CN204262872U - Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether - Google Patents

Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether Download PDF

Info

Publication number
CN204262872U
CN204262872U CN201420724464.2U CN201420724464U CN204262872U CN 204262872 U CN204262872 U CN 204262872U CN 201420724464 U CN201420724464 U CN 201420724464U CN 204262872 U CN204262872 U CN 204262872U
Authority
CN
China
Prior art keywords
platform
grand
outside framework
electric motors
motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201420724464.2U
Other languages
Chinese (zh)
Inventor
王梦
杨志军
白有盾
陈新
高健
李涵雄
黄宇涵
李成祥
王江龙
余明峰
刘浩文
李振新
钟裕导
刘伟光
杨海东
管贻生
陈新度
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong University of Technology
Original Assignee
Guangdong University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong University of Technology filed Critical Guangdong University of Technology
Priority to CN201420724464.2U priority Critical patent/CN204262872U/en
Application granted granted Critical
Publication of CN204262872U publication Critical patent/CN204262872U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The utility model proposes the linear electric motors grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, comprise pedestal, line slideway, slide block, U-shaped linear motor stator electric, grand mover, fine motion mover and grand micro-unified platform.Described macro-moving stage and described micromotion platform are connected by elastic component and form unified platform, the outside framework of described grand micro-unified platform is arranged on straight-line guide rail slide block, U-shaped linear motor stator electric pedestal is equipped with, macro-moving stage and micromotion platform are equipped with mover respectively, when grand fine motion drives simultaneously, overall high-speed motion on a large scale can be realized; When there is movement warp, micromotion platform, because inertia is little, without friction, realize accurate displacement output by elastic deformation, can drives separately and realize high frequency motion deviation compensation.Controlled by compound motion, one-dimensional high-speed precise motion can be realized, install and use mode consistent with traditional platform, conveniently apply.

