CN105674889A - Displacement measurement method based on light interference - Google Patents
Displacement measurement method based on light interference Download PDFInfo
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- CN105674889A CN105674889A CN201610053503.4A CN201610053503A CN105674889A CN 105674889 A CN105674889 A CN 105674889A CN 201610053503 A CN201610053503 A CN 201610053503A CN 105674889 A CN105674889 A CN 105674889A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention provides a displacement measurement method based on light interference and relates to the displacement measurement method. The method is characterized in that, by utilizing a feature that an optical resonant cavity enables wave lengths to be passed selectively, and by analyzing the wave length of transmitted light, cavity length is obtained; when the cavity length changes, the transmission wave length changes therewith; and a photoelectric receiving device detects and analyzes the transmission wave length to obtain cavity length change amount, and displacement of a measured object is calculated through the cavity length change amount. The displacement measurement method can realize precise measurement of the displacement, has the advantages of being high in measurement precision, large in range, capable of crossing from the nm level to the m level, and capable of greatly improving system response time and the like, and is easy to be widely generalized.
Description
Technical field
The present invention relates to a kind of displacement measurement method, particularly a kind of displacement measurement method based on the interference of light.
Background technology
In the analysis process such as Precision Machinery Design and material development, the collection of the data such as the thermal expansivity of the displacement of component, vibration amplitude and vibrational frequency, distortion, material becomes the key of analysis. And existing displacement measurement system, be all generally that then range is short for precision height, greatly then precision is low for range, Waveform Matching its precision height good but length response operation time is slow, response is fast, and then precision is low, can not meet the needs of analysis of modernization.
Summary of the invention
The technical problem to be solved in the present invention is: provide a kind of realize the precision measurement to displacement and precision height, range big, respond the fast displacement measurement method based on the interference of light.
The technical scheme solved the problems of the technologies described above is: a kind of displacement measurement method based on the interference of light, the method is the characteristic utilizing optical resonance chamber to be passed through by wavelength selectivity, it is long by the analysis of transmission peak wavelength is obtained chamber, when change of cavity length, transmission peak wavelength changes thereupon, photoelectric receiving arrangement detects and analyzes transmission peak wavelength and draw change of cavity length amount, calculates analyte displacement by change of cavity length gauge.
The further technical scheme of the present invention is: the method adopts the displacement measuring device based on the interference of light to measure, and comprises the following steps:
1. when tested part does not move, the 4th beam splitting prism group and tested part joint, when system is not opened, two-mirror is h relative to the distance between the first speculum, the 2nd right-angle reflecting prism group relative to the distance between the first corner reflection prism group; After system is opened, driving mechanism starts along optical path direction high frequency telescopic variation, makes two-mirror and the 2nd right-angle reflecting prism group produce the change of △ h relative to the distance between the first speculum and the first right-angle reflecting prism group, and namely distance turns into h+ △ h;
After light is separated by the first beam splitting prism by laser beam emitting device transmitting, it is divided into measuring beam a and scanning light beam b, measuring beam a, scanning light beam b finally turn into respectively through a series of propagation light beam g and light beam j the light path of process suitable time, all spectrum lambda that laser beam emitting device sends0～λnBeing shown as light beam g and light beam j at the 2nd photoelectric receiving arrangement and produce the most intensity values of interference light energy, namely the luminous energy of all wavelengths be all the most by force, now records the distance h between the first speculum and two-mirror that the first photoelectric receiving arrangement provides;
2. when the 4th beam splitting prism group is with testee edge scanning light beam b propagation direction moving displacement x, driving mechanism continues high frequency and stretches, can make the laser sent by laser beam emitting device through the first beam splitting prism separately after measuring beam a and scanning light beam b finally arrive the equivalent optical path of the 2nd photoelectric receiving arrangement, make the 2nd photoelectric receiving arrangement be shown as light beam g and light beam j and produce the most intensity values of interference light energy, record the first distance h+△ h penetrating between mirror and two-mirror that now the first photoelectric receiving arrangement provides, now 2x=2 × (2N+1) × △ h, N is the number of standard prism square separately in the first right-angle reflecting prism group and the 2nd right-angle reflecting prism group, analyte displacement x is calculated by change of cavity length △ h.
The further again technical scheme of the present invention is: the detailed process that described measuring beam a and scanning light beam b finally turns into light beam g and light beam j respectively through a series of propagation is as follows:
Measuring beam a is divided into light beam c and light beam d after the 2nd beam splitting prism, light beam c enters the optical resonance chamber being made up of the first speculum and two-mirror, light beam c is transmitted to the first photoelectric receiving arrangement after resonance repeatedly reflects, and draws the distance between the first speculum and two-mirror; Light beam d enters the first right-angle reflecting prism group and the 2nd right-angle reflecting prism group, turns into light beam f after returning to the 2nd beam splitting prism after repeatedly reflection, and light beam f turns into light beam g after the 3rd beam splitting prism; Scanning light beam b turns into light beam e after the 4th beam splitting prism group, light beam e enters the 3rd beam splitting prism after right angle speculum again and turns into light beam j, wavelength and the center light energy of the interference collection of illustrative plates of now light beam g and light beam j generation are undertaken receiving and processing by the 2nd photoelectric receiving arrangement, and analyze and draw the variation diagram of luminous energy.
