CN104568973A - Device and method for detecting substrate - Google Patents
Device and method for detecting substrate Download PDFInfo
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- CN104568973A CN104568973A CN201510067583.4A CN201510067583A CN104568973A CN 104568973 A CN104568973 A CN 104568973A CN 201510067583 A CN201510067583 A CN 201510067583A CN 104568973 A CN104568973 A CN 104568973A
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- substrate
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Abstract
The invention discloses a device and a method for detecting a substrate. Whether defects exist on the substrate can be accurately and rapidly detected, so that the quality of the product can be effectively managed and controlled and the waste of the production cost is reduced. The device for detecting the substrate comprises a line source light-emitting device and a reflected light receiving device, wherein the line source light-emitting device sends out an incident light to the substrate at a set incident angle; the incident light scans the surface of the substrate along with relative movement of the line source light-emitting device and the substrate; and the reflected light receiving device is used for receiving the reflected light corresponding to the incident light which emits towards a standard plane of the substrate, and sending out a substrate defect alarm signal when an actual receiving zone of the reflected light is inconsistent with a standard receiving zone.
Description
Technical field
The present invention relates to detection technique field, particularly relate to a kind of substrate detection apparatus and method.
Background technology
At present, panel display apparatus is when producing, and many sealing continuous print production equipments do not arrange substrate detection.If by have the substrate of incompleteness or slight crack for the production of, the quality of product will certainly be had influence on, but also the waste of production cost can be caused.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of substrate detection apparatus and method, to detect substrate whether existing defects accurately and rapidly, thus effectively can carry out management and control to product quality, reduce the waste of production cost.
Embodiments provide a kind of substrate detection apparatus, comprise line source light-emitting device and reflected light receiving trap, wherein:
Described line source light-emitting device launches incident light with the incident angle of setting to substrate, and scanning substrate is surperficial with the relative motion of line source light-emitting device and substrate for described incident light;
Described reflected light receiving trap receives the reflected light corresponding to incident light of directive substrate standard flat; For receive when the actual reception section of described reflected light and standard section inconsistent time, send substrate existing defects alerting signal.
In the technical scheme of the embodiment of the present invention, line source light-emitting device launches incident light with the incident angle of setting to substrate, and incident light can scanning substrate be surperficial with the relative motion of line source light-emitting device and substrate; Reflected light receiving trap is set to the reflected light corresponding to incident light receiving directive substrate standard flat, and can the actual reception section of reflected light and standard receive section inconsistent time, send substrate existing defects alerting signal.When there is the defects such as incomplete or slight crack when substrate, reflected light receiving trap can send substrate existing defects alerting signal in time, compared to existing technology, the substrate detection apparatus that this programme provides can detect substrate whether existing defects accurately and rapidly, thus effectively can carry out management and control to product quality, reduce the waste of production cost.
Described reflected light receiving trap, specifically for when the actual reception section of described reflected light exists breakpoint, sends substrate existing defects alerting signal.When there is the defects such as incomplete or slight crack in the interior zone of substrate, because reflecting interface changes, certain receiving position of reflected light receiving trap normally must receive reflected light, therefore, can there is breakpoint in the actual section that receives, can judge substrate existing defects accordingly.
Described reflected light receiving trap, when the length specifically for the actual reception section when described reflected light is less than the length of standard reception section, sends substrate existing defects alerting signal.When the neighboring area existing defects of substrate, because reflecting interface is imperfect or change, the length of the actual reception section of reflected light receiving trap can be less than the length that standard receives section, can judge substrate existing defects accordingly.
Preferably, substrate detection apparatus also comprises: guide rail, and described line source light-emitting device and described reflected light receiving trap slidable fit are in described guide rail; And drive described line source light-emitting device and synchronization-moving first drive unit of described reflected light receiving trap.In this scenario, substrate can be parked the below in line source light-emitting device and reflected light receiving trap, line source light-emitting device and reflected light receiving trap synchronizing moving, carry out Scanning Detction to substrate surface.Spacing by adjusting line source light-emitting device and reflected light receiving trap adjusts the size of incident angle.
Concrete, described line source light-emitting device is connected with the first slide block set on guide rail by head rod, and described reflected light receiving trap is connected with the second slide block set on guide rail by the second connecting link.
