CN107971629A - Laser working light path structure - Google Patents
Laser working light path structure Download PDFInfo
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- CN107971629A CN107971629A CN201711195064.1A CN201711195064A CN107971629A CN 107971629 A CN107971629 A CN 107971629A CN 201711195064 A CN201711195064 A CN 201711195064A CN 107971629 A CN107971629 A CN 107971629A
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- Prior art keywords
- speculum
- dynamic
- laser
- light path
- attachment device
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Surgery Devices (AREA)
Abstract
The present invention provides a kind of laser working light path structure, belongs to laser process equipment field, including stationary state beam Propagation mechanism, position adjusting mechanism, attachment device and focus adjusting mechanism；Attachment device is arranged in the Z-direction of position adjusting mechanism, and focus adjusting mechanism includes elevating mechanism, the first dynamic speculum, the second dynamic speculum, focusing arrangement；Elevating mechanism is flexibly connected with attachment device and can be moved along Z-direction, and the first dynamic speculum is connected with attachment device, and the second dynamic speculum and focusing arrangement is connected with elevating mechanism respectively；Wherein, the attachment device that position adjusting mechanism can drive moves (i.e. X to) in the horizontal direction, elevating mechanism can drive the second dynamic speculum and focusing arrangement to be moved along Z-direction, realize that X is individually fixed and controlled to Z-direction, and then realize that the accurate focusing movements of laser are realized in the large format movement of light beam in the horizontal direction, and light beam along Z-direction, advantageously ensure that positioning accuracy, it is compact with device structure, high precision machining feature.
Description
Technical field
The present invention relates to laser process equipment field, and in particular to a kind of laser working light path structure.
Background technology
With the development of laser processing technology and the technological progress of relevant optical, the application neck of laser micro-processing equipment
Domain is more and more wide, is related to and bores micropore, groove, special-shaped cavity cutting etc..Laser light path system is the core component of equipment, pair plus
Work precision, processing quality and stability have important influence.
On laser process equipment, typically designed using fixed optical path, XY crosses fold shape workbench and carry out two-dimension translational
Movement.Limited by structure, the equipment to needing to carry out big width laser processing, cross fold shape XY worktable occupied space it is big,
Positioning accuracy is relatively low, it is difficult to meets application demand.
The content of the invention
It is an object of the invention to provide a kind of laser working light path structure, which can realize X
Individually fix and control to Z-direction, and then realize that the large format movement of light beam in the horizontal direction, and light beam are realized along Z-direction and swashed
The accurate focusing movements of light, high precision machining feature compact with device structure.
Based on above-mentioned purpose, laser working light path structure provided by the invention, including：Stationary state beam Propagation mechanism, position
Adjusting mechanism, attachment device and focus adjusting mechanism；
The attachment device is arranged in the Z-direction of the position adjusting mechanism, and the position adjusting mechanism can drive institute
Attachment device is stated to move in the horizontal direction,
The focus adjusting mechanism includes elevating mechanism, the first dynamic speculum, the second dynamic speculum, focusing arrangement；The lifting
Mechanism sets and is flexibly connected and can be moved along Z-direction with the attachment device, and the described first dynamic speculum is connected with attachment device,
Described second dynamic speculum and the focusing arrangement are connected with elevating mechanism respectively；
The stationary state beam Propagation mechanism can be by beam Propagation to the first dynamic speculum, and the described first dynamic speculum can
Beam Propagation second is moved into speculum, the described second dynamic speculum can be by beam Propagation to focusing arrangement, will by focusing arrangement
Beam emissions are to objective table.
Wherein, position adjusting mechanism can drive attachment device to move (i.e. X to) in the horizontal direction, and elevating mechanism being capable of band
Dynamic second dynamic speculum and focusing arrangement are moved along Z-direction, realize that X is individually fixed and controlled to Z-direction, and then realize light beam along water
Square to large format move, and light beam realizes the accurate focusing movements of laser along Z-direction, advantageously ensures that positioning accuracy, has
Have that device structure is compact, high precision machining feature.
