CN104148952B - A kind of nano-precision directly drive enclosed fluid pressure upright guide rail system - Google Patents
A kind of nano-precision directly drive enclosed fluid pressure upright guide rail system Download PDFInfo
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- CN104148952B CN104148952B CN201410394913.6A CN201410394913A CN104148952B CN 104148952 B CN104148952 B CN 104148952B CN 201410394913 A CN201410394913 A CN 201410394913A CN 104148952 B CN104148952 B CN 104148952B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
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Abstract
The present invention relates to a kind of nano-precision directly drives enclosed fluid pressure upright guide rail system, it mainly includes linear electric motors parts, slide block type hydrostatic slideway and vertically movable worktable part, high precision position detector unit, counterweight and automatic band-type brake unit, guide rail hydraulic system, and control system.Being mainly characterized by of this system, use linear electric motors type of drive, slide block type hydrostatic slideway and closed loop control, make vertically movable workbench can undertake 40Kg or above load, and there is good contact stiffness and friction and wear characteristic, vertical working table movement uniformly, without low speed jerking motion phenomenon and have good stable working.Impulse stroke is the upright guide rail system accuracy≤± 200nm of 100mm, repetitive positioning accuracy≤± 100nm.Using and have the counterweight cylinder of band-type brake function, efficiently solving when directly driving fluid pressure upright guide rail system motion can not the technical bottleneck of power-off brake.
Description
Technical field
The present invention relates to a kind of nano-precision supporting microfabrication high-speed main spindle vertically movable and directly drive closed hydrostatic slideway system, be particularly adapted to the advanced manufacturing technology fields such as high speed micro-nano machining, nano level accurate measurement.
Background technology
Difficult processing high-performance key component occupies extremely important status in Modern weapon system, aerospace equipment and emerging strategic industry, such as the weighing apparatus flexible coupling of dynamically tuned gyro, DTG monoblock type double flat, silicon nitride ceramic ball bearing in high precision, inertial platform etc., its workmanship and precision have embodied a concentrated reflection of China's Aero-Space, armament systems and the integration capability of high-end manufacture system and level, it is to affect Weapon-damaged warship precision, spacecraft navigation performance and the core component of key industry equipment.The minute manufacturing technique of difficult processing high-performance key component and equipment, be responsible for development China's most advanced branches of science and the magnificent mission of Defence business development.At present, China is in this technical field, and there is a big difference with advanced industrialized country.Abroad in this technical field, China is carried out blockade on new techniques, seriously hinder China's development in this technical field, to China's most advanced branches of science development and national security, cause threat greatly.As a example by the weighing apparatus flexible coupling of dynamically tuned gyro, DTG monoblock type double flat, its feature is, 4 groups of thin muscle (inside and outside torsion bar) are it is critical that key feature, thin muscle thickness is 35-40 μm, length reaches 8mm, indirectly formed by 2 diameter≤2mm apertures of processing, require that 8 thin muscle concordance are 0.5 μm, the symmetry of 4 groups of thin muscle, coplane degree, vertically and horizontally the vertical degree etc. of thin muscle plane is required to less than 1 μm, therefore, require micro-nano technology lathe, the especially high speed rotating precision of spindle unit and stability thereof, the positioning precision of infeed mean and repetitive positioning accuracy etc. have high requirement, such as nano-precision vertical movement guide track system, and positioning precision < (1/3～1/2) process tolerance of guide track system.
So far, similar patent is:
" using the vertical lathe structure of hydrostatic bearing " (EP2641691A1) that in June, 2014, EUROPEAN PATENT OFFICE authorized；On April 2nd, 2014, Patent Office of the People's Republic of China disclosed " closed static pressure guideway structure using linear drives " (CN103692223A).But the hydrostatic slideway that above-mentioned two patent and other linear electric motors drive is all the guide rail in horizontal plane work, all it is not directed to directly to drive the key technologies such as load and braking that enclosed fluid pressure upright guide rail system must solve, thus is not belonging to upright guide rail system category.
