CN110319788B - Adjustable interference position testing device and testing method thereof - Google Patents

Adjustable interference position testing device and testing method thereof Download PDF

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CN110319788B
CN110319788B CN201910552419.0A CN201910552419A CN110319788B CN 110319788 B CN110319788 B CN 110319788B CN 201910552419 A CN201910552419 A CN 201910552419A CN 110319788 B CN110319788 B CN 110319788B
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deflection
displacement sensor
formula
axis
recording
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CN110319788A (en
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吴伦哲
顿爱欢
徐学科
邵建达
杨明红
朱杰
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Shanghai Hengyi Optical Precision Machinery Co ltd
Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Hengyi Optical Precision Machinery Co ltd
Shanghai Institute of Optics and Fine Mechanics of CAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods

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Abstract

An adjustable interference position testing device and method comprises an interferometer, a micro-electro-mechanical system reflector, a spectroscope, a beam splitter prism, a position sensor, a computer and the like. The invention can be used as a test head for the surface shape of a complex optical curved surface, and can ensure wider test range, high test precision and larger test view field.

Description

Adjustable interference position testing device and testing method thereof
Technical Field
The invention relates to the field of interference position testing, in particular to an adjustable interference position testing device and a testing method thereof, which are particularly suitable for surface shape testing of complex curved surfaces of optical elements, can realize surface shape testing of large-caliber complex optical elements, and have the advantages of wide testing range, high precision and larger field of view.
Background
The complex curved surface of the optical element needs to be processed repeatedly. The test equipment currently in process is divided into two categories, contact and non-contact. Wherein the contact type mainly comprises a contourgraph and a three-coordinate measuring instrument; non-contact interferometers are available. The test probe of the equipment is difficult to simultaneously meet the requirements of wide test range, high test precision and larger field of view so as to meet the test of the complex curved surface of the optical element.
Aiming at the problems, the invention adopts a laser interference mode to test, thereby ensuring the test precision, matches with a beam splitter prism and a displacement sensor to determine the light deflection in the test process, and ensures the light to return to an interferometer through the adjustment of a reflector of a micro electro mechanical system, thereby completing the position test.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an adjustable interference position testing device and method, which comprise an interferometer, a micro-electro-mechanical system reflector, a spectroscope, a beam splitter prism, a position sensor, a computer and the like. The invention can be used as a test probe for complex curved surfaces of optical elements, and ensures a larger measurement range and a larger field of view in the process of high-precision test.
The principle of the invention is as follows:
1. the light deflection is detected by adopting a beam splitter prism and a displacement sensor:
the section that detects the deflection of the light consists of the beam splitter prism, the displacement sensor 1# and the displacement sensor 2#, as shown in fig. 1, assuming that the system is already calibrated (i.e. the relative directions of the X-axis and the Y-axis are the same for the displacement sensor 1# and the displacement sensor 2 #). The distance difference between the displacement sensor 1# and the displacement sensor 2# and the beam splitter prism is D. For displacement sensor 1#, the relative position difference of the test beam from the reference beam is (X)1，Y1) (ii) a For displacement sensor # 2, the relative position difference of the test beam from the reference beam is (X)2，Y2) The unit deflection vector of the light beam is shown in formula (5);
2. the micro-electro-mechanical system reflector is adopted to complete the adjustment of the test light, and the micro-electro-mechanical system reflector can be rapidly adjusted along the X-axis direction and the Y-axis direction. Therefore, the requirement of the tested frequency index is met, after calibration, the micro-electro-mechanical system reflector can be controlled to deflect along the Y axis and the X axis respectively, and the deflection angle of the test light is adjusted to the original position;
3. and sending and receiving a test light beam by using an interferometer to obtain a displacement difference, and obtaining a position test result through error compensation.
The invention uses the micro-electromechanical system reflector to cooperate with the light deflection detection part to obtain the deflection and correction of the test light in the process of testing the complex surface shape, the equipment control and the data processing are completed by a computer, and the position test result is obtained under the conditions of high precision and high range.
