CN104064949A - Generation and transmission device for deep ultraviolet laser - Google Patents
Generation and transmission device for deep ultraviolet laser Download PDFInfo
- Publication number
- CN104064949A CN104064949A CN201410241146.5A CN201410241146A CN104064949A CN 104064949 A CN104064949 A CN 104064949A CN 201410241146 A CN201410241146 A CN 201410241146A CN 104064949 A CN104064949 A CN 104064949A
- Authority
- CN
- China
- Prior art keywords
- deep ultraviolet
- ultraviolet laser
- vacuum
- produces
- transmitting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lasers (AREA)
Abstract
The invention discloses a generation and transmission device for a deep ultraviolet laser. The generation and transmission device for the deep ultraviolet laser comprises a sealing cavity, a vacuum system, a deep ultraviolet laser generation system and a deep ultraviolet laser transmission system, wherein both of the deep ultraviolet laser generation system and the deep ultraviolet laser transmission system are located in the sealing cavity. The generation and transmission device for the deep ultraviolet laser disclosed by the invention is good in completeness, feasibility, miniaturization, simple operability and practicability.
Description
Technical field
The present invention relates to all solid state deep ultraviolet laser field, particularly a kind of deep ultraviolet laser produces and transmitting device.
Background technology
Deep ultraviolet light source, refer generally to wavelength between 40nm to the electromagnetic radiation wave band between 200nm, because its wavelength is short, single photon energy is high, thereby there is important using value at numerous areas such as high-resolution imaging, spectrum of use, microfabrication and laser lithographies, be one of most important developing direction of laser field.
All solid state laser has compact conformation, volume is little, efficiency is high, good beam quality, good stability, life-span are long, and wavelength continuous tuning is wide, repetition rate is adjustable, easily the advantage such as practical.Utilize the above advantage of all solid state laser, adopt nonlinear crystal converter technique, can produce high light beam quality, short pulse, narrow linewidth deep ultraviolet laser.But because deep ultraviolet wave band absorbs seriously in air, in air ambient, can not effectively produce and transmit, be unfavorable for the research and extension application of deep ultraviolet laser; Traditional laser power meter circuit substrate is structure for covering copper plate, exits larger, to deep ultraviolet laser power absorption, reduces deep ultraviolet laser power output, also causes deep ultraviolet laser power measurement inaccuracy; In addition, deep ultraviolet wave band is the invisible wave band of human eye, inconvenient optical path adjusting.
Summary of the invention
(1) technical problem that will solve
Technical problem to be solved by this invention is: how to provide a kind of deep ultraviolet laser to produce and the device transmitting, in air, absorb serious for deep ultraviolet laser, deep ultraviolet laser power measurement inaccuracy, and invisible to human eye, the technological deficiency of being inconvenient to regulate, solve deep ultraviolet laser and be unfavorable for producing and transmission, the technical problem that can not effectively apply.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of deep ultraviolet laser produces and transmitting device, described deep ultraviolet laser produces with transmitting device and comprises: seal chamber system and vacuum system, it is characterized in that, described deep ultraviolet laser produces with transmitting device and also comprises that deep ultraviolet laser produces system and deep ultraviolet laser transmission system; Described deep ultraviolet laser produces system and deep ultraviolet laser transmission system is all positioned at described seal chamber;
Described seal chamber system comprises cavity, watch window, Ultra-Violet Laser input window, Ultra-Violet Laser output window, gas feed, gas vent and deep ultraviolet laser output window;
Described vacuum system comprises that vacuum produces system, vacuum measurement system, and Vacuum Packing System; In described Vacuum Packing System, blanketing gas is that deep ultraviolet wave band is absorbed to little high-purity gas, or without the vacuum system of blanketing gas;
Described deep ultraviolet laser generation system comprises deep ultraviolet frequency-doubling crystal device, deep ultraviolet frequency-doubling crystal angular adjustment device;
Described deep ultraviolet laser transmission system comprises deep ultraviolet optical element and deep ultraviolet laser fluorescence display element.
