CN109578436B - High-precision friction-free vertical motion guide rail - Google Patents

High-precision friction-free vertical motion guide rail Download PDF

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Publication number
CN109578436B
CN109578436B CN201910074249.XA CN201910074249A CN109578436B CN 109578436 B CN109578436 B CN 109578436B CN 201910074249 A CN201910074249 A CN 201910074249A CN 109578436 B CN109578436 B CN 109578436B
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floating plate
liquid floating
slide carriage
friction
base
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CN201910074249.XA
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CN109578436A (en
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李增强
孙涛
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The invention discloses a high-precision friction-free vertical motion guide rail, which comprises a base, a slide carriage, a front liquid floating plate, a middle liquid floating plate, a rear liquid floating plate, a friction-free cylinder, a locker, a locking connecting bracket, a pneumatic locking column and an oil box, wherein: the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate are vertically arranged on the left side and the right side of the front surface of the base; the slide carriage is vertically arranged between the two middle liquid floating plates; the oil box is arranged right below the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate; the friction-free cylinder is arranged at the upper part of the base; the pneumatic locking device is fixed on the upper part of the base through a locking connecting bracket and is separately arranged on two sides of the friction-free cylinder; the locking column is fixed on the upper end surface of the slide carriage and passes through the center of the pneumatic locking device. The invention realizes frictionless vertical movement of the slide carriage by utilizing a hydrostatic pressure principle, drives the vertical slide carriage to move by utilizing a frictionless cylinder, realizes positioning by utilizing the locker and better meets the requirement of ultra-precision equipment on precision.