Preferably, described line source light-emitting device and described head rod pivot joint, described reflected light receiving trap and described second connecting link pivot joint; Described substrate detection apparatus also comprises: the second drive unit driving described line source light-emitting device and described reflected light receiving trap synchronous rotary.In this scenario, substrate can be parked the below in line source light-emitting device and reflected light receiving trap, line source light-emitting device and reflected light receiving trap synchronous rotary, carry out Scanning Detction to substrate surface.Angle by adjusting line source light-emitting device and reflected light receiving trap adjusts the size of incident angle.
Optionally, described line source light-emitting device and described reflected light receiving trap are horizontally disposed with, or described line source light-emitting device and described reflected light receiving trap and surface level have angle.
Optionally, described line source light-emitting device comprises infrared light sources light-emitting device.
The embodiment of the present invention additionally provides a kind of method of testing substrate, comprising:
Launch linear light incident light with the incident angle of setting to substrate, and make described incident light scanning substrate surface;
Receive the reflected light corresponding to incident light of directive substrate standard flat, when the actual reception section of described reflected light and standard receive section inconsistent time, determine substrate existing defects.
By aforesaid substrate detection method, substrate whether existing defects can be detected accurately and rapidly, thus effectively can carry out management and control to product quality, reduce the waste of production cost.
Wherein, described incident light scanning substrate surface is by such as under type realization:
Substrate is parked motionless, makes described incident light opposing substrate move or rotate; Or
The invariant position of described incident light, makes substrate move relative to incident light.
Accompanying drawing explanation
Fig. 1 is the Cleaning Principle schematic diagram of first embodiment of the invention substrate detection apparatus;
Fig. 2 is the Cleaning Principle schematic diagram of second embodiment of the invention substrate detection apparatus;
Fig. 3 is the Cleaning Principle schematic diagram of third embodiment of the invention substrate detection apparatus;
Fig. 4 is the light path schematic diagram of incident light when scanning base board defect position.
Reference numeral:
1-line source light-emitting device
2-reflected light receiving trap
3-substrate
4-guide rail
5-head rod
6-first slide block
7-second connecting link
8-second slide block
Embodiment
For detecting substrate whether existing defects accurately and rapidly, thus effectively can carry out management and control to product quality, reducing the waste of production cost, embodiments providing a kind of substrate detection apparatus and method.In the technical scheme of substrate detection apparatus embodiment, line source light-emitting device launches incident light with the incident angle of setting to substrate, and incident light can scanning substrate be surperficial with the relative motion of line source light-emitting device and substrate; Reflected light receiving trap is set to the reflected light corresponding to incident light receiving directive substrate standard flat, and can the actual reception section of reflected light and standard receive section inconsistent time, send substrate existing defects alerting signal.When there is the defects such as incomplete or slight crack when substrate, reflected light receiving trap can send substrate existing defects alerting signal in time, compared to existing technology, the substrate detection apparatus that this programme provides can detect substrate whether existing defects accurately and rapidly, thus effectively can carry out management and control to product quality, reduce the waste of production cost.For making the object, technical solutions and advantages of the present invention clearly, by the following examples the present invention is described in further detail.
As shown in Figure 1, embodiments provide a kind of substrate detection apparatus, comprise line source light-emitting device 1 and reflected light receiving trap 2, wherein:
Line source light-emitting device 1 launches incident light with the incident angle of setting to substrate 3, and incident light is the surface of scanning substrate 3 with line source light-emitting device 1 and the relative motion of substrate 3; Reflected light receiving trap 2 receives the reflected light corresponding to the incident light of directive substrate standard flat; For receive when the actual reception section of reflected light and standard section inconsistent time, send substrate existing defects alerting signal.
The substrate detection apparatus that the above embodiment of the present invention provides both can be used for the integrality detecting glass substrate, also can be used for the integrality detecting other smooth process materials, was not specifically limited here.The particular type of line source light-emitting device 1 is not limit, both visible ray light-emitting device can be adopted, also can adopt invisible light light-emitting device, preferably adopt infrared light sources light-emitting device, the infrared light launched has that frequency is low, wavelength is long, light gathering is strong, luminous low cost and other advantages.
