CN1039354C - 带有固溶体涂镀层的工件及其生产方法、生产设备和应用 - Google Patents
带有固溶体涂镀层的工件及其生产方法、生产设备和应用 Download PDFInfo
- Publication number
- CN1039354C CN1039354C CN90106984A CN90106984A CN1039354C CN 1039354 C CN1039354 C CN 1039354C CN 90106984 A CN90106984 A CN 90106984A CN 90106984 A CN90106984 A CN 90106984A CN 1039354 C CN1039354 C CN 1039354C
- Authority
- CN
- China
- Prior art keywords
- coating
- workpiece
- solid solution
- layer
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
Claims (23)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH303789 | 1989-08-21 | ||
CH3037/89 | 1989-08-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1049688A CN1049688A (zh) | 1991-03-06 |
CN1039354C true CN1039354C (zh) | 1998-07-29 |
Family
ID=4247204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN90106984A Expired - Lifetime CN1039354C (zh) | 1989-08-21 | 1990-08-16 | 带有固溶体涂镀层的工件及其生产方法、生产设备和应用 |
Country Status (9)
Country | Link |
---|---|
EP (1) | EP0413853B1 (zh) |
JP (1) | JP3388736B2 (zh) |
KR (1) | KR0148355B1 (zh) |
CN (1) | CN1039354C (zh) |
AT (1) | ATE133718T1 (zh) |
AU (1) | AU645758B2 (zh) |
BR (1) | BR9004095A (zh) |
CA (1) | CA2023049C (zh) |
DE (1) | DE58909591D1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE120807T1 (de) * | 1989-11-22 | 1995-04-15 | Balzers Hochvakuum | Werkzeug oder instrument mit einer verschleissresistenten hartschicht zum be- oder verarbeiten von organischem material. |
CH680369A5 (zh) * | 1989-11-22 | 1992-08-14 | Balzers Hochvakuum | |
DE69432165T2 (de) * | 1993-03-15 | 2003-12-11 | Kabushiki Kaisha Kobeseikosho, Kobe | Vorrichtung und system zum lichtbogenionenplattieren |
EP0625588B1 (de) * | 1993-05-21 | 2001-10-24 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Plasmapolymer-Schichtenfolge als Hartstoffschicht mit definiert einstellbarem Adhäsionsverhalten |
DE29615190U1 (de) * | 1996-03-11 | 1996-11-28 | Balzers Verschleissschutz GmbH, 55411 Bingen | Anlage zur Beschichtung von Werkstücken |
DE10002861A1 (de) * | 2000-01-24 | 2001-08-09 | Walter Ag | Zerspannungswerkzeug mit Carbonitrid-Beschichtung |
DE10018143C5 (de) † | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
JP3637882B2 (ja) † | 2000-08-31 | 2005-04-13 | 住友電気工業株式会社 | 表面被覆窒化硼素焼結体工具 |
DE102004010285A1 (de) | 2004-03-03 | 2005-09-29 | Walter Ag | Beschichtung für ein Schneidwerkzeug sowie Herstellungsverfahren |
CN103659954B (zh) * | 2014-01-02 | 2016-06-29 | 王梁 | 一种耐磨钢模板及制备方法 |
WO2021049257A1 (ja) * | 2019-09-13 | 2021-03-18 | 国立大学法人東海国立大学機構 | スカイビング加工装置およびスカイビング加工方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0093706A1 (de) * | 1982-05-05 | 1983-11-09 | Voest-Alpine Stahl Aktiengesellschaft | Werkzeug und Verfahren zu dessen Herstellung |
US4448802A (en) * | 1981-03-13 | 1984-05-15 | Balzers Aktiengesellschaft | Method and apparatus for evaporating material under vacuum using both an arc discharge and electron beam |
EP0190179A1 (de) * | 1984-07-11 | 1986-08-13 | Battelle-Institut e.V. | Verfahren zur verbesserung des farbeindrucks von titannitridschichten |
EP0288316A2 (en) * | 1987-04-23 | 1988-10-26 | Matsushita Electric Industrial Co., Ltd. | Compositionally modulated, nitrided alloy films and method for making the same |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD246571A1 (de) * | 1986-03-14 | 1987-06-10 | Hochvakuum Dresden Veb | Einrichtung zur plasmagestuetzten abscheidung von mischschichten |
JPH0732961B2 (ja) * | 1986-10-03 | 1995-04-12 | 三菱マテリアル株式会社 | 表面被覆炭化タングステン基超硬合金製切削工具 |
AT387186B (de) * | 1987-05-04 | 1988-12-12 | Ver Edelstahlwerke Ag | Beschichteter hartmetallkoerper |
EP0306612B2 (de) * | 1987-08-26 | 1996-02-28 | Balzers Aktiengesellschaft | Verfahren zur Aufbringung von Schichten auf Substraten |
-
1989
- 1989-11-23 EP EP89121634A patent/EP0413853B1/de not_active Expired - Lifetime
- 1989-11-23 AT AT89121634T patent/ATE133718T1/de not_active IP Right Cessation
- 1989-11-23 DE DE58909591T patent/DE58909591D1/de not_active Expired - Lifetime
- 1989-12-07 KR KR1019890018128A patent/KR0148355B1/ko not_active IP Right Cessation
- 1989-12-28 JP JP33882289A patent/JP3388736B2/ja not_active Expired - Lifetime
-
1990
- 1990-08-09 CA CA002023049A patent/CA2023049C/en not_active Expired - Lifetime
- 1990-08-16 CN CN90106984A patent/CN1039354C/zh not_active Expired - Lifetime
- 1990-08-20 BR BR909004095A patent/BR9004095A/pt not_active IP Right Cessation