Preferably, described deep ultraviolet laser fluorescence display element is glass, and fluorescent material etc. have the material of Presentation Function at deep ultraviolet wave band.
Preferably, the little deep ultraviolet laser power of vacuum deflation is counted ceramic power meter, and the photo-thermal sensing part of power meter adopts graphite, and circuit substrate part adopts the little ceramic material of venting.
Preferably, described high-purity gas is more than 99.9% N of purity
2, He, Ne or Ar etc. absorb little gas at deep ultraviolet wave band.
Preferably, described deep ultraviolet laser fluorescence display element, is the moving meter that has described in utilizing the material of Presentation Function to make, and described moving meter moves forward into/go out deep ultraviolet laser light path in deep ultraviolet light path.
Preferably, described deep ultraviolet laser fluorescence display element, is the aperture that has described in utilizing the material of Presentation Function to make, and described aperture is fixed in light path.
Preferably, described deep ultraviolet laser power is counted at the little deep ultraviolet laser power meter of vacuum deflation, and described deep ultraviolet laser power meter front end face is provided with the aperture that utilizes described deep ultraviolet display element to make.
Preferably, described seal chamber is combined cavity, and combined cavity is individual cavity or UNICOM's cavity, and described deep ultraviolet laser produces system and described deep ultraviolet laser transmission system can be arranged in described combined cavity.
Preferably, described material is the material little at vacuum deflation; Described cavity is the cavity that air-tightness is good.
(3) beneficial effect
A kind of deep ultraviolet laser provided by the present invention produces with the device of transmission and has the following advantages:
One, utilize deep ultraviolet wave band fluorescence display element, deep ultraviolet laser light path can be predicted, can regulate and control, whole deep ultraviolet laser light path is easily regulated, operation feasible.
Two, adopt at the little deep ultraviolet laser power meter of vacuum deflation, exit little under vacuum, certainty of measurement is high, measures power unsteadiness little.Power meter front end face has deep ultraviolet fluorescence display element diaphragm, can observe the fluorescence of deep ultraviolet laser at power meter end face, regulates deep ultraviolet laser by the aperture at diaphragm center, and incident power meter center ensures that deep ultraviolet laser power measurement is accurate.
Three, adopt the seal chamber system configuration of deep ultraviolet laser generation transmission environment, vacuum system, deep ultraviolet laser produces, transmission system device, deep ultraviolet laser measuring system, makes the good completeness of whole system.
Four, adopt described high-purity gas to fill annular seal space, can keep absorbing little gaseous environment in deep ultraviolet in cavity, reduce the absorption to deep ultraviolet laser, can also take away the heat of nonlinear crystal device, stablize the temperature of nonlinear crystal, ensure more stable deep ultraviolet laser power output.
Five, adopt vacuum system, vacuum environment in higher chamber can be provided, less residual impurity gas, raising deep ultraviolet laser delivery efficiency.
