CN105993068A - Substrate transfer apparatus - Google Patents
Substrate transfer apparatus Download PDFInfo
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- CN105993068A CN105993068A CN201580003423.1A CN201580003423A CN105993068A CN 105993068 A CN105993068 A CN 105993068A CN 201580003423 A CN201580003423 A CN 201580003423A CN 105993068 A CN105993068 A CN 105993068A
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- magnetic
- pallet
- transfer
- magnet
- substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Condensed Matter Physics & Semiconductors (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
The present invention presents a substrate transfer apparatus comprising: a tray on which a substrate is loaded; a magnetic transfer unit provided at a lower side of the tray, magnetically levitating the tray, and transferring the tray by magnetic force; a guide unit for guiding the transfer of the tray by not making contact with the tray; and an interval maintenance means provided at at least one region between the magnetic transfer unit and the guide unit.
Description
Technical field
The present invention is with regard to substrate transfer device, and is specifically with regard to the torr being mounted with substrate via the transfer of contactless method
The substrate transfer device of dish (tray).
Background technology
By and large, (Flat Panel Display device is called for short: FPD) (such as liquid crystal display device flat-panel display device
LCD), plasma display device (Plasma Display Panel (Liquid Crystal Display device is called for short:
Device, be called for short: PDP), field emission display (Field Emission Display device, be called for short: FED) and electricity
Electroluminescent display part (Electro luminescence Display device is called for short: ELD)) is many by performing on substrate
Individual processing procedure and manufacture.That is, on substrate, deposition (deposition) processing procedure, light lithography (photolithography) are repeated
Processing procedure and etching (etching) processing procedure repeatedly, and additionally perform cleaning, attachment and cutting processing procedure to manufacture flat-panel monitor
Part.
These manufacture processes of flat-panel display device are that the multiple chamber interior having prepared suitable environment wherein performs.To this end, set
Having thought method in line, wherein substrate is installed on pallet (Tray), and described pallet then by vertical or tilt to be erected to shift with
Will pass through the inside of the plurality of chamber.
Transfer device for transfer base substrate can comprise substrate pallet mounted thereto, and contacts the bottom of described pallet and by horse
Reach and rotate thereby to provide thrust to the driving cylinder of described pallet.That is, prior art transfer device is by being located under chamber
In portion's part and contact tray bottom driving cylinder moment transfer tray.The instant disclosure of these transfer devices is in Korean Patent
In application Patent Publication case the 2003-0068292nd.
But, there is restriction, because with driving the increase of the friction between cylinder and tray bottom to produce particle (particle).
Described particle is attached to transferred substrate, thereby produces the defect in display device, and according to the exploitation of high standard/high-effect device
And cause defective components.Also, particle is introduced into for, in the vavuum pump of chamber interior formation vacuum, causing the fault of vavuum pump.
(prior art literature)
Korean patent application Patent Publication case the 2003-0068292nd
Content of the invention
Technical problem to be solved
The present invention provide due in the case of not contacting pallet transfer base substrate and be prevented from particle produce substrate transfer device.
The present invention provides and is prevented from the substrate transfer dress that particle produces owing to pallet carries out shifting while by magnetic suspension
Put.
The technological means of solution problem
According to exemplary embodiments, substrate transfer device comprises: pallet, and substrate is arranged on described pallet；Magnetic buanch unit,
It is placed in below described pallet, magnetically makes described pallet suspend, and by the described pallet of magnetic force transfer；And guide unit,
It guides the transfer of described pallet in the case of not contacting described pallet.
Substrate transfer device can further include transfer substrate, and it comprises through providing to contact the contact area of the downside of described pallet
And the elongated area downwardly extending from contact area both sides.
Magnetic buanch unit can comprise: magnetic suspension part, and it is placed on a region of transfer substrate and magnetically makes pallet
Suspend；And magnetic transfer part, it is placed in below magnetic suspension part to shift in one direction by the torr of magnetic levitation
Dish.
Magnetic suspension part can comprise: the first magnetic suspension part, and it contacts transfer substrate, and comprises at least one magnet；With
And the second magnetic suspension part, itself and the first magnetic suspension spaced-apart, and comprise to be applied to from the first magnetic suspension part
Suction and repulsion at least at least one magnet of any one.
Magnetic transfer part can comprise: rotary shaft；Magnetic rotating part, it is multiple that it comprises to be disposed to around described rotary shaft
Magnet；And magnetic transfer part, it separates with magnetic rotating part and comprises multiple magnet.
Substrate transfer device can further include receiving part, and it is in inner containment magnetic rotating part, wherein said receiving part
Upper part contact the second magnetic suspension part.
The plurality of magnet of magnetic transfer part may be provided at least one region of the elongated area of transfer substrate, one
Area surface is to magnetic rotating part.
The plurality of magnet of magnetic rotating part may be provided so that the magnet with polarity different from each other is alternately disposed,
So that at a predetermined angle around rotary shaft, and the plurality of magnet of magnetic transfer part may be provided so that having different from each other
The magnet of polarity is alternately disposed, in order to have the angle identical with the angle of magnetic rotating part.
Guide unit can comprise: the first steering magnet, and it is coupled to the upper part of pallet；And second steering magnet, it sets
With spaced a predetermined distance from the first steering magnet on the upper wall of chamber, wherein the first steering magnet and the second steering magnet are applied in
In suction or repulsion at least any one.
Guide unit can further include the transfer guide member being located between pallet and chamber inner wall.
Transfer guide member may be provided between elongated area and chamber inner wall.
Substrate transfer device can further include the gap at least one region being located between magnetic buanch unit and guide unit
Maintain component.
Gap maintains component to may be provided in elongated area and magnetic suspension portion divide between region or elongated area and transfer guide member between
Region at least one on.
At least a portion of transfer guide member can be in the direction close to pallet and move in the direction away from pallet.
When pallet is transferred, the transfer guide member being located in traversing chamber can be located at the first position being adjacent to pallet, and works as
When pallet is returned, transfer guide member can be located at the second position away from pallet.
Invention effect
Substrate transfer device according to exemplary embodiments comprises: magnetic transfer part, and it is below pallet, and described magnetic shifts
Part magnetically suspends and shifts the pallet of installation base plate on it；And guide unit, it is on pallet and at the side table of pallet
On face, guide unit guides the movement of pallet.Accordingly, because do not produce friction between pallet and magnetic transfer part, because of
This does not produce particle, and thus without the fault of product defects and the part not havinging such as vavuum pump being caused by particle occurs.
In the substrate transfer device according to exemplary embodiments, at least a portion of the transfer guide member guiding the transfer of pallet can
And move up in the side away from pallet on the direction close to pallet.That is, when pallet is transferred, the transfer of traversing chamber
Guide member disposes close to pallet, and when pallet is returned, the transfer guide member of traversing chamber disposes away from pallet to permit
The position being permitted pallet is easily moved.Therefore, when the position of pallet mobile in traversing chamber, the movement of pallet can be increased
Nargin.
Brief description
Fig. 1 is the front view of the substrate transfer device according to exemplary embodiments.
Fig. 2 is the side view that the substrate transfer device according to exemplary embodiments is described.
Fig. 3 is the side view of the magnetic buanch unit that the substrate transfer device according to first exemplary embodiment is described.
Fig. 4 is the schematic diagram of the magnetic transfer part that the substrate transfer device according to first exemplary embodiment is described.