The technical solution of the invention is as follows:
an adjustable interference position testing device, comprising: the system comprises a laser interferometer, a spectroscope, a beam splitter prism, a computer, a position sensor 1#, a position sensor 2#, and a micro-electromechanical system reflector;
one surface of the spectroscope is plated with an antireflection film, and the other surface of the spectroscope is plated with a semi-transparent semi-reflective film;
the output light of the laser interferometer is transmitted through the antireflection film of the spectroscope, then enters the micro-electro-mechanical system reflector, is reflected by the micro-electro-mechanical system reflector, then is emitted to the surface of an element to be tested, is reflected by the surface of the element to be tested, returns along the original path, is reflected by the micro-electro-mechanical system reflector, then is emitted to the spectroscope, is divided into reflected light and transmitted light through the semi-transparent semi-reflective film of the spectroscope, the transmitted light is received by the laser interferometer, the reflected light is emitted to the beam splitter prism, is divided into second reflected light and second transmitted light through the beam splitter prism, the second reflected light is received by the position sensor 2#, and the second transmitted light is received by the position sensor 1 #;
the distance between the position sensor 2# and the beam splitter prism is different from the distance between the position sensor 1# and the beam splitter prism;
the output end of the laser interferometer is connected with the input end of a computer, the output end of the position sensor 1# and the output end of the position sensor 2# are respectively connected with the input end of the computer, and the input end of the micro-electromechanical system reflector is connected with the output end of the computer.
The interferometer is a general high-precision laser interferometer, single-frequency laser (working wavelength: 633 +/-10 nm) is adopted, and the measurement range is as follows: 0-10 m, beam diameter: 1-2 mm, resolution: 1nm, measurement accuracy: 0.5 ppm;
the spectroscope is an optical sheet (the diameter range is 0.5-10 mm, the thickness is 0.1-1 mm) with two surfaces coated with films respectively, the parallelism is less than 2', and both sides of the sheet are coated with a semi-transparent and semi-reflective film (mixed polarization, the transmittance is 50% +/-3%) and an anti-reflection film (mixed polarization, the transmittance is more than 99.8%);
the micro electro mechanical system reflector can complete the rapid deflection of light beams, the reaction frequency is 1-20 kHz, the diameter of the reflector is 0.5-5.0 mm, and the mechanical rotation range is-10 degrees;
the beam splitter prism is a polarization beam splitter prism, the size is 5mm multiplied by 5mm, the surface shape PV is less than 1/4 lambda (lambda is 632.8nm), the transmission parameters (Tp is more than 95 percent, Ts is less than 1 percent), and the reflection parameters (Rs is more than 99 percent, and Rp is less than 5 percent);
the position sensor is a transverse effect position sensor, and the resolution of the transverse effect position sensor is less than 2 mu m;
the computer includes a communication interface with the interferometer, the MEMS mirror, and the position sensor, and a control interface with the MEMS mirror.
The adjustable interference position testing device is characterized in that the testing light can be adjusted through the micro-electro-mechanical system reflector according to the testing results of the beam splitter prism and the position sensor, and the returned light beam is adjusted to the receiving part of the laser interferometer, so that the testing of the optical complex curved surface is completed.
The adjustable interference position testing device needs to use a two-dimensional adjusting frame (the up-down and left-right measuring ranges are more than 10mm, the resolution is less than 0.001mm), a two-dimensional adjusting frame (the pitching and inclining measuring ranges are more than 5 degrees, and the resolution is less than 5 ℃), a two-dimensional electric arc pendulum adjusting table (the adjusting range is more than 10 degrees, the single-shaft repeated positioning precision is less than 0.002 degrees), a ruler (the measuring range is more than 500mm, and the resolution is less than 1mm) and a plane reflector for matching calibration;
the testing device for the adjustable interference position is used for testing the complex surface of the optical element, and is characterized by comprising the following steps:
1) fixing a reflecting mirror on a two-dimensional electric arc pendulum adjusting platform, connecting the two-dimensional electric arc pendulum adjusting platform with a computer, adjusting the two-dimensional electric arc pendulum adjusting platform, and ensuring that output light of the laser interferometer (1) sequentially passes through a spectroscope, a micro-electro-mechanical system reflecting mirror and the reflecting mirror, then returns along the original path and is received by the laser interferometer;