Further, the stationary state beam Propagation mechanism includes laser emitter, beam expanding lens and determines speculum group, described
The light beam of laser transmitter projects successively through beam expanding lens, determine speculum group and be transmitted to the first dynamic speculum.
Further, the position adjusting mechanism is horizontally disposed with, it includes X direction guiding rails, the first driving motor and driving plate,
The first driving motor can drive the driving plate to be moved on X direction guiding rails, and the driving plate is also connecting the company
Connection device, so that attachment device can synchronously carry out X to movement, and then realizes the first dynamic speculum and stationary state beam Propagation mechanism
Between the adjusting of light beam in the horizontal direction.
Further, the attachment device is arranged to tabular, its end face away from driving plate sets described to connect
The Z-direction guide rail of elevating mechanism.
Further, the elevating mechanism includes Z-direction movable plate, the second driving motor and installing plate；The Z-direction movable plate
It is connected respectively with Z-direction guide rail and the second driving motor, the second driving motor can drive Z-direction movable plate to be moved along Z-direction guide rail
Dynamic, the installing plate is connected with the Z-direction movable plate, and installing plate can synchronously be moved with Z-direction movable plate, the installing plate
To assemble the described second dynamic speculum and the focusing arrangement, installing plate can drive the second dynamic speculum when Z-direction moves
With focusing arrangement synchronizing moving, since the first dynamic speculum is fixed in attachment device, it is possible thereby to realize the first dynamic speculum
And second laser beam between dynamic speculum accurate focusing movements.
Further, the described second dynamic speculum is arranged on the installing plate close to one end of the described first dynamic speculum,
To receive the light beam that the first dynamic speculum is sent, the focusing arrangement is arranged on the installing plate away from the described first dynamic reflection
One end of mirror, to receive the light beam that the second dynamic speculum is sent.
Further, the focusing arrangement uses galvanometer component.
Further, the focusing arrangement determines speculum and laser condensing lens including the 3rd, the described 3rd determine speculum with
Elevating mechanism connection, also, the described 3rd determine speculum and can receive the described second output beam for moving speculum, and it is described
Laser condensing lens are arranged on the described 3rd lower section for determining speculum and are connected by focusing on microscope base with elevating mechanism, by described
Three determine the light beam after speculum reflection from the center vertical incidence of the laser condensing lens and focus to objective table.
Further, further include the protection eyeglass for being coated with anti-reflection film, the protection eyeglass be arranged on it is described determine speculum group,
The corresponding light beam entrance port and beam exit mouth position of first dynamic speculum and the second dynamic speculum.
In use, the particularly first dynamic speculum and the second dynamic speculum, need frequently to move in equipment processing, and
And shift motion is larger, the eyeglass that the protection eyeglass of setting can effectively protect above-mentioned two to move speculum is clean.
Further, laser-assisted is further included, it moves the outer of transmitting mirror installed in the elevating mechanism or described second
On shell, which can move transmitting mirror synchronizing moving with elevating mechanism or second, also, the laser-assisted can be sent out
Instruction laser and then simulating cutting flow are penetrated, facilitates worker to carry out pre-adjustment to process.
Beneficial effect：
Laser working light path structure provided by the invention includes：Stationary state beam Propagation mechanism, position adjusting mechanism, connection dress
Put and focus adjusting mechanism；Attachment device is arranged in the Z-direction of the position adjusting mechanism, and position adjusting mechanism can drive connection to fill
Put and move in the horizontal direction, focus adjusting mechanism includes elevating mechanism, the first dynamic speculum, the second dynamic speculum, focusing arrangement；Lifting
Mechanism sets and is flexibly connected and can be moved along Z-direction with the attachment device, and the first dynamic speculum is connected with attachment device, and second
Dynamic speculum and focusing arrangement are connected with elevating mechanism respectively；
Stationary state beam Propagation mechanism can be by beam Propagation to the first dynamic speculum, and the described first dynamic speculum can be by light
The second dynamic speculum of beam transmission, the described second dynamic speculum can be by beam Propagations to focusing arrangement, by focusing arrangement by light beam
Launch to objective table.