Fig. 5 is the side view of the magnetic buanch unit that the substrate transfer device according to second exemplary embodiment is described.
Fig. 6 is the side view of the magnetic buanch unit that the substrate transfer device according to the 3rd exemplary embodiments is described.
Fig. 7 is the side view of the guide unit that the substrate transfer device according to exemplary embodiments is described.
Fig. 8 is the side view of the magnetic buanch unit that the substrate transfer device according to the 4th exemplary embodiments is described.
Fig. 9 is the side view of the magnetic buanch unit that the substrate transfer device according to the 5th exemplary embodiments is described.
Figure 10 and Figure 11 is the side view that the substrate transfer device according to the 6th exemplary embodiments is described.
Detailed description of the invention
Hereinafter, exemplary embodiments will be more fully described referring to accompanying drawing.But, the present invention can take a different form, and should not
It is considered limited to embodiments set forth herein.Specifically, these embodiments are provided so that the present invention will for thorough and
Complete, and scope of the invention will be fully passed on to those skilled in the art.
Fig. 1 is the front view of the substrate transfer device according to first exemplary embodiment, and Fig. 2 is to illustrate according to first exemplary
The side view of the substrate transfer device of embodiment.That is, from the point of view of the direction of self installation substrate, Fig. 1 is front view, and Fig. 2 is side
View.Also, Fig. 3 is the side view of the magnetic buanch unit that the substrate transfer device according to first exemplary embodiment is described, and
Fig. 4 is the schematic diagram of the magnetic transfer part that the substrate transfer device according to first exemplary embodiment is described.
Referring to Fig. 1 to Fig. 4, the substrate transfer device according to exemplary embodiments can comprise: pallet (100), and it shifts installation
Substrate on it；Magnetic buanch unit (200), it is placed in described pallet (100) lower section, magnetically makes described pallet
(100) suspend, and by the described pallet (100) of magnetic force transfer；And guide unit (300), it is placed in described pallet
(100) top is to guide the transfer of described pallet (100).
Pallet (100) is that the shape with hollow, rectangular framework provides, and substrate is mounted thereto.That is, pallet (100) is permissible
The shape manufacture of hollow, rectangular framework, so that four bars with predetermined length are located at upper side, lower side, left side and the right side
It on side, is spaced apart at a predetermined distance from each other, and the end of bar contacts with each other.Also, the multiple fixtures for removably clamping substrate can
It is located on pallet (100).Herein, the edge of substrate can be contacted four sides of pallet (100) by preset width, and substrate can
Fix by fixture.This pallet (100) is to be mounted thereon and in described pallet vertical ground or the state erect obliquely at substrate
Shift.That is, multiple chambers connect in one direction, and the mounted thereon pallet (100) having substrate moves through institute
While stating the inside of multiple chamber, substrate performs the predetermined processing procedure of such as thin film deposition process.Pallet (100) is moved
The plurality of chamber passing through can comprise: loading chamber, substrate is installed on pallet (100) wherein；And multiple deposition
Chamber, predetermined thin film deposition wherein is on the substrate being arranged on pallet (100)；And traversing (traverse) chamber,
Wherein elevated and pallet (100) the position of pallet (100) is moved.That is, substrate is installed on pallet (100) in loading chamber
On, then while pallet moves through the plurality of deposition chambers, multiple thin film depositions are on substrate, and then in traversing chamber
In room, the position of mobile pallet is so that pallet can move towards loading chamber.Herein, chamber, the plurality of deposition chambers are loaded
And traversing chamber can maintain vacuum state.Also, substrate can be for for manufacturing the flat-panel display device comprising liquid crystal display device
Various substrates, and can be made by including (for example) glass, plastic cement, film or similar material.In addition, contact buanch unit
(200) transfer substrate (110) of part may be provided in pallet (100) lower section.Transfer substrate (110) may be provided in pallet (100)
On the whole region of bottom.That is, transfer substrate (110) can have the length identical with the length of pallet (100) bottom, and
It is connectable to the bottom of pallet (100) to have predetermined thickness in a downward direction.This transfer substrate (110) can comprise to have
The first area (111) of the width identical with pallet (100) width, and be located at lower section, first area (111) and have and be less than
The second area (112) of the width (for example a, half width of pallet (100)) of pallet (100) width.Herein, magnetic
The part of buanch unit (200) can contact second area (112).Of course, it is possible to variously-shaped offer transfer substrate (110).
Magnetic buanch unit (200) magnetically makes pallet (100) suspend and transfer tray (100) maintains and pallet (100) simultaneously
Contactless state.This magnetic buanch unit (200) can comprise the magnetic suspension part (210) magnetically making pallet (100) suspend,
And magnetic transfer part (220), magnetic transfer part (220) are by the suction being applied to from magnetic suspension part (210)
Or repulsion and shift the pallet (100) magnetically being suspended by magnetic suspension part (210).
Magnetic suspension part (210) can comprise through providing to contact the first magnetic suspension part (211) of transfer substrate (110),
And through providing the second magnetic suspension part (212) to separate with the first magnetic suspension part (211).Herein, the second magnetic
Between the inwall of the plurality of chamber that floating parts (212) may be provided in pallet (100) and pallet (100) is transferred through.This
Place, the second magnetic suspension part (212) can be fixed to the inwall of the plurality of chamber that pallet (100) is transferred through, and solid
It is scheduled on the predetermined height away from cavity bottom part.That is, the pallet (100) it being provided with substrate transferred can pass through series connection even
The multiple chambers connecing, the first magnetic suspension part (211) may be coupled to the transfer substrate (110) in pallet (100) lower section
Two side surfaces of second area (112), and the second magnetic suspension part (212) may be provided between pallet (100) and chamber
With in the face of the first magnetic suspension part (211) the inwall or the lower surface that may be coupled to chamber.As illustrated in Figure 3, first
Magnetic suspension part (211) can comprise: be fixed to the second area (112) of transfer substrate (110) two side surfaces
One fixes component (211a), at least one first magnet being located in the presumptive area of the first side surface fixing component (211a)
, and at least one second magnet (211c) of being located in the presumptive area of the first lower surface fixing component (211a) (211b).
That is, each in first and second magnet (211b, 211c) may be provided as single magnet, or first and second magnet (211b,
In 211c) at least any one may be provided be two or be more than two magnets.For example, the first magnet (211b) can be through
It is provided as single magnet, and the second magnet (211c) may be provided and is two or is more than two magnets.First fixes component (211a)
Can have predetermined altitude and the substantially hexahedral shape of width provides, and can be along the second area (112) of transfer substrate (110)
There is the length identical with the length of second area (112) and there is the width identical with the cup depth of second area (112).