Description

Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether
Technical field
The utility model relates to precision movement platform, particularly relates to the linear electric motors grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether.
Background technology
Along with the progress of science and technology, the requirement of people to product is more and more higher, impel the requirement on machining accuracy of manufacturer to product also more and more higher, in existing equipment, the stroke of feeding with high precision motion platform is general shorter, and the precision of the common grand sports equipment of Long Distances cannot practical requirement, if adopt special large stroke and high precision sports equipment, the manufacturing cost of product will significantly increase.For above-mentioned present situation, a kind ofly the micromotion phase compound of the grand motion of Long Distances general precision and the little stroke of high accuracy can be realized large stroke and high precision feeding, and there is the favor that multidirectional motion platform is more and more subject to industry.
Utility model content
The purpose of this utility model is to propose the linear electric motors grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, adopts and shares the feeding that stator realizes the large stroke and high precision of one dimension macro/micromotion.
For reaching this object, the utility model by the following technical solutions:
Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, comprises pedestal, grand dynamic outside framework and micromotion platform;
Described grand dynamic outside framework and described micromotion platform form unified platform, described micromotion platform is arranged on the lower portion of described grand dynamic outside framework, described micromotion platform comprises for the product platform of place work piece with for spacing shell fragment group, and described product platform is connected to described grand dynamic outside framework by described shell fragment group;
Described pedestal is provided with guide rail, slide block and U-shaped linear electric motors, described slide block is slidably in described guide rail, described U-shaped linear electric motors comprise stator, grand dynamic outside framework mover, micromotion platform mover and connector, and grand motion and micromotion share same described stator;
Described grand dynamic outside framework is fixedly installed in described slide block, and is connected to described grand dynamic outside framework mover by described connector, controls it slide on described guide rail and realize grand motion by described grand dynamic outside framework mover, described micromotion platform mover and described stator;
Described product platform is fixed on described micromotion platform mover by described connector, and controls its micromotion at described stator by described micromotion platform mover.
Illustrate further, described grand dynamic outside framework mover is provided with two, is separately positioned on the two ends of the direction of feed of described grand dynamic outside framework.
Illustrate further, described shell fragment group, described product platform and described grand dynamic outside framework are integral type structure.
Illustrate further, the both sides of described product platform are connected with described grand dynamic outside framework inwall by described shell fragment group, and described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform.
Illustrate further, described grand dynamic outside framework and described shell fragment group junction are provided with groove, and make to form thinner deformable elastic component inside described grand dynamic outside framework, described grand dynamic outside framework is provided with the described frequency adjustment mechanism regulating described resilient member deforms degree.
Illustrate further, described frequency adjustment mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
Illustrate further, described frequency adjustment mechanism also comprises piezoelectric ceramic piece, and described piezoelectric ceramic piece is installed on the outside of described groove by described bolt.
Illustrate further, described micromotion platform also comprises displacement transducer, is located at the end of the direction of feed of described product platform.
Illustrate further, institute's displacement sensors is differential capacitance sensor or photoelectric sensor.
Illustrate further, the non-working surface of institute's displacement sensors is provided with insulating barrier.
The utility model proposes the linear electric motors grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, comprise pedestal, line slideway, slide block, U-shaped linear motor stator electric, grand mover, fine motion mover and grand micro-unified platform.Described macro-moving stage (grand dynamic outside framework) and described micromotion platform are connected by elastic component and form unified platform, the grand dynamic outside framework of described grand micro-unified platform is arranged on straight-line guide rail slide block, U-shaped linear motor stator electric pedestal is equipped with, macro-moving stage and micromotion platform are equipped with mover respectively, when grand fine motion drives simultaneously, overall high-speed motion on a large scale can be realized; When there is movement warp, micromotion platform, because inertia is little, without friction, realize accurate displacement output by elastic deformation, can drives separately and realize high frequency motion deviation compensation.Controlled by compound motion, one-dimensional high-speed precise motion can be realized, install and use mode consistent with traditional platform, conveniently apply.
The beneficial effects of the utility model: 1, grand micro-integration, realizes the feed motion of the large stroke and high precision on one dimension; 2, stator is fixed in frame, reduces the motional inertia of micromotion platform, is conducive to the response speed improving one dimension micromotion platform; 3, adopt shared stator, structure is simple, and platform stabilization is higher.
Accompanying drawing explanation
Fig. 1 is the structural representation of an embodiment of the present utility model;
Fig. 2 is the structural representation of an embodiment of the present utility model;
Fig. 3 is the top view of an embodiment of the present utility model;
Fig. 4 is the structural representation of the unified platform of an embodiment of the present utility model;
Fig. 5 is the structural representation of the unified platform of an embodiment of the present utility model.
Wherein: pedestal 1, grand dynamic outside framework 2, micromotion platform 3, product platform 31, shell fragment group 32, guide rail 11, slide block 12, U-shaped linear electric motors 13, stator 131, grand dynamic outside framework mover 132, micromotion platform mover 133, connector 134, groove 33, displacement transducer 34, elastic component 21, frequency adjustment mechanism 22, bolt 221, piezoelectric ceramic piece 222.
Detailed description of the invention
The technical solution of the utility model is further illustrated by detailed description of the invention below in conjunction with accompanying drawing.
Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, comprises pedestal 1, grand dynamic outside framework 2 and micromotion platform 3;
Described grand dynamic outside framework 2 forms unified platform with described micromotion platform 3, described micromotion platform 3 is arranged on the lower portion of described grand dynamic outside framework 2, described micromotion platform 3 comprises for the product platform 31 of place work piece with for spacing shell fragment group 32, and described product platform 31 is connected to described grand dynamic outside framework 2 by described shell fragment group 32;