2) measuring the distance between the position sensor 2# and the beam splitter prism and the distance between the position sensor 1# and the beam splitter prism by using a ruler, and calculating a distance difference D;
3) adjusting a two-dimensional adjusting frame for placing a displacement sensor 1# so that a light spot received by the displacement sensor 1# is positioned at the center of the displacement sensor 1#, and recording a current position signal (X)o1，Yo1) (ii) a Adjusting a two-dimensional adjusting frame for placing a displacement sensor 2# so that the light spot received by the displacement sensor 2# is positioned at the center of the displacement sensor 2# and recording the current position signal (X)o2，Yo2)；
4) Rotating the two-dimensional electric arc pendulum adjusting platform to enable the two-dimensional electric arc pendulum adjusting platform to rotate theta along the X-axis direction of the two-dimensional electric arc pendulum adjusting platformxAnd recording the current position signal of the displacement sensor 1# at the moment and (X)o1，Yo1) Relative position deflection signal (X)x1，Yx1) Recording the current position of the displacement sensor 2# and (X)o2，Yo2) Relative position deflection signal (X)x2，Yx2)；
Calculating unit deflection vector of X axis
Figure GDA0003205228430000041
The formula is as follows:
Figure GDA0003205228430000042
in the formula (I), the compound is shown in the specification,
Figure GDA0003205228430000043
n times of rotation with different deflection angles and respectively calculating a unit deflection vector, wherein n is more than or equal to 3 because of the unit deflection vector
Figure GDA0003205228430000044
And thetaxThe relationship is shown below, and the n groups of data can be fitted by least squares to obtain the X-axis deflection coefficient (A)x，Bx，Cx)；
Ax·xx+Bx·yx+Cx·zx＝θx (2)
5) Rotating the two-dimensional electric arc pendulum adjusting platform to enable the two-dimensional electric arc pendulum adjusting platform to rotate theta along the Y-axis direction of the two-dimensional electric arc pendulum adjusting platformyAnd recording the current position of the displacement sensor 1# and (X) at the momento1，Yo1) Relative position deflection signal (X)y1，Yy1) And recording the current position of the displacement sensor 2# at the moment and (X)o2，Yo2) Relative position deflection signal (X)y2，Yy2)；
Calculating Y-axis unit deflection vector
Figure GDA0003205228430000045
The formula is as follows:
Figure GDA0003205228430000046
in the formula (I), the compound is shown in the specification,
Figure GDA0003205228430000047
n times of rotation with different deflection angles and respectively calculating a unit deflection vector, wherein n is more than or equal to 3 because of the unit deflection vector
Figure GDA0003205228430000048
And thetayThe relationship is shown below, and the Y-axis deflection coefficient (A) can be obtained by fitting n groups of data by using the least square methody，By，Cy)；
Ay·xy+By·yy+Cy·zy＝θy (4)
6) Rotating the two-dimensional electric arc pendulum adjusting platform to enable the two-dimensional electric arc pendulum adjusting platform to respectively rotate theta along the X-axis direction and the Y-axis direction of the two-dimensional electric arc pendulum adjusting platformxAnd thetayAnd recording the current position of the displacement sensor 1# and (X) at the momento1，Yo1) Relative position deflection signal (X)1，Y1) And recording the current position of the displacement sensor 2# at the moment and (X)o2，Yo2) Relative position deflection signal (X)2，Y2)；
Calculating the unit deflection directions of X-axis and Y-axisMeasurement of
Figure GDA0003205228430000049
The formula is as follows:
Figure GDA00032052284300000410
in the formula (I), the compound is shown in the specification,
Figure GDA00032052284300000411
7) using computer to control the rotation of the MEMS mirror to make it rotate along the X-axis direction of the MEMS mirror
Figure GDA00032052284300000412
Then rotates along the Y-axis direction of the MEMS mirror
Figure GDA00032052284300000413
Recording the deflection signal of the relative position of the displacement sensor 1# and the deflection signal of the relative position of the displacement sensor 2# at the moment, and recalculating the unit deflection vectors of the X-axis and the Y-axis according to the formula (5)
Figure GDA0003205228430000051
Up to
Figure GDA0003205228430000052
Calculating the unit rotation vector of the MEMS mirror
Figure GDA0003205228430000053
The formula is as follows:
Figure GDA0003205228430000054
in the formula (I), the compound is shown in the specification,
Figure GDA0003205228430000055
n times of rotation with different deflection angles and respectively calculating unit rotation vectors, wherein n is more than or equal to 3, and the unit rotation vectors
Figure GDA0003205228430000056
And unit deflection vector
Figure GDA0003205228430000057
The relationship is shown in the following formula, wherein E is an adjustment coefficient matrix expressed by a unit deflection vector
Figure GDA0003205228430000058
Reverse calculation of unit rotation vector
Figure GDA0003205228430000059
