CN105788760A - Method of manufacturing transparent conductive electrode - Google Patents
Method of manufacturing transparent conductive electrode Download PDFInfo
- Publication number
- CN105788760A CN105788760A CN201610257256.XA CN201610257256A CN105788760A CN 105788760 A CN105788760 A CN 105788760A CN 201610257256 A CN201610257256 A CN 201610257256A CN 105788760 A CN105788760 A CN 105788760A
- Authority
- CN
- China
- Prior art keywords
- conductive material
- transparent conductive
- template body
- gas
- conversion zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 4
- 238000006243 chemical reaction Methods 0.000 claims abstract description 126
- 239000004020 conductor Substances 0.000 claims abstract description 117
- 239000007789 gas Substances 0.000 claims abstract description 85
- 238000000034 method Methods 0.000 claims abstract description 25
- 239000012495 reaction gas Substances 0.000 claims abstract description 16
- 230000001681 protective effect Effects 0.000 claims description 48
- 238000007789 sealing Methods 0.000 claims description 43
- 238000010521 absorption reaction Methods 0.000 claims description 41
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000002184 metal Substances 0.000 claims description 39
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 18
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 17
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 11
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 10
- 230000008676 import Effects 0.000 claims description 10
- 229910052709 silver Inorganic materials 0.000 claims description 10
- 239000004332 silver Substances 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 238000005516 engineering process Methods 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000002070 nanowire Substances 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 238000009713 electroplating Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 238000005275 alloying Methods 0.000 claims description 6
- 229910017052 cobalt Inorganic materials 0.000 claims description 6
- 239000010941 cobalt Substances 0.000 claims description 6
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 150000002739 metals Chemical class 0.000 claims description 6
- 229910052756 noble gas Inorganic materials 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 238000001338 self-assembly Methods 0.000 claims description 5
- 238000004528 spin coating Methods 0.000 claims description 5
- -1 steam Chemical compound 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 4
- 230000005587 bubbling Effects 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000002041 carbon nanotube Substances 0.000 claims description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 150000001412 amines Chemical class 0.000 claims description 3
- 229910021529 ammonia Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- 229920002521 macromolecule Polymers 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 229910017604 nitric acid Inorganic materials 0.000 claims description 3
- 150000007524 organic acids Chemical class 0.000 claims description 3
- 238000005530 etching Methods 0.000 abstract description 7
- 230000003287 optical effect Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 239000012811 non-conductive material Substances 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 24
- 238000002360 preparation method Methods 0.000 description 11
- 230000003247 decreasing effect Effects 0.000 description 7
- 238000002156 mixing Methods 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000001913 cellulose Substances 0.000 description 3
- 229920002678 cellulose Polymers 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000002322 conducting polymer Substances 0.000 description 3
- 229920001940 conductive polymer Polymers 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000012634 fragment Substances 0.000 description 3
- 229910021389 graphene Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002159 nanocrystal Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- GKWLILHTTGWKLQ-UHFFFAOYSA-N 2,3-dihydrothieno[3,4-b][1,4]dioxine Chemical compound O1CCOC2=CSC=C21 GKWLILHTTGWKLQ-UHFFFAOYSA-N 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229960002796 polystyrene sulfonate Drugs 0.000 description 1
- 239000011970 polystyrene sulfonate Substances 0.000 description 1
- GGHDAUPFEBTORZ-UHFFFAOYSA-N propane-1,1-diamine Chemical compound CCC(N)N GGHDAUPFEBTORZ-UHFFFAOYSA-N 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
The invention discloses a method of manufacturing a transparent conductive electrode. The method comprises steps: 1) a transparent conductive material is prepared; 2) a reaction area is formed, and the reaction area is formed on a conductive layer of the transparent conductive material; 3) a reaction gas is guided for reaction, and the reaction gas is guided to the reaction area to enable the conductive layer in the reaction area and the reaction gas to react; and 4) the transparent conductive electrode is acquired, after the reaction is over, a protection gas is guided to the reaction area to remove the remaining reaction gas in the reaction area, and the transparent conductive electrode is obtained. Through reaction between the reaction gas and the conductive layer, part of the conductive material of the conductive layer is changed into a non-conductive material, a patterned electrode is thus obtained, differences between optical performance in the conductive area and optical performance in the non-conductive area are extremely low, total vanishing etching is realized, effects are significant in actual applications, the manufacturing process is simple, and the manufacturing cost is low.
Description
Technical field
The present invention relates to transparency conductive electrode field, more particularly, it relates to a kind of method preparing transparency conductive electrode.
Background technology
At present, the material of transparency electrode mainly includes transparent conductive oxide film, CNT, Graphene, conducting polymer, metal grill, metal nanometer line etc..Ito transparent electrode has occupied the most market share by its high grade of transparency and high conductivity.But ITO electrode needs the method using vacuum vapor deposition to prepare, and contains rare element indium, thus relatively costly, and ITO enbrittles, it is impossible to use in flexible device.Thus people begin look for other transparent electrode materials, metal nanometer line is due to its relatively low cost, higher performance, gain great popularity to the adaptability of flexible device.Although thicker metal film is opaque, if but carried out waffle-like pattern and make metal grill, then can want, with metal nanometer line, the transparency conductive electrode that matches in excellence or beauty by becoming.And conductive metal material coordinates Graphene, CNT, conducting polymer, metal oxide semiconductor material can obtain the better suitability.