Brief description of the drawings
Fig. 1 is the apparatus structure sketch schematic diagram of a kind of deep ultraviolet laser generation of the present invention and transmitting device;
Fig. 2 be according to the present invention a kind of deep ultraviolet laser produce with the embodiment mono-of transmitting device in circular cavity deep ultraviolet laser produce and the structural representation of transmitting device;
Fig. 3 be according to the present invention a kind of deep ultraviolet laser produce with the embodiment bis-of transmitting device in rectangular cavities deep ultraviolet laser produce and the structural representation of transmitting device;
Fig. 4 be according to the present invention a kind of deep ultraviolet laser produce with the embodiment tri-of transmitting device in circle-square combined cavity deep ultraviolet laser produce and the structural representation of transmitting device;
Fig. 5 be a kind of deep ultraviolet laser of the present invention produce with the apparatus structure of transmitting device in vacuum system structural representation;
Fig. 6 be a kind of deep ultraviolet laser of the present invention produce with the apparatus structure of transmitting device in measuring system in deep ultraviolet produce, light splitting, measures structural representation;
Fig. 7 be a kind of deep ultraviolet laser of the present invention produce with the apparatus structure of transmitting device in measuring system in output measure structural representation;
Fig. 8 be a kind of deep ultraviolet laser of the present invention produce with the apparatus structure of transmitting device in deep ultraviolet laser produce system configuration schematic diagram;
Fig. 9 be a kind of deep ultraviolet laser of the present invention produce with the apparatus structure of transmitting device in deep ultraviolet laser transmission system structural representation;
1-seal chamber, 1-1 cavity, 1-2-cavity lid, 1-3-watch window, 1-4-gas feed, 1-5-Ultra-Violet Laser input window, 1-6-Ultra-Violet Laser output window, 1-7-gas vent, 1-8-deep ultraviolet laser output window;
2-vacuum system, 2-1 mechanical pump, 2-2 molecular pump, 2-3 Pirani gauge, 2-4 ionization gauge, 2-5 compound vacuum gauge, 2-6 Pressure gauge;
3-laser power measurement system, 3-1 deep ultraviolet laser power meter, 3-2 ultraviolet spectrometry device, 3-3 residue laser gatherer;
3 ?1-deep ultraviolet laser power meter, 3-2-ultraviolet spectrometry device, 3-3-residue Ultra-Violet Laser gatherer;
4-deep ultraviolet laser produces system, 4-1 deep ultraviolet frequency-doubling crystal adjuster, 4-2 deep ultraviolet frequency-doubling crystal device;
5-deep ultraviolet transmission system, 45 ° of high reflective mirrors of 5-1 deep ultraviolet, 5-2 lens, 5-3 glass bubbles diaphragm, 5-4 movable glass.
Embodiment
Below in conjunction with Figure of description and embodiment, the specific embodiment of the present invention is described in further detail.Following examples are only for the present invention is described, but are not used for limiting the scope of the invention.
Embodiment mono-:
As shown in Figure 1, the present embodiment has been recorded a kind of deep ultraviolet laser and has been produced and the device transmitting, and comprises that seal chamber 1, vacuum system 2, deep ultraviolet laser produce system 4 and deep ultraviolet laser transmission system 5; Described deep ultraviolet laser produces system 4 and deep ultraviolet laser transmission system 5 is all positioned at described seal chamber.
Described seal chamber 1 comprises: cavity 1-1, cavity lid 1-2, watch window 1-3, gas feed 1-4, Ultra-Violet Laser input window 1-5, Ultra-Violet Laser output window 1-6, gas vent 1-7 and deep ultraviolet laser output window 1-8.Cavity 1-1 is connected with watch window 1-3, gas feed 1-4, Ultra-Violet Laser input window 1-5, Ultra-Violet Laser output window 1-6, gas vent 1-7 and deep ultraviolet laser output window 1-8 respectively.
As shown in Figure 2, the cavity 1-1 in the present embodiment is single stainless steel circular cylindrical cavity, under stainless steel base plate, has screw base, can rotate up and down regulating base board level; Cavity 1 ?1 with cavity lid 1 ?2 use seals with elastometic washer, and at rubber ring surface-coated one deck vacuum grease, use clamp fixing seal.
Described vacuum system 2 comprises that vacuum produces system, vacuum pump; Vacuum measurement system, vacuum gauge and Vacuum Packing System, Pressure gauge, high-purity gas.
The Pressure gauge 2 of the present embodiment ?6 with cavity 1 ?1 wall be connected by flange; Vacuum pump be mechanical pump 2 ?1 and molecular pump 2 ?2 sundstrand pump, mechanical pump 2 ?1 with molecular pump 2 ?2 respectively with cavity 1 ?1 wall be connected by flange; Vacuum is counted the combination rule of Pirani gauge 2 ?3 and ionization gauge 2 ?4, compound vacuum gauge 2 ?5, and Pirani gauge 2 ?3 are connected by flange with cavity 1 ?1 wall respectively with ionization gauge 2 ?4.Described high-purity gas is that deep ultraviolet wave band is absorbed to little high-purity gas, can be N
2, the gas such as He, Ne or Ar.