The multiplied coefficients are fitted by a least square method to obtain an adjustment coefficient matrix E,
Figure GDA00032052284300000510
8) removing the light path of the reflector, placing a to-be-tested element at the position of the reflector, fixing the to-be-tested element on a two-dimensional adjusting frame, enabling the surface normal direction of the to-be-tested element to be opposite to the output light direction of the laser interferometer, ensuring that the returned light can be received by the laser interferometer, and recording the current position signal (X) of the displacement sensor 1# (the X position is the position of the displacement sensor)eo1，Yeo1) Recording the 2# current position signal (X) of the displacement sensoreo2，Yeo2) Measuring the optical path distance K between the element to be tested and the displacement sensor 1 #;
9) moving the element to be tested along the testing direction, the computer records the current position signal of the displacement sensor 1# and (X)eo1，Yeo1) Relative position deflection signal (X)e1，Ye1) Recording the current position of the displacement sensor 2# and (X)eo2，Yeo2) Relative position deflection signal (X)e2，Ye2)；
Calculating unit deflection vectors of X-axis and Y-axis
Figure GDA00032052284300000511
The formula is as follows:
Figure GDA00032052284300000512
in the formula (I), the compound is shown in the specification,
Figure GDA00032052284300000513
calculating the rotation angle of the mirror of the micro-electro-mechanical system
Figure GDA00032052284300000514
And angle of rotation
Figure GDA00032052284300000515
The formula is as follows:
Figure GDA00032052284300000516
10) computer controlled MEMS mirror rotation angle along X-axis
Figure GDA00032052284300000517
Angle of rotation along Y axis
Figure GDA00032052284300000518
And recording the displacement variation delta Z of the current laser interferometer test according to the formula (2), the formula (4) and the unit deflection vector
Figure GDA00032052284300000519
Calculating the deflection Angle θxAnd thetay；
11) Obtaining a testing position x of the element to be tested in the testing process according to the movement of the element to be tested0、y0And fitting according to a formula to obtain the position x of the actual test pointr、yrThe formula is as follows:
Figure GDA0003205228430000061
12) using angle of rotation
Figure GDA0003205228430000062
Calibrating the displacement variation delta Z to obtain a test actual surface shape S, wherein the relationship between the test actual surface shape S and the displacement variation delta Z is as follows:
Figure GDA0003205228430000063
the invention has the advantages that:
the device can test the complex curved surface shape of the optical element, has wide test range, high test precision and large field of view, and can meet the requirement of testing the complex curved surface shape of the optical element in optical processing.
Drawings
FIG. 1 is a schematic structural diagram of an adjustable interference position testing device;
in the figure: 1-an interferometer; 2-a spectroscope; 3-a beam splitting prism; 4-a computer; 5-position sensor 1 #; 6-position sensor 2 #; 7-a micro-electromechanical system mirror;
FIG. 2 is a schematic view of the installation process;
in the figure: 8-standard mirror;
FIG. 3 is a schematic diagram of a calibration process;
Detailed Description
The present invention is further illustrated by the following examples, which should not be construed as limiting the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an adjustable interference position testing device, as can be seen, the adjustable interference position testing device of the present invention includes: the device comprises a laser interferometer 1, a spectroscope 2, a beam splitter prism 3, a computer 4, a position sensor 1#5, a position sensor 2#6 and a micro-electro-mechanical system reflector 7. The laser interferometer 1 is fixed on a two-dimensional adjusting frame (pitch and tilt adjustment), the output end of the laser interferometer 1 is connected with the input end of the computer 4, and the position result of the test of the laser interferometer 1 is transmitted to the computer 4 in real time during the test; the spectroscope 2 is fixed on a two-dimensional adjusting frame (pitch and tilt adjustment); the beam splitting prism is fixed on a two-dimensional adjusting frame (pitching and tilting adjustment); the position sensor 1# and the position sensor 2# are respectively fixed on a two-position adjusting frame (up-down and left-right adjustment), the output ends of the position sensor 1# and the position sensor 2# are respectively connected with the input end of the computer 4, and the position results of light spots received by the position sensor 1# and the position sensor 2# are transmitted to the computer 4 in real time during testing; the micro-electro-mechanical system reflector 7 is fixed on the two-dimensional adjusting frame, the input end of the micro-electro-mechanical system reflector 7 is connected with the output end of the computer 4, and the computer 4 transmits the attitude adjusting signal to the micro-electro-mechanical system reflector 7 in real time during testing.
