CN102998483A - Atomic force microscope system with quartz tuning fork - Google Patents

Atomic force microscope system with quartz tuning fork Download PDF

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Publication number
CN102998483A
CN102998483A CN 201110268724 CN201110268724A CN102998483A CN 102998483 A CN102998483 A CN 102998483A CN 201110268724 CN201110268724 CN 201110268724 CN 201110268724 A CN201110268724 A CN 201110268724A CN 102998483 A CN102998483 A CN 102998483A
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fork
quartz tuning
atomic force
signal source
force microscope
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CN 201110268724
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要华
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Abstract

The invention discloses a method for controlling the distance from a needle point of an atomic force microscope to a sample by the aid of a quartz tuning fork and an atomic force microscope system with a quartz tuning fork. The atomic force microscope system is built on the basis of the method, and comprises an atomic force needle (1), a quartz tuning fork detector (2), a quartz tuning fork driving and detecting circuit (3), a three-dimensional sample position controller (4), an atomic force microscope controller (5) and other facilities of an atomic force microscope, and the other facilities of the atomic force microscope include a shock-resistant isolation component, a needle feeding motor controller (6) and the like. The quartz tuning fork driving and detecting circuit (3) comprises a signal source A and a signal source B, the amplitude of the signal source A and the amplitude of the signal source B are identical, the phase position of the signal source A is opposite to the phase position of the signal source B, the frequency and the amplitude of each signal source can be adjusted simultaneously, the signal source B is connected with a capacitor, and the signal source A is connected with the quartz tuning fork detector. The other end of the quartz tuning fork detector is connected with the other end of the capacitor and a resistor, and the other end of the resistor is grounded. Voltage difference between two ends of the resistor is amplified by an amplifier and then is outputted in a phase lock manner.