In the above-described embodiments, line source light-emitting device 1 launches incident light with the incident angle of setting to substrate 3, this incident light can with line source light-emitting device 1 and the relative motion of substrate 3 surface of scanning substrate 3.As shown in Figure 1, in one implementation, substrate 3 is parked motionless, and line source light-emitting device 1 and reflected light receiving trap 2 be synchronizing moving (also can be synchronous rotary) above substrate 3, thus the surface of incident light to substrate 3 is scanned.As shown in Figure 2, in another kind of implementation, line source light-emitting device 1 and reflected light receiving trap 2 maintain static, and substrate 3 is transmitted through the below of line source light-emitting device 1 and reflected light receiving trap 2, thus the surface of incident light to substrate 3 is scanned.Effective length of illumination of line source light-emitting device 1 can be determined according to the specification of its mode of motion and substrate 3.
Wherein, substrate standard flat can be understood as the surface of flawless qualified substrate, the setting position of reflected light receiving trap 2 can be determined according to this substrate standard flat, that is: reflected light receiving trap 2 is arranged on in the light path of the substrate standard flat reflected light that is reflecting interface, reflected light receiving trap 2 can be identical with the setting height(from bottom) of line source light-emitting device 1, also can be different.
The incident light launched due to line source light-emitting device 1 is linear light, if substrate 3 is flawless qualified substrate, then reflected light receiving trap 2 can receive continuous, complete linear light, and corresponding should be then continuous, complete on reception section.
In one particular embodiment of the present invention, reflected light receiving trap 2, for when the actual reception section of reflected light exists breakpoint, sends substrate existing defects alerting signal.As shown in Figure 4, when there is the defects such as incomplete or slight crack in the interior zone of substrate 3, because reflecting interface changes, certain or some receiving positions of reflected light receiving trap 2 normally must receive reflected light (if substrate zero defect, reflected light can inject reflected light receiving trap 2 according to dotted line circuit), therefore, can there is breakpoint in the actual reception section of reflected light receiving trap 2, can judge substrate existing defects accordingly.
Similar, reflected light receiving trap 2, also for the length of the actual reception section when reflected light be less than standard receive the length of section time, send substrate existing defects alerting signal.When the neighboring area existing defects of substrate 3, because reflecting interface is imperfect or change, the length of the actual reception section of reflected light receiving trap 2 can be less than the length that standard receives section, can judge substrate existing defects accordingly.
Embodiment as shown in Figure 1, substrate detection apparatus also comprises: guide rail 4, and line source light-emitting device 1 and reflected light receiving trap 2 slidable fit are in guide rail 4; And drive wire light sources 1 and the synchronization-moving first drive unit (not shown) of reflected light receiving trap 2.In this scenario, substrate 3 can be parked the below in line source light-emitting device 1 and reflected light receiving trap 2, line source light-emitting device 1 and reflected light receiving trap 2 synchronizing moving, carry out Scanning Detction to the surface of substrate 3.By adjusting the spacing of line source light-emitting device 1 and reflected light receiving trap 2, and the light direction of line source light-emitting device 1 adjusts the size of incident angle.
Line source light-emitting device 1 and reflected light receiving trap 2 can directly be slidedly assemblied on guide rail 4, also can be realized the slip of opposite rail 4 by link.In embodiment shown in Fig. 1, line source light-emitting device 1 is connected with the first slide block 6 set on guide rail 4 by head rod 5, and reflected light receiving trap 2 is connected with the second slide block 8 set on guide rail 4 by the second connecting link 7.
As shown in Figure 3, in this embodiment, line source light-emitting device 1 and head rod 5 pivot joint (namely line source light-emitting device 1 can rotate around head rod 5), reflected light receiving trap 2 and the second connecting link 7 pivot joint (namely reflected light receiving trap 2 can rotate around the second connecting link 7); Substrate detection apparatus also comprises: the second drive unit (not shown) of drive wire light sources 1 and reflected light receiving trap 2 synchronous rotary.In this scenario, substrate 3 can be parked the below in line source light-emitting device 1 and reflected light receiving trap 2, line source light-emitting device 1 and reflected light receiving trap 2 synchronous rotary, carry out Scanning Detction to the surface of substrate 3.By adjusting the angle of line source light-emitting device 1 and reflected light receiving trap 2, and the light direction of line source light-emitting device 1 adjusts the size of incident angle.