The method for measuring the complex curved surface shape of the optical element by adopting the measuring device comprises the following steps:
1) referring to fig. 2, a spectroscope 2, a micro-motor system reflector 7 and a reflector 8 are sequentially arranged in the output direction of the test light of the laser interferometer 1, the spectroscope 2 is inclined by 44 degrees to 46 degrees, an antireflection film 2(a) is arranged on one side of the interferometer, a semi-transparent and semi-reflective film 2(b) is arranged on one side of the motor system reflector, the reflector 8 is fixed on an electric arc pendulum adjusting table, the output end of the laser interferometer 1 is connected with the input end of a computer 4, the input end of the micro-motor system reflector 7 is connected with the output end of the computer 4, a two-dimensional adjusting frame fixed on the reflector 8 is adjusted, and the returned light can be received by the laser interferometer 1;
2) referring to fig. 3, in the direction of the output light of the transflective film 2(b), a beam splitter prism 3 is placed, a position sensor 1#5 and a position sensor 2#6 are respectively placed in two output directions of the beam splitter prism 3, the distance between the position sensor 2#6 and the beam splitter prism 3 and the distance between the position sensor 1#5 and the beam splitter prism 3 are measured by using a ruler, and a distance difference D is calculated;
3) referring to fig. 3, the two-dimensional adjusting frame fixed to the displacement sensor 1#5 is adjusted so that the tested light spot is located at the center of the test sensor for adjusting the displacement sensor 1#5, and the current position signal (X) is recordedo1，Yo1) Similarly, adjusting the position of the displacement sensor 2#6 to be fixedA dimension adjusting frame and recording the current position signal (X)o2，Yo2)；
4) Referring to fig. 3, the two-dimensional electric arc pendulum adjusting table with the reflector 8 fixed rotates by theta along the X-axis directionxRecording the current position of the displacement sensor 1#5 and (X)o1，Yo1) Relative position deflection (X)x1，Yx1) Recording the current position of the displacement sensor 2#6 and (X)o2，Yo2) Relative position deflection (X)x2，Yx2) Calculating a unit deflection vector according to the formula (1)
Figure GDA0003205228430000071
3 times of rotation with different deflection angles thetax1、θx2、θx3And separately calculate unit deflection vectors
Figure GDA0003205228430000072
Due to unit deflection vector
Figure GDA0003205228430000073
And thetaxThe relationship is shown in formula (2), and the deflection coefficient (A) is obtained by least square fittingx，Bx，Cx)；
5) Referring to fig. 3, the two-dimensional electric arc pendulum adjusting table fixed on the reflector 8 rotates by theta along the Y-axis directionyRecording the current position of the displacement sensor 1#5 and (X)o1，Yo1) Relative position deflection (X)y1，Yy1) Recording the current position of the displacement sensor 2#6 and (X)o2，Yo2) Relative position deflection (X)y2，Yy2) Calculating a unit deflection vector
Figure GDA0003205228430000074
Calculating a unit deflection vector according to equation (3)
Figure GDA0003205228430000075
3 times of rotation with different deflection angles thetay1、θy2、θy3And separately calculate unit deflection vectors
Figure GDA0003205228430000076
Due to unit deflection vector
Figure GDA0003205228430000077
And thetayThe relationship is shown in formula (4), and the deflection coefficient (A) is obtained by least squares fittingy，By，Cy)；
