CN107994806B - Precision piezoelectric stick-slip turntable and its driving method - Google Patents
Precision piezoelectric stick-slip turntable and its driving method Download PDFInfo
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- CN107994806B CN107994806B CN201810029989.7A CN201810029989A CN107994806B CN 107994806 B CN107994806 B CN 107994806B CN 201810029989 A CN201810029989 A CN 201810029989A CN 107994806 B CN107994806 B CN 107994806B
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- 229910045601 alloy Inorganic materials 0.000 claims description 27
- 238000006073 displacement reaction Methods 0.000 claims description 21
- 229910001094 6061 aluminium alloy Inorganic materials 0.000 claims description 12
- 229910001008 7075 aluminium alloy Inorganic materials 0.000 claims description 12
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 12
- 239000002783 friction material Substances 0.000 claims description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 12
- 229910001344 5052 aluminium alloy Inorganic materials 0.000 claims description 11
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
- H02N2/123—Mechanical transmission means, e.g. for gearing
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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Abstract
A kind of precision piezoelectric stick-slip turntable, to solve the technical problems such as current stick-slip formula piezoelectricity rotating platform thrust output is small, positioning accuracy is low, movement velocity is slow, frictional dissipation is big and environmental suitability is poor.The present invention includes shell, limiting device I, bearing, gear, turntable, package board, rack gear, limiting device II, stator, baffle and encapsulating shell.By wheel and rack engaged transmission, the thrust and speed of rotating platform are improved；Turntable movement is driven by the rotation of gear, compared to fine motion rotating platform is directly driven, is reduced between driving element and rotary shaft due to the loss for the generation that quickly rubs；Under different operating conditions, platform can realize the adjusting to driving element normal pressure size at any time, effectively improve the output accuracy and environmental suitability of turntable.The present invention has a good application prospect in precision optical instrument, biological microoperation and micro-nano precision actuation and field of locating technology.
Description
Technical field
The present invention relates to a kind of precision piezoelectric stick-slip turntables, belong to micro-nano precision actuation and field of locating technology.
Background technique
Piezoelectric driving technology is the novel drive that a kind of inverse piezoelectric effect using piezoelectric material converts electrical energy into mechanical energy
Flowing mode has low speed high torque (thrust), torque density height, flexible design, structure compared with traditional electromagnetic drive mode
It is compact, positioning accuracy is high, fast response time, cut off self-lock, without electromagnetic interference and not by electromagnetic interference and can not use bearing
The advantages that with lubrication, in joint of robot driving, precision instrumentation, Ultra-precision Turning, aerospace and life science etc.
Field all has broad application prospect, is one of the hot spot of extraordinary actuation techniques area research accurate in recent years.
Piezoelectric micromotion platform is to be driven by piezoelectric ceramic actuator, can generate micro/nano level kinematic accuracy and movement point
The precision positioning device of resolution, it can be applied to Ultra-precision Turning, large scale integrated circuit manufacture, scanning probe microscopy, life
In the cutting edge technologies such as object engineering field.Fine motion rotating platform in the prior art, mostly direct drive fine motion rotating platform, it
Using piezoelectric ceramic actuator as driving source, directly drive fine motion rotating platform and carry out micro- rotation, thus drive be fixed on it is flat
Device on platform realizes rotary motion.Since traditional fine motion rotating platform is directly driven using piezoelectric ceramics, often exist defeated
Thrust is small out, positioning accuracy is low, movement velocity is slow and the technical problems such as frictional dissipation is big, environmental suitability is poor, therefore, design one
The micro/nano level stick-slip inertia that kind thrust output is big, high transmission accuracy, movement velocity is fast, frictional dissipation is small, environmental suitability is strong
Driving platform be very it is necessary to.
Summary of the invention
To solve to have, stick-slip formula piezoelectricity rotating platform thrust output is small, positioning accuracy is low, movement velocity is slow, frictional dissipation
Greatly, the technical problems such as environmental suitability difference, the invention discloses a kind of precision piezoelectric stick-slip turntables.
The technical scheme adopted by the invention is that:
The precision piezoelectric stick-slip turntable is a kind of high-precision of dual-stack double-driving foot stator module implementation
Piezoelectricity stick-slip turntable includes shell, limiting device I, bearing, gear, turntable, package board, rack gear, limiting device II, determines
Son, baffle and encapsulating shell；Limiting device I is immobilized in the shell by limiting device installation base, and bearing passes through bearing mounting surface
It is mounted in shell, gear is mounted in shell by gear installation groove, and gear is fixedly connected by keyway with rotary shaft, rotation
Turntable is inserted on the inside of bearing by rotary shaft, and package board, which is connected through a screw thread, to be fixed on shell, and rack gear passes through limiting slot I and limit
Position slot II is mounted in limiting device I and limiting device II to be meshed with gear, and limiting device II is installed convex by limiting device
Platform II is mounted in shell, and stator is mounted in shell by stator fixing bolt and is in close contact with rack gear, and baffle passes through baffle
Installation threaded hole is fixed on shell, and encapsulating shell is mounted on shell by encapsulating shell threaded hole.
The shell include limiting device threaded hole I, limiting device installation base I, bearing mounting surface, gear installation it is recessed
Slot, limiting device installation base II, limiting device threaded hole II, package board threaded hole, package board mounting surface, stator threaded hole,
Baffle installs threaded hole, built-in threading hole and encapsulating shell threaded hole；Limiting device threaded hole I and limiting device installation base I are used
In installation limiting device I, for installing gear, limiting device installation is convex for bearing mounting surface and bearing touch, gear installation groove
For installing limiting device II, package board can be fixedly mounted on encapsulation by package board threaded hole for platform II and limiting device threaded hole II
On plate mounting surface, baffle can be fixedly mounted on shell, encapsulate for installing stator, baffle installation threaded hole by stator threaded hole
Shell threaded hole is for installing encapsulating shell.
The limiting device I is provided with limiting device mounting hole I, limiting slot I and limit pedestal I；Limiting device mounting hole I
For limiting device I to be fixedly mounted on limiting device installation base I, limiting slot I and limit pedestal are for placing rack gear.
The bearing includes bearing inner surface and bearing outside surface；Bearing inner surface is contacted with rotary shaft, bearing outside surface
It is contacted with shell.
The gear includes gear inner surface, keyway and gear straight-tooth；Gear inner surface is contacted with rotary shaft, and keyway passes through
Cooperated with the fixed rotation shaft gear straight-tooth of key with rack gear straight-tooth.
The turntable includes that graduation mark, peripheral unit installation threaded hole, key and rotary shaft, peripheral unit install threaded hole
For installing peripheral unit, key is used to fix rotary shaft and gear installation, rotary shaft and bearing inner surface and gear inner surface
Contact.
The package board is provided with package board mounting hole, and package board is fixedly mounted on shell by package board mounting hole by screw
On body.
The rack gear includes limited block I, limit plate, rack gear straight-tooth and frictional contact surface, and wherein limit plate is placed on limit
In slot I and limiting slot II, rack gear straight-tooth and gear straight-tooth mating connection gear and rack gear, frictional contact surface are contacted with driving foot.
The limiting device II is provided with limit pedestal II, limited block II, limiting device mounting hole II and limiting slot II；Spiral shell
Bolt is used to for limiting device II being fixed on limiting device installation base II, limited block II and limit by limiting device mounting hole II
Position block I cooperates, and limiting slot II and limit pedestal II are for placing rack gear.
The stator includes pre-loading screw, gasket, piezoelectric stack, flexible hinge and stator fixing bolt；The piezo stack
Heap is fixed in flexible hinge by gasket and pre-loading screw, and the stator fixing bolt is fixed stator by stator mounting hole
It is mounted on shell；
The flexure hinge mechanism be provided with end crossbeam, stator mounting hole, pre-loading screw mounting hole, straight round hinge I,
It is straight round hinge II, straight round hinge III, straight round hinge IV, straight round hinge V, straight round hinge VI, double-driving foot, straight
Round groove, rigid straight beam Ⅸ, rigid beam III and rigid straight beam Ⅹ.The end crossbeam is used to transmit the effect of piezoelectric stack
Power, the stator mounting hole is for fixing flexure hinge mechanism.The pre-loading screw mounting hole and pre-loading screw carry out screw thread company
Connect preload piezoelectric stack.The straight round hinge I and straight round hinge IV are rigidly connected by rigid beam III, described straight round
Hinge V and straight round hinge VI pass through rigid straight beam Ⅸ and are rigidly connected, and the straight round hinge II and straight round hinge III pass through
Rigid straight beam Ⅹ is rigidly connected, the straight round hinge I, straight round hinge IV, rigid beam III, straight round hinge V,
The frame-type structure that rigid straight beam Ⅸ and straight round hinge VI form may be implemented rack gear and transport to the right along limiting slot I and limiting slot II
Dynamic, the straight round hinge I, straight round hinge IV, rigid beam III, straight round hinge II, straight round hinge III and rigidity are straight
The frame-type structure that beam Ⅹ forms may be implemented rack gear and move downward along limiting slot I and limiting slot II.The double-driving foot is located at end
Portion's crossbeam axial centerline, double-driving foot end are coated with friction class material.