Deep ultraviolet laser produces system 4 and comprises deep ultraviolet frequency-doubling crystal adjuster 4-1, deep ultraviolet frequency-doubling crystal device 4-2.In an embodiment, deep ultraviolet frequency-doubling crystal adjuster 4-1 is four-dimensional modulator, comprises x, y, and the regulation and control of z direction three-dimensional high-precision, control accuracy is higher than 0.1mm, and High Precision One Dimensional rotation regulates, and degree of regulation is higher than 0.1 °.
As shown in Figure 8.Deep ultraviolet frequency-doubling crystal device is the quartz crystal device that can produce deep ultraviolet laser, in the present embodiment, deep ultraviolet frequency-doubling crystal device 4-2 is KBBF-PCD coupled apparatus, described KBBF-PCD coupled apparatus is the first couple prism-KBBF crystal-the second couple prism, and the first couple prism is SiO
2right-angle prism, an acute angle is 68.6 °, plane of incidence plating ultraviolet high transmittance film system, SiO
2material has less absorption coefficient at ultraviolet band, higher damage threshold, and there is the refractive index close with nonlinear crystal, SiO
2the coated surface of right-angle prism is as the direct frequency doubling device plane of incidence, and the second couple prism is CaF
2right-angle prism, an acute angle is 68.6 °, CaF
2material has less absorption coefficient at vacuum ultraviolet (VUV) wave band, suitable damage threshold, CaF
2right-angle prism is as direct frequency doubling device KBBF-PCD output prism.In direct frequency doubling device, diverse location optical quality there are differences, may there is flaw, can have a strong impact on shg output power, KBBF-PCD coupled apparatus is fixed on four-dimensional modulator, regulate pump light suitable incident orientation in crystal by four-dimensional modulator, improve frequency-doubling conversion efficiency and deep ultraviolet laser power output.
Deep ultraviolet laser transmission system 5 comprises 45 ° of high reflection mirror 5-1 of deep ultraviolet, deep ultraviolet laser display element-glass bubbles diaphragm 5-3 and movable glass 5-4.
The quantity of 45 ° of high reflection mirror 5-1 of deep ultraviolet is not limit.As shown in Figure 9, the present embodiment is 3, and is 45 ° of high reflection mirror 5-1 of deep ultraviolet, by the angle of electronic control speculum.
In the middle of glass bubbles diaphragm 5-3, having circular aperture, hole diameter is 0.5m～10mm.Can make deep ultraviolet laser produce fluorescence on glass bubbles diaphragm 5-3, regulate deep ultraviolet laser, make it through glass bubbles diaphragm center, ensure that deep ultraviolet laser is by designing in advance optic path.Wherein the quantity of glass bubbles diaphragm 5-3 is not limit, and as shown in Figure 9, the quantity in the present embodiment is 4, also can be other quantity.
The fluorescence that movable glass 5-4 produces for observing deep ultraviolet laser, regulates deep ultraviolet laser light path.Its quantity is not limit, and as shown in Figure 9, the present embodiment movable glass 5-4 is 1.Glass bubbles diaphragm and movable glass produce ability material for have fluorescence at deep ultraviolet wave band, as quartz etc.
Deep ultraviolet laser transmission system 5 can also comprise a lens 5-2, for collimating the deep ultraviolet laser of dispersing.Particular location can calculate according to the deep ultraviolet laser angle of divergence and lens parameter, regulates by electricity driving displacement platform.As shown in Figure 9, the lens 5-2 in the present embodiment is arranged on after second deep ultraviolet high reflective mirror of deep ultraviolet laser transmission direction; Also can be arranged on after 45 ° of high reflection mirrors of the 3rd deep ultraviolet.