USPO discloses the water-cooled high-precision Z-theta stage of Aerotech company of the U.S., US 7,420,298 B2:Water Cooled High on the 2nd in JIUYUE in 2008
Precision Z-theta stage(includes coherent reference patent: the No.6511504 " method manufacturing identical expandable stent；No.5759192 " directly cuts the method and apparatus of metal rack "；No.6521865 " is applied to the pulsed optical fibre laser diced system of medical treatment implantation ").The primary claim of this patent is, one has and moves horizontally (Z) and be parallel to the high accuracy platform of rotary shaft (θ axle) of mobile axis, use a pair brushless linear motor to drive horizontal shifting platform, be mainly used in implanting expandable stent or the Laser Processing of relevant slewing parts of human body.Being limited in that of this patent: 1) because this high accuracy platform is horizontal positioned, therefore need not that electric rotating machine component weight is proposed harshness and limit；2) electric rotating machine is used for driving the parts such as expandable stent, it is only necessary to relatively low rotary speed；3) because being to use Laser Processing, therefore the course of processing does not exist and cuts (mill) and cut power.That is, the Z axis that this patent relates to is horizontally oriented, it is not belonging to upright guide rail system category.
Summary of the invention
The technical problem to be solved in the present invention is: for supporting the vertical motion of high-speed main spindle, impulse stroke 100mm, positioning precision ± 200nm, repetitive positioning accuracy ± 100nm, maximum load 40Kg.
nullIn order to solve above-mentioned technical problem，The technical scheme is that provide a kind of nano-precision directly drives enclosed fluid pressure upright guide rail system，It is characterized in that: include linear electric motors parts，Driven static pressure slide block vertically movable by linear electric motors parts，Slide block type hydrostatic slideway assembly it has been disposed with left-right symmetry respectively in the both sides of static pressure slide block，Each slide block type hydrostatic slideway assembly is formed with vertical groove，Vertical groove on the slide block type hydrostatic slideway assembly of both sides is positioned opposite，So that the slide block type hydrostatic slideway assembly of static pressure slide block and both sides forms matched in clearance in the both sides of static pressure slide block are respectively protruding into the vertical groove of homonymy，Limited static pressure slide block by slide block type hydrostatic slideway assembly to be only capable of vertically moving up and down forming closed hydrostatic slideway，Static pressure slide block is provided with multiple flow controller and in static pressure slide block, is formed with multiple oil pocket，Flow controller and oil pocket one_to_one corresponding，Oil film is formed in the oil pocket that the oil that guide rail hydraulic system is given is corresponding in flowing into static pressure slide block by flow controller thus on vertical groove surface，The kinematic accuracy of thickness and linear electric motors parts by controlling oil film improves the precision that static pressure slide block is vertically movable；
High-speed main spindle vertical motion workbench is fixed on static pressure slide block, driven high-speed main spindle vertical motion workbench vertically movable by static pressure slide block, the read head of precision linear encoder is fixed on the side of high-speed main spindle vertical motion workbench, the ruler of precision linear encoder is fixed on the slide block type hydrostatic slideway assembly of homonymy and is parallel to the direction of motion of high-speed main spindle vertical motion workbench, by the actual amount of movement of the ruler real-time reception high-speed main spindle axially-movable workbench of precision linear encoder；
The counterweight cylinder for realizing braking function it is disposed with left-right symmetry respectively in the both sides of high-speed main spindle vertical motion workbench, the cylinder body of counterweight cylinder is fixed on high-speed main spindle vertical motion workbench, and the end of the push rod of counterweight cylinder is fixedly mounted in the counterweight cylinder mounting seat being positioned at below counterweight cylinder.
Preferably, described linear electric motors parts include linear electric motors and two motor extreme position limit switches, two motor extreme position limit switches lay respectively at linear electric motors over and under, by two limit of sports record of two motor extreme position limit switch straight limit motor ranges.
Preferably, also include column, slot in the middle part of column, two described slide block type hydrostatic slideway assemblies lay respectively at the left and right sides of groove, motor mounting plate is positioned at groove, described linear electric motors are fixed on motor mounting plate, and two described motor extreme position limit switches are separately fixed at upper end and the lower end of motor mounting plate；The primary coil of linear electric motors is arranged on described static pressure slide block, is aerated from the top of motor mounting plate, dispels the heat the primary coil of linear electric motors.
Preferably, described slide block type hydrostatic slideway assembly includes line slideway, is fixed with pressing plate on the top of line slideway, line slideway and pressing plate is collectively forming described vertical groove；Described oil film is formed at line slideway surface；The ruler of described precision linear encoder is fixed on pressing plate.
Preferably, described high-speed main spindle vertical motion workbench includes dynamic slide unit and for fixing the support of high-speed main spindle, and dynamic slide unit is fixed on described static pressure slide block, and support is fixed on dynamic slide unit；The read head of described precision linear encoder is fixed on the side of dynamic slide unit；The cylinder body of two described counterweight cylinders is separately fixed at the both sides of dynamic slide unit.