Or the precision piezoelectric stick-slip turntable for a kind of diamond shape stator module implementation, the flexure hinge mechanism are adopted
With 5052 aluminium alloys, 6061 aluminium alloys or 7075 aluminum alloy materials, flexible hinge uses diamond structure hinge.The flexible hinge
It is provided with driving foot, end crossbeam, stator mounting hole, pre-loading screw mounting hole, rigidity folding beam I, rigidity folding beam II, rigidity folding beam
III, rigidity folding beam IV, straight round hinge VIII, straight round hinge VII, straight round hinge Ⅹ and straight round hinge Ⅸ.The flexible hinge
Chain is fixed on stator threaded hole by stator mounting hole, it is described driving foot be located at end crossbeam middle position, driving foot with
The frictional contact surface sliding contact of rack gear drives sufficient surface to be coated with rub resistance material, the rigidity folding beam I and rigidity folding beam II
It being rigidly connected by straight round hinge VII, the rigidity folding beam III and rigidity folding beam IV are rigidly connected by straight round hinge Ⅸ,
The straight round hinge VIII and straight round hinge VII roll over beam I by rigidity and are rigidly connected, the straight round hinge Ⅹ and straight round
Hinge Ⅸ rolls over beam III by rigidity and is rigidly connected.The straight round hinge VIII, straight round hinge VII and straight round hinge Ⅸ have
Identical radius of corner value R3, ratio of the straight round hinge Ⅹ with radius of corner value R4, R4 and R3 is 2 ~ 5, adjustment fillet half
The axial rigidity distribution of flexible hinge 9-4 can be changed in the ratio of diameter R4 and R3.
Or the precision piezoelectric stick-slip turntable for a kind of inclined ladder type stator module implementation, the flexure hinge mechanism
Using the flexible hinge of inclined ladder type frame-type structure, the flexure hinge mechanism uses 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium
Alloy, Ti-35A titanium alloy or Ti-13 titanium alloy material.The flexure hinge mechanism is provided with stator mounting hole, passes through stator
Fixing bolt fixes the stator threaded hole of flexure hinge mechanism and shell.The flexure hinge mechanism is provided with rigid straight beam V
With rigid straight beam VI, the flexure hinge mechanism is provided with straight round hinge II, straight round hinge III, straight round hinge V and straight
Round hinge VI, the straight round hinge II and straight round hinge III pass through rigid straight beam VI and are rigidly connected, the straight round hinge
Chain V and straight round hinge VI pass through rigid straight beam V and are rigidly connected.The distance between the rigidity straight beam V and rigid straight beam VI
For H, the straight round hinge II, straight round hinge III, straight round hinge V and straight round hinge VI fillet having the same half
Diameter value R8, the wherein value range 0.017 ~ 0.09 of R8/H, it is ensured that flexure hinge mechanism have displacement equations ability and
Piezoelectric stack has certain installation space.The flexure hinge mechanism is provided with inclined ladder type beam, the length of the inclined ladder type beam
For K, wherein K/H value range is 1.5 ~ 4, and the angle of the inclined ladder type beam and horizontal direction is α, and wherein α value range is 10 °
~80°.Stator carries out displacement equations by flexure hinge mechanism, and the inclined ladder type beam is unevenly distributed along axial rigidity and generates side
To displacement.The sufficient end face of the driving is accordingly coated with ceramic-like or glass fibre class friction material, the sufficient drive rack fortune of the driving
It is dynamic.
Or the precision piezoelectric stick-slip turntable for a kind of unsymmetric structure stator module implementation, the flexible hinge
Mechanism uses 5052 aluminium alloys, 6061 aluminium alloys or 7075 aluminum alloy materials, and flexure hinge mechanism uses asymmetric frame-type structure
Hinge, the flexure hinge mechanism are provided with stator mounting hole, flexure hinge mechanism can be fixed on shell by stator mounting hole
On body, the flexure hinge mechanism is provided with straight round hinge I, straight round hinge IV, straight round hinge V, straight round hinge
VI, rigid straight beam I and rigid straight beam II, the straight round hinge I and straight round hinge IV pass through rigid straight beam II and are rigidly connected,
The straight round hinge V and straight round hinge VI pass through rigid straight beam I and are rigidly connected.The straight round hinge I and straight round hinge
The radius of corner value R5 having the same of chain IV, straight round hinge V and straight round hinge VI radius of corner value R6 having the same,
By adjusting the ratio of radius of corner R6 and R5, the axial rigidity distribution of stator can be changed, wherein the ratio range of R6 and R5 is
0.1~1.The flexure hinge mechanism uses asymmetric frame-type structure, it is made to be unevenly distributed along axial rigidity and generate lateral position
It moves.The flexure hinge mechanism is provided with driving foot and end crossbeam, and driving foot is located at the middle of end crossbeam, the driving
Foot with a thickness of N, rack gear with a thickness of M, wherein N < M can guarantee effective contact area, improve transmission efficiency, wherein M=(N+
1) mm.The sufficient end face of the driving is accordingly coated with ceramic-like or glass fibre class friction material.
Or the precision piezoelectric stick-slip turntable for a kind of dual-stack arch stator module implementation, the flexible hinge
Mechanism is provided with driving foot, crossbeam, stator mounting hole, pre-loading screw mounting hole, ellipse hinge II, ellipse hinge I, rigidity
Crossbeam II, rigid curved beam I, rigid curved beam II, rigid curved beam III and rigid curved beam IV.The driving foot is located at the interposition of crossbeam
It sets, the sufficient end of the driving is coated with friction material, and driving foot is contacted with CONTACT WITH FRICTION upper thread, is used for drive rack.The stator
Mounting hole is for fixing flexure hinge mechanism, and the pre-loading screw mounting hole is by being threadedly coupled fixed piezo stack with pre-loading screw
Heap.The rigid beam II is located at the center of flexure hinge mechanism, and the rigidity curved beam I and rigid curved beam II pass through ellipse
Type hinge I is rigidly connected, and the rigidity curved beam III and rigid curved beam IV are rigidly connected by ellipse hinge II, and the rigidity is bent
Rack gear may be implemented along limiting slot I and limit in the frame-type structure that beam I, rigid curved beam II, ellipse hinge I and rigid beam II form
Position slot II moves right, the frame-type knot that the rigid beam II, ellipse hinge II, rigid curved beam III and rigid curved beam IV form
Structure may be implemented rack gear and move downward along limiting slot I and limiting slot II.
Or the precision piezoelectric stick-slip turntable for a kind of oblique slot type stator module implementation, the flexure hinge mechanism
Using 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloy or Ti-13 titanium alloy material, flexible hinge machine
Structure uses oblique slot type frame-shaped construction hinge.The flexure hinge mechanism is provided with stator mounting hole, will by stator fixing bolt
The stator threaded hole of flexure hinge mechanism and shell is fixed.The flexure hinge mechanism is provided with rigid straight beam Ⅺ and rigid straight beam
Ⅻ, the flexure hinge mechanism is provided with straight round hinge II, straight round hinge III, straight round hinge V and straight round hinge
VI, the straight round hinge II and straight round hinge III pass through rigid straight beam Ⅻ and are rigidly connected, the straight round hinge V and straight
Round hinge VI passes through rigid straight beam Ⅺ and is rigidly connected, and the distance between the rigidity straight beam Ⅺ and rigid straight beam Ⅻ are L, rigidity
The width of straight beam Ⅺ and rigid straight beam Ⅻ is L1, and with a thickness of B, wherein L1/L value range is that 1/6 ~ 1/2, B/L value range is
0.5 ~ 1 can guarantee the ability that flexure hinge mechanism has displacement equations.It is the straight round hinge II, straight round hinge III, straight
Round hinge V and straight round hinge VI radius of corner value R1 having the same, wherein R1/L value range is 1/60 ~ 1/12.Institute
It states flexure hinge mechanism and is provided with skewed slot, it is highly L2 that the number of the skewed slot, which is X, width C, the angle with vertical direction
For α, wherein X >=1, L2/C value range are that 1 ~ 8, C/L value range is 0.01 ~ 0.1, the value range of angle α is 10 ° ~
80°.The flexure hinge mechanism is provided with driving foot and thickeies crossbeam, and the driving foot is located at the middle position for thickening crossbeam
Place, sawtooth wave electric signal motivate piezoelectric stack to generate power output, are transmitted on driving foot by skewed slot, the skewed slot and driving foot
It is unevenly distributed along axial rigidity and generates lateral displacement.The sufficient end face of the driving is accordingly coated with ceramic-like or glass fibre class friction
Material, the driving foot with a thickness of N, rack gear with a thickness of M, wherein N≤M can guarantee effective contact area, improve transmission
Efficiency, wherein M=(N+1) mm.
Or the precision piezoelectric stick-slip turntable for a kind of dual-stack single-driving foot stator module implementation, the flexibility
Linkage is provided with driving foot, crossbeam, stator mounting hole, pre-loading screw mounting hole, rigid straight beam, straight round hinge I, rigidity
Crossbeam, straight round hinge II, straight round hinge III, straight round hinge IV, straight round hinge V and straight round hinge VI；The drive
Action spot is located at the middle position of crossbeam, the frictional contact surface sliding contact of driving foot and rack gear, the stator mounting hole by with
Stator fixing bolt, which is threadedly coupled, is fixed on stator on the stator threaded hole of shell, the pre-loading screw mounting hole and pre-
Tight screw thread connection pre-tightens piezoelectric stack, and the straight round hinge I and straight round hinge IV are rigidly connected by rigid beam
It connects, the straight round hinge II and straight round hinge III pass through rigid straight beam rigid connection, the straight round hinge V and straight circle
Type hinge VI passes through rigid straight beam rigid connection.The straight round hinge II, straight round hinge III, straight round hinge V and straight circle
The radius of corner having the same of type hinge VI is R1, the straight round hinge I and straight round hinge IV fillet having the same half
Diameter is that the ratio of R2, R1 and R2 are D, and the value range of D is 1.5 ~ 4.5.
