CN205383991U - High accuracy wide range laser displacement measurement device - Google Patents
High accuracy wide range laser displacement measurement device Download PDFInfo
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- CN205383991U CN205383991U CN201620076875.4U CN201620076875U CN205383991U CN 205383991 U CN205383991 U CN 205383991U CN 201620076875 U CN201620076875 U CN 201620076875U CN 205383991 U CN205383991 U CN 205383991U
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Abstract
The utility model provides a high accuracy wide range laser displacement measurement device, relates to a displacement measurement device, sets up a beam splitting Prism in the light path of laser emission device, sets up the 2nd beam splitting Prism on a beam splitting Prism's the beam split light path A, is equipped with optical resonator, first photoelectricity receiving arrangement on the 2nd beam splitting Prism's the beam split light path C, set up first, two right angle reflecting prism group on the beam split light path D, the one end of this reflecting prism group is connected with first, two speculums, and the other end is connected with the driver, and its reverberation is got back to the 2nd beam splitting Prism and is formed beam split light path F, is equipped with the 3rd beam splitting Prism on the beam split light path F, setting up fourth beam splitting Prism on the beam split light path B, setting up the corner cube mirror on fourth beam splitting Prism's the beam split light path E, its reverberation gets into the 3rd beam splitting Prism, sets up second photoelectricity receiving arrangement on the 3rd beam splitting Prism's the beam split light path G. The utility model discloses a measurement accuracy is high, and the range is big, can follow the nm level and stride across the level to m, still can improve the response time of system greatly.
Description
Technical field
This utility model relates to a kind of displacement measuring device, particularly a kind of high precision and large measuring range laser displacement measurement device.
Background technology
In the analysis process such as Precision Machinery Design and material development, the displacement of parts, vibration amplitude and frequency of vibration, deformation, material the collection of the data such as thermal coefficient of expansion become the key of analysis.And existing displacement measurement system, it being typically all precision height then range short, greatly then precision is low for range, and Waveform Matching its precision good is high but the long low-response of operation time, and response is fast, and then precision is low, it is impossible to meet the needs of analysis of modernization.
Utility model content
The technical problems to be solved in the utility model is: provide a kind of precision height, range is big and responds fast high precision and large measuring range laser displacement measurement device.
The technical scheme solving above-mentioned technical problem is: a kind of high precision and large measuring range laser displacement measurement device, including laser beam emitting device, the first Amici prism, the second Amici prism, the 3rd Amici prism, the 4th Amici prism, the first reflecting mirror, the second reflecting mirror, the first right-angle reflecting prism group, the second right-angle reflecting prism group, the first photoelectric receiving arrangement, the second photoelectric receiving arrangement, driver；Wherein:
Arranging the first Amici prism on the laser optical path that described laser beam emitting device is launched, the light splitting optical path of the first Amici prism includes light splitting optical path A, light splitting optical path B；Arranging the second Amici prism on described light splitting optical path A, the light splitting optical path of the second Amici prism includes light splitting optical path C, light splitting optical path D；Described light splitting optical path C is provided with optical resonator, and this optical resonator is made up of the first reflecting mirror, the second reflecting mirror；The first described photoelectric receiving arrangement it is provided with after optical resonator；The light splitting optical path D of the second Amici prism is provided with described the first right-angle reflecting prism group, the second right-angle reflecting prism group, first right-angle reflecting prism group, one end and first reflecting mirror of the second right-angle reflecting prism group, the second reflecting mirror is fixing is connected, first right-angle reflecting prism group, the second right-angle reflecting prism group the other end be connected with driver, first right-angle reflecting prism group, the second right-angle reflecting prism group reflection light retroeflection to second Amici prism formed light splitting optical path F, the light splitting optical path F of the second Amici prism is provided with the 3rd described Amici prism；The light splitting optical path B of the first described Amici prism arranges the 4th Amici prism, the light splitting optical path E of the 4th Amici prism is provided with corner cube mirror, the reflection light of corner cube mirror enters the 3rd Amici prism, and the light splitting optical path G of the 3rd Amici prism is provided with the second described photoelectric receiving arrangement；Described driver includes actuator, bonding mobile block, compensation block, fixed block, described mobile block and fixed block are bonded in the two ends of actuator respectively, fixed block is bonding with compensation block, leaving gap between compensation block and actuator, compensation block is fixed with the first right-angle reflecting prism group, the second right-angle reflecting prism group respectively with mobile block and is connected.
Further technical scheme of the present utility model is: the first described Amici prism includes corner cube prism I and corner cube prism II, and the inclined-plane of corner cube prism I and corner cube prism II is bonded together；The second described Amici prism includes corner cube prism III and corner cube prism IV, and the inclined-plane of corner cube prism III and corner cube prism IV is bonded together, and corner cube prism III right-angle surface relative with corner cube prism IV is parallel.
Further technical scheme of the present utility model is: described corner cube prism III is provided with light and absorbs and diffuse-reflectance layer I at its right-angle surface place, and corner cube prism IV is provided with light and absorbs and diffuse-reflectance layer II at right-angle surface place.
Further technical scheme of the present utility model is: the first described reflecting mirror is having reflectance coating near the second reflecting mirror side plating shoe；The second described reflecting mirror is having reflectance coating near the first reflecting mirror side plating shoe.