Description

A kind of quartz tuning-fork atomic force microscopy mirror system
Technical field
The present invention relates to a kind of atomic force microscopy mirror system, the characteristics of this system are: the spacing of needle point and sample is controlled with quartz tuning-fork.
Background technology
The Gerd Binning in Zurich, Switzerland laboratory in 1986 and Heinrich Rohrer develop in the world First atomic force microscope (Atomic Force Microscope is called for short AFM).AFM makes the mankind can observe in real time single atom at the ordered state of material surface and the physico-chemical property relevant with the surface electronic behavior, and great meaning and application prospect are widely arranged in the research in the fields such as Surface Science, material science, life science.Its basic functional principle is: utilize the tip on the extremely responsive flexible cantilever of faint power is scanned sample surfaces, the interaction force of tip and sample surfaces is so that cantilever produces small bending, utilize the optical lever principle to detect the signal of this bending, and be used as feedback; Constant by confining force can obtain the feature image of the sample surfaces under the constant force state.By the various microscopes that it is derived, make people can observe intuitively the structure of matter of Nano grade even atomic level, thereby promoted human development in an all-round way in nanosecond science and technology.But before using atomic force microscope that sample is observed, the user must regulate a plurality of knobs of optical lever, just can obtain good image, and this experience to the operator, ability have higher requirement.The invention provides does not a kind ofly need to regulate optical lever and just can use microscopical method, and all adjustings can all realize on computers, have simplified the operation of instrument.
Summary of the invention
Interaction force among the present invention between sample and needle point can characterize with the piezoelectric effect of quartz tuning-fork, and the output electrical signals of tuning fork comes spacing between Quality control and needle point as feedback signal.The present invention does not need to regulate optical lever in use, and all operations can all realize on computers.
For achieving the above object, the present invention has adopted following technical scheme:
A kind of quartz tuning-fork control atomic-force microscope needle-tip and sample interval method utilized is characterized in that,
The needle point that chemical corrosion is formed or carbon nano-tube are contained on one of the quartz tuning-fork fork branch that the surface scribbles electrode, the direction of needle point and quartz tuning-fork electrode surface perpendicular direction.One utmost point of the electrode of quartz tuning-fork connects a frequency and the adjustable signal source A of amplitude, another utmost point connects the electric capacity with the identical capacitive reactance of direct capacitance (shunt capacitance) of tuning fork, has the signal source B of opposite phase at one of another termination of electric capacity D and signal source A.Connect one from 1 kilohm to 100 kilohms resistance R at electric capacity and quartz tuning-fork tie point, and an amplifier C with high input impedance broadband in parallel with R.The other end ground connection of resistance.The output amplitude of amplifier C is inputted the feed-back channel of atomic force microscope controller, be used for controlling the spacing of needle point and sample, and phase place can be inputted atomic force microscope controller data acquisition channel.
A kind of atomic force microscopy mirror system that utilizes quartz tuning-fork control needle point and sample interval is characterized in that this system comprises:
1. atomic force probe, it can be metal needle point or the carbon nano-tube that is formed by chemical corrosion,
2. quartz tuning-fork detector
3. quartz tuning-fork drives and detection circuit, and it has two amplitudes identical, the signal source A of single spin-echo and B, and their frequency and amplitude can be regulated simultaneously, and wherein signal source B connects an electric capacity D (5-100pF), and signal source A connects the quartz tuning-fork detector.The other end of quartz tuning-fork detector is connected resistance R and is connected (1-100 kilohm) with electric capacity D.The other end ground connection of resistance R.The voltage difference at resistance R two ends is amplified through phase-locked output by amplifier.
4. the three-dimensional sample positioner can be three-dimensional piezoelectric ceramics displacement actuator.
5. atomic force microscope controller
6. other equipments of atomic force microscope, such as shockproof isolation, inserting needle motor control etc.
The present invention utilizes the dual signal source offset current, has reduced the direct capacitance of quartz tuning-fork to the impact of the background current in the electric signal of surveying, and has improved the quartz tuning-fork detector sensitivity, has improved the resolution of atomic force microscope.
Description of drawings:
Fig. 1 is the construction module figure of the case study on implementation of a better quartz tuning-fork atomic force microscopy mirror system of the present invention;
What each mark represented respectively among the figure is: the 1-atomic force probe, and 2-quartz tuning-fork detector, the 3-quartz tuning-fork drives and detection circuit, 4-three-dimensional sample positioner, 5-atomic force microscope controller, other equipments of 6-atomic force microscope
Fig. 2 is the synoptic diagram of the case study on implementation of better quartz tuning-fork driving of the present invention and detection circuit:
What each mark represented respectively among the figure is: the signal source that 301-amplitude and frequency are adjustable, 2-quartz tuning-fork detector, 302-sign-changing amplifier, 303-forward amplifier, 304-electric capacity D, 305-resistance R, 306-amplifier C, the phase-locked functional block of 308-.
Embodiment
Below in conjunction with accompanying drawing and a better case study on implementation technical scheme of the present invention is further described.
Consult Fig. 1, this quartz tuning-fork atomic force microscopy mirror system comprises that other equipments of atomic force probe, quartz tuning-fork detector, quartz tuning-fork driving and detection circuit, three-dimensional sample positioner, atomic force microscope controller and atomic force microscope form.
The needle point of atomic force microscope can be carbon nano-tube, also can be to be processed through chemical corrosion by gold or tungsten filament, about 2 millimeter of length.
Quartzy detector employing resonant frequency in electron device is 32.768 kilo hertzs quartz tuning-fork.During assembling glue smeared at glass sheet and be split into film, then with head one brush on glass sheet of quartz tuning-fork, the head at tuning fork is stained with glue like this.Contact with the tuning fork head that is stained with glue and the afterbody of needle point, form the complex of needle point detector.During system works, quartzy detector is the vibration of several nanometers as amplitude near resonant frequency under the effect of driving voltage, and when needle point during near sample surfaces, amplitude approaches the surface along with needle point and reduces.
The driving of quartz tuning-fork and detection circuit can be consulted Fig. 2: signal source (301) and sign-changing amplifier (302) form signal source A, and signal source (301) and forward amplifier (303) form signal source B.Signal source A and B connect respectively tuning fork detector (2) and electric capacity D (304).The other end of electric capacity D links to each other with the other end of detector (2), then receives an end of resistance R (305), the other end ground connection of resistance R.When tuning fork during in resonance state, because the electric current that the direct capacitance of the electric current of electric capacity D (304) and tuning fork forms cancels out each other at an end of resistance R, so the electric current of the resistance R of flowing through equals the electric current of dynamic resistance, electric capacity and inductance by quartz tuning-fork.And the voltage at resistance R two ends is proportional to electric current, and this voltage passes through amplitude and the phase place of the effect output AC signal of phase-locked functional module (307) after amplifier (306) amplifies.Can survey delicately the amplitude of quartzy detector vibration and the change of phase place by this amplitude and phase place.
Sample is placed on the three-D displacement controller (4); When atomic force microscope was worked, atomic force microscope controller (5) vibrated quartz tuning-fork by driving and the detection circuit (3) of control quartz tuning-fork near resonant frequency.Driving arrangement approaches sample with needle point, and when the output voltage amplitude of quartz tuning-fork was reduced to certain value (such as 80%), driving arrangement stopped to drive; With the amplitude of the tuning fork feedback signal as the control decorum, regulate height of specimen by three-D displacement controller (4), so that quartz tuning-fork (2) keeps constant amplitude.In the situation that keeps feedback, other two dimensions of scanning three-dimensional displacement controller (4) record the phase place of elevation information and the tuning fork detector output signal of three D controllers, form height and the phase image of sample.