45 ° of high reflection mirror 5-1 of deep ultraviolet are placed on electronic mirror holder, by the angle of electronic mirror holder regulation and control speculum.With red laser 45 ° of high reflection mirror 5-1 of incident deep ultraviolet from annular seal space, the position of 45 ° of high reflection mirror 5-1 of coarse adjustment deep ultraviolet and lens 5-2, and settle glass bubbles diaphragm 5-3 by designing in advance light path before and after high reflection mirror 5-1, then build annular seal space, and make to keep in seal chamber gas communication, output deep ultraviolet laser, observe the fluorescence of deep ultraviolet laser 5-3 on glass bubbles diaphragm, in conjunction with movable glass 5-4, by electronic mirror holder, electricity driving displacement platform fine adjustment deep ultraviolet laser light path, make to export from deep ultraviolet laser output window 1-8 after deep ultraviolet laser collimation.
This is for comprising laser power measurement system 3, described laser power measurement system 3 comprises deep ultraviolet laser power meter 3-1, ultraviolet spectrometry device 3-2 and residue laser gatherer 3-3, described residue laser gatherer 3-3 is positioned at outside Ultra-Violet Laser output window 1-6, as shown in Figure 6, Fig. 6 is that deep ultraviolet laser produces power measuring system; Being arranged on deep ultraviolet laser produces after system 4, as described in Figure 1; Comprise in addition deep ultraviolet laser output power measurement system, as shown in Figure 7, be arranged on after deep ultraviolet transmission system 5, as shown in Figure 1.
Deep ultraviolet laser power meter 3-1, the deep ultraviolet laser power meter of employing vacuum.Laser power meter front end face is provided with described glass bubbles diaphragm 5-3.Deep ultraviolet laser produces laser power meter in power measuring system and is arranged at after described deep ultraviolet frequency-doubling crystal adjuster 4-1, the deep ultraviolet laser power and the conversion efficiency that produce for measuring frequency multiplication; In deep ultraviolet laser output power measurement system, laser power meter is arranged at before described deep ultraviolet laser output window 1-8, for measuring deep ultraviolet laser power and the efficiency of transmission of output, while measuring deep ultraviolet laser power, by power meter shift-in deep ultraviolet laser light path, measure completely, shifted out deep ultraviolet laser light path.Adopt at the little deep ultraviolet laser power meter of vacuum deflation, little, highly sensitive in vacuum environment venting, precision is high, and power measurement is stable.
Described ultraviolet spectrometry device 3-2 is 45 ° of high reflection mirrors of ultraviolet, 45 ° of high reflectivity film stacks of plating ultraviolet.In Ultra-Violet Laser light path, ultraviolet spectrometry device 3-2 is arranged at after deep ultraviolet frequency-doubling crystal adjuster 4-1, derives cavity, and be collected in described residue Ultra-Violet Laser gatherer 3-3 for remaining Ultra-Violet Laser by Ultra-Violet Laser output window 1-6.
Embodiment bis-:
As shown in Figure 3, a kind of deep ultraviolet laser that the present embodiment is recorded produces the device with transmission, and the technical scheme that its structure is recorded to embodiment mono-is substantially similar, and difference is: cavity 1-1 is rectangular cavities.Rectangular cavities has compact conformation, and volume is little, flexible design, the advantage such as easy to use.
Embodiment tri-:
As shown in Figure 4, a kind of deep ultraviolet laser that the present embodiment is recorded produces the device with transmission, and the technical scheme that its structure is recorded to embodiment mono-is substantially similar, and difference is: cavity 1-1 is combined cavity.Can be circle-square, circle-circle or square-rectangle combined cavity.
The device that the present embodiment is recorded, produces deep ultraviolet laser, and transmission is divided in two cavitys, two cavitys connect with bellows, between two cavitys, can separate with glass window, be divided into two annular seal space environment independently separately, also can separate, become two cavitys of UNICOM.
Deep ultraviolet laser is produced with collimation transmission system and separated, it is independent of each other, Ultra-Violet Laser produces in cavity at deep ultraviolet laser, is reflected by 45 ° of high reflection mirrors of ultraviolet, and from the output of Ultra-Violet Laser output window, after not affecting, deep ultraviolet laser is measured and transmission.In deep ultraviolet laser collimation transmission cavity, can be according to actual conditions flexible design, make system more flexibly with practical.Adopt this device to make whole system modularization, each module miniaturization, is used more flexibly, is easy to apply.
