterised in that the quantity of described solar silicon wafers plated film graphite boat piece is
10-20 sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610846771.1A CN106191817B (en) | 2016-09-23 | 2016-09-23 | Graphite boat piece and graphite boat for solar silicon wafer coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610846771.1A CN106191817B (en) | 2016-09-23 | 2016-09-23 | Graphite boat piece and graphite boat for solar silicon wafer coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106191817A true CN106191817A (en) | 2016-12-07 |
| CN106191817B CN106191817B (en) | 2018-10-16 |
Family
ID=58067517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610846771.1A Active CN106191817B (en) | 2016-09-23 | 2016-09-23 | Graphite boat piece and graphite boat for solar silicon wafer coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106191817B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108103481A (en) * | 2018-01-25 | 2018-06-01 | 无锡盈芯半导体科技有限公司 | Substrate holds formula quartz boat under the arm automatically |
| CN110060951A (en) * | 2019-05-21 | 2019-07-26 | 常州时创能源科技有限公司 | One kind is silicon chip film-coated to use graphite boat |
| CN111020532A (en) * | 2019-12-31 | 2020-04-17 | 昊诚光电（太仓）有限公司 | Graphite boat for solar cell coating |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03146672A (en) * | 1989-11-02 | 1991-06-21 | Denki Kagaku Kogyo Kk | Susceptor for cvd |
| CN202359195U (en) * | 2011-11-21 | 2012-08-01 | 浙江正国太阳能科技有限公司 | Graphite boat sticking point for film coating |
| CN202796887U (en) * | 2012-08-15 | 2013-03-13 | 常州市立新石墨有限公司 | Graphite boat sheet |
| CN203419982U (en) * | 2013-09-11 | 2014-02-05 | 浙江启鑫新能源科技股份有限公司 | Convenient-to-store graphite boat sheet for solar silicon chip |
| CN204407307U (en) * | 2015-01-12 | 2015-06-17 | 江阴方艾机器人有限公司 | Photovoltaic production graphite boat |
| CN204702804U (en) * | 2015-04-30 | 2015-10-14 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of graphite boat piece of stuck point easy accessibility |
| CN206052149U (en) * | 2016-09-23 | 2017-03-29 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
-
2016
- 2016-09-23 CN CN201610846771.1A patent/CN106191817B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03146672A (en) * | 1989-11-02 | 1991-06-21 | Denki Kagaku Kogyo Kk | Susceptor for cvd |
| CN202359195U (en) * | 2011-11-21 | 2012-08-01 | 浙江正国太阳能科技有限公司 | Graphite boat sticking point for film coating |
| CN202796887U (en) * | 2012-08-15 | 2013-03-13 | 常州市立新石墨有限公司 | Graphite boat sheet |
| CN203419982U (en) * | 2013-09-11 | 2014-02-05 | 浙江启鑫新能源科技股份有限公司 | Convenient-to-store graphite boat sheet for solar silicon chip |
| CN204407307U (en) * | 2015-01-12 | 2015-06-17 | 江阴方艾机器人有限公司 | Photovoltaic production graphite boat |
| CN204702804U (en) * | 2015-04-30 | 2015-10-14 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of graphite boat piece of stuck point easy accessibility |
| CN206052149U (en) * | 2016-09-23 | 2017-03-29 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108103481A (en) * | 2018-01-25 | 2018-06-01 | 无锡盈芯半导体科技有限公司 | Substrate holds formula quartz boat under the arm automatically |
| CN110060951A (en) * | 2019-05-21 | 2019-07-26 | 常州时创能源科技有限公司 | One kind is silicon chip film-coated to use graphite boat |
| CN110060951B (en) * | 2019-05-21 | 2024-02-13 | 常州时创能源股份有限公司 | Graphite boat for silicon wafer coating |
| CN111020532A (en) * | 2019-12-31 | 2020-04-17 | 昊诚光电（太仓）有限公司 | Graphite boat for solar cell coating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106191817B (en) | 2018-10-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106191817A (en) | Solar silicon wafers plated film graphite boat piece and graphite boat | |
| CN110660881B (en) | Method for removing polycrystalline silicon of passivated contact cell by winding plating without mask | |
| CN105070772A (en) | Wet chemical method of preparing uniform reverse pyramid textured structures on the surface of a monocrystalline silicon | |
| CN101237010A (en) | Method for improving solar battery diffusion | |
