CN101281062A - Static state Fourier spectrometer - Google Patents
Static state Fourier spectrometer Download PDFInfo
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- CN101281062A CN101281062A CNA2008100532169A CN200810053216A CN101281062A CN 101281062 A CN101281062 A CN 101281062A CN A2008100532169 A CNA2008100532169 A CN A2008100532169A CN 200810053216 A CN200810053216 A CN 200810053216A CN 101281062 A CN101281062 A CN 101281062A
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Abstract
The invention belongs to the spectroscopy instrument technique field, and relates to two Static Fourier Spectrometers which are provided with the same inventive concept. One Static Fourier Spectrometer comprises a right angle beam splitter prism and an array type photosensitive device. The right angle beam splitter prism comprises a first and a second two adjacent planes which take a right angle with each other. The first plane (A) is a step-shaped reflection grating plane. The second plane (B) is a plane plated by reflective film. After reaching the right angle beam splitter prism, measured parallel light is divided into two parts. One part permeates a beam splitter plane to vertically reach to the second plane (B), and is reflected by the plane, then is reflected by the beam splitter plane to reach to the array type photosensitive device. the other part is reflected by the beam splitter plane to vertically reach to the first plane (A), then permeates the beam splitter plane via reflection of the plane to reach to the array type photosensitive device. The Static Fourier Spectrometers provided by the invention not only has the advantages of very simple structure, high speed, stable reliable, high sensitivity, and high resolution, but also need not moving parts.
Description
Technical field
The present invention relates to scientific instrument, especially a kind of spectral instrument.
Background technology
Spectrometer is a kind of important and commonly used scientific instrument, is used for light source and material are carried out accurate analysis.For the performances such as sensitivity for analysis, precision and speed that improve instrument, constantly the someone adopts new technology and device improvements spectrometer.
Patent of invention (the long spectrometer of CCD grating integrated full as designs such as Wang Kemin, patent No. CN01114410.6), patent of invention (the integrated miniature spectrometer of design such as Wen Zhiyu, patent No. CN02119512.9), patent of invention (the online near infrared spectrometer of design such as Yuan Hongfu, application number CN02125852.X), patent of invention (the hand-held spectrometer of the clear design of Liu Mu, application number CN01254633.X), Liu Mu waits the patent of invention (a kind of near infrared spectrometer of 0.7-1.7 micron waveband, application number CN03270366.X) of design clearly.Be grating spectrograph in above-mentioned design, adopt grating and CCD (charge-coupled image sensor) as the performance that improves spectrometer.CCD has advantage fast, but with respect to other photoelectric devices such as photomultipliers, the sensitivity of CCD is much lower, still is apparent not enough when analyzing some material composition.Otherwise fourier spectrometer has highly sensitive characteristics, but needs accurate moving component, complex structure, and measuring speed is slow.
Summary of the invention
Technical matters to be solved by this invention is to overcome above-mentioned the deficiencies in the prior art, realizes that a kind of both tools are high-speed, has high sensitivity again, and is simple in structure, also do not need moving component, do not need the novel spectrometer of adjusting.
In order to solve the problems of the technologies described above, first kind of technical scheme that the present invention proposes is as follows:
A kind of static state Fourier spectrometer, comprise right angle beam splitter prism and array optical sensing device, described right angle beam splitter prism comprises the first and second two mutual rectangular adjacent planes, the first plane A is a stepped appearance reflection grating face, the second plane B is the plane that is coated with reflectance coating, tested directional light arrives after the described right angle beam splitter prism, separated into two parts, a part vertically arrives the second plane B after seeing through beam-splitting surface, by reaching the array optical sensing device by the beam-splitting surface reflection again behind this plane reflection, another part light is seen through beam-splitting surface and is reached the array optical sensing device by the vertical first plane A that arrives in beam-splitting surface reflection back behind this plane reflection.
Above-mentioned fourier spectrometer, array optical sensing device can be line array CCD, area array CCD, face array CMOS image sensor or micro channel array photomultiplier PMT.
