CN104889793A - Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform - Google Patents
Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform Download PDFInfo
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- CN104889793A CN104889793A CN201510312720.6A CN201510312720A CN104889793A CN 104889793 A CN104889793 A CN 104889793A CN 201510312720 A CN201510312720 A CN 201510312720A CN 104889793 A CN104889793 A CN 104889793A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
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Abstract
The invention provides a damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform. When macro and micro rotors are simultaneously driven, overall large-range high-speed movement can be realized; when movement deviation occurs, a micro-motion platform realizes precise displacement output via elastic deformation due to small inertia and no friction, and high-frequency movement deviation compensation can be realized via individual driving. High-speed precision movement can be realized via composite movement control, the installation usage method is consistent with the method of the conventional platform, the promotion and application are facilitated, spring sheets are provided with damping materials so that the micro-motion platform has certain damping, the movement of a macro-motion platform can be transmitted, but the vibration is blocked, the micro-motion platform does not generate infinite amplitude at a resonance point and can work at any frequency band, and high-speed high-precision movement at any frequency point of the damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform can be realized via movement deviation measurement, micro-platform dynamic characteristic match, and vibration deviation high-frequency precision compensation.
Description
Technical field
The present invention relates to precision movement platform, particularly relate to the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable.
Background technology
Along with the progress of science and technology, the requirement of people to product is more and more higher, impel the requirement on machining accuracy of manufacturer to product also more and more higher, in existing equipment, the stroke of feeding with high precision motion platform is general shorter, and the precision of the common grand sports equipment of Long Distances cannot practical requirement, if adopt special large stroke and high precision sports equipment, the manufacturing cost of product will significantly increase.For above-mentioned present situation, a kind ofly the micromotion phase compound of the grand motion of Long Distances general precision and the little stroke of high accuracy can be realized large stroke and high precision feeding, and there is the favor that multidirectional motion platform is more and more subject to industry.
In first technology: based on the rigidity frequency-adjustable one dimension micromotion platform (patent application number: 201410214605.0) invented one based on prestress membrane of Stress stiffening principle, frequency-adjustable, can according to different operating modes and driving frequency, the intrinsic frequency of micromotion platform can be regulated before work or in the course of work, eliminate flexible hinge enlarger, and adopt voice coil motor to substitute piezoelectric ceramics, by non-contacting driving and displacement measurement, real-time judge load working condition, and according to the change of load working condition, the frequency of dynamic adjustments driving mechanism, the Intelligent Matching of dynamic characteristic can be realized.This mechanism is only limitted to one dimension fine motion, and stroke is shorter, and this mechanism there will be resonance point in working motion process, and its micromotion platform can not be operated in arbitrary frequency point, needs to avoid resonance point by regulating, and defines operating frequency range.The present invention has set up grand dynamic structure and anti-resonance vibration structure, micromotion platform can be operated in arbitrary frequency point and not produce infinite amplitude, without the need to avoiding resonance point, can work on any frequency band, realizing the large stroke and high precision of one dimension macro/micromotion and the feeding in any operating frequency simultaneously.
Summary of the invention
The object of the invention is to propose the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable that can work in arbitrary frequency point, realize large stroke and high precision and feeding in any operating frequency.
For reaching this object, the present invention by the following technical solutions:
The grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable, comprises pedestal, grand dynamic outside framework and micromotion platform;
Described grand dynamic outside framework and described micromotion platform form unified platform, described micromotion platform is arranged on the lower portion of described grand dynamic outside framework, described micromotion platform comprise for place work piece product platform, for supporting and shell fragment group that displacement exports and immutable damping for anti-resonance vibration, described product platform is connected to described grand dynamic outside framework by described shell fragment group; Described immutable damping is arranged at any parts for connecting described product platform and described grand dynamic outside framework;
Described pedestal is provided with guide rail, slide block and U-shaped linear electric motors, described slide block is slidably in described guide rail, described U-shaped linear electric motors comprise stator, grand dynamic outside framework mover, micromotion platform mover and connector, and grand motion and micromotion share same described stator;
Described grand dynamic outside framework is fixedly installed in described slide block, and is connected to described grand dynamic outside framework mover by described connector, controls it slide on described guide rail and realize grand motion by described grand dynamic outside framework mover, described micromotion platform mover and described stator;
Described product platform is fixed on described micromotion platform mover by described connector, and controls its micromotion at described stator by described micromotion platform mover.