In the practical application in the fields such as liquid crystal display, OLED (organic electroluminescent), touch screen, solaode, it is often necessary to the transparency conductive electrode of patterning completes various function.For existing transparent conductive material, prior art has multiple patterns method, the method such as including laser ablation, the chemical etching method of gold-tinted technique, the chemical etching of silk-screen etching paste, ink jet printing etching solution.But existing method all can cause that etching region and non-etched district exist bigger optical property difference, and have and environment has bigger pollution, and preparation flow is complicated, the shortcoming that preparation cost is higher.
Summary of the invention
In order to overcome the deficiencies in the prior art, it is an object of the invention to provide a kind of method preparing transparency conductive electrode, the present invention is reacted with conductive layer by reacting gas, make Conductive layer portions conductive material be converted into electrically non-conductive material, thus obtain patterning electrode, and conductive region and non-conducting areas poor optical properties heteropole low, realize the shadow etching that disappears completely, effect is notable in actual applications, and preparation flow is simple, and preparation cost is low.
For solving the problems referred to above, the technical solution adopted in the present invention is as follows:
A kind of method preparing transparency conductive electrode, including:
1) transparent conductive material is prepared；
2) conversion zone is formed: on the conductive layer of transparent conductive material, form conversion zone；
3) import reacting gas to react: import reacting gas to conversion zone, make the conductive layer in conversion zone react with reacting gas；
4) obtain transparency conductive electrode: after reaction terminates, pass into protective gas to conversion zone and remove the residual reaction gas in conversion zone, obtain transparency conductive electrode.
Preferably, described transparent base is glass, macromolecule transparent membrane or macromolecular sheet material.
Preferably, described conductive layer is one or more in 1-dimention nano conductive material, two-dimensional nano conductive material, metal grill transparent conductive material, electrically conducting transparent macromolecular material and burning system transparent conductive material.
Preferably, described 1-dimention nano conductive material is metal nanometer line transparent conductive material, carbon nano tube transparent conductive material, nano metal band transparent conductive material or nano metal rod transparent conductive material.
Preferably, in described metal nanometer line transparent conductive material, metal nanometer line is any one elemental metals nano wire or several alloying metal nano wire in silver, nickel, copper, palladium, platinum, gold, cobalt and ferrum；In described metal grill transparent conductive material, metal grill is any one elemental metals grid or several alloying metal grid in silver, nickel, copper, aluminum, palladium, platinum, gold, cobalt and ferrum.
Preferably, described two-dimensional nano conductive material is nanometer metallic film transparent conductive material or carbon system transparent conductive material.
Preferably, described reacting gas is one or more in ozone, steam, hydrogen peroxide, organic amine, ammonia, halogen gas and compound, carbon dioxide, organic acid, nitric acid, hydrochloric acid, sulfur vapor and sulfide steam.
Preferably, described protective gas be in nitrogen, air and noble gas one or more.
Further,
Described step 2) 3) 4) adopt transparency conductive electrode processing unit (plant) to carry out, described transparency conductive electrode processing unit (plant) includes template body, absorption platform and for template body being pressed on the compressing member on absorption platform, described template body is plate, template body is arranged on absorption platform, template body is provided with sealing ring, contact and passage, described sealing ring and contact are fixed on the template body side near transparent conductive material, described contact is positioned at sealing ring, noncontact chamber is formed between described sealing ring and contact, described passage is arranged on template body noncontact chamber place, passage is two or more；
Described step 1) particularly as follows: form conductive layer over the transparent substrate by spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or electroplating technology；
Described step 2) particularly as follows: transparent conductive material is placed on absorption platform, sealing ring and contact on template body support on the conductive layer of transparent conductive material and compress, and noncontact chamber forms conversion zone on transparent conductive material；
Described step 3) particularly as follows: import reacting gas by the passage on template body to conversion zone, the conductive layer in conversion zone and reacting gas react；
Described step 4) particularly as follows: pass into protective gas by the passage on template body to conversion zone to remove the residual reaction gas in conversion zone, remove template body, obtain transparency conductive electrode.
Further,
Described step 2) 3) 4) adopt transparency conductive electrode processing unit (plant) to carry out, described transparency conductive electrode processing unit (plant) includes template body, absorption platform, for template body being pressed on compressing member on absorption platform and flexible protective film, described template body is plate, template body is arranged on absorption platform, template body is provided with sealing ring, contact and passage, described sealing ring and contact are fixed on the template body side near transparent conductive material, described contact and transparent conductive material contact position indent have pressure chamber, described contact is positioned at sealing ring, noncontact chamber is formed between described sealing ring and contact, described passage is arranged on template body noncontact chamber place, described passage is two or more；The noncontact chamber place of described absorption platform corresponding templates body is provided with gas port, and described flexible protective film is arranged between absorption platform and template body；
Described step 1) particularly as follows: form conductive layer over the transparent substrate by spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or electroplating technology, and open hole at transparent conductive material correspondence absorption platform gas port place；
Described step 2) particularly as follows: transparent conductive material is placed on absorption platform; transparent conductive material covers flexible protective film; sealing ring and contact on template body support on flexible protective film and compress, and flexible protective film and transparent conductive material form conversion zone at noncontact chamber place；
Described step 3) particularly as follows: import reacting gas by gas port to conversion zone, make the flexible protective film bubbling in conversion zone form reaction compartment, the conductive layer in reaction compartment and reacting gas react；
Described step 4) particularly as follows: pass into protective gas by gas port to reaction compartment to remove the residual reaction gas in reaction compartment, remove template body and flexible protective film, obtain transparency conductive electrode.