Second kind of technical scheme that the present invention proposes is as follows:
A kind of static state Fourier spectrometer, comprise right angle beam splitter prism and array optical sensing device, described right angle beam splitter prism comprises the first and second two mutual rectangular adjacent planes, the first plane A and the second plane B are stepped appearance reflection grating face, the groove direction of described two reflection grating faces is perpendicular, tested directional light arrives after the described right angle beam splitter prism, separated into two parts, a part vertically arrives the second plane B after seeing through beam-splitting surface, by reaching the array optical sensing device by the beam-splitting surface reflection again behind this plane reflection, another part light is seen through beam-splitting surface and is reached the array optical sensing device by the vertical first plane A that arrives in beam-splitting surface reflection back behind this plane reflection.
Above-mentioned fourier spectrometer, array optical sensing device can area array CCDs, face array CMOS image sensor or micro channel array photomultiplier PMT.
The present invention improves the design of the inferior interferometer of Mike's ear, with parts of right angle beam splitter prism, substitute beam splitter and two-face mirror in the inferior interferometer of Mike's ear, one or two adjacent transmission plane at the right angle beam splitter prism is made echelon grating, with the array optical sensing device, as CCD or cmos image sensor as optical signal detector spare as receiving device, make each (row) pixel of array optical sensing device, each reflecting surface of echelon grating and another arm all constitute a miniature inferior interferometer of Mike's ear, optical path difference in each microinterferometer is all different, the array optical electrical part is after receiving the interference signal of different optical path differences, by Fourier transform, can realize spectral measurement.This kind design makes the structure of spectrometer simplify greatly, does not need moving component, does not need to adjust, and can realize high-speed high sensitivity spectral analysis.
Description of drawings
Fig. 1 is the light path principle figure of the embodiment of the invention 1.
Fig. 2 is the light path principle figure of the embodiment of the invention 2.
Reference numeral:
1 is that right angle beam splitter prism 2 is the array optical sensing device
Embodiment
Below in conjunction with accompanying drawing the present invention is elaborated.
Grating Fourier spectrometer embodiment one of the present invention:
As shown in Figure 1, tested directional light is by right angle beam splitter prism 1 separated into two parts, a part sees through the plane B that beam-splitting surface arrives the right angle beam splitter prism, and plane B is coated with reflectance coating and constitutes catoptron, by reaching array optical sensing device 2 by the beam-splitting surface reflection again after the plane B reflection; Another part light is arrived the plane A of right angle beam splitter prism by the beam-splitting surface reflection, plane A is the stepped appearance reflection grating, this part light has different optical path differences after plane A reflection, arrive array optical sensing device 2 after seeing through beam-splitting surface, but the light path of this a part of light has nothing in common with each other, thereby with foregoing a part of light when the interfering of array optical sensing device 2, array optical sensing device 2 records the different maximum interference intensity light of wavelength, carry out Fourier transform by the photosignal that array photosensitive device 2 is obtained, just can obtain by the frequency spectrum of photometry.
The array optical sensing device can adopt the CCD light sensor of linear array, (image) sensor or CMOS photosensitive (image) sensor that also can adopt the CCD of face battle array photosensitive, as 13V5H of Min Tong company etc., also can adopt other face battle array photosensitive (image) sensor, as array photoelectricity multiplier tube (PMT) etc.
When employing face battle array photosensitive (image) sensor, identical with grating cutting direction (or saying the same cutting reflected light of reception) detected signal of pixel carries out Fourier transform after can superposeing again, can increase substantially the sensitivity of spectrometer and the precision of spectrum amplitude.
Grating Fourier spectrometer embodiment two of the present invention:
As shown in Figure 2, tested directional light is by right angle beam splitter prism 1 separated into two parts, a part sees through the plane B that beam-splitting surface arrives the right angle beam splitter prism, plane B is the stepped appearance reflection grating, this part light has different optical path differences after plane B reflection, through arriving array optical sensing device 2 behind the beam-splitting surface; Another part light is arrived the plane A of right angle beam splitter prism by the beam-splitting surface reflection, plane A also is the stepped appearance reflection grating, but the groove direction of its groove direction and plane B is perpendicular, and this part light also has different optical path differences after plane A reflection, through arriving array optical sensing device 2 behind the beam-splitting surface.The light path of two parts light that receives at array optical sensing device 2 each pixel has nothing in common with each other, and carries out Fourier transform by the photosignal that array photosensitive device 2 is obtained, and just can obtain by the frequency spectrum of photometry.
