CN104889950A - Dynamic characteristic adjustable micro-motion platform - Google Patents
Dynamic characteristic adjustable micro-motion platform Download PDFInfo
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- CN104889950A CN104889950A CN201510312065.4A CN201510312065A CN104889950A CN 104889950 A CN104889950 A CN 104889950A CN 201510312065 A CN201510312065 A CN 201510312065A CN 104889950 A CN104889950 A CN 104889950A
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- platform
- micromotion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/02—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby of table type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Micromachines (AREA)
Abstract
Provided is a dynamic characteristic adjustable micro-motion platform. The dynamic characteristic adjustable micro-motion platform comprises a base, a spring sheet group, a micro-motion sub-platform, an outer frame, a drive, a micro-motion workbench, a tension adjusting mechanism, a displacement sensor, and a variable damper, the base is fixed on a base plate, the spring sheet group is arranged at two sides of the micro-motion workbench, the length direction of spring sheets is vertical to the moving direction of the micro-motion workbench, the micro-motion workbench is fixed in the base, the micro-motion workbench is provided with the displacement sensor in the feeding direction, the displacement sensor is used for displacement precision detection, a connecting position of the base and the spring sheet group is provided with a tension adjusting module for realizing precise dynamic adjustment of rigidity frequency, and the variable damper is arranged between the micro-motion workbench and the base and can cooperate with the requirement of the rigidity frequency to configure the optimal damping. According to the dynamic characteristic adjustable micro-motion platform, the mechanism rigidity and inherent frequency are changed via the adjustment of the tension, the optimal damping at any frequency point can be set via the variable damper, and the consistent displacement output requirement at any frequency can be realized.
Description
Technical field
The present invention relates to precision movement platform, can be used for accurate operation and grand micro-composite high speed fine compensation, the present invention is specifically related to the adjustable micromotion platform of dynamic characteristic.
Background technology
In order to realize one-dimensional precise motion, accurate, stable feed mechanism seems particularly important, because the quality of it and product is closely related.In addition, complicated freeform optics surface due to volume little, high accuracy proposes strict requirement to micro-feed mechanism especially.Fine Feed system is the basis of this series products of processing, and it is widely used in fast tool servo feed system, in micro displacement workbench and grand micro-compound platform etc.Traditional micro-feeding device adopts fixed frequency to design usually; propose high requirement to material behavior and foozle, especially when processing different product, its driving frequency can change usually; make the motion platform displacement equations factor of fixed frequency inconsistent, thus make displacement equations distortion.
In first technology 1: the adjustable fast tool servo mechanism of a kind of rigidity invented by rigidity adjustable fast tool servo device (application for a patent for invention 201210055119.X), the principle of this mechanism adopts the flexible hinge be arranged symmetrically with, and eliminates vertical association campaign.Stiffness tuning is the holddown spring by being arranged on above, can only carry out this change rigidity by changing spring, can not continuously adjustabe.
In first technology 2: a kind of frequency-adjustable fast tool servo feed arrangement based on flexible hinge enlarger (patent application number: 201210250524.7) invented a kind of fast tool servo mechanism based on flexible hinge shell fragment, frequency adjustment principle is the tension force by shell fragment, can realize the continuously adjustabe of frequency and rigidity.But this mechanism adopts displacement equations mode to have the concentrated flexible hinge of stress, affects the service life of mechanism.
In first technology 3: based on the rigidity frequency-adjustable one dimension micromotion platform (patent application number: 201410214605.0) invented one based on prestress membrane of Stress stiffening principle, frequency-adjustable, can according to different operating modes and driving frequency, the intrinsic frequency of micromotion platform can be regulated before work or in the course of work, eliminate flexible hinge enlarger, and adopt voice coil motor to substitute piezoelectric ceramics, by non-contacting driving and displacement measurement, real-time judge load working condition, and according to the change of load working condition, the frequency of dynamic adjustments driving mechanism, the Intelligent Matching of dynamic characteristic can be realized.Although solve above-mentioned two problems, this mechanism there will be resonance point in working motion process, and its micromotion platform can not be operated in arbitrary frequency point, needs to avoid resonance point by regulating, and defines operating frequency range.The present invention has set up the damping structure of anti-resonance vibration, micromotion platform can be operated in arbitrary frequency point and not produce infinite amplitude, without the need to avoiding resonance point, can work on any frequency band.
Summary of the invention
The object of the invention is to propose the adjustable micromotion platform of a kind of dynamic characteristic that can work in arbitrary frequency point, rigidity and the intrinsic frequency of changing mechanism is come by tension adjusting, and the optimal damper of arbitrary frequency point is set by variable damper, the consistent displacement realized under optional frequency exports requirement.