The baffle plate setting has baffle mounting hole；Baffle mounting hole is used to baffle being mounted on shell.
The encapsulating shell is provided with encapsulating shell mounting hole, external threading hole and conducting wire placed cavity, and bolt is pacified by encapsulating shell
Encapsulating shell is mounted on shell by dress hole and encapsulating shell threaded hole.
The length of the rack gear is a, and the width of the limiting device I and limiting device II is b, limiting device I and limit
The distance between device II is c, wherein a > b+c.
The complex incentive electric signal that the driving method uses realizes that complex incentive electric signal includes friction regulation wave and drive
Dynamic wave excites stator at the rapid deformation stage by the regulation wave complex superposition that will rub in the quick power-on stage of driving wave
In micro- secondary high-frequency resonance state, the frictional resistance between rapid deformation stage stator and rack gear is reduced based on ultrasonic antifriction effect；Institute
Stating driving wave is sawtooth wave, and the friction regulation wave is sine wave；Wherein the period of sawtooth wave is T1, driving voltage amplitude is V1,
Symmetry is S, sine wave period T2, driving voltage amplitude is V2, the period ratio of sawtooth wave and sine wave is T1/T2=100~
20000, driving voltage Amplitude Ration is V1/V2=2~6。
The beneficial effects of the present invention are:
Due to the engaged transmission using straight spur gear and spur rack, the output for improving rotating platform pushes away the present invention
Power and movement velocity；Turntable movement is driven by the rotation of gear, compared to fine motion rotating platform is directly driven, reduces drive
Due to the loss for the generation that quickly rubs between dynamic element and rotary shaft；Under different operating conditions, platform can be realized at any time to driving member
The adjusting of part normal pressure size effectively improves the output accuracy and environmental suitability of turntable.
Detailed description of the invention
The precision piezoelectric that Fig. 1 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
The structural schematic diagram of sliding turntable；
The precision piezoelectric that Fig. 2 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
The schematic diagram of housing structure of sliding turntable；
The precision piezoelectric that Fig. 3 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
I structural schematic diagram of limiting device of sliding turntable；
The precision piezoelectric that Fig. 4 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
The bearing arrangement schematic diagram of sliding turntable；
The precision piezoelectric that Fig. 5 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
The gear structure schematic diagram of sliding turntable；
The precision piezoelectric that Fig. 6 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
The rotary display stand structure schematic diagram of sliding turntable；
The precision piezoelectric that Fig. 7 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
The package board structural schematic diagram of sliding turntable；
The precision piezoelectric that Fig. 8 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
The rack structure schematic diagram I of sliding turntable；
The precision piezoelectric that Fig. 9 show a kind of dual-stack double-driving foot stator module implementation proposed by the present invention is viscous
The rack structure schematic diagram II of sliding turntable；
Figure 10 show a kind of precision piezoelectric of dual-stack double-driving foot stator module implementation proposed by the present invention
II schematic diagram of limiting device of stick-slip turntable；
Figure 11 show a kind of precision piezoelectric of dual-stack double-driving foot stator module implementation proposed by the present invention
The stator structure schematic diagram of stick-slip turntable；
Figure 12 show a kind of precision piezoelectric of dual-stack double-driving foot stator module implementation proposed by the present invention
The front view of the flexible hinge of stick-slip turntable；
Figure 13 show a kind of precision piezoelectric of dual-stack double-driving foot stator module implementation proposed by the present invention
The baffle arrangement schematic diagram of stick-slip turntable；
Figure 14 show a kind of precision piezoelectric of dual-stack double-driving foot stator module implementation proposed by the present invention
The encapsulating shell structural schematic diagram of stick-slip turntable；
Figure 15 show a kind of precision piezoelectric stick-slip turntable of diamond shape stator module implementation proposed by the present invention
Structural schematic diagram；
Figure 16 show a kind of precision piezoelectric stick-slip turntable of diamond shape stator module implementation proposed by the present invention
Flexible hinge structure schematic diagram；
Figure 17 show a kind of precision piezoelectric stick-slip rotation of inclined ladder type stator module implementation proposed by the present invention
The structural schematic diagram of platform；
Figure 18 show a kind of precision piezoelectric stick-slip rotation of inclined ladder type stator module implementation proposed by the present invention
The flexible hinge structure schematic diagram of platform；
Figure 19 show a kind of precision piezoelectric stick-slip of unsymmetric structure stator module implementation proposed by the present invention
The structural schematic diagram of turntable；
Figure 20 show a kind of precision piezoelectric stick-slip of unsymmetric structure stator module implementation proposed by the present invention
The flexible hinge structure schematic diagram of turntable；
Figure 21 show a kind of precision piezoelectric stick-slip of dual-stack arch stator module implementation proposed by the present invention
The structural schematic diagram of turntable；
Figure 22 show a kind of precision piezoelectric stick-slip of dual-stack arch stator module implementation proposed by the present invention
The flexible hinge structure schematic diagram of turntable；
Figure 23 show a kind of precision piezoelectric stick-slip rotation of oblique slot type stator module implementation proposed by the present invention
The structural schematic diagram of platform；
Figure 24 show a kind of precision piezoelectric stick-slip rotation of oblique slot type stator module implementation proposed by the present invention
The flexible hinge schematic diagram of platform；
Figure 25 show a kind of precision piezoelectric of two-fold heap single-driving foot stator module implementation proposed by the present invention
The structural schematic diagram of stick-slip turntable；
Figure 26 show a kind of precision piezoelectric of two-fold heap single-driving foot stator module implementation proposed by the present invention
The flexible hinge structure schematic diagram of stick-slip turntable；
Figure 27 show a kind of drive signal waveform schematic diagram of precision piezoelectric stick-slip turntable proposed by the present invention.
Specific embodiment
Specific embodiment 1: illustrating present embodiment in conjunction with Fig. 1 ~ Figure 14, present embodiments provide for a kind of dual-stacks
The specific embodiment of the precision piezoelectric stick-slip turntable of double-driving foot stator module implementation.A kind of dual-stack is double
The specific embodiment of the precision piezoelectric stick-slip turntable of sufficient stator module implementation is driven to be expressed as follows:
A kind of precision piezoelectric stick-slip turntable of dual-stack double-driving foot stator module implementation includes shell
1, limiting device I 2, bearing 3, gear 4, turntable 5, package board 6, rack gear 7, limiting device II 8, stator 9, baffle 10 and encapsulation
Shell 11.
The shell 1 includes I 1-1 of limiting device threaded hole, I 1-2 of limiting device installation base, bearing mounting surface 1-3, tooth
Take turns installation groove 1-4, II 1-5 of limiting device installation base, II 1-6 of limiting device threaded hole, package board threaded hole 1-7, encapsulation
Plate mounting surface 1-8, stator threaded hole 1-9, baffle installation threaded hole 1-10, built-in threading hole 1-11 and encapsulating shell threaded hole 1-
12.I 1-1 of limiting device threaded hole is used to limiting device I 2 being mounted on I 1-2 of limiting device installation base, the axis
It holds mounting surface 1-3 to contact with bearing 3, the gear installation groove 1-4 is for installing gear 4, the limiting device threaded hole II
1-6 is used to limiting device II 8 being mounted on II 1-5 of limiting device installation base, and the package board threaded hole 1-7 can will be encapsulated
Plate 6 is fixedly mounted on package board mounting surface 1-8, and the stator threaded hole 1-9 installs spiral shell for installing stator 9, the baffle
Baffle 10 can be fixedly mounted on shell 1 by pit 1-10, and conducting wire can be passed through inside shell 1 by the built-in threading hole 1-11,
For the encapsulating shell threaded hole 1-12 for installing encapsulating shell 11, encapsulating shell 11 can place the conducting wire of a segment length.
The limiting device I 2 includes I 2-1 of limiting device mounting hole, I 2-2 of limiting slot and limit I 2-3 of pedestal.The limit
Device mounting hole I 2-1 and I 1-1 of limiting device threaded hole in position, which is bolted, fills the limit that limiting device I 2 installs shell 1
It setting on I 1-2 of installation base, rack gear 7 is placed in I 2-2 of limiting slot, I 2-2 of limiting slot can be such that rack gear 7 keeps vertically, thus
Engage gear 4 and rack gear 7 preferably, I 2-3 of limit pedestal is for placing rack gear 7.
The bearing 3 is provided with bearing inner surface 3-1 and bearing outside surface 3-2.The bearing inner surface 3-1 and rotary shaft
5-4 contact, by 3 sets of bearing on rotary shaft 5-4, the bearing outside surface 3-2 is contacted with shell 1, and bearing 3 is placed on shell
In 1, the cooperation of bearing 3 and rotary shaft 5-4 rotate rotary shaft 5-4 more effectively.
The gear 4 includes gear inner surface 4-1, keyway 4-2 and gear straight-tooth 4-3.The gear inner surface 4-1 and rotation
The outer side contacts of shaft 5-4, the keyway 4-2 and key 5-3 are cooperatively connected, gear 4 and rotary shaft 5-4 are linked together, gear 4
Rotary shaft 5-4 common rotation can be driven, the gear straight-tooth 4-3 is engaged with rack gear straight-tooth 7-3, can be by the linear motion of rack gear 7
Dress is changed to the rotary motion of gear 4, improves the thrust output and movement velocity of rotating platform, reduces driving element and rotation
Due to the loss for the generation that quickly rubs between axis.