The further again technical scheme of the present invention is: the described displacement measuring device based on the interference of light comprises described laser beam emitting device, the first beam splitting prism, the first speculum, two-mirror, the first right-angle reflecting prism group, the 2nd right-angle reflecting prism group, the 4th beam splitting prism, the first photoelectric receiving arrangement, the 2nd photoelectric receiving arrangement, driving mechanism and the 2nd beam splitting prism, the 3rd beam splitting prism; Wherein:
Arranging the first beam splitting prism on the laser optical path that described laser beam emitting device is launched, the light splitting optical path of the first beam splitting prism comprises light splitting optical path A, light splitting optical path B; Arranging the 2nd beam splitting prism on described light splitting optical path A, the light splitting optical path of the 2nd beam splitting prism comprises light splitting optical path C, light splitting optical path D; Described light splitting optical path C is provided with optical resonance chamber, and this optical resonance chamber is made up of the first speculum, two-mirror; The first described photoelectric receiving arrangement it is provided with after optical resonance chamber; The light splitting optical path D of the 2nd beam splitting prism is provided with the first described right-angle reflecting prism group, the 2nd right-angle reflecting prism group, one end of first right-angle reflecting prism group, the 2nd right-angle reflecting prism group is fixedly connected with the first speculum, two-mirror, the other end of the first right-angle reflecting prism group, the 2nd right-angle reflecting prism group is connected with driving mechanism, the reflected light retroeflection of the first right-angle reflecting prism group, the 2nd right-angle reflecting prism group forms light splitting optical path F, the light splitting optical path F of the 2nd beam splitting prism to the 2nd beam splitting prism and is provided with the 3rd described beam splitting prism; The light splitting optical path B of the first described beam splitting prism arranges the 4th beam splitting prism, the light splitting optical path E of the 4th beam splitting prism is provided with right angle speculum, the reflected light of right angle speculum enters the 3rd beam splitting prism, and the light splitting optical path G of the 3rd beam splitting prism is provided with the 2nd described photoelectric receiving arrangement.
The further again technical scheme of the present invention is: the inclined-plane that the first described beam splitting prism comprises prism square I and prism square II, prism square and prism square is bonded together; The 2nd described beam splitting prism comprises prism square III and prism square IV, and the inclined-plane of prism square III and prism square IV is bonded together, and prism square III right-angle surface relative with prism square IV is parallel; Described prism square III is provided with photoabsorption and diffuse reflector I at its right-angle surface place, and prism square IV is provided with photoabsorption and diffuse reflector II at right-angle surface place.
The further again technical scheme of the present invention is: the first described speculum is having reflectance coating near two-mirror side plating shoe; Described two-mirror is having reflectance coating near the first speculum side plating shoe.
The further technical scheme of the present invention is: the spectral width of described laser beam emitting device is λ0～λn; The first described speculum is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflectivity be 90～99%; Two-mirror is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflectivity be 90～99%.
The further technical scheme of the present invention is: the first described photoelectric receiving arrangement is used for wavelength Xi～λjThe energy of light beam is analyzed, and calculates the distance of the first speculum and two-mirror; The 2nd described photoelectric receiving arrangement, for different wave length λ0～λnBeam energy analyze, and analyze the wavelength that luminous energy is the strongest.
The further technical scheme of the present invention is: the first described right-angle reflecting prism group comprises one and utilizes inclined-plane that light is produced the prism square V of reflection, N number of standard prism square VI utilizing two right-angle surface light generation to be reflected; The 2nd described right-angle reflecting prism group comprises one and utilizes right-angle surface that light produces the little prism square of reflection, N number of standard prism square VII utilizing two right-angle surface to produce to reflect to light; The right-angle surface area of described little prism square is 0.3～0.8 times of standard prism square VII right-angle surface area, N >=1; The 3rd described beam splitting prism comprises prism square VIII and prism square Ⅸ, and the inclined-plane of prism square VIII and prism square Ⅸ is bonded together, and right-angle surface relative to each other is parallel; Described prism square Ⅸ right-angle surface place is provided with photoabsorption and diffuse reflector III; The 4th described beam splitting prism by four pieces of same prism squares Ⅹ each other right-angle surface glue together the square that forms, wherein prism square Ⅹ inclined-plane is provided with photoabsorption and diffuse reflector the IV, four beam splitting prism moves with tested linear moving object.
The further technical scheme of the present invention is: described driving mechanism comprises actuator, bonding mobile block, compensation block, fixed block, described mobile block and fixed block are bonded in the two ends of actuator respectively, fixed block is bonding with compensation block, leaving gap between compensation block and actuator, compensation block is fixedly connected with the first right-angle reflecting prism group, the 2nd right-angle reflecting prism group respectively with mobile block.
Owing to adopting said structure, the displacement measurement method based on the interference of light of the present invention compared with prior art, has following useful effect:
1. can realize the precision measurement to displacement:
It it is the characteristic utilizing optical resonance chamber to be passed through by wavelength selectivity due to the present invention, it is long by the analysis of transmission peak wavelength is obtained chamber, when change of cavity length, transmission peak wavelength changes thereupon, photoelectric receiving arrangement detects and analyzes transmission peak wavelength and draw change of cavity length amount, calculates analyte displacement by change of cavity length gauge.Its concrete grammar is when tested part does not move, beam splitting prism group contacts with tested part, after system is opened, driving mechanism starts along optical path direction high frequency telescopic variation, and the first speculum and the first right-angle reflecting prism group are changed relative to the distance between two-mirror and the first right-angle reflecting prism group. After the light beam that laser beam emitting device is launched is separated by the first beam splitting prism, it is divided into measuring beam a and scanning light beam b, measuring beam a and scanning light beam b finally turns into light beam g and light beam j respectively through a series of propagation, when the light path that light beam g and light beam j finally arrives the 2nd photoelectric receiving arrangement is suitable, make the 2nd photoelectric receiving arrangement be shown as light beam g and light beam j and produce the most intensity values of interference light energy, all spectrum lambda that namely laser beam emitting device sends0～λnLuminous energy be all the strongest, now record the distance of the first speculum that the first photoelectric receiving arrangement provides, two-mirror; When the 4th beam splitting prism is with testee edge scanning light beam b propagation direction miles of relative movement x, driving mechanism continues high frequency and stretches, always have the laser that laser beam emitting device can be made a moment to send through the first beam splitting prism separately after two-beam line finally arrive the equivalent optical path of the 2nd photoelectric receiving arrangement, make the 2nd photoelectric receiving arrangement be shown as light beam g and light beam j and produce the most intensity values of interference light energy, the distance of record the first speculum that now the first photoelectric receiving arrangement provides, two-mirror, can calculate analyte displacement by change of cavity length. Therefore, the present invention produces displacement from the first beginning and end and starts working, until tested part straight line displacement stops, measuring tested part displacement, thus can realize the precision measurement to displacement, it is also possible to measures the rate variation in the amplitude and frequency, displacement process vibrated.