Compared to existing technology, the beneficial effects of the present invention is: the present invention is reacted with conductive layer by reacting gas, Conductive layer portions conductive material is made to be converted into electrically non-conductive material, thus obtaining the electrode of patterning, and conductive region and non-conducting areas poor optical properties heteropole are low, realizing the shadow etching that disappears completely, effect is notable in actual applications.
Accompanying drawing explanation
Fig. 1 is the flow chart that the present invention prepares the method for transparency conductive electrode；
Fig. 2 is that in embodiment 1, transparency conductive electrode processing unit (plant) uses state diagram；
Fig. 3 is transparency conductive electrode processing unit (plant) structural representation in the present invention；
Fig. 4 is A-A profile in Fig. 3；
Fig. 5 is that in embodiment 2, transparency conductive electrode processing unit (plant) uses state diagram；
Fig. 6 is that in embodiment 3, transparency conductive electrode processing unit (plant) uses state diagram；
Fig. 7 is that in embodiment 4, transparency conductive electrode processing unit (plant) uses state diagram；
Wherein, 1 be template body, 11 be sealing ring, 12 be contact, 121 be pressure chamber, 13 be passage, 2 be absorption platform, 21 be gas port, 3 be compressing member, 4 be flexible protective film, 5 for transparent conductive material.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
As it is shown in figure 1, the method preparing transparency conductive electrode in the present invention, including step:
1) transparent conductive material is prepared；
2) conversion zone is formed: on the conductive layer of transparent conductive material, form conversion zone；
3) import reacting gas to react: import reacting gas to conversion zone, make the conductive layer in conversion zone react with reacting gas；
4) obtain transparency conductive electrode: after reaction terminates, pass into protective gas to conversion zone and remove the residual reaction gas in conversion zone, obtain transparency conductive electrode.
The present invention is prepared the method for transparency conductive electrode depend on transparency conductive electrode processing unit (plant) and be achieved, first below the embodiment of transparency conductive electrode processing unit (plant) structure is described.
Embodiment 1
As in Figure 2-4, transparency conductive electrode processing unit (plant) includes template body 1, absorption platform 2 and for template body 1 being pressed on the compressing member 3 on absorption platform 2, template body 1 is plate, template body 1 is arranged on absorption platform 2, template body 1 is provided with sealing ring 11, contact 12 and passage 13, sealing ring 11 and contact 12 are fixed on the template body 1 side near transparent conductive material, contact 12 is positioned at sealing ring 11, noncontact chamber is formed between sealing ring 11 and contact 12, passage 13 is arranged on template body 1 noncontact chamber place, passage 13 is two or more.
During use; transparent conductive material 5 is adsorbed on absorption platform 2; template body 1 is fully contacted with transparent conductive material 5 under compressing member 3 acts on; sealing ring 11 and contact 12 fully support on transparent conductive material 5; noncontact chamber forms conversion zone on transparent conductive material 5 surface; reacting gas is imported to conversion zone by passage 13; reacting gas and conductive layer react after terminating; protective gas is passed into conversion zone again by passage 13; remove the residual reaction gas in conversion zone; remove template body 1, obtain transparency conductive electrode.
Absorption platform 2 can realize the fully fixing of transparent conductive material 5; compressing member 3 acts on template body 1; realize the template body 1 compression on transparent conductive material 5; guarantee template body 1 is fully contacted with transparent conductive material 5; noncontact chamber forms conversion zone on transparent conductive material 5 surface; offer space is reacted, it is ensured that reaction effectively protects the territory, non-reaction zone of conductive layer while being normally carried out for reacting gas and conductive layer.
Embodiment 2
As shown in Figure 5, transparency conductive electrode processing unit (plant) includes template body 1, absorption platform 2 and for template body 1 being pressed on the compressing member 3 on absorption platform 2, template body 1 is plate, template body 1 is arranged on absorption platform 2, template body 1 is provided with sealing ring 11, contact 12 and passage 13, sealing ring 11 and contact 12 are fixed on the template body 1 side near transparent conductive material, contact 12 and transparent conductive material 5 contact position indent have pressure chamber 121, contact 12 is positioned at sealing ring 11, noncontact chamber is formed between sealing ring 11 and contact 12, passage 13 is arranged on template body 1 noncontact chamber place, passage 13 is two or more.
During use; transparent conductive material 5 is adsorbed on absorption platform 2; template body 1 is fully contacted with transparent conductive material 5 under compressing member 3 acts on; sealing ring 11 and contact 12 fully support on transparent conductive material 5; noncontact chamber forms conversion zone on transparent conductive material 5 surface; reacting gas is imported to conversion zone by passage 13; reacting gas and conductive layer react after terminating; protective gas is passed into conversion zone again by passage 13; remove the residual reaction gas in conversion zone; remove template body 1, obtain transparency conductive electrode.