6) Referring to fig. 3, the two-dimensional electric arc pendulum adjusting table fixed on the reflector 8 rotates by theta along the directions of the X axis and the Y axis respectivelyxAnd thetay. Recording the current position of the displacement sensor 1#5 and (X)o1，Yo1) Relative position deflection (X)1，Y1) Recording the current position of the displacement sensor 2#6 and (X)o2，Yo2) Relative position deflection (X)2，Y2) Calculating a unit deflection vector according to equation (5)
Figure GDA0003205228430000081
The MEMS mirror 7 rotates along the X axis and then along the Y axis, and the relative deflection position is recorded and the unit deflection vector is recalculated
Figure GDA0003205228430000082
Up to
Figure GDA0003205228430000083
At this time, the MEMS mirror 7 rotates along the X-axis by an angle
Figure GDA0003205228430000084
Angle of rotation along Y axis
Figure GDA0003205228430000085
Calculating the unit rotation vector of the MEMS mirror 7 according to equation (6)
Figure GDA0003205228430000086
7) Repeating step 6 for 3 times to obtain 3 sets of unit rotation vectors
Figure GDA0003205228430000087
And unit deflection vector
Figure GDA0003205228430000088
Figure GDA0003205228430000089
Fitting by using a least square method according to a formula (7) to obtain an adjustment coefficient matrix E;
8) referring to fig. 1, the light path of the reflector 8 is removed, the surface of the test element is placed at the position of the reflector 8, the normal direction of the surface is opposite to the direction of the output test light, the two-dimensional adjusting frame fixed on the test element ensures that the returned light can be received by the laser interferometer 1, and the current position signal (X) of the displacement sensor 1#5 is recordedeo1Yeo1) Recording the current position signal (X) of the displacement sensor 2#6eo2，Yeo2) Measuring the distance K between the test element and the displacement sensor 1# 5;
9) moving the element in the test direction, the computer 4 records the current position signal of the displacement sensor 1#5 at this moment and (X)eo1，Yeo1) Relative position deflection signal (X)e1，Ye1) Recording the current position of the displacement sensor 2#6 and (X)eo2，Yeo2) Relative position deflection signal (X)e2，Ye2) Calculating a unit deflection vector according to equation (8)
Figure GDA00032052284300000810
Calculating the rotation angle of the MEMS mirror 7 according to the formula (9)
Figure GDA00032052284300000811
And angle of rotation
Figure GDA00032052284300000812
Computer 4 controls the rotation angle of MEMS mirror 7 along X axis
Figure GDA00032052284300000813
Angle of rotation along Y axis
Figure GDA00032052284300000814
And recording the displacement variation delta Z of the current laser interferometer 1 test according to the formula (2), the formula (4) and the unit deflection vector
Figure GDA00032052284300000815
Calculating the deflection Angle θxAnd thetay；
10) Referring to fig. 1, after the test is finished, fitting the surface shape of the element according to the movement and displacement variation delta Z of the element, wherein the position of the test point needs to be calibrated in the fitting process, and the actual coordinates x and y and the movement coordinate x0、y0The relationship of (A) is shown in formula (10);
11) referring to FIG. 1, the actual surface shape S is measured by using the rotation angle
Figure GDA00032052284300000816
And calibrating the change amount of the displacement delta Z. The relationship between the test actual surface shape S and the displacement variation Δ Z is shown in equation (11).
Experiments show that the invention utilizes the laser interference principle, the test field is less than 20 degrees, the test range is less than 1m, the test repeatability is less than 100nm, the precision is less than 0.1 mu m, and the surface shape test of the complex curved surface of the optical element is realized.

