CN104142179A - Static fixed mirror interferometer - Google Patents

Static fixed mirror interferometer Download PDF

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Publication number
CN104142179A
CN104142179A CN201410370518.4A CN201410370518A CN104142179A CN 104142179 A CN104142179 A CN 104142179A CN 201410370518 A CN201410370518 A CN 201410370518A CN 104142179 A CN104142179 A CN 104142179A
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CN
China
Prior art keywords
catoptron
beam splitter
mirror
interferometer
surface normal
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CN201410370518.4A
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Chinese (zh)
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卓朝旦
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FENGHUA YUCHUANG PRODUCT DESIGN Co Ltd
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FENGHUA YUCHUANG PRODUCT DESIGN Co Ltd
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Priority to CN201410370518.4A priority Critical patent/CN104142179A/en
Publication of CN104142179A publication Critical patent/CN104142179A/en
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  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

The invention relates to a static fixed mirror interferometer. The interferometer comprises a beam splitter (2), a first mirror (3), a second mirror (4), a cylindrical mirror (5) and a CCD (6), wherein the direction of the surface normal of the first mirror (3) is perpendicular to the direction of the surface normal of the second mirror (4), the beam splitter (2) is arranged at the intersection of the surface normal of the first mirror (3) and the surface normal of the second mirror (4), and the cylindrical mirror (5) and the CCD (6) are arranged below the connection line of the first mirror (3) and the beam splitter (2). According to the static fixed mirror interferometer, a traditional Michelson interferometer is improved, the structure is more concise, and frequency spectrum information in interference fringes can be obtained more rapidly and accurately by the combination of an algorithm.