2. precision height:
The present invention utilizes separated light wave amplitude method that a branch of light is evenly divided into two bundles, when two light beams are when reaching interference condition, and the equivalent optical path of process, interference energy can reach extreme value, utilize this principle, when a branch of light is (when measuring beam light path (being issued to receptor from light source to receive) a) is along with the velocity variations that tested part is relatively slow, the light path alternately change (frequency is constant) faster of another Shu Guang (scanning light beam b), always has the equivalent optical path making measuring beam a and scanning light beam b a moment.
In the present invention, the light path of measuring beam a is: light beam sends after the first beam splitting prism from laser beam emitting device, be divided into measuring beam a to start through the 2nd beam splitting prism, the first right-angle reflecting prism group, the 2nd right-angle reflecting prism group, the 3rd beam splitting prism etc., finally to the 2nd photoelectric receiving arrangement the light path of process.
The light path of scanning light beam b is: light beam sends after the first beam splitting prism from laser beam emitting device, is divided into scanning light beam b to start through the 4th beam splitting prism group, right angle speculum, the 3rd beam splitting prism, finally to the 2nd photoelectric receiving arrangement the light path of process.
When tested part is when position O1, the light path of measuring beam a is h1, the light path of scanning light beam b is at h1±△h1Change, when measuring beam and scanning light beam light path are all h, it is the strongest that two-beam produces interference energy, is detected by the 2nd photoelectric receiving arrangement and analyzes, and the light path of record scanning light beam, record drives the position of scanning beam component.
When tested part is when position O2, measuring beam light path turns into h1+△h1Scanning light beam light path continues repeatedly to change, when the light path of the light path with measuring beam that scan light beam is again equal, two-beam produces interference energy and again reaches the strongest, it is received by the receiver and again records the light path scanning light beam, the change in displacement of tested part can be drawn by twice, front and back record scanning light beam path difference value. If utilizing wide spectral (λ0～λn), then it is that the light path of two-beam is equal when each wavelength energy is all interference maximum value.Therefore, the more short (λ of the wavelength of the present invention0More little), the more wide (λ of spectrum0Scope is more big), then measuring accuracy is more high.
In addition, the present invention is insensitive to light polarization, receives optical band wavelength the shortest, precision comparison is stablized, thus further technology measuring accuracy.
3. range is big:
The present invention is the characteristic utilizing optical resonance chamber (Fa Buli Perot cavity) to be passed through by wavelength selectivity, by the analysis to transmitted light wavelength, it is possible to obtain chamber long. When change of cavity length, transmission peak wavelength changes thereupon, and receptor detects and analyzes transmission peak wavelength and can draw change of cavity length amount.
Spectral range (λ can be received in resonator cavityi～λj) more narrow, the more long (λ of wavelengthiMore big), the long h ' of its minimum cavity is more long, chamber long alterable scope △ h(△ h≤5h ') more big, thus useful range is more big, the standard right angle number of prisms increased in addition in the first right-angle reflecting prism group and the 2nd right-angle reflecting prism group can increase useful range. Therefore, the useful range of the present invention can be formulated as requested, its useful range L is: 0～10 (2N+1) h ', and in formula, N is the number of standard prism square separately in the first right-angle reflecting prism group and the 2nd right-angle reflecting prism group, measuring accuracy δ: 0.1* λ0, its range is big, crosses over magnitude big, can be across to m level from nm level.
4. response is fast:
The present invention adopts folded optical path method to make its compact construction, the wavelength value only not needing analysing energy maximum by light wave is composed type analysis, therefore avoids the error occurred during Software match waveform, reduces computing amount simultaneously, can greatly improve the time of response of system.
Below, in conjunction with the accompanying drawings and embodiments the technology feature of the displacement measurement method based on the interference of light of the present invention is further described.
Accompanying drawing explanation
Fig. 1: the structure principle chart of the displacement measuring device based on the interference of light that the present invention adopts,
The structural representation of the Fig. 2: the first beam splitting prism,
The structural representation of the Fig. 3: the two beam splitting prism,
The structural representation of the Fig. 4: the first speculum,
The structural representation of the Fig. 5: the two-mirror,
The structural representation of the Fig. 6: the first right-angle reflecting prism group,
The structural representation of the Fig. 7: the two right-angle reflecting prism group,
The structural representation of the Fig. 8: the three beam splitting prism,
The structural representation of the Fig. 9: the four beam splitting prism,
Figure 10: the structural representation of driving mechanism,
Figure 11: the energy wavelength graph of initial measurement,
Figure 12: the loss wavelength graph of initial measurement,
Figure 13: tested part produces the energy wavelength graph of displacement,
Figure 14: tested part produces the loss wavelength graph of displacement,
Figure 15: resonator cavity transmitted light energy wavelength graph,
Figure 16: chamber length increases contrast local figure before and after 1um transmitted light wavelength,
Figure 17: chamber length increases 1um transmitted light wavelength previous peaks and catches data plot,
Figure 18: after chamber length increases 1um transmitted light wavelength, peak value catches data plot,
Figure 19: transmitted light energy wavelength distribution plan when resonator cavity chamber length is 6h '=46.8um.
