CN106191817A - Solar silicon wafers plated film graphite boat piece and graphite boat - Google Patents
Solar silicon wafers plated film graphite boat piece and graphite boat Download PDFInfo
- Publication number
- CN106191817A CN106191817A CN201610846771.1A CN201610846771A CN106191817A CN 106191817 A CN106191817 A CN 106191817A CN 201610846771 A CN201610846771 A CN 201610846771A CN 106191817 A CN106191817 A CN 106191817A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- boat piece
- silicon wafers
- solar silicon
- plated film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 123
- 239000010439 graphite Substances 0.000 title claims abstract description 123
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 121
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 94
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 94
- 239000010703 silicon Substances 0.000 title claims abstract description 94
- 235000012431 wafers Nutrition 0.000 title claims abstract description 77
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims 1
- 230000004075 alteration Effects 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 238000001771 vacuum deposition Methods 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000005299 abrasion Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610846771.1A CN106191817B (en) | 2016-09-23 | 2016-09-23 | Graphite boat piece and graphite boat for solar silicon wafer coating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610846771.1A CN106191817B (en) | 2016-09-23 | 2016-09-23 | Graphite boat piece and graphite boat for solar silicon wafer coating |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106191817A true CN106191817A (en) | 2016-12-07 |
CN106191817B CN106191817B (en) | 2018-10-16 |
Family
ID=58067517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610846771.1A Active CN106191817B (en) | 2016-09-23 | 2016-09-23 | Graphite boat piece and graphite boat for solar silicon wafer coating |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106191817B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108103481A (en) * | 2018-01-25 | 2018-06-01 | 无锡盈芯半导体科技有限公司 | Substrate holds formula quartz boat under the arm automatically |
CN110060951A (en) * | 2019-05-21 | 2019-07-26 | 常州时创能源科技有限公司 | One kind is silicon chip film-coated to use graphite boat |
CN111020532A (en) * | 2019-12-31 | 2020-04-17 | 昊诚光电(太仓)有限公司 | Graphite boat for solar cell coating |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03146672A (en) * | 1989-11-02 | 1991-06-21 | Denki Kagaku Kogyo Kk | Susceptor for cvd |
CN202359195U (en) * | 2011-11-21 | 2012-08-01 | 浙江正国太阳能科技有限公司 | Graphite boat sticking point for film coating |
CN202796887U (en) * | 2012-08-15 | 2013-03-13 | 常州市立新石墨有限公司 | Graphite boat sheet |
CN203419982U (en) * | 2013-09-11 | 2014-02-05 | 浙江启鑫新能源科技股份有限公司 | Convenient-to-store graphite boat sheet for solar silicon chip |
CN204407307U (en) * | 2015-01-12 | 2015-06-17 | 江阴方艾机器人有限公司 | Photovoltaic production graphite boat |
CN204702804U (en) * | 2015-04-30 | 2015-10-14 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of graphite boat piece of stuck point easy accessibility |
CN206052149U (en) * | 2016-09-23 | 2017-03-29 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
-
2016
- 2016-09-23 CN CN201610846771.1A patent/CN106191817B/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03146672A (en) * | 1989-11-02 | 1991-06-21 | Denki Kagaku Kogyo Kk | Susceptor for cvd |
CN202359195U (en) * | 2011-11-21 | 2012-08-01 | 浙江正国太阳能科技有限公司 | Graphite boat sticking point for film coating |
CN202796887U (en) * | 2012-08-15 | 2013-03-13 | 常州市立新石墨有限公司 | Graphite boat sheet |
CN203419982U (en) * | 2013-09-11 | 2014-02-05 | 浙江启鑫新能源科技股份有限公司 | Convenient-to-store graphite boat sheet for solar silicon chip |
CN204407307U (en) * | 2015-01-12 | 2015-06-17 | 江阴方艾机器人有限公司 | Photovoltaic production graphite boat |
CN204702804U (en) * | 2015-04-30 | 2015-10-14 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of graphite boat piece of stuck point easy accessibility |
CN206052149U (en) * | 2016-09-23 | 2017-03-29 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108103481A (en) * | 2018-01-25 | 2018-06-01 | 无锡盈芯半导体科技有限公司 | Substrate holds formula quartz boat under the arm automatically |
CN110060951A (en) * | 2019-05-21 | 2019-07-26 | 常州时创能源科技有限公司 | One kind is silicon chip film-coated to use graphite boat |
CN110060951B (en) * | 2019-05-21 | 2024-02-13 | 常州时创能源股份有限公司 | Graphite boat for silicon wafer coating |
CN111020532A (en) * | 2019-12-31 | 2020-04-17 | 昊诚光电(太仓)有限公司 | Graphite boat for solar cell coating |
Also Published As
Publication number | Publication date |
---|---|
CN106191817B (en) | 2018-10-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180830 Address after: 710100 Shaanxi Xi'an space base east Chang'an Avenue 589 Applicant after: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Applicant after: XINING BRANCH OF SPIC XI'AN SOLAR POWER Co.,Ltd. Applicant after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Applicant after: Huanghe Hydropower Development Co., Ltd. Address before: 710100 Shaanxi Xi'an space base east Chang'an Avenue 589 Applicant before: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201113 Address after: 710099 589 East Chang'an Street, Xi'an Space Base, Shaanxi Province Patentee after: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Patentee after: Huanghe hydropower Xining Solar Power Co.,Ltd. Patentee after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Patentee after: Huanghe Hydropower Development Co., Ltd. Address before: 710100 East Chang'an Avenue, Xi'an, Shaanxi Aerospace base, No. 589 Patentee before: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Patentee before: XINING BRANCH OF SPIC XI'AN SOLAR POWER Co.,Ltd. Patentee before: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Patentee before: Huanghe Hydropower Development Co., Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220316 Address after: 810007 No. 4, Jinsi Road, Dongchuan Industrial Park, Xining City, Qinghai Province Patentee after: Xining solar power branch of Qinghai upper Yellow River Hydropower Development Co.,Ltd. Patentee after: Xi'an solar power branch of Qinghai upper Yellow River Hydropower Development Co.,Ltd. Patentee after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Patentee after: Huanghe Hydropower Development Co., Ltd. Address before: No. 589, Chang'an Street, Xi'an Aerospace base, Shaanxi Province, 710099 Patentee before: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Patentee before: Huanghe hydropower Xining Solar Power Co.,Ltd. Patentee before: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Patentee before: Huanghe Hydropower Development Co., Ltd. |
|
TR01 | Transfer of patent right |