CN206052149U - Solar silicon wafers plated film graphite boat piece and graphite boat - Google Patents

Solar silicon wafers plated film graphite boat piece and graphite boat Download PDF

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Publication number
CN206052149U
CN206052149U CN201621076966.4U CN201621076966U CN206052149U CN 206052149 U CN206052149 U CN 206052149U CN 201621076966 U CN201621076966 U CN 201621076966U CN 206052149 U CN206052149 U CN 206052149U
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CN
China
Prior art keywords
graphite boat
silicon wafers
boat piece
solar silicon
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
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CN201621076966.4U
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Chinese (zh)
Inventor
李跃恒
董鹏
杨爱静
高艳飞
郭永刚
屈小勇
王永岗
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State Power Investment Corp Xian Solar Power Co Ltd
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State Power Investment Corp Xian Solar Power Co Ltd
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Priority to CN201621076966.4U priority Critical patent/CN206052149U/en
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Abstract

The utility model discloses a kind of solar silicon wafers plated film graphite boat piece and graphite boat, by some holes through graphite boat piece are formed with graphite boat piece, thus may be implemented in four angles of solar silicon wafers that solar silicon wafers are formed to being fixed in graphite boat piece back-to-back by described hole during vacuum coating is carried out and adsorb, so that four angles of the solar silicon wafers in graphite boat piece are firmly adsorbed in graphite boat piece, the out-of-flatness even part that efficiently avoid the solar silicon wafers surface being fixed thereon that solar silicon wafers in coating process have part wears and cause due to graphite boat piece surface and stuck point tilts, and then caused corner aberration and diffraction phenomenon, the film layer that uniformity is formed for silicon chip provides good guarantee.