The turntable 5 includes graduation mark 5-1, peripheral unit installation threaded hole 5-2, key 5-3 and rotary shaft 5-4.It is described
Convenient for the angle of display rotation, the peripheral unit installation threaded hole 5-2 is used to placing and installing other equipment to exist graduation mark 5-1
On turntable 5, the key 5-3 and keyway 4-2 are cooperatively connected, and rotary shaft 5-4 and gear 4 are linked together, and realize common turn
It is dynamic, rotation is realized on the inside of the rotary shaft 5-4 insertion bearing 3.
The package board 6 is provided with package board mounting hole 6-1.The package board mounting hole 6-1 passes through bolt and package board
Threaded hole 1-7 is attached, and package board 6 is mounted on shell 1.
The rack gear 7 includes I 7-1 of limited block, limit plate 7-2, rack gear straight-tooth 7-3 and frictional contact surface 7-4.The limit
I 7-1 of block and II 8-2 of limited block cooperates, and when moving to certain position, I 7-1 of limited block can be mutual with II 8-2 of limited block
It blocks, prevents rack gear 7 from falling, the limit plate 7-2 is placed in II 8-4 of I 2-2 of limiting slot and limiting slot, defines that rack gear 7 is transported
Dynamic direction, the rack gear straight-tooth 7-3 are engaged with gear straight-tooth 4-3, and the linear motion of rack gear 7 is converted to the rotation of gear 4
Movement, the frictional contact surface 7-4 are contacted with driving foot 9-4-1, and driving foot 9-4-1 can pass through CONTACT WITH FRICTION band carry-over bar 7
Realize linear motion.
The limiting device II 8 includes limit II 8-1 of pedestal, II 8-2 of limited block, II 8-3 of limiting device mounting hole and limit
Position II 8-4 of slot.II 8-1 of limit pedestal cooperates, realizes for placing rack gear 7, II 8-2 of limited block and I 7-1 of limited block
Limitation to protection and the movement travel of rack gear 7, II 8-3 of limiting device mounting hole and II 1-6 of limiting device threaded hole are logical
It crosses to be bolted and limiting device II 8 is mounted on II 1-5 of limiting device installation base of shell 1, in II 8-4 of limiting slot
Rack gear 7 is placed, II 8-4 of limiting slot can be such that rack gear 7 keeps vertically, to make 4 rack gear of gear and 7 preferably engagements.
The stator 9 includes the fixed spiral shell of pre-loading screw 9-1, gasket 9-2, piezoelectric stack 9-3, flexible hinge 9-4 and stator
Bolt 9-5；The piezoelectric stack 9-3 is fixed in flexible hinge 9-4 by gasket 9-2 and pre-loading screw 9-1, and the stator is fixed
Stator 9 is fixedly mounted on shell 1 by bolt 9-5 by stator mounting hole 9-4-4；
The flexure hinge mechanism 9-4 is provided with end crossbeam 9-4-3, stator mounting hole 9-4-4, pre-loading screw mounting hole
9-4-6, straight round I 9-4-9 of hinge, straight round II 9-4-13 of hinge, straight round III 9-4-14 of hinge, straight round hinge IV
9-4-15, straight round V 9-4-16 of hinge, straight round VI 9-4-17 of hinge, double-driving foot 9-4-70, straight round groove 9-4-
71, Ⅸ 9-4-72 of rigid straight beam, III 9-4-73 of rigid beam and Ⅹ 9-4-74 of rigid straight beam.The end crossbeam 9-4-3 is used
In the active force of transmitting piezoelectric stack 9-3, the stator mounting hole 9-4-4 is for fixing flexure hinge mechanism 9-4.The preload
Screw mounting hole 9-4-6, which be threadedly coupled with pre-loading screw 9-1, pre-tightens piezoelectric stack 9-3.Straight round I 9-4-9 of hinge
Be rigidly connected with straight round IV 9-4-15 of hinge by III 9-4-73 of rigid beam, straight round V 9-4-16 of hinge with
Straight round VI 9-4-17 of hinge is rigidly connected by rigidity Ⅸ 9-4-72 of straight beam, straight round II 9-4-13 of hinge with directly
Round III 9-4-14 of hinge is rigidly connected by rigidity Ⅹ 9-4-74 of straight beam.Straight round I 9-4-9 of hinge, straight circle
IV 9-4-15 of type hinge, III 9-4-73 of rigid beam, rigidity Ⅸ 9-4-72 of straight beam and straight round VI 9-4-17 of hinge composition
Frame-type structure rack gear 7 may be implemented moved right along I 2-2 of limiting slot and II 8-4 of limiting slot, straight round I 9-4- of hinge
9, straight round IV 9-4-15 of hinge, III 9-4-73 of rigid beam, straight round II 9-4-13 of hinge, straight round III 9-4- of hinge
Rack gear 7 may be implemented along I 2-2 of limiting slot and II 8-4 of limiting slot to the left in the frame-type structure that 14 and rigidity Ⅹ 9-4-74 of straight beam is formed
Movement.The double-driving foot 9-4-70 is located at end crossbeam 9-4-3 axial centerline, and the end double-driving foot 9-4-70, which is coated with, rubs
Wipe class material.
Or a kind of precision piezoelectric stick-slip turntable for diamond shape stator module implementation.The flexure hinge mechanism 9-
4 use 5052,6061 or 7075 aluminum alloy materials, and flexure hinge mechanism 9-4 uses diamond structure hinge.The flexible hinge machine
Structure 9-4 is provided with driving foot 9-4-1, end crossbeam 9-4-3, stator mounting hole 9-4-4, pre-loading screw mounting hole 9-4-6, rigidity
Roll over I 9-4-20 of beam, rigidity folding II 9-4-21 of beam, rigidity folding III 9-4-22 of beam, rigidity folding IV 9-4-23 of beam, straight round hinge
VIII 9-4-24, straight round VII 9-4-25 of hinge, straight round Ⅹ 9-4-26 of hinge and straight round Ⅸ 9-4-27 of hinge.It is described soft
Property linkage 9-4 is fixed on stator threaded hole 1-9 by stator mounting hole 9-4-4, and the driving foot 9-4-1 is located at end
The middle position of crossbeam 9-4-3 drives the frictional contact surface 7-4 sliding contact of foot 9-4-1 and rack gear 7, drives the table of foot 9-4-1
Face is coated with rub resistance material, and rigidity folding I 9-4-20 of beam and rigidity folding II 9-4-21 of beam pass through straight round VII 9-4-25 of hinge
Rigid connection, rigidity folding III 9-4-22 of beam pass through straight round Ⅸ 9-4-27 of hinge with rigidity folding IV 9-4-23 of beam and rigidly connect
It connects, straight round VIII 9-4-24 of hinge and straight round VII 9-4-25 of hinge pass through rigidity and roll over I 9-420 of beam rigid connection, institute
It states straight round Ⅹ 9-4-26 of hinge and straight round Ⅸ 9-4-27 of hinge and III 9-4-22 of beam rigid connection is rolled over by rigidity.It is described straight
Round VIII 9-4-24 of hinge, straight round VII 9-4-25 of hinge and straight round Ⅸ 9-4-27 of hinge radius of corner having the same
The ratio of value R3, straight round Ⅹ 9-4-26 of hinge with radius of corner value R4, R4 and R3 is 2 ~ 5, adjusts radius of corner R4 and R3
Ratio, can be changed flexure hinge mechanism 9-4 axial rigidity distribution.The value of R4 and R3 ratio is 3 in present embodiment.R3
It is different from the value of R4, cause the axial rigidity of flexure hinge mechanism 9-4 to be unevenly distributed, generates axial vibration in piezoelectric stack 9-3
When dynamic displacement, the axis of flexure hinge mechanism 9-4, which can deflect, generates lateral displacement.
Or a kind of precision piezoelectric stick-slip turntable for inclined ladder type stator module implementation.The flexure hinge mechanism
9-4 use inclined ladder type frame-type structure flexible hinge, the flexure hinge mechanism 9-4 using 5052 aluminium alloys, 6061 aluminium alloys,
7075 aluminium alloys, Ti-35A titanium alloy or Ti-13 titanium alloy material.The flexure hinge mechanism 9-4 is provided with stator mounting hole
9-4-4 is fixed flexure hinge mechanism 9-4 and the stator threaded hole 1-9 of shell 1 by stator fixing bolt 9-5.The flexibility
Linkage 9-4 is provided with VI 9-4-51 of rigid V 9-4-50 of straight beam and rigid straight beam, the flexure hinge mechanism 9-4 setting
There are straight round II 9-4-13 of hinge, straight round III 9-4-14 of hinge, straight round V 9-4-16 of hinge and straight round hinge VI
9-4-17, straight round II 9-4-13 of hinge and straight round III 9-4-14 of hinge pass through rigid straight beam VI 9-4-51 rigidity
Connection, straight round V 9-4-16 of hinge and straight round VI 9-4-17 of hinge are rigidly connected by rigidity V 9-4-50 of straight beam
It connects.The distance between VI 9-4-51 of rigidity V 9-4-50 of straight beam and rigid straight beam is H, straight round II 9- of hinge
4-13, straight round III 9-4-14 of hinge, straight round V 9-4-16 of hinge and straight round VI 9-4-17 of hinge circle having the same
Angular radius value R8, the wherein value range 0.017 ~ 0.09 of R8/H, it is ensured that flexure hinge mechanism 9-4 has displacement equations energy
Power and piezoelectric stack 9-3 have certain installation space, R8=1mm, H=12mm in present embodiment.The flexible hinge machine
Structure 9-4 is provided with inclined ladder type beam 9-4-21, and the length of the inclined ladder type beam 9-4-21 is K, and wherein K/H value range is 1.5 ~ 4,
The inclined ladder type beam 9-4-21 and the angle of horizontal direction are α, and wherein α value range is 10 ° ~ 80 °, the folder in present embodiment
Angle α is 30 °.Stator 9 carries out displacement equations by flexure hinge mechanism 9-4, and the inclined ladder type beam 9-4-21 is along axial rigidity point
Cloth is uneven and generates lateral displacement, friction drive when increasing the slowly deformation driving stage, when reducing the rapid deformation driving stage
Frictional resistance is, it can be achieved that comprehensive regulation to frictional force.The driving foot end face 9-4-1 is accordingly coated with ceramic-like or glass fibre
Class friction material, the driving foot 9-4-1 drive rack 7 move.