Illustrate further, described immutable damping is attached to the surface of described shell fragment group as composite coating.
Illustrate further, described immutable damping is damping paint, and described damping paint is coated on the surface of described shell fragment group.
Illustrate further, described shell fragment group, described product platform and described grand dynamic outside framework are integral type structure.
Illustrate further, the both sides of described product platform are connected with described grand dynamic outside framework inwall by described shell fragment group, and described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform.
Illustrate further, described grand dynamic outside framework and described shell fragment group junction are provided with groove, and make to form thinner deformable elastic component inside described grand dynamic outside framework, described grand dynamic outside framework is provided with the described frequency adjustment mechanism regulating described resilient member deforms degree.
Illustrate further, described frequency adjustment mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
Illustrate further, described micromotion platform also comprises displacement transducer, is located at the end of the direction of feed of described product platform.
Illustrate further, institute's displacement sensors is differential capacitance sensor or photoelectric sensor.
The present invention proposes the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable, when grand fine motion drives simultaneously, can realize overall high-speed motion on a large scale; When there is movement warp, micromotion platform, because inertia is little, without friction, realize accurate displacement output by elastic deformation, can drives separately and realize high frequency motion deviation compensation.Controlled by compound motion, high speed and precision motion can be realized, install and use mode consistent with traditional platform, conveniently apply.The present invention is provided with the immutable damping structure of anti-resonance vibration, micromotion platform can be operated in arbitrary frequency point, without the need to avoiding resonance point, infinite amplitude can not be produced, can work on any frequency band, make the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable realize large stroke and high precision and can work in arbitrary frequency point, improve operating frequency range.
Accompanying drawing explanation
Fig. 1 is the structural representation of one embodiment of the present of invention;
Fig. 2 is the structural representation of one embodiment of the present of invention;
Fig. 3 is the top view of one embodiment of the present of invention;
Fig. 4 is the structural representation of the unified platform of one embodiment of the present of invention.
Wherein: pedestal 1, grand dynamic outside framework 2, micromotion platform 3, product platform 31, shell fragment group 32, guide rail 11, slide block 12, U-shaped linear electric motors 13, stator 131, grand dynamic outside framework mover 132, micromotion platform mover 133, connector 134, groove 33, displacement transducer 34, immutable damping 35, elastic component 21, bolt 221.
Detailed description of the invention
Technical scheme of the present invention is further illustrated by detailed description of the invention below in conjunction with accompanying drawing.
As shown in Fig. 1 or Fig. 2 or Fig. 3, the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable, comprises pedestal 1, grand dynamic outside framework 2 and micromotion platform 3;
Described grand dynamic outside framework 2 forms unified platform with described micromotion platform 3, described micromotion platform 3 is arranged on the lower portion of described grand dynamic outside framework 2, described micromotion platform 3 comprises for the product platform 31 of place work piece, for supporting and shell fragment group 32 that displacement exports and immutable damping 35 for anti-resonance vibration, described product platform 31 is connected to described grand dynamic outside framework 2 by described shell fragment group 32, and described immutable damping 35 is arranged at any parts for connecting described product platform 31 and described grand dynamic outside framework 2;
Described pedestal 1 is provided with guide rail 11, slide block 12 and U-shaped linear electric motors 13, described slide block 12 is slidably in described guide rail 11, described U-shaped linear electric motors 13 comprise stator 131, grand dynamic outside framework mover 132, micromotion platform mover 133 and connector 134, and grand motion and micromotion share same described stator 131;
Described grand dynamic outside framework 2 is fixedly installed in described slide block 13, and be connected to described grand dynamic outside framework mover 132 by described connector 134, control it by described grand dynamic outside framework mover 132, described micromotion platform mover 133 and described stator 121 and slide on described guide rail 11 and realize grand motion;
Described product platform 31 is fixed on described micromotion platform mover 133 by described connector 134, and controls its micromotion at described stator 131 by described micromotion platform mover 133.
