CN109239068B - Visual detection device and method for macro-micro motion platform - Google Patents
Visual detection device and method for macro-micro motion platform Download PDFInfo
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Abstract
The invention discloses a visual detection device and a visual detection method for a macro and micro motion platform, which solve the problem that the prior art cannot simultaneously meet the requirements of high precision and large stroke detection of the macro and micro motion platform, and can enable the micro motion platform to be always within the visual field range of a microscope by arranging an adjusting platform, thereby improving the detection precision; the technical scheme is as follows: the device comprises an air floating platform used as a support, wherein a macro-micro motion platform is arranged above the air floating platform through an adjusting platform, a microscope provided with a CCD camera is fixed on one side of the adjusting platform, and an objective lens of the microscope corresponds to the position above the macro-micro motion platform; the motion of the macro-motion platform is compensated by controlling the motion of the adjusting platform, so that the micro-motion platform is always positioned in the visual field range of the microscope.
Description
Technical Field
The invention relates to the technical field of precision positioning, in particular to a visual detection device and method for a macro-micro motion platform.
Background
The macro and micro motion platform is an effective means for realizing large stroke and high precision. However, in order to realize high-precision motion control, high-precision feedback is required. The conventional detection means, such as a grating ruler and the like, are limited by the bandwidth of the sensor, so that high-precision detection in a large stroke range is difficult to realize, and irreconcilable contradiction exists between stroke and precision. Although the laser interferometer can realize the measurement with large stroke and high precision, the laser interferometer is expensive, difficult to meet the general engineering requirements, and easy to be influenced by the external environment. For example, when vibrations occur, the deflection of the light beam affects the measurement accuracy.
The vision technology is widely applied in the fields of robots and the like due to the characteristics of low cost, rich information and non-contact. However, high precision detection requires a high resolution microscope, with micron resolution being a common requirement. Due to the imaging mechanism, the field of view of the high resolution microscope is reduced by the increase in magnification. Taking the Mitutoyo microscope in Japan as an example, the field of view radius of the 100-magnification objective lens is only 0.2 mm. The small visual field range causes that the observed object easily runs out of the visual field range, so that the detection fails, and the motion range of the motion platform is severely limited.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a visual detection device and a visual detection method for a macro-micro motion platform.
The invention adopts the following technical scheme:
a visual detection device for a macro and micro motion platform comprises an air floating platform used as a support, wherein the macro and micro motion platform is installed above the air floating platform through an adjusting platform, a microscope provided with a CCD camera is fixed on one side of the adjusting platform, and an objective lens of the microscope corresponds to the upper part of the macro and micro motion platform; the motion of the macro-motion platform is compensated by controlling the motion of the adjusting platform, so that the micro-motion platform is always positioned in the visual field range of the microscope.
Furthermore, the bottom of the adjusting platform and the bottom of the microscope are respectively connected with the air floating platform through cushion blocks.
Furthermore, a displacement sensor is arranged on the adjusting platform.
Furthermore, the adjusting platform comprises a moving platform seat, and two mutually perpendicular sides of the moving platform seat are respectively connected with a linear motion pair which drives the moving platform seat to move along the X axis and the Y axis.
Furthermore, the displacement sensor is a grating ruler arranged on the side surface of the linear motion pair.
Further, the linear motion pair driving the motion platform seat to move along the X axis comprises an X axis linear motor, the X axis linear motor is connected with the base, and a first linear guide rail is installed at the bottom of the base.
Furthermore, the bottom of the moving platform seat is arranged above the base through a second linear guide rail.
Furthermore, the linear motion pair driving the motion platform base to move along the Y axis comprises a Y-axis linear motor, and the Y-axis linear motor is connected with the guide rail on the side surface of the motion platform base in a sliding mode through a motor mounting base.
An adjusting method of a visual detection device for a macro and micro motion platform comprises the following steps:
the CCD camera acquires an image amplified by an objective micro-motion platform, then acquires the coordinate of a current characteristic point after image processing, and feeds back the difference between the coordinate of the current characteristic point and the coordinate of the characteristic point in the previous step to a macro microcontroller for calculating the motion displacement of the next step;
taking the superposed position of the axes of the adjusting platform and the macro-micro motion platform and the center of the microscope objective as an initial position, and acquiring next motion displacements X1i and X2i and current position information X1, X2 and X3 of the macro-micro motion platform;
step (3) judging whether the macro-micro motion platform leaves the field of view of the microscope objective after the next step of motion;
step (4) updating the current position information;
and (5) inputting the next motion displacement X3i of the adjusting platform into the adjusting platform controller, controlling the adjusting platform to move by the adjusting platform controller, and feeding back the motion displacement information to the adjusting platform controller through the displacement sensor.