In addition, line source light-emitting device 1 and reflected light receiving trap 2 also along guide rail 4 synchronizing moving while synchronous rotary, can carry out more careful scanning to the surface of substrate 3 like this, thus improve the accuracy detected further.
As shown in Figure 3, in this embodiment, line source light-emitting device 1 and reflected light receiving trap 2 are all horizontally disposed with.In other embodiments of the invention, line source light-emitting device 1 and reflected light receiving trap 2 also can have angle with surface level, as long as incident light scanning substrate 3 surface can be made, and reflected light receiving trap 2 can receive the reflected light corresponding to incident light of directive substrate standard flat.
To sum up, in the technical scheme of the embodiment of the present invention, line source light-emitting device launches incident light with the incident angle of setting to substrate, and incident light can scanning substrate be surperficial with the relative motion of line source light-emitting device and substrate; Reflected light receiving trap is set to the reflected light corresponding to incident light receiving directive substrate standard flat, and can the actual reception section of reflected light and standard receive section inconsistent time, send substrate existing defects alerting signal.When there is the defects such as incomplete or slight crack when substrate, reflected light receiving trap can send substrate existing defects alerting signal in time, compared to existing technology, the substrate detection apparatus that this programme provides can detect substrate whether existing defects accurately and rapidly, thus effectively can carry out management and control to product quality, reduce the waste of production cost.
Based on identical inventive concept, the embodiment of the present invention additionally provides a kind of method of testing substrate, comprising:
Launch linear light incident light with the incident angle of setting to substrate, and make incident light scanning substrate surface;
Receive the reflected light corresponding to incident light of directive substrate standard flat, when the actual reception section of reflected light and standard receive section inconsistent time, determine substrate existing defects.
By aforesaid substrate detection method, substrate whether existing defects can be detected accurately and rapidly, thus effectively can carry out management and control to product quality, reduce the waste of production cost.
Wherein, incident light scanning substrate surface is by such as under type realization:
Substrate is parked motionless, makes incident light opposing substrate move or rotate; Or
The invariant position of incident light, makes substrate move relative to incident light.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (10)
1. a substrate detection apparatus, is characterized in that, comprises line source light-emitting device and reflected light receiving trap, wherein:
Described line source light-emitting device launches incident light with the incident angle of setting to substrate, and scanning substrate is surperficial with the relative motion of line source light-emitting device and substrate for described incident light;
Described reflected light receiving trap receives the reflected light corresponding to incident light of directive substrate standard flat; For receive when the actual reception section of described reflected light and standard section inconsistent time, send substrate existing defects alerting signal.
2. substrate detection apparatus as claimed in claim 1, is characterized in that, described reflected light receiving trap, specifically for when the actual reception section of described reflected light exists breakpoint, sends substrate existing defects alerting signal.
3. substrate detection apparatus as claimed in claim 1, is characterized in that, described reflected light receiving trap, when the length specifically for the actual reception section when described reflected light is less than the length of standard reception section, sends substrate existing defects alerting signal.
4. the substrate detection apparatus as described in any one of claims 1 to 3, is characterized in that, also comprises: guide rail, and described line source light-emitting device and described reflected light receiving trap slidable fit are in described guide rail; And drive described line source light-emitting device and synchronization-moving first drive unit of described reflected light receiving trap.
5. substrate detection apparatus as claimed in claim 4, it is characterized in that, described line source light-emitting device is connected with the first slide block set on guide rail by head rod, and described reflected light receiving trap is connected with the second slide block set on guide rail by the second connecting link.
6. substrate detection apparatus as claimed in claim 5, is characterized in that, described line source light-emitting device and described head rod pivot joint, described reflected light receiving trap and described second connecting link pivot joint; Described substrate detection apparatus also comprises: the second drive unit driving described line source light-emitting device and described reflected light receiving trap synchronous rotary.