| CN206052149U (en) | Solar silicon wafers plated film graphite boat piece and graphite boat | |
| CN113611756B (en) | N-type TOPCon battery and preparation method thereof | |
| JP2020522896A (en) | TUBE TYPE PERC SOLAR CELL COATING DEVICE AND COATING METHOD | |
| CN106098860A (en) | A kind of production technology of solar battery sheet | |
| CN110438474A (en) | Slide glass unit | |
| CN109616556A (en) | A kind of annealing of silicon chip back side and the integrated method of front plated film and a kind of preparation method of cell piece | |
| CN201800308U (en) | Vacuum suction plate structure for photovoltaic solar printing machine | |
| CN105154983B (en) | The preparation method of monocrystaline silicon solar cell | |
| CN114628547B (en) | Solar cell with back surface local morphology and preparation method thereof | |
| CN110299416A (en) | Surface passivation layer structure of doping layer of solar cell and preparation method thereof | |
| CN206893626U (en) | Tubular type PERC one side solar cells | |
| CN206109531U (en) | Perovskite thin film's low pressure chemical deposition's equipment | |
| US20170179326A1 (en) | System and method for mass-production of high-efficiency photovoltaic structures | |
| CN211256085U (en) | Amorphous silicon coating equipment for manufacturing HIT battery | |
| CN206467287U (en) | Vacuum coating tool for mobile fingerprint ring | |
| CN107794506A (en) | Vacuum coating tool for mobile fingerprint ring | |
| CN110021682A (en) | A kind of passivation process suitable for solar battery sheet | |
| CN103258865A (en) | Oxide thin film substrate, method of fabricating thereof, photovoltaic and oled including the same | |
| CN109524552B (en) | Method for preparing pyramid-like organic-inorganic hybrid perovskite membrane in two steps | |
| CN102651425B (en) | Method for manufacturing solar cell | |
| CN111943154A (en) | Preparation method of nano black phosphorus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20180830 Address after: 710100 Shaanxi Xi'an space base east Chang'an Avenue 589 Applicant after: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Applicant after: XINING BRANCH OF SPIC XI'AN SOLAR POWER Co.,Ltd. Applicant after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Applicant after: Huanghe Hydropower Development Co., Ltd. Address before: 710100 Shaanxi Xi'an space base east Chang'an Avenue 589 Applicant before: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201113 Address after: 710099 589 East Chang'an Street, Xi'an Space Base, Shaanxi Province Patentee after: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Patentee after: Huanghe hydropower Xining Solar Power Co.,Ltd. Patentee after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Patentee after: Huanghe Hydropower Development Co., Ltd. Address before: 710100 East Chang'an Avenue, Xi'an, Shaanxi Aerospace base, No. 589 Patentee before: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Patentee before: XINING BRANCH OF SPIC XI'AN SOLAR POWER Co.,Ltd. Patentee before: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Patentee before: Huanghe Hydropower Development Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220316 Address after: 810007 No. 4, Jinsi Road, Dongchuan Industrial Park, Xining City, Qinghai Province Patentee after: Xining solar power branch of Qinghai upper Yellow River Hydropower Development Co.,Ltd. Patentee after: Xi'an solar power branch of Qinghai upper Yellow River Hydropower Development Co.,Ltd. Patentee after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Patentee after: Huanghe Hydropower Development Co., Ltd. Address before: No. 589, Chang'an Street, Xi'an Aerospace base, Shaanxi Province, 710099 Patentee before: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Patentee before: Huanghe hydropower Xining Solar Power Co.,Ltd. Patentee before: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Patentee before: Huanghe Hydropower Development Co., Ltd. |
|
| TR01 | Transfer of patent right |