CN109239068B - Visual detection device and method for macro-micro motion platform - Google Patents
Visual detection device and method for macro-micro motion platform Download PDFInfo
- Publication number
- CN109239068B CN109239068B CN201811066852.5A CN201811066852A CN109239068B CN 109239068 B CN109239068 B CN 109239068B CN 201811066852 A CN201811066852 A CN 201811066852A CN 109239068 B CN109239068 B CN 109239068B
- Authority
- CN
- China
- Prior art keywords
- platform
- motion
- macro
- micro
- motion platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 23
- 230000000007 visual effect Effects 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims description 18
- 238000006073 displacement reaction Methods 0.000 claims description 39
- 238000011179 visual inspection Methods 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811066852.5A CN109239068B (en) | 2018-09-13 | 2018-09-13 | Visual detection device and method for macro-micro motion platform |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811066852.5A CN109239068B (en) | 2018-09-13 | 2018-09-13 | Visual detection device and method for macro-micro motion platform |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109239068A CN109239068A (en) | 2019-01-18 |
CN109239068B true CN109239068B (en) | 2021-04-16 |
Family
ID=65057996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811066852.5A Active CN109239068B (en) | 2018-09-13 | 2018-09-13 | Visual detection device and method for macro-micro motion platform |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109239068B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110253509A (en) * | 2019-05-28 | 2019-09-20 | 广东工业大学 | A kind of macro micro- compound platform of vision positioning |
CN110434835A (en) * | 2019-08-29 | 2019-11-12 | 华南理工大学 | A kind of macro micro- precisely locating platform device of two degrees of freedom and control method |
CN111795973A (en) * | 2020-07-22 | 2020-10-20 | 苏州文创控制技术有限公司 | Visual detection device |
CN116381892B (en) * | 2023-04-21 | 2023-12-12 | 广东工业大学 | Two-stage macro-micro camera lens focusing device based on direct-drive type air floatation platform |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10111253A (en) * | 1996-10-09 | 1998-04-28 | Olympus Optical Co Ltd | Board inspection apparatus |
JPH1194756A (en) * | 1997-09-24 | 1999-04-09 | Olympus Optical Co Ltd | Substrate inspecting apparatus |
JP2000258359A (en) * | 1999-03-11 | 2000-09-22 | Olympus Optical Co Ltd | Substrate-inspecting device |
CN1731081A (en) * | 2005-08-26 | 2006-02-08 | 哈尔滨工业大学 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
CN101458532A (en) * | 2008-07-11 | 2009-06-17 | 华中科技大学 | Synchronous control system for ultraprecise double-layer macro/micromotion platform |
CN102353576A (en) * | 2011-07-08 | 2012-02-15 | 吉林大学 | Small-size test device for mechanical and electrical coupling characteristics |
CN103021473A (en) * | 2012-12-07 | 2013-04-03 | 山东大学 | Direct drive type motion decoupling high-accuracy servo platform |
CN103264385A (en) * | 2013-05-08 | 2013-08-28 | 袁庆丹 | Automatic microoperation device |
CN103913305A (en) * | 2014-04-14 | 2014-07-09 | 吉林大学 | Complex compliant mechanism deformation precision test equipment and measuring method |
CN205798721U (en) * | 2016-07-11 | 2016-12-14 | 山东省智能机器人应用技术研究院 | The aperture cutting robot end effector apparatus that a kind of grand micro-system combines |
CN107478178A (en) * | 2017-09-24 | 2017-12-15 | 长春理工大学 | A kind of two-way centering laser alignment adjusting apparatus and centering method |
CN107942933A (en) * | 2017-12-29 | 2018-04-20 | 华南理工大学 | A kind of grand micro- compound alignment system of the planar three freedom of visual servo and method |
CN108453676A (en) * | 2018-03-22 | 2018-08-28 | 广东工业大学 | A kind of two dimension precision movement platform and its movement technique |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007256173A (en) * | 2006-03-24 | 2007-10-04 | Olympus Corp | Visual inspection device |
-
2018
- 2018-09-13 CN CN201811066852.5A patent/CN109239068B/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10111253A (en) * | 1996-10-09 | 1998-04-28 | Olympus Optical Co Ltd | Board inspection apparatus |
JPH1194756A (en) * | 1997-09-24 | 1999-04-09 | Olympus Optical Co Ltd | Substrate inspecting apparatus |
JP2000258359A (en) * | 1999-03-11 | 2000-09-22 | Olympus Optical Co Ltd | Substrate-inspecting device |