Description

Static fixation reflex mirror interferometer
Technical field
The present invention relates to a kind of instrument for light spectrum image-forming, relate in particular to a kind of static fixation reflex mirror interferometer, belong to light spectrum image-forming field.
Background technology
Fourier Transform Spectroscopy, or referred to as Fourier spectrum technology, can trace back to Michelson (Michelson) interferometer of invention in 1880; Although the original intention of this invention is the measurement for the vacuum light velocity, it has possessed the basic structure of modern Fourier transform spectrometer.Within 1891, Michelson explicitly points out, and on the receiving plane of double beam interferometer, changes the interference strength variation causing and equals the Fourier transform of tested spectrum, thereby established the theoretical foundation of modern Fourier transform spectrometer, by optical path difference.In development course subsequently, although the lot of advantages of Fourier spectrum technology is disclosed out by people, but because the needed calculated amount of high resolving power Fourier trasform spectroscopy refutation process is very large, therefore until the second half in 20th century, Fourier spectrum technology is just along with the development of digital computer technique progressively occupies spectral technique, the especially critical role in infrared spectrometry field.Particularly in nineteen sixty-five, J.W.Cooley and J.W.Tukey have invented Fast Fourier Transform (FFT) (FFT) algorithm and it have been applied on interference spectroscope, thereby the inverting of high resolving power Fourier trasform spectroscopy is shortened needed computing time greatly, also made the widespread use of Fourier trasform spectroscopy measuring technique become a reality.
Fourier spectrum technical development, to today, has not only rested on the spectral measurement for simple pointolite or area source.In order to meet the needs of various application scenarios, have imaging, high sensitivity, fast, the Fourier spectrum technology of the function such as wide spectrum, high stability or feature is also developed.Although Fourier transform spectrometer, FTS (Fourier Transform Spectrometers) just progressively enters practical as far back as the sixties in 20th century, but the concept of Fourier transform imaging spectrometer FTIS (Fourier Transform Imaging Spectrometers), until early 1990s is just suggested along with the development of remotely sensed image spectral technique, and is greatly developed.Therefore can think that Fourier spectrum technology remains a young science.Imaging spectral technology is first in the U.S., propose and grow up the end of the seventies, and it has the feature of image and spectrum unification, and the analyzing and processing of its information concentrates on expansion and the quantitative analysis that carries out image information in spectrum dimension.In remote sensing field, each state is all using interference type imaging spectral technology as prior development direction.
Fourier transform imaging spectrometer is called again picture interferometer (imaging interferometer) in a lot of documents.By scanning theory, divide, current Fourier transform imaging spectrometer roughly can be divided into time-modulation type (Temporarily Modulated) and the large class of spatial modulation type (Spatially Modulated) two.Wherein time-modulation type need to be installed index glass, and the variation of optical path difference is subject to certain restrictions.
Summary of the invention
In order to overcome the deficiencies in the prior art, resolve the problem of prior art, make up the deficiency of existing existing product in the market.
The invention provides a kind of static fixation reflex mirror interferometer, interferometer comprises beam splitter, the first catoptron, the second catoptron, cylindrical mirror and CCD, the minute surface normal direction of described the first catoptron and the second catoptron is mutually vertical, described beam splitter is arranged on the point of crossing of minute surface normal of the first catoptron and the second catoptron, and described cylindrical mirror and CCD are separately positioned on the below of the first catoptron and beam splitter line.
Preferably, above-mentioned beam splitter is a ° angle setting with the first catoptron and the second catoptron respectively.
Preferably, above-mentioned beam splitter is towards the one side of the first catoptron anti-reflection film that has been sticked.
Preferably, above-mentioned beam splitter is towards the one side of the second catoptron part reflective semitransparent film that has been sticked.
Preferably, the light beam that above-mentioned light source sends is towards the be sticked one side of anti-reflection film of beam splitter.
Static fixation reflex mirror interferometer provided by the invention, improves traditional Michelson interferometer, structurally more succinct, and combination algorithm can obtain the interference fringe spectrum information of the second month in a season more rapidly and accurately.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Reference numeral: 1-light source; 2-beam splitter; 3-the first catoptron; 4-the second catoptron; 5-cylindrical mirror; 6-CCD; 7-anti-reflection film; 8-part reflective semitransparent film.
Embodiment
For the ease of those of ordinary skills, understand and implement the present invention, below in conjunction with the drawings and the specific embodiments, the present invention is described in further detail.
Static fixation reflex mirror interferometer of the present invention specifically as shown in Figure 1, interferometer comprises beam splitter (2), the first catoptron (3), the second catoptron (4), cylindrical mirror (5) and CCD (6), described the first catoptron (3) is mutually vertical with the minute surface normal direction of the second catoptron (4), described beam splitter (2) is arranged on the point of crossing of minute surface normal of the first catoptron (3) and the second catoptron (4), and described cylindrical mirror (5) and CCD (6) are separately positioned on the below of the first catoptron (3) and beam splitter (2) line.Beam splitter (2) is 45° angle setting with the first catoptron (3) and the second catoptron (4) respectively.Beam splitter (2) is towards the one side of the first catoptron (3) anti-reflection film (7) that has been sticked.Beam splitter (2) is towards the one side of the second catoptron (4) part reflective semitransparent film (8) that has been sticked.The light beam that light source (1) sends is towards the be sticked one side of anti-reflection film (7) of beam splitter (2).Light beam has carried out respectively refraction and transmission after beam splitter (2), wherein the light after refraction arrived after the first catoptron (3) entered beam splitter (2) transmission again and arrives CCD (6) through cylindrical mirror (5), light after beam splitter (2) transmission arrives after the second catoptron (4) through reflection, then after the refraction of beam splitter (2), also passes through cylindrical mirror (5) and arrive CCD (6).Two-beam has formed interference like this.
Interferometer provided by the invention is on the basis of conventional interference system, original index glass is become to the stationary mirror of inclination certain angle, as shown in catoptron in figure 1.After the light incidence system that light source 1 sends, by beam splitter, be divided into two-beam, a part is reflected back cylindrical mirror by the first catoptron 3, this Shu Guang is because the first catoptron 3 exists certain angle but not former road is returned, it can occur to be concerned with the light of light through the second catoptron 4 reflections, forms interference fringe.Other light also by that analogy, interfere with other light, finally on whole cylindrical mirror, form static interference fringe, then it is upper by cylindrical mirror 5, to converge to CCD6, collect the gradation data of interference fringe.During the data successor that CCD6 gathers calculates, in software, complete filtering, the denoising of interference fringe, then by fft algorithm, the spectrum information in interference fringe is extracted, finally demonstrate its result.
In actual conditions, interference fringe, by introducing modifying factor, can be expressed as the intensity of light source:
I(x,υ)=B(υ)cos(2πυx) (1)
Light distribution for the interference fringe of desirable its generation of monochromatic light suc as formula (1). and for polychromatic light, by superposition principle interference fringe light intensity, can be expressed as:
I ( x , υ ) = 2 H ( υ ) ∫ 0 ∞ B ( υ ) cos ( 2 πυx ) dυ - - - ( 2 )
Wherein, υ is wave number, and H (υ) is a constant factor, the power spectrum that B (υ) is light source.So distribution of interference intensity I (x) and spectral distribution B (υ) are Fourier transform relations, that is:
I ( x ) = ∫ 0 ∞ B ( υ ) e - 2 πυx dυ B ( υ ) = ∫ 0 ∞ I ( x ) e - i 2 πυx dx - - - ( 3 )
Static fixation reflex mirror interferometer provided by the invention, improves traditional Michelson interferometer, structurally more succinct, and combination algorithm can obtain the interference fringe spectrum information of the second month in a season more rapidly and accurately.
The embodiment of the above is better embodiment of the present invention; not with this, limit specific embodiment of the invention scope; scope of the present invention comprises and is not limited to this embodiment, and the equivalence that all shapes according to the present invention, structure are done changes all in protection scope of the present invention.