Therefore, the first magnetic suspension part (211) can be coplanar with transfer substrate (110).That is, component (211a) is fixed by first
And be positioned at the width that the first second area fixing between component (112) defines can be with the first area (111) of transfer substrate (110)
Width identical or identical with the width of pallet (100).Certainly, by second area (112) and in second area (112)
Side and the width that defines of the first magnetic suspension part (211) of opposite side can be more than or less than the width of transfer substrate (110)
Degree or the width of pallet (100).Also, first and second magnet (211b, 211c) may be provided fixes structure to be embedded in first
Part (211a) reaches desired depth.That is, first and second magnet (211b, 211c) may be provided in first and fixes component (211a)
At middle desired depth so that the surface of first and second magnet (211b, 211c) can be with the first surface fixing component (211a)
Coplanar.First fixes component (211a) can be by the metal such as not responded the magnetic force being produced by magnet, pottery, plastic cement
Or similar material is formed, and can be formed by (such as) tungsten.Second magnetic suspension part (212) may be provided with the first magnetic
Property floating parts (211) spaced a predetermined distance from and in the face of the first magnetic suspension part (211).That is, the second magnetic suspension part
(212) may be provided on the inwall side of chamber and separate with the first magnetic suspension part (211) so that its inner surface is in the face of first
Magnetic suspension part (211).This second magnetic suspension part (212) can comprise: with the first magnetic suspension part (211)
First to fix component (211a) spaced a predetermined distance from and in the face of its second fixes component (212a), and respectively in the face of the first magnetic
3rd magnet of first magnet (211b) of property floating parts (211) and the second magnet (211c) and the 4th magnet (212b,
212c).Herein, each in the 3rd and the 4th magnet (212b, 212c) may be provided as single magnet, or the 3rd and
At least one in four magnets (212b, 212c) may be provided as the number corresponding to first and second magnet (211b, 211c)
Two or be more than two magnets.For example, when providing first magnet (211b) and two or be more than two the second magnetic
During body (211c), it is possible to provide the 3rd magnet (212b) and two or be more than two the 4th magnets (212c).Also, second
Fixing component (212a) is connectable to the inwall of chamber or lower surface and is fixed to it, and may be provided so that side has
Shape and opposite side haveShape is to fix component (211a) spaced a predetermined distance from first with rectangular cross section.The
One magnet (211b) and the 3rd magnet (212b) can have polarity different from each other and suction can work betwixt.But,
Second magnet (211c) and the 4th magnet (212c) can have mutually the same polarity, and repulsion can work betwixt.Repulsion
Work between magnet (211c, 212c) second and the 4th, and therefore pallet (100) can be suspended.Also, suction is
Work between one and the 3rd magnet (211b, 212b), and therefore can prevent pallet (100) from upwardly or downwardly moving.That is,
Pallet (100) can magnetically be suspended by the second and the 4th repulsion between magnet (211c, 212c) and be moved up,
Described repulsion can be by the suction suppression worked between magnet (211b, 212b) first and the 3rd.It is similar to first to fix
Component (211a), second fix component (212a) can by the metal such as magnetic force being produced by magnet not responded, pottery,
Plastic cement or similar material are formed, and can be formed by (such as) tungsten.First magnetic suspension part (211) can be in pallet (100)
Length direction on (that is, on the shift direction of pallet (100)) be located on the whole region of transfer substrate (110), and
Second magnetic suspension part (212) may be provided on the whole region that pallet (100) moves through.That is, due to pallet (100)
By the inside of the plurality of chamber, therefore the second magnetic suspension part (212) may be provided in faced by the inwall of the plurality of chamber
On the region of the first magnetic suspension part (211).But, in first and second magnetic suspension part (the 211st, 212) at least
Any one can be provided that multiple, so that at least any one this in first and second magnetic suspension part (the 211st, 212) is many
Individual configure at a predetermined interval.For example, the second magnetic suspension part (212) can be located on whole region in the longitudinal direction,
And multiple first magnetic suspension part (211) can be provided so that the plurality of first magnetic suspension part (211) is with between predetermined
Every configuration.Also, first and second magnet (211b, 211c) of the first magnetic suspension part (211) and the second magnetic suspension
Partly the 3rd and the 4th magnet (212b, 212c) of (212) can be located on whole region in the longitudinal direction, and can be provided that
Multiple and separate at predetermined intervals.For example, the first magnet (211b) and the second magnet (211c) may be provided in whole region
On, and the 3rd and the 4th magnet (212b, 212c) can be provided at a predetermined interval.Also, be used for maintaining first and second magnetic
The gap in the gap between floating parts (the 211st, 212) maintains component (213) to may be provided in the first magnetic suspension part (211)
And between the second magnetic suspension part (212).That is, owing to suction is facing with each other first and the 3rd magnet (211b, 212b)
Between work, therefore gap between first and second magnetic suspension part (the 211st, 212) is reduced or first and the 3rd magnet
(211b, 212b) can be attached to each other.Component (213) can be maintained to maintain first and second magnetic suspension portion by providing gap
Divide the gap between (the 211st, 212).This gap maintains component (213) to may be provided in first and the 3rd magnet (211b, 212b)
On the region of lower section.That is, gap maintains component (213) to may be provided in the outer surface and second of the first magnetic suspension part (211)
Between the inner surface of magnetic suspension part (212).Also, gap maintains component (213) to may be provided in first and second magnetic suspension
Partly between (the 211st, 212) on whole region in the longitudinal direction, and multiple gap can be provided at a predetermined interval to maintain component
(213)。
Magnetic transfer part (220) can comprise: through providing with the bottom surface magnetic spaced apart by a predetermined distance with transfer substrate (110)
Rotating part (221), and it is located at transfer substrate (110) lower section with magnetic spaced apart by a predetermined distance with magnetic rotating part (221)
Property transfer part (222).Magnetic rotating part (221) may be provided and separates pre-spacing with the bottom surface with transfer substrate (110)
From.Herein, magnetic rotating part (221) can have a width identical with pallet (100) width, and can have more than or little
Width in pallet (100) width.Such as Fig. 3 and illustrated in fig. 4, this magnetic rotating part (221) can comprise rotary shaft
(221a) and multiple 5th magnets (221b) of being formed on the surface of rotary shaft (221a).Rotary shaft (221a) can have
The shape of circular bar simultaneously rotates up one or the other side by rotation motor (not shown).Also, the plurality of
Five magnets (221b) can the shape around axle be located on the surface of rotary shaft (221a) by a predetermined angle, and for example,
Can have screw thread form.That is, multiple described 5th magnet (221b) (institute in such as Fig. 4 can be provided rotary shaft (221a) is upper
Illustrate) with angularly (for example, 45 °) cincture axle.Herein, the plurality of 5th magnet (221b) may be provided so that S
Pole and N pole are alternately provided while angularly (for example, 45 °) are around rotary shaft.Magnetic transfer part (222) can
It is located at transfer substrate (110) lower section.That is, magnetic transfer part (222) may be provided between magnetic suspension part (210) turn
Move second area (112) lower section of substrate (110).In this magnetic transfer part (222), there is polarity different from each other
Magnet alternately disposes.I.e., as illustrated in Figure 4, magnetic transfer part (222) can comprise to be fixed to transfer substrate (110)
Second area (112) bottom surface the 3rd fix component (222a), and be located at the 3rd table fixing component (222a)
Multiple 6th magnets (222b) on face, wherein polarity is different from each other, i.e. S pole and N pole can be alternately provided to described
Multiple 6th magnets (222b).Herein, it is possible to provide multiple 6th magnets (222b) of magnetic transfer part (222) are to have
The angle (for example, 45 °) identical with the angle of the plurality of 5th magnet (221b) of magnetic rotating part (221).Therefore,
Due to the polarity of the rotation owing to magnetic rotating part (221) and the polarity of magnetic transfer part (222) is different from each other or phase
With, and suction or repulsion thereby works, therefore magnetic transfer part (222) are according to the rotation of magnetic rotating part (221)
Move in one direction.That is, the rotation of magnetic rotating part (221) is converted to the linear fortune of magnetic transfer part (222)
Dynamic to move the pallet (100) of magnetic suspension.