For reaching this object, the present invention by the following technical solutions:
Dynamic characteristic is adjustable micromotion platform, comprises pedestal, shell fragment group, micromotion sub-platform, outside framework, driver, micro displacement workbench, tensile force adjusting mechanism, displacement transducer and variable damper;
The both sides of described micromotion sub-platform are connected with described outside framework inwall by described shell fragment group, and the shell fragment in described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described micromotion sub-platform;
Described outside framework is rigidly secured to described pedestal, and described micro displacement workbench is rigidly secured to described micromotion sub-platform;
Described driver includes stator and mover, and described stator is fixed on described pedestal or described outside framework, and described mover is fixed on described micromotion sub-platform;
Institute's displacement sensors is located at the end of the direction of feed of described micromotion sub-platform;
Described outside framework and described shell fragment group junction are provided with groove, make to form thinner deformable elastic component inside described outside framework, and described outside framework is provided with the described tensile force adjusting mechanism regulating described resilient member deforms degree;
Described variable damper is arranged in institute's displacement sensors.
Preferably, described variable damper is extrusion pressing type damper or MR damper.
Preferably, described variable damper is shearing type damper.
Preferably, institute's displacement sensors is capacitance type sensor or inductance type transducer.
Preferably, described shell fragment group, micromotion sub-platform and outside framework are integral type structure.
Preferably, described tensile force adjusting mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
Preferably, described tensile force adjusting mechanism is the piezoelectric ceramic actuator through described groove, and its two ends are connected to the both sides of described groove.
The know-why of micromotion platform frequency adjustment proposed by the invention for: the intrinsic frequency of the compliant mechanism that prestress membrane is formed is relevant to the tension force of prestress membrane, by the intrinsic frequency regulating the tensile force in prestress membrane to carry out governor motion, meet the requirement of different operating mode, and by being provided with variable damper on displacement transducer, micromotion platform can being worked in arbitrary frequency point, avoiding resonance point without the need to regulating; Come rigidity and the intrinsic frequency of changing mechanism by tension adjusting, and arranged the optimal damper of arbitrary frequency point by variable damper, the consistent displacement realized under optional frequency exports requirement.
Accompanying drawing explanation
Fig. 1 is the front view of a kind of example of the present invention;
Fig. 2 is the front view of another kind of example of the present invention;
Fig. 3 is the integral structure schematic diagram of the shell fragment group of one dimension micromotion platform of the present invention, micromotion sub-platform and outside framework.
Wherein, pedestal 1, groove 2, shell fragment group 201, micromotion sub-platform 202, outside framework 203, stator 301, mover 302, micro displacement workbench 4, elastic component 5, displacement transducer 6, tensile force adjusting mechanism 7, variable damper 8, piezoelectric ceramic piece 701, outside framework 203.
Detailed description of the invention
Technical scheme of the present invention is further illustrated by detailed description of the invention below in conjunction with accompanying drawing.
Dynamic characteristic is adjustable micromotion platform, comprises pedestal 1, shell fragment group 201, micromotion sub-platform 202, outside framework 203, driver, micro displacement workbench 4, tensile force adjusting mechanism 7, displacement transducer 6 and variable damper 8;
The both sides of described micromotion sub-platform 202 are connected with described outside framework 203 inwall by described shell fragment group 201, and the shell fragment in described shell fragment group 201 is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described micromotion sub-platform 202;
Described outside framework 203 is rigidly secured to described pedestal 1, and described micro displacement workbench 4 is rigidly secured to described micromotion sub-platform 202;
Described driver includes stator 301 and mover 302, and described stator 301 is fixed on described pedestal 1 or described outside framework 203, and described mover 302 is fixed on described micromotion sub-platform 202;
Institute's displacement sensors 6 is located at the end of the direction of feed of described micromotion sub-platform 202;
Described outside framework 203 is provided with groove 2 with described shell fragment group 201 junction, and make to form thinner deformable elastic component 5 inside described outside framework 203, described outside framework 203 is provided with the described tensile force adjusting mechanism 7 regulating described elastic component 5 degree of deformation;
Described variable damper 8 is arranged in institute's displacement sensors 6.