In above-mentioned accompanying drawing, each description of symbols is as follows:
1-laser beam emitting device,
2-first beam splitting prism, 201-prism square I, 202-prism square II,
3-the 2nd beam splitting prism, 301-prism square III, 302-prism square IV,
303-photoabsorption and diffuse reflector II, 304-photoabsorption and diffuse reflector I,
4-first speculum, 5-two-mirror, 6-first photoelectric receiving arrangement,
7-first right-angle reflecting prism group, 701-prism square V, 702-prism square VI,
8-the 2nd right-angle reflecting prism group, the little prism square of 801-prism square VII, 802-,
9-the 3rd beam splitting prism, 901-prism square VIII, 902-prism square Ⅸ, 903-photoabsorption and diffuse reflector III,
10-the 4th beam splitting prism, 1001-prism square Ⅹ, 1002-photoabsorption and diffuse reflector IV,
11-right angle speculum, 12-the 2nd photoelectric receiving arrangement,
13-driving mechanism, 1301-actuator, the bonding mobile block of 1302-, 1303-compensation block, 1304-fixed block.
Embodiment
Embodiment one:
A kind of displacement measurement method based on the interference of light, the method is the characteristic utilizing optical resonance chamber to be passed through by wavelength selectivity, it is long by the analysis of transmission peak wavelength is obtained chamber, when change of cavity length, transmission peak wavelength changes thereupon, photoelectric receiving arrangement detects and analyzes transmission peak wavelength and draw change of cavity length amount, calculates analyte displacement by change of cavity length gauge.
The method adopts the displacement measuring device based on the interference of light to measure, and comprises the following steps:
1., when tested part does not move, the 4th beam splitting prism group 10 and tested part joint, when system is not opened, two-mirror 5 and the 2nd right-angle reflecting prism group 8 are h relative to the distance between the first speculum 4 and the first corner reflection prism group 7. After system is opened, driving mechanism 13 starts along optical path direction high frequency telescopic variation, makes two-mirror 5 and the 2nd right-angle reflecting prism group 8 produce the change of △ h relative to the distance between the first speculum 4 and the first right-angle reflecting prism group 7, and namely distance turns into h+ △ h.
When light launch by laser beam emitting device 1 by the first beam splitting prism 2 separately after, it is divided into measuring beam a and scanning light beam b, measuring beam a, scanning light beam b finally turn into respectively through a series of propagation light beam g and light beam j the light path of process suitable time, all spectrum lambda that laser beam emitting device 1 sends0～λnBeing shown as light beam g and light beam j at the 2nd photoelectric receiving arrangement 12 and produce the most intensity values of interference light energy, namely the luminous energy of all wavelengths be all the most by force, now records the distance h of the first speculum 4 that the first photoelectric receiving arrangement 6 provides and two-mirror 5.
2. when the 4th beam splitting prism group 10 is with testee edge scanning light beam b propagation direction miles of relative movement x, driving mechanism 13 continues high frequency and stretches, can make the laser sent by laser beam emitting device 1 through the first beam splitting prism 2 separately after measuring beam a and scanning light beam b finally arrive the equivalent optical path of the 2nd photoelectric receiving arrangement 12, make the 2nd photoelectric receiving arrangement 12 be shown as light beam g and light beam j and produce the most intensity values of interference light energy, record the first distance h+△ h penetrating mirror 4 and two-mirror 5 that now the first photoelectric receiving arrangement 6 provides, now 2x=2 × (2N+1) × △ h, N is the number of standard prism square separately in the first right-angle reflecting prism group and the 2nd right-angle reflecting prism group, analyte displacement x is calculated by change of cavity length △ h.
The detailed process that above-mentioned measuring beam a and scanning light beam b finally turns into light beam g and light beam j respectively through a series of propagation is as follows:
Measuring beam a is divided into light beam c and light beam d after the 2nd beam splitting prism 3, light beam c enters the optical resonance chamber being made up of the first speculum 4 and two-mirror 5, light beam c is transmitted to the first photoelectric receiving arrangement 6 after resonance repeatedly reflects, and draws the distance between the first speculum 4 and two-mirror 5. Light beam d enters the first right-angle reflecting prism group 7 and the 2nd right-angle reflecting prism group 8, turns into light beam f after returning to the 2nd beam splitting prism 3 after repeatedly reflection, and light beam f turns into light beam g after the 3rd beam splitting prism 9. Scanning light beam b turns into light beam e after the 4th beam splitting prism group 10, light beam e enters the 3rd beam splitting prism 9 after right angle speculum 11 again and turns into light beam j, wavelength and the center light energy of the interference collection of illustrative plates of now light beam g and light beam j generation are undertaken receiving and processing by the 2nd photoelectric receiving arrangement 12, and analyze and draw the variation diagram of luminous energy.
The displacement measuring device based on the interference of light adopted in the present invention comprises described laser beam emitting device 1, first beam splitting prism 2, first speculum 4, two-mirror 5, first right-angle reflecting prism group 7, the 2nd right-angle reflecting prism group 8, the 4th beam splitting prism 10, first photoelectric receiving arrangement 6, the 2nd photoelectric receiving arrangement 12, driving mechanism 13 and the 2nd beam splitting prism 3, the 3rd beam splitting prism 9;Wherein:
The light splitting optical path arranging the first beam splitting prism 2, first beam splitting prism 2 on the laser optical path that described laser beam emitting device 1 is launched comprises light splitting optical path A, light splitting optical path B, the light splitting optical path arranging the 2nd beam splitting prism the 3, two beam splitting prism 3 on described light splitting optical path A comprises light splitting optical path C, light splitting optical path D, described light splitting optical path C is provided with optical resonance chamber, and this optical resonance chamber is made up of the first speculum 4, two-mirror 5, the first described photoelectric receiving arrangement 6 it is provided with after optical resonance chamber, the light splitting optical path D of the 2nd beam splitting prism 3 is provided with the first described right-angle reflecting prism group 7, 2nd right-angle reflecting prism group 8, first right-angle reflecting prism group 7, one end of 2nd right-angle reflecting prism group 8 and the first speculum 4, two-mirror 5 is fixedly connected with, first right-angle reflecting prism group 7, the other end of the 2nd right-angle reflecting prism group 8 is connected with driving mechanism 13, first right-angle reflecting prism group 7, the reflected light retroeflection of the 2nd right-angle reflecting prism group 8 forms light splitting optical path F to the 2nd beam splitting prism 3, the light splitting optical path F of the 2nd beam splitting prism 3 is provided with the 3rd described beam splitting prism 9, the light splitting optical path B of the first described beam splitting prism 2 arranges the 4th beam splitting prism 10, the light splitting optical path E of the 4th beam splitting prism 10 is provided with right angle speculum 11, the light splitting optical path G that the reflected light of right angle speculum 11 enters the 3rd beam splitting prism the 9, three beam splitting prism 9 is provided with the 2nd described photoelectric receiving arrangement 12.