Or a kind of precision piezoelectric stick-slip turntable for unsymmetric structure stator module implementation.The flexible hinge
Mechanism 9-4 uses 5052 aluminium alloys, 6061 aluminium alloys or 7075 aluminum alloy materials, and flexure hinge mechanism 9-4 uses asymmetric frame
Type structure hinge, the flexure hinge mechanism 9-4 are provided with stator mounting hole 9-4-4, can will be soft by stator mounting hole 5-1-4
Property linkage 9-4 be fixed on shell 1, the flexure hinge mechanism 9-4 is provided with straight round I 9-4-9 of hinge, straight round
IV 9-4-15 of hinge, straight round V 9-4-16 of hinge, straight round VI 9-4-17 of hinge, rigidity I 9-4-30 of straight beam and rigidity are straight
Beam II 9-4-31, straight round I 9-4-9 of hinge and straight round IV 9-4-15 of hinge pass through rigid straight beam II 9-4-31 rigidity
Connection, straight round V 9-4-16 of hinge and straight round VI 9-4-17 of hinge are rigidly connected by rigidity I 9-4-30 of straight beam
It connects.Straight round I 9-4-9 of hinge and straight round IV 9-4-15 of hinge radius of corner value R5 having the same, straight round hinge
V 9-4-16 of chain and straight round VI 9-4-17 of hinge radius of corner value R6 having the same, by adjusting radius of corner R6 and R5
Ratio, can be changed stator 9 axial rigidity distribution, wherein the ratio range of R6 and R5 be 0.1 ~ 1.The flexure hinge mechanism
9-4 uses asymmetric frame-type structure, it is made to be unevenly distributed along axial rigidity and generate lateral displacement.Increase slowly deformation driving rank
Friction drive when section, frictional resistance is, it can be achieved that comprehensive regulation to frictional force when reducing the rapid deformation driving stage.It is described soft
Property linkage 9-4 be provided with driving foot 9-4-1 and end crossbeam 9-4-3, drive foot 9-4-1 to be located at end crossbeam 9-4-3's
Middle, the driving foot 9-4-1 with a thickness of N, rack gear 7 with a thickness of M, wherein N < M can guarantee effective contact area,
Improve transmission efficiency, M=8mm, N=7mm in present embodiment.The driving foot end face 9-4-1 is accordingly coated with ceramic-like or glass
Fiber-like friction material.
Or a kind of precision piezoelectric stick-slip turntable for dual-stack arch stator module implementation.The flexible hinge
Mechanism 9-4 is provided with driving foot 9-4-1, crossbeam 9-4-2, stator mounting hole 9-4-4, pre-loading screw mounting hole 9-4-6, ellipse
II 9-4-5 of hinge, I 9-4-9 of ellipse hinge, II 9-4-10 of rigid beam, I 9-4-60 of rigid curved beam, rigid curved beam II
9-4-61, rigidity III 9-4-62 of curved beam and IV 9-4-63 of rigid curved beam.The driving foot 9-4-1 is located in crossbeam 9-4-2
Between position, the driving foot end 9-4-1 is coated with friction material, and driving foot 9-4-1 is contacted with frictional contact surface 7-4 line, is used for
Drive rack 7.The stator mounting hole 9-4-4 is for fixing flexure hinge mechanism 9-4, the pre-loading screw mounting hole 9-4-6
By being threadedly coupled fixed piezoelectric stack 9-3 with pre-loading screw 9-1.II 9-4-10 of rigid beam is located at flexible hinge machine
The center of structure 9-4, rigidity I 9-4-60 of curved beam and rigidity II 9-4-61 of curved beam pass through I 9-4-9 of ellipse hinge
Rigid connection, rigidity III 9-4-62 of curved beam and rigidity IV 9-4-63 of curved beam are rigidly connected by II 9-4-5 of ellipse hinge
It connects, I 9-4-60 of the rigidity curved beam, II 9-4-61 of rigid curved beam, II 9-4-10 of I 9-4-9 of ellipse hinge and rigid beam
The frame-type structure of composition may be implemented rack gear 7 and move right along I 2-2 of limiting slot and II 8-4 of limiting slot, the rigid beam II
The frame-type structure of 9-4-10, II 9-4-5 of ellipse hinge, rigidity III 9-4-62 of curved beam and rigidity IV 9-4-63 of curved beam composition
Rack gear 7 may be implemented to move downward along I 2-2 of limiting slot and II 8-4 of limiting slot.
Or a kind of precision piezoelectric stick-slip turntable for oblique slot type stator module implementation.The flexure hinge mechanism
9-4 uses 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloy or Ti-13 titanium alloy material, flexible hinge
Chain mechanism 9-4 uses oblique slot type frame-shaped construction hinge.The flexure hinge mechanism 9-4 is provided with stator mounting hole 9-4-4, passes through
Stator fixing bolt 9-5 fixes flexure hinge mechanism 9-4 and the stator threaded hole 1-9 of shell 1.The flexure hinge mechanism 9-
4 are provided with Ⅻ 9-4-43 of rigid Ⅺ 9-4-42 of straight beam and rigid straight beam, and the flexure hinge mechanism 9-4 is provided with straight round hinge
II 9-4-13 of chain, straight round III 9-4-14 of hinge, straight round V 9-4-16 of hinge and straight round VI 9-4-17 of hinge, it is described
Straight round II 9-4-13 of hinge and straight round III 9-4-14 of hinge are rigidly connected by rigidity Ⅻ 9-4-43 of straight beam, described straight
Round V 9-4-16 of hinge and straight round VI 9-4-17 of hinge are rigidly connected by rigidity Ⅺ 9-4-42 of straight beam, the rigidity
The distance between Ⅻ 9-4-43 of Ⅺ 9-4-42 of straight beam and rigid straight beam is L, rigid Ⅺ 9-4-42 of straight beam and rigid straight beam Ⅻ
The width of 9-4-43 is L1, and with a thickness of B, it is that 0.5 ~ 1 can guarantee that wherein L1/L value range, which is 1/6 ~ 1/2, B/L value range,
Flexure hinge mechanism 9-4 has the ability of displacement equations, L=13mm, L in present embodiment1=2.5mm, B=7mm.The straight circle
II 9-4-13 of type hinge, straight round III 9-4-14 of hinge, straight round V 9-4-16 of hinge and straight round VI 9-4-17 of hinge
Radius of corner value R1 having the same, wherein R1/L value range is 1/60 ~ 1/12.The flexure hinge mechanism 9-4 is provided with
The number of skewed slot 9-4-40, the skewed slot 9-4-40 are X, are highly L2, width C, the angle with vertical direction is α, wherein X
>=1, L2/C value range are that 1 ~ 8, C/L value range is 0.01 ~ 0.1, and the value range of angle α is 10 ° ~ 80 °, this embodiment party
Angle α in formula is 15 °, and the number X of skewed slot 9-4-40 is 5.The flexure hinge mechanism 9-4 be provided with driving foot 9-4-1 with
Crossbeam 9-4-41 is thickeied, the driving foot 9-4-1 is located at the middle position for thickening crossbeam 9-4-41, the excitation of sawtooth wave electric signal
Piezoelectric stack 9-3 generates power output, is transmitted on driving foot 9-4-1 by skewed slot 9-4-40, the skewed slot 9-4-40 and driving
Sufficient 9-4-1 is unevenly distributed along axial rigidity and generates lateral displacement.Friction drive when increasing the slowly deformation driving stage, reduces
Frictional resistance when rapid deformation drives the stage is, it can be achieved that comprehensive regulation to frictional force.The driving foot end face 9-4-1 accordingly applies
Have ceramic-like or a glass fibre class friction material, the driving foot 9-4-1 with a thickness of N, rack gear 7 with a thickness of M, wherein N≤M
It can guarantee effective contact area, improve transmission efficiency, wherein M=(N+1) mm, M=8mm, N=7mm in present embodiment.
Or the precision piezoelectric stick-slip turntable for a kind of dual-stack single-driving foot stator module implementation, the stator
9 flexure hinge mechanism 9-4 is provided with driving foot 9-4-1, crossbeam 9-4-2, stator mounting hole 9-4-4, pre-loading screw mounting hole
It is 9-4-6, rigid straight beam 9-4-8, straight round I 9-4-9 of hinge, rigid beam 9-4-10, straight round II 9-4-13 of hinge, straight round
III 9-4-14 of hinge, straight round IV 9-4-15 of hinge, straight round V 9-4-16 of hinge and straight round VI 9-4-17 of hinge；The drive
Action spot 9-4-1 is located at the middle position of crossbeam 9-4-2, drives the frictional contact surface 7-4 sliding contact of foot 9-4-1 and rack gear 7, institute
State the stator spiral shell that stator 9 is fixed on shell 1 by being threadedly coupled with stator fixing bolt 9-5 by stator mounting hole 9-4-4
On pit 1-9, the pre-loading screw mounting hole 9-4-6 is threadedly coupled with pre-loading screw 9-1 pre-tightens piezoelectric stack 9-3, described
Straight round I 9-4-9 of hinge and straight round IV 9-4-15 of hinge are rigidly connected by rigid beam 9-4-10, the straight round hinge
II 9-4-13 and straight round III 9-4-14 of hinge are rigidly connected by rigidity straight beam 9-4-8, straight round V 9-4-16 of hinge
It is rigidly connected with straight round VI 9-4-17 of hinge by rigidity straight beam 9-4-8；Straight round II 9-4-13 of hinge, straight round hinge
III 9-4-14 of chain, straight round V 9-4-16 of hinge and straight round VI 9-4-17 of hinge radius of corner having the same are R1, described
Straight round I 9-4-9 of hinge and straight round IV 9-4-15 of hinge radius of corner having the same are that the ratio of R2, R1 and R2 are D, D
Value range be 1.5 ~ 4.5.