As shown in Figure 1 or 2, micromotion sub-platform 202 described in described driver drives and connected micro displacement workbench 4 produce one-dimensional micro-displacement feeding.Under the restraining function of described shell fragment group 201, described motion parts is suppressed in the motion of non-direction of feed, described micro displacement workbench 4 is provided with the functional units such as cutter, one dimension displacement is produced under the driving effect of described driver, complete corresponding technological action, and mechanism's intrinsic frequency that can be changed by the tightness that described tensile force adjusting mechanism 7 changes described shell fragment group 201 in above-mentioned micromotion, thus change described micro displacement workbench 4 kinetic characteristic.Displacement transducer 6 is for the one-dimensional micro-displacement of described detection micro displacement workbench 4.
Variable damper 8 is provided with for connecting in described outside framework 203 and the displacement transducer 6 of described micro displacement workbench 4, the effect of variable damper 8 is that when avoiding producing resonance, frequency is infinitely great, micromotion platform is made to be operated in optional frequency scope, without the need to avoiding resonance point by regulating, improve operating frequency range.Variable damper 8 for carrier, reduces the independent connecting structure of the adjustable micromotion platform of whole dynamic characteristic with displacement transducer 6, reduces the impact that fine motion frequency range reduces because of increasing of syndeton, guarantees maximum operating frequency range.
Preferably, described variable damper 8 is extrusion pressing type damper or MR damper.Extrusion pressing type damping is large, can fix encapsulation, without revealing, easily realizes.
Preferably, described variable damper 8 is shearing type damper.The shearing type damper linearity is good, easily controls.
Preferably, institute's displacement sensors 6 is capacitance type sensor or inductance type transducer.Preferably, described shell fragment group 201, micromotion sub-platform 202 and outside framework 203 is integral type structure.As shown in Figure 3, obtained through the mode such as milling, spark machined by whole block material, avoid the rigging error of part, Platform movement precision can be improved.
Preferably, described tensile force adjusting mechanism 7 is the bolt through described groove 2, and its two ends are connected to the both sides of described groove 2.As shown in Figure 1, described bolt can produce displacement by manual adjustments length direction, changes the degree of deformation of described elastic component 5, and then changes the shell fragment tensile force of shell fragment group 201, realize the dynamic conditioning of the structural natural frequencies to platform.
Preferably, described tensile force adjusting mechanism 7 is the piezoelectric ceramic actuator through described groove 2, and its two ends are connected to the both sides of described groove 2.As shown in Figure 2, described tensile force adjusting mechanism 7 comprises bolt and piezoelectric ceramic piece 701.Described piezoelectric ceramic piece 701 can produce displacement at the length direction of bolt under applied voltage effect, changes the degree of deformation of described elastic component 5, and then changes the shell fragment tensile force of described shell fragment group 201, realize the dynamic conditioning of the structural natural frequencies to platform.
Below know-why of the present invention is described in conjunction with specific embodiments.These describe just in order to explain principle of the present invention, and can not be interpreted as limiting the scope of the invention by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other detailed description of the invention of the present invention, and these modes all will fall within protection scope of the present invention.
Claims (7)
1. the adjustable micromotion platform of dynamic characteristic, is characterized in that: comprise pedestal, shell fragment group, micromotion sub-platform, outside framework, driver, micro displacement workbench, tensile force adjusting mechanism, displacement transducer and variable damper;
The both sides of described micromotion sub-platform are connected with described outside framework inwall by described shell fragment group, and the shell fragment in described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described micromotion sub-platform;
Described outside framework is rigidly secured to described pedestal, and described micro displacement workbench is rigidly secured to described micromotion sub-platform;
Described driver includes stator and mover, and described stator is fixed on described pedestal or described outside framework, and described mover is fixed on described micromotion sub-platform;
Institute's displacement sensors is located at the end of the direction of feed of described micromotion sub-platform;
Described outside framework and described shell fragment group junction are provided with groove, make to form thinner deformable elastic component inside described outside framework, and described outside framework is provided with the described tensile force adjusting mechanism regulating described resilient member deforms degree;
Described variable damper is arranged in institute's displacement sensors.
2. the adjustable micromotion platform of dynamic characteristic according to claim 1, is characterized in that: described variable damper is extrusion pressing type damper or MR damper.
3. the adjustable micromotion platform of dynamic characteristic according to claim 1, is characterized in that: described variable damper is ER effect or MR damper.
4. the adjustable micromotion platform of dynamic characteristic according to claim 1, is characterized in that: institute's displacement sensors is the noncontacting proximity sensors such as capacitance type sensor, inductance type transducer or grating scale.
5. the adjustable micromotion platform of dynamic characteristic according to claim 1, is characterized in that: described shell fragment group, micromotion sub-platform and outside framework are integral type structure.