Device operation principle provided by the present invention is: annular seal space provides a convenience, practicality, complete sealed environment for deep ultraviolet laser produces transmission; Utilize visible laser, settle roughly speculum in deep ultraviolet laser transmission system, lens, the position of glass bubbles diaphragm; Vacuum system in use device, provides a kind of deep ultraviolet laser to produce and the high-purity gas circulation environment of transmitting, and circulates by high-purity gas, ensures that deep ultraviolet laser can produce and transmit; Utilize the deep ultraviolet nonlinear crystal device in deep ultraviolet laser generation system, adopt nonlinear frequency conversion technology to produce deep ultraviolet laser; Utilize deep ultraviolet laser power meter, measure deep ultraviolet laser power; By deep ultraviolet laser transmission system, utilize aperture, movable glass, electronic mirror holder, by design optical path adjusting deep ultraviolet laser light path, exports the deep ultraviolet laser that certain power can be practical.
Because deep ultraviolet laser absorbs seriously in air, in chamber, keep high-purity gas circulation status.Be specially and utilize vacuum to produce system, vacuum degree in chamber is evacuated to 0.1～0.001Pa scope, be full of high-purity gas to 1atm～1.2atm, again be evacuated to 0.1～0.001Pa scope by above step, with high-purity gas, annular seal space is done the wash once, take away residual gas impurity, then high-purity gas circulation status in holding chamber.Described gas is that deep ultraviolet wave band is absorbed to little high-purity gas, and its purity, for being greater than 99.9%, is N
2, the gas such as He, Ne or Ar.
While doing the wash annular seal space with high-purity gas, can do the wash 1～3 time according to actual conditions, in the time that deep ultraviolet laser efficiency of transmission is low, pumpdown time can proper extension, do the wash with high-purity gas again, make the interior residual gas impurity of seal chamber 1 reduce to minimum, improve the efficiency of transmission of deep ultraviolet laser.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, do not departing under the prerequisite of the technology of the present invention principle; can also make some improvement and replacement, these improvement and replacement also should be considered as protection scope of the present invention.
Claims (9)
1. a deep ultraviolet laser produces and transmitting device, described deep ultraviolet laser produces with transmitting device and comprises: seal chamber system and vacuum system, it is characterized in that, described deep ultraviolet laser produces with transmitting device and also comprises that deep ultraviolet laser produces system and deep ultraviolet laser transmission system; Described deep ultraviolet laser produces system and deep ultraviolet laser transmission system is all positioned at described seal chamber;
Described seal chamber system comprises cavity, watch window, Ultra-Violet Laser input window, Ultra-Violet Laser output window, gas feed, gas vent and deep ultraviolet laser output window;
Described vacuum system comprises that vacuum produces system, vacuum measurement system, and Vacuum Packing System; In described Vacuum Packing System, blanketing gas is that deep ultraviolet wave band is absorbed to little high-purity gas, or without the vacuum system of blanketing gas;
Described deep ultraviolet laser generation system comprises deep ultraviolet frequency-doubling crystal device, deep ultraviolet frequency-doubling crystal angular adjustment device;
Described deep ultraviolet laser transmission system comprises deep ultraviolet optical element and deep ultraviolet laser fluorescence display element.
2. a kind of deep ultraviolet laser according to claim 1 produces and transmitting device, it is characterized in that, described deep ultraviolet laser fluorescence display element is glass, and fluorescent material etc. have the material of Presentation Function at deep ultraviolet wave band.
3. a kind of deep ultraviolet laser produces and transmitting device according to claim 1, it is characterized in that, the little deep ultraviolet laser power of vacuum deflation is counted ceramic power meter, and the photo-thermal sensing part of power meter adopts graphite, and circuit substrate part adopts the little ceramic material of venting.