The array optical sensing device can adopt photosensitive (image) sensor of the CCD of face battle array or CMOS photosensitive (image) sensor, as 13V5H of Min Tong company etc., also can adopt other face battle array photosensitive (image) sensor, as array photoelectricity multiplier tube (PMT) etc.
By suitable adjustment, can be so that each picture element of face battle array photosensitive (image) sensor obtain the different maximum interference intensity light of wavelength, thereby present embodiment can improve the wavelength resolution of several magnitudes than embodiment one.
Need to prove, the invention belongs to a kind of component invention, is a kind of invention that has novelty on technology is used, and wherein related grating and photosensitive (image) sensor etc. all belong to prior art and existing various ways and application.Its detail characteristic is not described herein again at this.
In addition, here the detailed explanation that has been center deployment with embodiments of the invention, the imbody of described optimal way or some characteristic, should be understood to this instructions only is to describe the present invention by the mode that provides embodiment, in fact on some details of forming, construct and using, can change to some extent, comprise the combination and the assembly of parts, these distortion and application all should belong in the scope of the present invention.
Claims (9)
1. static state Fourier spectrometer, comprise right angle beam splitter prism and array optical sensing device, described right angle beam splitter prism comprises the first and second two mutual rectangular adjacent planes, first plane (A) is a stepped appearance reflection grating face, second plane (B) is for being coated with the plane of reflectance coating, tested directional light arrives after the described right angle beam splitter prism, separated into two parts, a part vertically arrives second plane (B) after seeing through beam-splitting surface, by reaching the array optical sensing device by the beam-splitting surface reflection again behind this plane reflection, another part light is seen through beam-splitting surface and is reached the array optical sensing device by vertical first plane (A) that arrives, beam-splitting surface reflection back behind this plane reflection.
2. according to the described fourier spectrometer of claim 1, it is characterized in that described array optical sensing device is a line array CCD.
3. according to claim 1 or 2 described fourier spectrometers, it is characterized in that described array optical sensing device is an area array CCD.
4. according to the described fourier spectrometer of claim 1, it is characterized in that described array optical sensing device is the face array CMOS image sensor.
5. according to any described fourier spectrometer of claim 1 to 4, it is characterized in that described array optical sensing device is micro channel array photomultiplier PMT.
6. static state Fourier spectrometer, comprise right angle beam splitter prism and array optical sensing device, described right angle beam splitter prism comprises the first and second two mutual rectangular adjacent planes, first plane (A) and second plane (B) are stepped appearance reflection grating face, the groove direction of described two reflection grating faces is perpendicular, tested directional light arrives after the described right angle beam splitter prism, separated into two parts, a part vertically arrives second plane (B) after seeing through beam-splitting surface, by reaching the array optical sensing device by the beam-splitting surface reflection again behind this plane reflection, another part light is seen through beam-splitting surface and is reached the array optical sensing device by vertical first plane (A) that arrives, beam-splitting surface reflection back behind this plane reflection.
7. according to the described fourier spectrometer of claim 6, it is characterized in that described array optical sensing device is an area array CCD.
8. according to the described fourier spectrometer of claim 6, it is characterized in that described array optical sensing device is the face array CMOS image sensor.
9. according to the described fourier spectrometer of claim 6, it is characterized in that described array optical sensing device is micro channel array photomultiplier PMT.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100532169A CN101281062A (en) | 2008-05-23 | 2008-05-23 | Static state Fourier spectrometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100532169A CN101281062A (en) | 2008-05-23 | 2008-05-23 | Static state Fourier spectrometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142179A (en) * | 2014-07-28 | 2014-11-12 | 奉化市宇创产品设计有限公司 | Static fixed mirror interferometer |
| CN109738066A (en) * | 2019-02-18 | 2019-05-10 | 苏州大学 | A kind of micro- ladder reflecting mirror and preparation method thereof for static Fourier transform spectrometer |
-
2008
- 2008-05-23 CN CNA2008100532169A patent/CN101281062A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142179A (en) * | 2014-07-28 | 2014-11-12 | 奉化市宇创产品设计有限公司 | Static fixed mirror interferometer |
| CN109738066A (en) * | 2019-02-18 | 2019-05-10 | 苏州大学 | A kind of micro- ladder reflecting mirror and preparation method thereof for static Fourier transform spectrometer |
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Open date: 20081008 |