Macro/micromotion is realized based on U-shaped linear electric motors 12, can the range of movement of Long Distances, inertia is little, fast response time, comprising the adjustment of the grand motion Long Distances to grand dynamic outside framework 2, also comprise simultaneously and on micromotion, precision positioning is realized to micromotion platform 3, the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable of the present invention can be realized on a large scale and running fix accurately.
When grand fine motion drives simultaneously, overall high-speed motion on a large scale can be realized; When there is movement warp, micromotion platform, because inertia is little, without friction, realize accurate displacement output by elastic deformation, can drives separately and realize high frequency motion deviation compensation.Controlled by compound motion, high speed and precision motion can be realized, install and use mode consistent with traditional platform, conveniently apply, on shell fragment, set up damping material simultaneously, micromotion platform is made to have certain damping, the motion of macro-moving stage can be transmitted but intercept vibration, make micromotion platform also can not produce infinite amplitude at resonance point, can work on any frequency band, measured by movement warp, microfluidic platform dynamic characteristic coupling and vibration deviation high frequency fine compensation, realize the high-speed, high precision motion in arbitrary frequency point of the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable.
As shown in Figure 4, immutable damping 35 is provided with on any parts connecting described grand dynamic outside framework 2 and described product platform 31, the effect of immutable damping 35 is that when avoiding producing resonance, frequency is infinitely great, what make micromotion platform 3 is operated in optional frequency scope, without the need to avoiding resonance point by regulating, improve operating frequency range.In addition, immutable damping 35 is carrier for connecting described grand dynamic outside framework 2 with any parts of described product platform 31, reduce whole damping spring plate to decline the independent connecting structure of motion platform, reduce the impact that fine motion frequency range reduces because of increasing of syndeton, guarantee maximum operating frequency range.
Illustrate further, described immutable damping 35 is attached to the surface of described shell fragment group 32 as composite coating.As shown in Figure 4, improve the damping of system, easy for installation, structure is simple.
Illustrate further, described immutable damping 35 is damping paint, and described damping paint is coated on the surface of described shell fragment group 32.Damping paint add appropriate filler by macromolecule resin and auxiliary material formulated, be that one can be coated in various metal plate-like structure on the surface, there is the sapecial coating of vibration damping, thermal insulation and certain sealing property.Directly be coated on the surface of shell fragment group 32, easy to process.
Illustrate further, described shell fragment group 32, described product platform 31 and described grand dynamic outside framework 2 are integral type structure.The integrated design of grand dynamic outside framework 2 and micromotion platform 3, compact conformation, is obtained through the mode such as milling, spark machined by whole block material, avoids the rigging error of part, can improve Platform movement precision.
Illustrate further, the both sides of described product platform 31 are connected with described grand dynamic outside framework 2 inwall by described shell fragment group 32, and described shell fragment group 32 is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform 31.The motion of the effective supporting core platform 31 of the shell fragment group 32 be arranged in parallel, under the restraining function of described shell fragment group 32, described product platform 31 is suppressed in the motion of non-direction of feed.
Illustrate further, described grand dynamic outside framework 2 is provided with groove 33 with described shell fragment group 32 junction, make to form thinner deformable elastic component 21 inside described grand dynamic outside framework 2, described grand dynamic outside framework 2 is provided with the described frequency adjustment mechanism regulating described elastic component 21 degree of deformation.The mechanism's intrinsic frequency in above-mentioned micromotion can be changed by the tightness of described frequency adjustment mechanism change shell fragment group 32, thus change the kinetic characteristic of product platform 31.
Illustrate further, described frequency adjustment mechanism is the bolt 221 through described groove 33, and its two ends are connected to the both sides of described groove 33.Described bolt 221 can produce displacement by manual adjustments length direction, changes the degree of deformation of described elastic component 21, and then changes the shell fragment tensile force of shell fragment group 32, realize the dynamic conditioning of the structural natural frequencies to platform.