The baffle 10 is provided with baffle mounting hole 10-1.The baffle mounting hole 10-1 and baffle install threaded hole 1-10
It is bolted, is fixedly mounted on baffle 10 on shell 1.The baffle 10 can be disassembled from shell 1, convenient for adjusting
Pre-loading screw 9-1 can realize the adjusting to driving element normal pressure size at any time.
The encapsulating shell 11 includes encapsulating shell mounting hole 11-1, external threading hole 11-2 and conducting wire placed cavity 11-3.It is described
Encapsulating shell mounting hole 11-1 is bolted with encapsulating shell threaded hole 1-12, and encapsulating shell 11 is fixedly mounted on shell 1, institute
Stating external threading hole 11-2 can be passed through extraneous conducting wire in conducting wire placed cavity 11-3, and then is passed through by built-in threading hole 1-11
Into shell 1, the conducting wire placed cavity 11-3 can be used for placing and storing the conducting wire of certain length.
A kind of precision piezoelectric stick-slip turntable of dual-stack double-driving foot stator module implementation, feature
The length for being the rack gear 7 is a, and the width of the limiting device I 2 and limiting device II 8 is b, limiting device I 2 and limit
The distance between device II 8 is c, wherein a > b+c.A=80mm in present embodiment, b=20mm, c=55mm.
Specific embodiment 2: the complex incentive electric signal that the driving method uses is realized, complex incentive electric signal packet
Friction regulation wave and driving wave are included, by the regulation wave complex superposition that will rub in the quick power-on stage of driving wave, excites stator
It is in micro- secondary high-frequency resonance state in the rapid deformation stage, rapid deformation stage stator and rack gear are reduced based on ultrasonic antifriction effect
Between frictional resistance；The driving wave is sawtooth wave, and the friction regulation wave is sine wave；Wherein the period of sawtooth wave is T1,
Driving voltage amplitude is V1, symmetry S, sine wave period T2, driving voltage amplitude is V2, the week of sawtooth wave and sine wave
Phase ratio is T1/T2=100 ~ 20000, driving voltage Amplitude Ration is V1/V2=2~6。
Working principle: precision piezoelectric stick-slip turntable mainly under the excitation of Asymmetric Electric signal, utilizes stator one
A piezoelectric stack is powered the asymmetry that deformation generates, and makes that foot straps carry-over bar is driven to generate straight-line displacement, further through gear straight-tooth with
The linear motion of rack gear is converted to the rotary motion of gear by the engagement of rack gear straight-tooth.Limiting device I and limit dress in the present invention
It sets II and plays position-limiting action to rack gear, rack gear straight-tooth can be kept preferably to engage with gear straight-tooth, and limit can be passed through
The effect of position block I and limited block II keeps rack gear steady operation, and a piezoelectric stack of stator is in asymmetric telecommunications in the present invention
Number excitation under generate slowly deformation and two stages of rapid deformation, due to the asymmetry of the hinge at piezoelectric stack both ends, swash
Hair driving foot generates lateral displacement, and in slow deformation stage, rack gear drives the lateral position of rack gear under the frictional force effect of driving foot
It moves, reduces the normal pressure between driving foot and rack gear in the rapid deformation stage, to generate " cunning " movement.Rack gear of the invention
It is contacted on one side with driving foot, another side is engaged with gear straight-tooth, so that linear motion is converted to rotary motion, compared to driving
Foot is applied directly in rotary shaft, and the engagement of tooth has been obviously improved the output characteristics of rotating platform, Asymmetric Electric without opposite sliding
Signal motivates another piezoelectric stack, it can be achieved that reversed.
In summary the content, the present invention are promoted due to the engaged transmission using straight spur gear and spur rack
The thrust output and movement velocity of rotating platform；Turntable movement is driven by the rotation of gear, it is micro- compared to directly driving
Dynamic rotating platform, reduces between driving element and rotary shaft due to the loss for the generation that quickly rubs；Under different operating conditions, platform
The adjusting to driving element normal pressure size can be realized at any time, and the output accuracy and environment for effectively improving turntable adapt to
Property, it can be used widely in precision optical instrument, biological microoperation and micro-nano precision actuation and field of locating technology.
Claims (8)
1. a kind of precision piezoelectric stick-slip turntable, it is characterised in that: be a kind of dual-stack double-driving foot stator module realization side
The precision piezoelectric stick-slip turntable of formula；The precision piezoelectric stick-slip turntable includes shell (1), limiting device I (2), bearing
(3), gear (4), turntable (5), package board (6), rack gear (7), limiting device II (8), stator (9), baffle (10) and encapsulation
Shell (11)；Limiting device I (2) is fixed in shell (1) by limiting device installation base I (1-2), and bearing (3) passes through bearing
Mounting surface (1-3) is mounted in shell (1), and gear (4) is mounted in shell (1) by gear installation groove (1-4), gear
(4) it is fixedly connected by keyway (4-2) with rotary shaft (5-4), turntable (5) passes through in rotary shaft (5-4) insertion bearing (3)
Side, package board (6), which is connected through a screw thread, to be fixed on shell (1), and rack gear (7) passes through limiting slot I (2-2) and II (8- of limiting slot
4) it is mounted in limiting device I (2) and limiting device II (8) and is meshed with gear (4), limiting device II (8) passes through limit dress
It sets installation base II (1-5) to be mounted in shell (1), stator (9) is mounted in shell (1) by stator fixing bolt (9-5)
It is in close contact with rack gear (7), baffle (10) is fixed on shell (1) by baffle installation threaded hole (1-10), encapsulating shell (11)
It is mounted on shell (1) by encapsulating shell threaded hole (1-12).
2. a kind of precision piezoelectric stick-slip turntable according to claim 1, it is characterised in that: the shell (1) includes
Limiting device threaded hole I (1-1), limiting device installation base I (1-2), bearing mounting surface (1-3), gear installation groove (1-
4), limiting device installation base II (1-5), limiting device threaded hole II (1-6), package board threaded hole (1-7), package board installation
Face (1-8), stator threaded hole (1-9), baffle installation threaded hole (1-10), built-in threading hole (1-11) and encapsulating shell threaded hole
(1-12)；Limiting device threaded hole I (1-1) and limiting device installation base I (1-2) are for installing limiting device I (2), bearing
Mounting surface (1-3) is contacted with bearing (3), gear installation groove (1-4) is for installing gear (4), limiting device installation base II
For installing limiting device II (8), package board threaded hole (1-7) can be by package board for (1-5) and limiting device threaded hole II (1-6)
(6) it is fixedly mounted on package board mounting surface (1-8), for stator threaded hole (1-9) for installing stator (9), baffle installs screw thread
Baffle (10) can be fixedly mounted on shell (1) by hole (1-10), and encapsulating shell threaded hole (1-12) is for installing encapsulating shell (11).
3. a kind of precision piezoelectric stick-slip turntable according to claim 1, it is characterised in that: the limiting device I (2)
It is provided with limiting device mounting hole I (2-1), limiting slot I (2-2) and limit pedestal I (2-3)；Limiting device mounting hole I (2-1)
For limiting device I (2) to be fixedly mounted on limiting device installation base I (1-2), limiting slot I (2-2) and limit pedestal I
(2-3) is for placing rack gear (7)；The bearing (3) includes bearing inner surface (3-1) and bearing outside surface (3-2)；Table in bearing
Face (3-1) is contacted with rotary shaft (5-4), and bearing outside surface (3-2) is contacted with shell (1)；The gear (4) includes table in gear
Face (4-1), keyway (4-2) and gear straight-tooth (4-3)；Gear inner surface (4-1) is contacted with rotary shaft (5-4), and keyway (4-2) is logical
It crosses and is connect rotary shaft (5-4) with key (5-3), gear straight-tooth (4-3) is cooperated with rack gear straight-tooth (7-3)；The turntable (5)
Including graduation mark (5-1), peripheral unit installation threaded hole (5-2), key (5-3) and rotary shaft (5-4), peripheral unit installs screw thread
Hole (5-2) is used to fix rotary shaft (5-4) and gear (4) installation for installing peripheral unit, key (5-3), rotary shaft (5-4)
It is contacted with bearing inner surface (3-1) and gear inner surface (4-1).