Further technical scheme of the present utility model is: the spectral width of described laser beam emitting device is λ0～λn；The first described reflecting mirror is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflection be 90～99%；The second described reflecting mirror is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflection be 90～99%.
Further technical scheme of the present utility model is: the first described photoelectric receiving arrangement is for wavelength Xi～λjThe energy of light beam is analyzed, and calculates the first reflecting mirror and the distance of the second reflecting mirror；The second described photoelectric receiving arrangement, for different wave length λ0～λnBeam energy be analyzed, and analyze the wavelength that light energy is the strongest.
Further technical scheme of the present utility model is: the first described right-angle reflecting prism group includes one and utilizes inclined-plane that light produces the corner cube prism V of reflection, multiple standard straight angle prisms VI utilizing two right-angle surface that light generation is reflected；The second described right-angle reflecting prism group includes one and utilizes right-angle surface that light produces the little corner cube prism of reflection, multiple standard straight angle prism VII utilizing two right-angle surface to produce to reflect to light.
Further technical scheme of the present utility model is: the right-angle surface area of described little corner cube prism is 0.3～0.8 times of standard straight angle prism VII right-angle surface area.
Further technical scheme of the present utility model is: the 3rd described Amici prism includes corner cube prism VIII and corner cube prism Ⅸ, and the inclined-plane of corner cube prism VIII and corner cube prism Ⅸ is bonded together, and right-angle surface relative to each other is parallel；Described corner cube prism Ⅸ right-angle surface place is provided with light and absorbs and diffuse-reflectance layer III.
Further technical scheme of the present utility model is: the 4th described Amici prism is by corner cube prism Ⅹ square that right-angle surface gluing forms each other four pieces same, wherein corner cube prism Ⅹ inclined-plane is provided with light absorption and diffuse-reflectance layer IV, and the 4th Amici prism moves with tested linear moving object.
Owing to adopting said structure, the high precision and large measuring range laser displacement measurement device of this utility model compared with prior art, has the advantages that
1. can realize the accurate measurement to displacement:
Owing to this utility model includes laser beam emitting device, the first Amici prism, the second Amici prism, the 3rd Amici prism, the 4th Amici prism, the first reflecting mirror, the second reflecting mirror, the first right-angle reflecting prism group, the second right-angle reflecting prism group, the first photoelectric receiving arrangement, the second photoelectric receiving arrangement, driver.When measured piece does not move, Amici prism group contacts with measured piece, after system is opened, driver starts, along optical path direction high frequency telescopic variation, to make the first reflecting mirror and the first right-angle reflecting prism group produce change relative to the distance between the second reflecting mirror and the first right-angle reflecting prism group.After the light beam that laser beam emitting device is launched is separated by the first Amici prism, it is divided into measuring beam a and scanning light beam b, measuring beam a and scanning light beam b finally becomes light beam g and light beam j respectively through a series of propagation, when the light path that light beam g and light beam j finally arrives the second photoelectric receiving arrangement is suitable, make the second photoelectric receiving arrangement be shown as light beam g and light beam j and produce the most intensity values of interference light energy, all spectrum lambda that namely laser beam emitting device sends0～λnLight energy be all the strongest, now record the distance of the first reflecting mirror that the first photoelectric receiving arrangement provides, the second reflecting mirror；When the 4th Amici prism with testee along the scanning light beam b direction of propagation displacement x time, driver continuous high frequency stretches, the laser that laser beam emitting device can be made a moment to send two-beam line after the first Amici prism separates always is had finally to arrive the equivalent optical path of the second photoelectric receiving arrangement, make the second photoelectric receiving arrangement be shown as light beam g and light beam j and produce the most intensity values of interference light energy, record the first reflecting mirror that now the first photoelectric receiving arrangement provides, the second reflecting mirror distance, measured object displacement can be calculated by change of cavity length.Therefore, this utility model produces displacement from the first beginning and end and starts working, until measured piece straight-line displacement stops, measuring measured piece displacement, thus the accurate measurement to displacement can be realized, it is also possible to measure the speed change in the amplitude and frequency, displacement process vibrated.
2. precision is high:
This utility model utilizes separation light wave amplitude approach that light beam is uniformly divided into two bundles, when two light beams are when reaching interference condition, and the equivalent optical path of process, interference energy can reach extreme value, utilize this principle, when the light path (sending to receptor reception from light source) of light beam (measuring beam a) is along with the velocity variations that measured piece is relatively slow, light path alternate faster (frequency is constant) of another light beam (scanning light beam b), always has the equivalent optical path making measuring beam a and scanning light beam b a moment.
In this utility model, the light path of measuring beam a is: light beam sends after the first Amici prism from laser beam emitting device, it is divided into measuring beam a to start through the second Amici prism, the first right-angle reflecting prism group, the second right-angle reflecting prism group, the 3rd Amici prism etc., finally to the light path that the second photoelectric receiving arrangement is passed.
The light path of scanning light beam b is: light beam sends after the first Amici prism from laser beam emitting device, is divided into scanning light beam b to start through the 4th Amici prism group, corner cube mirror, the 3rd Amici prism, finally to the light path that the second photoelectric receiving arrangement is passed.
When measured piece is when position O1, the light path of measuring beam a is h1, the light path of scanning light beam b is at h1±△h1Change, when measuring beam and scanning light beam light path are all h, it is the strongest that two-beam produces interference energy, is detected by the second photoelectric receiving arrangement and analyzes, the light path of writing scan light beam, and record drives the position of scanning light beam parts.