Further, in the step (3), if X1+ X2+ X1i + X2i-X3< a r, the next movement does not go out of the field of view, and at this time, the next movement displacement X3i of the adjustment platform is set to 0, that is, no movement is performed;
if X1+ X2+ X1i + X2i-X3> -a X r, the next movement will go out of the field of view, at which time the adjustment platform is moved the next movement by a displacement X3 i-a X r- (X1+ X1i + X2+ X2 i-X3);
wherein a represents an adjusting coefficient and takes a value between 0 and 1; and r is the microscope field radius.
Compared with the prior art, the invention has the beneficial effects that:
(1) according to the invention, the adjusting platform is arranged at the bottom of the macro-micro motion platform, the macro-micro motion platform is compensated by controlling the adjusting platform, the micro-motion platform is kept within the visual field range of the microscope, the detection stroke is increased, and then high-precision measurement is realized by using a high-resolution mirror;
(2) the invention solves the contradiction between high precision and large stroke detection of the existing macro-micro motion platform, and has simple structure and lower cost;
(3) the adjusting method of the visual detection device for the macro and micro motion platform can be combined with various macro and micro motion platforms for use, and has strong expansibility;
(4) the adjusting method of the visual detection device for the macro and micro motion platform is non-contact measurement and has the advantages of no increase of additional mass of the structure, no change of structural characteristics and high measurement precision.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an isometric view of the adjustment platform of the present invention;
FIG. 3 is a front view of the adjustment platform of the present invention;
FIG. 4 is a top view of the conditioning platform of the present invention;
FIG. 5 is a schematic structural view of a Y-axis linear motion pair of the present invention;
FIG. 6 is a schematic view of a first base structure of the present invention;
FIG. 7 is a schematic view of a second base structure of the present invention;
FIG. 8 is a schematic view of a third base structure of the present invention;
FIG. 9 is a schematic view of a fourth base structure of the present invention;
FIG. 10 is a diagram of the position relationship among the adjustment platform, the macro and micro motion platform, and the objective lens according to the present invention;
FIG. 11 is a flow chart of the detection of the present invention;
the system comprises an objective lens, a micro-motion platform, a 3 macro-motion platform, a 4 adjusting platform, a 5 air floating platform, a 6 microscope, a 7 CCD camera, an 8 eyepiece, a 9-Y-axis linear motor, a 10-motor mounting seat, a 11-fourth base, a 12-motion platform seat, a 13-grating ruler, a 14-second bearing seat, a 15-first bearing seat, a 16-second side plate, a 17-first side plate, an 18-bottom plate, a 19-third base, a 20-grating ruler, a 21-first base, a 22-second base, a 23-X-axis linear motor and a 24-guide rail.
Detailed Description
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
As described in the background art, the prior art has a disadvantage that the high precision and the large stroke detection of the macro and micro motion platform cannot be simultaneously satisfied, and in order to solve the above technical problems, the present application provides a visual detection apparatus and method for the macro and micro motion platform.
In an exemplary embodiment of the present application, as shown in fig. 1 to 10, a visual inspection apparatus for a macro and micro motion platform is provided, which includes an air floating platform 5, an adjusting platform 4, a macro and micro motion platform and a microscope 6, wherein the adjusting platform 4 and the microscope 6 are installed above the air floating platform 5, and the macro and micro motion platform is installed above the adjusting platform 4.
The adjusting platform 4 has two degrees of freedom XY, and the plane formed by XY is perpendicular to the axis of the objective lens 1 of the microscope 6.
Microscope 6 is located and adjusts 4 one sides of platform and objective 1 and corresponds to the macro-micro motion platform top, installation CCD camera 7 on the microscope 6, CCD camera 7 is located 6 eyepiece 8 one side of microscope.
Four corners of the bottom of the microscope 6 are respectively connected with the upper surface of the air floating platform 5 through cushion blocks.
The macro and micro motion platform comprises a macro motion platform 3 and a micro motion platform 2, and is an existing structure, and the details are not repeated here.
The adjusting platform 4 is used for controlling the motion of the macro-micro motion platform in the horizontal direction and comprises an X-axis linear motion pair, a Y-axis linear motion pair, a motion platform base 12 and the like, wherein the X-axis linear motion pair and the Y-axis linear motion pair are installed above a bottom plate 18, and a first side plate 17 and a second side plate 16 are respectively fixed on the two sides of an X axis and the two sides of a Y axis of the bottom plate 18.
The four angular positions at the bottom of the bottom plate 18 are respectively connected with the upper surface of the air floating platform 5 through cushion blocks.
The X-axis linear motion pair and the Y-axis linear motion pair are respectively fixed on the side surfaces of the first side plate 17 and the second side plate 16.