Guide unit (300) can comprise the first steering magnet (310) being coupled to the upper part of pallet (100), and is located at
On the upper wall of chamber with the first steering magnet (310) the second steering magnet spaced apart by a predetermined distance (320).Herein, first
And second steering magnet (the 310th, 320) can have identical polarity so that repulsion works betwixt, or can have each other not
Same polarity is so that suction works betwixt.Also, can variously-shaped first and second steering magnet of offer (the 310th, 320).
For example, can with rectilinear form facing with each other first and second steering magnet (the 310th, 320) is provided.Also, first guides
Magnet (310) can circular strip provide, and the second steering magnet (320) can have such as transversal with the bending of " ∩ " shape
Face is with self-aiming magnet (310) top cincture the first steering magnet (310).That is, the second steering magnet (320) may be provided
Simultaneously spaced a predetermined distance from the first steering magnet (310) with cincture the first steering magnet (310).Therefore, pallet (100)
Upper end through guiding so that pallet (100) does not falls while being transferred, this is because the second steering magnet (320)
In the first steering magnet (310) both sides, the first steering magnet (310) is pushed or pulled.
The wherein electromagnet of assembling iron core and coil, permanent magnet or electromagnet and the combination of permanent magnet can be used as exemplary enforcement
The magnet of example.
As described above, the substrate transfer device according to exemplary embodiments possess be placed in pallet (100) lower section and magnetically
Suspension and the magnet buanch unit (200) of transfer tray (100), and be placed on pallet (100) and guide pallet (100)
Guide unit (300).Also, magnet buanch unit (200) comprises the magnetic suspension portion magnetically making pallet (100) suspend
Divide (210), and magnetic rotation being converted into linear movement to shift the pallet (100) of magnetic suspension owing to magnetic force shifts
Partly (220).Therefore, the substrate transfer device according to exemplary embodiments magnetically makes by magnetic suspension part (210)
Pallet (100) suspends, and then magnetic rotating part (220) rotates in one direction to shift magnetic in one direction
The pallet (100) suspending.In this exemplary embodiments, due to not at pallet (100) and magnetic buanch unit (200)
Between produce friction, therefore do not produce particle.Therefore, do not produce the product defects owing to particle, and do not occur such as true
The fault of the part of empty pump.
Substrate transfer device according to exemplary embodiments can make pallet (100) suspend via in pallet (100) lower magnetic
And implement by the various methods using magnetic force transfer tray (100).That is, the structure in pallet (100) lower section can not
Changed with mode.This another illustrative example is explanation in Fig. 5 and Fig. 6.Fig. 5 is to illustrate according to second exemplary in fact
Execute the side view of the magnetic buanch unit of the substrate transfer device of example, and second exemplary will be described below by using this Fig. 5
Embodiment.
Referring to Fig. 5, the substrate transfer device according to second exemplary embodiment can comprise: pallet (100), and its transfer is arranged on
Substrate on it；Magnetic buanch unit (200), it is placed in pallet (100) lower section with by magnetic suspension transfer tray (100)；
And guide unit (300), it is placed on pallet (100) to guide the transfer of pallet (100).Herein, will not retouch
State or easily describe the configuration identical with first exemplary embodiment.
Transfer substrate (110) is located at pallet (100) lower section, and transfer substrate (110) can comprise to have and pallet (100)
It the first area (111) of the identical width of width, is placed in lower section, first area (111) and has less than first area (111)
The second area (112) of width, and it is located at second area (112) lower section with around the 3rd of magnetic rotating part (222)
Region (113).3rd region (113) can comprise from the extension that second area (112) downwardly extends, flatly be located at
Horizontal component (113a) below extension, and downwardly extend from the both sides of horizontal component (113a) vertical component (113b,
113c).Herein, horizontal component (113a) is through providing to have the width of the width more than magnetic rotating part (221) and hanging down
Straight part (113b, 113c) is through providing to have the height of the height more than magnetic rotating part (221).Therefore, horizontal part
Divide (113a) and the vertical component (113b, 113c) in horizontal component both sides through providing with around magnetic rotating part (221)
Upper part and side part.
This magnetic buanch unit (200) can comprise the magnetic suspension part (210) magnetically making pallet (100) suspend, and mat
Worked between magnetic buanch unit (200) and magnetic suspension part (210) by allowing suction or repulsion and shift by magnetic
The magnetic transfer part (220) of the pallet (100) of property floating parts (210) magnetic suspension.Magnetic suspension part (210)
The the first magnetic suspension part (211) that can comprise to be located on the second area (112) of transfer substrate (110), through provide with
It the second magnetic suspension part (212) that first magnetic suspension part (211) separates, is used for maintaining first and second magnetic suspension
Partly the gap in the gap between (the 211st, 212) maintains component (213), and supports the second magnetic suspension part (212)
Supporting member (214).First magnetic suspension part (211) can comprise: is fixed to the second area of transfer substrate (110)
(112) side surface and the first of lower surface is fixed component (211a), is located at the first side surface fixing component (211a)
At least one in presumptive area the first magnet (211b), and it is located at the pre-of the first lower surface fixing component (211a)
Determine the second magnet of at least one on region (211c).First fixes component (211a) may be provided to haveShape
A side and haveThe another side of shape.Herein, first fix component (211a) and may be provided with from transfer substrate
(110) first area (111) highlights.That is, fix component (211a) by first and fix between component first
The width that two regions (112) are defined can be more than the width of the first area (111) of transfer substrate (110) or pallet (100)
Width.Also, each in first and second magnet (211b, 211c) may be provided as single magnet, or first and
In two magnets (211b, 211c) at least any one can two or provide more than two magnets.For example, the first magnet
(211b) may be provided as single magnet, and the second magnet (211c) may be provided and is two or is more than two magnets.Second magnetic
Property floating parts (212) may be provided with spaced a predetermined distance from the first magnetic suspension part (211) with in the face of the first magnetic hang
Floating part (211).This second magnetic suspension part (212) can comprise first with the first magnetic suspension part (211) to be fixed
Component (211a) is spaced a predetermined distance from and fixes component (212a) towards its second, and respectively in the face of the first magnetic suspension portion
Divide first magnet (211b) of (211) and the 3rd and the 4th magnet (212b, 212c) of the second magnet (211c).Herein,
Each in 3rd and the 4th magnet (212b, 212c) can provide with single magnet, or the 3rd and the 4th magnet (212b,
At least one in 212c) can correspond to two of the number of first and second magnet (211b, 211c) or be more than two magnets
There is provided.For example, when providing first magnet (211b) and two or more than two the second magnet (211c),
One the 3rd magnet (212b) and two can be provided or be more than two the 4th magnets (212c).Also, second fixes component (212a)
May be provided to haveOne side of shape and havingThe another side of shape is to fix component with first
(211a) spaced a predetermined distance from.Supporting member (214) may be provided in the second magnetic suspension part (212) lower section to support the second magnetic
Property floating parts (212).That is, supporting member (214) may be provided in horizontal component and the chamber of the second magnetic suspension part (212)
To support the horizontal component of the second magnetic suspension part (212) between bottom room.Supporting member (214) supports the second magnetic and hangs
The horizontal component of floating part (212), and therefore the second magnetic suspension part (212) can be more stably supported.That is, second
The vertical component of magnetic suspension part (212) is to fix by the inwall of chamber and the level of the second magnetic suspension part (212)
Part is to support by supporting member (214), and therefore the second magnetic suspension part (212) can more stably be implemented.Turn
Move a part for substrate (110) and magnetic transfer part (220) may be provided in the inside of supporting member (214).That is, transfer base
3rd region (113) at the end (110) may be provided in the inside of supporting member (214), and magnetic transfer part (220) can set
Inside in the 3rd region (113).