Absorption platform 2 can realize the fully fixing of transparent conductive material 5, compressing member 3 acts on template body 1, realize the template body 1 compression on transparent conductive material 5, guarantee template body 1 is fully contacted with transparent conductive material 5, noncontact chamber forms conversion zone on transparent conductive material 5 surface, offer space is reacted, it is ensured that reaction is normally carried out for reacting gas and conductive layer；Pressure chamber 121 can ensure that constant pressure in the territory, non-reaction zone of conductive layer, thus the territory, non-reaction zone effectively protecting conductive layer is not affected by reacting gas.
Embodiment 3
As shown in Figure 6, transparency conductive electrode processing unit (plant) includes template body 1, absorption platform 2, for template body 1 being pressed on compressing member 3 on absorption platform 2 and flexible protective film 4, template body 1 is plate, template body 1 is arranged on absorption platform 2, template body 1 is provided with sealing ring 11, contact 12 and passage 13, sealing ring 11 and contact 12 are fixed on the template body 1 side near transparent conductive material, contact 12 and transparent conductive material 5 contact position indent have pressure chamber 121, contact 12 is positioned at sealing ring 11, noncontact chamber is formed between sealing ring 11 and contact 12, passage 13 is arranged on template body 1 noncontact chamber place, passage 13 is two or more；The noncontact chamber place of absorption platform 2 corresponding templates body 1 is provided with gas port 21, and flexible protective film 4 is arranged between absorption platform 2 and template body 1.
During use; transparent conductive material 5 is adsorbed on absorption platform 2; flexible protective film 4 covers on transparent conductive material 5; template body 1 is fully contacted with flexible protective film 4 under compressing member 3 acts on; sealing ring 11 and contact 12 fully support on flexible protective film 4; flexible protective film 4 and transparent conductive material 5 form conversion zone at noncontact chamber place; reacting gas is imported to conversion zone by gas port 21; making flexible protective film 4 bubbling in conversion zone form reaction compartment, the conductive layer in reaction compartment and reacting gas react；After reaction terminates, pass into protective gas by gas port 21 to reaction compartment and remove the residual reaction gas in reaction compartment, remove template body 1 and flexible protective film 4, obtain transparency conductive electrode.
Absorption platform 2 can realize the fully fixing of transparent conductive material 5; compressing member 3 acts on template body 1; realize the template body 1 compression on flexible protective film 4; guarantee template body 1 is fully contacted with flexible protective film 4; flexible protective film 4 and transparent conductive material 5 form conversion zone at noncontact chamber place; after ventilation, react offer space for reacting gas and conductive layer in bubbling, it is ensured that reaction is normally carried out；Sealing ring 11 and contact 12 support at flexible protective film 4 place owing to compression cannot be introduced into reacting gas, thus effectively protecting the electric conductivity in the territory, non-reaction zone of conductive layer.
Embodiment 4
As shown in Figure 7, in the present invention, transparency conductive electrode processing unit (plant) includes template body 1, template body 1 is roll shape, template body 1 is provided with sealing ring 11, contact 12 and passage 13, sealing ring 11 and contact 12 are fixed on the template body 1 side near transparent conductive material, and contact 12 is positioned at sealing ring 11, form noncontact chamber between sealing ring 11 and contact 12, passage 13 is arranged on template body 1 noncontact chamber place, and passage 13 is two or more.
During use; pass through external force traction; template body 1 can be fully contacted with transparent conductive material 5, and sealing ring 11 and contact 12 fully support on transparent conductive material 5, and noncontact chamber forms conversion zone on transparent conductive material 5 surface; reacting gas is imported to conversion zone by passage 13; reacting gas and conductive layer react after terminating, and pass into protective gas to conversion zone again by passage 13, remove the residual reaction gas in conversion zone; remove template body 1, obtain transparency conductive electrode.
Conversion zone reacts offer space for reacting gas and conductive layer, it is ensured that while reaction is normally carried out, sealing ring 11 and contact 12 fully support on transparent conductive material 5, effectively protect the electric conductivity in territory, conductive layer non-reaction zone.
In above-mentioned embodiment 1-3, absorption platform 2 is internal can be provided with heating module, it is achieved effective control of temperature during reaction.
In above-mentioned embodiment 4, template body 1 is internal can be provided with heating module, or arranges assisted heating device at conductive material back side place, it is achieved effective control of temperature during reaction.
In conjunction with specific embodiments the method preparing transparency conductive electrode in the present invention is described further by above-mentioned embodiment below.
Embodiment 1
Embodiment 1 is adopted to carry out the preparation of transparency conductive electrode:
Wherein, transparent conductive material 5 obtains in the following manner: in the substrate of glass of cleaning, and the mixed aqueous solution of silk rod blade coating nano-silver thread, modified cellulose and surfactant makes conductive layer nano-silver thread thin film after drying, its sheet resistance is 50ohm/sq；In conversion zone, during reaction, temperature is 50 DEG C, and reacting gas is ozone and steam；After reaction terminates, the protective gas of employing is nitrogen.In the transparency conductive electrode obtained, being exposed to the silver wire in conversion zone, owing to nano wire the portion fractures mixed with ozone reaction formation oxygen becomes short-term, electrical conductivity is decreased obviously, and is in non-conductive state.