Described laser beam emitting device 1 can send the wide spectral laser of certain luminous energy, and its spectral width is λ0～λn, λ0=0.1um, λn=2um。
The first described beam splitting prism 2 comprises prism square I 201 and prism square II 202, and the inclined-plane of prism square 201 and prism square 202 is bonded together, and ensures that right-angle surface relative to each other is parallel. The wide spectral laser that laser beam emitting device 1 is sent by this first beam splitting prism 2 is divided into two light velocity measurement light beam a and scanning light beam b, and the energy of two light beams is equal.
The 2nd described beam splitting prism 3 comprises prism square III 301 and prism square IV 302, and the inclined-plane of prism square III 301 and prism square IV 302 is bonded together, and prism square III 301 right-angle surface relative with prism square IV 302 is parallel. Measuring beam a is divided into light beam c and light beam d by the 2nd beam splitting prism 3, and the energy of light beam c and light beam d is equal.
Described prism square III 301 is provided with photoabsorption and diffuse reflector I 304 at its right-angle surface place, light beam c ' is carried out absorbing and diffuse-reflectance (the optical resonance chamber generation that light beam c ' is made up of the first speculum 4 and two-mirror 5 by photoabsorption and diffuse reflector I 304 under the prerequisite not blocking light beam f, occur after being separated through the 2nd beam splitting prism 3), prism square IV 302 posts photoabsorption and diffuse reflector II 303 at right-angle surface place, light beam f ' is carried out absorbing and diffuse-reflectance (light beam f ' occurs after being separated by the 2nd beam splitting prism 3 after repeatedly reflection by light beam d) by photoabsorption and diffuse reflector II 303 under the prerequisite not blocking measuring beam a.
The first described speculum 4 is having reflectance coating near two-mirror 5 side plating shoe; This first speculum 4 is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflectivity be 90～99%.
Described two-mirror 5 is having reflectance coating near the first speculum 4 side plating shoe, and this two-mirror 5 is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflectivity be 90～99%, described λi～λjIt is 0.2～0.4um.
The first described photoelectric receiving arrangement 6 is for wavelength Xi～λjThe energy of light beam is analyzed, and calculates the distance of the first speculum 4 and two-mirror 5, to wavelength Xi～λjAnalysis and calculation is not carried out with outer light beam;
The first described right-angle reflecting prism group 7 comprises one and utilizes inclined-plane that light produces the prism square V 701 of reflection, N number of standard prism square VI 702 utilizing two right-angle surface to produce to reflect to light, light beam d is repeatedly reflected by this first right-angle reflecting prism group 7 with right-angle reflecting prism group 8 simultaneously, and in different positions, light beam d is reflected back the 2nd beam splitting prism 3.
The 2nd described right-angle reflecting prism group 8 comprises one and utilizes right-angle surface that light produces the little prism square 802 of reflection, N number of standard prism square VII 801 utilizing two right-angle surface to produce to reflect to light. The right-angle surface area of described little prism square 802 is 0.5 times of standard prism square VII 801 right-angle surface area. Light beam d is repeatedly reflected by the 2nd right-angle reflecting prism group 8 with right-angle reflecting prism group 7 simultaneously, and in different positions, light beam d is reflected back the 2nd beam splitting prism 3. Above-mentioned N >=1.
The 3rd described beam splitting prism 9 comprises prism square VIII 901 and prism square Ⅸ 902, and the inclined-plane of prism square VIII 901 and prism square Ⅸ 902 is bonded together, and right-angle surface relative to each other is parallel; Photoabsorption and diffuse reflector III 903 post in described prism square Ⅸ 902 right-angle surface place. 3rd beam splitting prism 9 the light beam f entered in it and light beam e ' are divided into two overlap together with light beam g and light beam j, and the energy of light beam g and light beam j is equal; Photoabsorption and diffuse reflector III 903 light beam e ' is carried out absorb and diffuse-reflectance (light beam e ' by light beam e through right angle speculum 11 right-angle surface reflect after enter the 3rd beam splitting prism 9 be separated after appearance);
The 4th described beam splitting prism 10 is by four pieces of same prism squares Ⅹ 1001 square that right-angle surface gummed forms each other, wherein prism square Ⅹ 1001 inclined-plane is provided with photoabsorption and diffuse reflector IV 1002, absorbing the transmittance and reflectance light beam that scanning light beam b produces through the face, boundary of beam splitting prism group 10 inside respectively, the 4th beam splitting prism 10 unanimously moves with tested linear moving object.
Described right angle speculum 11, can be totally reflected light beam at inclined-plane place.
The 2nd described photoelectric receiving arrangement 12, for different wave length λ0～λnBeam energy analyze, and analyze the wavelength that luminous energy is the strongest.
Described driving mechanism 13 comprises actuator 1301, bonding mobile block 1302, compensation block 1303, fixed block 1304, described mobile block 1302 and fixed block 1304 are bonded in the two ends of actuator 1301 respectively, fixed block 1304 is bonding with compensation block 1303, leaving gap between compensation block 1303 and actuator 1301, compensation block 1303 is fixedly connected with the first right-angle reflecting prism group 7, the 2nd right-angle reflecting prism group 8 respectively with mobile block 1302.