Preferably, being at least provided with braking hoop, brake piston, spring and pressing plate bar in each described counterweight cylinder, when emergency power off, gases at high pressure moment stops supply, and spring elongation promotes pressing plate bar so that piston rod embraced by braking hoop, thus realizes braking function.
Preferably, described guide rail hydraulic system includes oil inlet pipe, flowline, fuel tank, depurator, cooling pump and oil pump, oil inlet pipe is connected with the oil-in of described flow controller, the oil-out of flow controller is connected by oil pipe with oil pocket corresponding in described static pressure slide block, oil pocket passes through flowline while being connected with depurator, depurator is connected with fuel tank via cooling pump, has oil pump in fuel tank, and the oil in fuel tank is pumped into described flow controller by oil inlet pipe by oil pump.
Preferably, the measurement scope of described precision linear encoder is more than or equal to the total kilometres of described slide block type hydrostatic slideway assembly.
The present invention relates to directly drive the load of enclosed fluid pressure upright guide rail system and the solution of braking and method, and toppling caused by guide track system foozle can have been repaired, therefore can perform well in the reliable of vertical direction workbench and accurately drive.
Accompanying drawing explanation
Fig. 1 is that present invention high accuracy vertical straight drives hydrostatic slideway system three-dimensional profile schematic diagram；
Fig. 2 is the top view that present invention high accuracy vertical straight drives hydrostatic slideway system.
Detailed description of the invention
For making the present invention become apparent, hereby with preferred embodiment, and accompanying drawing is coordinated to be described in detail below.Should be understood that these embodiments are merely to illustrate the present invention rather than limit the scope of the present invention.In addition, it is to be understood that after having read the content that the present invention lectures, the present invention can be made various changes or modifications by those skilled in the art, and these equivalent form of values fall within the application appended claims limited range equally.
The enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision that the present invention provides includes linear electric motors 1, when linear electric motors 1 assemble, first linear electric motors 1 secondary coil is arranged on motor mounting plate 11, then two motor extreme position limit switches 13 are arranged on motor mounting plate 11, finally mounted motor mounting plate 11 are arranged in the groove in the middle part of column 12.Two motor extreme position limit switches 13, in order to two limit of sports record of straight limit motor 1 stroke, when high-speed main spindle vertical motion workbench 4 moves to extreme position, send alarm signal to be braked operation and to realize safety protection function.Motor mounting plate 11 uses foundry goods, it is simple to processes, install and changes, and has cooling air channel above this motor mounting plate 11, it is possible to the conduction of heat produced when effectively being moved by linear electric motors 1 is gone out.
During assembling slide block, first flow controller 6 is arranged on static pressure slide block 5, six flow controllers 6 of each installation are installed at two ends up and down, multiple oil pocket it is formed with in static pressure slide block 5, flow controller 6 and oil pocket one_to_one corresponding, comprise the oil circuit that oil film in guide rail is formed, therefore in static pressure slide block 5, can effectively save space so that mechanism is compact.Again the primary coil of linear electric motors 1 is assembled together with static pressure slide block 5, afterwards high-speed main spindle vertical motion workbench 4 is assembled together with static pressure slide block 5, then the read head of precision linear encoder 7 is arranged on read head support, then support is arranged on high-speed main spindle vertical motion workbench 4.
During assembling guide rail, the ruler of precision linear encoder 7 is partially installed on pressing plate 3, then pressing plate 3 is arranged on line slideway 2, then line slideway 2 and pressing plate 3 thereof are arranged on column 12, and adjust linearity and flatness arrival matching requirements.
Finally, the slide block assembled is assembled together with the guide rail assembled, forms static pressure slide block guide rail system.In this static pressure slide block guide rail system, line slideway 2 and pressing plate 3 are respectively arranged with two sets, are symmetrical set in static pressure slide block 5 both sides respectively, static pressure slide block 5 and line slideway 2 and pressing plate 3 matched in clearance.Static pressure slide block 5 drives high-speed main spindle vertical motion workbench 4 vertically to move up and down, guide rail structure limit other degree of freedom, and form closed hydrostatic slideway.
Forming oil film in the oil pocket that the oil that guide rail hydraulic system provides is corresponding in flowing into static pressure slide block 5 by flow controller 6 thus on line slideway 2 surface, the kinematic accuracy of thickness and linear electric motors 1 by controlling oil film improves the kinematic accuracy of vertical hydrostatic guide rail system.