Embodiment 2
Embodiment 1 is adopted to carry out the preparation of transparency conductive electrode:
1) wherein, transparent conductive material 5 obtains in the following manner: on PET (polyethylene terephthalate), the mixed solution of silk rod blade coating nano-silver thread, modified cellulose and surfactant, making conductive layer after drying is nano-silver thread thin film, and its sheet resistance is 55ohm/sq；In conversion zone, during reaction, temperature is 30 DEG C, and reacting gas is the mixing gas of propane diamine, water vapour and air；After reaction terminates, the protective gas of employing is air.In the transparency conductive electrode obtained, being exposed to the silver wire in conversion zone, owing to reactive moieties fragments into short-term, electrical conductivity is decreased obviously, and is in non-conductive state.
Embodiment 3
Embodiment 2 is adopted to carry out the preparation of transparency conductive electrode:
Wherein, transparent conductive material 5 obtains in the following manner: the mixed solution of silk rod blade coating NANO CRYSTAL COPPER WIRE, modified cellulose and surfactant on glass, makes conductive layer NANO CRYSTAL COPPER WIRE thin film after drying, and its sheet resistance is 60ohm/sq；In conversion zone, during reaction, temperature is 100 DEG C, and reacting gas is the mixing gas of ozone and water vapour；After reaction terminates, the protective gas of employing is noble gas.In the transparency conductive electrode obtained, being exposed to the copper cash in conversion zone, the nano wire the portion fractures that mix due to reaction formation oxygen become short-term, and electrical conductivity is decreased obviously, and is in non-conductive state.
Embodiment 4
Embodiment 2 is adopted to carry out the preparation of transparency conductive electrode:
Wherein, transparent conductive material 5 obtains in the following manner: by spraying silver nano-grain conductive ink mode prepared silver grid transparent conductive material on heat polycarbonates sheet material, its sheet resistance is 60ohm/sq；In conversion zone, during reaction, temperature is 100 DEG C, and reacting gas is the mixing gas of ozone and water vapour；After reaction terminates, the protective gas of employing is noble gas.In the transparency conductive electrode obtained, being exposed to the silver-colored grid in conversion zone, owing to reaction rear section generates the sulfide of silver, electrical conductivity is decreased obviously, and is in non-conductive state.
Embodiment 5
Embodiment 3 is adopted to carry out the preparation of transparency conductive electrode:
Wherein, transparent conductive material 5 obtains in the following manner: preparing carbon nano tube transparent conductive material by mode of printing on glass, its sheet resistance is 40ohm/sq；In conversion zone, during reaction, temperature is 60 DEG C, and reacting gas is the mixing gas of ozone and water vapour；After reaction terminates, the protective gas of employing is air.In the transparency conductive electrode obtained, being exposed to the carbon nanometer in conversion zone, owing to reaction rear section fragments into short-term, electrical conductivity is decreased obviously, and is in non-conductive state.
Embodiment 6
Embodiment 3 is adopted to carry out the preparation of transparency conductive electrode:
Wherein, transparent conductive material 5 obtains in the following manner: preparing nickel screen lattice transparent conductive material by electroplating technology on glass, its sheet resistance is 45ohm/sq；In conversion zone, during reaction, temperature is 150 DEG C, and reacting gas is the mixing gas of steam and ozone；After reaction terminates, the protective gas of employing is noble gas.In the transparency conductive electrode obtained, being exposed to the nickel screen lattice in conversion zone, owing to generating the oxide of nickel after reaction, electrical conductivity is decreased obviously, and is in non-conductive state.
Embodiment 7
Embodiment 4 is adopted to carry out the preparation of transparency conductive electrode:
Wherein, transparent conductive material 5 obtains in the following manner: preparing silver grid transparent conductive material by electroplating technology on PET (polyethylene terephthalate), its sheet resistance is 40ohm/sq；In conversion zone, during reaction, temperature is 50 DEG C, and reacting gas is the gaseous mixture of ozone and steam；After reaction terminates, the protective gas of employing is air.In the transparency conductive electrode obtained, being exposed to the silver-colored grid in conversion zone, owing to reaction rear section aoxidizes and fragments into short-term, electrical conductivity is decreased obviously, and is in non-conductive state.
nullIn above-described embodiment，Pass through spin coating、Spraying、Printing、Self assembly、Vapour deposition、Liquid deposition or electroplating technology are at glass、Macromolecule transparent membrane (such as PET film) or macromolecular sheet material are (such as PMMA sheet material，PC sheet material，PET sheet) on form conductive layer，Conductive layer can select 1-dimention nano conductive material such as metal nanometer line transparent conductive material、Carbon nano tube transparent conductive material、Nano metal band transparent conductive material、Nano metal rod transparent conductive material etc.，Two-dimensional nano conductive material such as nanometer metallic film transparent conductive material or carbon system transparent conductive material (Graphene transparent conductive material)，Metal nanometer line transparent conductive material is (such as silver、Nickel、Copper、Palladium、Platinum、Gold、Any one elemental metals nano wire or several alloying metal nano wires in cobalt and ferrum)、Metal grill transparent conductive material is (such as silver、Nickel、Copper、Aluminum、Palladium、Platinum、Gold、Any one elemental metals grid or several alloying metal grids in cobalt and ferrum)、Electrically conducting transparent macromolecular material is (such as conducting polymer PEDOT/PSS (poly-3，4-ethylenedioxy thiophene/poly styrene sulfonate)) and burning system transparent conductive material.