Wherein, position adjusting mechanism can drive attachment device to move (i.e. X to) in the horizontal direction, and elevating mechanism being capable of band
Dynamic second dynamic speculum and focusing arrangement are moved along Z-direction, realize that X is individually fixed and controlled to Z-direction, and then realize light beam along water
Square to large format move, and light beam realizes the accurate focusing movements of laser along Z-direction, advantageously ensures that positioning accuracy, has
Have that device structure is compact, high precision machining feature.
Brief description of the drawings
, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution of the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, in describing below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
Put, other attached drawings can also be obtained according to these attached drawings.
Fig. 1 is the structure diagram of laser working light path structure provided in an embodiment of the present invention；
Fig. 2 is the principle schematic of laser working light path structure provided in an embodiment of the present invention；
Fig. 3 is the structure diagram of position adjusting mechanism in laser working light path structure provided in an embodiment of the present invention；
Fig. 4 is the structure diagram of focus adjusting mechanism in laser working light path structure provided in an embodiment of the present invention；
Fig. 5 is another structure diagram of focusing arrangement in laser working light path structure provided in an embodiment of the present invention.
Icon：1- laser emitters, 2- beam expanding lens, 3- first determine speculum, and 4- second determines speculum, 5-X direction guiding rails, 6-
First driving motor, 7- driving plates, 8- bearings, 9- bent plates, the driving motors of 10- second, 11- attachment devices, 12- focusing arrangements,
13- installing plates, 14- objective tables, 15- second move speculum, and 16- laser-assisteds, to movable plate, 18- first is dynamic to be reflected 17-Z
Mirror, 19- protection eyeglasses, 20- the 3rd determine speculum, 21- laser condensing lens, and 22- focuses on microscope base.
Embodiment
Technical scheme is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's all other embodiments obtained without making creative work, belong to the scope of protection of the invention.
In the description of the present invention, it is necessary to explanation, term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instruction such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Easy to describe the present invention and simplify description, rather than instruction or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" the 3rd " is only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can
To be mechanical connection or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
It refer to shown in Fig. 1-Fig. 2；The laser working light path structure provided in the embodiment of the present invention includes：Stationary state light beam passes
Transfer mechanism, position adjusting mechanism, attachment device 11 and focus adjusting mechanism；
Attachment device 11 is arranged in the Z-direction of position adjusting mechanism, and position adjusting mechanism can drive 11 edge of attachment device
Horizontal direction moves,
Focus adjusting mechanism includes elevating mechanism, the first dynamic speculum 18, second moves speculum 15, focusing arrangement 12；Elevator
Structure is flexibly connected with attachment device 11 and can be moved along Z-direction, and the first dynamic speculum 18 is connected with attachment device 11, and second is dynamic anti-
Penetrate mirror 15 and focusing arrangement 12 is connected with elevating mechanism respectively；
Stationary state beam Propagation mechanism can be by beam Propagation to the first dynamic speculum 18, and the first dynamic speculum 18 can be by light
The second dynamic speculum 15 of beam transmission, the second dynamic speculum 15 can be by beam Propagations to focusing arrangement 12, will by focusing arrangement 12
Beam emissions are to objective table 14.
Wherein, position adjusting mechanism can drive attachment device 11 to move (i.e. X to) in the horizontal direction, and elevating mechanism can
Drive the second dynamic speculum 15 and focusing arrangement 12 to be moved along Z-direction, realize that X is individually fixed and controlled to Z-direction, and then realize light
The large format movement of beam in the horizontal direction, and light beam realize the accurate focusing movements of laser along Z-direction, advantageously ensure that positioning accurate
Degree, high precision machining feature compact with device structure.
One embodiment of stationary state beam Propagation mechanism is schematically showed in Fig. 1, the stationary state beam Propagation mechanism bag
Include laser emitter 1, beam expanding lens 2 and determine speculum group, the entrance port of beam expanding lens 2 and the exit portal of laser emitter 1 are coaxial
Set, the light beam that laser emitter 1 is launched is first transmitted to beam expanding lens 2, and laser beam is transmitted to after beam expanding lens 2 determines speculum
Group, is finally transmitted to the first dynamic speculum 18 by determining speculum group.