The measurement scope of precision linear encoder 7 is more than or equal to guide rail total kilometres.Precision linear encoder 7 is made up of read head and ruler two parts.The read head of precision linear encoder 7 is installed in the dynamic slide unit side of high-speed main spindle vertical motion workbench 4, and the ruler of precision linear encoder 7 is partly parallel to the dynamic slide unit direction of motion, and side is arranged on pressing plate 3.And the actual amount of movement of real-time reception high-speed main spindle vertical motion workbench 4.The purpose proposing high precision position detector unit is, by precision linear encoder 7, high-speed main spindle vertical motion workbench 4 actual displacement is tested, analyzed and calculate displacement error, table feed motion to be carried out real-Time Compensation, and improve the kinematic accuracy of workbench.
Guide rail hydraulic system includes oil inlet pipe, flowline, fuel tank, depurator, cooling pump and oil pump, oil inlet pipe is connected with the oil-in of flow controller 6, the oil-out of flow controller 6 is connected by oil pipe with oil pocket corresponding in static pressure slide block 5, oil pocket passes through flowline while being connected with depurator, depurator is connected with fuel tank via cooling pump, having oil pump in fuel tank, the oil in fuel tank is pumped into flow controller 6 by oil inlet pipe by oil pump.
Subsequently, counterweight cylinder mounting seat 10 is assemblied on column 12, the movable part of counterweight cylinder 8 is arranged on the both sides of high-speed main spindle vertical motion workbench 4 again, then the standing part of counterweight cylinder 8 is arranged in counterweight cylinder mounting seat 10, finally assembles movable part and the standing part of counterweight cylinder 8.Finally oil-containing groove is arranged on column 12, and good and sound protective cover, then assemble.
Two counterweight cylinders about 8 each one symmetrical, wherein, the cylinder body of counterweight cylinder 8 is arranged on high-speed main spindle vertical motion workbench 4 as mobile parts, the push rod of counterweight cylinder 8 is arranged in counterweight cylinder mounting seat 10 as standing part, and counterweight cylinder mounting seat 10 is arranged on column 12.Counterweight cylinder 8 drives hydrostatic slideway system for straight vertical and provides moving equilibrium, to reduce the intensity of load of high-speed main spindle vertical motion workbench 4, improves its stable working.Being provided with braking hoop, brake piston, spring and pressing plate bar in counterweight cylinder 8, when emergency power off, gases at high pressure moment stops supply, and spring elongation promotes pressing plate bar so that piston rod embraced by braking hoop, thus realizes braking function.Therefore, it is possible to realize the function of vertically-mounted line motor cut-off braking, it is achieved safety protection function.When there are the accidents such as power-off, the decline slippage of vertically movable slide unit can be controlled within 10 microns by this band-type brake unit.
The dynamic slide unit of line slideway 2, pressing plate 3 and high-speed main spindle vertical motion workbench 4 all use grouan material, diminishbb weight account for upright guide rail system gross weight the 5% of load or more than.
The present invention operationally, drives static pressure slide block 5 by linear electric motors, and static pressure slide block 5 drives high-speed main spindle vertical motion workbench 4 to realize the motion of vertical direction.In oil pocket corresponding in oil is flowed into static pressure slide block 5 by flow controller 6, oil film thickness can carry out Automatic adjusument by flow controller 6.Static pressure slide block 5 and flow controller 6 move between line slideway 2 and pressing plate 3 the most up and down, and other degree of freedom are all retrained by the structure of guide rail, form geometry and close.It is aerated from the top of motor mounting plate 11, the primary coil of linear electric motors 1 is dispelled the heat.By precision linear encoder 7 real-time reception to the moving distance value of high-speed main spindle vertical motion workbench 4, analyze and calculate displacement error, so that table feed motion is carried out real-Time Compensation.Using counterweight cylinder 8 to drive hydrostatic slideway system for vertical straight and provide moving equilibrium, when the problems such as power-off occurs in vertically movable guide track system, counterweight cylinder 8 has braking function, it is possible to make high-speed main spindle vertical motion workbench 4 decline 10 microns.Two photoelectric sensor switch 13 on guide rail, it is possible to ensure that high-speed main spindle vertical motion workbench 4 moves to send during extreme position alarm signal, and carry out brake operating.