During reaction, reacting gas can be the mixture of one or more in ozone, steam, hydrogen peroxide, organic amine, ammonia, halogen gas and compound, carbon dioxide, organic acid, nitric acid, hydrochloric acid, sulfur vapor and sulfide steam；Reaction temperature can dynamically adjusting according to real reaction speed between 0-150 DEG C.
After reaction terminates, the protective gas being filled with can be in nitrogen, air and noble gas one or more.
Adopt above replacement scheme, all can prepare transparency conductive electrode, and its Conductive layer portions conductive material is converted into electrically non-conductive material, thus obtaining the electrode of patterning, and conductive region and non-conducting areas poor optical properties heteropole are low, realizing the shadow etching that disappears completely, effect is notable in actual applications.
It will be apparent to those skilled in the art that can technical scheme as described above and design, make other various corresponding changes and deformation, and all these change and deformation all should belong within the protection domain of the claims in the present invention.
Claims (10)
1. the method preparing transparency conductive electrode, including:
1) transparent conductive material is prepared；
2) conversion zone is formed: on the conductive layer of transparent conductive material, form conversion zone；
3) import reacting gas to react: import reacting gas to conversion zone, make the conductive layer in conversion zone react with reacting gas；
4) obtain transparency conductive electrode: after reaction terminates, pass into protective gas to conversion zone and remove the residual reaction gas in conversion zone, obtain transparency conductive electrode.
2. the method preparing transparency conductive electrode as claimed in claim 1, it is characterised in that described transparent base is glass, macromolecule transparent membrane or macromolecular sheet material.
3. the method preparing transparency conductive electrode as claimed in claim 1, it is characterized in that, described conductive layer is one or more in 1-dimention nano conductive material, two-dimensional nano conductive material, metal grill transparent conductive material, electrically conducting transparent macromolecular material and burning system transparent conductive material.
4. the method preparing transparency conductive electrode as claimed in claim 3, it is characterized in that, described 1-dimention nano conductive material is metal nanometer line transparent conductive material, carbon nano tube transparent conductive material, nano metal band transparent conductive material or nano metal rod transparent conductive material.
5. the method preparing transparency conductive electrode as claimed in claim 4, it is characterized in that, in described metal nanometer line transparent conductive material, metal nanometer line is any one elemental metals nano wire or several alloying metal nano wire nano-silver thread in silver, nickel, copper, palladium, platinum, gold, cobalt and ferrum；In described metal grill transparent conductive material, metal grill is any one elemental metals grid or several alloying metal grid in silver, nickel, copper, aluminum, palladium, platinum, gold, cobalt and ferrum.
6. the method preparing transparency conductive electrode as claimed in claim 3, it is characterised in that described two-dimensional nano conductive material is nanometer metallic film transparent conductive material or carbon system transparent conductive material.
7. the method preparing transparency conductive electrode as claimed in claim 1, it is characterized in that, described reacting gas is one or more in ozone, steam, hydrogen peroxide, organic amine, ammonia, halogen gas and compound, carbon dioxide, organic acid, nitric acid, hydrochloric acid, sulfur vapor and sulfide steam.
8. the method preparing as claimed in claim 1 transparency conductive electrode, it is characterised in that described protective gas be in nitrogen, air and noble gas one or more.
9. the method preparing transparency conductive electrode as described in any one of claim 1-8, it is characterised in that
Described step 2) 3) 4) adopt transparency conductive electrode processing unit (plant) to carry out, described transparency conductive electrode processing unit (plant) includes template body, absorption platform and for template body being pressed on the compressing member on absorption platform, described template body is plate, template body is arranged on absorption platform, template body is provided with sealing ring, contact and passage, described sealing ring and contact are fixed on the template body side near transparent conductive material, described contact is positioned at sealing ring, noncontact chamber is formed between described sealing ring and contact, described passage is arranged on template body noncontact chamber place, passage is two or more；
Described step 1) particularly as follows: form conductive layer over the transparent substrate by spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or electroplating technology；
Described step 2) particularly as follows: transparent conductive material is placed on absorption platform, sealing ring and contact on template body support on the conductive layer of transparent conductive material and compress, and noncontact chamber forms conversion zone on transparent conductive material；
Described step 3) particularly as follows: import reacting gas by the passage on template body to conversion zone, the conductive layer in conversion zone and reacting gas react；
Described step 4) particularly as follows: pass into protective gas by the passage on template body to conversion zone to remove the residual reaction gas in conversion zone, remove template body, obtain transparency conductive electrode.