In one preferred embodiment, this determines speculum group and determines speculum 3 and second including first to determine speculum 4, wherein,
The entrance port of certain speculum 3 is coaxially disposed with 2 exit portal of beam expanding lens, and first, which determines 3 exit portal of speculum and second, determines speculum 4
Entrance port is coaxially disposed, and second determines 4 entrance port of speculum is coaxially disposed with the first dynamic 18 entrance port of speculum.Ensure dynamic first
For speculum 18 in X to during horizontal movement, laser position directive property is constant.
This first determines speculum 3 and is used to that second will to be transmitted to after the reflection of laser beam that beam expanding lens 2 is sent to determine speculum 4,
This second is determined speculum 4 and is used to determine Laser beam propagation that speculum 3 sends through first moving speculum 18 to first.Realization pair
The direction conversion for the laser beam that laser emitter 1 is sent.
During practical application, which can be fixed on marble pedestal, and then ensure the length of laser
Phase stablizes output.
One embodiment of position adjusting mechanism is schematically showed in Fig. 3, which is horizontally disposed with, its
Motor 6 and driving plate 7, X direction guiding rails 5 is driven to be arranged in parallel two including X direction guiding rails 5, first, driving plate 7 is arranged on X direction guiding rails
On 5, the first driving motor 6 can drive the driving plate 7 to be moved on X direction guiding rails 5, can make driving plate 7 along X to progress
It is mobile.
The first driving motor 6 uses linear electric machine.
The driving plate 7 is also to connect above-mentioned attachment device 11, so that attachment device 11 can synchronously carry out X to shifting
It is dynamic, and then realize the first dynamic adjusting of light beam in the horizontal direction between speculum 18 and stationary state beam Propagation mechanism.
The movement travel of position adjusting mechanism is larger, can in the interior processing for meeting sizes gauge material in a big way,
In the present embodiment, the effective travel of position adjusting mechanism is 500mm, and positioning accuracy ± 5um, can also design other as needed
Movement travel, to meet to use needs.
One embodiment of attachment device 11 is schematically showed in Fig. 3, which is arranged to tabular, its is remote
From driving plate 7 end face set to connect elevating mechanism Z-direction guide rail, it is necessary to explain, the Z-direction guide rail be set
Guide rail on Z-direction direction (with X to vertical), the Z-direction guide rail is carrying elevating mechanism.
It refer to Fig. 1 and Fig. 4, in a preferred embodiment, the first dynamic speculum 18 is detachably secured on bent plate 9, should
Bent plate 9 is detachably secured on bearing 8, which is detachably secured to the close top position of attachment device 11.Above-mentioned can
Dismantling connection is preferably connected by screw bolts mode, is conducive to the two-dimensional angular to the first dynamic speculum 18 using detachable connection
The adjusting of degree.
In one preferred embodiment, which includes Z-direction movable plate 17, second and drives motor 10 and installing plate 13；Z
It is connected respectively with Z-direction guide rail and the second driving motor 10 to movable plate 17, the second driving motor 10 can drive Z-direction movable plate 17
Moved along Z-direction guide rail.
Installing plate 13 is connected with Z-direction movable plate 17, and installing plate 13 can synchronously be moved with Z-direction movable plate 17, installation
For plate 13 to assemble the second dynamic speculum 15 and focusing arrangement 12, installing plate 13 can drive the second dynamic reflection when Z-direction moves
12 synchronizing moving of mirror 15 and focusing arrangement, since the first dynamic speculum 18 is fixed in attachment device 11, it is possible thereby to realize the
One dynamic speculum 18 and second moves the accurate focusing movements of laser beam between speculum 15.
In the present embodiment, the effective travel of the Z-direction movable plate 17 is 40mm, positioning accuracy ± 5um, can also be as needed
Other movement travels are designed, to meet to use needs.
It refer to Fig. 1 and Fig. 4, in a preferred embodiment, the second dynamic speculum 15 is arranged on installing plate 13 close to first
One end of dynamic speculum 18, to receive the light beam that the first dynamic speculum 18 is sent, it is remote that focusing arrangement 12 is arranged on installing plate 13
From one end of the first dynamic speculum 18, to receive the light beam that the second dynamic speculum 15 is sent.