Magnetic transfer part (220) can comprise magnetic rotating part (221) and separate pre-spacing with magnetic rotating part (221)
From magnetic transfer part (222).Magnetic rotating part (221) may be provided in horizontal component (113a) and vertical component (113b,
Inside 113c) is to be spaced from preset distance.Magnetic transfer part (222) may be provided in horizontal component (113a) and vertical
Partly at least one region of (113b, 113c).Being similar to exemplary embodiments, magnetic rotating part (221) comprises rotation
Rotating shaft (221a), and through providing with by a predetermined angle around multiple 5th magnets (221b) on the surface of rotary shaft (221a).
Magnetic transfer part (222) may be provided to vertical component (113b, 113c).That is, magnetic transfer part (222) can be through
There is provided to the both sides of magnetic rotating part (221).Certainly, magnetic transfer part (222) may be provided to horizontal component (113a),
And through providing to horizontal component (113a) and vertical component (113b, 113c) two.This magnetic transfer part (222) can
Possess predetermined fixing component, and S pole and N pole alternately set on the fixing element.Herein, magnetic transfer part (222) can
Through providing with the identical angle of the angle with the plurality of 5th magnet (221b) with magnetic rotating part (221) (for example
45°).Accordingly, because owing to the polarity of the polarity of rotation of magnetic rotating part (221) and magnetic transfer part (222)
Mutually the same, and suction thereby works, therefore magnetic transfer part (222) are according to the rotation of magnetic rotating part (221)
Move in one direction.That is, the rotation of magnetic rotating part (221) is converted to the linear fortune of magnetic transfer part (222)
Dynamic to move the pallet (100) of magnetic suspension.
Fig. 6 is the side view of the magnetic buanch unit that the substrate transfer device according to the 3rd exemplary embodiments is described.
Referring to Fig. 6, can comprise according to the substrate transfer device of the 3rd exemplary embodiments: pallet (100), its transfer is arranged on
Substrate on it；Magnetic buanch unit (200), it is placed in pallet (100) lower section with by magnetic suspension transfer tray (100)；
And guide unit (300), it is placed on pallet (100) to guide the transfer of pallet (100).Herein, the 3rd
In exemplary embodiments, the structure of the magnetic suspension part (210) of magnetic buanch unit (200) is different from use Fig. 5 and describes
The structure of second exemplary embodiment, and this will mainly utilize another exemplary embodiments to be described as follows.
The magnetic suspension part (210) of magnetic buanch unit (200) can comprise: the first magnetic suspension part (211), it sets
On the second area (112) of transfer substrate (110)；Second magnetic suspension part (212), its through provide with the first magnetic
Property floating parts (211) separates；Gap maintains component (213), and it is used for maintaining first and second magnetic suspension part (the 211st,
212) gap between；And supporting member (214), it supports the second magnetic suspension part (212).First magnetic suspension
Partly (211) can comprise: first fixes component (211a), and it is fixed to the second area (112) of transfer substrate (110)
Side surface and lower surface, and haveOne side of shape and havingThe another side of shape；At least one
First magnet (211b), it is located in the presumptive area of the first upper surface fixing component (211a)；And at least one
Two magnets (211c), it is located in the presumptive area of the first lower surface fixing component (211a).Although that is, the first magnet
(211b) it is located in first and second exemplary embodiments on the first side surface fixing component (211a), but implement the 3rd
In example, the first magnet (211b) may be provided on the first upper surface fixing component (211a).Herein, the first magnet (211b)
May be provided in the side table of the first area (111) with transfer substrate (110) simultaneously on the first upper surface fixing component (211a)
Face separates.Also, the second magnetic suspension part (212) may be provided to separate pre-spacing with the first magnetic suspension part (211)
From with in the face of the first magnetic suspension part (211).This second magnetic suspension part (212) can comprise and the first magnetic suspension portion
It is spaced a predetermined distance from and in the face of its second fixes component (212a), Yi Jifen that the first of point (211) fixes component (211a)
First magnet (211b) of the first magnetic suspension part (211) faced by not and the 3rd and the 4th magnet of the second magnet (211c)
(212b、212c).Herein, second fix component (212a) and can fix that component (211a) is spaced a predetermined distance from and face with first
To it, and may be provided a side to have " " shape and the another side with "U" shape so that in the face of first is solid
Determine the upper surface of component (211a).Second fixes component (212a) may be provided to have short upper side and long lower side,
And within its whole region, fix component (211a) with first be equally spaced.Herein, the first magnet (211b) and
Three magnets (212b) can have opposed polarity each other, and suction can thereby work.Second magnet (211c) and the 4th magnet
(212c) can have identical polar each other, and repulsion can thereby work.Also, the magnet that suction works in-between can enter one
Step is located at the first side surface fixing component (211a) and second and fixes on the side surface of component (212a).
Fig. 7 is the side view that the guide unit (300) according to exemplary embodiments is described.
Referring to Fig. 7, the guide unit (300) according to exemplary embodiments can comprise: the first plate (311), it is coupled to pallet
(100) top；First steering magnet (310), it is located on the first plate (311)；Second plate (321), it is fixed to
The upper wall of chamber；Second steering magnet (320), it is spaced a predetermined distance from the first steering magnet (310) and is located at the second plate
(321) on；Side plate (330), its side surface from the second plate (321) downwardly extends；3rd steering magnet (340), its
It is located on the side surface of the first plate (311)；4th steering magnet (350), it separates predetermined with the 3rd steering magnet (340)
Distance in the face of the 3rd steering magnet (340) and being located on side plate (330)；And second gap maintain component (360), its
It is located in the presumptive area of side plate (330) to maintain between side plate (330) and steering magnet (the 310th, the 320th, the 340th, 350)
Gap.Herein, the 3rd and the 4th steering magnet (the 340th, 350) may be provided in the second plate on the second steering magnet (320)
(321) and between the side plate (330) of the second plate, and may be provided in the first plate (311) with in the face of the side plate (330) of the first plate
Between and the second plate (321) and in the face of the second plate side plate (330) between two regions on.Also, first and second guides
Magnet (the 310th, 320) can have identical polar so that repulsion works betwixt, or can have polarity different from each other so that
Obtain suction to work betwixt.Also, the 3rd and the 4th steering magnet (the 340th, 350) can have identical polar so that repulsion exists
Work therebetween.Therefore, the upper end portion of pallet (100) can by first and second steering magnet (the 310th, 320) it
Between suction and the 3rd and the 4th steering magnet (the 340th, 350) between repulsion and shift and be directed to simultaneously and do not fall.That is,
Owing to repulsion is to be applied from side surface by the 3rd and the 4th steering magnet (the 340th, 350), therefore guide with using first and second
The situation of magnet (the 310th, 320) is compared, and the vertical position transfer of pallet (100) can be easier to perform.Also, due to further
There is provided the second gap to maintain component (360), therefore the shake width of pallet (100) can be maintained equably, and therefore pallet
(100) vertical position transfer can be easier to perform.