This driving mechanism 13 is extending when being energized, original length can be returned to during electric discharge, the first speculum 4 can not be made during contraction to contact with two-mirror 5 or collide, the first right-angle reflecting prism group 7 can not be made to contact with the 2nd right-angle reflecting prism group 8 or collide, the left end of driving mechanism 13 is fixed, when actuator 1301 high frequency is flexible, slider pad 1302 drives two-mirror 5 and the 2nd right-angle reflecting prism group 8 to continue moving along about light beam c propagation direction of high frequency, the flexible amount △ h of actuator 1301 is no more than 5 times of the long h ' of minimum cavity, i.e. △ h≤5h ', distance between first speculum 4 and two-mirror 5 is equal with the distance between the first right-angle reflecting prism group 7 and the 2nd right-angle reflecting prism group 8, it is called the long h in chamber, h must be greater than the long h ' of minimum cavity.And first speculum 4 and the first right-angle reflecting prism group 7 do not move for fixing group, two-mirror 5 and the 2nd right-angle reflecting prism group 8 move left and right along light beam c direction for synchronizing moving group.
The long h ' of minimum cavity: for ensureing the broad-spectrum beam different wave length (λ that laser beam emitting device 1 is launched by the first electricity receiving trap 6i～λj) in scope, can record at least 2 wavelength light intensity during scanning is maximum value, by the length of these 2 wavelength and between compose line-spacing to go out chamber now from inverse long, can measure when therefore only distance h between the first speculum 4 and two-mirror 5 is greater than minimum cavity long h '。
The long h in chamber, optical resonance chamber, long for ensureing to measure chamber, optical resonance chamber, and ensure that the first photoelectric receiving arrangement 6 is to the scanning recognition of light beam, the long h scope in chamber is h '≤h≤1.5h '.
Spectral range (λ can be received in resonator cavityi～λj) more narrow, the more long (λ of wavelengthiMore big), the long h ' of its minimum cavity is more long, chamber long alterable scope △ h(△ h≤5h ') more big, thus useful range is more big, the standard right angle number of prisms increased in addition in the first right-angle reflecting prism group 7 and the 2nd right-angle reflecting prism group 8 can increase useful range, and (but too much affecting measuring accuracy, namely the product of resonator cavity displacement accuracy and standard right angle number of prisms is greater than 0.1 times of minimum wavelength λ0). Useful range L is: 0～10 (2N+1) h ', and in formula, N is the number of standard prism square separately in the first right-angle reflecting prism group and the 2nd right-angle reflecting prism group, measuring accuracy δ: 0.1* λ0, range is big, crosses over magnitude big, can be across to m level from nm level. Its principle is as follows:
Assume that light source adopts ultraviolet band (100nm～400nm, λ0=100nm, λn=400nm) spectral range, the relatively slow speed of tested part produces the time shift of straight line position and measures, and therefore has luminous energy function formula:
---the energy relative value of interference light, normalization method. (the most intense light energy that measuring beam a and scanning light beam b two-beam superposition can reach after interfering is maximum value, most low light level energy be 0)
N-medium refraction index, vacuum or gas intermediate value are about 1;
h1Path difference between-scanning light beam A and measuring beam B, um;
△h1The equation of light that the displacement of-analyte produces, um;
λ-wavelength, um;
When the path difference scanned between light beam a and measuring beam b is equal, i.e. h1=0, energy wavelength image is shown in Figure 11. As can be seen from Figure 11, when tested part does not produce displacement, when the path difference scanned between light beam a and measuring beam b is equal, the luminous energy between wavelength 100nm～400nm is all the maximum value of interference energy.
If test after using light power meter to make zero, then see its pad value (loss value) after luminous energy normalization method
---the energy waste value of interference light, dB;
Loss wavelength image is shown in Figure 12.
Measuring beam b light path is made to produce small light path variable △ h when tested part produces displacement x1(by systemic presupposition △ h during=0.01um=10nm1=0.1λ0), now when scanning light beam a and interfere with initial light path, energy wavelength image is shown in Figure 13. As can be seen from Figure 13, shortwave strong point, especially at wavelength 0.1um(=100nm) place, interference light energy does not reach maximum value, only has about 90%.
If using light power meter test, obtaining loss-wavelength graph picture is shown in Figure 14.
Common power meter precision, at-0.1dB, therefore can obviously find that measuring beam a is different with the light path of scanning light beam b, and therefore Displacement Measurement precision is higher than 0.1 λ0.And the more little measuring accuracy of λ 0 is more high.
When the equivalent optical path of measuring beam a and scanning light beam b, during such as Figure 11 and Figure 12 situation, the 2nd photoelectric receiving arrangement 12 sends signal, now by chamber length and the time of the first photoelectric receiving arrangement 6 recording optically resonator cavity. When object moves, measuring beam b light path is made to produce subtle change, and very fast reciprocating driving mechanism 13 makes the light path of measuring beam a equal the light path scanning light beam b again, record chamber length and the time in now optical resonance chamber again, by cross-reference, the displacement that object can be drawn and situation about changing in time.
When light beam c(sets wavelength as 100nm～400nm) enter in the optical resonance chamber being made up of the first speculum 4 and two-mirror 5, and optical resonance chamber selectivity is through comparatively narrow wavelength region (350～400nm).
Light wave measuring accuracy 0.04pm now, system gets measuring accuracy 1pm, and namely maximum luminous energy wavelength produces to be greater than the first photoelectric receiving arrangement 6 when 1pm changes and can record and analyze.
Optical resonance chamber transmitted light energy function formula:
Resonator cavity transmitted light energy;
H resonator cavity chamber length value, um;
△ h resonator cavity change of cavity length value, um;
L optical wavelength, um;
R resonator cavity reflectivity;
N medium refraction index, vacuum or gas intermediate value are about 1.