6. the adjustable micromotion platform of dynamic characteristic according to claim 1, is characterized in that: described tensile force adjusting mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
7. the adjustable micromotion platform of dynamic characteristic according to claim 1, is characterized in that: described tensile force adjusting mechanism is the piezoelectric ceramic actuator through described groove, and its two ends are connected to the both sides of described groove.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510312065.4A CN104889950A (en) | 2015-06-08 | 2015-06-08 | Dynamic characteristic adjustable micro-motion platform |
| PCT/CN2015/095409 WO2016197553A1 (en) | 2015-06-08 | 2015-11-24 | Micro-motion platform with adjustable dynamic properties |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510312065.4A CN104889950A (en) | 2015-06-08 | 2015-06-08 | Dynamic characteristic adjustable micro-motion platform |
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| CN104889950A true CN104889950A (en) | 2015-09-09 |
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| CN201510312065.4A Pending CN104889950A (en) | 2015-06-08 | 2015-06-08 | Dynamic characteristic adjustable micro-motion platform |
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| WO (1) | WO2016197553A1 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016197553A1 (en) * | 2015-06-08 | 2016-12-15 | 广东工业大学 | Micro-motion platform with adjustable dynamic properties |
| CN106891306A (en) * | 2017-04-25 | 2017-06-27 | 西安理工大学 | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure |
| CN107378514A (en) * | 2016-05-16 | 2017-11-24 | 大银微***股份有限公司 | Mechanism with flexible elements and the gantry device containing the mechanism with flexible elements |
| CN107906315A (en) * | 2017-12-19 | 2018-04-13 | 山东大学 | A kind of micro-displacement motion platform of dynamic frequency real-time, tunable |
| KR101864718B1 (en) * | 2016-10-28 | 2018-07-13 | 한국생산기술연구원 | A vibration decreasing apparatus with flexure mechanism device for reducing load of machine and a method for decreasing vibration |
| CN109194190A (en) * | 2018-10-09 | 2019-01-11 | 浙江师范大学 | A kind of cantilever type piezoelectric linear actuator using hybrid magnets tune friction |
| CN109990028A (en) * | 2019-03-21 | 2019-07-09 | 西安交通大学 | A kind of constant force compliant mechanism |
| WO2020103669A1 (en) * | 2018-11-19 | 2020-05-28 | 山东大学 | Ultra-long-stroke fast tool servo having detachable flexible leaf springs, and machine tool |
| CN111791079A (en) * | 2020-05-22 | 2020-10-20 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
| CN111975412A (en) * | 2020-08-26 | 2020-11-24 | 山东理工大学 | Measuring and compensating device for one-way machining force of cutting machining |
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| CN109215730B (en) * | 2018-10-15 | 2024-05-28 | 安徽理工大学 | Displacement reversing amplifying mechanism based on flexible hinge |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2016197553A1 (en) * | 2015-06-08 | 2016-12-15 | 广东工业大学 | Micro-motion platform with adjustable dynamic properties |
| CN107378514B (en) * | 2016-05-16 | 2019-02-05 | 大银微***股份有限公司 | Mechanism with flexible elements and gantry device containing the mechanism with flexible elements |
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| KR101864718B1 (en) * | 2016-10-28 | 2018-07-13 | 한국생산기술연구원 | A vibration decreasing apparatus with flexure mechanism device for reducing load of machine and a method for decreasing vibration |
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| CN107906315A (en) * | 2017-12-19 | 2018-04-13 | 山东大学 | A kind of micro-displacement motion platform of dynamic frequency real-time, tunable |
| CN107906315B (en) * | 2017-12-19 | 2020-02-14 | 山东大学 | Micro-displacement motion platform with real-time adjustable dynamic frequency |
| CN109194190A (en) * | 2018-10-09 | 2019-01-11 | 浙江师范大学 | A kind of cantilever type piezoelectric linear actuator using hybrid magnets tune friction |
| WO2020103669A1 (en) * | 2018-11-19 | 2020-05-28 | 山东大学 | Ultra-long-stroke fast tool servo having detachable flexible leaf springs, and machine tool |
| CN109990028A (en) * | 2019-03-21 | 2019-07-09 | 西安交通大学 | A kind of constant force compliant mechanism |
| CN111791079A (en) * | 2020-05-22 | 2020-10-20 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
| CN111975412A (en) * | 2020-08-26 | 2020-11-24 | 山东理工大学 | Measuring and compensating device for one-way machining force of cutting machining |
| CN111975412B (en) * | 2020-08-26 | 2022-03-11 | 山东理工大学 | Measuring and compensating device for one-way machining force of cutting machining |
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Application publication date: 20150909 |