10. the method preparing transparency conductive electrode as described in any one of claim 1-8, it is characterised in that
Described step 2) 3) 4) adopt transparency conductive electrode processing unit (plant) to carry out, described transparency conductive electrode processing unit (plant) includes template body, absorption platform, for template body being pressed on compressing member on absorption platform and flexible protective film, described template body is plate, template body is arranged on absorption platform, template body is provided with sealing ring, contact and passage, described sealing ring and contact are fixed on the template body side near transparent conductive material, described contact and transparent conductive material contact position indent have pressure chamber, described contact is positioned at sealing ring, noncontact chamber is formed between described sealing ring and contact, described passage is arranged on template body noncontact chamber place, described passage is two or more；The noncontact chamber place of described absorption platform corresponding templates body is provided with gas port, and described flexible protective film is arranged between absorption platform and template body；
Described step 1) particularly as follows: form conductive layer over the transparent substrate by spin coating, spraying, printing, self assembly, vapour deposition, liquid deposition or electroplating technology, and open hole at transparent conductive material correspondence absorption platform gas port place；
Described step 2) particularly as follows: transparent conductive material is placed on absorption platform; transparent conductive material covers flexible protective film; sealing ring and contact on template body support on flexible protective film and compress, and flexible protective film and transparent conductive material form conversion zone at noncontact chamber place；
Described step 3) particularly as follows: import reacting gas by gas port to conversion zone, make the flexible protective film bubbling in conversion zone form reaction compartment, the conductive layer in reaction compartment and reacting gas react；
Described step 4) particularly as follows: pass into protective gas by gas port to reaction compartment to remove the residual reaction gas in reaction compartment, remove template body and flexible protective film, obtain transparency conductive electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610257256.XA CN105788760B (en) | 2016-04-22 | 2016-04-22 | A kind of method for preparing transparent conductive electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610257256.XA CN105788760B (en) | 2016-04-22 | 2016-04-22 | A kind of method for preparing transparent conductive electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105788760A true CN105788760A (en) | 2016-07-20 |
| CN105788760B CN105788760B (en) | 2017-10-27 |
Family
ID=56398371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610257256.XA Active CN105788760B (en) | 2016-04-22 | 2016-04-22 | A kind of method for preparing transparent conductive electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105788760B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106449117A (en) * | 2016-09-08 | 2017-02-22 | 宁波华坤新材料科技有限公司 | Preparation method of transparent grid electrode |
| CN107121467A (en) * | 2017-04-11 | 2017-09-01 | 中国农业大学 | A kind of multi-parameter water quality detection means |
| CN107955198A (en) * | 2016-10-14 | 2018-04-24 | 中国科学院大连化学物理研究所 | A kind of preparation method of nano-silver thread-chitosan self assembly conductive film coating |
| CN109830327A (en) * | 2019-02-22 | 2019-05-31 | 苏州绘格光电科技有限公司 | A kind of preparation method of transparent conductive electrode |
| CN110629222A (en) * | 2019-10-30 | 2019-12-31 | 合肥微晶材料科技有限公司 | Etching method of nano silver wire transparent conductive film with shadow eliminating function |
| CN111326658A (en) * | 2020-03-10 | 2020-06-23 | 苏州大学 | Perovskite solar cell with nickel grid flexible electrode and preparation method thereof |
| CN111710475A (en) * | 2020-06-30 | 2020-09-25 | 暨南大学 | Shadow-eliminating patterned transparent conductive electrode preparation method |
| WO2021114347A1 (en) * | 2019-12-10 | 2021-06-17 | Tcl华星光电技术有限公司 | Method for preparing metal electrode |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101597049A (en) * | 2008-06-04 | 2009-12-09 | 清华大学 | The preparation method of carbon nano-tube film |
| JP2010044968A (en) * | 2008-08-13 | 2010-02-25 | Nissha Printing Co Ltd | Method of manufacturing conductive pattern-covered body, and conductive pattern covered body |
| CN103021532A (en) * | 2011-09-27 | 2013-04-03 | 株式会社东芝 | Transparent electrode laminate |
| CN103187118A (en) * | 2013-02-06 | 2013-07-03 | 南昌欧菲光科技有限公司 | Conductive film, manufacturing method for conductive film and touch screen with conductive film |
| CN104651838A (en) * | 2013-11-22 | 2015-05-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Gas inlet apparatus and reaction chamber |
-
2016
- 2016-04-22 CN CN201610257256.XA patent/CN105788760B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101597049A (en) * | 2008-06-04 | 2009-12-09 | 清华大学 | The preparation method of carbon nano-tube film |
| JP2010044968A (en) * | 2008-08-13 | 2010-02-25 | Nissha Printing Co Ltd | Method of manufacturing conductive pattern-covered body, and conductive pattern covered body |
| CN103021532A (en) * | 2011-09-27 | 2013-04-03 | 株式会社东芝 | Transparent electrode laminate |
| CN103187118A (en) * | 2013-02-06 | 2013-07-03 | 南昌欧菲光科技有限公司 | Conductive film, manufacturing method for conductive film and touch screen with conductive film |
