CN105882069A - 镀膜玻璃及其制备方法 - Google Patents
镀膜玻璃及其制备方法 Download PDFInfo
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- CN105882069A CN105882069A CN201510037126.0A CN201510037126A CN105882069A CN 105882069 A CN105882069 A CN 105882069A CN 201510037126 A CN201510037126 A CN 201510037126A CN 105882069 A CN105882069 A CN 105882069A
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- CN
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- Prior art keywords
- glass substrate
- layer
- film
- vacuum
- silicon dioxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000011521 glass Substances 0.000 title claims abstract description 189
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 117
- 230000003666 anti-fingerprint Effects 0.000 claims abstract description 50
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 132
- 239000000377 silicon dioxide Substances 0.000 claims description 59
- 235000012239 silicon dioxide Nutrition 0.000 claims description 50
- 238000000034 method Methods 0.000 claims description 33
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 30
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 claims description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 15
- 239000008367 deionised water Substances 0.000 claims description 15
- 229910021641 deionized water Inorganic materials 0.000 claims description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 15
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 15
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 12
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 12
- 238000001291 vacuum drying Methods 0.000 claims description 12
- 239000004411 aluminium Substances 0.000 claims description 11
- 238000009835 boiling Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000004062 sedimentation Methods 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 8
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 8
- 229910052774 Proactinium Inorganic materials 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 claims description 6
- 229910021529 ammonia Inorganic materials 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 6
- 238000005137 deposition process Methods 0.000 claims description 6
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 6
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 6
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims description 5
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- 239000006117 anti-reflective coating Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 229920002545 silicone oil Polymers 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 4
- 229910017083 AlN Inorganic materials 0.000 claims description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 3
- UBMXAAKAFOKSPA-UHFFFAOYSA-N [N].[O].[Si] Chemical compound [N].[O].[Si] UBMXAAKAFOKSPA-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 239000008246 gaseous mixture Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 229910021645 metal ion Inorganic materials 0.000 claims description 3
- -1 siloxanes Chemical class 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000001117 sulphuric acid Substances 0.000 claims description 3
- 235000011149 sulphuric acid Nutrition 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 235000014593 oils and fats Nutrition 0.000 claims description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- 229910003978 SiClx Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000003595 mist Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000004408 titanium dioxide Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 abstract 2
- 238000005299 abrasion Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 101
- 230000005540 biological transmission Effects 0.000 description 6
- 239000004926 polymethyl methacrylate Substances 0.000 description 4
- 238000011010 flushing procedure Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- VDGJOQCBCPGFFD-UHFFFAOYSA-N oxygen(2-) silicon(4+) titanium(4+) Chemical compound [Si+4].[O-2].[O-2].[Ti+4] VDGJOQCBCPGFFD-UHFFFAOYSA-N 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229920005479 Lucite® Polymers 0.000 description 1