Described pedestal 1 is provided with guide rail 11, slide block 12 and U-shaped linear electric motors 13, described slide block 12 is slidably in described guide rail 11, described U-shaped linear electric motors 13 comprise stator 131, grand dynamic outside framework mover 132, micromotion platform mover 133 and connector 134, and grand motion and micromotion share same described stator 131;
Described grand dynamic outside framework 2 is fixedly installed in described slide block 13, and be connected to described grand dynamic outside framework mover 132 by described connector 134, control it by described grand dynamic outside framework mover 132, described micromotion platform mover 133 and described stator 121 and slide on described guide rail 11 and realize grand motion;
Described product platform 31 is fixed on described micromotion platform mover 133 by described connector 134, and controls its micromotion at described stator 131 by described micromotion platform mover 133.
One dimension macro/micromotion is realized based on U-shaped linear electric motors 12, can the range of movement of Long Distances, inertia is little, fast response time, comprising the adjustment of the grand motion Long Distances to grand dynamic outside framework 2, also comprise simultaneously and on micromotion, precision positioning is realized to micromotion platform 2, make the utility model linear electric motors be total to the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive and can realize on a large scale and running fix accurately.Controller sends displacement commands to grand dynamic outside framework 2 and micromotion platform 3, the integrated design of grand dynamic outside framework 2 and micromotion platform 3, grand dynamic outside framework 2 is moved to desired location under the drive of micromotion platform mover 133 at grand dynamic outside framework mover 132 together with micromotion platform 3, power is provided to realize high-speed motion together by multiple mover, the driving force provided is larger, load capacity is also larger, when micromotion platform 3 arrives desired location, controller sends signal to micromotion platform mover 133, micromotion platform 3 Active and Real-time is driven to compensate the displacement fluctuation of the relative desired location of grand dynamic outside framework 2, until the workpiece being placed on product platform 31 arrives desired location, realize the high dynamic accuracy that linear electric motors are total to the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive.Grand dynamic outside framework mover 132 and micromotion platform mover 133 share same stator 131, are only provided with U-shaped linear electric motors 13 and can realize the different macro/micromotion of stroke, and structure is simple, and more enterprise accepts.Grand dynamic outside framework 2 forms unified platform with described micromotion platform 3, is obtained, avoids the rigging error of part, can improve Platform movement precision by whole block material through the mode such as milling, spark machined.
Illustrate further, described grand dynamic outside framework mover 132 is provided with two, is separately positioned on the two ends of the direction of feed of described grand dynamic outside framework 2.Micromotion platform 3 is arranged on the frame mid portion of grand dynamic outside framework, is therefore provided with two grand dynamic outside framework movers 132, is separately positioned on the two ends of the direction of feed of grand dynamic outside framework 2, makes the stressed more balanced of grand dynamic outside framework 2, and response is faster, more stable.
Illustrate further, described shell fragment group 32, described product platform 31 and described grand dynamic outside framework 2 are integral type structure.The integrated design of grand dynamic outside framework 2 and micromotion platform 3, compact conformation, is obtained through the mode such as milling, spark machined by whole block material, avoids the rigging error of part, can improve Platform movement precision.
Illustrate further, the both sides of described product platform 31 are connected with described grand dynamic outside framework 2 inwall by described shell fragment group 32, and described shell fragment group 32 is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform 31.The motion of the effective spacing product platform 31 of the shell fragment group 32 be arranged in parallel on one dimension, under the restraining function of described shell fragment group 32, described product platform 31 is suppressed in the motion of non-direction of feed.
Illustrate further, described grand dynamic outside framework 2 is provided with groove 33 with described shell fragment group 32 junction, make to form thinner deformable elastic component 21 inside described grand dynamic outside framework 2, described grand dynamic outside framework 2 is provided with the described frequency adjustment mechanism 22 regulating described elastic component 21 degree of deformation.The tightness changing shell fragment group 32 by described frequency adjustment mechanism 22 can change the mechanism's intrinsic frequency in above-mentioned micromotion, thus changes the kinetic characteristic of product platform 31.
Illustrate further, described frequency adjustment mechanism 22 is the bolt 221 through described groove 33, and its two ends are connected to the both sides of described groove 33.Described bolt 221 can produce displacement by manual adjustments length direction, changes the degree of deformation of described elastic component 21, and then changes the shell fragment tensile force of shell fragment group 32, realize the dynamic conditioning of the structural natural frequencies to platform.
Illustrate further, described frequency adjustment mechanism 22 also comprises piezoelectric ceramic piece 222, and described piezoelectric ceramic piece 222 is installed on the outside of described groove 33 by described bolt 221.Described piezoelectric ceramic piece 222 can produce displacement at the length direction of bolt 221 under applied voltage effect, changes the degree of deformation of described elastic component 21, and then changes the shell fragment tensile force of described shell fragment group 32, realize the dynamic conditioning of the structural natural frequencies to platform.
Illustrate further, described micromotion platform 3 also comprises displacement transducer 34, is located at the end of the direction of feed of described product platform 31.For the one-dimensional micro-displacement of described detection product platform 31.
Illustrate further, institute's displacement sensors 34 is differential capacitance sensor or photoelectric sensor.Differential capacitance sensor mechanical displacement is few, and precision is high, and anti-interference is better, and photoelectric sensor has the advantages such as precision is high, reaction is fast, noncontact, and structure is simple, and volume is little, all can be used as the selection of displacement transducer.
Illustrate further, the non-working surface of institute's displacement sensors 34 is provided with insulating barrier.For preventing micro-displacement sensor 25 from being disturbed by other metal materials, affect certainty of measurement.
Below know-why of the present utility model is described in conjunction with specific embodiments.These describe just in order to explain principle of the present utility model, and can not be interpreted as the restriction to the utility model protection domain by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other detailed description of the invention of the present utility model, and these modes all will fall within protection domain of the present utility model.