The X-axis linear motion pair comprises an X-axis linear motor 23, a first base 21 and a second base 22, wherein the X-axis linear motor 23 penetrates through the first bearing seat 15 to be connected with the first base 21.
The first base 21 is L-shaped, the bottom of the first base is provided with a second base 22, and the first base 21 and the second base 22 are connected in a sliding mode through mutually matched V-shaped guide rails (first linear guide rails).
A displacement sensor is mounted on a side surface of the first base 21.
The displacement sensor may be a contact or non-contact displacement sensor.
Preferably, the displacement sensor is a grating scale 13.
The Y-axis linear motion pair comprises a Y-axis linear motor 9 and a motor mounting seat 10, and the Y-axis linear motor 9 penetrates through a second bearing seat 14 to be connected with the motor mounting seat 10.
The bottom and the fourth base 11 fixed connection of moving platform seat 12, fourth base 11 correspond to Y axle linear electric motor 9 one side and install the guide rail 24 parallel with the X axle, guide rail 24 and motor mount pad 10 sliding connection.
The bottom of the fourth base 11 is provided with a third base 19, and the third base 19 and the fourth base 11 are slidably connected through a mutually matched V-shaped guide rail (a second linear guide rail).
The third base 19 is fixedly connected above the first base 21.
And a displacement sensor is arranged on the side surface of the fourth base.
The displacement sensor may be a contact or non-contact displacement sensor.
Preferably, the displacement sensor is a grating scale 20.
Preferably, the X-axis linear motor 23 and the Y-axis linear motor 9 may be voice coil motors.
The X-axis linear motor 23 drives the first base 21 to move horizontally relative to the second base 22, so as to move the moving platform base 12 along the X-axis direction; meanwhile, the guide rail 24 on the side surface of the fourth base 11 and the motor mounting base 10 move relatively; the Y-axis linear motor 9 drives the fourth base 11 to move horizontally with respect to the third base 19, thereby moving the moving platform base 12 in the Y-axis direction.
The motion of the macro-motion platform 3 is compensated by controlling the motion of the adjusting platform 4, so that the micro-motion platform 2 is always positioned in the visual field range of the microscope 6.
The sum of the motion error of the adjusting platform 4, the motion error of the macro-motion platform 3 and the error of the micro-motion platform 2 is required to be smaller than the visual field radius of the microscope 6.
As shown in fig. 10, the initial position is shown by a dotted line, and the axes of the micro-motion platform 2, the macro-motion platform 3, and the adjustment platform 4 are overlapped.
X1 is the distance between the current position of the fine motion platform 2 and the axis of the macro motion platform 3, X2 and X3 are the distances between the current positions of the macro motion platform 3 and the adjustment platform 4 and the initial position, r is the radius of the field of view of the microscope 6, and X1i, X2i and X3i are the next-step movement displacements of the fine motion platform 2, the macro motion platform 3 and the adjustment platform 4.
The CCD camera 7 acquires the relative position relation of the mark points of the micro-motion platform 2 and is used for feedback control of the micro-controller.
The macro microcontroller is installed on the macro and micro motion platform.
The macro microcontroller composition, control algorithm, and the calculation method of motion displacement are all the prior art.
The adjusting method of the present application is shown in fig. 11, and specifically includes the following steps:
and (2) the CCD camera 7 acquires an image amplified by the micro-motion platform of the objective lens 1, then the image is processed to obtain the coordinate of the current characteristic point, and the difference between the coordinate of the current characteristic point and the coordinate of the characteristic point in the previous step is fed back to the macro microcontroller for calculating the motion displacement of the next step.
And (2) taking the superposed position of the axis of the adjusting platform 4 and the macro-micro motion platform and the center of the objective lens 1 of the microscope 6 as an initial position, and acquiring next motion displacements X1i and X2i and current position information X1, X2 and X3 of the macro-micro motion platform.
Step (3) judging whether the macro-micro motion platform leaves the field of view of the objective lens 1 of the microscope 6 after the next step of motion;
if X1+ X2+ X1i + X2i-X3< a r, the next movement cannot go out of the visual field, and the next movement displacement X3i of the adjusting platform is 0, namely no movement is performed;
if X1+ X2+ X1i + X2i-X3> -a X r, the next movement will go out of the field of view, at which time the adjustment platform is moved the next movement by a displacement X3 i-a X r- (X1+ X1i + X2+ X2 i-X3);
wherein a represents an adjusting coefficient and takes a value between 0 and 1; and r is the microscope field radius.