4. a kind of precision piezoelectric stick-slip turntable according to claim 1, it is characterised in that: the package board (6) sets
It is equipped with package board mounting hole (6-1), package board is fixedly mounted on shell (1) by screw by package board mounting hole (6-1)；Institute
Stating rack gear (7) includes limited block I (7-1), limit plate (7-2), rack gear straight-tooth (7-3) and frictional contact surface (7-4), wherein limiting
Plate (7-2) is placed in limiting slot I (2-2) and limiting slot II (8-4), and rack gear straight-tooth (7-3) and gear straight-tooth (4-3) cooperation connect
Gear (4) and rack gear (7) are connect, frictional contact surface (7-4) is contacted with foot (9-4-1) is driven；The limiting device II (8) is provided with
Limit pedestal II (8-1), limited block II (8-2), limiting device mounting hole II (8-3) and limiting slot II (8-4)；Bolt passes through limit
Position device mounting hole II (8-3) is used to limiting device II (8) being fixed on limiting device installation base II (1-5), limited block
II (8-2) and limited block I (7-1) cooperate, and limiting slot II (8-4) and limit pedestal II (8-1) are for placing rack gear (7).
5. a kind of precision piezoelectric stick-slip turntable according to claim 1, it is characterised in that: the stator (9) includes
Pre-loading screw (9-1), gasket (9-2), piezoelectric stack (9-3), flexure hinge mechanism (9-4) and stator fixing bolt (9-5)；Institute
It states piezoelectric stack (9-3) to be fixed in flexure hinge mechanism (9-4) by gasket (9-2) and pre-loading screw (9-1), the stator
Stator (9) is fixedly mounted on shell (1) by fixing bolt (9-5) by stator mounting hole (9-4-4).
6. a kind of precision piezoelectric stick-slip turntable according to claim 5, it is characterised in that: the stator (9) it is soft
Property linkage (9-4) be provided with end crossbeam (9-4-3), stator mounting hole (9-4-4), pre-loading screw mounting hole (9-4-6),
Straight round hinge I (9-4-9), straight round hinge II (9-4-13), straight round hinge III (9-4-14), straight round IV (9- of hinge
4-15), straight round hinge V (9-4-16), straight round hinge VI (9-4-17), double-driving foot (9-4-70), straight round groove
(9-4-71), rigid straight beam Ⅸ (9-4-72), rigid beam III (9-4-73) and rigid straight beam Ⅹ (9-4-74)；The end is horizontal
Beam (9-4-3) is used to transmit the active force of piezoelectric stack (9-3), and the stator mounting hole (9-4-4) is for fixing flexible hinge
Mechanism (9-4)；The pre-loading screw mounting hole (9-4-6), which be threadedly coupled with pre-loading screw (9-1), pre-tightens piezoelectric stack (9-
3)；The straight round hinge I (9-4-9) and straight round hinge IV (9-4-15) are rigidly connected by rigid beam III (9-4-73)
It connects, the straight round hinge V (9-4-16) and straight round hinge VI (9-4-17) pass through rigid straight beam Ⅸ (9-4-72) rigidity
Connection, the straight round hinge II (9-4-13) and straight round hinge III (9-4-14) pass through rigid straight beam Ⅹ (9-4-74) and carry out
Rigid connection, the straight round hinge I (9-4-9), straight round hinge IV (9-4-15), rigid beam III (9-4-73), straight circle
The frame-type structure of type hinge V (9-4-16), rigid straight beam Ⅸ (9-4-72) and straight round hinge VI (9-4-17) composition can be real
Existing rack gear (7) are moved right along limiting slot I (2-2) and limiting slot II (8-4), the straight round hinge I (9-4-9), directly round
Hinge IV (9-4-15), rigid beam III (9-4-73), straight round hinge II (9-4-13), straight round hinge III (9-4-14)
Rack gear (7) may be implemented along II (8- of limiting slot I (2-2) and limiting slot with the frame-type structure of rigid straight beam Ⅹ (9-4-74) composition
4) it moves downward；The double-driving foot (9-4-70) is located at end crossbeam (9-4-3) axial centerline, double-driving foot (9-4-
70) end is coated with friction class material；The baffle (10) is provided with baffle mounting hole (10-1)；Baffle mounting hole (10-1) is used for
Baffle (10) is mounted on shell (1)；The encapsulating shell (11) is provided with encapsulating shell mounting hole (11-1), external threading hole
(11-2) and conducting wire placed cavity (11-3), bolt will be encapsulated by encapsulating shell mounting hole (11-1) and encapsulating shell threaded hole (1-12)
Shell (11) is mounted on shell (1)；
Or the precision piezoelectric stick-slip turntable for a kind of diamond shape stator module implementation, the flexible hinge of the stator (9)
Mechanism (9-4) uses 5052 aluminium alloys, 6061 aluminium alloys or 7075 aluminum alloy materials, and flexure hinge mechanism (9-4) uses diamond shape
Structure hinge；The flexure hinge mechanism (9-4) is provided with driving foot (9-4-1), end crossbeam (9-4-3), stator mounting hole
(9-4-4), pre-loading screw mounting hole (9-4-6), rigidity folding beam I (9-4-20), rigidity folding beam II (9-4-21), rigidity folding beam III
It is (9-4-22), rigidity folding beam IV (9-4-23), straight round hinge VIII (9-4-24), straight round hinge VII (9-4-25), straight round
Hinge Ⅹ (9-4-26) and straight round hinge Ⅸ (9-4-27)；The flexure hinge mechanism (9-4) passes through stator mounting hole (9-4-
4) it is fixed on stator threaded hole (1-9), the middle position for driving foot (9-4-1) to be located at end crossbeam (9-4-3), driving
Frictional contact surface (7-4) sliding contact of foot (9-4-1) and rack gear (7), drive the surface of foot (9-4-1) to be coated with rub resistance material
Material, rigidity folding beam I (9-4-20) and rigidity folding beam II (9-4-21) are rigidly connected by straight round hinge VII (9-4-25),
Rigidity folding beam III (9-4-22) and rigidity folding beam IV (9-4-23) are rigidly connected by straight round hinge Ⅸ (9-4-27), institute
It states straight round hinge VIII (9-4-24) and straight round hinge VII (9-4-25) and beam I (9-4-20) rigid connection, institute is rolled over by rigidity
It states straight round hinge Ⅹ (9-4-26) and straight round hinge Ⅸ (9-4-27) and beam III (9-4-22) rigid connection is rolled over by rigidity；Institute
State straight round hinge VIII (9-4-24), straight round hinge VII (9-4-25) and straight round hinge Ⅸ (9-4-27) circle having the same
Angular radius value R3, ratio of the straight round hinge Ⅹ (9-4-26) with radius of corner value R4, R4 and R3 is 2 ~ 5, adjustment fillet half
The axial rigidity distribution of flexure hinge mechanism (9-4) can be changed in the ratio of diameter R4 and R3；
Or the precision piezoelectric stick-slip turntable for a kind of inclined ladder type stator module implementation, the flexible hinge of the stator (9)
Chain mechanism (9-4) use inclined ladder type frame-type structure flexible hinge, the flexure hinge mechanism (9-4) using 5052 aluminium alloys,
6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloy or Ti-13 titanium alloy material；Flexure hinge mechanism (9-4) setting
There is stator mounting hole (9-4-4), by stator fixing bolt (9-5) by the stator spiral shell of flexure hinge mechanism (9-4) and shell (1)
Pit (1-9) is fixed；The flexure hinge mechanism (9-4) is provided with VI (9- of rigid straight beam V (9-4-50) and rigid straight beam
4-51), the flexure hinge mechanism (9-4) be provided with straight round hinge II (9-4-13), straight round hinge III (9-4-14),
Straight round hinge V (9-4-16) and straight round hinge VI (9-4-17), the straight round hinge II (9-4-13) and directly round
Hinge III (9-4-14) passes through rigid straight beam VI (9-4-51) and is rigidly connected, straight round hinge V (9-4-16) He Zhiyuan
Type hinge VI (9-4-17) passes through rigid straight beam V (9-4-50) and is rigidly connected；The rigidity straight beam V (9-4-50) and rigid
Property straight beam VI the distance between (9-4-51) be H, the straight round hinge II (9-4-13), straight round hinge III (9-4-14),
Straight round hinge V (9-4-16) and directly round hinge VI (9-4-17) radius of corner value R8 having the same, wherein R8/H
Value range 0.017 ~ 0.09, it is ensured that flexure hinge mechanism (9-4) has displacement equations ability and piezoelectric stack (9-3)
With certain installation space；The flexure hinge mechanism (9-4) is provided with inclined ladder type beam (9-4-21), the inclined ladder type beam
The length of (9-4-21) is K, and wherein K/H value range is 1.5 ~ 4, the angle of inclined ladder type beam (9-4-21) and horizontal direction
For α, wherein α value range is 10 ° ~ 80 °；Stator (9) carries out displacement equations, the inclined ladder by flexure hinge mechanism (9-4)
Type beam (9-4-21) is unevenly distributed along axial rigidity and generates lateral displacement；Driving foot end face (9-4-1) is accordingly coated with pottery
Porcelain class or glass fibre class friction material, driving foot (9-4-1) drive rack (7) move；
Or the precision piezoelectric stick-slip turntable for a kind of unsymmetric structure stator module implementation, the stator (9) it is soft
Property linkage (9-4) use 5052 aluminium alloys, 6061 aluminium alloys or 7075 aluminum alloy materials, flexure hinge mechanism (9-4) adopts
With asymmetric frame-type structure hinge, the flexure hinge mechanism (9-4) is provided with stator mounting hole (9-4-4), is pacified by stator
Flexure hinge mechanism (9-4) can be fixed on shell (1) by dress hole (9-4-4), and the flexure hinge mechanism (9-4) is provided with directly
Round hinge I (9-4-9), straight round hinge IV (9-4-15), straight round hinge V (9-4-16), straight round VI (9-4- of hinge