Claims (6)

1. method of utilizing quartz tuning-fork control atomic-force microscope needle-tip and sample interval, it is characterized in that: needle point or carbon nano-tube are contained on the fork branch of quartz tuning-fork that the surface scribbles electrode the direction of needle point and quartz tuning-fork electrode surface perpendicular direction.One utmost point of the electrode of quartz tuning-fork connects a frequency and the adjustable signal source A of amplitude, another utmost point connects the electric capacity with the identical capacitive reactance of direct capacitance (shunt capacitance) of tuning fork, has the signal source B of opposite phase at one of another termination of electric capacity D and signal source A.Connect one from 1 kilohm to 100 kilohms resistance R at electric capacity and quartz tuning-fork tie point, and the amplifier of the high bandwidth with high input impedance in parallel with it, the other end ground connection of resistance.The output amplitude of amplifier is inputted the feed-back channel of atomic force microscope, is used for controlling the spacing of needle point and sample, and phase place is then inputted data acquisition channel.
2. quartz tuning-fork atomic force microscopy mirror system, it is characterized in that, it comprises: other equipments of atomic force probe (1), quartz tuning-fork detector (2), quartz tuning-fork driving and detection circuit (3), three-dimensional sample positioner (4), atomic force microscope controller (5) and atomic force microscope, and such as (6) such as shockproof isolation, inserting needle motor controls.Wherein quartz tuning-fork drives and comprises that with detection circuit (3) two amplitudes are identical, the signal source A of single spin-echo and B, their frequency and amplitude can be regulated simultaneously, and wherein signal source B connects an electric capacity D (5-100pF), and signal source A connects the quartz tuning-fork detector.The other end of quartz tuning-fork detector is connected resistance R and is connected (1-100 kilohm), the other end ground connection of resistance R with electric capacity D.The voltage difference at resistance R two ends is amplified by the phase-locked atomic force microscope controller that outputs to by amplifier.
3. a kind of quartz tuning-fork atomic force microscopy mirror system according to claim 2, the signal source A of its single spin-echo and B can add a forward amplifier and a sign-changing amplifier forms by same signal source.
4. a kind of quartz tuning-fork atomic force microscopy mirror system according to claim 2, its needle point can be metal needle point or the carbon nano-tube that chemical corrosion forms.
5. a kind of quartz tuning-fork atomic force microscopy mirror system according to claim 3, its needle point can be metal needle point or the carbon nano-tube that chemical corrosion forms.
6. a kind of quartz tuning-fork atomic force microscopy mirror system according to claim 4, needle point in the operation that is assembled on the tuning fork detector is: glue is smeared at glass sheet be split into film, the head of quartz tuning-fork is obtained glue membrane from glass sheet.Assemble mutually being stained with the tuning fork head of glue and the afterbody of needle point, form the complex of needle point detector.
CN 201110268724 2011-09-13 2011-09-13 Atomic force microscope system with quartz tuning fork Pending CN102998483A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103346751A (en) * 2013-06-18 2013-10-09 中国科学院苏州纳米技术与纳米仿生研究所 Tuning fork matching circuit
CN103808967A (en) * 2014-02-23 2014-05-21 北京航空航天大学 Imaging system of atomic force microscope on the basis of quartz tuning fork probe
CN108414791A (en) * 2018-01-22 2018-08-17 华南理工大学 Single-screw mandrel in-situ testing device
CN111751577A (en) * 2019-03-29 2020-10-09 中国科学院物理研究所 Tuning fork type atomic force microscope probe and application
CN112985251A (en) * 2021-03-24 2021-06-18 新乡学院 Microcosmic surface appearance measuring device and method
CN113092825A (en) * 2021-03-05 2021-07-09 中山大学 Atomic force microscope system and current detection method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103346751A (en) * 2013-06-18 2013-10-09 中国科学院苏州纳米技术与纳米仿生研究所 Tuning fork matching circuit
CN103808967A (en) * 2014-02-23 2014-05-21 北京航空航天大学 Imaging system of atomic force microscope on the basis of quartz tuning fork probe
CN103808967B (en) * 2014-02-23 2015-11-25 北京航空航天大学 A kind of imaging system of the atomic force microscope based on quartz tuning-fork probe
CN108414791A (en) * 2018-01-22 2018-08-17 华南理工大学 Single-screw mandrel in-situ testing device
CN111751577A (en) * 2019-03-29 2020-10-09 中国科学院物理研究所 Tuning fork type atomic force microscope probe and application
CN113092825A (en) * 2021-03-05 2021-07-09 中山大学 Atomic force microscope system and current detection method thereof
CN113092825B (en) * 2021-03-05 2022-12-30 中山大学 Atomic force microscope system and current detection method thereof
CN112985251A (en) * 2021-03-24 2021-06-18 新乡学院 Microcosmic surface appearance measuring device and method

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