Illustrate further, described frequency adjustment mechanism also comprises piezoelectric ceramic piece, and described piezoelectric ceramic piece is installed on the outside of described groove 33 by described bolt 221.Described piezoelectric ceramic piece can produce displacement at the length direction of bolt 221 under applied voltage effect, changes the degree of deformation of described elastic component 21, and then changes the shell fragment tensile force of described shell fragment group 32, realize the dynamic conditioning of the structural natural frequencies to platform.
Illustrate further, described micromotion platform 3 also comprises displacement transducer 34, is located at the end of the direction of feed of described product platform 31.For the micrometric displacement of described detection product platform 31.
Illustrate further, institute's displacement sensors 34 is differential capacitance sensor or photoelectric sensor.Differential capacitance sensor mechanical displacement is few, and precision is high, and anti-interference is better, and photoelectric sensor has the advantages such as precision is high, reaction is fast, noncontact, and structure is simple, and volume is little, all can be used as the selection of displacement transducer.
Below know-why of the present invention is described in conjunction with specific embodiments.These describe just in order to explain principle of the present invention, and can not be interpreted as limiting the scope of the invention by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other detailed description of the invention of the present invention, and these modes all will fall within protection scope of the present invention.
Claims (9)
1. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable, is characterized in that: comprise pedestal, grand dynamic outside framework and micromotion platform;
Described grand dynamic outside framework and described micromotion platform form unified platform, described micromotion platform is arranged on the lower portion of described grand dynamic outside framework, described micromotion platform comprise for place work piece product platform, for supporting and shell fragment group that displacement exports and immutable damping for anti-resonance vibration, described product platform is connected to described grand dynamic outside framework by described shell fragment group; Described immutable damping is arranged at any parts for connecting described product platform and described grand dynamic outside framework;
Described pedestal is provided with guide rail, slide block and U-shaped linear electric motors, described slide block is slidably in described guide rail, described U-shaped linear electric motors comprise stator, grand dynamic outside framework mover, micromotion platform mover and connector, and grand motion and micromotion share same described stator;
Described grand dynamic outside framework is fixedly installed in described slide block, and is connected to described grand dynamic outside framework mover by described connector, controls it slide on described guide rail and realize grand motion by described grand dynamic outside framework mover, described micromotion platform mover and described stator;
Described product platform is fixed on described micromotion platform mover by described connector, and controls its micromotion at described stator by described micromotion platform mover.
2. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 1, is characterized in that: described immutable damping is attached to the surface of described shell fragment group as composite coating.
3. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 2, it is characterized in that: described immutable damping is damping paint, described damping paint is coated on the surface of described shell fragment group.
4. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 1 and 2, is characterized in that: described shell fragment group, described product platform and described grand dynamic outside framework are integral type structure.
5. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 1 and 2, it is characterized in that: the both sides of described product platform are connected with described grand dynamic outside framework inwall by described shell fragment group, described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform.
6. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 4, it is characterized in that: described grand dynamic outside framework and described shell fragment group junction are provided with groove, make to form thinner deformable elastic component inside described grand dynamic outside framework, described grand dynamic outside framework is provided with the described frequency adjustment mechanism regulating described resilient member deforms degree.
7. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 5, is characterized in that: described frequency adjustment mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
8. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 1, is characterized in that: described micromotion platform also comprises displacement transducer, is located at the end of the direction of feed of described product platform.
9. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 8, is characterized in that: institute's displacement sensors is differential capacitance sensor or photoelectric sensor.
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| CN201510312720.6A CN104889793A (en) | 2015-06-08 | 2015-06-08 | Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform |
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| CN201510312720.6A CN104889793A (en) | 2015-06-08 | 2015-06-08 | Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform |
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Cited By (3)
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| CN107627292A (en) * | 2017-09-26 | 2018-01-26 | 广东工业大学 | A kind of multiple degrees of freedom large stroke and high precision motion platform |
| CN108747536A (en) * | 2018-06-08 | 2018-11-06 | 山东大学 | A kind of cam tensioning adjustable fast tool servo system of rigidity |
| CN110370229A (en) * | 2019-07-12 | 2019-10-25 | 佛山科学技术学院 | Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism |
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