During specific setting, the exit portal of the entrance port of the second dynamic speculum 15 and the first dynamic speculum 18 is coaxially disposed, really
Protect in the second 15 motion process of dynamic speculum, laser position directive property is constant.
It should be noted that the second dynamic speculum 15 and focusing arrangement 12 uses the side of being detachably connected with installing plate 13
Formula, in order to carry out the adjusting of two dimension angular.
One embodiment of focusing arrangement 12 is schematically showed in Fig. 1, which uses galvanometer component, and
And the entrance port of focusing arrangement 12 and the exit portal of the second dynamic speculum 15 form coaxial relation, it is ensured that laser vertical incidence is shaken
Mirror assembly.
Schematically show another embodiment of focusing arrangement 12 in Fig. 5, in the embodiment, focusing arrangement 12 includes
3rd determines speculum 20 and laser condensing lens 21.
3rd determines speculum 20 is connected with elevating mechanism, when it is implemented, the 3rd determines speculum 20 and be installed on elevator
On installing plate 13 in structure, also, the 3rd determine the entrance port of speculum 20 and the exit portal of the second dynamic speculum 15 formed it is coaxial
Relation, it is ensured that speculum 20 is determined in laser vertical incidence the 3rd.To ensure that the 3rd determines speculum 20 and can receive the second dynamic speculum
15 output beam.
Laser condensing lens 21 are arranged on the 3rd lower section for determining speculum 20, also, laser condensing lens 21 are by focusing on microscope base
22 are connected with the installing plate 13 in elevating mechanism, when it is implemented, speculum 20 is determined in the entrance port of laser condensing lens 21 and the 3rd
Exit portal be coaxially disposed, it is ensured that laser vertical incident laser focus lamp 21.And then ensure that determining speculum 20 by the 3rd reflects
Light beam afterwards is from the center vertical incidence of laser condensing lens 21 and focuses to objective table 14.
Refer to Fig. 1, in one embodiment of laser working light path structure provided by the invention, further include be coated with it is anti-reflection
The protection eyeglass 19 of film, protection eyeglass 19 be arranged on determine speculum group, the first dynamic speculum 18 and second moves speculum 15
Corresponding light beam entrance port and beam exit mouth position.Here speculum group of determining refers specifically to the second outgoing for determining speculum 4
Mouth position.
In use, the particularly first dynamic speculum 18 and second moves speculum 15, need frequently to transport in equipment processing
It is dynamic, and shift motion is larger, and the eyeglass that the protection eyeglass 19 of setting can effectively protect above-mentioned two to move speculum is clean.
Fig. 1 is refer to, in one embodiment of laser working light path structure provided by the invention, further includes auxiliary laser
Device 16, the laser-assisted 16 are installed on the shell of elevating mechanism (such as on installing plate 13) or the second dynamic speculum 15, should
Laser-assisted 16 can move 15 synchronizing moving of speculum with elevating mechanism or second, also, the laser-assisted 16 can be sent out
Instruction laser and then simulating cutting flow are penetrated, facilitates worker to carry out pre-adjustment to process.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe is described in detail the present invention with reference to foregoing embodiments, it will be understood by those of ordinary skill in the art that：Its according to
Can so modify to the technical solution described in foregoing embodiments, either to which part or all technical characteristic into
Row equivalent substitution；And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the present invention technology
The scope of scheme.
Claims (10)
- A kind of 1. laser working light path structure, it is characterised in that including：Stationary state beam Propagation mechanism, position adjusting mechanism, connection Device and focus adjusting mechanism；The attachment device is arranged in the Z-direction of the position adjusting mechanism, and the position adjusting mechanism can drive the company Connection device moves in the horizontal direction,The focus adjusting mechanism includes elevating mechanism, the first dynamic speculum, the second dynamic speculum, focusing arrangement；The elevating mechanism Setting is flexibly connected with the attachment device and can be moved along Z-direction, and the described first dynamic speculum is connected with attachment device, described Second dynamic speculum and the focusing arrangement are connected with elevating mechanism respectively；The stationary state beam Propagation mechanism can be by beam Propagation to the first dynamic speculum, and the described first dynamic speculum can be by light The second dynamic speculum of beam transmission, the described second dynamic speculum can be by beam Propagations to focusing arrangement, by focusing arrangement by light beam Launch to objective table.