Description

Solar silicon wafers plated film graphite boat piece and graphite boat
Technical field
This utility model is related to manufacture of solar cells technical field of tools, more particularly to a kind of solar silicon wafers plated film is used Graphite boat piece and graphite boat.
Background technology
Solar energy is a kind of cleaning, efficiently and the never new forms of energy of exhaustion, is one of important regenerative resource.With too The development of positive energy industry, more clients and solar battery sheet manufacturer increasingly pay attention to the appearance chromatic difference problem of cell piece. In recent years, numerous studies have been carried out to the appearance chromatic difference problem of photovoltaic cell both at home and abroad, has had result to show:Silicon chip film-coated carrier For graphite material, graphite boat piece is repeatedly used, and problem of appearance is easy to continue to expand under graphite boat piece link inducement, its In appearance chromatic difference problem is affected maximum to be stuck point state that graphite boat piece fixes solar silicon wafers etc..In photovoltaic cell reality Production process in, graphite boat piece is frequently used, the stuck point of fixed solar silicon wafers and with four angular contacts of solar silicon wafers Position is most susceptible to abrasion etc., and so, frequently under use condition, existing graphite boat piece and stuck point surface abrasion can expand Greatly, it is continuing with rear appearance chromatic difference problem to may proceed to extend, ultimately forms that silicon chip appearance chromatic difference is unqualified and diffraction phenomenon, causes The silicon chip of production can not normally introduce use to the market.
Further, since existing solar silicon wafers plated film frock tool uses common graphite boat piece and stuck point, During the use of solar energy graphite boat piece, graphite boat piece and stuck point need periodically to be cleaned using acid solution, thus lead The table of qualified graphite boat piece that graphite boat manufacturer dispatches from the factory and stuck point graphite boat piece and stuck point is in actual use caused Face pattern is constantly damaged, and especially for the situation that graphite boat piece and stuck point are frequently used, causes graphite boat piece and stuck point to locate for a long time In abrasion, pickling state, the continuous fretting corrosion of graphite boat piece and stuck point surface, battery is caused to produce a large amount of appearance chromatic differences bad Piece, later stage are placed on same block assembly in the mixing of different degrees of appearance chromatic difference silicon chip, cause battery appearance chromatic difference to seem tighter Weight, causes that cell piece, component facade are bad, and to production, company brings about great losses.
Therefore, it is necessary to be improved to the plated film fitting device of solaode.
Utility model content
The purpose of this utility model is to provide a kind of solar silicon wafers plated film graphite boat piece and graphite boat, to reduce too It is positive can silicon chip to produce appearance chromatic difference in coating process bad with diffraction phenomenon.
For achieving the above object, the technical solution adopted in the utility model is as follows:
A kind of solar silicon wafers plated film graphite boat piece, including:
Graphite boat piece, is provided with stuck point in the graphite boat piece, solar silicon wafers are positioned in the graphite boat piece, and are led to Cross the stuck point to be fixed;
Some holes are provided with the graphite boat piece, some holes run through the graphite boat piece, and described some Hole is evenly distributed on around the graphite boat piece position overlap with the inside of four angles of the solar silicon wafers, in plating Four angles of the solar silicon wafers under film vacuum action to being positioned in the graphite boat piece carry out absorption fixation.
It is preferred that some holes are evenly distributed on the inside of the graphite boat piece and four angles of the solar silicon wafers At the position of overlap.
If it is preferred that the position of the graphite boat piece overlap with the inside of each angle of the solar silicon wafers is provided with dry hole Hole, and some holes are uniformly distributed in corresponding position.
It is preferred that the number of the hole of the position setting of the graphite boat piece overlap with the inside of each angle of the solar silicon wafers Measure as 2-5, and preferably 3.
It is preferred that some holes are the circular opening of rule.
It is preferred that the radius size of each hole is 0.4-1mm, and preferably greater than 0.4mm.
A kind of graphite boat, including the solar silicon wafers plated film graphite boat piece that multi-disc is above-mentioned.
Alternatively, the quantity of the solar silicon wafers plated film graphite boat piece is 10-20 pieces.
This utility model is due to using above technical scheme, being allowed to compared with prior art, have the following advantages that and accumulate Pole effect:
1) the solar silicon wafers plated film graphite boat piece that this utility model is provided, some due to being formed with graphite boat piece Through the hole of graphite boat piece, thus may be implemented in solar silicon wafers and pass through described hole shape during vacuum coating is carried out Four angles of solar silicon wafers being fixed in graphite boat piece back-to-back in pairs are adsorbed, so that the solar energy in graphite boat piece Four angles of silicon chip are firmly adsorbed in graphite boat piece, efficiently avoid solar silicon wafers in coating process due to graphite The out-of-flatness on the solar silicon wafers surface being fixed thereon that boat piece surface and stuck point have part wears and cause even part Tilting, and then caused corner aberration and diffraction phenomenon, the film layer for forming uniformity for silicon chip provide good guarantee.
2) by hole is set to the regular circle shapes shape through graphite boat piece, so that four angles of solar silicon wafers The absorption affinity inside hole that surface is subject to is uniformly distributed.
3) hole is evenly distributed on the position overlap with the inside of four angles of solar silicon wafers in the punch position of graphite boat piece Place, so as to reduce the abrasion that solar silicon wafers are caused to graphite boat piece.
Description of the drawings
The structural representation of the solar silicon wafers plated film graphite boat piece that Fig. 1 is provided for this utility model embodiment;
The partial enlarged drawing of the solar silicon wafers plated film graphite boat piece that Fig. 2 is provided for this utility model embodiment;
Fig. 3 is placed after solar silicon wafers for the solar silicon wafers plated film graphite boat piece that this utility model embodiment is provided Structural representation;