4. a kind of deep ultraviolet laser produces and transmitting device according to claim 1, it is characterized in that, described high-purity gas is more than 99.9% N of purity
2, He, Ne or Ar etc. absorb little gas at deep ultraviolet wave band.
5. produce and transmitting device according to a kind of deep ultraviolet laser described in claim 1,2 any one, it is characterized in that, described deep ultraviolet laser fluorescence display element, for the moving meter that has described in utilizing the material of Presentation Function to make, described moving meter moves forward into/goes out deep ultraviolet laser light path in deep ultraviolet light path.
6. described in claim 1,2 any one, install, it is characterized in that, described deep ultraviolet laser fluorescence display element, is the aperture that has described in utilizing the material of Presentation Function to make, and described aperture is fixed in light path.
7. a kind of deep ultraviolet laser produces and transmitting device according to claim 3, it is characterized in that, described deep ultraviolet laser power is counted at the little deep ultraviolet laser power meter of vacuum deflation, and described deep ultraviolet laser power meter front end face is provided with the aperture that utilizes described deep ultraviolet display element to make.
8. a kind of deep ultraviolet laser produces and transmitting device according to claim 1, it is characterized in that, described seal chamber is combined cavity, combined cavity is individual cavity or UNICOM's cavity, and described deep ultraviolet laser produces system and described deep ultraviolet laser transmission system can be arranged in described combined cavity.
9. produce and transmitting device according to a kind of deep ultraviolet laser described in claim 1,2,3,5,6,7,8 any one, it is characterized in that, described material is the material little at vacuum deflation; Described cavity is the cavity that air-tightness is good.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410241146.5A CN104064949A (en) | 2014-05-30 | 2014-05-30 | Generation and transmission device for deep ultraviolet laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410241146.5A CN104064949A (en) | 2014-05-30 | 2014-05-30 | Generation and transmission device for deep ultraviolet laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104064949A true CN104064949A (en) | 2014-09-24 |
Family
ID=51552539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410241146.5A Pending CN104064949A (en) | 2014-05-30 | 2014-05-30 | Generation and transmission device for deep ultraviolet laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104064949A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109830884A (en) * | 2019-03-28 | 2019-05-31 | 上海交通大学 | A kind of modular VUV LASER device |
| CN110535021A (en) * | 2018-05-24 | 2019-12-03 | 中国科学院理化技术研究所 | It is a kind of to be directed toward constant wavelength broad tuning deep ultraviolet laser system |
| CN111817115A (en) * | 2020-08-24 | 2020-10-23 | 中国科学院福建物质结构研究所 | Laser vacuum sealing device |
| CN113686429A (en) * | 2020-05-19 | 2021-11-23 | 北京科益虹源光电技术有限公司 | Deep ultraviolet laser multi-parameter integrated comprehensive measurement system |
| CN115459036A (en) * | 2022-10-09 | 2022-12-09 | 深圳技术大学 | Multifunctional deep ultraviolet excimer laser transmission device with transparent structure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102192895A (en) * | 2010-03-08 | 2011-09-21 | 中国科学院物理研究所 | Apparatus for resolving time by deep ultraviolet laser |
| CN102213617A (en) * | 2011-04-08 | 2011-10-12 | 中国科学院半导体研究所 | Deep ultraviolet laser photoluminescent spectrometer |
| CN204045925U (en) * | 2014-05-30 | 2014-12-24 | 中国科学院理化技术研究所 | A kind of deep ultraviolet laser produces and transmitting device |
-
2014
- 2014-05-30 CN CN201410241146.5A patent/CN104064949A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102192895A (en) * | 2010-03-08 | 2011-09-21 | 中国科学院物理研究所 | Apparatus for resolving time by deep ultraviolet laser |