The transfer guide member of the transfer guiding pallet (100) can be located at pallet (100) lower section further.Transfer guide member can be through
There is provided with spaced a predetermined distance from pallet (100), wherein pallet (100) is arranged there between.Transfer guide member may be provided in pallet
(100) and between the inwall of chamber.That is, two transfer guide members may be provided with chamber side surface and pallet (100) it
Between spaced a predetermined distance from pallet (100).For example, at Fig. 3, Fig. 5, and in Fig. 6, transfer guide member may be provided in
The outside of magnetic suspension part (210).That is, transfer guide member may be provided in the second magnetic suspension of magnetic suspension part (210)
Partly between (212) and the inwall of chamber.When transfer guide member is located at the inwall of the second magnetic suspension part (212) and chamber
Between when, the second magnetic suspension part (212) can be fixed from the lower surface of chamber.Fig. 8 and Fig. 9 will be used below describe
Possesses the substrate transfer device of this transfer guide member.
Fig. 8 is the side view of the magnetic buanch unit that the substrate transfer device according to the 4th exemplary embodiments is described.
Referring to Fig. 8, can comprise according to the substrate transfer device of the 4th exemplary embodiments: pallet (100), its transfer is arranged on
Substrate on it；Magnetic buanch unit (200), it is placed in pallet (100) lower section with by magnetic suspension transfer tray (100)；
And guide unit (300), it is used for guiding pallet (100).Guide unit (300) may be provided on pallet (100)
And lower section.It described in Fig. 7 and the configuration of explanation may be provided on pallet (100), and is used for guiding the transfer of pallet (100)
Transfer guide member (370) may be provided in pallet (100) lower section.Herein, in the 4th exemplary embodiments, with first to
The identical configuration of configuration in three exemplary embodiments will be briefly described or will not be described.
Transfer substrate (110) is located at pallet (100) lower section, and transfer substrate (100) can comprise: first area (111),
It has the width identical with pallet (100) width；And elongated area (114), it is located at the side of first area (111)
On surface and around magnetic rotating part (221).That is, elongated area (114) may be provided with from first area (111)
Side surface downwardly extends.Herein, elongated area (114) may be provided to have the width more than magnetic rotating part (221)
Width, in order to spaced a predetermined distance from magnetic rotating part (221).Can have preset width and the plate shape of length provides
This elongated area (114).Also, gap maintains component (213) to may be provided in the internal presumptive area in elongated area (114).
That is, in the 3rd exemplary embodiments using Fig. 6 to describe, gap maintains component (213) to be located at first and second magnetic suspension
Partly to maintain between the first magnetic suspension part (211) and the second magnetic suspension part (212) between (the 211st, 212)
Gap.In the 4th exemplary embodiments, it is internal in extension that gap maintains component (213) to may be provided in elongated area (114)
Between region (114) and magnetic transfer part (220).Certainly, gap maintains component (213) to may be provided in magnetic transfer part
(220) on a region.That is, gap maintains component (213) to may be provided in elongated area (114) and magnetic transfer part (220)
Between, or through providing to be fixed to the presumptive area of magnetic transfer part (220).At least one the 7th magnet (115) can set
It at least one region of elongated area (114), is i.e. located on the perimeter of elongated area.
Magnetic buanch unit (200) can comprise the magnetic suspension part (210) of magnetic suspension pallet (100), and by permission
Suction or repulsion work between magnetic buanch unit (200) and magnetic suspension part (210) and shift by magnetic suspension portion
Divide the magnetic transfer part (220) of the pallet (100) of (210) magnetic suspension.Magnetic suspension part (210) can comprise through
There is provided to be fixed to the first magnetic suspension part (211) of the first area (111) of transfer substrate (110), and through providing
With the second magnetic suspension part (212) separating with the first magnetic suspension part (211).First magnetic suspension part (211)
Can comprise to be fixed to the first of the lower surface of the first area (111) of transfer substrate (110) and fix component (211a), and
At least one first magnet (211b) being located in the presumptive area of the first lower surface fixing component (211a).Its top portion
Divide the first of the low portion being fixed to first area (111) to fix component (211a) and its lower surface can be level.
Herein, it is possible to provide more than the first width fixing component (211a) of the width of first area (111).Owing to first fixes structure
Part (211a), through providing to have the width of the width more than first area (111), therefore contacts first and fixes component (211a)
The elongated area (114) of side surface may be provided to have the width more than first area 111 width.Also, at least one
One magnet 211b may be provided in first and fixes component (211a) lower section, for example, three magnets can be provided to maintain identical therebetween simultaneously
Every.Second magnetic suspension part (212) may be provided with spaced a predetermined distance from the first magnetic suspension part (211) with faced by
First magnetic suspension part (211).This second magnetic suspension part (212) can comprise and the first magnetic suspension part (211)
First to fix component (211a) spaced a predetermined distance from and in the face of its second fixes component (212a), and in the face of the first magnetic
At least one the 3rd magnet (212b) of at least one the first magnet (211b) of floating parts (211).Also, second fixes
Component (212a) may be provided with the identical shape of the shape that has with first fixes component (211a), in order to fixes structure with first
Part (211a) is spaced a predetermined distance from.For example, first and second fixing component (211a, 212a) can have rectangular cross section
Shape.Herein, the second of the second magnetic suspension part (212) is fixed component (212a) and can be fixed to magnetic transfer part (220)
A region.
Magnetic transfer part (220) can comprise magnetic rotating part (221) and magnetic rotating part (221) separates pre-spacing
From magnetic transfer part (222), and wherein accommodate magnetic rotating part (221) receiving component (223).Accommodate structure
Part (223) is at inner containment magnetic rotating part (221), and lower portion can be fixed to cavity bottom.Herein, accommodate
Component (223) may be provided to have hollow shape so that magnetic rotating part (221) can rotatably be contained in it
In.Again, it is possible to provide accommodate component (223) so that expose at least a portion of magnetic transfer part (222) to the open air at its side surface.
Also, the second magnetic suspension part (212) may be provided on the upper surface accommodating component (223).That is, the second magnetic suspension part
(212) second fixes the upper part that component (212a) can be fixed to accommodate component (223).Magnetic transfer part (222)
At least one magnet can be comprised, and may be provided on the elongated area (114) of magnetic rotating part (221).That is, extend
It is outside with to accommodate component (223) spaced a predetermined distance from that region (114) may be provided in receiving component (223), and comprises at least one
It is internal so that in the face of being contained in receiving component (223) that the magnetic transfer part (222) of individual magnet may be provided in elongated area (114)
In magnetic rotating part (221).