When measured piece is when position O2, measuring beam light path becomes h1+△h1Scanning light beam light path continues repeatedly to change, when light path and the light path of measuring beam of scanning light beam are again equal, two-beam produces interference energy and again reaches the strongest, it is received by the receiver and the light path of writing scan light beam again, the change in displacement of measured piece can be drawn by twice, front and back writing scan light beam retardation values.If utilizing wide spectrum (λ0～λn), then each wavelength energy is the light path of two-beam when being all interference maximum is equal.Therefore, the more short (λ of wavelength of the present utility model0More little), the more wide (λ of spectrum0～λnScope is more big), then certainty of measurement is more high.
Additionally, this utility model is insensitive to light polarization, receiving optical band wavelength the shortest, precision comparison is stable, thus further increasing certainty of measurement.
3. range is big:
This utility model is the characteristic utilizing optical resonator (Fabry Perot chamber) that wavelength selectivity is passed through, by the analysis to transmitted light wave length, it is possible to obtain chamber long.When change of cavity length, transmission peak wavelength produces change therewith, and receptor detects and analyze transmission peak wavelength can draw change of cavity length amount.
Spectral region λ can be received in resonator cavityi～λj) more narrow, the more long (λ of wavelengthiMore big), the long h ' of its minimum cavity is more long, chamber long alterable scope △ h(△ h≤5h ') more big, thus it is more big to measure scope, the standard straight angle prism quantity additionally increased in the first right-angle reflecting prism group and the second right-angle reflecting prism group can increase measurement scope.Therefore, measurement scope of the present utility model can be formulated as requested, it measures range L: 0～10 (2N+1) h ', in formula, N is the number of respective standard straight angle prism, certainty of measurement δ: 0.1* λ in the first right-angle reflecting prism group and the second right-angle reflecting prism group0, its range is big, crosses over magnitude greatly, can cross over to m level from nm level.
4. response is fast:
This utility model adopts folding light path method to make its compact conformation, not by light wave spectral pattern analysis only needs the maximum wavelength value of analysing energy, therefore avoids the error of appearance during Software match waveform, reduces operand simultaneously, be greatly improved the response time of system.
Below, in conjunction with the accompanying drawings and embodiments the technical characteristic of the high precision and large measuring range laser displacement measurement device of this utility model is further described.
Accompanying drawing explanation
Fig. 1: the structure principle chart of the high precision and large measuring range laser displacement measurement device of this utility model,
The structural representation of the Fig. 2: the first Amici prism,
The structural representation of the Fig. 3: the second Amici prism,
The structural representation of the Fig. 4: the first reflecting mirror,
The structural representation of the Fig. 5: the second reflecting mirror,
The structural representation of the Fig. 6: the first right-angle reflecting prism group,
The structural representation of the Fig. 7: the second right-angle reflecting prism group,
The structural representation of the Fig. 8: the three Amici prism,
The structural representation of the Fig. 9: the four Amici prism,
Figure 10: the structural representation of driver,
Figure 11: the energy wavelength graph of initial measurement,
Figure 12: the loss wavelength graph of initial measurement,
Figure 13: measured piece produces the energy wavelength graph of displacement,
Figure 14: measured piece produces the loss wavelength graph of displacement,
Figure 15: resonator cavity transmission pumping energy wavelengths figure,
Figure 16: chamber length increases contrast Local map before and after 1um transmitted light wave length,
Figure 17: chamber length increases the long previous peaks of 1um transmitted light wave and catches datagram,
Figure 18: after chamber length increases 1um transmitted light wave length, peak value catches datagram,
Figure 19: transmission pumping energy wavelengths scattergram when resonator length is 6h '=46.8um.
In above-mentioned accompanying drawing, each description of symbols is as follows:
1-laser beam emitting device,
2-the first Amici prism, 201-corner cube prism I, 202-corner cube prism II,
3-the second Amici prism, 301-corner cube prism III, 302-corner cube prism IV,
303-light absorbs and diffuse-reflectance layer II, and 304-light absorbs and diffuse-reflectance layer I,
4-the first reflecting mirror, 5-the second reflecting mirror, 6-the first photoelectric receiving arrangement,
7-the first right-angle reflecting prism group, 701-corner cube prism V, 702-corner cube prism VI,
8-the second right-angle reflecting prism group, 801-corner cube prism VII, the little corner cube prism of 802-,
9-the 3rd Amici prism, 901-corner cube prism VIII, 902-corner cube prism Ⅸ, 903-light absorbs and diffuse-reflectance layer III,
10-the 4th Amici prism, 1001-corner cube prism Ⅹ, 1002-light absorbs and diffuse-reflectance layer IV,
11-corner cube mirror, 12-the second photoelectric receiving arrangement,
13-driver, 1301-actuator, the bonding mobile block of 1302-, 1303-compensation block, 1304-fixed block.
Detailed description of the invention
Embodiment one:
A kind of high precision and large measuring range laser displacement measurement device, including laser beam emitting device the 1, first Amici prism the 2, second Amici prism the 3, the 3rd Amici prism the 9, the 4th Amici prism the 10, first reflecting mirror the 4, second reflecting mirror the 5, first right-angle reflecting prism group the 7, second right-angle reflecting prism group the 8, first photoelectric receiving arrangement the 6, second photoelectric receiving arrangement 12, driver 13；
Arranging the first Amici prism 2 on the laser optical path that described laser beam emitting device 1 is launched, the light splitting optical path of the first Amici prism 2 includes light splitting optical path A, light splitting optical path B；Arranging the second Amici prism 3 on described light splitting optical path A, the light splitting optical path of the second Amici prism 3 includes light splitting optical path C, light splitting optical path D；Described light splitting optical path C is provided with optical resonator, and this optical resonator is made up of first reflecting mirror the 4, second reflecting mirror 5；The first described photoelectric receiving arrangement 6 it is provided with after optical resonator；The light splitting optical path D of the second Amici prism 3 is provided with the first described right-angle reflecting prism group 7, second right-angle reflecting prism group 8, first right-angle reflecting prism group 7, one end of second right-angle reflecting prism group 8 and the first reflecting mirror 4, second reflecting mirror 5 is fixing to be connected, first right-angle reflecting prism group 7, the other end of the second right-angle reflecting prism group 8 is connected with driver 13, first right-angle reflecting prism group 7, the reflection light retroeflection of the second right-angle reflecting prism group 8 forms light splitting optical path F to the second Amici prism 3, the light splitting optical path F of the second Amici prism 3 is provided with the 3rd described Amici prism 9；The light splitting optical path B of the first described Amici prism 2 arranges the 4th Amici prism 10, the light splitting optical path e of the 4th Amici prism 10 is provided with corner cube mirror 11, the reflection light of corner cube mirror 11 enters the 3rd Amici prism 9, and the light splitting optical path G of the 3rd Amici prism 9 is provided with the second described photoelectric receiving arrangement 12.
Described laser beam emitting device 1 can send the wide spectral laser of certain light energy, and its spectral width is λ0～λn, λ0=0.1um, λn=2um。
The first described Amici prism 2 includes corner cube prism I 201 and corner cube prism II 202, and the inclined-plane of corner cube prism I 201 and corner cube prism II 202 is bonded together, and ensures that right-angle surface relative to each other is parallel.The wide spectral laser that laser beam emitting device 1 is sent by this first Amici prism 2 is divided into two light velocity measurement light beam a and scanning light beam b, and the energy of two light beams is equal.
The second described Amici prism 3 includes corner cube prism III 301 and corner cube prism IV 302, and the inclined-plane of corner cube prism III 301 and corner cube prism IV 302 is bonded together, and corner cube prism III 301 right-angle surface relative with corner cube prism IV 302 is parallel.Measuring beam a is divided into light beam c and light beam d by this second Amici prism 3, and the energy of light beam c and light beam d is equal.
Described corner cube prism III 301 is provided with light and absorbs and diffuse-reflectance layer I 304 at its right-angle surface place, light absorbs and light beam c ' is carried out absorbing and diffuse-reflectance (the optical resonator generation that light beam c ' is made up of the first reflecting mirror 4 and the second reflecting mirror 5 by diffuse-reflectance layer I 304 under the premise not blocking light beam f, occur after separating through the second Amici prism 3), corner cube prism IV 302 posts light and absorbs and diffuse-reflectance layer II 303 at right-angle surface place, light absorbs and light beam f ' is carried out absorbing and diffuse-reflectance (light beam f ' occurs after being separated by the second Amici prism 3 after multiple reflections by light beam d) by diffuse-reflectance layer II 303 under the premise not blocking measuring beam a.
The first described reflecting mirror 4 is having reflectance coating near the second reflecting mirror 5 side plating shoe；This first reflecting mirror 4 is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflection be 90～99%.
The second described reflecting mirror 5 is having reflectance coating near the first reflecting mirror 4 side plating shoe, and this second reflecting mirror 5 is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflection be 90～99%, described λi～λjIt is 0.2～0.4um.
The first described photoelectric receiving arrangement 6 is for wavelength Xi～λjThe energy of light beam is analyzed, and calculates the distance of the first reflecting mirror 4 and the second reflecting mirror 5, to wavelength Xi～λjIt is not analyzed with outer light beam and calculates；
The first described right-angle reflecting prism group 7 includes one and utilizes inclined-plane that light produces the corner cube prism V 701 of reflection, N number of standard straight angle prism VI 702 utilizing two right-angle surface to produce to reflect to light, light beam d is carried out multiple reflections with right-angle reflecting prism group 8 by this first right-angle reflecting prism group 7 simultaneously, and in different positions, light beam d is reflected back the second Amici prism 3.
The second described right-angle reflecting prism group 8 includes one and utilizes right-angle surface that light produces the little corner cube prism 802 of reflection, N number of standard straight angle prism VII 801 utilizing two right-angle surface to produce to reflect to light.The right-angle surface area of described little corner cube prism 802 is 0.5 times of standard straight angle prism VII 801 right-angle surface area.Light beam d is carried out multiple reflections with right-angle reflecting prism group 7 by this second right-angle reflecting prism group 8 simultaneously, and in different positions, light beam d is reflected back the second Amici prism 3；Above-mentioned N >=1.
The 3rd described Amici prism 9 includes corner cube prism VIII 901 and corner cube prism Ⅸ 902, and the inclined-plane of corner cube prism VIII 901 and corner cube prism Ⅸ 902 is bonded together, and right-angle surface relative to each other is parallel；Described corner cube prism Ⅸ 902 right-angle surface place posts light and absorbs and diffuse-reflectance layer III 903.3rd Amici prism 9 is divided into two light beam g overlaped and light beam j to entering its interior light beam f and light beam e ', and the energy of light beam g and light beam j is equal；Light absorbs and III 903 couples of light beam e ' of diffuse-reflectance layer carry out absorbing and diffuse-reflectance (light beam e ' is occurred after separating by light beam e entrance the 3rd Amici prism 9 after corner cube mirror 11 right-angle surface reflects)；
The 4th described Amici prism 10 is by corner cube prism Ⅹ 1001 square that right-angle surface gluing forms each other four pieces same, wherein corner cube prism Ⅹ 1001 inclined-plane is provided with light absorption and diffuse-reflectance layer IV 1002, absorbing scanning light beam b respectively and through the transmission of the interface generation within Amici prism group 10 and reflect light beam, the 4th Amici prism 10 is with tested linear moving object uniform movement.
Described corner cube mirror 11, can be totally reflected light beam at inclined-plane place.
The second described photoelectric receiving arrangement 12, for different wave length λ0～λnBeam energy be analyzed, and analyze the wavelength that light energy is the strongest.
Described driver 13 includes actuator 1301, bonding mobile block 1302, compensation block 1303, fixed block 1304, described mobile block 1302 and fixed block 1304 are bonded in the two ends of actuator 1301 respectively, fixed block 1304 is bonding with compensation block 1303, leaving gap between compensation block 1303 and actuator 1301, compensation block 1303 is fixing with first right-angle reflecting prism group the 7, second right-angle reflecting prism group 8 respectively with mobile block 1302 to be connected.
This driver 13 is extending when energising, original length can be returned to during electric discharge, the first reflecting mirror 4 can not be made during contraction to contact with the second reflecting mirror 5 or collide, the first right-angle reflecting prism group 7 can not be made to contact with the second right-angle reflecting prism group 8 or collide, the left end of driver 13 is fixed, when actuator 1301 high frequency is flexible, rocker piece 1302 drive the second reflecting mirror 5 and the second right-angle reflecting prism group 8 continuous high frequency along light beam c direction of propagation side-to-side movement, the stroke △ h of actuator 1301 is less than 5 times of the long h ' of minimum cavity, i.e. △ h≤5h ', distance between first reflecting mirror 4 and the second reflecting mirror 5 is equal with the distance between the first right-angle reflecting prism group 7 and the second right-angle reflecting prism group 8, it is called the long h in chamber, h have to be larger than the long h ' of minimum cavity.And first reflecting mirror 4 and the first right-angle reflecting prism group 7 do not move for fixing group, the second reflecting mirror 5 and the second right-angle reflecting prism group 8 move left and right along light beam c direction for synchronizing moving group.
The long h ' of minimum cavity: for ensureing that the first electricity receives the broad-spectrum beam different wave length (λ that laser beam emitting device 1 is launched by device 60～λn) in scope, can record at least 2 wavelength light intensity during scanning is maximum, by the length of these 2 wavelength and between the chamber that goes out now of spectral line distance inverse long, therefore only distance h between the first reflecting mirror 4 and the second reflecting mirror 5 h ' long more than minimum cavity time can measure。
The long h in optical resonator chamber, long for ensureing measurement optical resonator chamber, and ensure first photoelectric receiving arrangement 6 scanning recognition to light beam, the long h in chamber ranges for h '≤h≤1.5h '.
This utility model is the characteristic utilizing optical resonator (Fabry Perot chamber) that wavelength selectivity is passed through, by the analysis to transmitted light wave length, it is possible to obtain chamber long.When change of cavity length, transmission peak wavelength produces change therewith, and receptor detects and analyze transmission peak wavelength can draw change of cavity length amount.
Spectral region (λ can be received in resonator cavityi～λj) more narrow, the more long (λ of wavelengthiMore big), the long h ' of its minimum cavity is more long, chamber long alterable scope △ h(△ h≤5h ') more big, thus it is more big to measure scope, additionally increase the standard straight angle prism quantity in the first right-angle reflecting prism group 7 and the second right-angle reflecting prism group 8 to increase measurement scope (but too much affecting certainty of measurement, namely resonator cavity displacement accuracy and the product of standard straight angle prism quantity are more than 0.1 times of minimum wavelength λ0).Measurement range L is: 0～10 (2N+1) h ', and in formula, N is the number of respective standard straight angle prism, certainty of measurement δ: 0.1* λ in the first right-angle reflecting prism group and the second right-angle reflecting prism group0, range is big, crosses over magnitude greatly, can cross over to m level from nm level.Its principle is as follows:
Assume that light source adopts ultraviolet band (100nm～400nm, λ0=100nm, λn=400nm) spectral region, the relatively slow speed of measured piece produces the time shift measurement of straight line position, therefore has light energy functional expression:
---the energy relative value of interference light, normalization.(the most intense light energy that measuring beam a and scanning light beam b two-beam superposition can reach after interfering is maximum, most low light level energy be 0)
N-medium refraction index, vacuum or gas intermediate value are about 1；
h1Optical path difference between-scanning light beam A and measuring beam B, um；
△h1The equation of light that the displacement of-measured object produces, um；
λ-wavelength, um；
When optical path difference between scanning light beam a with measuring beam b is equal, i.e. h1=0, energy wavelength image is shown in Figure 11.It can be seen from fig. 11 that when measured piece does not produce displacement, when optical path difference between scanning light beam a with measuring beam b is equal, the light energy between wavelength 100nm～400nm is all the maximum of interference energy.
If test after using light power meter zero, then see its pad value (loss value) after light energy normalization
---the energy loss value of interference light, DB；
Loss wavelength image is shown in Figure 12.
Measuring beam b light path is made to produce small light path variable △ h when measured piece produces displacement x1(by systemic presupposition △ h during=0.01um=10nm1=0.1λ0), now when scanning light beam a interferes with initial light path again, energy wavelength image is shown in Figure 13.It can be observed from fig. 13 that shortwave strong point, especially at wavelength 0.1um(=100nm) place, interference light energy not up to maximum, only about 90%.
If using light power meter test, obtaining loss-wavelength graph picture is shown in Figure 14.
Common power meter precision is at-0.1DB, therefore it is apparent that measuring beam a is different with the light path of scanning light beam b, therefore measures displacement accuracy higher than 0.1 λ0.And λ0More little certainty of measurement is more high.
When the equivalent optical path of measuring beam a and scanning light beam b, during such as Figure 11 and Figure 12 situation, the second photoelectric receiving arrangement 12 sends signal, is now recorded chamber length and the time of optical resonator by the first photoelectric receiving arrangement 6.When object moves, measuring beam b light path is made to produce minor variations, and very fast reciprocating driver 13 makes the light path light path equal to scanning light beam b of measuring beam a again, re-record chamber length and the time of now optical resonator, by cross-reference, the displacement of object and time dependent situation can be drawn.
When light beam c(sets wavelength as 100nm～400nm) enter in the optical resonator being made up of the first reflecting mirror 4 and the second reflecting mirror 5, and optical resonator selectivity is through comparatively narrow wave-length coverage (350～400nm).
Light wave measurement precision 0.04pm now, system takes certainty of measurement 1pm, and when namely maximum pumping energy wavelengths produces to change more than 1pm, the first photoelectric receiving arrangement 6 can record and analyze.
Optical resonator transmission light energy functional expression:
Resonator cavity transmission light energy；
H resonator long value, um；
The long changing value of △ h resonator, um；
L optical wavelength, um；
R resonator cavity reflectance；
N medium refraction index, vacuum or gas intermediate value are about 1.
With the requirement of the long h ' of minimum cavity, the wave-length coverage (λ of selective transmission light wavei～λj) after can draw:
Assuming that resonator cavity selects through wavelength is 380nm～400nm(λi=380nm, λj=400), then h '=7.8um, is resonator length (h '=h) according to minimum cavity length, and transmission pumping energy wavelengths image is shown in Figure 15.
Note: if chamber length is at h '≤h≤1.5h ', can pass through adjacent transmissive optical wavelength (λ1, λ2) draw chamber long value.
When chamber length changes value (△ h), transmitted light wave length produces change, it is assumed that chamber length increases 1nm, then before and after, contrast transmission peak wavelength shifted images is as shown in figure 16.Its image peak value is caught to obtain the spectral line P1 before change and the peak wavelength of spectral line P2 after change respectively shown in image Figure 17, Figure 18.
Can being drawn when Resonant Intake System increases 1um by Figure 17, Figure 18, transmission center wavelength of light drift 0.00005um=0.05nm=50pm, much larger than the certainty of measurement 1pm that system takes, system is enough to record.
As △ h=5h ', now chamber length maximum the h=h '+△ h=6h '=6 × 7.8um=46.8um set by system, the energy-wavelength graph picture through resonator cavity is shown in Figure 19.
Spacing now by adjacent peaks centre wavelength is described as 0.001um=1nm=1000pm > 1pm,
Note: Resonant Intake System still can continue to expand in theory, but is difficult to ensure that owing to resonator cavity is long in reality that two plane mirror reflectings surface are parallel, and therefore system is gone bail for and kept value (△ h=5h ').
Change of cavity length value is △ h=5h ', and therefore driver 13 stretch value should be equal to 5h ', and driver synchronizes to drive the second right-angle reflecting prism group 8 to move relative first right-angle reflecting prism group 7 change in displacement of 5h ', and therefore range L is:
The total quantity of 2N standard straight angle prism VI 702 and standard straight angle prism VII 801,
H ' resonator cavity minimum cavity is long,
Being obtained by range formula, when the quantity of N increases, systematic survey range L equal proportion increases, and minimum cavity long value h ' more big then measurement range L is more big.
Measuring principle of the present utility model:
When light launched by laser beam emitting device 1 by the first Amici prism 2 separately after, it is divided into measuring beam a and scanning light beam b, wherein measuring beam a is divided into light beam c and light beam d after the second Amici prism 3, light beam c enters the optical resonator being made up of the first reflecting mirror 4 and the second reflecting mirror 5, light beam c is transmitted to the first photoelectric receiving arrangement 6 after resonance multiple reflections, draws the distance between the first reflecting mirror 4 and the second reflecting mirror 5.Light beam d enters the first right-angle reflecting prism group 7 and the second right-angle reflecting prism group 8, becomes light beam f after multiple reflections after returning to the second Amici prism 3, and light beam f becomes light beam g after the 3rd Amici prism 9.Scanning light beam b becomes light beam e after the 4th Amici prism group 10, light beam e enters back into the 3rd Amici prism 9 after corner cube mirror 11 and becomes light beam j, wavelength and the center light energy of the interference illustration of now light beam g and light beam j generation are received by the second photoelectric receiving arrangement 12 and are processed, and analyze and draw the variation diagram of light energy.