Step (4) updating the current position information;
X1＝X11+X12+···X1i；
X2＝X21+X22+···X2i；
X3＝X31+X32+···X3i。
and (5) inputting X3i into the adjusting platform controller, controlling the adjusting platform 4 to move by the adjusting platform controller, and feeding back the movement displacement information to the adjusting platform controller through the displacement sensor.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (9)
1. An adjusting method of a visual detection device for a macro-micro motion platform is characterized by comprising an air floating platform used as a support, wherein the macro-micro motion platform is arranged above the air floating platform through an adjusting platform, a microscope provided with a CCD camera is fixed on one side of the adjusting platform, and an objective lens of the microscope corresponds to the upper part of the macro-micro motion platform; the motion of the macro-motion platform is compensated by controlling the motion of the adjusting platform, so that the micro-motion platform is always positioned in the visual field range of the microscope;
the method comprises the following steps:
taking the superposed position of the axes of the adjusting platform and the macro-micro motion platform and the center of the microscope objective as an initial position, and acquiring next motion displacements X1i and X2i and current position information X1, X2 and X3 of the macro-micro motion platform;
step (2) judging whether the macro-micro motion platform leaves the field of view of the microscope objective after the next step of motion;
step (3) updating the current position information;
X1＝X11+X12+···X1i；
X2＝X21+X22+···X2i；
X3＝X31+X32+···X3i；
inputting the next motion displacement X3i of the adjusting platform into the adjusting platform controller, controlling the adjusting platform to move by the adjusting platform controller, and feeding back the motion displacement information to the adjusting platform controller through a displacement sensor;
wherein: x1 is the distance between the current position of the micro-motion platform and the axis of the macro-motion platform; x2 is the distance from the current position of the macro motion platform to the initial position; x3 is the distance from the current position of the adjustment platform to the initial position; x1i represents the next motion displacement of the micro-motion platform; x2i represents the next movement displacement of the macro platform; x3i represents the next movement displacement of the adjustment stage.
2. The method of claim 1, wherein the bottom of the stage and the bottom of the microscope are respectively connected to the air-floating stage through a spacer.
3. The method as claimed in claim 1, wherein a displacement sensor is disposed on the adjustment platform.
4. The adjusting method of the visual inspection device for the macro and micro motion platform as claimed in claim 3, wherein the adjusting platform comprises a motion platform base, and two mutually perpendicular sides of the motion platform base are respectively connected with a linear motion pair for driving the motion platform base to move along the X axis and the Y axis.
5. The adjusting method of the visual inspection device for the macro and micro motion platform as claimed in claim 4, wherein the displacement sensor is a grating ruler installed on the side of the linear motion pair.
6. The adjusting method of the visual inspection device for the macro-micro motion platform as claimed in claim 4, wherein the linear motion pair for driving the motion platform base to move along the X-axis comprises an X-axis linear motor, the X-axis linear motor is connected with a base, and the bottom of the base is provided with the first linear guide rail.
7. The method as claimed in claim 6, wherein the bottom of the motion platform base is mounted on the base via a second linear guide.
8. The adjusting method of the visual inspection device for the macro and micro motion platform as claimed in claim 4, wherein the linear motion pair driving the motion platform base to move along the Y axis comprises a Y axis linear motor, and the Y axis linear motor is connected with the guide rail on the side of the motion platform base through a motor mounting base in a sliding manner.
9. The method for adjusting a visual inspection device for a macro/micro motion platform as claimed in claim 1, wherein in step (2), if X1+ X2+ X1i + X2i-X3< a r, the next motion will not go out of the field of view, and the next motion displacement X3i of the adjustment platform is set to 0, i.e. no motion;
if X1+ X2+ X1i + X2i-X3> -a X r, the next movement will go out of the field of view, at which time the adjustment platform is moved the next movement by a displacement X3 i-a X r- (X1+ X1i + X2+ X2 i-X3);
wherein a represents an adjusting coefficient and takes a value between 0 and 1; r is the microscope field radius; x1 is the distance between the current position of the micro-motion platform and the axis of the macro-motion platform; x2 is the distance from the current position of the macro motion platform to the initial position; x3 is the distance from the current position of the adjustment platform to the initial position; x1i represents the next motion displacement of the micro-motion platform; x2i represents the next movement displacement of the macro platform; x3i represents the next movement displacement of the adjustment stage.
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| CN110253509A (en) * | 2019-05-28 | 2019-09-20 | 广东工业大学 | A kind of macro micro- compound platform of vision positioning |
| CN110434835A (en) * | 2019-08-29 | 2019-11-12 | 华南理工大学 | A kind of macro micro- precisely locating platform device of two degrees of freedom and control method |
| CN111795973A (en) * | 2020-07-22 | 2020-10-20 | 苏州文创控制技术有限公司 | Visual detection device |
| CN116381892B (en) * | 2023-04-21 | 2023-12-12 | 广东工业大学 | Two-stage macro-micro camera lens focusing device based on direct-drive type air floatation platform |
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