Owing to there being the requirement of the long h ' of minimum cavity, the wavelength region (λ of selective transmission light wavei～λj) after can draw:
Assuming that resonator cavity is selected through wavelength is 380nm～400nm(λi=380nm, λj=400), then h '=7.8um is resonator cavity chamber length (h '=h) according to minimum cavity length, and transmitted light energy wavelength image is shown in Figure 15.
Note: if chamber length is at h '≤h≤1.5h ', by adjacent transmissive optical wavelength (λ1, λ2) draw chamber length value.
When chamber length changes value (△ h), transmitted light wavelength changes, it is assumed that chamber length increases 1nm, then before and after, contrast transmission peak wavelength shifted images is as shown in figure 16. Its image peak value is caught the spectrum line P1 before change and the peak wavelength of spectrum line P2 after change are respectively shown in image Figure 17, Figure 18.
Can drawing when Resonant Intake System increases 1um by Figure 17, Figure 18, transmitted light centre wavelength drift 0.00005um=0.05nm=50pm, much larger than the measuring accuracy 1pm that system is got, system is enough to record.
As △ h=5h ', now chamber length maximum h=h '+△ h=6h '=6 × 7.8um=46.8um set by system, the energy-wavelength graph picture through resonator cavity is shown in Figure 19.
Now it is described as 0.001um=1nm=1000pm > 1pm by the spacing of adjacent peaks centre wavelength,
Note: Resonant Intake System still can continue to expand in theory, but reality is difficult to ensure that two plane mirror plane of reflection are parallel owing to resonator cavity is excessively long, therefore system is gone bail for and is kept value (△ h=5h ').
Change of cavity length value is △ h=5h ', and therefore driving mechanism 13 stretch value should equal 5h ', driving mechanism synchronously drive the 2nd right-angle reflecting prism group 8 to move change in displacement that relative first right-angle reflecting prism group 7 has 5h ', and therefore range L is:
The total quantity of 2N standard prism square VI 702 and standard prism square VII 801, h ' resonator cavity minimum cavity is long,
Obtaining by range formula, when the quantity of N increases, systematic survey range L equal proportion increases, and minimum cavity length value h ' is more big, and then useful range L is more big.
Claims (10)
1. the displacement measurement method based on the interference of light, it is characterized in that: the method is the characteristic utilizing optical resonance chamber to be passed through by wavelength selectivity, it is long by the analysis of transmission peak wavelength is obtained chamber, when change of cavity length, transmission peak wavelength changes thereupon, photoelectric receiving arrangement detects and analyzes transmission peak wavelength and draw change of cavity length amount, calculates analyte displacement by change of cavity length gauge.
2. the displacement measurement method based on the interference of light according to claim 1, it is characterised in that: the method adopts the displacement measuring device based on the interference of light to measure, and comprises the following steps:
1. when tested part does not move, 4th beam splitting prism group (10) and tested part joint, when system is not opened, two-mirror (5) is h relative to the distance between the first speculum (4), the 2nd right-angle reflecting prism group (8) relative to the distance between the first corner reflection prism group (7); After system is opened, driving mechanism (13) starts along optical path direction high frequency telescopic variation, making two-mirror (5) and the 2nd right-angle reflecting prism group (8) produce the change of △ h relative to the distance between the first speculum (4) and the first right-angle reflecting prism group (7), namely distance turns into h+ △ h;
After light is separated by the first beam splitting prism (2) by laser beam emitting device (1) transmitting, it is divided into measuring beam a and scanning light beam b, measuring beam a, scanning light beam b finally turn into respectively through a series of propagation light beam g and light beam j the light path of process suitable time, all spectrum lambda that laser beam emitting device (1) sends0～λnIt is shown as light beam g and light beam j at the 2nd photoelectric receiving arrangement (12) and produces the most intensity values of interference light energy, namely the luminous energy of all wavelengths is all the strongest, now records the distance h between the first speculum (4) and two-mirror (5) that the first photoelectric receiving arrangement (6) provides;
2. when the 4th beam splitting prism group (10) is with testee edge scanning light beam b propagation direction moving displacement x, driving mechanism (13) continues high frequency and stretches, can make the laser sent by laser beam emitting device (1) through the first beam splitting prism (2) separately after measuring beam a and scanning light beam b finally arrive the equivalent optical path of the 2nd photoelectric receiving arrangement (12), make the 2nd photoelectric receiving arrangement (12) be shown as light beam g and light beam j and produce the most intensity values of interference light energy, record now the first photoelectric receiving arrangement (6) provide first penetrate the distance h+△ h between mirror (4) and two-mirror (5), now 2x=2 × (2N+1) × △ h, N is the number of standard prism square separately in the first right-angle reflecting prism group and the 2nd right-angle reflecting prism group, analyte displacement x is calculated by change of cavity length △ h.
3. the displacement measurement method based on the interference of light according to claim 2, it is characterised in that: the detailed process that described measuring beam a and scanning light beam b finally turns into light beam g and light beam j respectively through a series of propagation is as follows:
Measuring beam a is divided into light beam c and light beam d after the 2nd beam splitting prism (3), light beam c enters the optical resonance chamber being made up of the first speculum (4) and two-mirror (5), light beam c is transmitted to the first photoelectric receiving arrangement (6) after resonance repeatedly reflects, and draws the distance between the first speculum (4) and two-mirror (5); Light beam d enters the first right-angle reflecting prism group (7) and the 2nd right-angle reflecting prism group (8), turns into light beam f after returning to the 2nd beam splitting prism (3) after repeatedly reflection, and light beam f turns into light beam g after the 3rd beam splitting prism (9); Scanning light beam b turns into light beam e after the 4th beam splitting prism group (10), light beam e enters the 3rd beam splitting prism (9) after right angle speculum (11) again and turns into light beam j, wavelength and the center light energy of the interference collection of illustrative plates of now light beam g and light beam j generation are undertaken receiving and processing by the 2nd photoelectric receiving arrangement (12), and analyze and draw the variation diagram of luminous energy.