The high-precision high-speed main shaft vertical motion of the present invention directly drives hydrostatic slideway system by hydrostatic slideway slide block, and it is applied to vertical direction, by the way of the thickness of oil film in control hydrostatic slideway and the kinematic accuracy of linear electric motors, improve the displacement accuracy of vertical hydrostatic guide rail system.By precision linear encoder, workbench actual displacement is tested, analyze and calculate displacement error, so that table feed motion is carried out real-Time Compensation, improve the displacement accuracy of workbench.The present invention the most effectively solves the cooling problem of linear electric motors.And by reducing the intensity of load of high-speed main spindle vertical motion workbench 4 with the counterweight cylinder 8 of braking function, improve its stable working, and solve the linear electric motors 1 power-off brake problem when vertical direction.
Contrast Related product: Aerotech company of the U.S. is world-renowned high accuracy platform manufacturer, its product provided at present is a lot, with application claims (upright guide rail workbench, impulse stroke≤100mm, positioning precision≤± 200nm(0.2um), repetitive positioning accuracy≤± 100nm(0.1um), maximum load 40Kg) product that is close has multiple, as a example by ATS20015 product, its maximum load is 40Kg, stroke 150mm, but precision index is: the positioning precision using ball-screw and Aerotech controller is ± 1um(1000nm), repetitive positioning accuracy ± 0.5um(500nm).
Claims (8)
- null1. a nano-precision directly drive enclosed fluid pressure upright guide rail system，It is characterized in that: include linear electric motors parts，Driven static pressure slide block (5) vertically movable by linear electric motors parts，Slide block type hydrostatic slideway assembly it has been disposed with left-right symmetry respectively in the both sides of static pressure slide block (5)，Each slide block type hydrostatic slideway assembly is formed with vertical groove，Vertical groove on the slide block type hydrostatic slideway assembly of both sides is positioned opposite，So that the slide block type hydrostatic slideway assembly of static pressure slide block (5) and both sides forms matched in clearance in the both sides of static pressure slide block (5) are respectively protruding into the vertical groove of homonymy，Limited static pressure slide block (5) by slide block type hydrostatic slideway assembly to be only capable of vertically moving up and down forming closed hydrostatic slideway，Static pressure slide block (5) is provided with multiple flow controller (6) and is formed with multiple oil pocket in static pressure slide block (5)，Flow controller (6) and oil pocket one_to_one corresponding，Oil film is formed in the oil pocket that the oil that guide rail hydraulic system is given is corresponding in flowing into static pressure slide block (5) by flow controller (6) thus on vertical groove surface，The kinematic accuracy of thickness and linear electric motors parts by controlling oil film improves the precision that static pressure slide block (5) is vertically movable；High-speed main spindle vertical motion workbench (4) is fixed on static pressure slide block (5), driven high-speed main spindle vertical motion workbench (4) vertically movable by static pressure slide block (5), the read head of precision linear encoder (7) is fixed on the side of high-speed main spindle vertical motion workbench (4), the ruler of precision linear encoder (7) is fixed on the slide block type hydrostatic slideway assembly of homonymy and is parallel to the direction of motion of high-speed main spindle vertical motion workbench (4), by the actual amount of movement of ruler real-time reception high-speed main spindle vertical motion workbench (4) of precision linear encoder (7)；The counterweight cylinder (8) for realizing braking function it is disposed with left-right symmetry respectively in the both sides of high-speed main spindle vertical motion workbench (4), the cylinder body of counterweight cylinder (8) is fixed on high-speed main spindle vertical motion workbench (4), and the end of the push rod of counterweight cylinder (8) is fixedly mounted in counterweight cylinder mounting seat (10) being positioned at counterweight cylinder (8) lower section.
- A kind of nano-precision the most as claimed in claim 1 directly drive enclosed fluid pressure upright guide rail system, it is characterized in that: described linear electric motors parts include linear electric motors (1) and two motors extreme position limit switch (13), two motors extreme position limit switch (13) lay respectively at linear electric motors (1) over and under, by two limit of sports record of two motor extreme position limit switch (13) straight limit motor (1) strokes.
- A kind of nano-precision the most as claimed in claim 2 directly drive enclosed fluid pressure upright guide rail system, it is characterized in that: also include column (12), column (12) middle part fluting, two described slide block type hydrostatic slideway assemblies lay respectively at the left and right sides of groove, motor mounting plate (11) is positioned at groove, described linear electric motors (1) are fixed on motor mounting plate (11), and two described motors extreme position limit switch (13) are separately fixed at upper end and the lower end of motor mounting plate (11)；The primary coil of linear electric motors (1) is arranged on described static pressure slide block (5), is aerated from the top of motor mounting plate (11), dispels the heat the primary coil of linear electric motors (1).