- 2. laser working light path structure according to claim 1, it is characterised in that the stationary state beam Propagation mechanism includes Laser emitter, beam expanding lens and determine speculum group, the light beams of the laser transmitter projects successively through beam expanding lens, determine speculum Group is transmitted to the first dynamic speculum.
- 3. laser working light path structure according to claim 1, it is characterised in that the position adjusting mechanism level is set Put, it includes X direction guiding rails, the first driving motor and driving plate, the first driving motor can drive the driving plate X to Moved on guide rail, the driving plate is also connecting the attachment device.
- 4. laser working light path structure according to claim 1, it is characterised in that the attachment device is arranged to tabular, Its end face away from driving plate is set to connect the Z-direction guide rail of the elevating mechanism.
- 5. laser working light path structure according to claim 4, it is characterised in that the elevating mechanism is moved including Z-direction Plate, the second driving motor and installing plate；The Z-direction movable plate is connected with Z-direction guide rail and the second driving motor respectively, and described second Driving motor can drive Z-direction movable plate to be moved along Z-direction guide rail, and the installing plate is connected with the Z-direction movable plate, the installation Plate moves speculum and the focusing arrangement to assemble described second.
- 6. laser working light path structure according to claim 5, it is characterised in that the described second dynamic speculum is arranged on institute Installing plate is stated close to one end of the described first dynamic speculum, it is described to focus on dress to receive the light beam that the first dynamic speculum is sent Put and be arranged on the one end of the installing plate away from the described first dynamic speculum, to receive the light beam that the second dynamic speculum is sent.
- 7. according to claim 1-6 any one of them laser working light path structures, it is characterised in that the focusing arrangement uses Galvanometer component.
- 8. according to claim 1-6 any one of them laser working light path structures, it is characterised in that the focusing arrangement includes 3rd determines speculum and laser condensing lens, and the described 3rd determines speculum is connected with the elevating mechanism, also, the described 3rd is fixed anti- The output beam of the described second dynamic speculum can be received by penetrating mirror, and the laser condensing lens are arranged on the described 3rd and determine speculum Lower section is simultaneously connected by focusing on microscope base with elevating mechanism, and the light beam after the described 3rd determines speculum reflection gathers from the laser The center vertical incidence of burnt mirror simultaneously focuses to objective table.
- 9. according to claim 2-6 any one of them laser working light path structures, it is characterised in that further include and be coated with anti-reflection film Protection eyeglass, the protection eyeglass, which is arranged on, described determine speculum group, the first dynamic speculum and the second phase for moving speculum Answer light beam entrance port and beam exit mouth position.
- 10. according to claim 1-6 any one of them laser working light path structures, it is characterised in that further include auxiliary laser Device, it is installed on the elevating mechanism or the shell of the second dynamic transmitting mirror, and the laser-assisted can launch instruction Laser is with simulating cutting flow.
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| CN201711195064.1A CN107971629A (en) | 2017-11-24 | 2017-11-24 | Laser working light path structure |
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| CN201711195064.1A CN107971629A (en) | 2017-11-24 | 2017-11-24 | Laser working light path structure |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110666343A (en) * | 2019-10-31 | 2020-01-10 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Laser turning device, laser processing light path system and light path debugging method |
| CN111085507A (en) * | 2020-01-08 | 2020-05-01 | 南通大学 | Laser cleaning machine for cylindrical nickel screen |
| CN114523216A (en) * | 2022-01-12 | 2022-05-24 | 浙江圣石激光科技股份有限公司 | Laser cutting equipment convenient to laser focus is adjusted |
| CN115647580A (en) * | 2022-10-25 | 2023-01-31 | 上海通历激光科技有限公司 | Precise plane motion mechanism |
| TWI837204B (en) * | 2018-10-30 | 2024-04-01 | 日商濱松赫德尼古斯股份有限公司 | Laser processing equipment |
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