Transfer guide member (370) may be provided between magnetic buanch unit (200) and chamber.That is, guide unit (300) can be
Upper and the lower section of pallet (100) guides the transfer of pallet (100).Transfer guide member (370) may be provided under pallet (100)
Side to guide the transfer of magnetic buanch unit (200) from the side surface of magnetic buanch unit (200).This transfer guide member (370)
May be provided between magnetic buanch unit (200) and the inner surface of chamber, and can have preset width and height.Also, at least one
Magnet is located in the presumptive area in the inner side of transfer guide member (370).That is, transfer guide member (370) can be included in
The vertical panel (371) being located in short transverse between magnetic buanch unit (200) and chamber, and it is located at vertical panel (371)
Presumptive area at least one the 8th magnet (372).Vertical panel (371) may be provided and hangs to have the such as first magnetic
The height of floating part (211).That is, vertical panel (371) may be provided to have until the first area of transfer substrate (110)
And the first height fixing border surface between component (211a) of the first magnetic suspension part (211) (111).Also, extremely
Few 8th magnet (372) is through providing to vertical panel (371).8th magnet (372) may be provided with in the face of being located at extension
The 7th magnet (115) on region (114).Herein, the 7th magnet (115) of elongated area (114) and vertical panel (371)
The 8th magnet (372) can have polarity different from each other or identical polarity, and suction or repulsion can thereby work.Sinking
The transfer guide member (370) of long-pending chamber interior can be fixing, and can be at the transfer guide member (370) of traversing chamber interior
Side close to pallet (100) or away from pallet (100) moves up.Herein, the transfer guide member in traversing chamber interior can
Magnetic suspension is used contactlessly to move.That is, identical with the principle in the magnetic transfer part using Fig. 4 to describe principle can
It is applied to the transfer guide member (370) of traversing chamber.For example, possess rotary shaft (not shown) and the table being located at rotary shaft
The magnetic rotating part (not shown) of the multiple magnets (not shown) on face may be provided in vertical panel (371) lower section with vertical panel
(371) separate, and the magnet with polarity different from each other can be located at a predetermined interval on the lower surface of vertical panel (371) with magnetic
Property rotating part separates.Therefore, owing to vertical panel (371) lower section magnetic rotating part rotation polarity with in magnetic
The polarity of the magnetic transfer part on rotating part can be different from each other or mutually the same.Owing to suction or repulsion thereby work,
Therefore magnetic transfer part moves up according to one or the other side that is rotated in of magnetic rotating part.That is, magnetic rotating part
Rotation be converted to the linear movement of magnetic transfer part, and therefore move the vertical panel (371) of magnetic suspension.
Fig. 9 is the side view of the magnetic buanch unit that the substrate transfer device according to the 5th exemplary embodiments is described.
Referring to Fig. 9, can comprise according to the substrate transfer device of the 5th exemplary embodiments: pallet (100), its transfer is arranged on
Substrate on it；Magnetic buanch unit (200), it is placed in pallet (100) lower section with by magnetic suspension transfer tray (100)；
And guide unit (300), it is used for guiding pallet (100).Guide unit (300) may be provided in the upper of pallet (100)
And lower section.Described in Fig. 7 and explanation configuration may be provided on pallet (100), and guide pallet (100) transfer turn
Move guide member (370) and may be provided in pallet (100) lower section.Herein, in the 5th exemplary embodiments, gap maintains component (213)
Installation position be different from the installation position of the 4th exemplary embodiments using Fig. 8 to describe.That is, except gap maintains component (213)
It is located at beyond the difference between transfer guide member (370) and elongated area (114), according to the substrate of the 5th exemplary embodiments
Transfer device has and the identical configuration of substrate transfer device according to the 4th exemplary embodiments.Gap maintains component (213)
May be provided in the elongated area (114) between transfer guide member (370) and elongated area (114) and above or be located at transfer guide member (370)
Presumptive area on.For example, gap maintains component (213) to may be provided in the 7th magnet (115) of elongated area (114)
Lower section.Therefore, gap maintains component (213) to may be provided between magnetic buanch unit (200) and transfer guide member (370),
Even and if therefore still can be at transfer guide member (370) interior shifting magnetic buanch unit when magnetic buanch unit (200) shakes
(200).Certainly, gap maintains component (213) can not be only defined between transfer guide member (370) and elongated area (114),
And may be provided between elongated area (114) and magnetic transfer part (220).That is, at least two or more than two gaps dimension
Hold component (213) and may be provided at least two or more than on two regions.
At least a portion of transfer guide member (370) can be in one direction or on the other direction in opposite direction with one
Mobile.For example, it is fixing at the transfer guide member within deposition chambers, and at the transfer guide member of traversing chamber interior
Can be moveable.That is, when pallet (100) auto-deposition chamber shifts, be located at the transfer guide member of traversing chamber interior by
The transfer maintaining the first gap away from pallet (100) and guiding pallet (100), and when the transfer of pallet (100) completes and holds in the palm
Dish towards load chamber return when, the transfer guide member being located at traversing chamber interior moves towards the inwall of chamber and maintains away from pallet
(100) the second gap more than the first gap.Transfer guide member moves in traversing chamber interior, and therefore when pallet (100)
Position when moving the mobile nargin of pallet 100 can be increased.That is, pallet (100) can depart from the effect of magnetive attraction, and because of
This is possible to realize readily traversing (that is, change its course (lane change)).Figure 10 and Figure 11 will be used below and describe this turn
Move guide member (370) substrate transfer device movable within.
Referring to Figure 10 and Figure 11, can comprise according to the substrate transfer device of the 6th exemplary embodiments: pallet (100), its turn
Move substrate mounted thereto；Magnetic buanch unit (200), it is placed in pallet (100) lower section to turn by magnetic suspension
Move pallet (100)；And guide unit (300), it comprises to be placed in pallet (100) lower section to guide pallet (100)
The transfer guide member (370) of transfer.Transfer guide member (370) can move on a reciprocal direction and other direction
Dynamic, and can be on the direction close to pallet (100) and move up in the side away from pallet (100).This removable transfer is led
Draw part (370) and can at least be located at traversing chamber interior.
Transfer guide member (370) can comprise vertical panel (371a) and level board (371b), and vertical panel (371a) may be provided in
On level board (371b).That is, vertical panel can vertically be provided in an upward direction from the presumptive area of level board (371b)
(371a).Also, in vertical panel (371a), it is possible to provide at least one the 8th magnet (372) is so that in the face of being located at pallet (100)
Elongated area (114) on the 7th magnet (115).Level board (371b) may be provided in vertical panel (371a) lower section and can
Flatly provided.Herein, moveable part (395) may be provided in level board (371b) lower section.Moveable part (395)
May be provided so that at least a portion of lower region thereof is around guide rail (390), and can be along guide rail (390) in phase each other
One instead and another side move up.When moveable part (395) is mobile, the transfer guide member (370) being positioned above
Mobile.Support section (380) is located at guide rail (390) lower section.Support section (380) supporting guide (390) and at guide rail
On transfer guide member (370).Also, be used for driving the driver element (not shown) of moveable part (395) may be provided in
Support section (380) is internal.Driver element comprises cylinder, motor or similar, and as illustrated in Figure 10 close to pallet
(100) on a direction and moveable part is moved up another side away from pallet (100) as illustrated in Figure 11
(395).Herein, when auto-deposition chamber transfer tray (100), transfer guide member (371) is located adjacent to pallet (100)
First position.In the case of performing to change its course (that is, traversing so that pallet (100) returns) towards loading chamber, can move
Dynamic part (395) by drive unit drives so that transfer guide member (371) move up in the side away from pallet (100) with
It is positioned at second position.After transfer guide member (371) is mobile, pallet (100) is elevated, and then towards loading chamber
Room returns.Then, shift guide member (371) and be moved again to primary importance.
As described above, the technological thought of the present invention specifically described with regard to above-described embodiment, but it should be noted that previous embodiment
It is merely provided and do not limit the present invention for explanation.Various embodiment can be provided to allow to skilled artisan understands that the present invention's
Category, but the invention is not restricted to this.
Claims (15)
1. a substrate transfer device, comprising:
Pallet, substrate is arranged on described pallet；
Magnetic buanch unit, it is placed in below described pallet, and is configured to magnetically make described pallet suspend and by magnetic force
Shift described pallet；And
Guide unit, it is configured to guide the described transfer of described pallet and do not contact described pallet.