- 1990-08-20 AU AU61122/90A patent/AU645758B2/en not_active Ceased
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4448802A (en) * | 1981-03-13 | 1984-05-15 | Balzers Aktiengesellschaft | Method and apparatus for evaporating material under vacuum using both an arc discharge and electron beam |
EP0093706A1 (de) * | 1982-05-05 | 1983-11-09 | Voest-Alpine Stahl Aktiengesellschaft | Werkzeug und Verfahren zu dessen Herstellung |
EP0190179A1 (de) * | 1984-07-11 | 1986-08-13 | Battelle-Institut e.V. | Verfahren zur verbesserung des farbeindrucks von titannitridschichten |
EP0288316A2 (en) * | 1987-04-23 | 1988-10-26 | Matsushita Electric Industrial Co., Ltd. | Compositionally modulated, nitrided alloy films and method for making the same |
Also Published As
Publication number | Publication date |
---|---|
AU6112290A (en) | 1991-02-21 |
CN1049688A (zh) | 1991-03-06 |
EP0413853A1 (de) | 1991-02-27 |
CA2023049A1 (en) | 1991-02-22 |
KR0148355B1 (ko) | 1998-11-02 |
JP3388736B2 (ja) | 2003-03-24 |
DE58909591D1 (de) | 1996-03-14 |
AU645758B2 (en) | 1994-01-27 |
JPH0382748A (ja) | 1991-04-08 |
ATE133718T1 (de) | 1996-02-15 |
KR910004837A (ko) | 1991-03-29 |
EP0413853B1 (de) | 1996-01-31 |
BR9004095A (pt) | 1991-09-03 |
CA2023049C (en) | 2002-01-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3386484B2 (ja) | コーティングされた高耐摩耗性工具および高耐摩耗性工具に物理的にコーティングを施す方法 | |
Randhawa et al. | A review of cathodic arc plasma deposition processes and their applications | |
EP0842306B1 (en) | Improvements in and relating to methods for improving the sputter desposition of metal-sulphur coatings, e.g. molybdenum disulphide coatings and to improved coatings | |
EP1436441B2 (en) | Method for applying metallic alloy coatings and coated component | |
CN1039354C (zh) | 带有固溶体涂镀层的工件及其生产方法、生产设备和应用 | |
KR101779634B1 (ko) | 혼합 결정 층을 증착하는 pvd 하이브리드 방법 | |
US20060251917A1 (en) | Method for magnetron sputter deposition | |
CN101701332B (zh) | 中频磁控辉光放电法制备复合类金刚石涂层的方法 | |
CN101457359B (zh) | 一种Ti-Si-N纳米晶-非晶复合超硬涂层的制备方法 | |
CN101113516A (zh) | 一种纳米复合类金刚石涂层制备方法 | |
CN1136332C (zh) | 脉冲辅助过滤电弧沉积薄膜装置和方法 | |
CN102864411A (zh) | 一种cn-mcn超硬自润滑纳米复合涂层及其制备方法 | |
CN112063975A (zh) | 一种通过调制强流脉冲电弧制备ta-C涂层的方法 | |
Weise et al. | Influence of magnetron sputtering process parameters on wear properties of steel/Cr3Si or Cr/MoSx | |
CN1028546C (zh) | 加弧辉光离子渗金属技术及设备 | |
KR100505003B1 (ko) | 티아이 에이엘 에스아이 엔계 경질코팅막의 증착방법 | |
EP1642998B1 (en) | Production device for multiple-system film and coating tool for multiple-system film | |
JP2005036276A (ja) | 複合構造薄膜製造方法及び装置 | |
CN2496878Y (zh) | 一种用于工业生产中制备超硬薄膜的离子源装置 | |
JPS63195260A (ja) | 被覆材料とその製造方法 | |
KR100461980B1 (ko) | Ti-Si-N계 경질코팅막의 증착방법 | |
Gabriel | Vacuum arc discharges used to deposit hard wear resistant coatings onto tools | |
JPH0791635B2 (ja) | 耐摩耗性硬質被膜の製造方法 | |
Freller et al. | Low temperature vapour phase coating processes for wear resistant coatings on high duty tools | |
US20060222767A1 (en) | Production device for multiple-system film and coating tool for multiple-system film |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C15 | Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993) | ||
OR01 | Other related matters | ||
ASS | Succession or assignment of patent right |
Owner name: ALLIKON TRADE CO., LTD. (TELVBAHE) Free format text: FORMER OWNER: OC OERLIKON BALZERS CO., LTD. Effective date: 20100413 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: OC OERLIKON BALZERS CO., LTD. Free format text: FORMER NAME: YONAKSIS BALZERS CO., LTD. Owner name: YONAKSIS BALZERS CO., LTD. Free format text: FORMER NAME: BALZERS CO., LTD. |
|
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: LIECHTENSTEIN BALZERS TO: TRUBBACH, SWITZERLAND |
|
CP01 | Change in the name or title of a patent holder |
Address after: Liechtenstein Barr Che J Patentee after: OC OERLIKON BALZERS AG Address before: Liechtenstein Barr Che J Patentee before: UNAXIS BALZERS AG Address after: Liechtenstein Barr Che J Patentee after: UNAXIS BALZERS AG Address before: Liechtenstein Barr Che J Patentee before: BALZERS AG |
|
TR01 | Transfer of patent right |
Effective date of registration: 20100413 Address after: Swiss Te Lui Bach Patentee after: OERLIKON TRADING AG, TRuBBACH Address before: Liechtenstein Barr Che J Patentee before: OC Oerlikon Balzers AG |
|
C17 | Cessation of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 19980729 |