Claims (1)

1. The method for measuring the interference position by using the adjustable interference position testing device comprises the following steps: the device comprises a laser interferometer (1), a spectroscope (2), a beam splitter prism (3), a computer (4), a position sensor 1# (5), a position sensor 2# (6) and a micro-electro-mechanical system reflector (7); one surface of the spectroscope (2) is plated with an antireflection film (2(a)), and the other surface is plated with a semi-transparent and semi-reflective film (2 (b)); after the output light of the laser interferometer (1) is transmitted through the antireflection film (2(a)) of the spectroscope (2), is incident to the micro-electro-mechanical system reflector (7), and after being reflected by the micro-electro-mechanical system reflector (7), the light beam is emitted to the surface of an element to be tested, is reflected by the surface of the element to be tested, returns along the original path, is reflected by a micro-electro-mechanical system reflector (7) and then enters the spectroscope (2), is divided into reflected light and transmitted light by a semi-transparent and semi-reflective film (2(b)) of the spectroscope (2), the transmitted light is received by the laser interferometer (1), the reflected light enters the beam splitter prism (3) and is split into second reflected light and second transmitted light by the beam splitter prism (3), the second reflected light is received by the position sensor 2# (6), and the second transmitted light is received by the position sensor 1# (5); the distance between the position sensor 2# (6) and the beam splitter prism (3) is different from the distance between the position sensor 1# (5) and the beam splitter prism (3); the output end of the laser interferometer (1) is connected with the input end of the computer (4), the output end of the position sensor 1# (5) and the output end of the position sensor 2# (6) are respectively connected with the input end of the computer (4), and the input end of the micro-electro-mechanical system reflector (7) is connected with the output end of the computer (4); the method is characterized by comprising the following steps:
1) fixing a reflecting mirror (8) on a two-dimensional electric arc pendulum adjusting platform, connecting the two-dimensional electric arc pendulum adjusting platform with a computer (4), adjusting the two-dimensional electric arc pendulum adjusting platform, and ensuring that output light of the laser interferometer (1) sequentially passes through a spectroscope (2), a micro-electro-mechanical system reflecting mirror (7) and the reflecting mirror (8), then returns along the original path and is received by the laser interferometer (1);
2) measuring the distance between the position sensor 2# (6) and the beam splitter prism (3) and the distance between the position sensor 1# (5) and the beam splitter prism (3) by using a ruler, and calculating a distance difference D;
3) adjusting a two-dimensional adjusting frame for placing a displacement sensor 1# (5), enabling a light spot received by the displacement sensor 1# (5) to be positioned at the center of the displacement sensor 1# (5), and recording a current position signal (X)o1，Yo1) (ii) a Adjusting a two-dimensional adjusting frame for placing the displacement sensor 2# (6) to make the light spot received by the displacement sensor 2# (6) be positioned at the center of the displacement sensor 2# (6), and recording the current position signal (X)o2，Yo2)；
4) Rotating the two-dimensional electric arc pendulum adjusting platform to enable the two-dimensional electric arc pendulum adjusting platform to rotate theta along the X-axis direction of the two-dimensional electric arc pendulum adjusting platformxAnd recording the current position signal of the displacement sensor 1# (5) at the moment and (X)o1，Yo1) Relative position deflection signal (X)x1，Yx1) And recording the current position and (X) of the displacement sensor 2# (6)o2，Yo2) Relative position deflection signal (X)x2，Yx2)；
Calculating unit deflection vector of X axis
Figure FDA0003205228420000021
The formula is as follows:
Figure FDA0003205228420000022
in the formula (I), the compound is shown in the specification,
Figure FDA0003205228420000023
n times of rotation with different deflection angles and respectively calculating a unit deflection vector, wherein n is more than or equal to 3 because of the unit deflection vector
Figure FDA0003205228420000024
And thetaxThe relationship is shown below, and the n groups of data can be fitted by least squares to obtain the X-axis deflection coefficient (A)x，Bx，Cx)；
Ax·xx+Bx·yx+Cx·zx＝θx (2)
5) Rotating the two-dimensional electric arc pendulum adjusting platform to enable the two-dimensional electric arc pendulum adjusting platform to rotate theta along the Y-axis direction of the two-dimensional electric arc pendulum adjusting platformyAnd recording the current position of the displacement sensor 1# (5) and (X) at the momento1，Yo1) Relative position deflection signal (X)y1，Yy1) And recording the current position of the displacement sensor 2# (6) and (X) at the momento2，Yo2) Relative position deflection signal (X)y2，Yy2)；
Calculating Y-axis unit deflection vector
Figure FDA0003205228420000025
The formula is as follows:
Figure FDA0003205228420000026
in the formula (I), the compound is shown in the specification,