Description

High-precision friction-free vertical motion guide rail
Technical Field
The invention relates to a motion guide rail, in particular to a high-precision friction-free vertical motion guide rail which is applied to the fields of ultra-precision vertical positioning, ultra-precision vertical guide rails and the like.
Background
With the continuous development of science and technology in China, the application of ultra-precise subjects in high-precision industries is more and more extensive, and the requirements on equipment precision are continuously raised. To further improve the accuracy of the equipment, hydrostatic and aerostatic guideways or spindles are usually chosen, because of the absence of frictional effects, thus improving accuracy. However, the vertical axis of the conventional mechanical guide rail cannot meet the requirement of ultra-precision in terms of precision.
Disclosure of Invention
In order to solve the technical problems, the invention provides a high-precision friction-free vertical motion guide rail, which realizes friction-free vertical motion of a slide carriage by utilizing a hydrostatic pressure principle, drives the vertical slide carriage to move by utilizing a friction-free cylinder, realizes positioning by utilizing a locker and better meets the requirement of ultra-precision equipment on precision.
The purpose of the invention is realized by the following technical scheme:
the utility model provides a vertical motion guide rail of high accuracy zero friction, includes base, carriage apron, preceding liquid kickboard, well liquid kickboard, back liquid kickboard, zero friction cylinder, pneumatic locker, locking linking bridge, locking post, oil box, wherein:
the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate are vertically arranged on the left side and the right side of the front surface of the base, the middle liquid floating plate is positioned on the front side of the rear liquid floating plate, and the front liquid floating plate is positioned on the front side of the middle liquid floating plate;
the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate are respectively provided with an oil inlet and a high-pressure oil cavity communicated with the oil inlet on the end surface of one side close to the slide carriage;
the slide carriage is vertically arranged between the two middle liquid floating plates, and oil film gaps are respectively arranged between the slide carriage and the front liquid floating plate, the middle liquid floating plates and the rear liquid floating plates, so that the slide carriage can freely move in the vertical direction;
the oil box is arranged right below the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate;
the friction-free cylinder is arranged at the upper part of the base, and the axis of the friction-free cylinder is parallel to the moving direction of the slide carriage;
the pneumatic locking device is fixed on the upper part of the base through a locking connecting support and is separately arranged on two sides of the friction-free cylinder;
the locking column is fixed on the upper end surface of the slide carriage and penetrates through the center of the pneumatic locking device.
Compared with the prior art, the invention has the following advantages:
the invention forms a high-pressure oil film by utilizing the hydrostatic pressure principle, so that gaps are arranged among the slide carriage, the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate, and no friction force is generated between the slide carriage and the liquid floating plates during the motion of the slide carriage (the friction coefficient of liquid lubrication is extremely small and can be ignored), so that the slide carriage can smoothly move without friction and vibration, and the creeping phenomenon can not be generated during the low-speed motion. In addition, the high-pressure oil film has an error homogenizing effect, so that the processing error of the surface of the part can be compensated, and the equipment precision is improved.
Drawings
FIG. 1 is a schematic structural view of a high-precision frictionless vertical motion guide rail of the present invention, (a) a front view, and (b) a side view;
FIG. 2 is a schematic view of a hydrostatic guideway;
fig. 3 is a schematic view of the base structure, (a) a side view, (b) a front view, and (c) a top view.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings, but not limited thereto, and any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention shall be covered by the protection scope of the present invention.
The specific implementation method comprises the following steps: as shown in fig. 1-3, the high-precision friction-free vertical motion guide rail provided by the present embodiment method is mainly composed of a friction-free cylinder 1, a pneumatic locker 2, a locker bracket 3, a locking column 4, a slide carriage 5, a base 6, a front floating plate 7, a middle floating plate 8, a rear floating plate 9 and an oil box 10, wherein:
the front liquid floating plate 7, the middle liquid floating plate 8 and the rear liquid floating plate 9 are vertically arranged on the left side and the right side of the front surface of the base 6, the middle liquid floating plate 8 is positioned on the front side of the rear liquid floating plate 9, and the front liquid floating plate 7 is positioned on the front side of the middle liquid floating plate 8;
the slide carriage 5 is vertically arranged at the front side of the rear liquid floating plate 9 and between the two middle liquid floating plates 8, and a gap is reserved between the slide carriage 5 and the middle liquid floating plates 8, so that the slide carriage 5 can freely move in the vertical direction;
the oil box 10 is arranged right below the front liquid floating plate 7, the middle liquid floating plate 8 and the rear liquid floating plate 9;
the friction-free cylinder 1 is arranged at the upper part of the base 6, and the axis of the friction-free cylinder 1 is parallel to the moving direction of the slide carriage 5;
the pneumatic locker 2 is fixed on the upper part of the base 6 through the locking connecting bracket 3 and is separately arranged at two sides of the friction-free cylinder 1;
the locking post 4 is fixed to the upper end face of the carriage 5 and passes through the center of the pneumatic locker 2.
In this embodiment, the front floating plate 7, the middle floating plate 8 and the rear floating plate 9 form a C-shaped structure, and the slide carriage 5 is wrapped from two sides, and oil film gaps are respectively arranged between the slide carriage 5 and the front floating plate 7, the middle floating plate 8 and the rear floating plate 9, and the whole body is vertically installed on the side surface of the base 6.
The specific implementation method II comprises the following steps: this embodiment mode is a further description of the first embodiment mode. As shown in fig. 2, the front liquid floating plate 7, the middle liquid floating plate 8 and the rear liquid floating plate 9 are provided with a left oil inlet hole 11 and three left high-pressure oil chambers 12 at the left end close to one side end surface of the slide carriage 5, and provided with a right oil inlet hole 13 and three right high-pressure oil chambers 14 at the right end, wherein the left oil inlet hole 11 is communicated with the left high-pressure oil chambers 12, and the right oil inlet hole 13 is communicated with the right high-pressure oil chambers 14. High-pressure oil is simultaneously introduced into the left oil inlet hole 11 and the right oil inlet hole 13, a high-pressure oil film is formed between the slide carriage 5 and the front liquid floating plate 7, the middle liquid floating plate 8 and the rear liquid floating plate 9 respectively by utilizing the principle of hydrostatic pressure, the slide carriage 5 freely moves in the vertical direction, and hydraulic oil left by the front liquid floating plate 7, the middle liquid floating plate 8 and the rear liquid floating plate 9 flows into the oil box 10 and can be recovered.
The specific implementation method comprises the following steps: this embodiment mode is a further description of the first embodiment mode. As shown in figure 1, the frictionless cylinder 1 is filled with high-pressure air, and the slide carriage 5 can be driven to move up and down by changing the pressure of the high-pressure air.
The specific implementation method four: this embodiment mode is a further description of the first embodiment mode. As shown in fig. 1, the pneumatic locker 2 is in a locked state when high-pressure air is not introduced, the pneumatic locker 2 is separated from the locking post 4 when the high-pressure air is introduced, the slide carriage 5 is freely movable at this time, and the high-pressure air of the pneumatic locker 2 is cut off after the slide carriage 5 moves to a desired position, and the pneumatic locker 2 locks the locking post 4 to position the slide carriage 5.