| CN104651838A (en) * | 2013-11-22 | 2015-05-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Gas inlet apparatus and reaction chamber |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106449117A (en) * | 2016-09-08 | 2017-02-22 | 宁波华坤新材料科技有限公司 | Preparation method of transparent grid electrode |
| CN106449117B (en) * | 2016-09-08 | 2019-02-26 | 宁波华坤新材料科技有限公司 | Preparation method of transparent grid electrode |
| CN107955198A (en) * | 2016-10-14 | 2018-04-24 | 中国科学院大连化学物理研究所 | A kind of preparation method of nano-silver thread-chitosan self assembly conductive film coating |
| CN107121467A (en) * | 2017-04-11 | 2017-09-01 | 中国农业大学 | A kind of multi-parameter water quality detection means |
| CN109830327A (en) * | 2019-02-22 | 2019-05-31 | 苏州绘格光电科技有限公司 | A kind of preparation method of transparent conductive electrode |
| CN110629222A (en) * | 2019-10-30 | 2019-12-31 | 合肥微晶材料科技有限公司 | Etching method of nano silver wire transparent conductive film with shadow eliminating function |
| CN110629222B (en) * | 2019-10-30 | 2022-02-18 | 合肥微晶材料科技有限公司 | Etching method of nano silver wire transparent conductive film with shadow eliminating function |
| WO2021114347A1 (en) * | 2019-12-10 | 2021-06-17 | Tcl华星光电技术有限公司 | Method for preparing metal electrode |
| CN111326658A (en) * | 2020-03-10 | 2020-06-23 | 苏州大学 | Perovskite solar cell with nickel grid flexible electrode and preparation method thereof |
| CN111326658B (en) * | 2020-03-10 | 2023-02-17 | 苏州大学 | Perovskite solar cell with nickel grid flexible electrode and preparation method thereof |
| CN111710475A (en) * | 2020-06-30 | 2020-09-25 | 暨南大学 | Shadow-eliminating patterned transparent conductive electrode preparation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105788760B (en) | 2017-10-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105788760A (en) | Method of manufacturing transparent conductive electrode | |
| Wang et al. | Multifunctional integrated transparent film for efficient electromagnetic protection | |
| Chu et al. | Spray-deposited large-area copper nanowire transparent conductive electrodes and their uses for touch screen applications | |
| An et al. | All-graphene-based highly flexible noncontact electronic skin | |
| Kim et al. | Enhanced oxidation-resistant Cu@ Ni core–shell nanoparticles for printed flexible electrodes | |
| Chen et al. | Embedded Ag/Ni metal-mesh with low surface roughness as transparent conductive electrode for optoelectronic applications | |
| Xu et al. | Graphene as transparent electrodes: fabrication and new emerging applications | |
| Im et al. | Hybrid crystalline-ITO/metal nanowire mesh transparent electrodes and their application for highly flexible perovskite solar cells | |
| Jason et al. | Copper nanowires as conductive ink for low-cost draw-on electronics | |
| Sharma et al. | A review of silver nanowire-based composites for flexible electronic applications | |
| Zhou et al. | Flexible and conductive meta-aramid fiber paper with high thermal and chemical stability for electromagnetic interference shielding | |
| Cao et al. | Effect of graphene-EC on Ag NW-based transparent film heaters: optimizing the stability and heat dispersion of films | |
| Peng et al. | One-step selective laser patterning of copper/graphene flexible electrodes | |
| WO2006078286A3 (en) | Patterning carbon nanotube coatings by selective chemical modification | |
| Vu et al. | Fractal structures in flexible electronic devices | |
| CN103700430B (en) | A kind of conductive film being distributed in order and its manufacture method | |
| Ba et al. | Cotton fabrics coated with few-layer graphene as highly responsive surface heaters and integrated lightweight electronic-textile circuits | |
| Trung et al. | Simple and reliable lift-off patterning approach for graphene and graphene–Ag nanowire hybrid films | |
| Zhou et al. | Self-assembled growing ultrathin Ag@ NiO core-shell nanowires for stable freestanding transparent conductive colorless polyimide nanomembranes | |
| Bae et al. | Transparent ultra-thin silver electrodes formed via a maskless evaporation process for applications in flexible organic light-emitting devices | |
| KR101500192B1 (en) | Transparent conductive films including graphene layer and mathod for manufacturing the same | |
| Yin et al. | Copper nanowire dispersion through an electrostatic dispersion mechanism for high-performance flexible transparent conducting films and optoelectronic devices | |
| CN109830327A (en) | A kind of preparation method of transparent conductive electrode | |
| CN104575869B (en) | Patterning etching method of transparent conducting electrode and patterning transparent conducting electrode | |
| Liu et al. | flexible and transparent silver nanowires integrated with a graphene layer-doping PEDOT: PSS film for detection of hydrogen sulfide |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190308 Address after: Room 203C, Building A7, Bio-nano Park 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee after: Suzhou Tuge Photoelectric Technology Co., Ltd. Address before: 434400 Sanzigang Village, Gaoling Town, Shishou City, Jingzhou City, Hubei Province, 9-1 Patentee before: Chen Chuqun |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210209 Address after: Room 203C, Building A7, Bio-nano Park 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee after: SUZHOU HUIGE PHOTOELECTRIC TECHNOLOGY Co.,Ltd. Patentee after: NUOVO FILM Inc. Address before: Room 203C, Building A7, Bio-nano Park 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee before: SUZHOU HUIGE PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |