CN105467583B - The translation of small range laser scans lens device - Google Patents
The translation of small range laser scans lens device Download PDFInfo
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- CN105467583B CN105467583B CN201510905744.2A CN201510905744A CN105467583B CN 105467583 B CN105467583 B CN 105467583B CN 201510905744 A CN201510905744 A CN 201510905744A CN 105467583 B CN105467583 B CN 105467583B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
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Abstract
The invention discloses a kind of small range laser translation to scan lens device, including case body, X-axis translation stage, Y-axis translation stage, Z axis translation stage and focus lamp, Z axis translation stage is moved up and down on case body, X, Y, Z axis translation stage is into being connected in series, X-axis translation stage is movable to be arranged on Z axis translation stage, Y-axis translation stage is moved left and right on X-axis translation stage, X, Y, X is installed with respectively on Z axis translation stage, Y, Z-mirror, X, Y, Z-mirror respectively with X, Y, Z axis is in 45 degree of angles, X speculums are oppositely arranged with Z-mirror and in same horizontal lines, Y speculums are oppositely arranged with X speculums and in same horizontal lines, focus lamp is horizontally arranged on Y-axis translation stage, focus lamp is located at the underface of Y speculums.The device can avoid the occurrence of pincushion distortion and defocus error, and focused spot size is stable, easy to control, can realize that the laser of small range precisely scans.
Description
Technical field
The present invention relates to laser technology field, more particularly to a kind of small range laser translation scanning lens device.
Background technology
Laser is born in the sixties in last century, and compared with conventional light source, laser has high directivity, brightness high, monochromatic
Property it is good the advantages that, the birth of laser brings huge technological revolution for contemporary optics, at present laser technology industry, agricultural,
The fields such as medical science, business, national defence, scientific research are quickly grown.With the continuous development and application of laser technology, laser is in industrial production
It is middle to play more and more important role, and intersect with Other subjects, generate many high-end technologies, such as the advanced manufacture skill of laser
Art, laser 3D printing etc..Key issue in application of the laser in industrial circle is exactly the control of light path, according to predetermined
The accurate scanning of path implementation laser.
The control implementation of light path has control laser movement, control working table movement and control beam motion.Swash
Several typical cases of light mainly have laser marking, laser display, wherein laser fast shaping and laser demonstration etc., laser marking
The motion for being achieved in that control light beam of light path control, most in laser fast shaping are the fortune for controlling laser
It is dynamic, it is also the motion of control light beam in laser display and laser demonstration, control workpiece motion s are commonly used in scientific experiment, such as swashed
Light punching etc., laser beam is motionless, controls the motion of workpiece, realizes the relative motion of light beam and workpiece.So, it is seen that in light path control
More than comparison in the implementation of system is the motion for controlling light beam, as shown in figure 1, be relatively common scanning galvanometer,
It is to control a kind of structure most in beam motion implementation.
Galvanometer is a kind of small-sized porcelain electric-type deflector, and the rotor deflection of galvanometer drives the deflection of speculum, so as to realize
The motion of light beam, by controlling different deflection angles to realize the scanning track of laser beam.Galvanometer system inertia is small, and response is fast
Speed, control is accurate, but the scanning track of dual galvanometer scanning system as shown in Figure 1 is hyperbola in principle, occurs non-thread
Property distortion, this just necessarily brings scanning track pincushion distortion as shown in Figure 2 occur, it is necessary to is corrected compensation to this distortion.
In addition, the focal plane of galvanometer scanning system is a sphere, light beam reaches the light path of visual field plane difference coordinate points by speculum
Difference, so as to cause focusing error, also it is defocus error, it is necessary to the compensation on algorithm is done to this defocus error and utilizes optics
The combination of element reduces error, makes focal plane into a horizontal plane.In addition, scanning galvanometer can only typically realize that the two dimension of laser is swept
Retouch, to realize that 3-D scanning must then add the motion of the 3rd axle, thus cause the control of galvanometer and the 3rd axle
Device processed is different, it is possible that three axle response speed disunities, difficulty is very on the arithmetic programming in realizing 3-D scanning is realized
Greatly.
In view of it is above-mentioned the defects of, the design people, be actively subject to research and innovation, to found a kind of small range laser translation
Lens device is scanned, makes it with more the value in industry.
The content of the invention
In order to solve the above technical problems, it is an object of the invention to provide one kind can avoid the occurrence of pincushion distortion and defocus
Error, and three axles are driven using linear electric motors, controller driver is unified, and response speed is same, control algolithm programming realization
It is convenient, the small range laser translation scanning lens device that small range laser precisely scans can be realized.
A kind of small range laser translation scanning lens device proposed by the present invention, it is characterised in that：Including case body, X-axis
Translation stage, Y-axis translation stage, Z axis translation stage and focus lamp, the Z axis translation stage are moved up and down on the case body,
The X, Y, Z axis translation stage is into being connected in series, and the X-axis translation stage is movable to be arranged on the Z axis translation stage, the Y
Axle translation stage is moved left and right on the X-axis translation stage, and X, Y, Z are installed with respectively on the X, Y, Z axis translation stage
Speculum, the X, Y, Z-mirror are in 45 degree of angles with X, Y, Z axis respectively, and the X speculums are oppositely arranged with Z-mirror and position
In in same horizontal line, the Y speculums are oppositely arranged with X speculums and in same horizontal lines, and the focus lamp is horizontal
On the Y-axis translation stage, the focus lamp is located at the underface of the Y speculums.
As a further improvement on the present invention, fixed respectively along Z-direction on the left and right sides inwall of the case body
One Z axis slide rail, one Z axis rail slider of installation is moved up and down in the Z axis slide rail.
As a further improvement on the present invention, the Z axis translation stage include Z axis sliding block, Z movable axis, Z motors, shaft coupling,
Crossbeam, power connector plate, Z substrates and Z-mirror support, the Z axis sliding block are fixed on the inwall upper end of the case body
Point, the Z movable axis, which moves up and down, to be positioned in the Z axis sliding block, and the Z motors are arranged on the Z axis sliding block and controlled
The motion of the Z movable axis, the shaft coupling are arranged on the lower end of the Z movable axis, and the crossbeam is fixed on the shaft coupling
Lower end, the crossbeam is parallel with Y-axis, and the power connector plate is two and is fixed on the both ends of the crossbeam vertically respectively,
The power connector plate is fixedly connected with the Z axis rail slider, the Z substrates be fixed on two power connector plates bottom it
Between, the Z-mirror support is fixed in the left-front corner of the Z substrates vertically, and the Z-mirror is fixed on the Z-mirror
On support.
As a further improvement on the present invention, the centre on the Z substrates is in Openworks shape, a left side for the Z substrates hollow part
An X-axis slide rail is fixed in right both sides along X-direction respectively, and one X-axis rail slider of installation is moved forward and backward in the X-axis slide rail.
As a further improvement on the present invention, the X-axis translation stage includes X fixed blocks, X-axis slide block, X movable axis, X electricity
Machine, X substrates and X mirror supports, the X fixed blocks are two and be fixed on vertically respectively on the right side of the Z substrates front and rear two
On end, the X movable axis is horizontally fixed between two X fixed blocks, and the X-axis slide block is movable to be set in the X activities
On axle, the X-motor is arranged in the X-axis slide block and controls the motion of the X-axis slide block, and the X substrates are fixed on the X
The bottom of axle sliding block and it is also secured to above the X-axis rail slider and is moved forward and backward along X-axis slide rail, the X speculums
Support is fixed on the center section on the left of the X substrates vertically, and the X speculums are fixed on the X mirror supports.
As a further improvement on the present invention, the centre on the X substrates is in Openworks shape, before the X substrates hollow part
A Y-axis slide rail is fixed in both sides along Y direction respectively afterwards, and one Y-axis rail slider of installation is moved forward and backward on the Y-axis slide rail.
As a further improvement on the present invention, the Y-axis translation stage includes Y fixed blocks, Y-axis sliding block, Y movable axis, Y electricity
Machine, Y substrates and Y mirror supports, the Y fixed blocks are two and are fixed on the left and right two of the X substrates rear end vertically respectively
On side, the Y movable axis is horizontally fixed between two Y fixed blocks, and the Y-axis sliding block is movable to be set in the Y activities
On axle, the Y-motor is arranged on the Y-axis sliding block and controls the motion of the Y-axis sliding block, and the Y substrates are fixed on the Y
The bottom of axle sliding block and it is also secured to above the Y-axis rail slider and is moved forward and backward along Y-axis slide rail, the Y speculums
Support is fixed on the center section of the Y substrates vertically, and the Y speculums are fixed on the Y mirror supports.
As a further improvement on the present invention, the size of the X substrates is less than the size of the Z substrates, the Y substrates
Size is less than the size of the X substrates, and the centre of the Y substrates is provided with a manhole, and the focus lamp is fixed on the circle
In shape through hole, X, Y, Z motor is linear electric motors.
As a further improvement on the present invention, in addition to X, Y, Z axis grating scale, the Z axis grating scale are fixed on described dynamic
It is be arranged in parallel in the upper end side wall of power connecting plate and with the Z axis, the X-axis grating scale is fixed on the left end side of the X substrates
On wall and parallel with the X-axis, the Y-axis grating scale is fixed in the front end side wall of the Y substrates and parallel with the Y-axis.
As a further improvement on the present invention, the X, Y, Z axis optoelectronic switch of return zero point, the Z axis photoelectricity are done in addition to
Switch is fixed on the right side wall inside the case body, and the X-axis optoelectronic switch is fixed on the left-front corner of the Z substrates
On, the Y-axis optoelectronic switch is fixed among the right side of the X substrates, and the upper surface of the case body is provided with a laser
Entrance port, the laser light incident mouth are located at the surface of the Z-mirror.
By such scheme, the present invention at least has advantages below：Small range laser translation scanning mirror provided by the invention
Device can make the relative position of laser beam and focus lamp constant, only need to (X, Y, Z axis is put down by the motion of programming Control focus lamp
The motion of moving stage) motion of Laser Focusing hot spot can be achieved, the movement locus of preferable hot spot is realized, does not distort and defocus is missed
Difference, without carrying out distortion correction and optical element combination reduction defocus error by algorithm, and due to galvanometer system scanning
Light beam and the angled relation of focus lamp, it is necessary to condenser lens diameter dimension it is big, and laser beam of the present invention and condenser lens begin
Keep eventually it is vertical, it is necessary to condenser lens diameter dimension it is small, saved the cost of focus lamp.The axle of the present apparatus three uses straight-line electric
Machine drives, and controller driver is unified, and response speed is same, and control algolithm programming realization is convenient.Further, since the present apparatus is incident
Light and focus lamp relative position remain constant, and the spherical aberration that such Laser Focusing occurs is relatively stable, focused spot size phase
To stable.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, below with presently preferred embodiments of the present invention and coordinate accompanying drawing describe in detail as after.
Brief description of the drawings
Fig. 1 is existing scanning galvanometer structural representation；
Fig. 2 is that pincushion distortion schematic diagram occurs in scanning track caused by existing scanning galvanometer；
Fig. 3 is the structural representation that small range laser translation of the present invention scans lens device laser beam incident state；
Fig. 4 is the track schematic diagram that small range laser translation of the present invention scans laser beam in lens device；
Fig. 5 is the internal structure schematic diagram that small range laser translation of the present invention scans lens device；
Fig. 6 is the structural representation that small range laser translation of the present invention scans Z axis translation stage in lens device；
Fig. 7 is the structural representation that small range laser translation of the present invention scans X-axis translation stage in lens device；
Fig. 8 is the structural representation that small range laser translation of the present invention scans Y-axis translation stage in lens device；
Wherein：1- case bodies；2-X axle translation stages；3-Y axle translation stages；4-Z axle translation stages；5- focus lamps；6-Z axles are slided
Rail；7-Z axle rail sliders；8-X axle slide rails；9-X axle rail sliders；10-Y axle slide rails；11-Y axle rail sliders；12-X axle gratings
Chi；13-Y axle grating scales；14-Z axle grating scales；15-X axle optoelectronic switches；16-Y axle optoelectronic switches；17-Z axle optoelectronic switches；18-
Laser light incident mouth；19- generating lasers；20- laser beams；21-X fixed blocks；22-X axle sliding blocks；23-X movable axis；24-X motors；
25-X substrates；26-X mirror supports；30- laser light incident speculums；31-Y fixed blocks；32-Y axle sliding blocks；33-Y movable axis；
34-Y motors；35-Y substrates；36-Y mirror supports；40- laser beam expanders；41-Z axle sliding blocks；42-Z movable axis；43-Z electricity
Machine；44- shaft couplings；45- crossbeams；46- power connectors；47- plate Z substrates；48-Z mirror supports；50-X speculums；60-Y is anti-
Penetrate mirror；70-Z speculums.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Implement below
Example is used to illustrate the present invention, but is not limited to the scope of the present invention.
Embodiment：A kind of small range laser translation scans lens device, including the translation of case body 1, X-axis translation stage 2, Y-axis
Platform 3, Z axis translation stage 4 and focus lamp 5, the Z axis translation stage are moved up and down on the case body, the X, Y, Z axis
Translation stage is into being connected in series, and the X-axis translation stage is movable to be arranged on the Z axis translation stage, described Y-axis translation stage or so
It is mobile to be arranged on the X-axis translation stage, be installed with respectively on the X, Y, Z axis translation stage X, Y, Z-mirror 50,60,
70, the X, Y, Z-mirror are in 45 degree of angles with X, Y, Z axis respectively, and the X speculums are oppositely arranged with Z-mirror and positioned at same
On one horizontal line, the Y speculums are oppositely arranged with X speculums and in same horizontal line, the focus lamp is horizontally mounted
On the Y-axis translation stage, the focus lamp is located at the underface of the Y speculums.
A Z axis slide rail 6 is fixed on the left and right sides inwall of the case body along Z-direction respectively, in the Z axis slide rail
Move up and down one Z axis rail slider 7 of installation.
The Z axis translation stage includes Z axis sliding block 41, Z movable axis 42, Z motors 43, shaft coupling 44, crossbeam 45, power connector
Plate 46, Z substrates 47 and Z-mirror support 48, the Z axis sliding block are fixed on the inwall upper part of the case body, the Z
Movable axis, which moves up and down, to be positioned in the Z axis sliding block, and the Z motors are arranged on the Z axis sliding block and control the Z activities
The motion of axle, the shaft coupling are arranged on the lower end of the Z movable axis, and the crossbeam is fixed on the lower end of the shaft coupling, institute
State that crossbeam is parallel with Y-axis, the power connector plate is two and is fixed on the both ends of the crossbeam vertically respectively, and the power connects
Fishplate bar is fixedly connected with the Z axis rail slider, and the Z substrates are fixed between the bottom of two power connector plates, and the Z is anti-
Penetrate mirror support to be fixed on vertically in the left-front corner of the Z substrates, the Z-mirror is fixed on the Z-mirror support.
Centre on the Z substrates is in Openworks shape, and the left and right sides of the Z substrates hollow part is fixed along X-direction respectively
One X-axis slide rail 8, one X-axis rail slider 9 of installation is moved forward and backward in the X-axis slide rail.
The X-axis translation stage includes X fixed blocks 21, X-axis slide block 22, X movable axis 23, X-motor 24, X substrates 25 and X reflections
Mirror support 26, the X fixed blocks are the X activities on two and the rear and front end that is fixed on vertically respectively on the right side of the Z substrates
Axle is horizontally fixed between two X fixed blocks, and the X-axis slide block is movable to be set on the X movable axis, the X-motor
In the X-axis slide block and control the motion of the X-axis slide block, the X substrates be fixed on the bottom of the X-axis slide block and
It is also secured to above the X-axis rail slider and is moved forward and backward along X-axis slide rail, the X mirror supports is fixed on vertically
Center section on the left of the X substrates, the X speculums are fixed on the X mirror supports.
Centre on the X substrates is in Openworks shape, and the front and rear sides of the X substrates hollow part are fixed along Y direction respectively
One Y-axis slide rail 10, one Y-axis rail slider 11 of installation is moved forward and backward on the Y-axis slide rail.
The Y-axis translation stage includes Y fixed blocks 31, Y-axis sliding block 32, Y movable axis 33, Y-motor 34, Y substrates 35 and Y reflections
Mirror support 36, the Y fixed blocks are two and are fixed on vertically respectively on the left and right sides of the X substrates rear end that the Y is movable
Axle is horizontally fixed between two Y fixed blocks, and the Y-axis sliding block is movable to be set on the Y movable axis, the Y-motor
On the Y-axis sliding block and control the motion of the Y-axis sliding block, the Y substrates be fixed on the bottom of the Y-axis sliding block and
It is also secured to above the Y-axis rail slider and is moved forward and backward along Y-axis slide rail, the Y mirror supports is fixed on vertically
The center section of the Y substrates, the Y speculums are fixed on the Y mirror supports.
The size of the X substrates is less than the size of the Z substrates, and the size of the Y substrates is less than the chi of the X substrates
Very little, the centre of the Y substrates is provided with a manhole 37, and the focus lamp is fixed in the manhole, X, Y, Z electricity
Machine is linear electric motors.
Also include X, Y, Z axis grating scale 12,13,14, the Z axis grating scale is fixed on the upper end side of the power connector plate
It is be arranged in parallel on wall and with the Z axis, the X-axis grating scale is fixed in the left end side wall of the X substrates and put down with the X-axis
OK, the Y-axis grating scale is fixed in the front end side wall of the Y substrates and parallel with the Y-axis.It is (straight with incremental encoder
Line grating) closed-loop control is realized to motor, by the effect of X, Y, Z axis grating scale, it can ensure that control is accurate, resolution ratio can
Reach micron level.
Also include the X, Y, Z axis optoelectronic switch 15,16,17 for doing return zero point, the Z axis optoelectronic switch is fixed on described outer
On the right side wall of shell enclosure interior, the X-axis optoelectronic switch is fixed in the left-front corner of the Z substrates, the Y-axis optoelectronic switch
It is fixed among the right side of the X substrates, the upper surface of the case body is provided with a laser light incident mouth 18, and the laser enters
Loophole is located at the surface of the Z-mirror.Return zero point can be done to X, Y, Z axis translation stage by X, Y, Z axis optoelectronic switch.
X, the axle translation stage of Y, Z tri- is connected, and Y is associated in X, and X is associated on Z, and focus lamp passes through X-motor, Y respectively on Y substrates
Linear electric motors and Z motors provide power and realize three-axis moving, so as to realize the three-axis moving of focus lamp.Wherein Z-direction is moved
Dynamic connected mode as shown in figure 5, the axle that can be fixed due to the power connector mode of motor is moved by sliding block on movable axis,
Sliding block can also be fixed, allows movable axis relative to slide block movement, the power presentation mode of Z-direction is then by fixed sliding block
Mode, Z movable axis and crossbeam are connected by shaft coupling, crossbeam connects two pieces of power gusset pieces, then with Z substrate connections, outside
Z axis slide rail is installed, upper power gusset piece can move up and down along Z axis slide rail, ensure movement on the left and right sides inwall of shell housing
The depth of parallelism.
As shown in Figure 3-4, it is parallel with Y-axis that the generating laser 19 of peripheral hardware sends laser beam 20 to specific works mode, is swashing
Laser light incident speculum 30 is installed at optical entrance, laser light incident speculum and Y-axis be in 45 degree of angles, laser light incident speculum with
Laser beam expander 40 is set between generating laser, laser light incident speculum is mapped to by the laser beam level of laser beam expander,
For vertical incidence on Z-mirror, laser beam passes through Z-mirror horizontal reflection after laser beam is reflected by laser light incident speculum
Onto X speculums, then laser beam is by X speculums horizontal reflection to Y speculums, last laser beam hangs down by Y speculums
Straight reflex on focus lamp focuses on, in X, Y, Z substrate motion, due to series relationship, the relative angular relationship of X and Y speculums
Do not change, simply relative position changes, while the relative angular relationship of X and Z-mirror does not also change, simply
Relative position changes, and so as to which relative direction does not change when ensure that laser beam is propagated between all speculums, simply passes
The distance broadcast changes, and does not influence Laser Focusing.So, the relative motion relation between substrate, speculum, laser beam is just protected
Demonstrate,proved laser beam it is last incide focusing when remain vertical incidence and relative focus mirror is fixed, realize focal beam spot and
The position of focus lamp is relatively fixed, and by controlling the motion of focus lamp to realize the motion of focal beam spot, realizes sweeping for laser
Retouch movement locus.
Described above is only the preferred embodiment of the present invention, is not intended to limit the invention, it is noted that for this skill
For the those of ordinary skill in art field, without departing from the technical principles of the invention, can also make it is some improvement and
Modification, these improvement and modification also should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of small range laser translation scans lens device, it is characterised in that：Including case body, X-axis translation stage, Y-axis translation
Platform, Z axis translation stage and focus lamp, the Z axis translation stage are moved up and down on the case body, and the X, Y, Z axis is put down
Moving stage is into being connected in series, and the X-axis translation stage is movable to be arranged on the Z axis translation stage, and described Y-axis translation stage or so moves
It is dynamic to be arranged on the X-axis translation stage, it is installed with X, Y, Z-mirror on the X, Y, Z axis translation stage respectively, the X, Y,
Z-mirror is in 45 degree of angles with X, Y, Z axis respectively, and the X speculums are oppositely arranged with Z-mirror and in same horizontal line,
The Y speculums are oppositely arranged with X speculums and in same horizontal line, the focus lamp is horizontally arranged at the Y-axis and put down
In moving stage, the focus lamp is located at the underface of the Y speculums.
2. small range laser translation according to claim 1 scans lens device, it is characterised in that：A left side for the case body
A Z axis slide rail is fixed along Z-direction respectively on right both sides inwall, one Z axis track of installation is moved up and down in the Z axis slide rail and is slided
Block.
3. small range laser translation according to claim 2 scans lens device, it is characterised in that：The Z axis translation stage bag
Include Z axis sliding block, Z movable axis, Z motors, shaft coupling, crossbeam, power connector plate, Z substrates and Z-mirror support, the Z axis sliding block
The inwall upper part of the case body is fixed on, the Z movable axis, which moves up and down, to be positioned in the Z axis sliding block, the Z
Motor is arranged on the Z axis sliding block and controls the motion of the Z movable axis, and the shaft coupling is arranged on the Z movable axis
Lower end, the crossbeam are fixed on the lower end of the shaft coupling, and the crossbeam is parallel with Y-axis, the power connector plate be two and
It is fixed on the both ends of the crossbeam vertically respectively, the power connector plate is fixedly connected with the Z axis rail slider, the Z bases
Plate is fixed between the bottom of two power connector plates, and the Z-mirror support is fixed on the left-front corner of the Z substrates vertically
On, the Z-mirror is fixed on the Z-mirror support.
4. small range laser translation according to claim 3 scans lens device, it is characterised in that：In on the Z substrates
Between be in Openworks shape, an X-axis slide rail is fixed in the left and right sides of the Z substrates hollow part along X-direction respectively, in the X-axis slide rail
One X-axis rail slider of movable installation.
5. small range laser translation according to claim 4 scans lens device, it is characterised in that：The X-axis translation stage bag
X fixed blocks, X-axis slide block, X movable axis, X-motor, X substrates and X mirror supports are included, the X fixed blocks are two and erected respectively
Directly it is fixed on the rear and front end on the right side of the Z substrates, the X movable axis is horizontally fixed between two X fixed blocks, the X
Axle sliding block is movable to be set on the X movable axis, and the X-motor is arranged in the X-axis slide block and controls the X-axis to slide
The motion of block, the X substrates are fixed on the bottom of the X-axis slide block and are also secured to above the X-axis rail slider simultaneously
Moved forward and backward along X-axis slide rail, the X mirror supports are fixed on the center section on the left of the X substrates, the X reflections vertically
Mirror is fixed on the X mirror supports.
6. small range laser translation according to claim 5 scans lens device, it is characterised in that：In on the X substrates
Between be in Openworks shape, a Y-axis slide rail is fixed in the front and rear sides of the X substrates hollow part along Y direction respectively, on the Y-axis slide rail
One Y-axis rail slider of movable installation.
7. small range laser translation according to claim 6 scans lens device, it is characterised in that：The Y-axis translation stage bag
Y fixed blocks, Y-axis sliding block, Y movable axis, Y-motor, Y substrates and Y mirror supports are included, the Y fixed blocks are two and erected respectively
Directly it is fixed on the left and right sides of the X substrates rear end, the Y movable axis is horizontally fixed between two Y fixed blocks, the Y
Axle sliding block is movable to be set on the Y movable axis, and the Y-motor is arranged on the Y-axis sliding block and controls the Y-axis to slide
The motion of block, the Y substrates are fixed on the bottom of the Y-axis sliding block and are also secured to above the Y-axis rail slider simultaneously
Moved forward and backward along Y-axis slide rail, the Y mirror supports are fixed on the center section of the Y substrates vertically, and the Y speculums are consolidated
It is scheduled on the Y mirror supports.
8. small range laser translation according to claim 7 scans lens device, it is characterised in that：The size of the X substrates
Less than the size of the Z substrates, the size of the Y substrates is less than the size of the X substrates, and the centre of the Y substrates is provided with one
Manhole, the focus lamp are fixed in the manhole, and X, Y, Z motor is linear electric motors.
9. the small range laser translation scanning lens device according to any one in claim 8, it is characterised in that：Also include
X, Y, Z axis grating scale, the Z axis grating scale are fixed in the upper end side wall of the power connector plate and parallel with the Z axis set
Put, the X-axis grating scale is fixed in the left end side wall of the X substrates and parallel with the X-axis, and the Y-axis grating scale is fixed
It is in the front end side wall of the Y substrates and parallel with the Y-axis.
10. small range laser translation according to claim 9 scans lens device, it is characterised in that：Also include doing return zero
The X, Y, Z axis optoelectronic switch of point, the Z axis optoelectronic switch are fixed on the right side wall inside the case body, the X-axis light
Electric switch is fixed in the left-front corner of the Z substrates, and the Y-axis optoelectronic switch is fixed among the right side of the X substrates, described
The upper surface of case body is provided with a laser light incident mouth, and the laser light incident mouth is located at the surface of the Z-mirror.
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| CN105866031B (en) * | 2016-05-19 | 2018-09-18 | 山东省科学院自动化研究所 | A kind of scan table, scanned imagery device and method for Terahertz non-destructive testing |
| CN108742889B (en) * | 2018-04-11 | 2020-10-23 | 电子科技大学 | Light spot track regulating and controlling device in laser tooth preparation robot |
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| US5705789A (en) * | 1995-09-29 | 1998-01-06 | Litel Instruments, Inc. | Stabilization of parallel transport mirror system |
| JP3580960B2 (en) * | 1996-09-26 | 2004-10-27 | 株式会社リコー | 3D shape measuring device |
| CN101718958B (en) * | 2009-11-24 | 2011-04-20 | 中国科学院长春光学精密机械与物理研究所 | System and method for controlling nonlinear aberration correction of green-laser trimmed focusing lens |
| CN203471145U (en) * | 2013-07-18 | 2014-03-12 | 深圳市大族激光科技股份有限公司 | Laser processing device |
| CN205427319U (en) * | 2015-12-09 | 2016-08-03 | 苏州大学 | Laser translation scanning mirror device among a small circle |
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