| CN102213617A (en) * | 2011-04-08 | 2011-10-12 | 中国科学院半导体研究所 | Deep ultraviolet laser photoluminescent spectrometer |
| CN204045925U (en) * | 2014-05-30 | 2014-12-24 | 中国科学院理化技术研究所 | A kind of deep ultraviolet laser produces and transmitting device |
Non-Patent Citations (3)
| Title |
|---|
| F. YANG ET AL.: "Theoretical and experimental investigations of nanosecond 177.3 nm deep-ultraviolet light by second harmonic generation in KBBF", 《APPL. PHYS. B》 * |
| SHEN-JIN ZHANG ET AL.: "High power all solid state VUV lasers", 《JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA》 * |
| ZHANG FENG-FENG ET AL.: "A picosecond widely tunable deep-ultraviolet laser for angle-resolved photoemission spectroscopy", 《CHIN. PHYS. B》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110535021A (en) * | 2018-05-24 | 2019-12-03 | 中国科学院理化技术研究所 | It is a kind of to be directed toward constant wavelength broad tuning deep ultraviolet laser system |
| CN110535021B (en) * | 2018-05-24 | 2021-02-19 | 中国科学院理化技术研究所 | Wavelength width tuning deep ultraviolet laser system with unchanged direction |
| CN109830884A (en) * | 2019-03-28 | 2019-05-31 | 上海交通大学 | A kind of modular VUV LASER device |
| CN113686429A (en) * | 2020-05-19 | 2021-11-23 | 北京科益虹源光电技术有限公司 | Deep ultraviolet laser multi-parameter integrated comprehensive measurement system |
| CN111817115A (en) * | 2020-08-24 | 2020-10-23 | 中国科学院福建物质结构研究所 | Laser vacuum sealing device |
| CN111817115B (en) * | 2020-08-24 | 2021-12-14 | 中国科学院福建物质结构研究所 | Laser vacuum sealing device |
| CN115459036A (en) * | 2022-10-09 | 2022-12-09 | 深圳技术大学 | Multifunctional deep ultraviolet excimer laser transmission device with transparent structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Fabricant et al. | Binospec: a wide-field imaging spectrograph for the MMT | |
| CN104064949A (en) | Generation and transmission device for deep ultraviolet laser | |
| CN101650225B (en) | Absolute spectral radiance luminance responsivity calibrating system utilizing wide tunable laser | |
| CN204045925U (en) | A kind of deep ultraviolet laser produces and transmitting device | |
| CN108572061B (en) | Full-caliber harmonic conversion efficiency measuring system and measuring method thereof | |
| CN104104006A (en) | Device for generation of high-power vacuum ultraviolet laser by direct frequency multiplication and method thereof | |
| CN103682952A (en) | Invisible laser with light output path mark and marking method of light output path | |
| CN110456375A (en) | A kind of range-measurement system of high precision online measuring | |
| WO2009047888A1 (en) | Solid-state laser device and image display device | |
| CN101706578B (en) | Eyesafe laser range finder | |
| CN103185665B (en) | The measuring method of birefringence element optical axis | |
| CN215865468U (en) | Sound field visualization-based sound velocity measurement device | |
| CN104833642A (en) | Liquid light transmitting property measurement device with adjustable optical path | |
| CN107196181A (en) | A kind of C mount encapsulation semiconductor laser pumping Low threshold micro-slice lasers and its control method without coupled system | |
| CN202092950U (en) | Scaling gas sample cell device in spectral measurement | |
| CN202975377U (en) | Parallelogram prism | |
| US3621273A (en) | Optical second harmonic generator | |
| CN110535021B (en) | Wavelength width tuning deep ultraviolet laser system with unchanged direction | |
| CN102013621B (en) | Tunable dual-frequency laser | |
| US6855932B2 (en) | Detector arrangement for energy measurement of pulsed x-ray radiation | |
| CN111404030B (en) | Novel Faraday anomalous dispersion Rb atom filter and method | |
| King | A 20ft Ebert grating spectrograph | |
| RU2548375C1 (en) | Laser module | |
| CN109709078B (en) | Transmission-type atmospheric visibility measuring device and method based on single photon detection technology | |
| CN109579982A (en) | A kind of Brewster window, Brewster window angle computation method and adjusting method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140924 |