Figure FDA0003205228420000027
n times of rotation with different deflection angles and respectively calculating a unit deflection vector, wherein n is more than or equal to 3 because of the unit deflection vector
Figure FDA0003205228420000028
And thetayThe relationship is shown below, and the Y-axis deflection coefficient (A) can be obtained by fitting n groups of data by using the least square methody，By，Cy)；
Ay·xy+By·yy+Cy·zy＝θy (4)
6) Rotating the two-dimensional electric arc pendulum adjusting platform to enable the two-dimensional electric arc pendulum adjusting platform to respectively rotate theta along the X-axis direction and the Y-axis direction of the two-dimensional electric arc pendulum adjusting platformxAnd thetayAnd recording the current position of the displacement sensor 1# (5) and (X) at the momento1，Yo1) Relative position deflection signal (X)1，Y1) And recording the current position of the displacement sensor 2# (6) and (X) at the momento2，Yo2) Relative position deflection signal (X)2，Y2)；
Calculating unit deflection vectors of X-axis and Y-axis
Figure FDA0003205228420000029
The formula is as follows:
Figure FDA00032052284200000210
in the formula (I), the compound is shown in the specification,
Figure FDA00032052284200000211
7) the rotation of the micro-electromechanical system reflector (7) is controlled by a computer (4),make it rotate along the X-axis direction of the MEMS mirror (7)
Figure FDA0003205228420000031
Then rotates along the Y-axis direction of the micro-electro-mechanical system reflector (7)
Figure FDA0003205228420000032
Recording the relative position deflection signal of the displacement sensor 1# (5) and the relative position deflection signal of the displacement sensor 2# (6), and recalculating the X-axis and Y-axis unit deflection vectors according to the formula (5)
Figure FDA0003205228420000033
Up to
Figure FDA0003205228420000034
Calculating the unit rotation vector of the MEMS mirror (7)
Figure FDA0003205228420000035
The formula is as follows:
Figure FDA0003205228420000036
in the formula (I), the compound is shown in the specification,
Figure FDA0003205228420000037
n times of rotation with different deflection angles and respectively calculating unit rotation vectors, wherein n is more than or equal to 3, and the unit rotation vectors
Figure FDA0003205228420000038
And unit deflection vector
Figure FDA0003205228420000039
The relationship is shown in the following formula, wherein E is an adjustment coefficient matrix expressed by a unit deflection vector
Figure FDA00032052284200000310
Reverse calculation of unit rotation vector
Figure FDA00032052284200000311
The multiplied coefficients are fitted by a least square method to obtain an adjustment coefficient matrix E,
Figure FDA00032052284200000312
8) removing the light path of the reflector (8), placing a to-be-tested element at the position of the reflector (8), fixing the to-be-tested element on a two-dimensional adjusting frame, enabling the surface normal direction of the to-be-tested element to be opposite to the output light direction of the laser interferometer (1), ensuring that returned light can be received by the laser interferometer (1), and recording the current position signal (X) of the displacement sensor 1# (5)eo1，Yeo1) Recording the current position signal (X) of the displacement sensor 2# (6)eo2，Yeo2) Measuring the optical path distance K between the element to be tested and the displacement sensor 1# (5);
9) moving the element to be tested along the testing direction, the computer (4) records the current position signal of the displacement sensor 1# (5) and (X) at the momenteo1，Yeo1) Relative position deflection signal (X)e1，Ye1) And recording the current position and (X) of the displacement sensor 2# (6)eo2，Yeo2) Relative position deflection signal (X)e2，Ye2)；
Calculating unit deflection vectors of X-axis and Y-axis
Figure FDA00032052284200000313
The formula is as follows:
Figure FDA00032052284200000314
in the formula (I), the compound is shown in the specification,
Figure FDA00032052284200000315
calculating the rotation angle of the MEMS mirror (7)
Figure FDA00032052284200000316
And angle of rotation
Figure FDA00032052284200000317
The formula is as follows:
Figure FDA00032052284200000318
10) the computer (4) controls the rotation angle of the micro-electromechanical system reflector (7) along the X axis
Figure FDA00032052284200000319
Angle of rotation along Y axis
Figure FDA00032052284200000320
And recording the displacement variation delta Z tested by the current laser interferometer (1), and according to the formula (2), the formula (4) and the unit deflection vector
Figure FDA0003205228420000041
Calculating the deflection Angle θxAnd thetay；
11) Obtaining a testing position x of the element to be tested in the testing process according to the movement of the element to be tested0、y0And fitting according to a formula to obtain the position x of the actual test pointr、yrThe formula is as follows:
Figure FDA0003205228420000042
12) using angle of rotation
Figure FDA0003205228420000043
Calibrating the displacement variation delta Z to obtain a test actual surface shape S, wherein the relationship between the test actual surface shape S and the displacement variation delta Z is as follows:
Figure FDA0003205228420000044
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