- 208000031481 Pathologic Constriction Diseases 0.000 description 1
- 244000137852 Petrea volubilis Species 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 150000004702 methyl esters Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 210000001215 vagina Anatomy 0.000 description 1
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- Surface Treatment Of Glass (AREA)
Abstract
Description
Claims (15)
Priority Applications (1)
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CN201510037126.0A CN105882069B (zh) | 2015-01-26 | 2015-01-26 | 镀膜玻璃及其制备方法 |
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CN201510037126.0A CN105882069B (zh) | 2015-01-26 | 2015-01-26 | 镀膜玻璃及其制备方法 |
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CN105882069A true CN105882069A (zh) | 2016-08-24 |
CN105882069B CN105882069B (zh) | 2018-10-09 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106630674A (zh) * | 2016-10-09 | 2017-05-10 | 陕西科技大学 | 一种具有自洁功能、抗紫外线的隔音玻璃及其制备方法 |
CN107417133A (zh) * | 2016-12-30 | 2017-12-01 | 深圳市晟砡科技有限公司 | 一种面板 |
CN109890157A (zh) * | 2019-03-29 | 2019-06-14 | 联想(北京)有限公司 | 一种外壳及制作方法 |
CN110194598A (zh) * | 2019-05-30 | 2019-09-03 | 华为技术有限公司 | 玻璃面板及其制备方法、包含该玻璃面板的显示屏和终端 |
CN111592237A (zh) * | 2020-05-29 | 2020-08-28 | 深圳市信濠光电科技股份有限公司 | 一种抗菌玻璃盖板及其制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102898039A (zh) * | 2012-11-01 | 2013-01-30 | 沈阳仪表科学研究院 | 影院用易清洁镀膜窗口玻璃及其制作方法 |
CN104020517A (zh) * | 2014-05-21 | 2014-09-03 | 利达光电股份有限公司 | 一种超硬消反光防水防油薄膜 |
CN204488149U (zh) * | 2015-01-26 | 2015-07-22 | 南昌欧菲光学技术有限公司 | 镀膜玻璃 |
-
2015
- 2015-01-26 CN CN201510037126.0A patent/CN105882069B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102898039A (zh) * | 2012-11-01 | 2013-01-30 | 沈阳仪表科学研究院 | 影院用易清洁镀膜窗口玻璃及其制作方法 |
CN104020517A (zh) * | 2014-05-21 | 2014-09-03 | 利达光电股份有限公司 | 一种超硬消反光防水防油薄膜 |
CN204488149U (zh) * | 2015-01-26 | 2015-07-22 | 南昌欧菲光学技术有限公司 | 镀膜玻璃 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106630674A (zh) * | 2016-10-09 | 2017-05-10 | 陕西科技大学 | 一种具有自洁功能、抗紫外线的隔音玻璃及其制备方法 |
CN106630674B (zh) * | 2016-10-09 | 2019-05-24 | 陕西科技大学 | 一种具有自洁功能、抗紫外线的隔音玻璃及其制备方法 |
CN107417133A (zh) * | 2016-12-30 | 2017-12-01 | 深圳市晟砡科技有限公司 | 一种面板 |
CN109890157A (zh) * | 2019-03-29 | 2019-06-14 | 联想(北京)有限公司 | 一种外壳及制作方法 |
CN109890157B (zh) * | 2019-03-29 | 2021-10-22 | 联想(北京)有限公司 | 一种外壳及制作方法 |
CN110194598A (zh) * | 2019-05-30 | 2019-09-03 | 华为技术有限公司 | 玻璃面板及其制备方法、包含该玻璃面板的显示屏和终端 |
CN111592237A (zh) * | 2020-05-29 | 2020-08-28 | 深圳市信濠光电科技股份有限公司 | 一种抗菌玻璃盖板及其制备方法 |
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CN105882069B (zh) | 2018-10-09 |
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Address after: 330100 No. 18 Fuying Road, Changbei Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee after: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee after: Nanchang OFilm Tech. Co.,Ltd. Patentee after: Ophiguang Group Co.,Ltd. Patentee after: SUZHOU OFILM TECH Co.,Ltd. Address before: 330100 No. 18 Fuying Road, Changbei Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: OFilm Tech Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. Address after: 330100 No. 18 Fuying Road, Changbei Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee after: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee after: Nanchang OFilm Tech. Co.,Ltd. Patentee after: OFilm Tech Co.,Ltd. Patentee after: SUZHOU OFILM TECH Co.,Ltd. Address before: 330100 No. 18 Fuying Road, Changbei Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: Shenzhen OFilm Tech Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. |
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Effective date of registration: 20201231 Address after: 231323 Building 1, precision electronics industrial park, Hangbu Town, Shucheng County, Lu'an City, Anhui Province Patentee after: Anhui jingzhuo optical display technology Co.,Ltd. Address before: 330100 No. 18 Fuying Road, Changbei Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: Ophiguang Group Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. |
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