1., when measured piece does not move, the 4th Amici prism group 10 and measured piece joint, when system is not opened, the second reflecting mirror 5 and the second right-angle reflecting prism group 8 are h relative to the distance between the first reflecting mirror 4 and the first corner reflection prism group 7.After system is opened, driver 13 starts, along optical path direction high frequency telescopic variation, to make the second reflecting mirror 5 and the second right-angle reflecting prism group 8 produce the change of △ h relative to the distance between the first reflecting mirror 4 and the first right-angle reflecting prism group 7, and namely distance becomes h+ △ h.
When light launched by laser beam emitting device 1 by the first Amici prism 2 separately after, it is divided into measuring beam a and scanning light beam b, measuring beam a, scanning light beam b when light path that a series of propagation finally become light beam g and light beam j process respectively is suitable, all spectrum lambda that laser beam emitting device 1 sends0～λnBeing shown as light beam g and light beam j at the second photoelectric receiving arrangement 12 and produce the most intensity values of interference light energy, namely the light energy of all wavelengths be all the most by force, now records the distance h of the first reflecting mirror 4 that the first photoelectric receiving arrangement 6 provides and the second reflecting mirror 5.
2. when the 4th Amici prism group 10 with testee along the scanning light beam b direction of propagation displacement x time, driver 13 continuous high frequency stretches, the laser sent by laser beam emitting device 12 bundle light after the first Amici prism 2 separates can be made finally to arrive the equivalent optical path of the second photoelectric receiving arrangement 12, make the second photoelectric receiving arrangement 12 be shown as light beam g and light beam j and produce the most intensity values of interference light energy, the first distance h+△ h penetrating mirror 4 and the second reflecting mirror 5 that record now the first photoelectric receiving arrangement 6 provides, now 2x=2 × (2N+1) × △ h, N is the number of respective standard straight angle prism in the first right-angle reflecting prism group and the second right-angle reflecting prism group.Measured object displacement x is calculated by change of cavity length △ h.
Claims (10)
1. a high precision and large measuring range laser displacement measurement device, it is characterised in that: include laser beam emitting device (1), the first Amici prism (2), the second Amici prism (3), the 3rd Amici prism (9), the 4th Amici prism (10), the first reflecting mirror (4), the second reflecting mirror (5), the first right-angle reflecting prism group (7), the second right-angle reflecting prism group (8), the first photoelectric receiving arrangement (6), the second photoelectric receiving arrangement (12), driver (13)；Wherein:
Arranging the first Amici prism (2) on the laser optical path that described laser beam emitting device (1) is launched, the light splitting optical path of the first Amici prism (2) includes light splitting optical path A, light splitting optical path B；Arranging the second Amici prism (3) on described light splitting optical path A, the light splitting optical path of the second Amici prism (3) includes light splitting optical path C, light splitting optical path D；Described light splitting optical path C is provided with optical resonator, and this optical resonator is made up of the first reflecting mirror (4), the second reflecting mirror (5)；Described the first photoelectric receiving arrangement (6) it is provided with after optical resonator；The light splitting optical path D of the second Amici prism (3) is provided with the first described right-angle reflecting prism group (7), second right-angle reflecting prism group (8), first right-angle reflecting prism group (7), one end of second right-angle reflecting prism group (8) and the first reflecting mirror (4), second reflecting mirror (5) is fixing to be connected, first right-angle reflecting prism group (7), the other end of the second right-angle reflecting prism group (8) is connected with driver (13), first right-angle reflecting prism group (7), the reflection light retroeflection of the second right-angle reflecting prism group (8) forms light splitting optical path F to the second Amici prism (3), the light splitting optical path F of the second Amici prism (3) is provided with the 3rd described Amici prism (9)；The light splitting optical path B of described the first Amici prism (2) arranges the 4th Amici prism (10), the light splitting optical path E of the 4th Amici prism (10) is provided with corner cube mirror (11), the reflection light of corner cube mirror (11) enters the 3rd Amici prism (9), and the light splitting optical path G of the 3rd Amici prism (9) is provided with described the second photoelectric receiving arrangement (12)；Described driver (13) includes actuator (1301), bonding mobile block (1302), compensation block (1303), fixed block (1304), described mobile block (1302) and fixed block (1304) are bonded in the two ends of actuator (1301) respectively, fixed block (1304) is bonding with compensation block (1303), leaving gap between compensation block (1303) and actuator (1301), compensation block (1303) is fixed with the first right-angle reflecting prism group (7), the second right-angle reflecting prism group (8) respectively with mobile block (1302) and is connected.
2. high precision and large measuring range laser displacement measurement device according to claim 1, it is characterized in that: described the first Amici prism (2) includes corner cube prism I (201) and corner cube prism II (202), and the inclined-plane of corner cube prism I (201) and corner cube prism II (202) is bonded together；Described the second Amici prism (3) includes corner cube prism III (301) and corner cube prism IV (302), the inclined-plane of corner cube prism III (301) and corner cube prism IV (302) is bonded together, and corner cube prism III (301) right-angle surface relative with corner cube prism IV (302) is parallel.