Claims (10)

1. the linear electric motors grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, is characterized in that: comprise pedestal, grand dynamic outside framework and micromotion platform;
Described grand dynamic outside framework and described micromotion platform form unified platform, described micromotion platform is arranged on the lower portion of described grand dynamic outside framework, described micromotion platform comprises for the product platform of place work piece with for spacing shell fragment group, and described product platform is connected to described grand dynamic outside framework by described shell fragment group;
Described pedestal is provided with guide rail, slide block and U-shaped linear electric motors, described slide block is slidably in described guide rail, described U-shaped linear electric motors comprise stator, grand dynamic outside framework mover, micromotion platform mover and connector, and grand motion and micromotion share same described stator;
Described grand dynamic outside framework is fixedly installed in described slide block, and is connected to described grand dynamic outside framework mover by described connector, controls it slide on described guide rail and realize grand motion by described grand dynamic outside framework mover, described micromotion platform mover and described stator;
Described product platform is fixed on described micromotion platform mover by described connector, and controls its micromotion at described stator by described micromotion platform mover.
2. the linear electric motors according to claim 1 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, is characterized in that: described grand dynamic outside framework mover is provided with two, is separately positioned on the two ends of the direction of feed of described grand dynamic outside framework.
3. the linear electric motors according to claim 1 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, is characterized in that: described shell fragment group, described product platform and described grand dynamic outside framework are integral type structure.
4. the linear electric motors according to claim 1 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, it is characterized in that: the both sides of described product platform are connected with described grand dynamic outside framework inwall by described shell fragment group, described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform.
5. the linear electric motors according to claim 4 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, it is characterized in that: described grand dynamic outside framework and described shell fragment group junction are provided with groove, make to form thinner deformable elastic component inside described grand dynamic outside framework, described grand dynamic outside framework is provided with the frequency adjustment mechanism regulating described resilient member deforms degree.
6. the linear electric motors according to claim 5 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, is characterized in that: described frequency adjustment mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
7. the linear electric motors according to claim 6 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, it is characterized in that: described frequency adjustment mechanism also comprises piezoelectric ceramic piece, described piezoelectric ceramic piece is installed on the outside of described groove by described bolt.
8. the linear electric motors according to claim 1 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, is characterized in that: described micromotion platform also comprises displacement transducer, is located at the end of the direction of feed of described product platform.
9. the linear electric motors according to claim 8 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, is characterized in that: institute's displacement sensors is differential capacitance sensor or photoelectric sensor.
10. the linear electric motors according to claim 8 grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether, is characterized in that: the non-working surface of institute's displacement sensors is provided with insulating barrier.
CN201420724464.2U 2014-11-26 2014-11-26 Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether Withdrawn - After Issue CN204262872U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420724464.2U CN204262872U (en) 2014-11-26 2014-11-26 Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420724464.2U CN204262872U (en) 2014-11-26 2014-11-26 Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether

Publications (1)

Publication Number Publication Date
CN204262872U true CN204262872U (en) 2015-04-15

Family

ID=52797769

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420724464.2U Withdrawn - After Issue CN204262872U (en) 2014-11-26 2014-11-26 Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether

Country Status (1)

Country Link
CN (1) CN204262872U (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104440343A (en) * 2014-11-26 2015-03-25 广东工业大学 Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor
CN104889793A (en) * 2015-06-08 2015-09-09 广东工业大学 Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform
CN106341000A (en) * 2016-10-10 2017-01-18 深圳市马太智能科技有限公司 Flexible dual-driving motion platform
CN107492398A (en) * 2017-09-12 2017-12-19 苏州迈客荣自动化技术有限公司 A kind of one-dimensional micro-displacement platform
CN108213803A (en) * 2018-03-27 2018-06-29 深圳市牧激科技有限公司 Metal plate cutting machine
CN108726106A (en) * 2018-06-11 2018-11-02 广东科学技术职业学院 A kind of piezoelectric stack driving feeding pedestal

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104440343A (en) * 2014-11-26 2015-03-25 广东工业大学 Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor
WO2016082741A1 (en) * 2014-11-26 2016-06-02 广东工业大学 Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor
CN104889793A (en) * 2015-06-08 2015-09-09 广东工业大学 Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform
CN106341000A (en) * 2016-10-10 2017-01-18 深圳市马太智能科技有限公司 Flexible dual-driving motion platform
CN107492398A (en) * 2017-09-12 2017-12-19 苏州迈客荣自动化技术有限公司 A kind of one-dimensional micro-displacement platform
CN108213803A (en) * 2018-03-27 2018-06-29 深圳市牧激科技有限公司 Metal plate cutting machine
CN108726106A (en) * 2018-06-11 2018-11-02 广东科学技术职业学院 A kind of piezoelectric stack driving feeding pedestal

Similar Documents

Publication Publication Date Title
CN104440343A (en) Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor
CN204262872U (en) Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether
CN104440344A (en) Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor
CN204700849U (en) Dynamic characteristic is adjustable grand micro-integrated compound platform
CN104440345A (en) Heterogeneous motor common-stator multi-drive macro and micro integrated high-speed precise movement two-dimensional platform
CN104889951A (en) Dynamic characteristic adjustable macro-micro integrated composite platform
CN204248537U (en) Isomery motor is the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether
CN102943839B (en) Precision positioning vibration isolation platform
CN102543217B (en) Macro-micro driven bidimensional integrated micro positioning platform
CN106896851B (en) A kind of rotation and the mobile double-flexibility beam control device and method directly driven
CN106933266B (en) A kind of more flexible beam vibration control apparatus and method based on synchronous belt driving
WO2007144906A1 (en) Coordinate measuring machine
CN106891306B (en) Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure
CN203092144U (en) Coaxial macro-micro composite linear motion platform device
CN106594070B (en) Secondary nanophase precision actuation workbench based on flexible structure
CN102969030A (en) Plane type precise two-dimensional micrometric displacement platform
CN103978392B (en) Micro-feeding device based on the mobile rigidity frequency-adjustable supported
CN108827571A (en) Two-freedom vibrating flexible beam detection control apparatus and method
CN102830711B (en) Large-stroke and high-precision micro-motion platform
CN204221489U (en) Linear electric motors are the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether
CN107598869B (en) Damping-adjustable precise direct-drive air floating platform
CN104259991B (en) Power control module based on stiffness variable compliant mechanism
CN104889793A (en) Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform
CN204748155U (en) Compound platform of grand little integration of damping shell fragment formula rigidity tunable frequency
CN208316549U (en) Straight driving transmission mechanism

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned
AV01 Patent right actively abandoned

Granted publication date: 20150415

Effective date of abandoning: 20170510