4. the displacement measurement method based on the interference of light according to claim 2, it is characterised in that: the described displacement measuring device based on the interference of light comprises described laser beam emitting device (1), the first beam splitting prism (2), the first speculum (4), two-mirror (5), the first right-angle reflecting prism group (7), the 2nd right-angle reflecting prism group (8), the 4th beam splitting prism (10), the first photoelectric receiving arrangement (6), the 2nd photoelectric receiving arrangement (12), driving mechanism (13) and the 2nd beam splitting prism (3), the 3rd beam splitting prism (9); Wherein:
Arranging the first beam splitting prism (2) on the laser optical path that described laser beam emitting device (1) is launched, the light splitting optical path of the first beam splitting prism (2) comprises light splitting optical path A, light splitting optical path B, arranging the 2nd beam splitting prism (3) on described light splitting optical path A, the light splitting optical path of the 2nd beam splitting prism (3) comprises light splitting optical path C, light splitting optical path D, described light splitting optical path C is provided with optical resonance chamber, and this optical resonance chamber is made up of the first speculum (4), two-mirror (5), described the first photoelectric receiving arrangement (6) it is provided with after optical resonance chamber, the light splitting optical path D of the 2nd beam splitting prism (3) is provided with the first described right-angle reflecting prism group (7), 2nd right-angle reflecting prism group (8), first right-angle reflecting prism group (7), one end of 2nd right-angle reflecting prism group (8) and the first speculum (4), two-mirror (5) is fixedly connected with, first right-angle reflecting prism group (7), the other end of the 2nd right-angle reflecting prism group (8) is connected with driving mechanism (13), first right-angle reflecting prism group (7), the reflected light retroeflection of the 2nd right-angle reflecting prism group (8) forms light splitting optical path F to the 2nd beam splitting prism (3), the light splitting optical path F of the 2nd beam splitting prism (3) is provided with the 3rd described beam splitting prism (9), the light splitting optical path B of described the first beam splitting prism (2) arranges the 4th beam splitting prism (10), the light splitting optical path E of the 4th beam splitting prism (10) is provided with right angle speculum (11), the reflected light of right angle speculum (11) enters the 3rd beam splitting prism (9), and the light splitting optical path G of the 3rd beam splitting prism (9) is provided with the 2nd described photoelectric receiving arrangement (12).
5. the displacement measurement method based on the interference of light according to claim 4, it is characterized in that: described the first beam splitting prism (2) comprises prism square I (201) and prism square II (202), and the inclined-plane of prism square (201) and prism square (202) is bonded together; The 2nd described beam splitting prism (3) comprises prism square III (301) and prism square IV (302), the inclined-plane of prism square III (301) and prism square IV (302) is bonded together, and prism square III (301) is parallel with the relative right-angle surface of prism square IV (302); Described prism square III (301) is provided with photoabsorption and diffuse reflector I (304) at its right-angle surface place, and prism square IV (302) is provided with photoabsorption and diffuse reflector II (303) at right-angle surface place.
6. the displacement measurement method based on the interference of light according to claim 4, it is characterised in that: described the first speculum (4) is having reflectance coating near two-mirror (5) side plating shoe; Described two-mirror (5) is having reflectance coating near the first speculum (4) side plating shoe.
7. the displacement measurement method based on the interference of light according to claim 6, it is characterised in that: the spectral width of described laser beam emitting device (1) is λ0～λn;Described the first speculum (4) is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflectivity be 90～99%; Two-mirror (5) is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflectivity be 90～99%.
8. the displacement measurement method based on the interference of light according to claim 7, it is characterised in that: described the first photoelectric receiving arrangement (6) is for wavelength Xi～λjThe energy of light beam is analyzed, and calculates the distance of the first speculum (4) and two-mirror (5); The 2nd described photoelectric receiving arrangement, for different wave length λ0～λnBeam energy analyze, and analyze the wavelength that luminous energy is the strongest.
9. the displacement measurement method based on the interference of light according to claim 4, it is characterized in that: the first described right-angle reflecting prism group (7) comprises one and utilizes inclined-plane that light is produced the prism square V (701) of reflection, N number of standard prism square VI (702) utilizing two right-angle surface light generation to be reflected; The 2nd described right-angle reflecting prism group (8) comprises one and utilizes right-angle surface that light produces the little prism square (802) of reflection, N number of standard prism square VII (801) utilizing two right-angle surface to produce to reflect to light; The right-angle surface area of described little prism square (802) is 0.3～0.8 times of standard prism square VII (801) right-angle surface area, N >=1; The 3rd described beam splitting prism (9) comprises prism square VIII (901) and prism square Ⅸ (902), and the inclined-plane of prism square VIII (901) and prism square Ⅸ (902) is bonded together, and right-angle surface relative to each other is parallel; Described prism square Ⅸ (902) right-angle surface place is provided with photoabsorption and diffuse reflector III (903); The 4th described beam splitting prism (10) is by four pieces of same prism squares Ⅹ (1001) square that right-angle surface gummed forms each other, wherein prism square Ⅹ (1001) inclined-plane is provided with photoabsorption and diffuse reflector the IV (1002), the 4th beam splitting prism (10) moves with tested linear moving object.
10. the displacement measurement method based on the interference of light according to claim 4 to 9 any claim, it is characterized in that: described driving mechanism comprises actuator (1301), bonding mobile block (1302), compensation block (1303), fixed block (1304), described mobile block (1302) and fixed block (1304) are bonded in the two ends of actuator (1301) respectively, fixed block (1304) is bonding with compensation block (1303), gap is left between compensation block (1303) and actuator (1301), compensation block (1303) and mobile block (1302) respectively with the first right-angle reflecting prism group (7), 2nd right-angle reflecting prism group (8) is fixedly connected with.
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