Claims (5)

1. a static fixation reflex mirror interferometer, it is characterized in that: described interferometer comprises beam splitter (2), the first catoptron (3), the second catoptron (4), cylindrical mirror (5) and CCD (6), described the first catoptron (3) is mutually vertical with the minute surface normal direction of the second catoptron (4), described beam splitter (2) is arranged on the point of crossing of minute surface normal of the first catoptron (3) and the second catoptron (4), and described cylindrical mirror (5) and CCD (6) are separately positioned on the below of the first catoptron (3) and beam splitter (2) line.
2. static fixation reflex mirror interferometer according to claim 1, is characterized in that: described beam splitter (2) is 45° angle setting with the first catoptron (3) and the second catoptron (4) respectively.
3. static fixation reflex mirror interferometer according to claim 2, is characterized in that: described beam splitter (2) is towards the one side of the first catoptron (3) anti-reflection film (7) that has been sticked.
4. static fixation reflex mirror interferometer according to claim 2, is characterized in that: described beam splitter (2) is towards the one side of the second catoptron (4) part reflective semitransparent film (8) that has been sticked.
5. according to the static fixation reflex mirror interferometer one of claim 1-4 Suo Shu, it is characterized in that: the light beam that described light source (1) sends is towards the be sticked one side of anti-reflection film (7) of beam splitter (2).
CN201410370518.4A 2014-07-28 2014-07-28 Static fixed mirror interferometer Pending CN104142179A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104483022A (en) * 2014-11-25 2015-04-01 北京工业大学 Fourier conversion spectrum instrument based on Michelson interferometer of equivalent intersecting mirror
CN110319788A (en) * 2019-06-25 2019-10-11 中国科学院上海光学精密机械研究所 Adjustable interference position test device and its test method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4932780A (en) * 1986-11-05 1990-06-12 Fuji Electric Co., Ltd. Interferometer
CN101281062A (en) * 2008-05-23 2008-10-08 天津大学 Static state Fourier spectrometer
CN101294848A (en) * 2008-05-19 2008-10-29 哈尔滨工业大学 Fourier transform interference spectrometer based on slow ray light velocity controlling technology
CN101435720A (en) * 2008-12-09 2009-05-20 西安交通大学 Static wide field real time multi-direction detecting polarization wind imaging interferometer
CN103913231A (en) * 2014-03-10 2014-07-09 中国科学院长春光学精密机械与物理研究所 Spatial-temporal union modulation Fourier transform imaging spectrometer based on light beam splitter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4932780A (en) * 1986-11-05 1990-06-12 Fuji Electric Co., Ltd. Interferometer
CN101294848A (en) * 2008-05-19 2008-10-29 哈尔滨工业大学 Fourier transform interference spectrometer based on slow ray light velocity controlling technology
CN101281062A (en) * 2008-05-23 2008-10-08 天津大学 Static state Fourier spectrometer
CN101435720A (en) * 2008-12-09 2009-05-20 西安交通大学 Static wide field real time multi-direction detecting polarization wind imaging interferometer
CN103913231A (en) * 2014-03-10 2014-07-09 中国科学院长春光学精密机械与物理研究所 Spatial-temporal union modulation Fourier transform imaging spectrometer based on light beam splitter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104483022A (en) * 2014-11-25 2015-04-01 北京工业大学 Fourier conversion spectrum instrument based on Michelson interferometer of equivalent intersecting mirror
CN110319788A (en) * 2019-06-25 2019-10-11 中国科学院上海光学精密机械研究所 Adjustable interference position test device and its test method
CN110319788B (en) * 2019-06-25 2021-11-30 中国科学院上海光学精密机械研究所 Adjustable interference position testing device and testing method thereof

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Application publication date: 20141112