- A kind of nano-precision the most as claimed in claim 1 directly drive enclosed fluid pressure upright guide rail system, it is characterized in that: described slide block type hydrostatic slideway assembly includes line slideway (2), it is fixed with pressing plate (3) on the top of line slideway (2), line slideway (2) and pressing plate (3) is collectively forming described vertical groove；Described oil film is formed at line slideway (2) surface；The ruler of described precision linear encoder (7) is fixed on pressing plate (3).
- A kind of nano-precision the most as claimed in claim 1 directly drive enclosed fluid pressure upright guide rail system, it is characterized in that: described high-speed main spindle vertical motion workbench (4) includes dynamic slide unit and for fixing the support (9) of high-speed main spindle, dynamic slide unit is fixed on described static pressure slide block (5), and support (9) is fixed on dynamic slide unit；The read head of described precision linear encoder (7) is fixed on the side of dynamic slide unit；The cylinder body of two described counterweight cylinders (8) is separately fixed at the both sides of dynamic slide unit.
- A kind of nano-precision the most as claimed in claim 1 directly drive enclosed fluid pressure upright guide rail system, it is characterized in that: braking hoop, brake piston, spring and pressing plate bar are at least installed in each described counterweight cylinder (8), when emergency power off, gases at high pressure moment stops supply, spring elongation promotes pressing plate bar, make to brake hoop and embrace piston rod, thus realize braking function.
- A kind of nano-precision the most as claimed in claim 1 directly drive enclosed fluid pressure upright guide rail system, it is characterized in that: described guide rail hydraulic system includes oil inlet pipe, flowline, fuel tank, depurator, cooling pump and oil pump, oil inlet pipe is connected with the oil-in of described flow controller (6), the oil-out of flow controller (6) is connected by oil pipe with oil pocket corresponding in described static pressure slide block (5), oil pocket passes through flowline while being connected with depurator, depurator is connected with fuel tank via cooling pump, oil pump is had in fuel tank, oil in fuel tank is pumped into described flow controller (6) by oil inlet pipe by oil pump.
- A kind of nano-precision the most as claimed in claim 1 directly drive enclosed fluid pressure upright guide rail system, it is characterised in that: the measurement scope of described precision linear encoder (7) is more than or equal to the total kilometres of described slide block type hydrostatic slideway assembly.
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| CN112077616B (en) * | 2020-09-10 | 2021-08-10 | 中国工程物理研究院机械制造工艺研究所 | Hydrostatic pressure guide rail system with actively controllable oil film thickness |
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| CN116160261B (en) * | 2023-04-21 | 2023-07-07 | 江苏领臣精密机械有限公司 | Protection mechanism of hydrostatic guideway |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006102901A (en) * | 2004-10-07 | 2006-04-20 | Seiko Instruments Inc | Machine tool |
| JP2006326789A (en) * | 2005-05-30 | 2006-12-07 | Konica Minolta Opto Inc | Guide device and machine tool |
| CN101829904A (en) * | 2010-01-26 | 2010-09-15 | 西安交通大学 | Closed hydrostatic slideway |
| CN201645158U (en) * | 2010-01-14 | 2010-11-24 | 重庆大学 | Closed static guide rail oil supply system |
| CN102189409A (en) * | 2011-03-01 | 2011-09-21 | 沈阳机床股份有限公司 | Anti-wrapping closed hydrostatic slideway structure of numerical control machine |
-
2014
- 2014-08-12 CN CN201410394913.6A patent/CN104148952B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006102901A (en) * | 2004-10-07 | 2006-04-20 | Seiko Instruments Inc | Machine tool |
| JP2006326789A (en) * | 2005-05-30 | 2006-12-07 | Konica Minolta Opto Inc | Guide device and machine tool |
| CN201645158U (en) * | 2010-01-14 | 2010-11-24 | 重庆大学 | Closed static guide rail oil supply system |
| CN101829904A (en) * | 2010-01-26 | 2010-09-15 | 西安交通大学 | Closed hydrostatic slideway |
| CN102189409A (en) * | 2011-03-01 | 2011-09-21 | 沈阳机床股份有限公司 | Anti-wrapping closed hydrostatic slideway structure of numerical control machine |
Non-Patent Citations (2)
| Title |
|---|
| 数控外圆磨床砂轮架闭式静压导轨的设计;刘军胜;《精密制造与自动化》;20111125(第4期);79-82 * |
| 重型机床垂向导轨副应用恒流闭式静压导轨的设计;李嵩松;《设计与研究》;20110702(第7期);36-39 * |
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| CN104148952A (en) | 2014-11-19 |
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