The structural representation of the graphite boat that Fig. 4 is provided for this utility model embodiment.
Label declaration:
The overlapping region of 1- graphite boat pieces, 2- solar silicon wafers, 3- stuck points, 4- graphite boat pieces and solar silicon wafers interior angle, 5- holes
Specific embodiment
Below in conjunction with the drawings and specific embodiments to the utility model proposes solar silicon wafers plated film graphite boat piece and Graphite boat is described in further detail.According to following explanation and claims, advantages and features of the present utility model will be more clear Chu.It should be noted that, accompanying drawing in the form of simplifying very much and uses non-accurately ratio, is only used for conveniently, lucidly Aid in illustrating the purpose of this utility model embodiment.
Fig. 1 to Fig. 3 is refer to, as shown in Figure 1 to Figure 3, the solar silicon wafers plated film graphite boat that this utility model is provided Piece includes graphite boat piece 1, and stuck point 3 is provided with graphite boat piece 1, and solar silicon wafers 2 are positioned in graphite boat piece 1, and by card Point 3 is fixed;Meanwhile, some holes 5 are provided with graphite boat piece 1, some holes 5 run through graphite boat piece 1, and some holes 5 are evenly distributed on around the position overlap with the inside of four angles of solar silicon wafers 2 of graphite boat piece 1, in plated film evacuation Four angles of the solar silicon wafers 2 under effect to being positioned in graphite boat piece 1 carry out absorption fixation.Wherein, graphite boat piece 1 with too The overlapping region of the interior angle of positive energy silicon chip 2 is as shown in the label 4 in Fig. 3.
The solar silicon wafers plated film graphite boat piece that this utility model is provided, as some passing through is formed with graphite boat piece The hole of graphite boat piece is worn, thus be may be implemented in solar silicon wafers and formed by described hole during vacuum coating is carried out Four angles of solar silicon wafers to being fixed in graphite boat piece back-to-back are adsorbed, so that the solar power silicon in graphite boat piece Four angles of piece are firmly adsorbed in graphite boat piece, efficiently avoid solar silicon wafers in coating process due to graphite boat The out-of-flatness on the solar silicon wafers surface being fixed thereon that piece surface and stuck point have part wears and cause even partly is stuck up Rise, and then caused corner aberration and diffraction phenomenon, the film layer for forming uniformity for silicon chip provides good guarantee.
In order to reduce the abrasion that solar silicon wafers are caused to graphite boat piece, some holes 5 are preferably and are evenly distributed on At the position overlap with the inside of four angles of solar silicon wafers 2 of graphite boat piece 1.And as further preferred embodiment, and too The position of the graphite boat piece 1 overlapped on the inside of each angle of positive energy silicon chip 2 is provided with some holes, and some holes in correspondence position The place of putting is uniformly distributed.
As optional embodiment, what the position of the graphite boat piece 1 overlap with the inside of each angle of solar silicon wafers 2 was arranged The quantity of hole is 2-5, and preferably 3, and the fixed position of 3 holes is respectively positioned at the middle part of the position of lap And both sides.
In a preferred embodiment, hole 5 is formed using laser boring, any so as to not produce to the surface of graphite boat piece 1 The impact of irregularities.Certainly, this utility model is not limited thereto, and other instruments punch and to graphite boat piece profile pattern Any hole knockout having no significant effect is within protection domain of the present utility model.
As preferred embodiments, in order that the adsorbing inside hole that the surface at four angles of solar silicon wafers is subject to Power is uniformly distributed, and some holes 5 are the circular opening of the rule through graphite boat piece.
Used as optional embodiment, the radius size of each hole 5 is 0.4-1mm, and preferably greater than 0.4mm, so as to can Easily solar silicon wafers 2 are adsorbed during vacuum coating.
Please continue to refer to Fig. 4, as shown in figure 4, the graphite boat that this utility model is provided, including the solar power silicon that multi-disc is above-mentioned Piece plated film graphite boat piece 1.
Used as optional embodiment, the quantity of solar silicon wafers plated film graphite boat piece 1 is 10-20 pieces.Certainly, this practicality It is new to be not limited thereto, including other quantity solar silicon wafers plated film graphite boat piece graphite boat also in this utility model Protection domain within.
The using method of the solar silicon wafers plated film graphite boat piece that this utility model is provided comprises the steps:
S1:The positioning graphite boat piece position Chong Die with the four of solar silicon wafers interior angles, to the graphite boat at lap position Piece carries out laser boring, wherein, hole location is more than positioned at the middle part and both sides of lap position, and the radius of each hole respectively 0.4mm;
S2:Solar silicon wafers are fixed in graphite boat piece by stuck point;
S3:Graphite boat piece is put into into plated film in vacuum technology quartz ampoule;
S4:When solar silicon wafers carry out plated film, the air in hole is evacuated, the solar energy of the position of lap Four angles of silicon chip are tightly adsorbed in graphite boat piece, and four angles of solar silicon wafers equably deposit nitrogen in same flat surface SiClx film;
The hole used by the solar silicon wafers plated film graphite boat piece that this utility model is provided is with low cost, simple to operate It is convenient, it is adaptable to which that industrialization graphite boat piece is used, graphite boat piece and four angles of silicon chip are made as hole is stamped in graphite boat piece The position of lap forms the hole through graphite boat piece, though graphite boat piece and stuck point by silicon chip the feelings such as friction is serious Under condition, the planarization of silicon chip is not affected with four Chong Die position graphite boat pieces in angle inside silicon chip, it is outer after four angle plated films of silicon chip See aberration ratio and diffraction phenomenon probability of occurrence is substantially reduced.
Obviously, those skilled in the art can carry out various changes to utility model and modification is new without deviating from this practicality The spirit and scope of type.So, if it is of the present utility model these modification and modification belong to this utility model claim and its Within the scope of equivalent technologies, then this utility model is also intended to comprising these changes and modification.