17), rigid straight beam I (9-4-30) and rigid straight beam II (9-4-31), the straight round hinge I (9-4-9) and straight round hinge
IV (9-4-15) passes through rigid straight beam II (9-4-31) and is rigidly connected, the straight round hinge V (9-4-16) and straight round hinge
VI (9-4-17) passes through rigid straight beam I (9-4-30) and is rigidly connected；The straight round hinge I (9-4-9) and straight round hinge IV
(9-4-15) radius of corner value R5 having the same, straight round hinge V (9-4-16) and straight round hinge VI (9-4-17) tool
There is identical radius of corner value R6, by adjusting the ratio of radius of corner R6 and R5, the axial rigidity point of stator (9) can be changed
Cloth, wherein the ratio range of R6 and R5 is 0.1 ~ 1；The flexure hinge mechanism (9-4) uses asymmetric frame-type structure, makes its edge
Axial rigidity is unevenly distributed and generates lateral displacement；The flexure hinge mechanism (9-4) is provided with driving foot (9-4-1) and end
Crossbeam (9-4-3) drives foot (9-4-1) to be located at the middle of end crossbeam (9-4-3), the thickness for driving foot (9-4-1)
For N, rack gear (7) with a thickness of M, wherein M=(N+1) mm, improves the transmission efficiency between contact surface；The driving foot (9-4-1)
End face is accordingly coated with ceramic-like or glass fibre class friction material；
Or the precision piezoelectric stick-slip turntable for a kind of dual-stack arch stator module implementation, the stator (9) it is soft
Property linkage (9-4) be provided with driving foot (9-4-1), crossbeam (9-4-2), stator mounting hole (9-4-4), pre-loading screw installation
Hole (9-4-6), ellipse hinge II (9-4-5), ellipse hinge I (9-4-9), rigid beam II (9-4-10), rigidity are bent
Beam I (9-4-60), rigid curved beam II (9-4-61), rigid curved beam III (9-4-62) and rigid curved beam IV (9-4-63)；The drive
Action spot (9-4-1) is located at the middle position of crossbeam (9-4-2), and driving foot end (9-4-1) is coated with friction material, driving foot
(9-4-1) is contacted with frictional contact surface (7-4) line, is used for drive rack (7)；The stator mounting hole (9-4-4) is for fixing
Flexure hinge mechanism (9-4), the pre-loading screw mounting hole (9-4-6) is by being threadedly coupled fixed pressure with pre-loading screw (9-1)
Electricity stacks (9-3)；The rigid beam II (9-4-10) is located at the center of flexure hinge mechanism (9-4), and the rigidity is bent
Beam I (9-4-60) and rigid curved beam II (9-4-61) are rigidly connected by ellipse hinge I (9-4-9), the rigidity curved beam
III (9-4-62) and rigid curved beam IV (9-4-63) are rigidly connected by ellipse hinge II (9-4-5), the rigidity curved beam I
The frame that (9-4-60), rigid curved beam II (9-4-61), ellipse hinge I (9-4-9) and rigid beam II (9-4-10) form
Type structure may be implemented rack gear (7) and move right along limiting slot I (2-2) and limiting slot II (8-4), the II (9- of rigid beam
4-10), the frame-type that ellipse hinge II (9-4-5), rigid curved beam III (9-4-62) and rigid curved beam IV (9-4-63) form
Structure may be implemented rack gear (7) and move downward along limiting slot I (2-2) and limiting slot II (8-4)；
Or the precision piezoelectric stick-slip turntable for a kind of oblique slot type stator module implementation, the flexible hinge of the stator (9)
Chain mechanism (9-4) uses 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloy or Ti-13 titanium alloy material
Material, flexure hinge mechanism (9-4) use oblique slot type frame-shaped construction hinge；The flexure hinge mechanism (9-4) is provided with stator peace
It fills hole (9-4-4), by stator fixing bolt (9-5) by the stator threaded hole (1- of flexure hinge mechanism (9-4) and shell (1)
9) fixed；The flexure hinge mechanism (9-4) is provided with rigid straight beam Ⅺ (9-4-42) and rigid straight beam Ⅻ (9-4-43), institute
It states flexure hinge mechanism (9-4) and is provided with straight round hinge II (9-4-13), straight round hinge III (9-4-14), straight round hinge
Chain V (9-4-16) and straight round hinge VI (9-4-17), the straight round hinge II (9-4-13) and straight round III (9- of hinge
4-14) it is rigidly connected by rigid straight beam Ⅻ (9-4-43), the straight round hinge V (9-4-16) and straight round hinge VI
(9-4-17) passes through rigid straight beam Ⅺ (9-4-42) and is rigidly connected, the rigidity straight beam Ⅺ (9-4-42) and rigid straight beam Ⅻ
The distance between (9-4-43) is L, and the width of rigid straight beam Ⅺ (9-4-42) and rigid straight beam Ⅻ (9-4-43) is L1, thickness
For B, it is that 0.5 ~ 1 can guarantee that flexure hinge mechanism (9-4) has that wherein L1/L value range, which is 1/6 ~ 1/2, B/L value range,
The ability of displacement equations；The straight round hinge II (9-4-13), straight round hinge III (9-4-14), straight round V (9- of hinge
4-16) with straight round hinge VI (9-4-17) radius of corner value R1 having the same, wherein R1/L value range is 1/60 ~ 1/
12；The flexure hinge mechanism (9-4) is provided with skewed slot (9-4-40), and the number of the skewed slot (9-4-40) is X, is highly
L2, width C, the angle with vertical direction are α, wherein X >=1, L2/C value range be 1 ~ 8, C/L value range be 0.01 ~
0.1, the value range of angle α is 10 ° ~ 80 °；The flexure hinge mechanism (9-4) is provided with driving foot (9-4-1) and thickeies horizontal
Beam (9-4-41), it is described that foot (9-4-1) is driven to be located at the middle position for thickening crossbeam (9-4-41), the excitation of sawtooth wave electric signal
Piezoelectric stack (9-3) generates power output, is transmitted on driving foot (9-4-1) by skewed slot (9-4-40), the skewed slot (9-4-
40) it is unevenly distributed along axial rigidity with foot (9-4-1) is driven and generates lateral displacement；Driving foot end face (9-4-1) is corresponding
Be coated with ceramic-like or glass fibre class friction material, it is described drive foot (9-4-1) with a thickness of N, rack gear (7) with a thickness of M,
Middle N≤M can guarantee effective contact area, improve transmission efficiency；
Or the precision piezoelectric stick-slip turntable for a kind of dual-stack single-driving foot stator module implementation, the stator (9)
Flexure hinge mechanism (9-4) be provided with driving foot (9-4-1), crossbeam (9-4-2), stator mounting hole (9-4-4), pre-loading screw
Mounting hole (9-4-6), rigid straight beam (9-4-8), straight round hinge I (9-4-9), rigid beam (9-4-10), straight round hinge
II (9-4-13), straight round hinge III (9-4-14), straight round hinge IV (9-4-15), straight round hinge V (9-4-16) and directly
Round hinge VI (9-4-17)；It is described that foot (9-4-1) is driven to be located at the middle position of crossbeam (9-4-2), drive foot (9-4-1) and
Frictional contact surface (7-4) sliding contact of rack gear (7), the stator mounting hole (9-4-4) by with stator fixing bolt (9-5)
It is threadedly coupled and stator (9) is fixed on the stator threaded hole (1-9) of shell (1), the pre-loading screw mounting hole (9-4-
6) it is threadedly coupled with pre-loading screw (9-1) and pre-tightens piezoelectric stack (9-3), the straight round hinge I (9-4-9) and straight round hinge
Chain IV (9-4-15) is rigidly connected by rigid beam (9-4-10), the straight round hinge II (9-4-13) and straight round hinge
III (9-4-14) passes through rigid straight beam (9-4-8) and is rigidly connected, the straight round hinge V (9-4-16) and straight round hinge VI
(9-4-17) passes through rigid straight beam (9-4-8) and is rigidly connected；The straight round hinge II (9-4-13), straight round III (9- of hinge
4-14), straight round hinge V (9-4-16) and straight round hinge VI (9-4-17) radius of corner having the same are R1, described straight
Round hinge I (9-4-9) and straight round hinge IV (9-4-15) radius of corner having the same are that the ratio of R2, R1 and R2 are D,
The value range of D is 1.5 ~ 4.5.
7. a kind of precision piezoelectric stick-slip turntable according to claim 1, it is characterised in that the length of the rack gear (7)
For a, the width of the limiting device I (2) and limiting device II (8) is b, between limiting device I (2) and limiting device II (8)
Distance be c, wherein a > b+c.
8. a kind of driving method of precision piezoelectric stick-slip turntable, which is based on described in claim 1 high-precision
Piezoelectricity stick-slip turntable is spent to realize；The complex incentive electric signal realization used in the driving method, complex incentive electric signal packet
Friction regulation wave and driving wave are included, by the regulation wave complex superposition that will rub in the quick power-on stage of driving wave, excites stator
It is in micro- secondary high-frequency resonance state in the rapid deformation stage, rapid deformation stage stator and rack gear are reduced based on ultrasonic antifriction effect
Between frictional resistance；The driving wave is sawtooth wave, and the friction regulation wave is sine wave；Wherein the period of sawtooth wave is T1,
Driving voltage amplitude is V1, symmetry S, sine wave period T2, driving voltage amplitude is V2, the week of sawtooth wave and sine wave
Phase ratio is T1/T2=100 ~ 20000, driving voltage Amplitude Ration is V1/V2=2~6。
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| CN111193435A (en) * | 2020-01-08 | 2020-05-22 | 浙江师范大学 | Rotary actuator |
| CN111193436B (en) * | 2020-01-08 | 2024-04-23 | 浙江师范大学 | Stepping driving device |
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