CN1731081A (en) * | 2005-08-26 | 2006-02-08 | 哈尔滨工业大学 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
CN101458532A (en) * | 2008-07-11 | 2009-06-17 | 华中科技大学 | Synchronous control system for ultraprecise double-layer macro/micromotion platform |
CN102353576A (en) * | 2011-07-08 | 2012-02-15 | 吉林大学 | Small-size test device for mechanical and electrical coupling characteristics |
CN103021473A (en) * | 2012-12-07 | 2013-04-03 | 山东大学 | Direct drive type motion decoupling high-accuracy servo platform |
CN103264385A (en) * | 2013-05-08 | 2013-08-28 | 袁庆丹 | Automatic microoperation device |
CN103913305A (en) * | 2014-04-14 | 2014-07-09 | 吉林大学 | Complex compliant mechanism deformation precision test equipment and measuring method |
CN205798721U (en) * | 2016-07-11 | 2016-12-14 | 山东省智能机器人应用技术研究院 | The aperture cutting robot end effector apparatus that a kind of grand micro-system combines |
CN107478178A (en) * | 2017-09-24 | 2017-12-15 | 长春理工大学 | A kind of two-way centering laser alignment adjusting apparatus and centering method |
CN107942933A (en) * | 2017-12-29 | 2018-04-20 | 华南理工大学 | A kind of grand micro- compound alignment system of the planar three freedom of visual servo and method |
CN108453676A (en) * | 2018-03-22 | 2018-08-28 | 广东工业大学 | A kind of two dimension precision movement platform and its movement technique |
Non-Patent Citations (2)
Title |
---|
Synchronized motion control and precision positioning compensation of a 3-DOFs macro–micro parallel manipulator fully actuated by piezoelectric actuators;Quan Zhang,et al;《Smart Materials and Structures》;20170929;第26卷;第1-15页 * |
大行程高精度宏微机器人***的研究;李长峰 等;《制造业自动化》;20081231;第30卷(第8期);第45-49页 * |
Also Published As
Publication number | Publication date |
---|---|
CN109239068A (en) | 2019-01-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN109239068B (en) | Visual detection device and method for macro-micro motion platform | |
US8104752B2 (en) | Integrated large XY rotary positioning table with virtual center of rotation | |
TW528881B (en) | Position measuring apparatus | |
KR101323530B1 (en) | Mobile object driving method, mobile object driving system, pattern forming method and apparatus, exposure method and apparatus, device manufacturing method and calibration method | |
US6937911B2 (en) | Compensating for cable drag forces in high precision stages | |
US20210026253A1 (en) | Exposure apparatus, exposure method, manufacturing method of flat-panel display, and device manufacturing method | |
CN115719721A (en) | Method and apparatus for aligning substrates | |
CN102364306B (en) | Error compensating system using encoder feedback, error mapping and air pressure control | |
US9979262B2 (en) | Positioning device in gantry type of construction having a position-measurement device for measuring the position of a carriage relative to a cross-member | |
JPWO2019044816A1 (en) | Device and method for linearly moving a first moving body and a second moving body with respect to an object | |
CN100333992C (en) | Method of manufacturing microstructure and manufacturing system for the same | |
CN109073137B (en) | System for generating movement of a support plate in six degrees of freedom | |
CN103033919A (en) | System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof | |
KR20220024572A (en) | 6 Degrees of Freedom Workpiece Stage | |
US20200176217A1 (en) | Stage apparatus and charged particle beam apparatus | |
US10183368B2 (en) | Movable table system | |
JP4962779B2 (en) | STAGE DEVICE, FLOAT CONTROL METHOD, AND EXPOSURE DEVICE USING STAGE DEVICE | |
US8243262B2 (en) | Method and system for supporting a moving optical component on a sloped portion | |
CN113917761B (en) | Beam stabilizing device based on angle inertia-free feedback correction | |
CN103676488B (en) | Mask connecting mechanism and there is the mask platform of this mask connecting mechanism | |
JP4962780B2 (en) | STAGE DEVICE, FLOAT CONTROL METHOD, AND EXPOSURE DEVICE USING STAGE DEVICE | |
KR100671241B1 (en) | Method and apparatus for detecting in-plane position in a planar stage by measuring air gap displacement | |
JP2017013210A (en) | Biaxial positioning stage apparatus | |
CN103376667B (en) | A kind of mask platform for exposure device | |
EP2541323B1 (en) | Manufacturing-process equipment |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
|
CI03 | Correction of invention patent | ||
CI03 | Correction of invention patent |
Correction item: transfer of patent right Correct: Revoke False: Transfer Number: 09-01 Volume: 40 |