3. high precision and large measuring range laser displacement measurement device according to claim 2, it is characterized in that: described corner cube prism III (301) is provided with light and absorbs and diffuse-reflectance layer I (304) at its right-angle surface place, corner cube prism IV (302) is provided with light and absorbs and diffuse-reflectance layer II (303) at right-angle surface place.
4. high precision and large measuring range laser displacement measurement device according to claim 1, it is characterised in that: described the first reflecting mirror (4) is having reflectance coating near the second reflecting mirror (5) side plating shoe；Described the second reflecting mirror (5) is having reflectance coating near the first reflecting mirror (4) side plating shoe.
5. high precision and large measuring range laser displacement measurement device according to claim 4, it is characterised in that: the spectral width of described laser beam emitting device (1) is λ0～λn；Described the first reflecting mirror (4) is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflection be 90～99%；Described the second reflecting mirror (5) is at spectral width λ0～λnLight beam in spectral width λi～λjWavelength reflection be 90～99%.
6. high precision and large measuring range laser displacement measurement device according to claim 5, it is characterised in that: described the first photoelectric receiving arrangement (6) is for wavelength Xi～λjThe energy of light beam is analyzed, and calculates the first reflecting mirror (4) and the distance of the second reflecting mirror (5)；The second described photoelectric receiving arrangement, for different wave length λ0～λnBeam energy be analyzed, and analyze the wavelength that light energy is the strongest.
7. high precision and large measuring range laser displacement measurement device according to claim 1, it is characterized in that: the first described right-angle reflecting prism group (7) includes one and utilizes inclined-plane that light produces the corner cube prism V (701) of reflection, multiple standard straight angle prisms VI (702) utilizing two right-angle surface that light generation is reflected；The second described right-angle reflecting prism group (8) includes one and utilizes right-angle surface that light produces the little corner cube prism (802) of reflection, multiple standard straight angle prism VII (801) utilizing two right-angle surface to produce to reflect to light.
8. high precision and large measuring range laser displacement measurement device according to claim 7, it is characterised in that: the right-angle surface area of described little corner cube prism (802) is 0.3～0.8 times of standard straight angle prism VII (801) right-angle surface area.
9. high precision and large measuring range laser displacement measurement device according to claim 1, it is characterized in that: the 3rd described Amici prism (9) includes corner cube prism VIII (901) and corner cube prism Ⅸ (902), the inclined-plane of corner cube prism VIII (901) and corner cube prism Ⅸ (902) is bonded together, and right-angle surface relative to each other is parallel；Described corner cube prism Ⅸ (902) right-angle surface place is provided with light and absorbs and diffuse-reflectance layer III (903).
10. the high precision and large measuring range laser displacement measurement device according to claim 1 to 9 any claim, it is characterized in that: the 4th described Amici prism (10) is by corner cube prism Ⅹ (1001) square that right-angle surface gluing forms each other four pieces same, wherein corner cube prism Ⅹ (1001) inclined-plane is provided with light absorption and diffuse-reflectance layer IV (1002), and the 4th Amici prism (10) moves with tested linear moving object.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105674888A (en) * | 2016-01-27 | 2016-06-15 | 广西科技大学鹿山学院 | Displacement measuring device based on optical interference |
| CN106644106A (en) * | 2016-12-21 | 2017-05-10 | 北京嘉贺恒德科技有限责任公司 | Optical device for measuring wavelength and control method thereof |
| CN106959074A (en) * | 2017-03-21 | 2017-07-18 | 北京航空航天大学 | It is a kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement |
| CN108662984A (en) * | 2018-07-17 | 2018-10-16 | 北方民族大学 | A kind of precise displacement sensor and its measurement method based on corner cube mirror group |
| CN111578832A (en) * | 2020-04-30 | 2020-08-25 | 南京理工大学 | Short coherent light source interferometer-based long-stroke optical path matching device and experimental method |
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2016
- 2016-01-27 CN CN201620076875.4U patent/CN205383991U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105674888A (en) * | 2016-01-27 | 2016-06-15 | 广西科技大学鹿山学院 | Displacement measuring device based on optical interference |
| CN105674888B (en) * | 2016-01-27 | 2018-07-06 | 广西科技大学鹿山学院 | Displacement measuring device based on the interference of light |
| CN106644106A (en) * | 2016-12-21 | 2017-05-10 | 北京嘉贺恒德科技有限责任公司 | Optical device for measuring wavelength and control method thereof |
| CN106644106B (en) * | 2016-12-21 | 2023-10-10 | 北京嘉贺恒德科技有限责任公司 | Optical device for measuring wavelength and control method thereof |
| CN106959074A (en) * | 2017-03-21 | 2017-07-18 | 北京航空航天大学 | It is a kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement |
| CN108662984A (en) * | 2018-07-17 | 2018-10-16 | 北方民族大学 | A kind of precise displacement sensor and its measurement method based on corner cube mirror group |
| CN111578832A (en) * | 2020-04-30 | 2020-08-25 | 南京理工大学 | Short coherent light source interferometer-based long-stroke optical path matching device and experimental method |
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