Claims (3)

1. The utility model provides a vertical motion guide rail of high accuracy zero friction, its characterized in that vertical motion guide rail includes base, carriage apron, preceding liquid kickboard, well liquid kickboard, back liquid kickboard, zero friction cylinder, pneumatic locker, locking linking bridge, locking post, oil box, wherein:
the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate are vertically arranged on the left side and the right side of the front surface of the base, the middle liquid floating plate is positioned on the front side of the rear liquid floating plate, and the front liquid floating plate is positioned on the front side of the middle liquid floating plate;
the slide carriage is vertically arranged between the two middle liquid floating plates, and oil film gaps are respectively arranged between the slide carriage and the front liquid floating plate, between the slide carriage and the middle liquid floating plates and between the slide carriage and the rear liquid floating plates;
the oil box is arranged right below the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate;
the friction-free cylinder is arranged at the upper part of the base, and the axis of the friction-free cylinder is parallel to the moving direction of the slide carriage;
the pneumatic locking device is fixed on the upper part of the base through a locking connecting support and is separately arranged on two sides of the friction-free cylinder;
the locking column is fixed on the upper end surface of the slide carriage and penetrates through the center of the pneumatic locking device.
2. The high precision frictionless vertical motion guide rail of claim 1, wherein the front, middle and rear floating plates form a C-shaped structure and encase the carriage from both sides.
3. The high-precision frictionless vertical motion guide rail according to claim 1, wherein the front liquid floating plate, the middle liquid floating plate and the rear liquid floating plate are respectively provided with an oil inlet and a high-pressure oil chamber communicated with the oil inlet on the end surface of one side close to the slide carriage.
CN201910074249.XA 2019-01-25 2019-01-25 High-precision friction-free vertical motion guide rail Active CN109578436B (en)

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Application Number Priority Date Filing Date Title
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CN109578436B true CN109578436B (en) 2020-03-13

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1602843A2 (en) * 2004-06-02 2005-12-07 Fanuc Ltd Brake of a member supported on a fluid bearing
CN1834483A (en) * 2006-04-13 2006-09-20 潘旭华 Static pressure slideway able to precision position and its positioning method
CN102878203A (en) * 2012-10-22 2013-01-16 中国科学院光电技术研究所 Air-float guide rail
WO2013077175A1 (en) * 2011-11-25 2013-05-30 オイレス工業株式会社 Air slide device
CN104148952A (en) * 2014-08-12 2014-11-19 东华大学 Direct-driven closed type hydrostatic pressure vertical guide rail system of nanoscale precision
CN106112566A (en) * 2016-07-25 2016-11-16 天津百利机械装备集团有限公司中央研究院 A kind of guide rail structure of horizontal Machining centers ram
CN206747988U (en) * 2017-05-02 2017-12-15 宁波凯盛高科数控机床有限公司 A kind of numerical control drilling-milling lathe provided with numerical control weakening frame
CN108817993A (en) * 2018-08-09 2018-11-16 中国工程物理研究院机械制造工艺研究所 A kind of vertical liquid hydrostatic slideway servo feed system
CN108890324A (en) * 2018-09-03 2018-11-27 西安工业大学 Ultraprecise X-Y air-floatation planar locating platform based on square chest

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1602843A2 (en) * 2004-06-02 2005-12-07 Fanuc Ltd Brake of a member supported on a fluid bearing
CN1834483A (en) * 2006-04-13 2006-09-20 潘旭华 Static pressure slideway able to precision position and its positioning method
WO2013077175A1 (en) * 2011-11-25 2013-05-30 オイレス工業株式会社 Air slide device
CN102878203A (en) * 2012-10-22 2013-01-16 中国科学院光电技术研究所 Air-float guide rail
CN104148952A (en) * 2014-08-12 2014-11-19 东华大学 Direct-driven closed type hydrostatic pressure vertical guide rail system of nanoscale precision
CN106112566A (en) * 2016-07-25 2016-11-16 天津百利机械装备集团有限公司中央研究院 A kind of guide rail structure of horizontal Machining centers ram
CN206747988U (en) * 2017-05-02 2017-12-15 宁波凯盛高科数控机床有限公司 A kind of numerical control drilling-milling lathe provided with numerical control weakening frame
CN108817993A (en) * 2018-08-09 2018-11-16 中国工程物理研究院机械制造工艺研究所 A kind of vertical liquid hydrostatic slideway servo feed system
CN108890324A (en) * 2018-09-03 2018-11-27 西安工业大学 Ultraprecise X-Y air-floatation planar locating platform based on square chest

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
液体静压导轨热特性有限元分析;江云 等;《航空精密制造技术》;20111031;第47卷(第5期);第23-25页 *

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