Claims (9)

1. a kind of solar silicon wafers plated film graphite boat piece, it is characterised in that include:
Graphite boat piece, is provided with stuck point in the graphite boat piece, solar silicon wafers are positioned in the graphite boat piece, and passes through institute State stuck point to be fixed;
Some holes are provided with the graphite boat piece, some holes run through the graphite boat piece, and some holes It is evenly distributed on around the graphite boat piece position overlap with the inside of four angles of the solar silicon wafers, for taking out in plated film Four angles of the solar silicon wafers under vacuum action to being positioned in the graphite boat piece carry out absorption fixation.
2. solar silicon wafers plated film graphite boat piece as claimed in claim 1, it is characterised in that some holes uniformly divide Cloth is at the graphite boat piece position overlap with the inside of four angles of the solar silicon wafers.
3. solar silicon wafers plated film graphite boat piece as claimed in claim 1 or 2, it is characterised in that with the solar power silicon The position of the graphite boat piece overlapped on the inside of each angle of piece is provided with some holes, and some holes are uniform in corresponding position Distribution.
4. solar silicon wafers plated film graphite boat piece as claimed in claim 3, it is characterised in that with the solar silicon wafers The quantity of the hole that the position of the graphite boat piece overlapped on the inside of each angle is arranged is 2-5.
5. solar silicon wafers plated film graphite boat piece as claimed in claim 3, it is characterised in that some holes are rule Circular opening then.
6. solar silicon wafers plated film graphite boat piece as claimed in claim 5, it is characterised in that the radius size of each hole For 0.4-1mm.
7. solar silicon wafers plated film graphite boat piece as claimed in claim 6, it is characterised in that the radius of each hole is more than 0.4mm。
8. a kind of graphite boat, it is characterised in that the solar silicon wafers plated film including multi-disc as described in any one of claim 1 to 7 Use graphite boat piece.
9. graphite boat as claimed in claim 8, it is characterised in that the quantity of the solar silicon wafers plated film graphite boat piece is 10-20 pieces.
CN201621076966.4U 2016-09-23 2016-09-23 Solar silicon wafers plated film graphite boat piece and graphite boat Withdrawn - After Issue CN206052149U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621076966.4U CN206052149U (en) 2016-09-23 2016-09-23 Solar silicon wafers plated film graphite boat piece and graphite boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621076966.4U CN206052149U (en) 2016-09-23 2016-09-23 Solar silicon wafers plated film graphite boat piece and graphite boat

Publications (1)

Publication Number Publication Date
CN206052149U true CN206052149U (en) 2017-03-29

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106191817A (en) * 2016-09-23 2016-12-07 国家电投集团西安太阳能电力有限公司 Solar silicon wafers plated film graphite boat piece and graphite boat
CN108165955A (en) * 2017-12-06 2018-06-15 中建材浚鑫科技有限公司 A kind of novel graphite boat

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106191817A (en) * 2016-09-23 2016-12-07 国家电投集团西安太阳能电力有限公司 Solar silicon wafers plated film graphite boat piece and graphite boat
CN106191817B (en) * 2016-09-23 2018-10-16 国家电投集团西安太阳能电力有限公司 Graphite boat piece and graphite boat for solar silicon wafer coating
CN108165955A (en) * 2017-12-06 2018-06-15 中建材浚鑫科技有限公司 A kind of novel graphite boat

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Granted publication date: 20170329

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