7. substrate detection apparatus as claimed in claim 6, it is characterized in that, described line source light-emitting device and described reflected light receiving trap are horizontally disposed with, or described line source light-emitting device and described reflected light receiving trap and surface level have angle.
8. substrate detection apparatus as claimed in claim 1, it is characterized in that, described line source light-emitting device comprises infrared light sources light-emitting device.
9. a method of testing substrate, is characterized in that, comprising:
Launch linear light incident light with the incident angle of setting to substrate, and make described incident light scanning substrate surface;
Receive the reflected light corresponding to incident light of directive substrate standard flat, when the actual reception section of described reflected light and standard receive section inconsistent time, determine substrate existing defects.
10. detection method as claimed in claim 9, it is characterized in that, described incident light scanning substrate surface realizes in the following way:
Substrate is parked motionless, makes described incident light opposing substrate move or rotate; Or
The invariant position of described incident light, makes substrate move relative to incident light.
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| CN201510067583.4A CN104568973A (en) | 2015-02-09 | 2015-02-09 | Device and method for detecting substrate |
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| CN201510067583.4A CN104568973A (en) | 2015-02-09 | 2015-02-09 | Device and method for detecting substrate |
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| CN104568973A true CN104568973A (en) | 2015-04-29 |
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| CN201510067583.4A Pending CN104568973A (en) | 2015-02-09 | 2015-02-09 | Device and method for detecting substrate |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106198562A (en) * | 2016-06-29 | 2016-12-07 | 昆山国显光电有限公司 | A kind of glass substrate detection method, Apparatus and system |
| CN106370134A (en) * | 2016-10-27 | 2017-02-01 | 南京华东电子信息科技股份有限公司 | Substrate flatness monitoring device |
| CN106370674A (en) * | 2016-08-29 | 2017-02-01 | 武汉华星光电技术有限公司 | Detection device and detection method for glass substrate |
| CN106908454A (en) * | 2015-12-23 | 2017-06-30 | 昆山国显光电有限公司 | The testing equipment and method of substrate |
| CN107068583A (en) * | 2017-03-20 | 2017-08-18 | 常州亿晶光电科技有限公司 | Solar panel bubble detection device and its detection method |
| CN107321557A (en) * | 2017-08-17 | 2017-11-07 | 京东方科技集团股份有限公司 | One kind coating detection means, coating apparatus and coating detection method |
| CN108962777A (en) * | 2018-05-18 | 2018-12-07 | 河海大学常州校区 | A kind of solar energy photovoltaic panel bubble detection device and its detection method |
| CN109932292A (en) * | 2019-03-29 | 2019-06-25 | 苏州精濑光电有限公司 | A kind of dust fall detection method |
| CN109946858A (en) * | 2017-12-20 | 2019-06-28 | 咸阳彩虹光电科技有限公司 | A kind of Mura defects detection method and device |
| CN114994062A (en) * | 2022-08-05 | 2022-09-02 | 深圳市倍捷锐生物医学科技有限公司 | Method and system for detecting surface quality of material and storage medium |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109946858A (en) * | 2017-12-20 | 2019-06-28 | 咸阳彩虹光电科技有限公司 | A kind of Mura defects detection method and device |
| CN109946858B (en) * | 2017-12-20 | 2022-03-11 | 咸阳彩虹光电科技有限公司 | Mura defect detection method and device |
| CN108962777B (en) * | 2018-05-18 | 2022-04-01 | 河海大学常州校区 | Bubble detection device and detection method for solar photovoltaic panel |
| CN108962777A (en) * | 2018-05-18 | 2018-12-07 | 河海大学常州校区 | A kind of solar energy photovoltaic panel bubble detection device and its detection method |
| CN109932292A (en) * | 2019-03-29 | 2019-06-25 | 苏州精濑光电有限公司 | A kind of dust fall detection method |
| CN114994062A (en) * | 2022-08-05 | 2022-09-02 | 深圳市倍捷锐生物医学科技有限公司 | Method and system for detecting surface quality of material and storage medium |
| CN114994062B (en) * | 2022-08-05 | 2023-03-14 | 深圳市倍捷锐生物医学科技有限公司 | Method and system for detecting surface quality of material and storage medium |
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