CN104418595A - 一种赛隆陶瓷靶材的制作方法 - Google Patents
一种赛隆陶瓷靶材的制作方法 Download PDFInfo
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- CN104418595A CN104418595A CN201310370661.9A CN201310370661A CN104418595A CN 104418595 A CN104418595 A CN 104418595A CN 201310370661 A CN201310370661 A CN 201310370661A CN 104418595 A CN104418595 A CN 104418595A
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- sialon ceramic
- ceramic target
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- sialon
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CN201310370661.9A CN104418595B (zh) | 2013-08-22 | 2013-08-22 | 一种赛隆陶瓷靶材的制作方法 |
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CN201310370661.9A CN104418595B (zh) | 2013-08-22 | 2013-08-22 | 一种赛隆陶瓷靶材的制作方法 |
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CN104418595A true CN104418595A (zh) | 2015-03-18 |
CN104418595B CN104418595B (zh) | 2016-12-28 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108840687A (zh) * | 2018-07-26 | 2018-11-20 | 深圳市东川技术研究有限公司 | 一种高强度赛隆新材料的烧结工艺 |
CN108863399A (zh) * | 2018-07-26 | 2018-11-23 | 深圳市东川技术研究有限公司 | 赛隆电加热新材料的烧结工艺 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19850597A1 (de) * | 1998-11-03 | 2000-05-04 | Ceramtec Ag | alpha-SiAION-Werkstoffe |
CN1546429A (zh) * | 2003-12-03 | 2004-11-17 | 中国科学院上海硅酸盐研究所 | 一种具有高红外透过率的α塞隆陶瓷材料及制备方法 |
CN101468918A (zh) * | 2007-12-28 | 2009-07-01 | 北京有色金属研究总院 | 高纯硼化锆/硼化铪粉体及其超高温陶瓷靶材的制备方法 |
CN103233227A (zh) * | 2013-05-16 | 2013-08-07 | 桂林电子科技大学 | 一种具有导电性能的复合陶瓷层的制备方法 |
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2013
- 2013-08-22 CN CN201310370661.9A patent/CN104418595B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19850597A1 (de) * | 1998-11-03 | 2000-05-04 | Ceramtec Ag | alpha-SiAION-Werkstoffe |
CN1546429A (zh) * | 2003-12-03 | 2004-11-17 | 中国科学院上海硅酸盐研究所 | 一种具有高红外透过率的α塞隆陶瓷材料及制备方法 |
CN101468918A (zh) * | 2007-12-28 | 2009-07-01 | 北京有色金属研究总院 | 高纯硼化锆/硼化铪粉体及其超高温陶瓷靶材的制备方法 |
CN103233227A (zh) * | 2013-05-16 | 2013-08-07 | 桂林电子科技大学 | 一种具有导电性能的复合陶瓷层的制备方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108840687A (zh) * | 2018-07-26 | 2018-11-20 | 深圳市东川技术研究有限公司 | 一种高强度赛隆新材料的烧结工艺 |
CN108863399A (zh) * | 2018-07-26 | 2018-11-23 | 深圳市东川技术研究有限公司 | 赛隆电加热新材料的烧结工艺 |
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Effective date of registration: 20191031 Address after: 315400 no.198 Anshan Road, Yuyao City, Ningbo City, Zhejiang Province Patentee after: Ningbo Jiangfeng Powder Metallurgy Co., Ltd Address before: 315400, No. 198, Mount Ann Road, state science and Technology Industrial Park, Ningbo, Zhejiang, Yuyao Patentee before: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. |
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Application publication date: 20150318 Assignee: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Assignor: Ningbo Jiangfeng Powder Metallurgy Co., Ltd Contract record no.: X2019330000048 Denomination of invention: Sialon ceramic target material production method Granted publication date: 20161228 License type: Exclusive License Record date: 20191203 |
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Address after: 315400 no.198 Anshan Road, Yuyao City, Ningbo City, Zhejiang Province Patentee after: Ningbo Jiangfeng hot isostatic pressing technology Co.,Ltd. Address before: 315400 no.198 Anshan Road, Yuyao City, Ningbo City, Zhejiang Province Patentee before: Ningbo Jiangfeng Powder Metallurgy Co.,Ltd. |
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