2. substrate transfer device according to claim 1, it farther includes transfer substrate, described transfer substrate comprise through
There is provided to contact the contact area of the lower side of described pallet, and the extension area downwardly extending from the both sides of described contact area
Territory.
3. substrate transfer device according to claim 2, wherein said magnetic buanch unit includes:
Magnetic suspension part, it is placed on a region of described transfer substrate magnetically to make described pallet suspend；And
Magnetic transfer part, it is placed in below described magnetic suspension part to shift the institute by magnetic levitation in one direction
State pallet.
4. substrate transfer device according to claim 3, wherein said magnetic suspension portion divides and includes:
First magnetic suspension part, it is configured to contact described transfer substrate, and includes at least one magnet；And
Second magnetic suspension part, itself and described first magnetic suspension spaced-apart, and comprise to be applied to from described first magnetic
At least at least one magnet of any one in the suction of property floating parts and repulsion.
5. substrate transfer device according to claim 4, wherein said magnetic transfer part includes:
Rotary shaft；
Magnetic rotating part, it comprises to be disposed to the multiple magnets around described rotary shaft；And
Magnetic transfer part, it separates with described magnetic rotating part, and comprises multiple magnet.
6. substrate transfer device according to claim 5, it farther includes to be configured to revolve in magnetic described in inner containment
The receiving part that transfer part is divided, the described second magnetic suspension part of upper part contact of wherein said receiving part.
7. substrate transfer device according to claim 6, the plurality of magnet of wherein said magnetic transfer part is located at institute
On at least one region of the described elongated area stating transfer substrate, one area surface is to described magnetic rotating part.
8. substrate transfer device according to claim 7, wherein
The plurality of magnet of described magnetic rotating part is provided such that the described magnet with polarity different from each other by alternately
Dispose so that at a predetermined angle around described rotary shaft, and
The plurality of magnet of described magnetic transfer part is provided such that the described magnet with polarity different from each other by alternately
Dispose to have the angle identical with the angle of described magnetic rotating part.
9. substrate transfer device according to claim 2, wherein said guide unit includes:
First steering magnet, it is coupled to the upper part of described pallet；And
Second steering magnet, it is located on the upper wall of chamber with spaced a predetermined distance from described first steering magnet,
Wherein said first steering magnet and described second steering magnet be applied in suction or repulsion at least any one.
10. substrate transfer device according to claim 9, wherein said guide unit farther includes to be located at described pallet
And the transfer guide member between the inwall of described chamber.
11. substrate transfer devices according to claim 10, wherein said transfer guide member is located at described elongated area and institute
State between the described inwall of chamber.
12. substrate transfer devices according to claim 11, its farther include to be located at described magnetic buanch unit with described
Gap at least one region between guide unit maintains component.
13. substrate transfer devices according to claim 12, wherein said gap maintain component be located at described elongated area with
Described magnetic suspension portion divide between region or described elongated area and described transfer guide member between region at least one
On.
14. substrate transfer devices according to claim 11, at least a portion of wherein said transfer guide member is close to institute
State on the direction of pallet and move up in the side away from described pallet.
15. substrate transfer devices according to claim 14, wherein
When described pallet is transferred, the described transfer guide member being located in traversing chamber is proximally located at first of described pallet
Put place, and
When described pallet is returned, described transfer guide member is located remotely from the second position of described pallet.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2014-0167325 | 2014-11-27 | ||
| KR1020140167325 | 2014-11-27 | ||
| KR1020150131585A KR20160063969A (en) | 2014-11-27 | 2015-09-17 | Apparatus for transferring substrate |
| KR10-2015-0131585 | 2015-09-17 | ||
| PCT/KR2015/012799 WO2016085277A1 (en) | 2014-11-27 | 2015-11-26 | Substrate transfer apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105993068A true CN105993068A (en) | 2016-10-05 |
| CN105993068B CN105993068B (en) | 2019-05-31 |
Family
ID=56193018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580003423.1A Active CN105993068B (en) | 2014-11-27 | 2015-11-26 | Substrate transfer device |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20160063969A (en) |
| CN (1) | CN105993068B (en) |
| TW (1) | TWI575643B (en) |
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| CN107783331A (en) * | 2017-10-20 | 2018-03-09 | 深圳市华星光电技术有限公司 | The method of device transfer device and its transferring device, device transfer blade |
| CN107808835A (en) * | 2017-10-20 | 2018-03-16 | 深圳市华星光电技术有限公司 | Magnetic conductive board and device transfer device |
| CN109019028A (en) * | 2018-09-10 | 2018-12-18 | 京东方科技集团股份有限公司 | Base plate transmission device |
| WO2019052248A1 (en) * | 2017-09-13 | 2019-03-21 | 京东方科技集团股份有限公司 | Substrate transfer apparatus |
| CN109983153A (en) * | 2017-10-27 | 2019-07-05 | 应用材料公司 | Equipment for non-contact transport of the carrier in depositing system, the system of the non-contact transport for carrier, for the carrier of the non-contact transport in depositing system and the method for the non-contact transport for carrier in depositing system |
| CN113098330A (en) * | 2021-05-21 | 2021-07-09 | 上海隐冠半导体技术有限公司 | Displacement device |
Families Citing this family (5)
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| KR102359244B1 (en) | 2016-11-21 | 2022-02-08 | 한국알박(주) | Film Deposition Method |
| KR102213655B1 (en) * | 2017-12-28 | 2021-02-08 | (주)가온솔루션 | Magnetic levitation transportation apparatus |
| KR101958411B1 (en) | 2018-08-28 | 2019-03-14 | 한국알박(주) | Film Deposition Apparatus and Method |
| CN218069804U (en) * | 2019-05-13 | 2022-12-16 | 应用材料公司 | Magnetic levitation system for transporting a carrier, base structure therefor and vacuum deposition system |
| KR102232179B1 (en) * | 2020-12-23 | 2021-03-26 | (주)가온솔루션 | Magnetic levitation transportation apparatus |
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| WO2019052248A1 (en) * | 2017-09-13 | 2019-03-21 | 京东方科技集团股份有限公司 | Substrate transfer apparatus |
| US11230436B2 (en) | 2017-09-13 | 2022-01-25 | Boe Technology Group Co., Ltd. | Substrate conveyance device |
| CN107783331A (en) * | 2017-10-20 | 2018-03-09 | 深圳市华星光电技术有限公司 | The method of device transfer device and its transferring device, device transfer blade |
| CN107808835A (en) * | 2017-10-20 | 2018-03-16 | 深圳市华星光电技术有限公司 | Magnetic conductive board and device transfer device |
| CN107808835B (en) * | 2017-10-20 | 2020-07-10 | 深圳市华星光电技术有限公司 | Magnetic conduction plate and device transfer device |
| CN109983153A (en) * | 2017-10-27 | 2019-07-05 | 应用材料公司 | Equipment for non-contact transport of the carrier in depositing system, the system of the non-contact transport for carrier, for the carrier of the non-contact transport in depositing system and the method for the non-contact transport for carrier in depositing system |
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| CN113098330A (en) * | 2021-05-21 | 2021-07-09 | 上海隐冠半导体技术有限公司 | Displacement device |
| CN113098330B (en) * | 2021-05-21 | 2022-06-07 | 上海隐冠半导体技术有限公司 | Displacement device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI575643B (en) | 2017-03-21 |
| CN105993068B (en) | 2019-05-31 |
| KR20160063969A (en) | 2016-06-07 |
| TW201631690A (en) | 2016-09-01 |
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